JPH0873201A - Hydrogen separating membrane unit - Google Patents

Hydrogen separating membrane unit

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Publication number
JPH0873201A
JPH0873201A JP21259694A JP21259694A JPH0873201A JP H0873201 A JPH0873201 A JP H0873201A JP 21259694 A JP21259694 A JP 21259694A JP 21259694 A JP21259694 A JP 21259694A JP H0873201 A JPH0873201 A JP H0873201A
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Prior art keywords
hydrogen
permeable membrane
pd
recessed parts
hydrogen permeable
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JP21259694A
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Japanese (ja)
Inventor
Toshiro Kobayashi
Yoji Nakano
要治 中野
敏郎 小林
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Mitsubishi Heavy Ind Ltd
三菱重工業株式会社
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Priority to JP21259694A priority Critical patent/JPH0873201A/en
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Abstract

PURPOSE: To improve strength, durability to repetitive use and hydrogen permeation performance by using metallic or allay foil provided with many recessed parts in hydrogen permeating parts of a hydrogen permeable membrane. CONSTITUTION: The hydrogen permeable membrane 1 formed with the recessed parts 3 in a square-meshed form is sandwiched by metallic frames 4 joined with supporting plates 2 consisting of perforated metallic plates and are joined by joining parts 5. The hydrogen permeable membrane l consists of Pd and alloys, such as Pd-Ag, Pd-Y, Pd-Ni and Pd-Cu and is so formed as to attain to >t2 =t3 -t1 when the film thickness is defined as 30 to 50μm(t3 )de, the depth of the recessed parts as t1 , the film thickness of the recessed parts as t2 and the film thickness by the conventional method as t0 . The pitch of the recessed parts 3 is determined by taking the ratio (30 to 90%) of the area of the recessed parts 3 to the area over the entire part of the hydrogen permeable membrane and the strength, etc., over the entire part of the membrane into consideration. The recessed parts 3 described above may be formed on any of the gaseous raw material side, refined hydrogen side and both sides of the hydrogen permeable membrane 1.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は水素精製装置や水素製造装置に適用される水素分離膜ユニットに関する。 The present invention relates to a hydrogen separation membrane unit applied to the hydrogen purifier or hydrogen production apparatus.

【0002】 [0002]

【従来の技術】図8に従来の水素分離膜ユニットの断面図の1例を示す。 BACKGROUND ART FIG. 8 shows an example of a cross-sectional view of a conventional hydrogen separation membrane unit. 図8の水素分離膜ユニットでは枠4に溶接部5′で溶接され補強された金属多孔質材(金網を含む)からなる支持板2の間に水素(H 2 )のみを透過する性質を有するPd又はPd合金箔からなる水素透過膜1をはさみ、接合部5でろう付、拡散接合、溶接等により接合されている。 A hydrogen separation membrane unit of Figure 8 has the property of passing only hydrogen (H 2) between the support plate 2 made of a metal porous material which is welded by the welded portion 5 'in frame 4 reinforced (including wire mesh) the hydrogen permeable membrane 1 made of Pd or a Pd alloy foil scissors, brazing at the junction 5, diffusion bonding, are joined by welding or the like. 稼動時には高温下で原料ガス側に水素を含む原料ガスを流すことにより、水素のみが選択的に水素透過膜を通過して原料ガス側から精製水素側へ拡散、移動し、精製水素側で高純度の水素が得られる。 Time by flowing a raw material gas containing hydrogen to the raw material gas side at a high temperature in operation, only hydrogen is selectively hydrogen-permeable membrane through diffusion from the feed gas side to the purified hydrogen side, moving, high purified hydrogen side hydrogen purity is obtained.
このときの水素の透過速度は水素透過膜の厚さtに反比例し、膜の厚さtが薄ければ薄いほど高い水素分離性能が得られる。 Permeation rate of hydrogen at this time is inversely proportional to the thickness t of the hydrogen-permeable membrane, a thin higher hydrogen separation performance is obtained if thin thickness t of the film. また、原料ガス側の圧力P 1と精製水素側の圧力P 2との差圧△P=P 1 −P Further, the differential pressure between the pressure P 2 of the pressure P 1 and the purified hydrogen side of the raw material gas side △ P = P 1 -P 2が大きい方が水素透過速度が大きくなり、高性能となる。 Write 2 large increases hydrogen permeation rate becomes high.

