JPH086244Y2 - Dimension measuring device - Google Patents

Dimension measuring device

Info

Publication number
JPH086244Y2
JPH086244Y2 JP1990083914U JP8391490U JPH086244Y2 JP H086244 Y2 JPH086244 Y2 JP H086244Y2 JP 1990083914 U JP1990083914 U JP 1990083914U JP 8391490 U JP8391490 U JP 8391490U JP H086244 Y2 JPH086244 Y2 JP H086244Y2
Authority
JP
Japan
Prior art keywords
light
measured
outputs
measurement target
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990083914U
Other languages
Japanese (ja)
Other versions
JPH0441607U (en
Inventor
孝佳 堀井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP1990083914U priority Critical patent/JPH086244Y2/en
Publication of JPH0441607U publication Critical patent/JPH0441607U/ja
Application granted granted Critical
Publication of JPH086244Y2 publication Critical patent/JPH086244Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Description

【考案の詳細な説明】 ［産業上の利用分野］ この考案は、寸法測定装置に関し、特に、投光部から
測定対象物体に平行光を投光し、測定対象物体による光
の遮蔽によって生じた光量の変化を受光部で検出して、
物体の寸法を測定する透過形の寸法測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a dimension measuring device, and in particular, it is produced by projecting parallel light from a light projecting portion to a measurement target object and shielding the light by the measurement target object. The change in light intensity is detected by the light receiving part,
The present invention relates to a transmission type size measuring device for measuring the size of an object.

［従来の技術］ 第６図は、従来の寸法測定装置の概略ブロック図であ
る。第６図において、従来の寸法測定装置は、投光部21
より平行光を測定対象物体24に出射し、投光部21に対向
して配置された受光部26で測定対象物体24による光の遮
蔽によって生じる受光光量の変化を検出することより、
測定対象物体24の寸法を検出するものである。このため
に、投光部21は、投光素子22と、投光レンズ23とを含
み、受光部26は、スリット27と受光レンズ28とフォトダ
イオード29と信号処理回路30とを含んでいる。ここで、
投光部21から出射される光を平行光としているわけは、
測定対象物体24が光軸方向のいずれの位置にあっても、
同一の寸法測定結果を得るためであり、また受光部26に
第６図に示すようなスリット27が設けられているわけ
は、第６図に矢印Ｘで示す光軸に垂直な方向の受光光量
が均一になるようにするためである。[Prior Art] FIG. 6 is a schematic block diagram of a conventional dimension measuring apparatus. In FIG. 6, the conventional dimension measuring device is shown in FIG.
More parallel light is emitted to the measurement target object 24, and by detecting the change in the received light amount caused by the light blocking by the measurement target object 24 at the light receiving unit 26 arranged facing the light projecting unit 21,
The size of the measurement object 24 is detected. Therefore, the light projecting unit 21 includes a light projecting element 22 and a light projecting lens 23, and the light receiving unit 26 includes a slit 27, a light receiving lens 28, a photodiode 29, and a signal processing circuit 30. here,
The reason why the light emitted from the light projecting unit 21 is parallel light is
Whether the measurement target object 24 is at any position in the optical axis direction,
This is because the same dimension measurement result is obtained and the light receiving portion 26 is provided with the slit 27 as shown in FIG. 6 because the amount of received light in the direction perpendicular to the optical axis shown by the arrow X in FIG. This is so that

