JPH0847238A - Composite linear motor - Google Patents

Abstract

PURPOSE:To realize biaxial direction shift in highly accuracy and output a large driving force. CONSTITUTION:Electromagnets 9 and 10 are fitted to retracting members 19 and 20 for retracting a control current during inputting so as to for a power source, and a movable body 2 is shifted in an axial direction by the magnetism of the electromagnets 9 and 10 and retraction of the members 19 and 20. A retracting member and electromagnet of the same structure is orthogonally arranged on the opposite side of a frame 5 and the frames 5 and 1 are integrally shifted toward a fixed member 8 in an orthogonal crossing direction. The power source in a biaxial direction is allowed to have an improved accuracy and larger driving force thanks to the retraction of the retracting member.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motor used for various high-accuracy positioning drive of an assembly robot, a manipulator, an index table, a measuring instrument and the like.

[0002]

2. Description of the Related Art FIGS. 12 and 13 show a conventional linear device disclosed in Japanese Patent Application Laid-Open No. 5-316712 for performing biaxial drive. On the base 100, a pair of guides 110, 110 are provided in the X-axis direction.
X-axis sliders 120 and 13 are provided for 10 and 110, respectively.
0 is mounted slidably. An X-axis linear DC motor 140 has a stator 150 and a mover 160. The stator 150 includes an X-axis yoke 170 and a plurality of X-axis drive coils 180, 180 ... Fixed inside the yoke 170 in the X-axis direction.
Is fixed to the lower surface of the base 100 by fixing plates 190, 190. On the other hand, the X-axis driving permanent magnets 200, 200 ... Are aligned and fixed to the mover 160 in the X direction.

Next, the Y-axis linear DC motor 210 has a stator 220 and a mover 230. The stator 220 is Y
X-axis sliders 120 and 13 at both ends in the axial direction
Y-axis base 240 fixed on 0 and this base 24
A yoke 250 is included in the upper portion of the Y-axis fixed on the zero. Further, on the upper surface of the Y-axis base 240, the Y-axis driving permanent magnet 2 is provided.
.. are arranged and fixed in the Y-axis direction. In the above-described configuration, by applying a current to each of the X-axis and Y-axis coils, a thrust force according to Fleming's left-hand rule acts on the coils to linearly drive the X-axis and Y-axis directions.

[0004]

Since the above-described conventional linear device is driven by Fleming's left-hand rule using a coil and a permanent magnet, it is difficult to control a minute drive and a large torque cannot be generated. . Also, the permanent magnet and the coil must be provided for the length of the movement amount, and it is difficult to increase the movement amount, and a large space is required because the coil installation site is divided into two places. The arrangement for supplying power also becomes complicated. Moreover, since driving in the X-axis direction is performed by supporting the entire moving member for driving in the Y-axis direction, it is necessary to move the large and heavy coil, the permanent magnet, the Y-axis base, etc. together, which requires a large driving force. Becomes

The present invention has been made in consideration of the above circumstances, and an object of claim 1 is to generate a large driving force in two axial directions, to easily perform minute driving, to secure a moving amount, and to reduce the size. It is an object of the present invention to provide a composite linear motor that can be reduced in weight.

The object of claims 2 and 3 is to provide a compound linear motor which is easy to assemble and easy to repair.

[0007]

A compound linear motor according to a first aspect of the present invention has a movable body, an expansion / contraction member that expands / contracts when a control current is input, and the movable member is attached to a free end of the expansion / contraction member. A driving means formed of an electromagnet that faces the body with a gap and generates a magnetic force that attracts the movable body when a control current is input; and a mounting member arranged in two axial directions intersecting the driving means. It is characterized in that the movable body and the mounting member are relatively moved in a biaxial direction intersecting with each other by the driving of the driving means.

FIG. 1 and FIG. 2 are for explaining the operation of the above-mentioned structure, and show one set of a plurality of sets of driving means 70. The driving means 70 includes a telescopic member 71 and electromagnets 72, 7 attached to free ends on both sides of the telescopic member 71.
3 is provided. The elastic member 71 is a fixed shaft of the motor,
It is fixedly attached to a fixing member 74 such as a case. The electromagnets 72 and 73 include cores 72a and 73a fixed to the respective free ends of the elastic member 71, and the cores 72a and 73a.
Coil 72b and 73b wound around the core 7
2a and 73a face the moving body 75 with a predetermined gap.