【0003】 [0003]

【発明が解決しようとする課題】図8に示すような水素分離膜ユニットにおいては、支持板2は枠4に溶接により接合されている。 In THE INVENTION to be solved INVENTION hydrogen separation membrane unit as shown in FIG. 8, the support plate 2 is joined by welding to the frame 4. このような接合の場合、通常図8のA部の使用時の状態を示す拡大図である図7に示すように枠4の水素透過膜1に接する面と支持板2の水素透過膜1に平行な面との間に段差aが生じる。 For such bonding, a hydrogen permeable membrane 1 side and the support plate 2 in contact with the hydrogen permeable membrane 1 of the frame 4 as shown in FIG. 7 is an enlarged view showing a state during use of the A portion of the normal 8 step a is formed between the parallel plane. また、金網を含む金属多孔板で形成される支持板2の表面には多数の凹凸がある。 Further, the surface of the support plate 2 which is formed by a porous metal plate including a metal mesh has a number of irregularities. このような水素分離膜ユニットにおいて、 In such a hydrogen separation membrane unit,
水素分離性能を向上させるため△Pを大きくし、tを小さくしようとすると次のような問題がある。 Increase the △ P for improving the hydrogen separation performance, in order to reduce the t has the following problems. (1)段差a部で水素透過膜1に局部的な歪6が加わり破断する恐れがある。 (1) there is a possibility that the stepped part a local strain 6 to the hydrogen permeable membrane 1 is added to break. (2)水素透過膜1が支持板2に押しつけられ、支持板表面の凹部にくい込み、大きな歪を受けて破断する恐れがある。 (2) the hydrogen permeable membrane 1 is pressed against the support plate 2, bite into the recess of the support plate surface, there is a risk of rupture by the great strain.

【0004】本発明は前記技術水準に鑑み、従来技術における水素透過膜の破断を防止することができる水素分離膜ユニットを提供しようとするものである。 [0004] The present invention has been made in view of the above prior art, it is intended to provide a hydrogen separation membrane unit which can prevent the breakage of the hydrogen permeable membrane in the prior art.

【0005】 [0005]

【課題を解決するための手段】本発明は(1)金属又は合金箔製の水素透過膜の周囲を両面から金属製の枠ではさんで固定し、前記水素透過膜の少くとも精製水素側の面を周囲が前記金属製の枠に接合された金属多孔質材からなる支持板で支持した水素分離膜ユニットにおいて、 The present invention SUMMARY OF] is fixed across a metal frame surrounding from both (1) a metal or alloy foil made of hydrogen permeable membrane, the at least purified hydrogen side of the hydrogen permeable membrane in the hydrogen separation membrane unit a face around and supported by a supporting plate made of a metal porous material which is joined to the metal frame,
前記水素透過膜として水素の透過部分に多数の凹部を設けた金属又は合金箔製の水素透過膜を使用したことを特徴とする水素分離膜ユニット及び(2)水素透過膜に設けた凹部がディンプル状又は升目状に形成されていることを特徴とする前記(1)の水素分離膜ユニットである。 Hydrogen separation membrane units and (2) recesses dimple provided to the hydrogen permeable membrane is characterized in that using the hydrogen metal provided with a plurality of recesses in the transparent portion of the hydrogen as a transparent film or alloy foil made of hydrogen permeable membrane a hydrogen separation membrane unit of (1), characterized in that formed on Jo or square shape.

【0006】本発明の水素分離膜ユニットにおいては、 [0006] In the hydrogen separation membrane unit of the present invention,
従来この種の水素分離膜ユニットに使用されている厚さ約20μmの水素透過膜に代えて厚さ30〜50μmの水素透過膜を使用する。 Using the hydrogen-permeable membrane having a thickness of 30~50μm instead of hydrogen permeable membrane having a thickness of about 20μm, which is used for this type of hydrogen separation membrane unit prior. これによって水素透過膜の強度が増加するので、枠と支持板との接合部の段差による局部的な歪による破断を防ぐことができ、また支持板表面の凹部へのくい込みを少くすることができる。 Since thereby increasing the strength of the hydrogen permeable membrane, it is possible to reduce the can prevent breakage due to local distortions due to the step of the joint portion between the frame and the support plate, also bite into the recess of the support plate surface . 厚みが3 Thickness of 3
0μm未満では強度向上の効果がなく、50μmを超えると凹部を薄く加工することが困難である。 No effect of improving the strength is less than 0 .mu.m, it is difficult to process thin recess exceeds 50 [mu] m.

