KR20100130873A

KR20100130873A - Noncontact ferromagnetic rotational actuator and method for controlling the same

Info

Publication number: KR20100130873A
Application number: KR1020090049610A
Authority: KR
Inventors: 백윤수; 최정수
Original assignee: 연세대학교 산학협력단
Priority date: 2009-06-04
Filing date: 2009-06-04
Publication date: 2010-12-14
Also published as: KR101029187B1

Abstract

PURPOSE: A contactless ferromagnetic material rotation device and a control method thereof are provided to control the bidirectional rotation movement of a ferromagnetic material by generating a Lorentz force. CONSTITUTION: A support stand is installed on the ground. An in-plane movement driving part(100A,100B,100C) is installed in the bottom surface of the support stand along a columnar direction at an uniform interval. The in-plane movement driving part comprises an air-core solenoid(100A-1,100B-1,100C-1) which is operated according to power and a permanent magnet(100A-2,100B-2,100C-2). An out-of-plane movement driving part(101A,101B,101C) is installed in the bottom surface of the support stand along the columnar direction.

Description

Noncontact Ferromagnetic Rotational Actuator and Method for controlling the same}

The present invention relates to a rotary device capable of continuously rotating a ferromagnetic material having a circular tube shape in a circumferential direction, and more particularly, to a control mechanism of a ferromagnetic material as well as to stably control a circular ferromagnetic material. The present invention relates to a non-contact ferromagnetic rotary device and a control method thereof, which can realize a simple, compact, and compact structure.

In general, since a single rigid body is capable of six degrees of freedom in space, a contactless bearing is used to restrict and constrain the remaining five degrees of freedom except for the desired direction of rotation of one degree of freedom.

In order to smoothly and precisely support and guide the motion of the single rigid body, a magnetic levitation method, which is a non-contact support and guidance method using electromagnetic force, is mainly used. This non-contact magnetic levitation method is suitable for a clean environment and can be used in a vacuum environment because it does not generate dust or particles, requires no lubricant, and requires low maintenance, maintenance, and repair costs and time.

This magnetic levitation method is combined with an electromagnetic driver that functions to generate a non-contact rotational force by using an electromagnetic force to generate a rotational movement in a moving unit that is a single rigid body. However, the actuator that creates the rotational force combined with the magnetic levitation method has a disadvantage of generating a force variation depending on the position or time that may adversely affect the stability and control performance of the magnetically injured rotor.

As shown in US Patent No. 4,683,391 (1987), the magnetic levitation driver having a rotational positioning function is an example of generating a rotational motion using a reluctance force such as a stepping motor. 2 is shown. As shown, the stator has a floating electromagnet (9) 10 and a rotating electromagnet (16) (17) (18) (19) which are also involved in the rotation of the rotor (20) and the first, second, and third Magnetic bearings and motors (2 '2') consisting of four core legs having the first and fourth magnetic poles (11) (12) (13) (14) and core portions (15) having teeth on the core legs; , Propulsion direction bearing (3), outer frame (6), emergency bearing (7), radial and axial gap sensors (4) (5), and the rotor (20) comprises a rotating shaft (1) and A ferromagnetic material having teeth 21, the floating electromagnets 9 and 10 to which the current is applied, form a magnetic circuit in the core part 15 and the rotor 20 while being magnetically formed with the rotor 20. To generate flotation force, and the first pair of rotating electromagnets (16) (17) a certain distance away from the tooth with the first pole (11) of the rotor (20) while being supplied with current. The floating electromagnet (9) (10) Magnetically interacting with the magnetic circuit being built to generate a first rotational force by attracting the teeth with the first and second magnetic poles (11) (12), the first and second magnetic poles (11) (12) A tooth with the second and third poles (13) and (14) of the rotor located next to the tooth with a second pair of teeth positioned next to the first pair of rotating electromagnets (16) and (17). The third and fourth magnetic poles 13 and 14 magnetically interact with the magnetic circuit produced by the floating electromagnets 9 and 10 while being supplied with switching current to the rotating electromagnets 18 and 19. Rotating the rotor 20 while repeating a series of sequential processes such as generating a rotational force while pulling the teeth with. Accordingly, the rotor can be rotated together with the magnetic levitation.

However, such a reluctance type magnetically levitated driver is driven by using a rotor having a tooth structure and a plurality of electromagnets having iron cores, which interact with one tooth at a certain distance from one electromagnet and move the tooth into the electromagnet. The rotor rotates as it is pulled out. At this time, the force generated is a rotational force and a suction force, and as the rotor rotates, a problem occurs in which the rotational force and the suction force simultaneously change. In particular, the change in suction force is a problem that adversely affects the floating stability of the magnetically injured rotor. Therefore, a rotary drive having a toothed structure requires a toothed structure in order to perform the function of rotating the rotor, and thus a rotational force is generated. Therefore, a cogging force or a cogging torque is caused by this change in force. Problems are bound to occur. If the rotor does not have a tooth structure, the reluctance driver has a problem that it is difficult to generate a rotational force in the rotor having a continuous circular tube shape rather than the tooth structure in the rotation principle.

