JPH0868665A - Position detector - Google Patents

Position detector

Info

Publication number
JPH0868665A
JPH0868665A JP20499794A JP20499794A JPH0868665A JP H0868665 A JPH0868665 A JP H0868665A JP 20499794 A JP20499794 A JP 20499794A JP 20499794 A JP20499794 A JP 20499794A JP H0868665 A JPH0868665 A JP H0868665A
Authority
JP
Japan
Prior art keywords
light
reflection
slit
position detector
inner face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP20499794A
Other languages
Japanese (ja)
Inventor
Tsuneo Takashima
常雄 高嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP20499794A priority Critical patent/JPH0868665A/en
Publication of JPH0868665A publication Critical patent/JPH0868665A/en
Withdrawn legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

PURPOSE: To prevent generation of error signal by subjecting the inner face of a holding member to antireflection processing. CONSTITUTION: A luminous flux generated from a light emitting element 2 impinges on the light receiving face of a position detecting device 1 through primary reflection on the inner face of a holding member 5, or reaches a device 2 through plural reflection on the member 5 and the arm of a moving member 3, or an external light intruded through an opening of the member 5 reaches the device 1 directly or through reflection on the inner wall of the member 5, the arm of the member 3, etc. In this regard, a divider does not output a correct value proportional to the shift of a slit 3a but outputs the weighted mean of a spot produced through the slit 3a and a spot of received light produced through reflection on the inner face or extrusion of external light thus generating an error signal. When shade lines A are provided on the inner wall of the member 5 and at the arm part of the member 3, the light reflected on the inner face, the externally intruded light, and the luminous flux reaching the device 1 through reflection are scattered and generation of error signal is prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば一次元の微小偏
位量を発光素子と受光素子とを用いて非接触で検出する
位置検出器に関し、特に迷光を防止して検出精度を向上
させたものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detector for detecting, for example, a one-dimensional minute deviation amount in a non-contact manner by using a light emitting element and a light receiving element. It is a thing.

【0002】[0002]

【従来の技術】従来より一次元の微小偏位を非接触で検
出する位置検出器として、発光素子と受光素子を具えた
光電変換型の位置検出器が使われている。
2. Description of the Related Art Conventionally, a photoelectric conversion type position detector having a light emitting element and a light receiving element has been used as a position detector for detecting a one-dimensional minute deviation without contact.

【0003】発光素子は例えば赤外発光ダイオード(i
RED)が、受光素子は例えば受光スポットの位置に応
じた電流を出力する位置検知デバイス(PSD)が用い
られる。発光素子と受光素子は相対する様に固定部材で
固定され、その中間位置に可動部材に結合された、細い
スリットを有するマスクが配され、スリットによって発
光素子を発した光束の一部が受光素子に達し、光電変換
を受けて光の強さとスポット位置、すなわち受光素子と
スリットとの相対位置に応じた光電流が発生して測定が
なされる。
The light emitting element is, for example, an infrared light emitting diode (i
As the light receiving element, a position detecting device (PSD) that outputs a current according to the position of the light receiving spot is used. The light emitting element and the light receiving element are fixed by a fixed member so as to face each other, and a mask having a thin slit is arranged at an intermediate position between the light emitting element and the light receiving element. Then, the photoelectric conversion is performed to generate a photocurrent corresponding to the light intensity and the spot position, that is, the relative position between the light receiving element and the slit, and measurement is performed.

【0004】またスリットを具えたマスクが無く、発光
素子が直接可動部材に固定され、受光素子と受光素子の
相対位置に応じた光電流を発生させる構造もある。
There is also a structure without a mask having slits, in which the light emitting element is directly fixed to the movable member and a photocurrent is generated according to the relative position of the light receiving element.

【0005】[0005]

【発明が解決しようとする課題】ところで前記位置検出
器においては、発光素子から発生した光束の一部が固定
部材の内壁で反射して受光素子へ入射し、誤信号を発生
してしまうと云う問題があった。また固定部材はスリッ
トを具えたマスクの可動空間を確保するための開口部が
必要で、そこから外光が侵入してくることが避けられ
ず、この外光により誤信号が発生すると云う問題もあっ
た。
In the position detector, however, it is said that a part of the light beam generated from the light emitting element is reflected by the inner wall of the fixing member and is incident on the light receiving element to generate an erroneous signal. There was a problem. Further, the fixing member needs an opening for securing a movable space of the mask having a slit, and it is inevitable that outside light enters from there, and there is a problem that an erroneous signal is generated by this outside light. there were.

