JPH0881555A - Polyimide copolymer and its production - Google Patents

Polyimide copolymer and its production

Info

Publication number
JPH0881555A
JPH0881555A JP24700794A JP24700794A JPH0881555A JP H0881555 A JPH0881555 A JP H0881555A JP 24700794 A JP24700794 A JP 24700794A JP 24700794 A JP24700794 A JP 24700794A JP H0881555 A JPH0881555 A JP H0881555A
Authority
JP
Japan
Prior art keywords
polyimide
bis
polyamic acid
film
repeating unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24700794A
Other languages
Japanese (ja)
Other versions
JP3339205B2 (en
Inventor
Ichiro Kaneko
一郎 金子
Kiyoshi Motoumi
清 本海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP24700794A priority Critical patent/JP3339205B2/en
Publication of JPH0881555A publication Critical patent/JPH0881555A/en
Application granted granted Critical
Publication of JP3339205B2 publication Critical patent/JP3339205B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0346Organic insulating material consisting of one material containing N

Abstract

PURPOSE: To obtain a polyimide copolymer having high strengths and a low coefficient of thermal expansion and used for a flexible printed wiring board by cyclizing a polyamic acid prepared by polymerizing a specified aromatic diamine with a tetracarboxylic dianhydride through dehydration. CONSTITUTION: An aromatic diamine component based on 1,4-bis (4- aminobenzoyloxy)benzene and 4,4'-diaminodiphenyl ether is polymerized with a tetracarboxylic dianhydride to obtain a polyamic acid, apd this acid is cyclized through thermal or chemical dehydration to make a polyimide polymer mainly consisting of repeating units of formulas I and II (wherein R is an aromatic group). The molar ratio I/II of the copolymer is 5/95 to 90/10 desirably 20/80 to 70/30. A solution of the polyamic acid in a polar organic solvent is cast on a belt to form a film, and this film is heated and imidated to obtain a polyimide film. This film has high strengths and a low coefficient of thermal expansion and a low water absorption and is suited for a fine-pattern flexible printed wiring board.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、耐熱性に優れると共
に、高い機械的強度、低い熱膨脹係数及び低吸水率を有
し、ファインパタ−ン化フレキシブルプリント配線基板
等の基材として好適なポリイミド共重合体及びその製造
方法に関する。
BACKGROUND OF THE INVENTION The present invention provides a polyimide having excellent heat resistance, high mechanical strength, low coefficient of thermal expansion and low water absorption, which is suitable as a base material for fine patterned flexible printed wiring boards and the like. The present invention relates to a copolymer and a method for producing the same.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】従来よ
り、ポリイミド樹脂は非常に優れた耐熱性・耐薬品性・
電気特性・機械的特性、その他優れた諸特性を有してい
ることが知られており、例えば、特公昭36−1099
9号公報に見られるような4,4´−ジアミノジフェニ
ルエーテルとピロメリット酸二無水物から得られる可撓
性に富んだ全芳香族ポリイミド等が良く知られている。
2. Description of the Related Art Conventionally, polyimide resins have been extremely superior in heat resistance and chemical resistance.
It is known to have excellent electrical and mechanical properties and other properties. For example, Japanese Patent Publication No. 36-1099.
Well-known is a wholly aromatic polyimide having a high flexibility obtained from 4,4′-diaminodiphenyl ether and pyromellitic dianhydride as disclosed in JP-A No.

【0003】このポリイミド樹脂は主鎖に屈曲性に富む
エーテル結合を含むため、全芳香族ポリイミドでありな
がら可撓性に富むその反面、弾性率が低く、熱的寸法安
定性が悪いという問題があった。特に、従来広く使用さ
れているポリイミド樹脂は線膨張係数が約3×10-5
℃と大きく、熱的寸法安定性が悪く、金属などと積層し
た場合に、反りやカールを生じ易いものであった。
Since this polyimide resin contains a highly flexible ether bond in its main chain, it is a fully aromatic polyimide but is highly flexible, but on the other hand, it has a low elastic modulus and poor thermal dimensional stability. there were. Particularly, the polyimide resin which has been widely used in the past has a linear expansion coefficient of about 3 × 10 −5 /
It was as large as ℃, the thermal dimensional stability was poor, and when it was laminated with a metal or the like, it was likely to warp or curl.

【0004】一方、近年、より優れた熱的寸法安定性を
有し、しかも機械的強度に優れたポリイミド樹脂に対す
る要求が高まっており、種々検討が行なわれている。か
かる試みの中で2種以上の芳香族ジアミンを用い、機械
的特性・熱的寸法安定性等の向上を目指す取り組みが多
くみられる。しかしながら、これらの取り組みのいずれ
の場合にもポリイミド樹脂の熱的寸法安定性と機械的特
性とを同時に満足させることはできなかった。
On the other hand, in recent years, there has been an increasing demand for a polyimide resin having more excellent thermal dimensional stability and excellent mechanical strength, and various studies have been conducted. Among such attempts, there are many attempts to improve mechanical properties, thermal dimensional stability, etc. by using two or more kinds of aromatic diamines. However, in any of these approaches, the thermal dimensional stability and mechanical properties of the polyimide resin could not be satisfied at the same time.

【0005】また、ポリイミド樹脂は他のプラスチック
に比べて吸水率が著しく大きい。そのため、寸法安定性
や絶縁性の低下を生じるという欠点を有していた。近
年、優れた低吸湿性を有し、しかも機械的強度に優れた
ポリイミド樹脂に対する要求が高まっており、種々検討
が行なわれている。かかる試みの中で疎水基を含む芳香
族ジアミンや芳香族酸二無水物を用い、低吸湿性の向上
を目指す取り組みが多く見られる。しかしながら、これ
らの取り組みのいずれの場合にも低吸湿性の向上が得ら
れる代わりに機械的特性、特に弾性率及び引張強度が低
下する傾向にあり、低吸湿性と機械的特性の両方を満足
するものではなかった。
Further, the polyimide resin has a significantly higher water absorption rate than other plastics. Therefore, it has a drawback that dimensional stability and insulation are deteriorated. In recent years, there is an increasing demand for polyimide resins having excellent low hygroscopicity and excellent mechanical strength, and various studies have been conducted. Among such attempts, many attempts are made to improve low hygroscopicity by using an aromatic diamine or an aromatic dianhydride containing a hydrophobic group. However, in each of these approaches, low hygroscopicity improvement is obtained, but mechanical properties, especially elastic modulus and tensile strength, tend to decrease, satisfying both low hygroscopicity and mechanical properties. It wasn't something.