On the other hand, the 'magnetically levitated electric motor' presented in Republic of Korea Patent No. 352022 (2002) is another such example that rotates using a Lorentz force, as shown in Figures 3 to 5, The stator 25 has a plurality of rotary windings 24 and a bearing winding 29 at the lower end of the stator 25, and the rotor 28 has a plurality of sequential polarities opposite to each other in the circumferential direction. It consists of a permanent magnet 27 and a back yoke 26. Accordingly, when the same phase currents are applied to the rotary winding 24 as shown in FIG. 4, the Lorentz force LF is generated by the interaction between the permanent magnet 27 and the applied current, and the generated force is The rotation force is generated by rotating the rotor 28, and when reverse currents are applied to the bearing windings 29 as shown in FIG. 5, the Lorentz force of the lower portion is caused by the interaction between the permanent magnets and the bearing windings to which the current is applied. (LF) is generated, and floating force (BF) is generated in the rotor so that it can be magnetically injured.

However, the Lorentz-type magnetically levitated electric motor has to be disposed with a permanent current or a magnet in the magnetic field of the permanent magnet. Therefore, a plurality of permanent magnets or electromagnets should be disposed according to the desired rotation range. Therefore, a large number of permanent magnets or electromagnets are required, and the generated force fluctuates near the end of the permanent magnet or the end of the coil, causing vibration or stability problems to the magnetically floating rotor. Force ripple issues are occurring that can result in poor or poor control performance. In the conventional Lorentz-type actuator, a permanent magnet is disposed on the rotor, and a coil or vice versa, one of magnetic elements such as permanent magnets or coils is disposed on the rotor and the other is disposed on the stator. Since it is a rotation principle that can generate a rotational force on the rotor, there is a problem that it is difficult to generate a rotational movement in the radial direction of the rotor without placing such a magnetic element in the rotor which is a circular ferromagnetic tube.

On the other hand, the 'non-contact rotating stage' presented in the Republic of Korea Patent Registration No. 699346 (2007) is another example that rotates using the induction motor principle, as shown in Figure 6, the stator is a plurality of core core Three pairs of three-phase two-pole lateral flux induction motors 30, 31, 32 with 36 and coils 35 are arranged at equal intervals in the circumferential direction of the rotor, and the rotor is formed of conductor 33 and yoke ( 34), each of the lateral flux induction motors 30, 31 and 32 has two poles according to the application of a three-phase power source, and a rotational force is generated in the rotor in the circumferential direction by the principle of the induction motor. At the same time, the suction force, which is a suction force, is generated, and the rotor is magnetically floating and rotating.

However, such an inductive type non-contact rotating stage applies a multiphase AC current to a coil to generate a rotational motion in the rotor, and a time-varying magnetic field generated therein generates an induction current in the rotor. The rotational force is generated in the rotor by electromagnetic interaction with the magnetic field, and the magnetic field generated by the plurality of coils and cores interacts with the yoke of the rotor to generate suction. However, this suction force is generated by the multi-phase AC current, which causes each of the electromagnets that are separated at regular intervals to generate a large number of different suction force in the rotor at each position and at the same time depending on the magnitude of the AC current applied. Since the suction force generated in the rotor changes depending on time, there is a disadvantage in that the force fluctuation problem that changes over time may generate vibration or stability problems in the electromagnetically injured rotor.

As described above, the conventional rotary actuators require an electromagnet, which is at least two active elements, in order to rotate the rotating part, together with the force variation problem. In other words, the reluctance driver must have at least two electromagnets to move the rotor. Similarly, inductive actuators also require at least two electromagnets to generate an induced current and to generate force by interacting with the generated induced current. Lorentz-type actuators also need to be additionally attached with electromagnets to produce a rotation angle outside the range of motion a single electromagnet can provide. As a result, the size of the driving unit having an electromagnet is correspondingly large, and thus, it is difficult to have a compact and compact structure.

Accordingly, the present invention has been made to solve the above-mentioned conventional problems, the object of the present invention is through the interaction between the magnetic field formed in the ferromagnetic material of the circular tube shape by the permanent magnet and the current flowing through the coil of the air core solenoid A non-contact ferromagnetic rotary device and a method of controlling the same in which a ferromagnetic propulsion mechanism can be realized in a simple, compact and compact structure by generating a Lorentz force so that the ferromagnetic material can rotate in both directions while maintaining a non-contact state. In providing.