［考案が解決しようとする課題］ 第６図に示す従来の寸法測定装置において、投光部21
から出射された平行光の光軸と直交する軸をとり、これ
を第７図に示すように、ｘ軸とする。第７図において、
x0は光軸の位置であり、x1およびx2はレンズの両端部に
対応した位置である。ｘ軸上の光出力は第８図に示すよ
うに変化する。これは、投光レンズの瞳の回折の影響
（リンギング）でｘ軸方向の光出力の不均一が生じるた
めである。このために、受光光量の変化によって測定対
象物体の寸法を測定する従来の方法では、同一の物体を
測定したとしても、その位置によっては第９図に示すよ
うに寸法出力に誤差が生じてしまうという問題点があっ
た。[Problems to be Solved by the Invention] In the conventional dimension measuring device shown in FIG.
The axis perpendicular to the optical axis of the parallel light emitted from the optical axis is taken, and this is taken as the x-axis as shown in FIG. In FIG.
x 0 is the position of the optical axis, and x 1 and x 2 are positions corresponding to both ends of the lens. The light output on the x-axis changes as shown in FIG. This is because the light output in the x-axis direction becomes non-uniform due to the influence (ringing) of the diffraction of the pupil of the light projecting lens. Therefore, in the conventional method of measuring the dimension of the object to be measured by the change in the amount of received light, even if the same object is measured, an error occurs in the dimension output depending on the position as shown in FIG. There was a problem.

また、第10図に示すように、直径がｂである物体31の
寸法を測定する際に、物体の一部が検出ゾーンからはみ
出た場合には、物体31によって遮蔽される領域Ｂは、第
11図に示すように直径がａである物体32を検出ゾーン内
で良好に測定した際に物体32によって遮蔽される領域Ａ
と等しくなる場合がある。したがって、物体32を測定し
ているときに、誤って混入した物体31が第10図に示すよ
うに位置した場合には、物体32を測定したときと同じ出
力が得られるため、測定対象物体が所望のものでないに
もかかわらず、良品であると判断してしまうことがあっ
た。Further, as shown in FIG. 10, when measuring the dimension of the object 31 having the diameter b, if a part of the object protrudes from the detection zone, the area B shielded by the object 31 is
As shown in FIG. 11, when an object 32 having a diameter of a is satisfactorily measured in the detection zone, an area A shielded by the object 32
May be equal to. Therefore, when measuring the object 32, if the object 31 erroneously mixed in is positioned as shown in FIG. 10, the same output as when measuring the object 32 is obtained, and therefore the object to be measured is Sometimes it was judged as a good product even though it was not desired.

また、他の課題として、第11図に示すように物体32が
検出ゾーン内で良好にその寸法を測定することができる
が、物体32の中心が検出ゾーンのｘ軸上のどの位置に存
在しているのかを検出することはできないという問題点
もあった。As another problem, as shown in FIG. 11, the size of the object 32 can be satisfactorily measured within the detection zone, but the center of the object 32 is located at any position on the x axis of the detection zone. There is also a problem that it is not possible to detect whether or not there is.

それゆえに、この考案の目的は、測定対象物体の寸法
を測定することができるとともに、測定対象物体が検出
ゾーン内の良好な位置にあることがわかるような寸法測
定装置を提供することである。Therefore, an object of the present invention is to provide a dimension measuring device capable of measuring the dimensions of an object to be measured and at the same time finding that the object to be measured is in a good position in the detection zone.

この考案の他の目的は、測定対象物体の寸法を測定す
ることができるとともに、測定対象物の中心が検出ゾー
ンのどの位置に存在するのかを検出することができる寸
法測定装置を提供することである。Another object of the present invention is to provide a dimension measuring device capable of measuring the dimension of an object to be measured and detecting at which position in the detection zone the center of the object to be measured exists. is there.

