JPH0896750A - High pressure discharge lamp, discharge lamp lighting device and light source device - Google Patents

Abstract

PURPOSE: To suppress improper continuity of an electrode body structure so as to attain to extend a life, by having a conductor part held to the other end side an electrode shaft by a hole and having a plurality of integrally formed metal foils, in the electrode body structure. CONSTITUTION: In both sides in a quartz-made air-tight vessel 1 having a discharge space 1a sealed with rare gas in the inside, an electrode body structure 4a containing an anode (a) and an electrode body structure 4b containing a cathode (k) are sealed. The electrode body structure 4a has an electrode shaft 5a integrally formed with the anode (a), conductor part 8 secured to the other end side of this shaft 5a and metal foil 9 connecting the one end side 9b to the conductor part 8 to connect the other end side 9a to an external conductor 6. An introducing part 2 has a seal part 2a enveloping from outside metal foil (p) integrally continued to an electrode shaft supporting part 2b, top part 3a oppositely facing the conductor part 8 to have a width almost equal to the width of the conductor part 8 to be formed along a contour in the other end side of the conductor part 8, tapered part 3b spread toward the upper of a barrel part 3c and a sealing member 3 of air-tightly sealing the metal foil 9.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high pressure discharge lamp having a large lamp current, a discharge lamp lighting device and a light source device.

[0002]

2. Description of the Related Art As a high current (high lamp current) high pressure discharge lamp, for example, a xenon lamp or a high pressure mercury lamp is known. In such a high-current high-pressure discharge lamp, a stem type that uses a stem as a sealing portion structure of its electrode and a foil sealing type that uses a metal foil for airtight wear made of refractory metal such as molybdenum There are types. In the case of the stem type, it is difficult to manufacture a quartz discharge lamp because the shape of the sealing part is enlarged to form the stem part and the stem part needs to be welded to the arc tube part. There are drawbacks. On the other hand, the foil sealing type is
There are no drawbacks mentioned above.

However, in the case of the foil sealing type, when the lamp current becomes a high pressure discharge lamp of about 8 A or more, it is necessary to use a plurality of the metal foils. Due to the fact that a plurality of these metal foils are arranged separately from each other, a sealing member generally called a separate glass is used.

As a high-pressure discharge lamp of this kind, the actual construction of Sho 57-15706
Japanese Patent Publication No. 5 discloses the one as shown in FIG. The figure shows a vertical cross-sectional view of one end side sealing portion of the high-pressure discharge lamp, in which a glass sealing member 93 is sealed in the substantially central portion of the sealing portion 92 of the quartz airtight container 91, and both end faces thereof are sealed. An inner glass member 912 and an outer glass member 913 are arranged via tungsten metal plates 910 and 911, respectively. Reference numeral 96 denotes an outer conductor, which extends through the sealing member 93, the metal plate 911 and the outer glass member 913 to the outside of the sealing portion 92. 95b is an airtight container 91
It is an electrode shaft of a tungsten electrode 95a extending from the inner light emitting space to the metal plate 910 through the inner glass member 912. 99 ... is a metal foil made of molybdenum for sealing which is arranged along the outer peripheral surface of the sealing member 93, one end of which is welded to one metal plate 911 through a platinum braze, and the like. The end portion is bent at a right angle and welded to the other metal plate 910 via platinum brazing.

[0005]

The welded portion of the metal plate 910 of the high pressure discharge lamp is easily peeled off due to the difference in the coefficient of thermal expansion between the metal plate 910 and the metal foil 99. That is, since the metal foil 99 ... Has a portion formed in the longitudinal direction, it extends due to thermal expansion in the longitudinal direction of the foil during the heat sealing step during the sealing process of the sealing portion 92 in the lamp manufacturing. When the lamp subsequently cools when it cools, the difference between the coefficient of thermal expansion of the quartz itself and the coefficient of thermal expansion of the foil causes a stress due to the shrinkage of the entire linear portion of the foil along the sealing member 3, and Even if it does not break, tensile stress is applied to the vicinity of the welded portion of the foil and the base end portion of the electrode shaft 5a. After that, each time the high pressure discharge lamp was turned on and off repeatedly, stress due to the difference in the coefficient of thermal expansion was applied to the welded portion, and a crack occurred in the platinum braze, and the metal plate 910 and the metal foil 9
There is a problem that the high-voltage discharge lamp has a short life due to poor electrical continuity between 9 ...