【0007】このように水素透過膜の厚みを厚くすると水素透過性が悪くなるので水素透過部分の表面に多数の凹部、すなわち膜厚の薄い部分を設け水素の透過性を確保する。 [0007] To ensure such a large number of recesses in the surface of the hydrogen permeable part because the hydrogen-permeable when the thicker thickness of the hydrogen permeable membrane is deteriorated, i.e. the permeability of hydrogen is provided a thin portion of the film thickness. 凹部の深さt 1は、凹部のない部分の膜厚をt Depth t 1 of the recess, a film thickness of no concave portion t
3 、凹部における膜厚をt 2 、従来方法における膜厚をt 0とした場合にt 0 >t 2 =t 3 −t 1となるようにするのが望ましい。 3, the thickness of the recess t 2, the thickness in the conventional methods in the case of a t 0 t 0> t 2 = t 3 to such a -t 1 is desirable. 凹部の形状としては特に制限はなく、図4に示す升目状、図5に示すディンプル状など膜の材質、形状等に応じて適当な形状とすればよい。 There is no particular limitation on the shape of the recess, square shape shown in FIG. 4, the material of the dimple-like, such as film shown in FIG. 5, and may be a suitable shape according to the shape or the like. 水素透過膜の凹部のピッチ(l 1 )は凹部の面積の水素透過面全体の面積に対する割合と膜全体の強度等を考慮して適宜定めればよい。 Hydrogen pitch of the concave portions of the permeable membrane (l 1) may be determined as appropriate in consideration of the proportions and the entire film such as strength to the area of the entire hydrogen permeable surface area of the recess. なお、支持板として使用する金属支持板の表面にも凹凸がある。 Incidentally, there is unevenness on the surface of the metal supporting plate used as the support plate. 通常、金属多孔板の凹部のピッチは明確ではないが、大まかな傾向としてそのピッチを(l 2 )とした場合l 2 <l 1となると水素透過膜が破損しやすくなる恐れがあるので、(l 1 )は支持板表面の凹部のピッチ(l Usually, the pitch of the recesses of the porous metallic plate is not clear, there is a possibility that the pitch as a rough trend (l 2) and the case l 2 <l 1 when it comes to the hydrogen permeable membrane is easily damaged, ( l 1) is the pitch of the recesses of the support plate surface (l 2 )より小さくなるようにするのが望ましい。 It is desirable to be less than 2). また、凹部の面積は水素透過面全体の面積の30〜90%程度とする。 The area of ​​the recesses is 30 to 90% of the total area of ​​the hydrogen permeable surface. 30%未満では水素透過性が悪く、90%を超えると強度が低下するので好ましくない。 Poor hydrogen permeability is less than 30% is not preferable because strength decreases exceeds 90%.

【0008】本発明の水素分離膜ユニットにおける水素透過膜の材質としてはPdのほかPd−Ag,Pd− [0008] In addition to Pd-Ag and Pd as the material of the hydrogen permeable membrane in the hydrogen separation membrane unit of the present invention, Pd-
Y,Pd−Ni,Pd−CuなどのPd合金あるいはP Y, Pd-Ni, Pd alloy such as Pd-Cu or P
dに前記のAgなどの添加金属を複合して加えた三元合金なども使用することができる。 Such ternary alloy was added in combination the addition metal such as said Ag to d can also be used.

【0009】前記の凹部は水素透過膜の原料ガス側、精製水素側のどちらに設けてもよく、両面に設けてもよい。 [0009] The recess raw gas side of the hydrogen permeable membrane may be provided in either of the purified hydrogen side, it may be provided on both surfaces. このような凹部はパターニング後エッチングするなどの方法により形成させることができる。 Such recesses can be formed by a method such as etching after patterning.

【0010】本発明の水素分離膜ユニットは前記の凹部を設けた水素透過膜の周囲の凹部が形成されていない部分を、両面から金属多孔質材からなる支持板が接合された金属製の枠ではさみ、ろう付け、拡散接合あるいは溶接により固定した構成となっている。 [0010] The recesses are not formed part of the periphery of the hydrogen permeable membrane hydrogen separation membrane unit provided with recesses of the present invention described above, the metal supporting plate made of a metal porous material from both sides are bonded frame in scissors, brazing, and has a configuration which is fixed by diffusion bonding or welding. なお、使用条件等により原料ガス側の支持板は省略してもよい。 The support plate of the raw material gas side by use conditions or the like may be omitted. また、ここでいう金属多孔質材とは金網状あるいは不織布の形状を含むものである。 Further, the metal porous materials herein is intended to include the shape of a wire mesh-like or nonwoven fabric.