In addition, another object of the present invention in generating a rotational force in the ferromagnetic material, by controlling the current applied to the drive unit for rotating the ferromagnetic material to generate a constant vertical force which is a non-contact magnetic force to the ferromagnetic material to prevent the ferromagnetic material from vibrating The present invention provides a non-contact ferromagnetic rotating device and a control method thereof to stably control the rotation.

Non-contact ferromagnetic rotating device of the present invention for achieving the above object, the support is installed in the ground; An air core solenoid which is installed at equal intervals along the circumferential direction of the support and is operated by application of a permanent magnet and a power source so as to generate a force capable of moving the ferromagnetic material in the X-axis, Y-axis and Yaw movement directions. A plurality of in-plane motion driving units including; It is installed at the bottom of the support at equal intervals along the circumferential direction, and is provided with an iron core and an electromagnet operated according to the application of a power source to generate a force capable of moving the ferromagnetic material in the Z-axis, roll and pitch movement directions. Characterized in that it comprises a one-sided motion drive unit

Here, the bottom surface of the support is installed at equal intervals along the circumferential direction, the out-of-plane motion measuring unit for detecting the Z-axis, roll and pitch motion of the ferromagnetic material in a non-contact can be further installed.

In addition, the in-plane motion measuring unit is installed on the bottom surface of the support and detects the X-axis and Y-axis motion and Yaw motion of the ferromagnetic material in a non-contact manner.

The in-plane motion measuring unit may include: an X-axis displacement measuring sensor installed at a predetermined distance away from the center of the bottom of the support in the X-axis direction and non-contactly detecting the X-axis displacement of the outer surface of the ferromagnetic material; A Y-axis displacement measuring sensor installed at a predetermined distance in the negative Y-axis direction from the center of the bottom of the support and detecting non-contacting Y-axis displacement of the outer surface of the ferromagnetic material; Yaw displacement measuring sensor which is installed at a predetermined distance in the positive Y-axis direction from the center of the bottom surface of the support and detects Yaw motion which is the rotation of the ferromagnetic material in a non-contact manner.

In addition, the ferromagnetic material may be disposed at a predetermined distance in the Z-axis direction so as not to contact the in-plane motion driving part, the out-of-plane motion driving part, and the out-of-plane motion measuring part, and may be installed in a non-contact state by penetrating the inside of the concentric solenoid of the in-plane motion driving part. .

In addition, the non-contact six degrees of freedom motion of the ferromagnetic material through the plurality of in-plane and out-of-plane motion driving unit, a plurality of in-plane and out-of-plane motion measuring unit, power amplifier, analog / digital converter, digital / analog converter, control algorithm and computer It may be configured to further include a control unit to control the.

The in-plane motion driving unit includes three permanent magnets installed at equal intervals of 120 degrees along the circumferential direction of the bottom of the support to have the same magnetization direction in the Z-axis direction; It is installed at the lower end of each permanent magnet and consists of three concentric solenoids having a concentric axis in the circumferential direction, the ferromagnetic material can be arranged in the concentric of each concentric solenoid.

At this time, the width of the core core of the out-of-plane motion driving unit may be formed to be equal to the value of the outer diameter of the ferromagnetic material minus the inner diameter.

Alternatively, the width of the permanent magnet of the in-plane motion driving unit may be formed to be equal to the value obtained by subtracting the inner diameter from the outer diameter of the ferromagnetic material.

On the other hand, another non-contact ferromagnetic rotating device of the present invention for achieving the above object, the support is installed in the ground; A plurality of in-plane motion driving parts installed at equal intervals along the circumferential direction of the bottom of the support and generating a force capable of moving the ferromagnetic material in the X-axis, Y-axis, and Yaw motion directions; It is installed at the bottom of the support at equal intervals along the circumferential direction, and is provided with an iron core and an electromagnet operated according to the application of a power source to generate a force capable of moving the ferromagnetic material in the Z-axis, roll and pitch movement directions. One in-plane motion driving unit, wherein each of the in-plane motion driving unit, a plurality of permanent magnets are installed at equal intervals along the circumferential direction on the bottom surface of the support to have the same magnetization direction in the Z-axis direction; It is installed at the lower end of each permanent magnet and consists of a plurality of concentric solenoids having a concentric axis in the circumferential direction, the ferromagnetic material can be formed to be disposed in a non-contact state through the plurality of concentric solenoids.

In addition, the non-contact 6 degrees of freedom motion of the ferromagnetic material through the plurality of in-plane and out-of-plane motion driving unit, a plurality of in-plane and out-of-plane motion measuring unit, power amplifier, analog / digital converter, digital / analog converter, control algorithm and computer It may be configured to further include a control unit to control the.