Free ends 71a and 71b of the elastic member 71,
The electromagnets 72 and 73 operate integrally with the control current A. The electromagnets 72 and 73 apply the control current B to the coil 72.
b, 73b to input the cores 72a, 73a
To generate a magnetic force on the movable body 75 with a gap. This suction force and the free ends 71a and 71b of the elastic member 71
Moves the movable body 75, and the driving force of the expansion / contraction member 71 is transmitted to the movable body 75 without requiring mechanical contact.
The movable body 75 moves while being supported by bearings.

In FIG. 1, the input terminals 76 of the elastic member,
When the control currents A1 and A'1 are input to 77, the elastic member 71
Extends, the two free ends 71a and 71b and the electromagnet 72,
73 operates in the x1 and y1 directions. At this time, the control current B1 is input to the input terminal of the electromagnet 72 fixed to the one free end 71a at substantially the same timing as the control currents A1 and A'1. As a result, the movable body 75 is sucked and moved in the x1 direction, so that the movable body 75 is driven in the X direction (hereinafter,
This is X1 operation).

On the other hand, the control current B2 is not input to the input terminal of the electromagnet 73 fixed to the other free end 71b. As a result, the free end 71b and the electromagnet 7 are not attracted by the same moving body.
Only 3 operates in the y1 direction (hereinafter, this will be referred to as Y1 operation).

In FIG. 2, the input terminal of the elastic member is
_1, A ₂ and polarities different control currents A2, and expansion and contraction and elastic members 71 to enter A'2, 2 two free ends 71a, 71
b and the electromagnets 72 and 73 operate in the directions (y2 and x2) opposite to those in FIG. At this time, the control current B2 is applied to the input terminal of the electromagnet 73 fixed to the free end 71b.
2, input at almost the same timing as A'2. As a result, the movable body 75 is moved in the x2 direction while attracting the movable body 75, so that the movable body 75 is driven in the X direction.
2 movements).

On the other hand, the electromagnet 7 fixed to the free end 71a
The control current B1 is not input to the 2nd input terminal. As a result, the movable body is not attracted, and only the free end 71a and the electromagnet 72 move in the y2 direction (hereinafter referred to as Y2 operation). When the movable body 75 is continuously driven in the X direction, the control currents A1, A'1, A2, A'2 and the control current B
Repeat 1 and B2 as above, and input X1 + Y
This can be realized by sequentially repeating the operation 1 and the operation X2 + Y2. When driving in the Y direction, control currents A'1, A
2 controls the control currents B1 and B2 at substantially the same timing as when the free end of the elastic member 71 is moved in the Y1 and Y2 directions.
By inputting, it can be realized by attracting the movable body with an electromagnet.

According to the present invention, the driving means 70 for performing the above-mentioned operation is mounted on the mounting member (not shown) in the XY directions or the like.
It is arranged in two intersecting axial directions, and the driving means 70 of each axis and the movable body are opposed to each other. As a result, the movable body or the mounting member can be relatively moved in the biaxial directions.

In a second aspect, the first movable element is provided.
The frame and the second frame provided with the drive means constitute the mounting member. As a result, only the second frame having the driving means can be removed and repaired,
Easy maintenance and easy assembly.

According to a third aspect of the present invention, a mounting portion for biaxially intersecting the second frame is provided, and the driving means is arranged at each mounting portion. Maintenance becomes easy.

[0017]

First Embodiment FIGS. 3 to 5 show a first embodiment of the present invention. In this embodiment, as shown in FIG. 3, a first stage 2 and a second stage 8 both made of a magnetic material are orthogonal to each other.
It is arranged in the axial direction. The first stage 2 is a movable body, and penetrates the first frame 1 via bearings 3 and 4 so as to be movable in an orthogonal direction. The second stage 8 supports the first frame 1 so as to be movable in a direction orthogonal to the first stage 2, and in the present embodiment, the first frame 1 is opposed to the second stage 8. It is a movable body that moves in a straight line. Here, the second stage 8 is fixed by a fixing base 30, and the first frame 1 and the first stage 2 are fixed to the second stage 8 on the fixed side.
And a unit 2 in which a second frame 5 described later moves
It is 9. Rails 8a and 8b are formed on the upper and lower surfaces of the second stage 8 in the longitudinal direction, and the guides 1a and 1b of the first frame 1 are slidably inserted into the rails 8a and 8b. .