The present invention solves the above-mentioned conventional drawbacks, and an object thereof is to provide a high-pressure discharge lamp having a long life by suppressing defective conduction of the electrode structure.

[0007]

According to a first aspect of the present invention, there is provided an electrode shaft,
An electrode formed on one end side of the electrode shaft, a plate-shaped conductor portion having a hole through which the electrode shaft penetrates and held on the other end side of the electrode shaft, and one end side integrated with the conductor portion, respectively. A plurality of metal foils that are thinner than the electrically-conductive parts that have been formed, and an outer conductor connected to the other end of each metal foil, and a discharge space in which the electrodes are located. Then, an electrode shaft support portion that supports the electrode shaft, a sealing portion that surrounds each metal foil from the outside, a top portion that is formed substantially along the contour of the conductor portion at one end, and from this top portion to the other end side Has an extending body,
A sealing member disposed between the conductor part and the external conductor in the sealing part so as to hermetically seal each metal foil between the metal foil and the sealing part. And an airtight container made of quartz. The plurality of metal foils thinner than the conductor portion integrally formed with the conductor portion means the conductor portion and the metal foil integrally formed without performing joining means such as welding.

The quartz airtight container means a portion made of a quartz glass material in a high pressure discharge lamp.

According to a second aspect of the present invention, there is provided a plate-shaped member having an electrode shaft mainly made of tank stainless steel, an electrode formed on one end side of the electrode shaft, a hole through which the electrode shaft penetrates, and held on the other end side of the electrode shaft. An electrode assembly including a conductor part mainly made of molybdenum, a plurality of metal foils each having one end side connected to the conductor part and thinner than the conductor part mainly made of molybdenum, and each metal foil An outer conductor connected to the other end of
An electrode shaft support part that forms a discharge space in which the electrode is located and supports the electrode shaft, a sealing part that surrounds each metal foil from the outside, and a top part that is formed at one end substantially along the contour of the conductor part ,
The conductor part in the sealing part has a body part extending from this top part to the other end side, and arranges each metal foil on the outer periphery and hermetically seals each metal foil with the sealing part. And a sealing member arranged between the outer conductor and a sealing member made of quartz.

The electrode shaft mainly composed of tank stainless steel refers to one in which 90% or more of the electrode shaft material is tank stainless steel.

The conductor portion mainly made of molybdenum and the metal foil mainly made of molybdenum are those in which 90% or more of the conductor material is made of molybdenum.

According to a third aspect of the present invention, there is provided an electrode shaft, an electrode formed on one end side of the electrode shaft, a plate-shaped conductor portion having a hole through which the electrode shaft penetrates and held on the other end side of the electrode shaft. , An electrode assembly including a plurality of metal foils thinner than the conductor portion made of the same material as the conductor portion, one end side of which is connected to the conductor portion, and the other end side of each metal foil. An outer conductor connected to the electrode, an electrode shaft support part that forms a discharge space in which the electrode is located and supports the electrode shaft, a sealing part that surrounds each metal foil from the outside, and a contour of the conductor part at one end. Has a top portion formed substantially along with, a body portion extending from this top portion toward the other end side,
A sealing member disposed between the conductor part and the external conductor in the sealing part so as to hermetically seal each metal foil between the metal foil and the sealing part. And an airtight container made of quartz.