【0006】本発明は上記事情に鑑みなされたもので、
耐熱性に優れると共に、高い機械的強度、低い熱膨脹係
数及び低吸水率を有し、ファインパタ−ン化フレキシブ
ルプリント配線基板等の基材として好適なポリイミド共
重合体及びその製造方法を提供することを目的とする。
The present invention has been made in view of the above circumstances.
To provide a polyimide copolymer having excellent heat resistance and high mechanical strength, a low coefficient of thermal expansion and a low water absorption rate, which is suitable as a base material for a fine patterned flexible printed wiring board and the like, and a method for producing the same. With the goal.

【0007】[0007]

【課題を解決するための手段及び作用】本発明者等は上
記目的を達成するため鋭意検討を行った結果、1,4−
ビス(4−アミノベンゾイルオキシ)ベンゼンと、4,
4´−ジアミノジフェニルエーテルとを主成分とする芳
香族ジアミンと、芳香族テトラカルボン酸二無水物とを
重合してポリアミド酸を得、これを熱的または化学的に
脱水閉環することによって、下記一般式(1)で示され
る反復単位と下記一般式(2)で示される反復単位とを
主構成単位として含むポリイミド共重合体、好ましく
は、下記一般式(1)で示される反復単位と下記一般式
(2)で示される反復単位とがモル比で(1)/(2)
=5/95〜90/10である反復単位を含むポリイミ
ド共重合体が得られると共に、このポリイミド共重合体
が優れた機械的強度を有し、かつ低い線膨脹係数及び低
い吸水率を有し、しかも高い弾性率と柔軟性を有するこ
とを知見し、本発明をなすに至ったものである。
Means and Actions for Solving the Problems As a result of intensive studies made by the present inventors to achieve the above object, 1,4-
Bis (4-aminobenzoyloxy) benzene, 4,
An aromatic diamine containing 4'-diaminodiphenyl ether as a main component and an aromatic tetracarboxylic acid dianhydride are polymerized to obtain a polyamic acid, which is thermally or chemically dehydrated and cyclized to give the following general compounds. A polyimide copolymer containing a repeating unit represented by the formula (1) and a repeating unit represented by the following general formula (2) as main constitutional units, and preferably a repeating unit represented by the following general formula (1) and the following general formula: The repeating unit represented by the formula (2) has a molar ratio of (1) / (2)
A polyimide copolymer containing repeating units of 5/95 to 90/10 is obtained, the polyimide copolymer has excellent mechanical strength, and has a low coefficient of linear expansion and a low water absorption coefficient. Moreover, they have found that they have a high elastic modulus and flexibility, and have completed the present invention.

【0008】[0008]

【化2】 (但し、式中Rは4価の芳香族基を示す。)Embedded image (However, in the formula, R represents a tetravalent aromatic group.)

【0009】従って本発明は、上記一般式(1)で示さ
れる反復単位と上記一般式(2)で示される反復単位と
を主構成単位として含むことを特徴とするポリイミド共
重合体、好ましくは上記反復単位(1)と上記反復単位
(2)とがモル比で(1)/(2)=15/95〜90
/10であるポリイミド共重合体、及び、1,4−ビス
(4−アミノベンゾイルオキシ)ベンゼンと4,4´−
ジアミノジフェニルエーテルとを主成分とする芳香族ジ
アミンとテトラカルボン酸二無水物とを重合してポリア
ミド酸を得、次いで該ポリアミド酸を熱的または化学的
に脱水閉環することを特徴とする上記一般式(1)で示
される反復単位と上記一般式(2)で示される反復単位
とを主構成単位として含むポリイミド共重合体の製造方
法を提供する。
Therefore, the present invention is a polyimide copolymer, preferably containing a repeating unit represented by the above general formula (1) and a repeating unit represented by the above general formula (2) as main constitutional units. The repeating unit (1) and the repeating unit (2) have a molar ratio of (1) / (2) = 15/95 to 90.
/ 10 polyimide copolymer, and 1,4-bis (4-aminobenzoyloxy) benzene and 4,4'-
An aromatic diamine containing diaminodiphenyl ether as a main component and tetracarboxylic acid dianhydride are polymerized to obtain a polyamic acid, and the polyamic acid is then thermally or chemically dehydrated and ring-closed. Provided is a method for producing a polyimide copolymer containing a repeating unit represented by (1) and a repeating unit represented by the general formula (2) as main constituent units.

【0010】以下、本発明につき更に詳細に説明する。The present invention will be described in more detail below.

【0011】本発明のポリイミド共重合体は下記記一般
式(1)で示される反復単位と下記記一般式(2)で示
される反復単位とを主構成単位として含むものである。
The polyimide copolymer of the present invention contains a repeating unit represented by the following general formula (1) and a repeating unit represented by the following general formula (2) as main constituent units.

【0012】[0012]

【化3】 [Chemical 3]

【0013】上記式中Rは4価の芳香族基であり、これ
は後述するテトラカルボン酸二無水物の主骨格に由来す
る。
In the above formula, R is a tetravalent aromatic group, which is derived from the main skeleton of the tetracarboxylic dianhydride described later.

【0014】ここで、上記反復単位(1)と上記反復単
位(2)とはポリイミド共重合体中にモル比で(1)/
(2)=5/95〜90/10、特に20/80〜70
/30の割合で存在することが望ましい。上記反復単位
(1)のモル比が90%を越えると、ポリイミド共重合
体の柔軟性が非常に低下し、また吸水率が高くなる。ま
た、上記反復単位(2)のモル比が95%を越えると、
ポリイミド共重合体の吸水率が高くなり、線膨脹係数及
び弾性率の改善効果も十分に得られない場合がある。
Here, the repeating unit (1) and the repeating unit (2) are present in the polyimide copolymer in a molar ratio of (1) /
(2) = 5/95 to 90/10, especially 20/80 to 70
It is desirable to exist in a ratio of / 30. If the molar ratio of the repeating unit (1) exceeds 90%, the flexibility of the polyimide copolymer will be extremely lowered and the water absorption will be high. When the molar ratio of the repeating unit (2) exceeds 95%,
In some cases, the water absorption of the polyimide copolymer becomes high, and the effects of improving the linear expansion coefficient and elastic modulus cannot be sufficiently obtained.