4 and 5 show a cross section taken along the line EE and the line FF in FIG. In these drawings, the second frame 5 is attached to the first frame 1, and the holder 6 extends from one surface of the second frame 5 toward the first stage 2 and the other of the second frame 5 is A holder 6'extends in the direction of the second stage 8 from the surface. Then, on both sides of the holder 6 on the first stage 2 side, electrostrictive elements 19 and 2 as expansion members are provided via electrodes 22 and 24.
0 is fixed (see FIG. 4), and electrostrictive elements 19 ′ 20 ′ as expansion members are fixed on both sides of the second stage 6 ′ via electrodes 22 ′ and 24 ′ (FIG. 4). 5). These holders 6 and 6'are arranged so that the respective electrostrictive elements 19, 20 and 19'20 'are orthogonal to each other.

In FIG. 4, cores 9 and 10 have screws 15, 1 on both ends 19a, 20a, which are free ends of electrostrictive elements 19, 20, via electrodes 21, 23 and mounting plates 25, 26.
The cores 9 and 10 are fixed by 6, 17, and 18.
The bobbins 13 and 14 formed of resin or the like are fixed to the coil, and the coils 11 and 12 are wound. The cores 9 and 10, the bobbins 13 and 14, and the coils 11 and 12 constitute electromagnets 27 and 28, respectively. Then, the electromagnets 27, 28 and the electrostrictive elements 19, 20 to which the electromagnets 27, 28 are attached constitute one set of driving means on the side of the first stage 2.

The same applies to FIG. 5, and the electrostrictive element 1
Both ends 19'a, 20'a which are free ends of 9 ', 20'
In addition, the cores 9'10 'have screws 15', 16 ', 17', 18 'via the electrodes 21', 23 'mounting plates 25', 26 '.
And the bobbins 13 'and 14' formed of resin or the like are fixed to the cores 9'and 10 '.
1'12 'is wound.

This core 9 ', 10', bobbin 13 ', 1
4'and coils 11 ', 12' provide electromagnet 27 ',
28 ', and the electromagnets 27', 28 'and the electrostrictive elements 19, 20' constitute one set of driving means on the second stage 8 side. The cores 9, 10 of the electromagnets 27, 28 and 27 ', 28' in each of the above driving means
And 9 ', 10' have corresponding stages 2, 8 and gaps 8, 8 ', respectively.

Next, the operation of this embodiment having the above-described structure will be described with the control currents and directions shown in FIGS. In the present embodiment, as described above, the first frame 1 moves linearly with respect to the second stage 8, and the first stage 2 crosses the first frame 1 in a direction orthogonal to the first frame 1. It moves straight to.

In FIG. 4, control currents A1 and A1 'are applied to electrodes 21, 22, 23 and 24 to generate electrostrictive elements 19 and 2.
0 is extended and its free ends 19a, 20a and electromagnet 2
7, 28 are integrally operated in the X and Y directions. At the same time, the control current B is input to the coil 12 of the electromagnet 28 by the input core 1
0 generates a magnetic force, and this magnetic force causes the first stage 2
Aspirate. Due to this suction force, the movement of the free end 20a in the x1 direction is transmitted to the first stage 2, and the stage 2 is driven in the X direction. At this time, the free end 19a and the electromagnet 27 operate in the y1 direction, but the control current B is not input to the electromagnet 27. As a result, the core 9 is in the stage 2
Is not sucked, the drive in the X direction is not affected, and the drive force is ready to be transmitted.

Next, the control currents A2 and A'2 having opposite polarities are input to the electrodes 21, 22, 23 and 24, and the electrostrictive element 19,
20 is contracted, the free ends 19a, 20a and the electromagnet 27,
28 is operated integrally in the y2 and x2 directions. At the same time, the control current B is input to the coil 11 of the electromagnet 27 to generate a magnet in the core 9, and the magnetic force of the core 9 attracts the first stage 2. Due to this suction force, the free end 19a
Is transmitted to the first stage 2 and the stage 2 is driven in the X direction. At that time, the free end 20
Although a and the electromagnet 28 operate in the y2 direction, the control current B is not input to the electromagnet 28. As a result, the core 10 does not attract the first stage 2, does not affect the driving in the X direction, and is in a ready state for transmitting driving force. Therefore, the second stage 2 is moved by the driving force of the elastic member by the above operation.