［課題を解決するための手段］ 請求項１記載の寸法測定装置は、投光部から測定対象
物体に平行光を投光し、測定対象物体による光の遮蔽に
よって生じた光量の変化を受光部で検出して物体の寸法
を測定する透過形の寸法測定装置であって、その受光部
は、受光面への照射光の受光位置に応じた第１および第
２の光電流出力を両端から出力する位置検出素子を含
み、その位置検出素子の第１および第２の出力を演算す
ることに基づいて、測定対象物体を介して受光される光
の量を検出するとともに、測定対象物体の位置を検出す
る検出手段と、測定対象物体の位置が、検出手段の演算
結果の線形性に関わる予め定める領域外にあることが検
出されたことに応じて、所定の信号を出力する検出ゾー
ン判定手段とを備える。[Means for Solving the Problem] The dimension measuring device according to claim 1 projects parallel light from a light projecting unit onto an object to be measured, and detects a change in the amount of light caused by light blocking by the object to be measured. Is a transmission-type dimension measuring device for measuring the dimension of an object by detecting with a light-receiving portion, the light-receiving portion outputs first and second photocurrent outputs in accordance with the light-receiving position of irradiation light on a light-receiving surface. And detecting the amount of light received through the object to be measured and calculating the position of the object to be measured based on calculating the first and second outputs of the position detecting element. Detecting means for detecting, and a detection zone determining means for outputting a predetermined signal in response to the detection that the position of the object to be measured is outside a predetermined area related to the linearity of the calculation result of the detecting means. Equipped with.

請求項２記載の寸法測定装置は、投光部から測定対象
物体に平行光を投光し、測定対象物体による光の遮蔽に
よって生じた光量の変化を受光部で受光して物体の寸法
を測定する透過形の寸法測定装置であって、その受光部
は、受光面への照射光の受光位置に応じた第１および第
２の光電流出力を両端から出力する位置検出素子を含
み、位置検出素子の第１および第２の出力の和に基づい
て測定対象物体を介して受光される光の量を検出して測
定対象物体の寸法を検出するとともに、位置検出素子の
第１および第２の出力を演算処理して測定対象物体の位
置を求める検出手段とを備える。The dimension measuring device according to claim 2 projects parallel light from a light projecting unit onto an object to be measured, and a light receiving unit receives a change in the amount of light caused by the blocking of light by the object to be measured, and measures the size of the object. And a light-receiving section that includes position detection elements that output first and second photocurrent outputs according to the light-receiving position of the irradiation light to the light-receiving surface from both ends. The size of the measurement target object is detected by detecting the amount of light received through the measurement target object based on the sum of the first and second outputs of the elements, and the first and second positions of the position detection element are detected. And a detection unit that calculates the output to obtain the position of the measurement target object.

［作用］ 請求項１記載の寸法測定装置においては、受光部に設
けられた位置検出素子の第１および第２の光電流出力を
演算することに基づいて、測定対象物を介して受光され
る光の量を検出するとともに、測定対象物の位置を検出
し、測定対象物体の位置が検出手段の検出結果の線形性
に関わる予め定める領域外にあることが検出されたこと
に応じて、所定の信号が出力される。[Operation] In the dimension measuring apparatus according to claim 1, the light is received via the object to be measured based on the calculation of the first and second photocurrent outputs of the position detection element provided in the light receiving section. Along with detecting the amount of light, the position of the measurement target is detected, and the position of the measurement target is determined to be outside a predetermined region related to the linearity of the detection result of the detection means. Signal is output.

請求項２記載の寸法測定装置においては、受光部に設
けられた位置検出素子の第１および第２の光電流出力の
和に基づいて測定対象物体を介して受光される光の量を
検出して測定対象物体の寸法を検出するとともに、位置
検出素子の第１および第２の光電流出力を演算処理して
測定対象物体の位置を求める。In the dimension measuring apparatus according to claim 2, the amount of light received through the object to be measured is detected based on the sum of the first and second photocurrent outputs of the position detecting element provided in the light receiving section. The size of the object to be measured is detected and the position of the object to be measured is obtained by calculating the first and second photocurrent outputs of the position detecting element.