A fourth aspect of the present invention is a discharge lamp lighting device comprising the high pressure discharge lamp according to any one of the first to third aspects and a lighting means capable of stably lighting the high pressure discharge lamp. is there.

According to a fifth aspect of the present invention, there is provided a high pressure discharge lamp according to any one of the first to third aspects, lighting means capable of stably lighting the high pressure discharge lamp, and optical means for controlling light output from the high pressure discharge lamp. Is a light source device.

A sixth aspect of the present invention is a light source device comprising the high pressure discharge lamp according to any one of the first to third aspects, and an optical means for controlling the light output from the high pressure discharge lamp.

In the fifth and sixth aspects, the optical means for controlling light means a reflector, a lens, an optical filter or the like for condensing the light output from the high pressure discharge lamp in a desired direction. The light source device includes an exposure device that prints a circuit pattern on a semiconductor wafer or the like, as well as a device that utilizes the output light of a high-pressure discharge lamp, such as a projection device.

In each of the claims, the electrode may be any functional part capable of generating a discharge, and the electrode includes one in which one end of the electrode shaft itself is an electrode, such as a cathode of a known high pressure discharge lamp. . Further, for example, among a pair of electrode structures of a high pressure discharge lamp, only one electrode structure is included in the electrode structure described in each claim.

[0018]

According to the first aspect of the invention, the electrode assembly has a plurality of metal foils integrally formed with the conductor portion held on the other end side of the electrode shaft by the hole. There is no weld. In addition, since the conductor portion is thicker than the metal foil, even if tensile stress is generated in the metal foil direction while being held by the electrode shaft, the conductor portion is unlikely to crack.

According to the second aspect of the present invention, the electrode assembly is mainly composed of a conductor part which is held on the other end side of the electrode shaft by a hole and is mainly composed of a molybdenum, and is mainly composed of a molybdenum whose one end side is connected to the conductor part. Since a plurality of metal foils are connected, breakage of the connection portion due to a difference in thermal expansion between the conductor portion and the metal foil is unlikely to occur.

Further, since the conductor portion is thicker than the metal foil, even if tensile stress is generated in the metal foil direction while being held by the electrode shaft, the conductor portion is unlikely to crack.

According to a third aspect of the present invention, the electrode assembly has a plurality of materials made of the same material as the conductor part held at the other end of the electrode shaft by the hole and the conductor part having one end connected to the conductor part. Since the metal foil of the book is connected, breakage of the connection portion due to the difference in thermal expansion between the conductor portion and the metal foil is unlikely to occur.

Further, since the conductor portion is thicker than the metal foil, even if tensile stress is generated in the direction of the metal foil while being held by the electrode shaft, the conductor portion is unlikely to crack.

According to claims 4 to 6, the operation of any one of claims 1 to 3 is achieved.

[0024]

1 to 4 show a 3 KW ultrahigh pressure mercury lamp as an embodiment of claims 1 to 6.

In the figure, reference numeral 1 designates a quartz airtight container which forms a discharge space 1a having a volume of 16.3 cm3 in which 202600 Pa of xenon as a rare gas and 4 mg / cm3 of mercury are enclosed. On both sides of the quartz airtight container 1, an electrode assembly 4a including an anode a and a cathode are provided.
The electrode structure 4b including k forms an inter-electrode distance of 4.5 mm and is sealed. Since the sealing structure of the electrode structures 4a, 4b and the electrode structures 4a, 4b is the same structure except for the structure of the anode a and the cathode k, which are electrodes, common parts are denoted by the same reference numerals, and The description is omitted as much as possible.

Now, on the side of the quartz airtight container 1, a sealing portion 2a, an electrode shaft supporting portion 2b for supporting the electrode shaft 5a of the electrode assembly 4a, an introducing portion 2 including a sealing member 3 and this introducing portion. The outer conductor 6 is disposed via the line 2. The outer conductor 6 includes the sealing plate portion 6a and the lead rod 6 connected to the sealing plate portion.
b and this lead rod, which is internally connected to the lead wire 6c, is composed of a cylindrical base 6d filled with an insulating material (not shown).