【0006】[0006]

【課題を解決するための手段】本発明は、光束を発生す
る発光手段と、受光する光束に応じた電気信号を発生す
る光電変換手段と、発光手段と光電変換手段の両方また
は一方を保持する保持部材、また構成によっては更に保
持手段に対して相対的に移動可能で光束に照明される偏
位手段とを設えた位置検出器において、保持手段の内面
に反射防止処理を施したものである。
According to the present invention, a light emitting means for generating a light beam, a photoelectric conversion means for generating an electric signal according to a received light beam, and either or both of the light emitting means and the photoelectric conversion means are held. In a position detector provided with a holding member, and depending on the structure, a displacement means that is movable relative to the holding means and is illuminated by a light beam, the inner surface of the holding means is subjected to antireflection treatment. .

【0007】[0007]

【実施例】以下に、図面を参照しながら、本発明の実施
例を説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0008】図1及び図2は本発明の第一の実施例を示
す図である。
1 and 2 are views showing a first embodiment of the present invention.

【0009】図1において、1はPSD(ポジション・
センシング・デバイス)等の受光素子である。2はIR
ED(赤外発光ダイオード)等の発光素子である。3は
移動部材であり、一方向に突出した腕を持ち、その先端
に狭いスリット穴3aを有している。4a,4bはガイ
ドバーであり、移動部材3の移動方向がこれにより一次
元に規制される。5はホルダーであり、上部にPSD1
を下部にIRED2をそれぞれ受光面、発光面が相対す
る様に接着固定され、移動部材3のスリット3aがちょ
うど、IRED2とPSD1の中間に位置する様になっ
ている。またAは凹凸をなす遮光線である。
In FIG. 1, 1 is a PSD (position
A light receiving element such as a sensing device). 2 is IR
A light emitting element such as an ED (infrared light emitting diode). A moving member 3 has an arm protruding in one direction, and has a narrow slit hole 3a at its tip. 4a and 4b are guide bars, and the moving direction of the moving member 3 is one-dimensionally regulated by this. 5 is a holder, PSD1 on the top
The IRED 2 is adhered and fixed to the lower part so that the light-receiving surface and the light-emitting surface face each other, and the slit 3a of the moving member 3 is positioned exactly between the IRED 2 and the PSD 1. A is a light-shielding line having irregularities.

【0010】図2において、6a,6bはPSD1から
出力されるふたつの光電流をそれぞれ電圧信号に変換す
る電流電圧変換回路である。7は該電流電圧変換回路6
aと6bの出力信号の差を求める減算回路であり、8は
該電流電圧変換回路6aと6bの出力信号の和を求める
加算回路である。9は減算回路7と加算回路8の出力の
比を求める除算回路であり、この出力がPSD1に照射
されたスポット位置の変位量に比例した値となる。
In FIG. 2, 6a and 6b are current-voltage conversion circuits for converting two photocurrents output from the PSD 1 into voltage signals. 7 is the current-voltage conversion circuit 6
Reference numeral 8 is a subtraction circuit for obtaining the difference between the output signals of a and 6b, and reference numeral 8 is an addition circuit for obtaining the sum of the output signals of the current-voltage conversion circuits 6a and 6b. Reference numeral 9 is a division circuit for obtaining the ratio of the outputs of the subtraction circuit 7 and the addition circuit 8. This output has a value proportional to the displacement amount of the spot position irradiated on the PSD 1.

【0011】次に上記構成における動作を順を追って説
明する。
Next, the operation of the above configuration will be described step by step.

【0012】移動部材3がガイドバー4a,4bで規制
される方向に微小量だけ移動したとする。すると、スリ
ット3aも同時に動くため、IRED2から発せられた
光束がスリット3aを通ってPSD1上に照射するスポ
ットの位置も変化する。PSD2はスポットの位置に応
じた比の大きさの一対の光電流信号をそれぞれふたつの
端子から出力する。この一対の光電流信号は電流電圧変
換回路6a,6bによってそれぞれ電圧信号に変換さ
れ、さらに減算回路7によって両者の差が、加算回路8
によって両者の和が求められる。除算回路9は、加算回
路8の出力を分母に、減算回路7の出力を分子とする比
を出力するので、この出力電圧が前述の移動部材3の移
動量に比例した値となっている。
It is assumed that the moving member 3 has moved a minute amount in the direction regulated by the guide bars 4a and 4b. Then, since the slit 3a also moves at the same time, the position of the spot where the luminous flux emitted from the IRED 2 passes through the slit 3a and is irradiated on the PSD 1 also changes. The PSD 2 outputs a pair of photocurrent signals having a size corresponding to the position of the spot from the two terminals, respectively. The pair of photocurrent signals are converted into voltage signals by the current-voltage conversion circuits 6a and 6b, respectively, and the difference between the two signals is added by the subtraction circuit 7 to the addition circuit 8
The sum of both is calculated by. The division circuit 9 outputs a ratio with the output of the addition circuit 8 as the denominator and the output of the subtraction circuit 7 as the numerator, so that this output voltage has a value proportional to the amount of movement of the moving member 3 described above.

