JPH09106571A - Light reflector - Google Patents

Light reflector

Info

Publication number
JPH09106571A
JPH09106571A JP7265776A JP26577695A JPH09106571A JP H09106571 A JPH09106571 A JP H09106571A JP 7265776 A JP7265776 A JP 7265776A JP 26577695 A JP26577695 A JP 26577695A JP H09106571 A JPH09106571 A JP H09106571A
Authority
JP
Japan
Prior art keywords
layer
sputtering
light reflector
substrate
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7265776A
Other languages
Japanese (ja)
Inventor
Hiroyuki Nagao
博幸 長尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Plastics Inc
Original Assignee
Mitsubishi Plastics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Plastics Inc filed Critical Mitsubishi Plastics Inc
Priority to JP7265776A priority Critical patent/JPH09106571A/en
Publication of JPH09106571A publication Critical patent/JPH09106571A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve adhesion and reflecting property by successively forming an Al2 O3 or SiO2 layer and an Ag layer by sputtering on a resin substrate. SOLUTION: An Al2 O3 or SiO2 layer and an Ag layer are successively formed by sputtering on a resin substrate to obtain the objective light reflector. The reflectance of a reflecting layer disposed on an optical disk or a liq. crystal display body is preferably >=90%. Since the Ag reflecting layer of this reflector is formed by sputtering, Ag covers the substrate even in the case of a complex shape and the Ag layer of a uniform thickness can be formed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】樹脂基板上に高反射率の反射
層を有する光反射体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light reflector having a high reflectance reflecting layer on a resin substrate.

【0002】[0002]

【従来の技術、および、発明が解決しようとする課題】
近年、光ディスクあるいは液晶表示体等が情報媒体とし
て注目されている。これら情報媒体には反射層が設けら
れ、反射光により情報を読みだしたり、反射光により情
報を表示したりする。一般的に使用されている反射層
は、樹脂あるいはガラス基板上にスパッタリングあるい
は真空蒸着によりAl層を形成したものである。
2. Related Art and Problems to be Solved by the Invention
In recent years, optical discs, liquid crystal displays, and the like have been receiving attention as information media. A reflective layer is provided on these information media to read information by reflected light or display information by reflected light. A commonly used reflective layer is a resin or glass substrate on which an Al layer is formed by sputtering or vacuum deposition.

【0003】Al層は安価であるが反射率が低く、高い
反射率を必要とする情報媒体には適していない。そこ
で、高価ではあるが反射率の高いAgを用いたAg反射
層を使用した媒体が提案されている。しかし、Ag反射
層は樹脂基板と密着性が悪く、特に、複雑な形状をした
樹脂基板ではすぐにAg反射層が剥がれてしまう。そこ
で、複雑な形状した樹脂基板に反射率の高いAg反射層
を備えた光反射体が望まれていた。
The Al layer is inexpensive but has a low reflectance and is not suitable for an information medium which requires a high reflectance. Therefore, a medium using an Ag reflecting layer using Ag, which is expensive but has high reflectance, has been proposed. However, the Ag reflective layer has poor adhesion to the resin substrate, and in particular, the Ag reflective layer is easily peeled off when the resin substrate has a complicated shape. Therefore, there has been a demand for a light reflector having a highly reflective Ag reflective layer on a resin substrate having a complicated shape.

【0004】[0004]

【課題を解決するための手段】本発明の要旨は、樹脂基
板上に、スパッタリングにより形成されたAl
あるいはSiO層と、スパッタリングにより形成され
たAg層とを順次設けたことを特徴とする光反射体であ
る。
The gist of the present invention is that an Al 2 O 3 layer or SiO 2 layer formed by sputtering and an Ag layer formed by sputtering are sequentially provided on a resin substrate. It is a characteristic light reflector.

【0005】[0005]

【発明の実施の形態】本発明では、樹脂基板上にAl
層あるいはSiO層をスパッタリングにより形成
する。スパッタリングを用いることにより、複雑な形状
をした樹脂基板、例えば、光ディスクのように凹凸のピ
ットが形成されている樹脂基板であっても、凹凸にAl
あるいはSiOが周り込み均一な厚みの層を形
成することができる。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, Al 2 is formed on a resin substrate.
An O 3 layer or SiO 2 layer is formed by sputtering. Even if a resin substrate having a complicated shape is formed by using sputtering, for example, a resin substrate having uneven pits such as an optical disc, Al
2 O 3 or SiO 2 can be wrapped around to form a layer having a uniform thickness.