On the other hand, another non-contact ferromagnetic rotating device of the present invention for achieving the above object, the support is installed in the ground; A plurality of in-plane motion driving parts installed at equal intervals along the circumferential direction of the bottom of the support and generating a force capable of moving the ferromagnetic material in the X-axis, Y-axis, and Yaw motion directions; It is installed at the bottom of the support at equal intervals along the circumferential direction, and is provided with an iron core and an electromagnet operated according to the application of a power source to generate a force capable of moving the ferromagnetic material in the Z-axis, roll and pitch movement directions. Including an out-of-plane motion drive unit, the in-plane motion drive unit, and a ferromagnetic rod is installed at equal intervals along the circumferential direction in the bottom portion of the support; A plurality of permanent magnets are installed at equal intervals along the; It is installed at the lower end of each permanent magnet and consists of a plurality of concentric solenoids having a concentric axis in the circumferential direction, the ferromagnetic material is disposed in a non-contact state through the plurality of concentric solenoids, and opposite to each other in the adjacent concentric solenoids By applying a current of the ferromagnetic rod, it characterized in that a closed loop magnetic circuit leading to the permanent magnet and the ferromagnetic material is formed.

In addition, the non-contact ferromagnetic rotating device control method according to the present invention for achieving the above object, the information about the motion of the ferromagnetic material through the in-plane motion measuring unit and the out-of-plane motion measuring unit and the in-plane motion information and the out-of-plane motion information of the desired ferromagnetic material The difference from the motion information is inputted to each controller as an error, and the modal force information composed of the forces for each corresponding motion through the controller's regulation or servo algorithm. After the conversion, these modal force information is converted into driving force of each of the in-plane motion driving part and the out-of-plane motion driving part, and then converted back to the control current corresponding to these driving forces, respectively, and transmitted to the power amplifier. The motion information of the ferromagnetic material is changed by applying current to each of the in-plane motion driver and the out-of-plane motion driver. Accordingly, the error is detected by the in-plane motion measuring unit and the out-of-plane motion measuring unit and the error is reflected to near zero by repeating a series of processes such as reflecting the difference between the desired in-plane motion information and the out-of-plane motion information as errors. By controlling to control the six degrees of freedom of the ferromagnetic material characterized in that the control.

According to the non-contact ferromagnetic rotating device of the present invention having the above-described configuration, an undesired direction simultaneously occurring in the remaining directions other than the structural complexity and force generated in a desired direction when developing a single degree of freedom or a multiple degree of freedom rotary motion mechanism It is possible to reduce or eliminate the non-linearity of the force, which can simplify the structure of low-induced rotational motion or multi-freedom rotational motion mechanism, and is suitable for working in a place requiring clean working environment or vacuum working environment. It is capable of continuous and high precision movements and extends to long rotating working areas.

In addition, there is no need to have additional passive or active electromagnetic elements when expanding into a long rotating working area, and there is no tooth structure by using a actuator consisting of one permanent magnet, one passive electromagnetic element and one concentric solenoid active electromagnetic element. Since the ferromagnetic material can be driven, it is possible to prevent high stability and robustness due to problems such as manufacturing errors, assembly errors, and modeling errors that can occur due to the installation of additional driver elements. At the same time, there is an effect that large displacement rotation is possible, there is no need to use a complicated electric circuit with a switching process, and it is possible to reduce manufacturing cost and power consumption.

In addition, in order to increase rotational force or thrust, a pair of actuators consisting of passive electromagnetic elements and active electromagnetic elements are additionally modularized and attached to a plurality of driver modules, thereby rotating in accordance with the number of driver modules attached through a linear superposition principle. Alternatively, the propulsion speed can be doubled, thereby simplifying and simplifying the driving mechanism.

In addition, since the additional driver module arrangement described above only involves increasing torque or thrust regardless of securing a long rotating working area,

The present invention having this effect is a scanning probe microscope for analyzing and manipulating micro-objects, a rotary motion device for rotating a mirror for reflection of a laser beam of a laser interferometer, a device for rotating a wafer, a wafer in a clean or vacuum environment. Or, it can be applied to various applications depending on the purpose of application in the field requiring rotational motion such as high resolution positioning device for ultra-precision positioning of reticle, rotational motion device of robot manipulator, panel rotation device such as TFT LCD, etc. In addition, there is an advantage that can be applied to a rotary motion driver that performs a transfer, positioning or assembly function for a micro / nano factory.

Hereinafter, a non-contact ferromagnetic rotating device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

7 is a perspective view illustrating a non-contact ferromagnetic rotating device according to an embodiment of the present invention, Figure 8 is a detailed view showing the internal structure of the non-contact ferromagnetic rotating device shown in FIG. 9 is a perspective view showing an out-of-plane motion driving unit and an out-of-plane motion measuring unit in FIG. 8, FIG. 10 is a cross-sectional view for explaining the restoring force of the out-of-plane motion driving unit according to the present invention, and FIG. 11 is the present invention. Sectional view for explaining the restoring force of the permanent magnet in the in-plane motion drive unit according to. FIG. 12 is a perspective view showing an in-plane motion gap sensor and an in-plane motion gap sensor part in FIG. 8, and FIG. 13 is a cross-sectional view illustrating an operation principle of a ferromagnetic cylinder by the in-plane motion drive part of the present invention.

