JPH03104038A - Formation of protective layer for optical disk - Google Patents

Formation of protective layer for optical disk

Info

Publication number
JPH03104038A
JPH03104038A JP24014989A JP24014989A JPH03104038A JP H03104038 A JPH03104038 A JP H03104038A JP 24014989 A JP24014989 A JP 24014989A JP 24014989 A JP24014989 A JP 24014989A JP H03104038 A JPH03104038 A JP H03104038A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
pressure
protective layer
range
equation
silicon oxynitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24014989A
Inventor
Ichiro Doi
Sadaji Miyazaki
Masabumi Nakao
Original Assignee
Asahi Chem Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To obtain the protective layer which does not peel and crack in high- temp. and high-humidity environment by forming the protective layer to be provided between a substrate and a recording layer under a specific sputtering pressure by using silicon oxynitride having a specific compsn.
CONSTITUTION: The protective layer 2 consisting of the silicon oxynitride having the refractive index at 830nm wavelength ranging 1.8 to 2.1 is provided between the plastic substrate 1 and the recording layer 3. The sputtering gaseous pressure P (mTorr) when the refractive index at 83-nm wavelength after oxygen is removed from the silicon oxynitride is destinated n0 is adjusted to the ranges of equation I and equation II at the time of forming the layer 2 by a sputtering method. The crack resistance degrades if the gaseous pressure P is higher than the range of the equation II and the peeling resistance degrades if the pressure is lower than this range. The barrier property to oxygen and water degrades if the pressure is higher than the range of the equation I and the formation of the stable sputtered film is difficult if the pressure is lower than this range. The protective layer having the excellent environmental resistance is obtd. in this way.
COPYRIGHT: (C)1991,JPO&Japio
JP24014989A 1989-09-18 1989-09-18 Formation of protective layer for optical disk Pending JPH03104038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24014989A JPH03104038A (en) 1989-09-18 1989-09-18 Formation of protective layer for optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24014989A JPH03104038A (en) 1989-09-18 1989-09-18 Formation of protective layer for optical disk

Publications (1)

Publication Number Publication Date
JPH03104038A true true JPH03104038A (en) 1991-05-01

Family

ID=17055224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24014989A Pending JPH03104038A (en) 1989-09-18 1989-09-18 Formation of protective layer for optical disk

Country Status (1)

Country Link
JP (1) JPH03104038A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997034298A1 (en) * 1996-03-11 1997-09-18 Matsushita Electric Industrial Co., Ltd. Optical data recording medium, method of producing the same and method of reproducing/erasing record
US6268034B1 (en) 1998-08-05 2001-07-31 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and method for producing the same, method for recording and reproducing information thereon and recording/reproducing apparatus
US6343062B1 (en) 1997-09-26 2002-01-29 Matsushita Electric Industrial Co., Ltd Optical disk device and optical disk for recording and reproducing high-density signals
US6388984B2 (en) 1997-08-28 2002-05-14 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and its recording and reproducing method
US6764736B2 (en) 2001-07-12 2004-07-20 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and recording method using the same
US6821707B2 (en) 1996-03-11 2004-11-23 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US7037413B1 (en) 1996-03-11 2006-05-02 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997034298A1 (en) * 1996-03-11 1997-09-18 Matsushita Electric Industrial Co., Ltd. Optical data recording medium, method of producing the same and method of reproducing/erasing record
US6153063A (en) * 1996-03-11 2000-11-28 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US6821707B2 (en) 1996-03-11 2004-11-23 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US7037413B1 (en) 1996-03-11 2006-05-02 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US6388984B2 (en) 1997-08-28 2002-05-14 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and its recording and reproducing method
US6343062B1 (en) 1997-09-26 2002-01-29 Matsushita Electric Industrial Co., Ltd Optical disk device and optical disk for recording and reproducing high-density signals
US6268034B1 (en) 1998-08-05 2001-07-31 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and method for producing the same, method for recording and reproducing information thereon and recording/reproducing apparatus
US6764736B2 (en) 2001-07-12 2004-07-20 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and recording method using the same

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