The electrode assembly 4a is fixed to the anode a located in the discharge space 1a of the high pressure discharge lamp body 1, an electrode shaft 5a integrally formed with the anode a at one end side, and the other end of the shaft 5a. It is composed of the formed conductor portion 8 and four metal foils 9, 9, 9, 9 each having one end side 9b connected to the conductor portion 8 and the other end side 9a connected to the outer conductor 6. ing.

The electrode 5c has a diameter with tapers at both ends.
It is made of tungsten with a length of 15 mm and a length of 25 mm. The electrode shaft 5a is
It is made of tungsten with a diameter of 6 mm. The conductor portion 8 has a thickness of about 0.2 which is wider than the width of the cross section orthogonal to the axial direction of the shaft 5a.
It is a ~ 1mm molybdenum plate. The metal foil 9 has a thickness of about 20 to 3
It is made of molybdenum with a thickness of 0 μm, and one end side 9b is welded and connected to the wide surface of the conductor portion 8 with a platinum solder (not shown), and the other end side 9a is welded and connected to the outer conductor 6 with a platinum solder. .
The electrode shaft 5a is formed by winding a metal foil 7 made of molybdenum around the base end thereof, and the electrode shaft 5a is substantially sealed and supported by the electrode shaft support portion 2b. The conductor portion 8 is
It has a hole 8b with a diameter of 0.6 cm through which the electrode shaft 5a passes. After penetrating the electrode shaft 5a through the conductor portion 8, the electrode shaft 5a
A tungsten disk 10 having a diameter of 10 mm and a thickness of 1 mm is fixed to the other end of the disk by means such as welding or screwing. Alternatively, the disk 10 may be formed integrally with the other end of the electrode shaft 5a, and the anode a may be fixed to the electrode shaft 5a after penetrating the conductor portion 8 from one end side of the electrode shaft 5a. Further, the conductor portion 8 and the metal foil 9 may be integrally manufactured in advance.

The cathode K of the electrode assembly 4b is the electrode shaft 5
The electrode shaft 5b is formed on the electrode shaft 5b by making the end portion of the electrode shaft 5b having the same material and the same diameter as that of a a conical shape with an angle of about 43 degrees and rounding the tip end portion with a radius of curvature of 0.5 mm.

The introduction part 2 is integrally sealed with the support part 2b and encloses the metal foils 9 ...
And a top portion 3a facing the conductor portion 8 and having a width substantially equal to the width of the conductor portion 8 and formed along the contour on the other end side of the conductor portion 8, and from the top portion 3a to the body portion 3c. The sealing portion 2a has a taper portion 3b that expands toward the outside, and the metal foils 9 ... Are arranged on the outer periphery to hermetically seal the metal foils 9 ... With the sealing portion 2a. The sealing member 3 is made of quartz and has a hollow portion 3d therein.

One end side 9b of the metal foil 9 ... is bent toward the electrode side surface of the conductor portion 8 at a folding angle of more than 90 degrees and fixed to the electrode side surface. The other end 9a of each metal foil 9 is connected to the outer conductor 6.

FIG. 1 shows in more detail the fixing portion between the metal foil 9 and the conductor portion 8 arranged along the outer peripheral surface of the glass member 3 for sealing, and in the case of this embodiment, the metal foil 9 is used. There are two places that can be bent, and each of the bending angle theta 1 and theta 2 is an angle that exceeds a right angle (90 degrees). In the figure, only one metal foil 9 is shown and it is depicted that a gap is formed between the metal foil 9 and the sealing member 3, but there is substantially no gap. Is.

In order to make the bending angle of the metal foil 9 gentle as described above, the tapered portion 3b is formed on the top portion 3a of the glass member 3 for sealing along which the metal foil 9 is provided, and the conductor portion 8 is formed. It is desirable to set the diameter smaller than the maximum outer diameter of the glass member 3 for sealing.

