JPH0864985A - Thin film for noise filter and noise filter using the thin film - Google Patents
Thin film for noise filter and noise filter using the thin filmInfo
- Publication number
- JPH0864985A JPH0864985A JP19841194A JP19841194A JPH0864985A JP H0864985 A JPH0864985 A JP H0864985A JP 19841194 A JP19841194 A JP 19841194A JP 19841194 A JP19841194 A JP 19841194A JP H0864985 A JPH0864985 A JP H0864985A
- Authority
- JP
- Japan
- Prior art keywords
- noise filter
- film
- thin film
- conductive film
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thin Magnetic Films (AREA)
- Coils Or Transformers For Communication (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Filters And Equalizers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ノイズフィルタに関
し，詳しくは，高周波帯域で高損失な特性を有するノイ
ズフィルタ用薄膜に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a noise filter, and more particularly to a noise filter thin film having high loss characteristics in a high frequency band.
【０００２】[0002]
【従来の技術】通信等の分野において、膨大な情報をデ
ィジタル信号を用いて伝送する方式が普及している。デ
ィジタル信号は多くの高調波成分を含んでおり、該高調
波成分は他の伝送線路に洩れ込み情報の品質を劣化させ
るためにＥＭＩ対策が急務になってきている。従来この
ような該ＥＭＩ対策としてはフェライトコアを用いて対
策がなされてきた。図３は従来のノイズフィルタの一例
を示す図で、円筒状のフェライトコア５１の貫通孔５２
に信号線（伝送線）５３を挿入して形成されている。2. Description of the Related Art In the field of communication and the like, a method of transmitting a huge amount of information by using a digital signal has become widespread. A digital signal contains many harmonic components, and the harmonic components leak into other transmission lines to deteriorate the quality of information, so that EMI countermeasures are urgently needed. Conventionally, as a countermeasure against such EMI, a ferrite core has been used. FIG. 3 is a view showing an example of a conventional noise filter, which shows a through hole 52 of a cylindrical ferrite core 51.
It is formed by inserting a signal line (transmission line) 53 into the.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、多数の
伝送線に対し対策を施す必要から、図３に示すように大
型のフェライトコアを用いると通信装置が大型化すると
いう欠点が生じる。また、すでに敷設した伝送線に対策
を施す場合、図３に示すような形が固定しているフェラ
イトコアでは対策しにくいなどの困難がある。However, since it is necessary to take measures against a large number of transmission lines, the use of a large ferrite core as shown in FIG. 3 causes a drawback that the communication device becomes large. In addition, when taking measures against the already laid transmission line, it is difficult to take measures with a ferrite core having a fixed shape as shown in FIG.
【０００４】そこで，本発明の技術的課題は、小型軽量
でかつ可撓性をもち、損失特性の優れたノイズフィルタ
として実現可能なノイズフィルタ用薄膜とそれを用いた
ノイズフィルタとを提供することにある。Therefore, a technical object of the present invention is to provide a thin film for a noise filter which is small and lightweight, has flexibility, and can be realized as a noise filter having excellent loss characteristics, and a noise filter using the thin film. It is in.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
に、本発明のノイズフィルタ用薄膜は、可撓性の基材の
表面に、順に第１の導電膜、金属磁性膜、および第２の
導電膜を積層してなることを特徴としている。In order to solve the above problems, a thin film for a noise filter according to the present invention comprises a flexible base material, a first conductive film, a metal magnetic film, and a second conductive film formed in this order on a surface of a flexible base material. It is characterized in that it is formed by laminating conductive films of.
【０００６】また，本発明のノイズフィルタは，前記ノ
イズフィルタ用薄膜を伝送線の周囲に配置してなること
を特徴としている。The noise filter of the present invention is characterized in that the noise filter thin film is arranged around the transmission line.
【０００７】[0007]
【作用】本発明においては、磁性膜の両面に低抵抗導電
膜を有する積層膜とすることによって、渦電流に対する
低抵抗の閉回路を構成し、高周波損失の増大を図り，こ
の積層膜をもってノイズの低減をはかる。In the present invention, by forming a laminated film having a low resistance conductive film on both sides of a magnetic film, a closed circuit having a low resistance against an eddy current is formed, and high frequency loss is increased. To reduce
【０００８】[0008]
【実施例】以下、本発明の実施例について図面を参照し
て説明する。Embodiments of the present invention will be described below with reference to the drawings.
【０００９】（実施例１）図１は本発明の実施例１に係
るノイズフィルタ用薄膜の構造を示す断面図である。図
１に示すように、ポリエステルフィルムからなる基材１
の表面に、スパッタ法によって、第１の導電膜２として
膜厚約１μｍの銅（Ｃｕ）を、金属磁性膜４として膜厚
約２μｍのＣｏベースＮｂＺｒアモルファス合金膜を、
さらに、その上に第２の導電膜３として膜厚約１μｍの
Ｃｕを、順次形成した積層膜１０を製作した。(Embodiment 1) FIG. 1 is a sectional view showing the structure of a noise filter thin film according to Embodiment 1 of the present invention. As shown in FIG. 1, a substrate 1 made of a polyester film
On the surface of, by sputtering, a copper (Cu) film having a film thickness of about 1 μm was formed as the first conductive film 2, and a Co base NbZr amorphous alloy film having a film thickness of about 2 μm was formed as the metal magnetic film 4.