On the other hand, in FIG. 5, the control currents A1, A '
1 is added to the electrodes 21 ', 22', 23 ', 24, the electrostrictive elements 19', 20 'are extended, and the free ends 19'a, 20'.
a and the electromagnets 27 'and 28' are integrally operated in the X and Y directions. At the same time, the control current B is input to the coil 12 'of the electromagnet 28' to generate a magnetic force in the core 10 ', which is then attracted to the second stage 8. Here, since the second stage 8 is fixed, the entire unit 29 moves in the Y direction together with the electromagnet 27 with the electromagnet 28 as a starting point.
At this time, the control current B is not input to the electromagnet 27 '.
As a result, the second stage 8 is not sucked and is in a free state.

Next, control currents A2 and A2 'having opposite polarities are input to the electrodes 21', 22 ', 23' and 24 'to contract the electrostrictive elements 19' and 20 'and the free ends 19'a and 20'a
And electromagnets 27 'and 28' are integrally operated in the y2 and x2 directions. At the same time, the control current B is input to the coil 11 'of the electromagnet 27' to generate a magnetic force in the core 13 'and attract it to the second stage 8. In this case as well, since the second stage 8 is fixed in the same manner, the entire unit 29 moves in the Y direction together with the electromagnet 27 'starting from the electromagnet 28'. At this time, the control current B is not input to the electromagnet 28 '. This prevents the second stage 8 from sucking,
Make it free. By the above operation, the unit 29 including the first frame 5, the second frame 5, the first stage 2, etc. is guided and moved by the guides 1a, 1b and the rails 8a, 8b of the second stage 8.

In the present embodiment, the first frame 1 may be fixed to the fixed base 30 while the second stage 8 may be movable. In this case, the first stage 2 and the second stage 8 move and stop, and similarly, the two axes are driven.

In this embodiment as described above, a large torque can be generated with high accuracy by the expansion / contraction force of the electrostrictive element and the attractive force of the electromagnet. Further, since the stage may be made of a magnetic material, the driving force may be small. Moreover, since no coil or permanent magnet is required in the entire moving area, a large amount of movement can be secured with a simple structure. In addition, since the driving means is integrated in one place, the wiring for power supply is also integrated and the wiring is not complicated. Since the unit having one stage is attached to the other stage, biaxial linear drive can be easily realized.

In this embodiment, since the structure is divided into the second frame for fixing the driving means and the first frame for supporting the stage, the function of the driving means can be secured and repaired promptly. You can Further, since the electrostrictive element and the electromagnet are symmetrically arranged at both ends with the holder as the center, the vibration due to the expansion and contraction of the electrostrictive element is canceled and the entire device can be made to have low vibration.

[0030]

Second Embodiment FIG. 6 is an overall perspective view of the second embodiment, and FIG.
A sectional view taken along the line G and FIG. 8 are sectional views taken along the line HH. In FIG. 6, a first frame supporting the first stage 2 via bearings 3 and 4 and an L-shaped second frame 32 fixed to the first frame 31 are provided. There is. The first frame 31, the second stage 2, and the second frame 32 form a unit 40, and the unit 40 is attached to the second stage 8 fixed to the fixed base 30. In this case, the guides 31a, 31b provided on the frame 31 and the rails 8a of the second stage 8,
The unit 40 is movable by being guided by 8b.

In FIG. 7, the cores 9 and 10 of the electromagnets 27 and 28 are arranged so as to secure the first stage 2 and the gap g as in the first embodiment. Further, in FIG. 8, the cores 9'and 10 'of the electromagnets 27'28' are arranged so as to secure a gap g with the second stage 8. And
The two sets of driving means are arranged on the mutually orthogonal planes of the L-shaped frame 32 so as to be orthogonal to each other as in the first embodiment. Other configurations are the same as those in the first embodiment, so that they are designated by the same reference numerals.

In this embodiment, similarly to the first embodiment, the rails 8a and 8b of the second stage 8 and the guide 31 of the frame 31 are provided.
The unit 40 is driven by being guided by a and 31b, and the first stage 2 supported by the bearings 3 and 4 of the frame 31 of the unit 40 moves. Further, when the unit 40 is fixed, the stage 8 and the stage 2 move. In this embodiment, after the stage 8 is assembled with the first frame 31 to which the stage 2 and the guides 3a and 3b are fixed, the L-shaped second frame 32 to which the driving means is fixed is incorporated.
It is possible to secure a two-axis drive function.

In addition to the same effects as the first embodiment, the present embodiment described above has two sets of driving means arranged in the L-shaped second frame, so that the entire apparatus can be driven without disassembling. Only the second frame in which the means is arranged can be easily attached and detached. Therefore, the function can be secured and repaired promptly.