As shown in Figures 7 to 13, the non-contact ferromagnetic rotating device according to the present invention is a fixed body 104 is fixed on the ground, and is installed in the non-contact state inside the fixed body 104, the power supply from the outside It is composed of a ferromagnetic cylinder 106 that is a rotating body that performs a rotational motion by the Lorentz force generated during application.

The fixed body 104 is composed of one permanent magnet (100A-2) (100B-2) (100C-2) and a hollow core solenoid (100A-1) (100B-1) (100C-1) A plurality of in-plane motion driving units (100A) (100B) (100C) for rotating the ferromagnetic cylinder (106) passing through the interior of the air core solade (100A-1) (100B-1) (100C-1); A plurality of out-of-plane motion drivers 101A, 101B, 101C disposed on an upper side of the ferromagnetic cylinder 106 between the plurality of in-plane motion drivers 100A, 100B, 100C, and the ferromagnetic cylinder ( A plurality of out-of-plane motion measuring units 103A, 103B and 103C disposed on the upper side of the 106 and measuring out-of-plane motion of the ferromagnetic cylinder 106, and a plurality of in-plane motion measuring units 102A and 102B ( 105 and a support 107 on which they can be mounted.

The support 107 is formed in the shape of a disc having a hole of a predetermined diameter in the center, the lower side of the in-plane motion driving unit (100A) 100B (100C), out-of-plane motion driving unit (101A) (101B) (101C) ), Three in-plane motion measuring units 102A, 102B and 105, and three out-of-plane motion measuring units 103A, 103B and 103C are provided, respectively, and are attached and fixed while maintaining a constant distance from each other. This support 107 is fixed to the ground to maintain a fixed state when the ferromagnetic cylinder 106 is rotated.

The ferromagnetic cylinder 106 is a rotating structure having a circular tube shape, a plurality of in-plane motion drive unit (100A) (100B) (100C) and the out-of-plane motion drive unit 101A (101B) 101C and the out-of-plane motion measurement unit 103A Located at a certain distance in the Z-axis direction in the gravitational direction so as not to come in contact with each other (103B) and (103C), a plurality of air core solenoids (100A-1) of the in-plane motion driving unit (100A) (100B) (100C) 100B-1) (100C-1) is located inside the core. In this case, the air core means that the inside of the solenoid is empty and a space in which air exists, and in the case of vacuum, the solenoid is empty.

The three in-plane motion driving units 100A, 100B, and 100C are fixedly installed at equally spaced intervals of 120 degrees along the circumferential direction at the bottom of the support 107. The in-plane motion driving unit (100A) (100B) (100C) is a permanent magnet (100A-2) (100B-2) (100C-2) having a high magnetic field, and the permanent magnet (100A-2) (100B-2) Consists of an air core solenoid (100A-1) (100B-1) (100C-1) coupled to (100C-2), the permanent magnet (100A-2) (100B-2) (100C-2) is a support ( 107 are arranged at equal intervals along the circumferential direction, and at the bottom of each of the permanent magnets 100A-2, 100B-2 and 100C-2, an air core solenoid 100A-1 and 100B-1 ) 100C-1 is combined. At this time, the ferromagnetic cylinder 106 is located in a non-contact state at a portion away from the bottom of the upper end of the air core solenoid (100A-1) (100B-1) (100C-1).

By this structure, the magnetic field directions 100A-2B of the permanent magnets 100A-2, 100B-2 and 100C-2 and the permanent magnets 100A-2, 100B-2 and 100C-2 The permanent magnets 100A-2, 100B-2 and 100C-2 are provided at the lower end of the air core solenoids 100A-1, 100B-1 and 100C-1 so that the current directions are perpendicular to each other. The circumferential tangential direction of the ferromagnetic cylinder 106 located immediately below is perpendicular to the current flowing in the air core solenoids 100A-1, 100B-1 and 100C-1.

The in-plane motion driving unit 100A, 100B, 100C is driven when power is applied to the air core solenoids 100A-1, 100B-1, 100C-1, and the ferromagnetic cylinder 106 is circumferentially driven. In addition to generating a yaw motion to rotate, it generates a translational motion in the X-axis and Y-axis directions.

Meanwhile, the out-of-plane motion driving units 101A, 101B and 101C are located along the circumferential direction of the bottom surface of the support 107 having a disc shape, such as the installation form of the in-plane motion driving units 100A, 100B and 100C. Arranged at intervals. At this time, the out-of-plane motion drive unit (101A) (101B) (101C) is located on the ferromagnetic cylinder 106, and are disposed at intervals such as 120 degrees between the in-plane motion drive unit (100A) (100B) (100C), respectively.