【0015】また、上記ポリイミド共重合体は高分子量
の重合体であり、ポリアミド酸としての粘度は、例えば
0.5g/100mlDMF中で測定した場合、測定温
度30℃における対数粘度が0.5〜5dl/gである
ことが好ましい。
The above-mentioned polyimide copolymer is a high molecular weight polymer, and the viscosity as a polyamic acid has a logarithmic viscosity of 0.5-0.5 at a measurement temperature of 30 ° C. when measured in 0.5 g / 100 ml DMF. It is preferably 5 dl / g.

【0016】本発明のポリイミド共重合体は、1,4−
ビス(4−アミノベンゾイルオキシ)ベンゼンと4,4
´−ジアミノジフェニルエーテルとを主成分とする芳香
族ジアミンとテトラカルボン酸二無水物とを重合してポ
リアミド酸を得、次にこのポリアミド酸を脱水閉環する
ことにより製造することができる。
The polyimide copolymer of the present invention comprises 1,4-
Bis (4-aminobenzoyloxy) benzene and 4,4
It can be produced by polymerizing an aromatic diamine containing'-diaminodiphenyl ether as a main component and tetracarboxylic dianhydride to obtain a polyamic acid, and then dehydrating and ring-closing the polyamic acid.

【0017】ここで、芳香族ジアミンとしては、1,4
−ビス(4−アミノベンゾイルオキシ)ベンゼン及び
4,4´−ジアミノジフェニルエーテルのみを使用する
ことが最も好ましいが、これらの芳香族ジアミンと共に
その他の芳香族ジアミン化合物を併用することができ
る。併用が可能な芳香族ジアミンとしては、4,4´−
ビス(4−アミノフェノキシ)ビフェニル、4,4´−
ジアミノジフェニルスルフォン、3,3´−ジアミノジ
フェニルスルフォン、ビス{4−(4−アミノフェノキ
シ)フェニル}スルフォン、ビス{4−(3−アミノフ
ェノキシ)フェニル}スルフォン、ビス{4−(2−ア
ミノフェノキシ)フェニル}スルフォン、1,4−ビス
(4−アミノフェノキシ)ベンゼン、1,3−ビス(4
−アミノフェノキシ)ベンゼン、1,3−ビス(3−ア
ミノフェノキシ)ベンゼン、1,4−ビス(4−アミノ
フェニル)ベンゼン、ビス{4−(4−アミノフェノキ
シ)フェニル}エーテル、4,4´−ジアミノジフェニ
ルメタン、ビス(3−メチル−4−アミノフェニル)メ
タン、ビス(3−クロロ−4−アミノフェニル)メタ
ン、3,3´−ジメトキシ−4,4´−ジアミノビフェ
ニル、3,3´−ジメチル−4,4´−ジアミノビフェ
ニル、3,3´−ジクロロ−4,4´−ジアミノビフェ
ニル、2,2´,5,5´−テトラクロロ−4,4´−
ジアミノビフェニル、3,3´−ジカルボキシ−4,4
´−ジアミノビフェニル、3,3´−ジヒドロキシ−
4,4´−ジアミノビフェニル、4,4´−ジアミノジ
フェニルスルフィド、3,3´−ジアミノジフェニルエ
ーテル、3,4´−ジアミノジフェニルエーテル、4,
4´−ジアミノジフェニルメタン、4,4´−ジアミノ
ビフェニル、4,4´−ジアミノオクタフルオロビフェ
ニル、2,4´−ジアミノトルエン、パラフェニレンジ
アミン、メタフェニレンジアミン、4,4´−ジアミノ
ベンズアニリド、3,4´−ジアミノベンズアニリド、
4,3´−ジアミノベンズアニリド、2,2−ビス{4
−(4−アミノフェノキシ)フェニル}プロパン、2,
2−ビス{4−(4−アミノフェノキシ)フェニル}ヘ
キサフルオロプロパン、2,2−ビス(3−ヒドロキシ
−4−アミノフェニル)プロパン、2,2−ビス(3−
ヒドロキシ−4−アミノフェニル)ヘキサフルオロプロ
パン、9,9−ビス(4−アミノフェニル)−10−ヒ
ドロ−アントラセン、オルトトリジンスルフォン等を挙
げることができる。更に、3,3´,4,4´−テトラ
アミノジフェニルエーテル等のテトラアミン類の一部の
使用も可能である。これらの芳香族ジアミンのうち、
1,4−ビス(4−アミノベンゾイルオキシ)ベンゼン
以外の芳香族ジアミンは、本発明の目的及び効果が達成
される範囲内で使用可能だが、これらの他の芳香族ジア
ミン化合物の使用量は全芳香族ジアミン化合物に対して
10モル%以下の量、特に5モル%以下の量の使用が好
ましい。
Here, as the aromatic diamine, 1,4
It is most preferable to use only -bis (4-aminobenzoyloxy) benzene and 4,4'-diaminodiphenyl ether, but it is possible to use other aromatic diamine compounds together with these aromatic diamines. Aromatic diamines that can be used in combination include 4,4′-
Bis (4-aminophenoxy) biphenyl, 4,4'-
Diaminodiphenyl sulfone, 3,3'-diaminodiphenyl sulfone, bis {4- (4-aminophenoxy) phenyl} sulfone, bis {4- (3-aminophenoxy) phenyl} sulfone, bis {4- (2-aminophenoxy) ) Phenyl} sulfone, 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (4
-Aminophenoxy) benzene, 1,3-bis (3-aminophenoxy) benzene, 1,4-bis (4-aminophenyl) benzene, bis {4- (4-aminophenoxy) phenyl} ether, 4,4 ' -Diaminodiphenylmethane, bis (3-methyl-4-aminophenyl) methane, bis (3-chloro-4-aminophenyl) methane, 3,3'-dimethoxy-4,4'-diaminobiphenyl, 3,3'- Dimethyl-4,4'-diaminobiphenyl, 3,3'-dichloro-4,4'-diaminobiphenyl, 2,2 ', 5,5'-tetrachloro-4,4'-
Diaminobiphenyl, 3,3'-dicarboxy-4,4
′ -Diaminobiphenyl, 3,3′-dihydroxy-
4,4'-diaminobiphenyl, 4,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,
4'-diaminodiphenylmethane, 4,4'-diaminobiphenyl, 4,4'-diaminooctafluorobiphenyl, 2,4'-diaminotoluene, paraphenylenediamine, metaphenylenediamine, 4,4'-diaminobenzanilide, 3 , 4'-diaminobenzanilide,
4,3'-diaminobenzanilide, 2,2-bis {4
-(4-aminophenoxy) phenyl} propane, 2,
2-bis {4- (4-aminophenoxy) phenyl} hexafluoropropane, 2,2-bis (3-hydroxy-4-aminophenyl) propane, 2,2-bis (3-
Examples thereof include hydroxy-4-aminophenyl) hexafluoropropane, 9,9-bis (4-aminophenyl) -10-hydro-anthracene and orthotolidine sulfone. Further, it is possible to use a part of tetraamines such as 3,3 ′, 4,4′-tetraaminodiphenyl ether. Of these aromatic diamines,
Aromatic diamines other than 1,4-bis (4-aminobenzoyloxy) benzene can be used within a range in which the objects and effects of the present invention are achieved, but the amount of these other aromatic diamine compounds used is the total. It is preferably used in an amount of 10 mol% or less, particularly 5 mol% or less, based on the aromatic diamine compound.