[0034]

Third Embodiment FIG. 9 is an overall perspective view of the third embodiment, and FIG.
-I line sectional drawing, FIG. 11 shows a JJ line sectional drawing. Figure 10
, The cores 7 and 10 of the electromagnet parts 27 and 28 fixed to the ends of the voltage elements 19 and 20 which are elastic members by screws 15, 16, 17 and 18, respectively, are mounted on the second frame 33 via the bearings 3 and 4. It is arranged so as to secure a gap g with the supported first stage 2.

In FIG. 11, the electrostrictive elements 19 ', 20' of one of the two driving means arranged on the first frame 34 are arranged.
Is fixed to both ends of the holder 6'as in the second embodiment, but the electrostrictive elements 19'20 'and the cores 9'and 10' are arcuate in shape according to the curvature of the arcuate second stage 35. It is provided along with. In addition, the guides 34 a and 34 b of the first frame 34 and the rail 35 of the second stage 35.
Guided by a and 34b, the first stage 2, the second frame 33 and the first frame 3 in which the driving means is arranged are arranged.
A unit 40 including 4 and the like is provided so as to be movable. The unit 40 has substantially the same configuration as that of the second embodiment, except that the rails 35a and 35b of the second stage 35 are used.
Has an arc shape. The other configurations are the same as those of the above-described embodiments, so that they are designated by the same reference numerals.

In this embodiment, the first stage moves linearly, but the other second stage has an arcuate shape. Therefore, the second frame in which the driving means is arranged and the first frame having the guide are arranged. A unit including the above, etc. is guided by a guide and turns in an arc shape.

In addition to the same effects as those of the above-described embodiments, this embodiment has an advantage that not only linear movement but also circumferential movement can be achieved by forming the guide and the frame in an arc shape. is there.

[0038]

According to the invention of claim 1, since the driving force of the elastic member is transmitted to the movable body without mechanical contact, biaxial driving can be performed with a large torque, and the amount of expansion and contraction of the elastic member can be easily controlled. Therefore, it is possible to perform positioning with high accuracy even with minute driving. Further, the size and weight can be reduced, and since the drive means are collectively arranged on the mounting member, it is possible to prevent the wiring for power supply from being complicated. Further, by separately controlling the expansion / contraction member and the electromagnet, it is possible to stably carry out minute load control and minute driving.

According to the second aspect of the invention, since the mounting member is composed of the first frame provided with the movable body and the second frame provided with the driving means, disassembly and assembly are easy,
Repairs and maintenance are also easy. Further, according to the invention of claim 3 as well, since the drive means is arranged in the mounting portion of the second frame,
Repairs and maintenance are easy.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing the extension action of the basic configuration of the present invention.

FIG. 2 is a cross-sectional view showing the contracting action of the basic configuration of the present invention.

FIG. 3 is an overall perspective view of the first embodiment of the present invention.

FIG. 4 is a sectional view taken along line EE of FIG.

5 is a cross-sectional view taken along line FF of FIG.

FIG. 6 is an overall perspective view of the second embodiment.

7 is a cross-sectional view taken along line GG of FIG.

FIG. 8 is a sectional view taken along line HH of FIG.

FIG. 9 is an overall perspective view of a third embodiment.

10 is a cross-sectional view taken along the line I-I of FIG.

11 is a sectional view taken along line JJ of FIG.

FIG. 12 is a perspective view of a conventional device.

13 is a cross-sectional view taken along the line RR of FIG.

[Explanation of symbols]

 70 Driving means 71 Stretchable members 72, 73 Electromagnet 75 Movable body

Claims (3)

[Claims] 1. A movable body, an elastic member that expands and contracts when a control current is input, and a movable body that is attached to the free end of the elastic member and faces the movable body with a gap and attracts the movable body when a control current is input. And a mounting member arranged in a biaxial direction in which the driving means intersects, and a biaxial shaft in which the movable body and the mounting member intersect by driving the driving means. A compound linear motor that moves relative to each other. 2. The mounting member has a first frame on which the movable body is provided, and a second frame for arranging the drive means in two axial directions, and the second frame is the first frame. The combined linear motor according to claim 1, wherein the combined linear motor is assembled into 3. The composite linear motor according to claim 2, wherein the second frame has two axially intersecting mounting portions, and the driving means is disposed at each mounting portion.