【0011】本発明の水素分離膜ユニットの1例について、その断面図を図1に示す。 [0011] For 1 example of the hydrogen separation membrane unit of the present invention, showing the cross-sectional view in FIG. 図1において升目状の凹部3が形成された水素透過膜1が、金属多孔材からなる支持板2が接合された金属製の枠4により凹部が形成されていない部分ではさまれ、接合部5で接合されている。 Figure hydrogen permeable membrane 1 square-shaped recess 3 is formed in 1, pinched at the portion where the support plate 2 made of a metal porous material is not formed recess by metal frame 4 which is joined, the joint 5 in are joined. この例では凹部は原料ガス側に形成されている。 In this example the recess is formed in the raw material gas side.

【0012】図2及び図3にそれぞれ本発明の水素分離膜ユニットの他の例を示す。 [0012] in FIGS. 2 and 3 shows another example of a hydrogen separation membrane unit of the present invention. 図2は水素透過膜1の升目状の凹部3が精製水素側に形成された例である。 Figure 2 is an example where square-shaped recess 3 of the hydrogen permeable membrane 1 is formed on the purified hydrogen side. 水素透過膜1の保持形態としては図1のように原料ガス側に凹部3を設け、精製水素側を平坦にし、その面を支持板2 The recesses 3 on the raw gas side as shown in FIG. 1 is provided as a holding configuration of the hydrogen permeable membrane 1, to flatten the purification of hydrogen side, the face supporting plate 2
に接触させて保持するのが望ましいが、水素の透過性能には差はない。 It is desirable to retain in contact with, there is no difference in the permeation performance of the hydrogen. 図3は図1の構造の原料ガス側の支持板2が省略された例であるが、水素の透過性能、膜の保持効果は変わらない。 Figure 3 is an example of the support plate 2 of the raw material gas side is omitted in the structure of FIG. 1, the transmission performance of the hydrogen, the holding effect of the film does not change.

【0013】 [0013]

【作用】水素透過膜として従来使用されているものより厚いものを用いるようにしたことにより、図1のB部の使用時の拡大図である図6に示すように、図7に見られる局部的な歪6の発現が抑制され、△Pをより大きくしても破断し難くなる。 By that to use a thicker than those conventionally used as a [action] hydrogen permeable membrane, as shown in FIG. 6 is an enlarged view of the use of the B portion of FIG. 1, the local seen in FIG. 7 expression of strain 6 is suppressed, and it becomes difficult to break even if larger △ P. また、水素透過部分に凹部を設けることにより、凸部の厚さt 3に相当する厚みを有する水素透過膜に近い剛性が得られ、かつ、凹部の厚さt 1 Further, by providing a recess in hydrogen permeation section, the rigidity near the hydrogen permeable membrane obtained having a thickness corresponding to the thickness t 3 of the convex portion and the concave portion thickness t 1
に相当する厚さの水素透過膜に近い優れた水素透過性能が得られる。 Excellent hydrogen permeability can be obtained close to the hydrogen permeable membrane thickness corresponding to.

【0014】 [0014]

【実施例】以下実施例により本発明をさらに具体的に説明する。 Further illustrate the present invention by the following examples. 図1の形状の水素分離膜ユニットを作製し性能評価試験を行った。 To produce a hydrogen separation membrane unit in the form of FIG. 1 evaluated the performance test. 先ずSUS316製の枠4とSUS First made of SUS316 frame 4 and the SUS
316製で厚さ0.8mmで平均孔径(凹部のピッチ) The average pore diameter in the thickness of 0.8mm made of 316 (pitch of the recesses)
2が約30μmの金属多孔体(平均繊維径1.5μ porous metal body of l 2 is approximately 30 [mu] m (average fiber diameter 1.5μ
m、平均孔径30μmの不織布)からなる支持板2を溶接により接合した。 m, were joined by welding the support plate 2 made of an average pore diameter of 30μm nonwoven). この支持板2を接合した枠4の間に、図4に示すように一辺15μmの正方形で深さ25 During frame 4 formed by joining the support plate 2, 25 depth square side 15μm as shown in FIG. 4
μmの升目状の凹部を25μmのピッチで形成させた厚さ40μmのPd−20wt%Ag合金圧廷箔からなる水素透過膜1をはさんで接合し、約120mm×70m Joined across the hydrogen permeable membrane 1 made of a square-shaped recess μm from Pd-20 wt% Ag alloy 圧廷 foil with a thickness of 40μm which has formed at a pitch of 25 [mu] m, about 120 mm × 70m
mの大きさの水素分離膜ユニットを作製した。 The size of the hydrogen separation membrane unit of m was produced. この例では図6のaに相当する段差は20μmであった。 Step in this example, which corresponds to a in FIG. 6 was 20 [mu] m.