That is, in the case of this embodiment, one end surface side of the glass member for sealing 3 having a diameter d2 of 15 mm is gradually increased from a length of about 6 mm so that the diameter d1 of the flat surface of the top portion 3a becomes 10 mm. To form a gradual taper portion 3b.

With such a structure, the metal foil 9 ...
Is bent and sealed between the outer conductor 6 and the conductor portion 8 at an angle along the taper portion 3b, and the bent portion 9
By a, the tensile stress due to the thermal contraction after the thermal expansion in the direction of the electrode axis 5a can be diffused, and the breakage of the metal foil 9 itself at the time of sealing the introduction part 2 during the manufacture of the lamp can be suppressed.

Further, the sealing member 3 has the above-mentioned conductor portion 8
Facing each other and having a width substantially equal to the width of the conductor portion 8 and formed along the contour on the other end side of the conductor portion 8
Since a and the taper portion 3b that expands from the top portion 3a toward the body portion 3c are provided, a sufficient electrical connection area between the metal foils 9 ... And the conductor portion 8 can be secured.

Furthermore, the metal foil 9 after the introduction portion 2 is sealed
.. Since the gap between the taper portion 3b and the taper portion 3b and the gap between the taper portion 3b and the conductor portion 8 can be made as small as possible, the gap becomes the coldest portion, which causes non-lighting, extinguishing, and discharge caused by mercury accumulation. Problems such as instability are less likely to occur.

Although there are two bent portions of the metal foil 9 ... To the surface of the conductor portion 8 in the above-mentioned embodiment, the bent portion may be one portion. The present invention may be applied to a discharge lamp, for example, a gas high pressure discharge lamp such as a xenon lamp. Further, when the anode is a large electrode, such as a xenon lamp, the present invention may be applied only to the anode side.

FIG. 5 shows a light source device as an exposure device for printing a circuit pattern on a semiconductor wafer or the like showing the first to sixth embodiments. In the figure, reference numeral 21 designates FIGS.
The high-intensity discharge lamp 21 is electrically connected to the external introduction bodies 6, 6 of the high-pressure discharge lamp 21 by a lighting means 22 composed of a ballast including a power source.
The high-voltage discharge lamp 21 discharges by activating the DC output of 115V, and mainly outputs the wavelength of 365 nm.

Reference numeral 23 denotes a spheroidal reflector serving as an optical means, and the high pressure discharge lamp 21 is mounted with the anode a positioned below so that the light emitting portion is located at the focal point of the reflector 23. There is. Reference numeral 24 denotes a reduction imaging condenser lens arranged below the high-pressure discharge lamp 21. The high-pressure discharge lamp 21 is provided on an irradiation target 25 such as a semiconductor wafer arranged below the lens 24 with a circuit pattern mask interposed. The circuit pattern is printed by irradiating light (arrow) from.

[0041]

According to the constitutions of claims 1 to 3,
Since there is no welded portion between dissimilar metals near the electrode, a crack does not occur at the welded portion due to the difference in thermal expansion. Therefore, the poor electrical continuity of the welded portion is suppressed, so that a high-pressure discharge lamp having a long life can be provided.

According to the structure of claim 4, it is possible to provide a discharge lamp lighting device having a long life.

According to the fifth and sixth aspects, it is possible to provide a light source device having a long life.

[Brief description of drawings]

FIG. 1 is a longitudinal cross-sectional view in the tube axis direction showing a main part configuration in a one end side sealing part of FIG.

FIG. 2 is a partially omitted perspective view showing a high pressure discharge lamp according to an embodiment of the present invention.

FIG. 3 is a cross-sectional view in the tube axis direction showing the one end side sealing portion of the embodiment of the present invention.

FIG. 4 is a diagram showing FIG. 3 along the direction AA.