［考案の実施例］ 第１図はこの考案の一実施例の寸法測定装置を示す概
略ブロック図である。第１図を参照して、寸法測定装置
は、投光部１と受光部２と信号処理部３とを含む。投光
部１は、投光素子４と投光レンズ５とを含む。投光素子
４としては、たとえばフォトダイオードが用いられる。
受光部２は、スリット６と集光レンズ７とPSD（Positio
n Sensitive Device）８とを含む。ここで、PSD8は、そ
の受光面が照射されるとき、発生する光電流を素子の両
端から取り出して出力するものである。[Embodiment of the Invention] FIG. 1 is a schematic block diagram showing a dimension measuring apparatus according to an embodiment of the present invention. Referring to FIG. 1, the dimension measuring device includes a light projecting unit 1, a light receiving unit 2, and a signal processing unit 3. The light projecting unit 1 includes a light projecting element 4 and a light projecting lens 5. As the light projecting element 4, for example, a photodiode is used.
The light receiving section 2 includes a slit 6, a condenser lens 7, a PSD (Positio
n Sensitive Device) 8. Here, the PSD 8 extracts the photocurrent generated when the light receiving surface is illuminated from both ends of the device and outputs the photocurrent.

測定対象物体14が第２図に実線で示す中心位置x0にあ
れば、出力端A,Bから出力される電流値は等しくなる。
測定対象物体14が第２図に示す破線で示す端部x1にあれ
ば、Ｂ部分が遮光されるため、出力端Ａからの電流値が
出力端Ｂからの電流値に比べ高くなる。逆に、測定対象
物体14が端部x2にあれば、Ａ部分が遮光されるため、出
力端Ｂからの電流値が出力端Ａからの電流値に比べ高く
なる。測定対象物体14が検出ゾーンであるx1からx2まで
の範囲にあれば、PSD8の出力端A,Bからの電流値の和は
不変である。If the object 14 to be measured is at the center position x 0 shown by the solid line in FIG. 2, the current values output from the output terminals A and B are equal.
If the object 14 to be measured is located at the end portion x 1 shown by the broken line in FIG. 2, since the portion B is shielded from light, the current value from the output terminal A becomes higher than the current value from the output terminal B. On the contrary, if the object 14 to be measured is located at the end portion x 2 , the portion A is shielded from light, so that the current value from the output terminal B becomes higher than the current value from the output terminal A. If the measurement object 14 is in the range from x 1 to x 2 which is the detection zone, the sum of the current values from the output terminals A and B of the PSD 8 is unchanged.

測定対象物体により遮光される部分の面積とPSD8の出
力端ＡおよびＢの和Ａ＋Ｂとは第３図に示すように逆比
例の関係にある。この実施例では、信号処理部３に加算
器９を設け、加算器９によりPSD8の２つの出力の和Ａ＋
Ｂを求めて、測定対象物体の寸法を検出する。As shown in FIG. 3, the area of the portion shielded by the object to be measured and the sum A + B of the output ends A and B of the PSD 8 are in inverse proportion. In this embodiment, the signal processing unit 3 is provided with an adder 9, and the adder 9 adds the two outputs of the PSD 8 A +.
B is obtained and the dimension of the object to be measured is detected.

また、測定対象物体14のｘ軸上の位置とPSD8の２つの
出力の比A/Bとは第４図に示すような関係となり、A/B
は、測定対象物体が中心位置であるx0およびその近くに
あれば、ｘに対して逆比例関係にあり、両端部x1，x2近
くにあれば、比例しなくなり、A/Bは歪む。このような
歪みが生じるわけは、投光レンズ５の瞳の回折の影響に
より、平行光の光出力が不均一となっているためであ
る。この実施例では、信号処理部３に除算器10と比較器
11とを設け、除算器10によりPSD8の２つの出力の比A/B
を求め、比較器11に予めしきい値v1，v2を設定してお
き、A/B＜v1あるいはA/B＞v2となったとき、比較器11か
ら警報信号を出力させる。したがって、警報信号が出力
されないとき、つまりA/Bがv1とv2との間にある場合に
は、常に寸法出力の線形性が保証される。Further, the position of the object 14 to be measured on the x-axis and the ratio A / B of the two outputs of the PSD 8 have a relationship as shown in FIG.
Is inversely proportional to x if the object to be measured is at or near the center position x 0, and is not proportional if both ends x 1 and x 2 are near, and A / B is distorted . The reason why such distortion occurs is that the light output of the parallel light is non-uniform due to the influence of the diffraction of the pupil of the light projecting lens 5. In this embodiment, the signal processor 3 includes a divider 10 and a comparator.
11 and are provided, and the ratio A / B of the two outputs of PSD8 by the divider 10
And thresholds v 1 and v 2 are set in advance in the comparator 11, and when A / B <v 1 or A / B> v 2 , the comparator 11 outputs an alarm signal. Therefore, the linearity of the dimension output is always guaranteed when no alarm signal is output, that is, when A / B is between v 1 and v 2 .