【0013】ところがIRED2から発生した光束は、
ホルダー5の内面での一次反射によってもPSD1の受
光面上に達したり、ホルダー5と移動部材3の腕とでの
n次反射によってもPSD1に達したり、ホルダー5の
開口部から侵入した外光が直接、又はホルダー5の内壁
や移動部材3の腕等で反射してPSD1に達することが
ある。この時、前記除算回路9の出力は、スリット3a
の移動量に比例した正しい値を出力せず、スリット3a
で生じたスポットと内面反射又は外光侵入で生じた受光
スポットとの加重平均が出力されるため、誤信号が発生
してしまう。そこでホルダー5の内壁及び移動部材3の
腕部に図1で示す様な遮光線を設ける。こうすることに
よって、内面反射や外光の侵入と反射によってPSD1
に達する光束は散乱され、結果として誤信号の発生が回
避できる。
However, the luminous flux generated from IRED2 is
External light that has reached the light-receiving surface of the PSD 1 by the primary reflection on the inner surface of the holder 5 or has reached the PSD 1 by the n-order reflection on the holder 5 and the arm of the moving member 3 or has entered through the opening of the holder 5. May reach the PSD 1 directly or by being reflected by the inner wall of the holder 5 or the arm of the moving member 3. At this time, the output of the division circuit 9 is the slit 3a.
Does not output the correct value proportional to the movement amount of the slit 3a
Since a weighted average of the spot generated in 1) and the light receiving spot generated by internal reflection or external light intrusion is output, an erroneous signal occurs. Therefore, a light shielding line as shown in FIG. 1 is provided on the inner wall of the holder 5 and the arm portion of the moving member 3. By doing so, the PSD1 is affected by internal reflection and external light penetration and reflection.
The light fluxes reaching the distance are scattered, and as a result, generation of false signals can be avoided.

【0014】図3は本発明の第2の実施例を示す図であ
る。
FIG. 3 is a diagram showing a second embodiment of the present invention.

【0015】図3における5a部は、ホルダー5の内部
へ張り出した光束制限部である。ホルダー5の光束制限
部は移動部材3の移動方向の左右側から中心に向かって
張り出しており、最も狭い間隔はIREDから発せられ
た光束が移動部材3の最大移動時においても、そのスリ
ット3aを通過しPSD1の受光面に達するのを防げな
い必要かつ十分な距離となっている。しかし、この張り
出しによって、ホルダー5の内面反射光がPSD1の受
光面に達しにくくなっており、誤信号の発生は回避され
る。
A portion 5a in FIG. 3 is a light flux limiting portion that projects into the holder 5. The light flux limiting portion of the holder 5 projects from the left and right sides in the moving direction of the moving member 3 toward the center, and the narrowest interval is such that the light flux emitted from the IRED moves through the slit 3a even when the moving member 3 is maximally moving. It is a necessary and sufficient distance that cannot prevent the light from passing through and reaching the light receiving surface of PSD1. However, due to this overhang, it becomes difficult for the light reflected on the inner surface of the holder 5 to reach the light receiving surface of the PSD 1, and the occurrence of an erroneous signal is avoided.

【0016】図4は本発明の第3の実施例を示す図であ
る。
FIG. 4 is a diagram showing a third embodiment of the present invention.

【0017】図4における3b及び5bは移動部材3の
腕及びホルダー5の内面に塗られた反射率の極めて小さ
いツヤ消塗料であり、これによって内面反射又は外光の
反射による誤信号の発生を回避するものである。
Reference numerals 3b and 5b in FIG. 4 are matte paints having a very small reflectance applied to the arm of the moving member 3 and the inner surface of the holder 5, and thereby the generation of an erroneous signal due to the inner surface reflection or the reflection of the external light. It is something to avoid.

【0018】図5は本発明の第4の実施例を示す図であ
る。
FIG. 5 is a diagram showing a fourth embodiment of the present invention.

【0019】図5における3c及び5cは移動部材3の
腕及びホルダー5の内面にほどこされた梨地加工であ
る。これは、移動部材3及びホルダー5のモールド成形
を行う際、型にあらかじめ適当な抜きテーパを与えてお
き梨地加工を行うことで、製造コストを上昇させること
なく実現できる。この梨地により、内面反射光及び外光
の反射光は散乱され、PSD1に達する光量を著しく低
下できるので、誤信号の発生は回避できる。
Reference numerals 3c and 5c in FIG. 5 denote satin finish applied to the arm of the moving member 3 and the inner surface of the holder 5. This can be realized without increasing the manufacturing cost by giving a suitable draft taper to the mold in advance when performing the molding of the moving member 3 and the holder 5 and performing the satin finish. This satin scatters the reflected light of the inner surface reflected light and the reflected light of the external light, and the light quantity reaching the PSD 1 can be remarkably reduced, so that an erroneous signal can be avoided.