Here, the out-of-plane motion driving unit (101A) (101B) (101C) is an E-shaped or C-shaped iron core core (101A-2) (101B-2) (101C-2) and a plurality of electromagnets driven in accordance with the application of power It consists of (101A-1) (101B-1) and (101C-1).

The iron core cores 101A-2, 101B-2 and 101C-2 are installed at equal intervals in the circumferential direction with a constant radius from the center of the bottom portion of the support 107, such iron core cores 101A-2 ( 101B-2) and 101C-2 may use a general solid ferromagnetic material or a laminated ferromagnetic material to reduce generation of induced current. The electromagnets 101A-1, 101B-1 and 101C-1 are inserted into and coupled to the iron core cores 101A-2, 101B-2 and 101C-2.

At this time, the width of the iron core core (101A-2) (101B-2) (101C-2) of the out-of-plane motion drive unit (101A) (101B) (101C) and the value of the outer diameter of the ferromagnetic cylinder 106 minus the inner diameter In this case, when the center of the ferromagnetic cylinder 106 is out of a certain distance in the X-axis or Y-axis direction from the origin of the reference coordinate system, a restoring force such as a spring is generated to prevent the mounting of additional tools or devices. It is possible to automatically return the ferromagnetic cylinder to near the origin of the reference coordinate system without having to.

Alternatively, the width of the permanent magnets 100A-2, 100B-2 and 100C-2 of the in-plane motion driving units 100A, 100B and 100C is equal to the value obtained by subtracting the inner diameter from the outer diameter of the ferromagnetic cylinder 106. In this case, when the center of the ferromagnetic cylinder 106 is out of a certain distance in the X-axis or Y-axis direction from the origin of the reference coordinate system to generate a restoring force, such as a spring without mounting additional tools or devices In addition, the ferromagnetic cylinder can be automatically returned to near the origin of the reference coordinate system. As such, the non-magnetic spring function capable of double stabilizing the ferromagnetic cylinder 106 may be provided.

The out-of-plane motion drive unit 101A, 101B, 101C having such a configuration is driven when power is applied to the electromagnets 101A-1, 101B-1, 101C-1 to move the ferromagnetic cylinder 106 in the Z-axis direction. To translate or rotate in the direction of roll and pitch movement.

The Z-axis, roll, and pitch movement principles of the ferromagnetic cylinder 106 by the out-of-plane motion driving units 101A, 101B, and 101C will be described in detail. The Z-axis motion of the ferromagnetic cylinder 106 is the ferromagnetic material. It is determined by the weight of the cylinder 106, the passive force element and the active force element, which are the permanent magnets 100A-2 and 100B- of the in-plane motion drives 100A, 100B and 100C. 2) It is an uncontrollable force as a force by 100C-2, and the said active force element means a force which can be controlled as a force by the out-of-plane motion drive part 101A, 101B, 101C.

The weight of the ferromagnetic cylinder 106 is acted in the negative Z-axis direction by the permanent magnet (100A-2) (100B-2) (100C-2) of the in-plane motion drive unit (100A) (100B) (100C) The suction force generated acts in the positive Z-axis direction. Due to this, the weight of the ferromagnetic cylinder 106 is the suction force (L-PMA) generated by the permanent magnets (100A-2) (100B-2) (100C-2) of the in-plane motion driving unit (100A) (100B) (100C) It is reduced to a certain level by the) and the weight is reduced so that the out-of-plane motion driving unit (101A) (101B) 101C completely cancels or performs a function to control to a certain level.

Thus, by offsetting the weight of the ferromagnetic cylinder 106 to a predetermined level by the permanent magnet (100A-2) (100B-2) (100C-2) of the in-plane motion drive unit (100A) (100B) (100C) out-of-plane motion drive unit ( 101A) 101B and 101C have the advantage of reducing power consumption since they can float the ferromagnetic cylinder 106 in the Z-axis direction with correspondingly lower power.

The method of controlling the Z axis motion of the ferromagnetic cylinder 106 based on the Z axis motion principle as described above is as follows. Currents for the first, second and third out-of-plane motions in the electromagnets 101A-1, 101B-1 and 101C-1 of the first, second and third out-of-plane motion drives 101A, 101B and 101C. Are applied to each of these out-of-plane motion driving units 101A, 101B, and 101C, the force LA in the positive Z-axis direction (LB) LC is applied to the ferromagnetic cylinder 106 as shown in FIG. The forces of each of these forces are related to the weight (gravity) of the ferromagnetic cylinder 106 while controlling the movement in the Z-axis direction of the ferromagnetic cylinder 106.