【0018】また、テトラカルボン酸二無水物として
は、具体的にピロメリット酸二無水物、3,3´,4,
4´−ビフェニルテトラカルボン酸二無水物、2,3,
3´4´−ビフェニルテトラカルボン酸二無水物、3,
3´,4,4´−ベンゾフェノンテトラカルボン酸二無
水物、2,3,6,7−ナフタレンテトラカルボン酸二
無水物、1,4,5,8−ナフタレンテトラカルボン酸
二無水物、2,2−ビス(3,4−ジカルボキシフェニ
ル)プロパン二無水物、ビス(3,4−ジカルボキシフ
ェニル)エタン二無水物、ビス(3,4−ジカルボキシ
フェニル)エーテル酸二無水物、1,1−ビス(3,4
−カルボキシフェニル)エタン酸二無水物、3,4,
9,10−ペリレンテトラカルボン酸二無水物、ベンゼ
ン−1,2,3,4−テトラカルボン酸二無水物、2,
3,6,7−アントラセンテトラカルボン酸二無水物、
1,2,7,8−フェニレンテトラカルボン酸二無水物
等を挙げることができ、これらは一種を単独でまたは二
種以上を併用して使用することができる。
Specific examples of the tetracarboxylic dianhydride include pyromellitic dianhydride, 3,3 ', 4.
4'-biphenyltetracarboxylic dianhydride, 2,3
3'4'-biphenyltetracarboxylic dianhydride, 3,
3 ', 4,4'-benzophenone tetracarboxylic dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 1,4,5,8-naphthalene tetracarboxylic dianhydride, 2, 2-bis (3,4-dicarboxyphenyl) propane dianhydride, bis (3,4-dicarboxyphenyl) ethane dianhydride, bis (3,4-dicarboxyphenyl) etheric acid dianhydride, 1, 1-bis (3,4
-Carboxyphenyl) ethanoic acid dianhydride, 3,4
9,10-Perylene tetracarboxylic dianhydride, benzene-1,2,3,4-tetracarboxylic dianhydride, 2,
3,6,7-anthracene tetracarboxylic dianhydride,
Examples thereof include 1,2,7,8-phenylenetetracarboxylic dianhydride, and these can be used alone or in combination of two or more.

【0019】上述の芳香族ジアミンと芳香族テトラカル
ボン酸二無水物とを反応させる場合、芳香族ジアミン混
合物100モルに対して芳香族テトラカルボン酸二無水
物を96〜105モルの割合で混合することが望まし
く、この範囲から外れると製造したポリイミド共重合体
の重合度が上がらず十分な機械的強度が維持できない場
合がある。
When the above-mentioned aromatic diamine is reacted with the aromatic tetracarboxylic dianhydride, the aromatic tetracarboxylic dianhydride is mixed in a ratio of 96 to 105 mol with respect to 100 mol of the aromatic diamine mixture. Desirably, if it is out of this range, the degree of polymerization of the produced polyimide copolymer may not be increased and sufficient mechanical strength may not be maintained.

【0020】また、芳香族ジアミンと芳香族テトラカル
ボン酸二無水物との反応は有機極性溶媒中で行うことが
できる。この場合、使用する有機極性溶媒としては、例
えば、ジメチルスルフォキシド等のスルフォキシド系溶
媒、N,N−ジメチルホルムアミド,N,N−ジエチル
ホルムアミド等のホルムアミド系溶媒、N,N−ジメチ
ルアセトアミド,N,N−ジエチルアセトアミド等のア
セトアミド系溶媒、N−メチル−2−ピロリドン等のピ
ロリドン系溶媒、フェノ−ル、o−,m−,またはp−
クレゾ−ル,キシレノ−ル,ハロゲン化フェノ−ル,カ
テコ−ル等のフェノ−ル系溶媒、あるいはヘキサメチル
ホスホルムアミド,γ−ブチロラクトン等を挙げること
ができる。これら有機極性溶媒は一種を単独でまたは二
種以上を混合して用いても良く、また、上記有機極性溶
媒にキシレン、トルエン等の芳香族炭化水素系の有機非
極性溶媒を併用して用いることも可能である。上記有機
極性溶媒の使用量は特に限定されないが、重合反応によ
り得られるポリアミド酸が有機極性溶媒中に5〜30重
量%、特に10〜20重量%溶解しているように芳香族
ジアミン、芳香族テトラカルボン酸二無水物、有機極性
溶媒の使用量を決定することが好ましい。
The reaction between the aromatic diamine and the aromatic tetracarboxylic dianhydride can be carried out in an organic polar solvent. In this case, examples of the organic polar solvent used include sulfoxide-based solvents such as dimethyl sulfoxide, formamide-based solvents such as N, N-dimethylformamide, N, N-diethylformamide, N, N-dimethylacetamide, N. , Acetamide-based solvents such as N-diethylacetamide, pyrrolidone-based solvents such as N-methyl-2-pyrrolidone, phenol, o-, m-, or p-
Examples thereof include phenol-based solvents such as cresol, xylenol, halogenated phenol and catechol, and hexamethylphosphoramide, γ-butyrolactone and the like. These organic polar solvents may be used singly or as a mixture of two or more, and xylene, an aromatic hydrocarbon-based organic non-polar solvent such as toluene may be used in combination with the organic polar solvent. Is also possible. The amount of the organic polar solvent used is not particularly limited, but the aromatic diamine and the aromatic diamine such that the polyamic acid obtained by the polymerization reaction is dissolved in the organic polar solvent in an amount of 5 to 30% by weight, particularly 10 to 20% by weight. It is preferable to determine the amounts of tetracarboxylic dianhydride and organic polar solvent used.