FIG. 5 is a conceptual diagram showing a light source device according to an embodiment of the present invention.

FIG. 6 is a vertical cross-sectional view showing an introduction part of a conventional lamp.

[Explanation of symbols]

1 ... Quartz airtight container, 1a ... Discharge space, 2a ... Sealing part,
2b ... Electrode shaft support portion, 3 ... Sealing member, 3a ... Top portion,
3c ... body, 4a, 4b ... electrode assembly, 5a, 5b ... electrode shaft,
a, k ... Electrode, 6 ... Outer conductor, 8 ... Conductor portion, 8b ... Hole,
9 ... Metal foil, 22 ... Lighting means, 23, 24 ... Optical means.

Claims (6)

[Claims] 1. An electrode shaft, an electrode formed on one end side of the electrode shaft, a plate-shaped conductor portion having a hole through which the electrode shaft penetrates and held on the other end side of the electrode shaft, and one end side. A plurality of metal foils, each of which is integrally formed with the conductor part and thinner than the conductor part, and an electrode assembly including; an outer conductor connected to the other end of each metal foil; Forming a discharge space in which the electrode is located, an electrode shaft support portion that supports the electrode shaft, a sealing portion that surrounds each metal foil from the outside, a top portion that is formed substantially along the contour of the conductor portion at one end, The conductor part in the sealing part has a body part extending from this top part to the other end side, and arranges each metal foil on the outer periphery and hermetically seals each metal foil with the sealing part. And a sealing member disposed between the outer conductor and a quartz airtight container, the high-pressure discharge lamp comprising: 2. A plate-shaped mainly composed of a molybdenum, which has an electrode shaft mainly made of tank dust, an electrode formed at one end side of the electrode shaft, a hole through which the electrode shaft penetrates, and which is held at the other end side of the electrode shaft. And a plurality of metal foils each having one end side connected to the conductor portion and each of which is thinner than the conductor portion mainly made of molybdenum, and an electrode assembly configured to include:
An outer conductor connected to the other end of each metal foil; an electrode shaft support portion that forms a discharge space in which an electrode is located and supports the electrode shaft, and a sealing portion that surrounds each metal foil from the outside, Each metal foil has a top portion formed substantially along the contour of the conductor portion at one end, and a body portion extending from the top portion toward the other end side, and each metal foil is arranged on the outer periphery and between the sealing portion and each metal foil. And a sealing member disposed between a conductor portion in the sealing portion and an outer conductor so as to hermetically seal the quartz container. Electric light. 3. An electrode shaft, an electrode formed on one end side of the electrode shaft, a plate-shaped conductor portion having a hole through which the electrode shaft penetrates and held on the other end side of the electrode shaft, and one end side. A plurality of metal foils thinner than the conductor parts made of the same material as the conductor parts respectively connected to the conductor parts; and an electrode assembly configured to be connected to the other end side of each metal foil. An outer conductor; an electrode shaft support portion that forms a discharge space in which an electrode is located and supports the electrode shaft, a sealing portion that surrounds each metal foil from the outside, and one end that substantially follows the contour of the conductor portion It has a top part formed by the above, and a body part that extends from this top part toward the other end, and each metal foil is placed on the outer periphery and sealed so as to hermetically seal each metal foil with the sealing part. A sealing member disposed between a conductor part inside the part and an outer conductor; and a quartz airtight container including; High-pressure discharge lamp to be. 4. The high pressure discharge lamp according to claim 1, and a lighting means capable of stably lighting the high pressure discharge lamp;
A discharge lamp lighting device comprising: 5. The high pressure discharge lamp according to claim 1, and a lighting means capable of stably lighting the high pressure discharge lamp;
A light source device comprising: an optical unit that controls light output from the high-pressure discharge lamp. 6. A light source device comprising: the high pressure discharge lamp according to claim 1; and an optical means for controlling light output from the high pressure discharge lamp.