Roll motion of the ferromagnetic cylinder 106 is the first force (LA) and the third out-of-plane motion driving unit generated by applying the first out-of-plane motion current to the electromagnet (101A-1) of the first out-of-plane motion drive unit (101A) ( It is generated by the combination of the third force LC generated by applying the third out-of-plane motion current to the electromagnet 101C-1 of 101C. That is, the first generated by the first out-of-plane motion driving unit 101A by the difference between the first out-of-plane motion current and the third out-of-plane motion current applied to each of the electromagnets 101A-1 and 101C-1. If the force LA is less than the third force LC generated by the third out-of-plane motion drive 101C, the ferromagnetic cylinder 106 rotates counterclockwise with respect to the X axis, which is a positive Roll motion direction. On the contrary, when large, the ferromagnetic cylinder 106 rotates clockwise with respect to the Y axis, which is a negative roll movement direction.

On the other hand, the pitch motion of the ferromagnetic cylinder 106 is applied to the first and third out-of-plane motion current to the electromagnets 101A-1 (101C-1) of the first and third out-of-plane motion drive unit 101A (101C) And a second force LB generated by the first and third forces LA and LC generated by the second out-of-plane motion drive 101B. That is, the second force generated by the second out-of-plane motion drive 101B is the force of the first force LA and the third force LC generated by the first and third out-of-plane motion drives 101A and 101C. If greater than the force LB, the ferromagnetic cylinder 106 rotates counterclockwise with respect to the Y axis, which is the positive pitch direction of motion, and conversely, if the ferromagnetic cylinder 106 is Y, the negative direction of pitch movement, It will rotate clockwise about the axis.

In addition, when the center of gravity of the ferromagnetic cylinder 106 deviates by a certain distance in the X-axis or Y-axis direction from the origin, the out-of-plane motion drive unit 101A, 101B, 101C to which the out-of-plane motion current is applied, and the in-plane The permanent magnets 100A-2, 100B-2, and 100C-2 of the motion driving units 100A, 100B, and 100C generate a spring-like restoring force on the ferromagnetic cylinder 106, so that the weight of the ferromagnetic cylinder 106 is reduced. Return the center to the origin.

10 to 12, the out-of-plane motion driving units 101A, 101B and 101C to which the out-of-plane motion current is applied have a negative center of gravity GC of the ferromagnetic cylinder 106 from the origin of the reference coordinate system. When a certain distance apart in the X-axis direction, the first and third out-of-plane restoring force (P-LA) (P-LC) generated by the first and third out-of-plane motion driving units 101A and 101C is Y. The restoring force of the axial components cancels each other, leaving only the restoring force of the X-axis component, and the second out-of-plane restoring force (P-LB) generated by the second out-of-plane motion driving unit 101B has no Y-axis component and the restoring force of the X-axis component. Only exists. In other words, the combined force of the first and third out-of-plane restoring forces (P-LA) (P-LC) and the second out-of-plane restoring force (P-LB) of the remaining X-axis components remain uncompensated. The ferromagnetic cylinder 106, which is deviated by a certain distance in the X-axis direction from the origin of, can be returned to the origin of the reference coordinate system.

The mechanism for restoring the position of the ferromagnetic cylinder 106 is, as shown in Figs. 10 and 12, the permanent magnets (100A-2) (100B-2) (100C-) of the in-plane motion driving unit (100A) (100B) (100C). The same applies to the restoring force (P-RA) (P-RB) (P-RC) generated by 2). The same method of restoring the position is applied even when the center of gravity G.C. of the ferromagnetic cylinder 106 is separated from the origin of the reference coordinate system by a certain distance in the Y-axis direction. Therefore, the ferromagnetic rotating device of the present invention has a non-contact spring function that can generate a spring-like restoring force in the X-axis and Y-axis direction, so that out-of-plane motion in the X-axis and Y-axis direction within a certain level to which such restoring force can act. Double stability can be ensured by the permanent magnets 100A-2, 100B-2 and 100C-2 of the driving units 101A, 101B and 101C and the in-plane motion driving units 100A, 100B and 100C. have.

The out-of-plane motion measuring units 103A, 103B and 103C are installed at equal intervals along the circumferential direction at the bottom of the support 107, and such out-of-plane motion measuring units 103A, 103B and 103C. ) Performs a function of non-contact sensing of the Z-axis, roll and pitch motion of the ferromagnetic cylinder 106, for this purpose has at least three out-of-plane motion measurement sensors.

The in-plane motion measuring unit is for measuring the X-axis and Y-axis motion of the ferromagnetic cylinder 106, the ferromagnetic cylinder 106 is installed with a predetermined distance in the X-axis direction from the center of the bottom portion of the support 107 X-axis displacement measuring sensor 102B for non-contact detection of the X-axis displacement of the outer surface of the, and the ferromagnetic cylinder 106 is installed with a constant distance in the negative Y-axis direction from the center of the bottom portion of the support 107 Y-axis displacement measuring sensor (102A) for non-contact detection of the Y-axis displacement of the outer surface of the) and the ferromagnetic cylinder 106 is installed at a predetermined distance in the positive Y-axis direction from the center of the bottom portion of the support 107 Yaw displacement measuring sensor 105 for detecting the Yaw motion that is the rotation of the non-contact.