【0015】凹部を形成させた水素透過膜は次のようにして作製した。 The hydrogen permeable membrane to form a recess was prepared as follows. すなわち、厚さ40μmのPd−20w That is, the thickness of 40 [mu] m Pd-20 w
t%Ag合金圧廷箔をアルカリ洗浄液中で超音波洗浄し、真空中で乾燥後、ポジタイプのレジスト材(東京応化製TSMR8800)を両面にコーターで塗付し、9 The t% Ag alloy 圧廷 foil was subjected to ultrasonic cleaning with an alkaline cleaning solution, after drying in vacuo, subjected coated with coater resist material positive-type (product of Tokyo Ohka TSMR8800) on both sides, 9
0℃で30分間加熱乾燥後、ピッチ25μm、一辺15 0 ℃ for 30 minutes after heating and drying, pitch 25 [mu] m, one side 15
μmの正方形のマスクを用い、片面に紫外線を露光した後、レジスト剥離液(東京応化製NMD−W)中で一辺15μmの正方形部のレジスト材を除去した。 Using a mask μm square, after exposed to ultraviolet rays on one side, removing the resist material of the square portion of one side 15μm in resist stripper (Tokyo Ohka NMD-W). その後、 after that,
120℃のフッ酸中で30分間保持し、一辺15μmの正方形部をエッチング除去した。 Held in the 120 ° C. hydrofluoric acid for 30 minutes, the square portion of the side 15μm were removed by etching. その結果、正方形凹部の深さは約25μmであった。 As a result, the depth of the square recesses were about 25 [mu] m.

【0016】比較試料として水素透過膜1を厚さ20μ [0016] The thickness 20μ hydrogen permeable membrane 1 as a comparative sample
mのPd−20wt%Ag合金圧廷箔としたほかは前記と同様にして図8の構造の水素分離膜ユニットを作製した。 Addition to the Pd-20 wt% Ag alloy 圧廷 foil m was prepared hydrogen separation membrane unit of the structure of FIG. 8 in the same manner as above.

【0017】このようにして作製した試料について箔の破断試験及び水素透過性能により性能評価を行った。 [0017] evaluated the performance by this way foil breaking test and the hydrogen permeability of the samples prepared. まず箔の破断については、Ar中で原料側(P 1 )と精製水素側(P 2 )の差圧△P=P 1 −P 2 =9kgf/c The first rupture of the foil, the differential pressure of the feed side in Ar (P 1) and the purified hydrogen side (P 2) △ P = P 1 -P 2 = 9kgf / c
2として(P 2は真空)昇温速度300℃/Hrで6 As m 2 (P 2 is vacuum) at a heating rate of 300 ° C. / Hr 6
00℃に加熱し、30分間保持後、冷却速度300℃/ Was heated to 00 ° C., after holding for 30 minutes, cooling rate 300 ° C. /
Hrで室温まで下げる履歴を繰返した。 Was repeated history lowered to room temperature at Hr. また、水素透過性能は差圧を9kgf/cm 2とし、原料ガス側を99 The hydrogen permeability is the pressure difference between 9 kgf / cm 2, the raw material gas side 99
%以上の水素を含む標準水素ガスとし、550℃で精製水素側に透過してくる水素の量から水素透過速度を測定した。 A standard hydrogen gas containing% or more of hydrogen was measured hydrogen permeation rate from the amount of hydrogen coming transmitted in purified hydrogen side at 550 ° C..