【0006】Al層あるいはSiO層はAg層
との密着性に優れる。しかし、層厚が10nm未満では
層を形成するに不十分な厚みであり、30nmを越すと
層の引張り応力が大きくなり過ぎ、密着性が低下する。
Al層あるいはSiO層を作製するにあたり、
ターゲットにAlあるいはSiOを用いる方
法、あるいは、ターゲットにAlあるいはSiを用いて
スパッタリング時に酸素ガスを導入する方法等がある。
The Al 2 O 3 layer or SiO 2 layer has excellent adhesion to the Ag layer. However, if the layer thickness is less than 10 nm, the thickness is insufficient to form a layer, and if it exceeds 30 nm, the tensile stress of the layer becomes too large, and the adhesion decreases.
In producing the Al 2 O 3 layer or the SiO 2 layer,
There is a method of using Al 2 O 3 or SiO 2 for the target, a method of using Al or Si for the target, and introducing oxygen gas during sputtering.

【0007】Al層あるいはSiO層上に、ス
パッタリングによりAg層を形成する。光ディスクある
いは液晶表示体等に設けられる反射層の反射率は90%
以上であることが好ましい。Ag反射層では純度が95
%以上あれば、反射層の反射率が90%以上を満たすこ
とができ、他の5%の構成は特に限定されない。本発明
では、Ag反射層をスパッタリングにより形成するの
で、複雑な形状でもAgが周り込み均一な厚みのAg層
を形成することができる。
An Ag layer is formed on the Al 2 O 3 layer or the SiO 2 layer by sputtering. The reflectance of the reflective layer provided on the optical disc or the liquid crystal display is 90%.
It is preferable that it is above. The Ag reflective layer has a purity of 95.
% Or more, the reflectance of the reflective layer can satisfy 90% or more, and the other 5% is not particularly limited. In the present invention, since the Ag reflective layer is formed by sputtering, it is possible to form an Ag layer having a uniform thickness and having a uniform thickness.

【0008】基板に使用される樹脂は特に限定されない
が、一般的に光ディスクあるいは液晶表示体等に使用さ
れる樹脂は、例えばポリカーボネート(以下、PCと略
す)樹脂あるいはポリメチルメタアクリレート(以下、
PMMAと略す)樹脂である。また、Ag層の耐蝕を防
止するために、有機あるいは無機の保護層を設けてもよ
い。
The resin used for the substrate is not particularly limited, but resins generally used for optical disks or liquid crystal displays are, for example, polycarbonate (hereinafter abbreviated as PC) resin or polymethylmethacrylate (hereinafter,
It is a resin (abbreviated as PMMA). In addition, an organic or inorganic protective layer may be provided in order to prevent corrosion resistance of the Ag layer.

【0009】[0009]

【実施例】【Example】

(実施例1)PC樹脂からなる表面に微小な凹凸がある
基板に、RFマグネトロンスパッタリング方式で層厚2
0nmのAl層を形成した後、DCスパッタリン
グ方式で層厚200nmのAg反射層を形成した。さら
に、紫外線硬化樹脂を塗布硬化して、Ag層を有する光
反射体を得た。
(Example 1) A layer thickness of 2 was formed by a RF magnetron sputtering method on a substrate made of PC resin having fine irregularities on its surface.
After forming a 0 nm Al 2 O 3 layer, a 200 nm thick Ag reflective layer was formed by a DC sputtering method. Further, an ultraviolet curable resin was applied and cured to obtain a light reflector having an Ag layer.

【0010】(実施例2,3)実施例2は実施例1のA
層のかわりにSiO層とした以外は実施例1
と同様にして光反射体を得た。実施例3は実施例1のP
C樹脂基板のかわりにPMMA樹脂基板とした以外は実
施例1と同様にして光反射体を得た。
(Embodiments 2 and 3) Embodiment 2 is A of Embodiment 1.
Example 1 except that a SiO 2 layer was used instead of the l 2 O 3 layer.
A light reflector was obtained in the same manner as. Example 3 is P of Example 1.
A light reflector was obtained in the same manner as in Example 1 except that the PMMA resin substrate was used instead of the C resin substrate.