また、この警報出力を出すことにしたことによって、
加算器９から出力される検出寸法が変わらなくても、所
望の測定対象物体よりも大きい物体が検出ゾーン境界に
存在していることを検出することができる。Also, by deciding to output this alarm,
Even if the detection size output from the adder 9 does not change, it can be detected that an object larger than the desired measurement target object exists at the detection zone boundary.

さらに、第１図に示すように、比較器11の出力を反転
して、安定出力を出すようにすれば、測定対象物体が検
出ゾーンの良好な位置にあることが即座にわかり、測定
対象物体を当該測定装置の検出ゾーン内に容易に配置す
ることができる。Further, as shown in FIG. 1, if the output of the comparator 11 is inverted to provide a stable output, it is immediately known that the object to be measured is in a good position in the detection zone, and the object to be measured is Can be easily arranged in the detection zone of the measuring device.

上記の実施例では、比較器11のしきい値は予め定める
値に固定的あるいは半固定的に設定されているが、外部
からしきい値を設定できるようにしてもよい。このよう
にした実施例を第５図に示す。このように、しきい値を
外部から設定可能にすれば、測定対象物体の寸法に応じ
てしきい値を変えることができ、測定対象物体が検出ゾ
ーンの良好な位置にあることを精度よく判定することが
できるようになる。In the above embodiment, the threshold value of the comparator 11 is fixedly or semi-fixedly set to a predetermined value, but the threshold value may be set from the outside. An example of such an embodiment is shown in FIG. In this way, if the threshold value can be set from the outside, the threshold value can be changed according to the size of the measurement target object, and it can be accurately determined that the measurement target object is in a good position in the detection zone. You will be able to.

［考案の効果］ 請求項１記載の寸法測定装置においては、受光部に設
けられた位置検出素子の第１および第２の光電流出力を
演算することに基づいて、測定対象物体を介して受光さ
れる光の量を検出するとともに、測定対象物体の位置を
検出し、測定対象物体の位置が検出手段の演算結果の線
形性に関わる予め定める領域外にあることが検出されこ
とに応じて、所定の信号を出力することができる。した
がって、測定対象物体の寸法を検出することができると
ともに、測定対象物体を検出ゾーン内の良好な位置にあ
ることがわかる。この結果、測定された寸法に誤差が生
じていること、あるいは、寸法が同一であっても異なる
測定対象物体を測定し得る可能性があることを知らせる
ことができる。また、測定対象物体を当該測定装置の検
出ゾーン内に容易に配置することできる。[Advantage of the Invention] In the dimension measuring apparatus according to claim 1, the light receiving unit receives the light received through the object to be measured based on the calculation of the first and second photocurrent outputs of the position detecting element provided in the light receiving unit. In addition to detecting the amount of light to be detected, the position of the measurement target object is detected, and the position of the measurement target object is detected to be outside a predetermined region related to the linearity of the calculation result of the detection means. It is possible to output a predetermined signal. Therefore, it is possible to detect the size of the measurement target object, and it is understood that the measurement target object is at a good position in the detection zone. As a result, it is possible to notify that an error has occurred in the measured dimensions, or that there is a possibility that different measurement target objects may be measured even if the dimensions are the same. Further, the object to be measured can be easily arranged in the detection zone of the measuring device.