【0020】以上、移動部材がスリットを持ち、発光素
子と受光素子が固定されている例について述べてきた
が、発光素子と受光素子のいずれか一方を移動部材に取
り付け、他の一方を固定する構造の位置検出器において
もまったく同様の実施で同様の効果を上げることができ
るのは言うまでもない。又、上記実施例1〜4のうちい
くつかを組み合わせて用いても所定の目的を達しうる。
The example in which the moving member has the slit and the light emitting element and the light receiving element are fixed has been described above. However, one of the light emitting element and the light receiving element is attached to the moving member and the other is fixed. It is needless to say that the same effect can be obtained in the position detector having the structure by the completely same implementation. Further, the predetermined purpose can be achieved even if some of the above Examples 1 to 4 are used in combination.

【0021】[0021]

【発明の効果】本発明によれば、発光手段を発した光束
が保持手段の内面で反射して迷光になったり、外光が侵
入して有害光となるのを防止することがないので、誤信
号の発生することのないリニアリティに優れた位置検出
器が得られる効果がある。
According to the present invention, it is possible to prevent the luminous flux emitted from the light emitting means from being reflected by the inner surface of the holding means to become stray light, and to prevent external light from entering and becoming harmful light. There is an effect that a position detector excellent in linearity that does not generate an erroneous signal can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例を示す斜視図。FIG. 1 is a perspective view showing a first embodiment of the present invention.

【図2】第1実施例の回路構成を示す図。FIG. 2 is a diagram showing a circuit configuration of a first embodiment.

【図3】第2実施例の要部を示す斜視図。FIG. 3 is a perspective view showing a main part of the second embodiment.

【図4】第3実施例を示す斜視図。FIG. 4 is a perspective view showing a third embodiment.

【図5】第4実施例を示す斜視図。FIG. 5 is a perspective view showing a fourth embodiment.

【符号の説明】[Explanation of symbols]

1 受光素子(iRED) 2 位置検出デバイス(PSD) 5 保持部材 A 遮光線 1 Light receiving element (iRED) 2 Position detection device (PSD) 5 Holding member A Light-shielding line

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 G02B 5/00 B 5/02 B ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Office reference number FI technical display location G02B 5/00 B 5/02 B

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 光束を発生する発行手段と、受光する光
束に応じた電気信号を発生する光電変換手段と、発光手
段と光電変換手段の両方または一方を保持する保持手段
とを備えた位置検出器において、保持手段の内面に反射
防止構造を施したことを特徴とする位置検出器。
1. A position detection device comprising: a light emitting unit for generating a light beam; a photoelectric conversion unit for generating an electric signal according to the received light beam; and a holding unit for holding either or both of the light emitting unit and the photoelectric conversion unit. A position detector characterized in that an inner surface of the holding means is provided with an antireflection structure.
【請求項2】 前記反射防止構造は凹凸の遮光線である
ことを特徴とする請求項1の位置検出器。
2. The position detector according to claim 1, wherein the antireflection structure is an uneven light-shielding line.
【請求項3】 前記反射防止構造は保持手段の内部へ突
出した張り出してあることを特徴とする請求項1の位置
検出器。
3. The position detector according to claim 1, wherein the antireflection structure is projected to the inside of the holding means.
【請求項4】 前記反射防止構造はツヤ消し塗料層であ
ることを特徴とする請求項1の位置検出器。
4. The position detector according to claim 1, wherein the antireflection structure is a matte paint layer.
【請求項5】 前記反射防止構造は梨地であることを特
徴とする請求項1の位置検出器。
5. The position detector according to claim 1, wherein the antireflection structure is satin finished.
JP20499794A 1994-08-30 1994-08-30 Position detector Withdrawn JPH0868665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20499794A JPH0868665A (en) 1994-08-30 1994-08-30 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20499794A JPH0868665A (en) 1994-08-30 1994-08-30 Position detector

Publications (1)

Publication Number Publication Date
JPH0868665A true JPH0868665A (en) 1996-03-12

Family

ID=16499754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20499794A Withdrawn JPH0868665A (en) 1994-08-30 1994-08-30 Position detector

Country Status (1)

Country Link
JP (1) JPH0868665A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972402B2 (en) 2002-06-03 2005-12-06 Mitsubishi Denki Kabushiki Kaisha Photoelectric rotary encoder
JP2015040840A (en) * 2013-08-23 2015-03-02 オムロン株式会社 Douser for optical encoder, manufacturing method of the same, and optical encoder using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972402B2 (en) 2002-06-03 2005-12-06 Mitsubishi Denki Kabushiki Kaisha Photoelectric rotary encoder
JP2015040840A (en) * 2013-08-23 2015-03-02 オムロン株式会社 Douser for optical encoder, manufacturing method of the same, and optical encoder using the same

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Effective date: 20011106