Further, a laminated film 10 in which Cu having a film thickness of about 1 μm was sequentially formed thereon was manufactured as the second conductive film 3.
【００１０】この積層膜１０をもとに、図２に示すよう
に、図１の構造を有する積層膜を有するポリエステルフ
ィルム基材を巻回して，直径４ｍｍ，長さ１０ｍｍの円
筒状にノイズフィルタ５を形成して伝送線５３に装着
し、ノイズ低減の効果を調べた。その結果、コモンモー
ドのノイズが装着前に比較して４０ｄＢ以上低減した。As shown in FIG. 2, a polyester film substrate having a laminated film having the structure shown in FIG. 1 is wound around the laminated film 10 to form a noise filter in a cylindrical shape having a diameter of 4 mm and a length of 10 mm. 5 was formed and attached to the transmission line 53, and the effect of noise reduction was investigated. As a result, common mode noise was reduced by 40 dB or more as compared with before mounting.
【００１１】（実施例２）実施例１におけると同じく、
図１にその断面構造をもって示すように、ポリエステル
フィルム基材１の表面に、スパッタ法によって、第１の
導電膜２として膜厚約１μｍのアルミニウム（Ａ１）
を、金属磁性膜４として膜厚約２μｍのパーマロイを、
さらに第２の導電膜３として膜厚約１μｍのＡ１を、順
次形成した積層膜１０を製作した。この積層膜１０をも
とに、実施例１で示したものと同様に円筒形状（φ４×
１０ｍｍ）のノイズフィルタ５を形成して伝送線７に装
着し、ノイズ低減の効果を調べた。その結果、コモンモ
ードのノイズが装着前に比較して４０ｄＢ以上低減し
た。(Second Embodiment) As in the first embodiment,
As shown in FIG. 1 with its cross-sectional structure, aluminum (A1) having a film thickness of about 1 μm is formed as the first conductive film 2 on the surface of the polyester film substrate 1 by the sputtering method.
A permalloy having a thickness of about 2 μm as the metal magnetic film 4,
Further, a laminated film 10 in which A1 having a film thickness of about 1 μm was sequentially formed as the second conductive film 3 was manufactured. Based on this laminated film 10, a cylindrical shape (φ4 ×
A noise filter 5 of 10 mm) was formed and attached to the transmission line 7, and the effect of noise reduction was investigated. As a result, common mode noise was reduced by 40 dB or more as compared with before mounting.
【００１２】なお、第１の導電膜と第２の導電膜は必ず
しも同一材料である必要はなく、また、実施例１および
実施例２における導電膜と金属磁性膜の材料の組み合わ
せに必然性を有するものではない。また、第２の導電膜
の上にさらにＳｉＯ2 などの保護膜を設けても良く，本
発明の効果を低減させるものではない。さらに，本発明
の実施例では，基材１としてポリエステルフィルムを用
いたが，円筒状の可撓性を有する基材を用い，この上に
実施例１及び２に示したものと同様な第１の導電膜２，
金属磁性膜４，及び第２の導電膜３を順に積層しても良
く，本発明は基材の形状に限定されるものではない。The first conductive film and the second conductive film do not necessarily have to be made of the same material, and the combination of the materials of the conductive film and the metal magnetic film in Examples 1 and 2 is inevitable. Not a thing. Further, a protective film such as SiO 2 may be further provided on the second conductive film, which does not reduce the effect of the present invention. Further, in the embodiment of the present invention, the polyester film is used as the base material 1, but a cylindrical flexible base material is used, and a first flexible film similar to those shown in the first and second embodiments is used. Conductive film 2,
The metal magnetic film 4 and the second conductive film 3 may be laminated in this order, and the present invention is not limited to the shape of the base material.
【００１３】[0013]
【発明の効果】以上述べたように、本発明による薄膜を
ノイズフィルタに適用することによって、従来のフェラ
イトコアに比較して，具体的には，体積比で１／１００
以下と小型化および軽量化を実現したばかりでなく、損
失特性が具体的には，フェライトコアの１０倍以上を示
した。また、本発明においては，既設の伝送線に簡単に
対策を施すことが可能なノイズフィルタ用薄膜とそれを
用いたノイズフィルタとを提供することができる。As described above, by applying the thin film according to the present invention to a noise filter, the volume ratio is 1/100 as compared with the conventional ferrite core.
In addition to achieving the following reductions in size and weight, the loss characteristics were more than 10 times those of ferrite cores. Further, according to the present invention, it is possible to provide a noise filter thin film capable of easily taking measures against an existing transmission line, and a noise filter using the thin film.
【図１】本発明の実施例による積層薄膜の断面構造を示
す模式図である。FIG. 1 is a schematic view showing a cross-sectional structure of a laminated thin film according to an example of the present invention.
【図２】図１の積層薄膜を用いたノイズフィルタを伝送
線に装着した状態を示す図である。FIG. 2 is a diagram showing a state in which a noise filter using the laminated thin film of FIG. 1 is attached to a transmission line.