【0021】なお、上述の重合反応は、0〜70℃で1
〜50時間、特に0〜30℃で2〜24時間行うことに
よってより効果的にポリアミド酸を得ることができる。
The above-mentioned polymerization reaction is carried out at 0 to 70 ° C. for 1 hour.
The polyamic acid can be obtained more effectively by conducting the treatment at -50 hours, particularly at 0-30 ° C for 2-24 hours.

【0022】上で得られたポリアミド酸の粘度は特に制
限されないが、上述したように0.5g/100mlD
MF中で測定温度30℃において測定した場合の対数粘
度が0.5〜5dl/gであることが好ましく、これが
ポリイミド共重合体の分子量の指標になる。
The viscosity of the polyamic acid obtained above is not particularly limited, but as described above, 0.5 g / 100 mlD
The logarithmic viscosity when measured in MF at a measurement temperature of 30 ° C. is preferably 0.5 to 5 dl / g, and this is an index of the molecular weight of the polyimide copolymer.

【0023】上記のようにして合成されたポリアミド酸
は、次いで脱水閉環を行うことによりポリイミド共重合
体を製造することができる。脱水閉環方法には、例え
ば、熱的,化学的脱水閉環等の方法を採用することがで
きる。
The polyamic acid synthesized as described above can then be dehydrated and ring-closed to produce a polyimide copolymer. As the dehydration ring closure method, for example, a method such as thermal or chemical dehydration ring closure can be adopted.

【0024】ポリアミド酸を熱的に脱水閉環する場合
は、200〜500℃で5〜120分間加熱する方法が
好適である。
In the case of thermally dehydrating and ring-closing the polyamic acid, a method of heating at 200 to 500 ° C. for 5 to 120 minutes is preferable.

【0025】また、化学的に脱水閉環するには脱水剤及
び触媒を用いた方法が好適である。この場合、脱水剤と
しては、脂肪族酸無水物、芳香族酸無水物、N,N´−
ジアルキルカルボンイミド、低級脂肪酸ハロゲン化物、
ハロゲン化低級脂肪酸ハロゲン化物、ハロゲン化低級脂
肪酸無水物、アリルフォスフォン酸ジハロゲン化物、チ
オニルハロゲン化物等を挙げることができ、これらは一
種を単独でまたは二種以上を混合して用いることができ
る。上記脱水剤の使用量はポリアミド酸の繰り返し単位
あたり、約0.1〜10モル量、特に0.5〜4モル量
が好ましい。
Further, a method using a dehydrating agent and a catalyst is suitable for the chemical dehydration ring closure. In this case, as the dehydrating agent, aliphatic acid anhydride, aromatic acid anhydride, N, N'-
Dialkyl carbonimide, lower fatty acid halide,
Examples thereof include halogenated lower fatty acid halides, halogenated lower fatty acid anhydrides, allylphosphonic acid dihalides, thionyl halides, etc. These can be used alone or in combination of two or more. The amount of the dehydrating agent used is preferably about 0.1 to 10 mols, and particularly preferably 0.5 to 4 mols, per repeating unit of polyamic acid.

【0026】触媒を使う際には、例えば、トリエチルア
ミン等の脂肪族第三級アミン、ジメチルアニリン等の芳
香族第三級アミン、ピリジン、β−ピコリン、イソキノ
リン等の複素環式第三級アミン等が挙げられ、これらは
一種を単独でまたは二種以上を混合して使用することが
できる。上記触媒の使用量は、ポリアミド酸の繰り返し
単位あたり約0.01〜4モル量、特に0.1〜2モル
量が好ましい。
When a catalyst is used, for example, aliphatic tertiary amines such as triethylamine, aromatic tertiary amines such as dimethylaniline, heterocyclic tertiary amines such as pyridine, β-picoline, isoquinoline, etc. These may be used alone or in combination of two or more. The amount of the above-mentioned catalyst used is preferably about 0.01 to 4 mols, and particularly preferably 0.1 to 2 mols per repeating unit of polyamic acid.

【0027】上記化学的脱水閉環の反応を行うには、2
0〜400℃で0.2〜20時間、特に50〜350℃
で0.5〜5時間が好ましい。
To carry out the above chemical dehydration ring closure reaction, 2
0.2 to 20 hours at 0 to 400 ° C, especially 50 to 350 ° C
Therefore, 0.5 to 5 hours is preferable.

【0028】また、ポリイミド共重合体をフィルム状と
して得るには、上記ポリアミド酸の有機極性溶媒をエン
ドレスベルト等の支持体に流延または塗布して膜状と
し、この膜を100〜150℃で乾燥し、溶剤を10〜
30%含有するポリアミド酸の自己支持性の膜を得る。
次いでこの膜を支持体上から引き剥がし端部を固定した
後、約150℃〜250℃に加熱して溶剤をとばし、更
に、250〜500℃で脱水イミド化することにより、
厚さ約10〜150μmのポリイミドフィルムを得るこ
とができる。
In order to obtain a polyimide copolymer in the form of a film, the organic polar solvent of the polyamic acid is cast or coated on a support such as an endless belt to form a film, and the film is formed at 100 to 150 ° C. Dry and add 10-solvent
A polyamic acid self-supporting membrane containing 30% is obtained.
Then, after peeling off this film from the support and fixing the ends, it is heated to about 150 ° C to 250 ° C to remove the solvent, and further dehydrated and imidized at 250 to 500 ° C.
A polyimide film having a thickness of about 10 to 150 μm can be obtained.

