JPH088515Y2 - 電子線回折装置 - Google Patents

電子線回折装置

Info

Publication number
JPH088515Y2
JPH088515Y2 JP11447689U JP11447689U JPH088515Y2 JP H088515 Y2 JPH088515 Y2 JP H088515Y2 JP 11447689 U JP11447689 U JP 11447689U JP 11447689 U JP11447689 U JP 11447689U JP H088515 Y2 JPH088515 Y2 JP H088515Y2
Authority
JP
Japan
Prior art keywords
electron
electron beam
sample surface
mode
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11447689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352946U (enExample
Inventor
正 岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP11447689U priority Critical patent/JPH088515Y2/ja
Publication of JPH0352946U publication Critical patent/JPH0352946U/ja
Application granted granted Critical
Publication of JPH088515Y2 publication Critical patent/JPH088515Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP11447689U 1989-09-29 1989-09-29 電子線回折装置 Expired - Lifetime JPH088515Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11447689U JPH088515Y2 (ja) 1989-09-29 1989-09-29 電子線回折装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11447689U JPH088515Y2 (ja) 1989-09-29 1989-09-29 電子線回折装置

Publications (2)

Publication Number Publication Date
JPH0352946U JPH0352946U (enExample) 1991-05-22
JPH088515Y2 true JPH088515Y2 (ja) 1996-03-06

Family

ID=31662843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11447689U Expired - Lifetime JPH088515Y2 (ja) 1989-09-29 1989-09-29 電子線回折装置

Country Status (1)

Country Link
JP (1) JPH088515Y2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6677581B1 (en) 1998-09-11 2004-01-13 Japan Science And Technology Corporation High energy electron diffraction apparatus
JP4616964B2 (ja) * 2000-04-25 2011-01-19 前田 則男 破壊行為の監視システム
WO2014185074A1 (en) * 2013-05-15 2014-11-20 Okinawa Institute Of Science And Technology School Corporation Leed for sem
JP6359002B2 (ja) * 2015-12-14 2018-07-18 株式会社Ｔｓｌソリューションズ Ｅｂｓｄ検出装置

Also Published As

Publication number Publication date
JPH0352946U (enExample) 1991-05-22

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