【0011】(比較例1,2)PC樹脂からなる表面に
微小な凹凸がある基板に、直接、DCスパッタリング方
式で層厚200nmのAg反射層を形成した。さらに、
紫外線硬化樹脂を塗布硬化して、Ag層を有する比較例
1の光反射体を得た。PC樹脂からなる表面に微小な凹
凸がある基板に、直接、蒸着方式で層厚200nmのA
g反射層を形成した。さらに、紫外線硬化樹脂を塗布硬
化して、Ag層を有する比較例2の光反射体を得た。
(Comparative Examples 1 and 2) An Ag reflective layer having a layer thickness of 200 nm was directly formed on a substrate made of PC resin having fine irregularities on its surface by a DC sputtering method. further,
An ultraviolet curable resin was applied and cured to obtain a light reflector of Comparative Example 1 having an Ag layer. A 200 nm layer thickness A was directly deposited on a substrate made of PC resin with minute irregularities on the surface by vapor deposition.
A g-reflecting layer was formed. Further, an ultraviolet curable resin was applied and cured to obtain a light reflector of Comparative Example 2 having an Ag layer.

【0012】実施例1〜3および比較例1,2で得られ
た光反射体の密着性、つきまわり性、反射率を調べた。
結果を表1にまとめた。密着性はテープを光反射体の表
面に貼った後、テープを剥離した時のAg層の剥離状態
を調べた。判定は以下の通りである。○は剥離が生じな
かった。×は剥離を生じた。
The adhesion, throwing power and reflectance of the light reflectors obtained in Examples 1 to 3 and Comparative Examples 1 and 2 were examined.
The results are summarized in Table 1. For the adhesiveness, the peeling state of the Ag layer when the tape was peeled off after the tape was stuck on the surface of the light reflector was examined. The judgment is as follows. In the case of ○, peeling did not occur. × produced peeling.

【0013】つきまわり性は基板表面を目視で調べた。
判定は以下の通りである。○は基板全面にAg層が製層
されていた。×は一部Ag層が製層されていなかった。
反射率は基板表面に633nmのレーザを照射した。判
定は以下の通りである。○は反射率が90%以上であ
る。×は反射率が90%未満である。
The throwing power was visually examined on the substrate surface.
The judgment is as follows. In the case of ◯, the Ag layer was formed on the entire surface of the substrate. In the case of ×, the Ag layer was not partially formed.
The reflectance was such that the substrate surface was irradiated with a laser of 633 nm. The judgment is as follows. ◯ has a reflectance of 90% or more. X has a reflectance of less than 90%.

【0014】[0014]

【表1】 表1に示すように、本発明の光反射体である実施例1〜
3は密着性、つきまわり性、反射率ともに優れた特性を
示しているが、Al層あるいはSiO層を有さ
ない比較例1,2は反射層がAgであるため反射率は満
足するが、Ag層の密着性、つきまわり性が劣る。
[Table 1] As shown in Table 1, Examples 1 to 1 which are light reflectors of the present invention
No. 3 has excellent adhesiveness, throwing power and reflectance, but Comparative Examples 1 and 2 not having an Al 2 O 3 layer or a SiO 2 layer have a reflectance of Ag because the reflecting layer is Ag. Although satisfactory, the adhesion and throwing power of the Ag layer are poor.

【0015】[0015]

【発明の効果】複雑な形状した樹脂基板に密着性に優れ
たAg反射層を有する光反射体を得ることができる。
EFFECT OF THE INVENTION It is possible to obtain a light reflector having an Ag reflection layer having excellent adhesion to a resin substrate having a complicated shape.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 樹脂基板上に、スパッタリングにより形
成されたAl層あるいはSiO層と、スパッタ
リングにより形成されたAg層とを順次設けたことを特
徴とする光反射体。
1. A light reflector comprising an Al 2 O 3 layer or SiO 2 layer formed by sputtering and an Ag layer formed by sputtering, which are sequentially provided on a resin substrate.
JP7265776A 1995-10-13 1995-10-13 Light reflector Pending JPH09106571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7265776A JPH09106571A (en) 1995-10-13 1995-10-13 Light reflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7265776A JPH09106571A (en) 1995-10-13 1995-10-13 Light reflector

Publications (1)

Publication Number Publication Date
JPH09106571A true JPH09106571A (en) 1997-04-22

Family

ID=17421886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7265776A Pending JPH09106571A (en) 1995-10-13 1995-10-13 Light reflector

Country Status (1)

Country Link
JP (1) JPH09106571A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009139814A (en) * 2007-12-10 2009-06-25 Mitsubishi Electric Corp Reflection plate, display device and method for manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009139814A (en) * 2007-12-10 2009-06-25 Mitsubishi Electric Corp Reflection plate, display device and method for manufacturing the same

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