【0029】このようにして得られるポリイミド共重合
体は、耐熱性に優れると共に、高い機械的強度、低い熱
膨脹係数及び低吸水率を有し、ファインパタ−ン化フレ
キシブルプリント配線基板等の基材として好適に用いら
れる。
The polyimide copolymer thus obtained has excellent heat resistance, high mechanical strength, a low coefficient of thermal expansion and a low water absorption rate, and is a base material for fine-patterned flexible printed wiring boards and the like. Is preferably used as.

【0030】[0030]

【実施例】以下、実施例及び比較例を示し、本発明を具
体的に説明するが、本発明は下記実施例に制限されるも
のではない。
EXAMPLES The present invention will be specifically described below by showing Examples and Comparative Examples, but the present invention is not limited to the following Examples.

【0031】[参考例]まず、下記のように1,4−ビ
ス(4−アミノベンゾイルオキシ)ベンゼンを合成し
た。
Reference Example First, 1,4-bis (4-aminobenzoyloxy) benzene was synthesized as follows.

【0032】テトラヒドロフラン500mlに1,4−
ジヒドロキシベンゼン33.0g(0.300mol)
とトリエチルアミン66.8g(0.660mol)を
溶解し、0℃に冷却後、その中にテトラヒドロフラン1
50mlとp−ニトロ塩化ベンゾイル116.9g
(0.630mol)を溶かした溶液を反応液の温度が
10℃以下になるように滴下した。その後、室温に戻
し、2時間攪拌を続けた。
1,4-into 500 ml of tetrahydrofuran
Dihydroxybenzene 33.0g (0.300mol)
And 66.8 g (0.660 mol) of triethylamine were dissolved and cooled to 0 ° C., and tetrahydrofuran 1 was added to the solution.
50 ml and p-nitrobenzoyl chloride 116.9 g
A solution in which (0.630 mol) was dissolved was added dropwise so that the temperature of the reaction liquid was 10 ° C or lower. Then, it returned to room temperature and continued stirring for 2 hours.

【0033】次いで、析出物を瀘過し、テトラヒドロフ
ランで洗浄し、更に水、メタノ−ルで洗浄した後、乾燥
して、1,4−ビス(4−ニトロベンゾイルオキシ)ベ
ンゼンの白色結晶を得た。その収量は121.0g(収
率98.8%)であった。粗結晶をN,N−ジメチルホ
ルムアミドにより再結晶し純品を得た。
Next, the precipitate was filtered, washed with tetrahydrofuran, further washed with water and methanol, and dried to obtain white crystals of 1,4-bis (4-nitrobenzoyloxy) benzene. It was The yield was 121.0 g (yield 98.8%). The crude crystal was recrystallized with N, N-dimethylformamide to obtain a pure product.

【0034】1000mlのオ−トクレ−ブに上で得ら
れた1,4−ビス(4−ニトロベンゾイルオキシ)ベン
ゼン102.1g(0.250mol)を5%Pd/C
3g及びジメチルホルムアミド700mlと共に装入し
た。60℃で激しく攪拌しながら水素を導入し、水素の
吸収が認められなくなるまで攪拌を続けた。
102.1 g (0.250 mol) of 1,4-bis (4-nitrobenzoyloxy) benzene obtained above was added to 5% Pd / C in 1000 ml of autoclave.
Charged with 3 g and 700 ml of dimethylformamide. Hydrogen was introduced with vigorous stirring at 60 ° C., and stirring was continued until hydrogen absorption was no longer observed.

【0035】冷却後、瀘過して触媒を除去し、減圧濃縮
して水1000mlへ注ぎ、沈殿物を瀘過し、水で洗浄
後、減圧乾燥し、1,4−ビス(4−アミノベンゾイル
オキシ)ベンゼンの淡茶白色固体を得た。収量は83.
6g(収率96.0%)であった。粗結晶をジメチルホ
ルムアミド/メタノ−ルの混合溶媒により再結晶し純品
を得た。
After cooling, the catalyst was removed by filtration, concentrated under reduced pressure and poured into 1000 ml of water. The precipitate was filtered, washed with water and dried under reduced pressure to give 1,4-bis (4-aminobenzoyl). A light brown white solid of (oxy) benzene was obtained. Yield 83.
It was 6 g (yield 96.0%). The crude crystal was recrystallized with a mixed solvent of dimethylformamide / methanol to obtain a pure product.

【0036】[実施例1]1000mlのフラスコに
N,N−ジメチルホルムアミド403.2gを入れ、窒
素ガスを流しながら、1,4−ビス(4−アミノベンゾ
イルオキシ)ベンゼン6.967g(0.020mo
l)及び4,4´−ジアミノジフェニルエーテル16.
019g(0.080mol)をN,N−ジメチルホル
ムアミドに溶解させた。次にピロメリット酸二無水物2
1.812g(0.100mol)を加え、25℃で3
時間反応させた。
[Example 1] 403.2 g of N, N-dimethylformamide was placed in a 1000 ml flask, and 6.967 g (0.020mo) of 1,4-bis (4-aminobenzoyloxy) benzene was added while flowing nitrogen gas.
1) and 4,4'-diaminodiphenyl ether 16.
019 g (0.080 mol) was dissolved in N, N-dimethylformamide. Next, pyromellitic dianhydride 2
Add 1.812 g (0.100 mol) and add 3 at 25 ° C.
Allowed to react for hours.