【図３】従来のフェライトコアによるノイズフィルタを
伝送線に装着した一例を示す図である。FIG. 3 is a diagram showing an example in which a conventional noise filter with a ferrite core is attached to a transmission line.
１ 基材（ポリエステルフィルム） ２ 第１の導電膜（Ｃｕ，またはＡｌ） ３ 第２の導電膜（Ｃｕ，またはＡｌ） ４ 金属磁性膜（ＣｏベースＮｂＺｒアモルファス合
金、またはパーマロイ） ５ ノイズフィルタ（薄膜） １０ 積層膜 ５１ ノイズフィルタ（フェライトコア） ５２ 貫通孔 ５３ 伝送線1 Base Material (Polyester Film) 2 First Conductive Film (Cu or Al) 3 Second Conductive Film (Cu or Al) 4 Metal Magnetic Film (Co-based NbZr Amorphous Alloy or Permalloy) 5 Noise Filter (Thin Film) ) 10 laminated film 51 noise filter (ferrite core) 52 through hole 53 transmission line
Claims (2)
膜、金属磁性膜、および第２の導電膜を積層してなるこ
とを特徴とするノイズフィルタ用薄膜。1. A thin film for a noise filter, comprising a flexible base material, and a first conductive film, a metal magnetic film, and a second conductive film which are sequentially laminated on the surface of a flexible base material.
伝送線の周囲に配置してなることを特徴とするノイズフ
ィルタ。2. A noise filter comprising the thin film for a noise filter according to claim 1 arranged around a transmission line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19841194A JPH0864985A (en) | 1994-08-23 | 1994-08-23 | Thin film for noise filter and noise filter using the thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19841194A JPH0864985A (en) | 1994-08-23 | 1994-08-23 | Thin film for noise filter and noise filter using the thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0864985A true JPH0864985A (en) | 1996-03-08 |
Family
ID=16390680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19841194A Pending JPH0864985A (en) | 1994-08-23 | 1994-08-23 | Thin film for noise filter and noise filter using the thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0864985A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010028538A (en) * | 2008-07-22 | 2010-02-04 | Shin Etsu Polymer Co Ltd | Noise suppression component |
| JP4750696B2 (en) * | 2004-05-07 | 2011-08-17 | 株式会社ｅウインテック | Electric waveform adjuster |
| JP2012064777A (en) * | 2010-09-16 | 2012-03-29 | Mitsubishi Electric Corp | Noise filter, cable with noise filter, and printed wiring board with noise filter |
-
1994
- 1994-08-23 JP JP19841194A patent/JPH0864985A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4750696B2 (en) * | 2004-05-07 | 2011-08-17 | 株式会社ｅウインテック | Electric waveform adjuster |
| JP2010028538A (en) * | 2008-07-22 | 2010-02-04 | Shin Etsu Polymer Co Ltd | Noise suppression component |
| JP2012064777A (en) * | 2010-09-16 | 2012-03-29 | Mitsubishi Electric Corp | Noise filter, cable with noise filter, and printed wiring board with noise filter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH1093284A (en) | Magnetic-shielding sheet, manufacturing thereof, and cable provided therewith | |
| JPH11110717A (en) | Thin film single magnetic pole head | |
| CA1263435A (en) | Magnetic material having high permeability in the high frequency range | |
| KR20020040678A (en) | High-frequency current supressor capable of being readily attached to cable or the like and earphone system using the same | |
| JPH0864985A (en) | Thin film for noise filter and noise filter using the thin film | |
| US4966821A (en) | Perpendicular magnetic recording medium | |
| JP3420490B2 (en) | Noise limiting transformer device and its manufacturing method | |
| JP2002526937A (en) | Protection device for electric circuit against interfacial micro discharge phenomenon | |
| USRE29326E (en) | Integrated magnetic head having alternate conducting and insulating layers within an open loop of two magnetic films | |
| JPH0878992A (en) | Filter | |
| US20040252825A1 (en) | Integrated coupled inductor xDSL POTS filter apparatus | |
| Senda et al. | Application to an EMI noise filter of a high-loss CoZrNb/SiO 2 multilayer film | |
| WO2022095800A1 (en) | Damping short-circuit ring and electronic circuit comprising same | |
| JPH06251946A (en) | Inductor component | |
| JP3921246B2 (en) | Thin film for noise filter | |
| JP3412123B2 (en) | cable | |
| JPH0555061A (en) | Electromagnetic device for noise filter | |
| JPH07307225A (en) | Magnetic thin film transformer | |
| Suzuki et al. | The thin film head for VCR | |
| JPH10261530A (en) | Electromagnetic shielding coil and its manufacture | |
| JPS60145512A (en) | Magnetic head | |
| JPH05242429A (en) | Thin-film magnetic head | |
| JP2000311815A (en) | Noise filter, cable using the same and manufacturing soft magnetic material for the noise filter | |
| JPS63239608A (en) | Conductor coil for thin film magnetic head and its production | |
| JPH09331182A (en) | Cable shielding tape |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20040723 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20040818 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20041215 |