【0018】試験に用いた試料の形状及び性能評価試験結果を表1に示す。 [0018] Table 1 shows the shape and performance evaluation test results of the sample used in the test. 表1からわかるように破断試験においては従来方法による比較例の試料では、9回目に箔が破断しP 2の圧力が上昇した。 In the sample of Comparative Example according to the conventional method in rupture test as seen from Table 1, the pressure of the foil is broken P 2 rises to 9 th. これに対し本発明による実施例の試料では、50回の繰返しによっても破断しなかった。 In the sample embodiment of the inventive contrast, it was not broken even by 50 repetitions. また、水素透過速度は比較例では180cm 3 Further, 180cm 3 hydrogen permeation rate Comparative Example
/(cm 2・min・atm 0. 5 )であるのに対し、本発明の実施例では230cm 3 /(cm 2・min・a / Contrast is (cm 2 · min · atm 0. 5), in the embodiment of the present invention 230cm 3 / (cm 2 · min · a
tm 0.5 )と高い値が得られた。 tm 0.5) and a high value was obtained.

【0019】 [0019]

【表1】 [Table 1]

【0020】 [0020]

【発明の効果】本発明の水素分離膜ユニットは、従来の水素分離膜ユニットに比較すると、強度が著しく改善され、長時間の繰返し使用に対する耐性が格段に優れており、しかも水素透過性能は同等以上である。 Hydrogen separation membrane unit of the present invention exhibits, when compared to conventional hydrogen separation membrane unit, the strength is significantly improved, and resistance is far superior for long-term repeated use, yet hydrogen permeability equivalent or more.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の水素分離膜ユニットの1例を示す断面図。 Sectional view of an example of a hydrogen separation membrane unit of the present invention; FIG.

【図2】本発明の水素分離膜ユニットの他の1例を示す断面図。 Sectional view showing another example of a hydrogen separation membrane unit of the present invention; FIG.

【図3】本発明の水素分離膜ユニットの他の1例を示す断面図。 Sectional view showing another example of a hydrogen separation membrane unit of the present invention; FIG.

【図4】本発明に係る水素透過膜の升目状凹部の1例を示す拡大図。 Enlarged view showing an example of a square-shaped recess of the hydrogen-permeable membrane according to the present invention; FIG.

【図5】本発明に係る水素透過膜のディンプル状凹部の1例を示す拡大図。 Enlarged view showing an example of a dimple-like recess of the hydrogen-permeable membrane according to the present invention; FIG.

【図6】図1のB部の使用時の状態を示す拡大図。 Figure 6 is an enlarged view illustrating a state in use of the B portion of FIG.

【図7】図8のA部の使用時の状態を示す拡大図。 Figure 7 is an enlarged view showing a state during use of the A portion of Fig.

【図8】従来の水素分離膜ユニットの1例を示す断面図。 8 is a cross-sectional view showing an example of a conventional hydrogen separation membrane unit.

Claims (2)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 金属又は合金箔製の水素透過膜の周囲を両面から金属製の枠ではさんで固定し、前記水素透過膜の少くとも精製水素側の面を周囲が前記金属製の枠に接合された金属多孔質材からなる支持板で支持した水素分離膜ユニットにおいて、前記水素透過膜として水素の透過部分に多数の凹部を設けた金属又は合金箔製の水素透過膜を使用したことを特徴とする水素分離膜ユニット。 The periphery of claim 1 the metal or alloy foil made of the hydrogen permeable membrane was fixed by sandwiching with metal frame from both sides, to at least the surface of the purified hydrogen side around it made the metal frame of the hydrogen permeable membrane in the hydrogen separation membrane unit which is supported by a supporting plate made of joined metal porous material, that using the metal hydrogen provided with a plurality of recesses in the transparent portion of the hydrogen as a transparent film or alloy foil made of hydrogen permeable membrane hydrogen separation membrane unit, wherein.
  2. 【請求項2】 水素透過膜に設けた凹部がディンプル状又は升目状に形成されていることを特徴とする請求項1 2. A recess formed on the hydrogen permeable membrane is characterized in that it is formed in a dimple-like or square-shaped according to claim 1
    に記載の水素分離膜ユニット。 Hydrogen separation membrane unit according to.
JP21259694A 1994-09-06 1994-09-06 Hydrogen separating membrane unit Withdrawn JPH0873201A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21259694A JPH0873201A (en) 1994-09-06 1994-09-06 Hydrogen separating membrane unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21259694A JPH0873201A (en) 1994-09-06 1994-09-06 Hydrogen separating membrane unit