【0037】次に、これらのアミド酸溶液をガラス板上
にアプリケ−タ−で薄くのばし、オ−ブン中110℃、
60分間乾燥してから剥離して、鉄枠に固定し、200
℃,60分、次いで300℃,60分、脱溶剤イミド化
して約25μm厚のポリイミドフィルムを得た。このポ
リイミドフィルムの特性を表1に示す。
Next, these amic acid solutions were thinly spread on a glass plate with an applicator and heated in an oven at 110 ° C.
After drying for 60 minutes, peel it off, fix it to the iron frame, and
Desolvation and imidization were conducted at 60 ° C. for 60 minutes and then at 300 ° C. for 60 minutes to obtain a polyimide film having a thickness of about 25 μm. The properties of this polyimide film are shown in Table 1.

【0038】[実施例2]1000mlのフラスコに
N,N−ジメチルホルムアミド429.8gを入れ、窒
素ガスを流しながら、1,4−ビス(4−アミノベンゾ
イルオキシ)ベンゼン13.934g(0.040mo
l)及び4,4´−ジアミノジフェニルエーテル12.
014g(0.060mol)をN,N−ジメチルホル
ムアミドに溶解させた。次にピロメリット酸二無水物2
1.812g(0.100mol)を加え、25℃で3
時間反応させた後、実施例1と同様の方法によりポリイ
ミドフィルムを得た。このポリイミドフィルムの特性を
表1に示す。
[Example 2] 429.8 g of N, N-dimethylformamide was placed in a 1000 ml flask, and 13.934 g (0.040mo) of 1,4-bis (4-aminobenzoyloxy) benzene was introduced while flowing nitrogen gas.
1) and 4,4'-diaminodiphenyl ether 12.
014 g (0.060 mol) was dissolved in N, N-dimethylformamide. Next, pyromellitic dianhydride 2
Add 1.812 g (0.100 mol) and add 3 at 25 ° C.
After reacting for a time, a polyimide film was obtained by the same method as in Example 1. The properties of this polyimide film are shown in Table 1.

【0039】[実施例3]1000mlのフラスコに
N,N−ジメチルホルムアミド456.5gを入れ、窒
素ガスを流しながら、1,4−ビス(4−アミノベンゾ
イルオキシ)ベンゼン20.902g(0.060mo
l)及び4,4´−ジアミノジフェニルエーテル8.0
10g(0.040mol)をN,N−ジメチルホルム
アミドに溶解させた。次にピロメリット酸二無水物2
1.812g(0.100mol)を加え、25℃で3
時間反応させた後、実施例1と同様の方法によりポリイ
ミドフィルムを得た。このポリイミドフィルムの特性を
表1に示す。
[Example 3] 456.5 g of N, N-dimethylformamide was placed in a 1000 ml flask, and 20.902 g (0.060mo) of 1,4-bis (4-aminobenzoyloxy) benzene was added while flowing nitrogen gas.
1) and 4,4'-diaminodiphenyl ether 8.0
10 g (0.040 mol) was dissolved in N, N-dimethylformamide. Next, pyromellitic dianhydride 2
Add 1.812 g (0.100 mol) and add 3 at 25 ° C.
After reacting for a time, a polyimide film was obtained by the same method as in Example 1. The properties of this polyimide film are shown in Table 1.

【0040】[実施例4]1000mlのフラスコに
N,N−ジメチルホルムアミド483.2gを入れ、窒
素ガスを流しながら、1,4−ビス(4−アミノベンゾ
イルオキシ)ベンゼン27.869g(0.080mo
l)及び4,4´−ジアミノジフェニルエーテル4.0
05g(0.020mol)をN,N−ジメチルホルム
アミドに溶解させた。次にピロメリット酸二無水物2
1.812g(0.100mol)を加え、25℃で3
時間反応させた後、実施例1と同様の方法によりポリイ
ミドフィルムを得た。このポリイミドフィルムの特性を
表1に示す。
Example 4 483.2 g of N, N-dimethylformamide was placed in a 1000 ml flask and 27.869 g (0.080 mo) of 1,4-bis (4-aminobenzoyloxy) benzene was added while flowing nitrogen gas.
1) and 4,4'-diaminodiphenyl ether 4.0
05 g (0.020 mol) was dissolved in N, N-dimethylformamide. Next, pyromellitic dianhydride 2
Add 1.812 g (0.100 mol) and add 3 at 25 ° C.
After reacting for a time, a polyimide film was obtained by the same method as in Example 1. The properties of this polyimide film are shown in Table 1.

【0041】[比較例1]1000mlのフラスコに
N,N−ジメチルホルムアミド509.8gを入れ、窒
素ガスを流しながら、1,4−ビス(4−アミノベンゾ
イルオキシ)ベンゼン34.836g(0.100mo
l)を加えてN,N−ジメチルホルムアミドに溶解させ
た。次にピロメリット酸二無水物21.812g(0.
100mol)を加え、25℃で3時間反応させた後、
実施例1と同様の方法によりポリイミドフィルムを得
た。このポリイミドフィルムの特性を表1に示す。
[Comparative Example 1] 509.8 g of N, N-dimethylformamide was placed in a 1000 ml flask and 34.836 g (0.100 mo) of 1,4-bis (4-aminobenzoyloxy) benzene was added while flowing nitrogen gas.
1) was added and dissolved in N, N-dimethylformamide. Next, 21.812 g of pyromellitic dianhydride (0.
(100 mol) and reacted at 25 ° C. for 3 hours,
A polyimide film was obtained by the same method as in Example 1. The properties of this polyimide film are shown in Table 1.

【0042】[比較例2]1000mlのフラスコに
N,N−ジメチルホルムアミド376.5gを入れ、窒
素ガスを流しながら、4,4´−ジアミノジフェニルエ
ーテル20.024g(0.100mol)を加えて
N,N−ジメチルホルムアミドに溶解させた。次にピロ
メリット酸二無水物21.812g(0.100mo
l)を加え、25℃で3時間反応させた後、実施例1と
同様の方法によりポリイミドフィルムを得た。このポリ
イミドフィルムの特性を表1に示す。
[Comparative Example 2] 376.5 g of N, N-dimethylformamide was placed in a 1000 ml flask, and 20.024 g (0.100 mol) of 4,4'-diaminodiphenyl ether was added while flowing nitrogen gas. It was dissolved in N-dimethylformamide. Next, 21.812 g of pyromellitic dianhydride (0.100 mo
l) was added and reacted at 25 ° C. for 3 hours, and then a polyimide film was obtained by the same method as in Example 1. The properties of this polyimide film are shown in Table 1.