請求項２記載の寸法測定装置においては、受光部に設
けられた位置検出素子の第１および第２光電流出力の和
に基づいて測定対象物を介して受光される光の量を検出
して測定対象物体の寸法を検出するとともに、位置検出
素子の第１および第２の光電流出力を演算処理して測定
対象物体の位置を求めることができる。したがって、測
定対象物体の寸法を検出することができるとともに、測
定対象物体の中心が検出ゾーンのどの位置に存在するの
かを検出することも可能となる。In the dimension measuring apparatus according to claim 2, the amount of light received through the measurement object is detected based on the sum of the first and second photocurrent outputs of the position detection element provided in the light receiving section. The position of the measurement target object can be obtained by detecting the size of the measurement target object and performing arithmetic processing on the first and second photocurrent outputs of the position detection element. Therefore, it is possible to detect the size of the measurement target object and also to detect at which position in the detection zone the center of the measurement target object exists.

【図面の簡単な説明】[Brief description of drawings]

第１図はこの考案の一実施例の寸法測定装置を示す概略
ブロック図である。第２図は第１図に示すPSDの動作原
理を説明するための図である。第３図は第２図に示すPS
Dの加算出力と遮光部の面積との関係を示すグラフであ
る。第４図は第２図に示すPSDの除算出力と測定対象物
体の位置との関係を説明するためのグラフである。第５
図はこの考案の他の実施例の構成を示す概略ブロック図
である。第６図は従来の寸法測定装置を示す概略ブロッ
ク図である。第７図ないし第11図は従来の寸法測定装置
における問題点を説明するための図である。 図において、１は投光部、２は受光部、３は信号処理
部、４は投光素子、５は投光レンズ、６はスリット、７
は集光レンズ、８はPSD、９は加算器、10は除算器、11
は比較器、12は反転器を示す。FIG. 1 is a schematic block diagram showing a dimension measuring apparatus according to an embodiment of the present invention. FIG. 2 is a diagram for explaining the operation principle of the PSD shown in FIG. Figure 3 shows the PS shown in Figure 2.
7 is a graph showing the relationship between the addition output of D and the area of the light shielding portion. FIG. 4 is a graph for explaining the relationship between the PSD removal calculation force shown in FIG. 2 and the position of the measurement target object. Fifth
The figure is a schematic block diagram showing the configuration of another embodiment of the present invention. FIG. 6 is a schematic block diagram showing a conventional dimension measuring device. 7 to 11 are views for explaining the problems in the conventional dimension measuring device. In the figure, 1 is a light projecting section, 2 is a light receiving section, 3 is a signal processing section, 4 is a light projecting element, 5 is a light projecting lens, 6 is a slit, and 7 is a slit.
Is a condenser lens, 8 is a PSD, 9 is an adder, 10 is a divider, 11
Is a comparator, and 12 is an inverter.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項１】投光部から測定対象物体に平行光を投光
し、測定対象物体による光の遮蔽によって生じた光量の
変化を受光部で検出して物体の寸法を測定する透過形の
寸法測定装置において、 前記受光部は、受光面への照射光の受光位置に応じた第
１および第２の光電流出力を両端から出力する位置検出
素子を含み、 前記位置検出素子の第１および第２の出力を演算するこ
とに基づいて、測定対象物体を介して受光される光の量
を検出するとともに、測定対象物体の位置を検出する検
出手段と、 測定対象物体の位置が、前記検出手段の演算結果の線形
性に関わる予め定める領域外にあることが検出されたこ
とに応じて、所定の信号を出力する検出ゾーン判定手段
とを備えた、寸法測定装置。1. A dimension of a transmission type in which parallel light is projected from a light projecting unit to an object to be measured, and a change in the amount of light caused by blocking of light by the object to be measured is detected by a light receiving unit to measure the size of the object. In the measuring device, the light receiving unit includes a position detecting element that outputs first and second photocurrent outputs corresponding to a light receiving position of the irradiation light to the light receiving surface from both ends, and the first and the second position detecting elements of the position detecting element. The amount of light received through the measurement target object is detected based on the calculation of the output of 2 and the detection unit that detects the position of the measurement target object and the position of the measurement target object are the detection unit. And a detection zone determination unit that outputs a predetermined signal in response to the detection of being out of a predetermined region related to the linearity of the calculation result of 1. 【請求項２】投光部から測定対象物体に平行光を投光
し、測定対象物体による光の遮蔽によって生じた光量の
変化を受光部で検出して物体の寸法を測定する透過型の
寸法測定装置において、 前記受光部は、受光面への照射光の受光位置に応じた第
１および第２の光電流出力を両端から出力する位置検出
素子を含み、 前記位置検出素子の第１および第２の出力の和に基づい
て測定対象物体を介して受光される光の量を検出して測
定対象物体の寸法を検出するとともに、前記位置検出素
子の第１および第２の出力を演算処理して測定対象物体
の位置を求める検出手段とを備えた、寸法測定装置。2. A transmissive dimension for measuring the dimension of an object by projecting parallel light from a light projecting section onto an object to be measured and detecting a change in the amount of light caused by the blocking of light by the object to be measured by the light receiving section. In the measuring device, the light receiving unit includes a position detecting element that outputs first and second photocurrent outputs corresponding to a light receiving position of the irradiation light to the light receiving surface from both ends, and the first and the second position detecting elements of the position detecting element. The amount of light received through the measurement target object is detected based on the sum of the outputs of the two to detect the dimension of the measurement target object, and the first and second outputs of the position detection element are arithmetically processed. A dimension measuring device, comprising:
JP1990083914U 1990-08-07 1990-08-07 Dimension measuring device Expired - Lifetime JPH086244Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990083914U JPH086244Y2 (en) 1990-08-07 1990-08-07 Dimension measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990083914U JPH086244Y2 (en) 1990-08-07 1990-08-07 Dimension measuring device