Publications (1)

Publication Number Publication Date
JPH0873201A true JPH0873201A (en) 1996-03-19

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JP21259694A Withdrawn JPH0873201A (en) 1994-09-06 1994-09-06 Hydrogen separating membrane unit

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Country Link
JP (1) JPH0873201A (en)

Cited By (12)

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Publication number Priority date Publication date Assignee Title
JP2002128506A (en) * 2000-05-15 2002-05-09 Toyota Motor Corp Hydrogen-forming unit
JP2003034506A (en) * 2001-07-23 2003-02-07 Toyota Motor Corp Hydrogen extractor
JP2003081611A (en) * 2001-09-07 2003-03-19 Toyota Motor Corp Lamination structured hydrogen separation apparatus
JP2003095617A (en) * 2001-09-19 2003-04-03 Toyota Motor Corp Hydrogen separating apparatus
EP1375421A3 (en) * 2002-06-07 2005-04-20 Mitsubishi Heavy Industries, Ltd. Hydrogen separation membrane, hydrogen separation unit, and manufacturing method for hydrogen separation membrane
JP2006055705A (en) * 2004-08-18 2006-03-02 Toyota Motor Corp Hydrogen separation substrate
EP1433521A4 (en) * 2001-09-26 2006-04-12 Toyo Kohan Co Ltd Gas separating unit and method for manufacturing the same
US7141096B2 (en) * 2003-01-24 2006-11-28 Varian S.P.A. Gas-selective permeable membrane and method of manufacturing thereof
JP2008023496A (en) * 2006-07-25 2008-02-07 Mitsubishi Gas Chem Co Inc Manufacturing method of hydrogen separation membrane cell
JP2008253984A (en) * 2007-03-09 2008-10-23 Nissan Motor Co Ltd Hydrogen separator
JP2009173534A (en) * 2007-12-26 2009-08-06 Nissan Motor Co Ltd Membrane reactor
JP2009226331A (en) * 2008-03-24 2009-10-08 Japan Steel Works Ltd:The Hydrogen permeation module and method of application thereof

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002128506A (en) * 2000-05-15 2002-05-09 Toyota Motor Corp Hydrogen-forming unit
JP2003034506A (en) * 2001-07-23 2003-02-07 Toyota Motor Corp Hydrogen extractor
JP2003081611A (en) * 2001-09-07 2003-03-19 Toyota Motor Corp Lamination structured hydrogen separation apparatus
JP2003095617A (en) * 2001-09-19 2003-04-03 Toyota Motor Corp Hydrogen separating apparatus
EP1433521A4 (en) * 2001-09-26 2006-04-12 Toyo Kohan Co Ltd Gas separating unit and method for manufacturing the same
EP1375421A3 (en) * 2002-06-07 2005-04-20 Mitsubishi Heavy Industries, Ltd. Hydrogen separation membrane, hydrogen separation unit, and manufacturing method for hydrogen separation membrane
US7144444B2 (en) 2002-06-07 2006-12-05 Mitsubishi Heavy Industries, Ltd. Hydrogen separation membrane, hydrogen separation unit, and manufacturing method for hydrogen separation membrane
US7141096B2 (en) * 2003-01-24 2006-11-28 Varian S.P.A. Gas-selective permeable membrane and method of manufacturing thereof
JP2006055705A (en) * 2004-08-18 2006-03-02 Toyota Motor Corp Hydrogen separation substrate
JP4622383B2 (en) * 2004-08-18 2011-02-02 トヨタ自動車株式会社 Hydrogen permeable substrate
JP2008023496A (en) * 2006-07-25 2008-02-07 Mitsubishi Gas Chem Co Inc Manufacturing method of hydrogen separation membrane cell
JP2008253984A (en) * 2007-03-09 2008-10-23 Nissan Motor Co Ltd Hydrogen separator
JP2009173534A (en) * 2007-12-26 2009-08-06 Nissan Motor Co Ltd Membrane reactor
JP2009226331A (en) * 2008-03-24 2009-10-08 Japan Steel Works Ltd:The Hydrogen permeation module and method of application thereof
US8075670B2 (en) 2008-03-24 2011-12-13 The Japan Steel Works, Ltd. Hydrogen permeable module and usage thereof

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