【0043】得られたポリイミドフィルムにつて、機械
的特性、線膨張係数、吸水率及び対数粘度の測定方法を
下記に示す。
The methods for measuring the mechanical properties, linear expansion coefficient, water absorption and logarithmic viscosity of the obtained polyimide film are shown below.

【0044】機械的特性(引張強度、弾性率、伸度) ASTM D882−88に基づき測定した。 Mechanical Properties (Tensile Strength, Elastic Modulus, Elongation ) Measured according to ASTM D882-88.

【0045】線膨張係数 真空理工(株)製熱分析計TMA−7000を用い、昇
温速度5℃/分で150〜200℃での線膨脹係数の平
均値を求めた。
Linear expansion coefficient Using a thermal analyzer TMA-7000 manufactured by Vacuum Riko Co., Ltd., an average value of linear expansion coefficients at 150 to 200 ° C. was obtained at a temperature rising rate of 5 ° C./min.

【0046】吸水率 ポリイミドフィルムを90%RHで24時間放置し、そ
の前後の重量を測定して吸水率を求めた。
Water absorption rate The polyimide film was left at 90% RH for 24 hours, and the weight before and after that was measured to determine the water absorption rate.

【0047】対数粘度 ポリアミド酸濃度0.5g/100mlDMFであっ
て、測定温度が30℃である条件で測定した結果より、
次の計算式で算出した。
The logarithmic viscosity polyamic acid concentration was 0.5 g / 100 ml DMF, and the measurement temperature was 30 ° C.
It was calculated by the following formula.

【0048】[0048]

【数1】 [Equation 1]

【0049】これらの測定結果を表1に示す。Table 1 shows the results of these measurements.

【0050】[0050]

【表1】 [Table 1]

【0051】[0051]

【発明の効果】本発明のポリイミド共重合体は、耐熱性
に優れると共に、高い機械的強度、低い熱膨脹係数及び
低吸水率を有し、ファインパタ−ン化フレキシブルプリ
ント配線基板等の基材として好適に使用することができ
る。また、本発明の製造方法によれば、上述の優れたポ
リイミド共重合体を容易かつ確実に得ることができる。
INDUSTRIAL APPLICABILITY The polyimide copolymer of the present invention has excellent heat resistance, high mechanical strength, a low coefficient of thermal expansion and a low water absorption, and is used as a base material for a fine patterned flexible printed wiring board or the like. It can be used preferably. Further, according to the production method of the present invention, the excellent polyimide copolymer described above can be easily and surely obtained.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 下記一般式(1)で示される反復単位と
下記一般式(2)で示される反復単位とを主構成単位と
して含むことを特徴とするポリイミド共重合体。 【化1】 (但し、式中Rは4価の芳香族基を示す。)
1. A polyimide copolymer comprising a repeating unit represented by the following general formula (1) and a repeating unit represented by the following general formula (2) as main constituent units. Embedded image (However, in the formula, R represents a tetravalent aromatic group.)
【請求項2】 上記反復単位(1)と反復単位(2)と
がモル比で(1)/(2)=5/95〜90/10であ
る請求項1記載のポリイミド共重合体。
2. The polyimide copolymer according to claim 1, wherein the repeating unit (1) and the repeating unit (2) have a molar ratio of (1) / (2) = 5/95 to 90/10.
【請求項3】 1,4−ビス(4−アミノベンゾイルオ
キシ)ベンゼンと4,4´−ジアミノジフェニルエーテ
ルとを主成分とする芳香族ジアミンとテトラカルボン酸
二無水物とを重合してポリアミド酸を得、次いで該ポリ
アミド酸を熱的または化学的に脱水閉環することを特徴
とする請求項1記載のポリイミド共重合体の製造方法。
3. A polyamic acid is obtained by polymerizing an aromatic diamine containing 1,4-bis (4-aminobenzoyloxy) benzene and 4,4′-diaminodiphenyl ether as main components and tetracarboxylic dianhydride. The method for producing a polyimide copolymer according to claim 1, wherein the polyamic acid is subjected to dehydration ring closure thermally or chemically.
JP24700794A 1994-09-14 1994-09-14 Method for producing polyimide copolymer Expired - Fee Related JP3339205B2 (en)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24700794A JP3339205B2 (en) 1994-09-14 1994-09-14 Method for producing polyimide copolymer

Publications (2)

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JPH0881555A true JPH0881555A (en) 1996-03-26
JP3339205B2 JP3339205B2 (en) 2002-10-28

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JP2009215363A (en) * 2008-03-07 2009-09-24 Sekisui Chem Co Ltd Polyimide and method for producing the same
JP2009286877A (en) * 2008-05-28 2009-12-10 Sekisui Chem Co Ltd Polyimide and method for producing same
JP2010007034A (en) * 2008-06-30 2010-01-14 Sekisui Chem Co Ltd Polyimide and method for producing the same
JP2012041531A (en) * 2010-07-22 2012-03-01 Ube Industries Ltd Polyimide precursor and polyimide
CN110218315A (en) * 2018-03-01 2019-09-10 中天电子材料有限公司 The preparation method and substrate of Kapton

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009215363A (en) * 2008-03-07 2009-09-24 Sekisui Chem Co Ltd Polyimide and method for producing the same
JP2009286877A (en) * 2008-05-28 2009-12-10 Sekisui Chem Co Ltd Polyimide and method for producing same
JP2010007034A (en) * 2008-06-30 2010-01-14 Sekisui Chem Co Ltd Polyimide and method for producing the same
JP2012041531A (en) * 2010-07-22 2012-03-01 Ube Industries Ltd Polyimide precursor and polyimide
JP2016035073A (en) * 2010-07-22 2016-03-17 宇部興産株式会社 Polyimide precursor and polyimide
CN110218315A (en) * 2018-03-01 2019-09-10 中天电子材料有限公司 The preparation method and substrate of Kapton
CN110218315B (en) * 2018-03-01 2021-03-12 中天电子材料有限公司 Preparation method of polyimide film and substrate

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