Publications (2)

Publication Number Publication Date
JPH0441607U JPH0441607U (en) 1992-04-08
JPH086244Y2 true JPH086244Y2 (en) 1996-02-21

Family

ID=31631982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990083914U Expired - Lifetime JPH086244Y2 (en) 1990-08-07 1990-08-07 Dimension measuring device

Country Status (1)

Country Link
JP (1) JPH086244Y2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH611017A5 (en) * 1976-05-05 1979-05-15 Zumbach Electronic Ag
JPS6228605A (en) * 1985-07-30 1987-02-06 Hokuyo Automatic Co Optical external form measuring instrument
JPS6252404A (en) * 1985-09-02 1987-03-07 Nippon Steel Corp Rotary type dimension measuring method and apparatus

Also Published As

Publication number Publication date
JPH0441607U (en) 1992-04-08

Similar Documents

Publication Publication Date Title
US4529316A (en) Arrangement of eliminating erroneous data in three-dimensional optical sensors
JPH08159714A (en) Position detection sensor
JPH086244Y2 (en) Dimension measuring device
JPH08184431A (en) Distance measuring equipment
US4679932A (en) Method of and apparatus for measuring moving velocity of linear object moving and vibrating
JP3091276B2 (en) Displacement measuring device
JP3137559B2 (en) Distance measuring device
JPH07286811A (en) Optical device
JP2638724B2 (en) Vehicle dimension measuring device
JP2565274B2 (en) Height measuring device
JPH01156694A (en) Photoelectric switch
JP3479515B2 (en) Displacement measuring device and method
JPH01292203A (en) Length measuring apparatus
JP2577234Y2 (en) Laser rangefinder
JPH04344408A (en) Dimension measuring instrument
JP3439521B2 (en) Photoelectric sensor
JPH07270129A (en) Detection apparatus of sheet width and meandering amount of sheet material
JPH08247723A (en) Dimension measuring instrument
JPH04276514A (en) Noncontact displacement measuring apparatus
JP2534177B2 (en) Optical displacement measuring device
JP2901747B2 (en) Distance measuring device
JPH0495859A (en) Optically inspecting apparatus for printed board
JP3117389B2 (en) Distance measuring device
JPS5826325Y2 (en) position detection device
JPH02231507A (en) Width detecting method