Wherein the Yaw displacement measuring sensor 105 installs a circular scale circumferentially along the outer surface of the ferromagnetic cylinder 106 and contacts the amount of the scale that rotates correspondingly as the ferromagnetic cylinder 106 rotates. It refers to a device that includes a non-contact rotary motion measurement function, such as an encoder device that can be measured by

Hereinafter, an operation process of the non-contact ferromagnetic rotating device of the present invention having the above-described configuration will be described in detail with reference to the accompanying drawings.

First, prior to driving the non-contact ferromagnetic rotating device of the present invention, the air core solenoid 100A-1 of the in-plane motion driving unit 100A, 100B, 100C for the X-axis, Y-axis and Yaw motion of the ferromagnetic cylinder 106 (100B-1) (100C-1) and out-of-plane motion drive unit for Z-axis, roll and pitch movements (101A-1 (101B-1) (101B-1) (101C-1) of (101A) (101B) (101C) Estimate the value of the input power applied to operate the controller.

In this state, when power is applied to the air core solenoids 100A-1, 100B-1 and 100C-1 of the in-plane motion driving units 100A, 100B and 100C, as shown in FIGS. 9 to 13. The magnetic field 100A-2B of the permanent magnet 100A-2 of the in-plane motion driving unit magnetizes the ferromagnetic cylinder 106, and the ferromagnetic cylinder 106 has the same magnetization direction 100A as the permanent magnet 100A-2. -2A). The magnetic field of the magnetized ferromagnetic cylinder 106 is electromagnetically interacted with the applied current (100A-1B) applied to the air core solenoid (100A-1) is a driving force (PA) to the magnetized ferromagnetic cylinder 106 The Lorentz force in the Y-axis direction is generated to generate the movement 109 of the ferromagnetic cylinder 106 in the Y-axis direction.

In the ferromagnetic cylinder 106 moving in the Y-axis direction, a portion of the ferromagnetic cylinder 106 magnetized by the permanent magnet 100A-2 moves the ferromagnetic cylinder 106 in the Y-axis direction. As a result, the next portion of the ferromagnetic cylinder 106 having a continuous shape is continuously transferred to the object to be magnetized by the permanent magnet 100A-2. Accordingly, as the ferromagnetic cylinder 106 is continuously moved in the Y-axis direction by the Lorentz force, the permanent magnet 100A-2 continuously magnetizes the ferromagnetic cylinder 106 positioned below the ferromagnetic cylinder 106. At this time, a part of the magnetic field of the permanent magnet (100A-2) affects the ferromagnetic cylinder 106 is changed continuously according to the movement time of the ferromagnetic cylinder 106. The applied current (100A-1B) of the air core solenoid (100A-1) continuously interacts with the ferromagnetic cylinder (106) continuously magnetized, and generates a continuous thrust force as long as the length of the ferromagnetic material permits. Since the ferromagnetic cylinder 106 of the present invention has a circular shape, a Lorentz force capable of generating a propulsion force in the Y-axis direction is continuously generated in the ferromagnetic cylinder 106 to rotate the ferromagnetic cylinder 106 indefinitely. It becomes possible. At this time, the driving force generation principle of the first in-plane motion driving unit 100A is equally applied to the second and third in-plane motion driving units 100B and 100C, respectively. The magnetic field direction 100A-2B of the permanent magnet 100A-2 and the current direction 100A-1B of the air core solenoid 100A-1 are identical to the three in-plane motion driving units 100A, 100B and 100C. When applied, the rotational force generated in the ferromagnetic cylinder 106 may be generated by the force of three forces in the counterclockwise direction, and the ferromagnetic cylinder 106 may rotate in the counterclockwise direction while generating a yaw motion. The current direction at this time is defined as a positive direction.

On the other hand, the ferromagnetic cylinder 106 can be translated in the X-axis direction by the following propulsion principle. That is, if a positive directional current is applied to the second concentric solenoid (100B-1) and a negative directional current is applied to the third concentric solenoid (100C-1), the second and third in-plane motion driving units (100B) (100C) The force in the Y-axis of PB (PC) produced by) is offset by each other because they are of the same size but opposite directions, and the forces in the X-axis direction are combined because they are the same size and have the same direction. The cylinder 106 is translated in the positive X axis direction. When the current is applied to the second concentric solenoid 100B-1 and the third concentric solenoid 100C-1 in the opposite direction, the ferromagnetic cylinder 106 translates in the negative X axis direction.

In addition, when controlling the Z-axis, the roll and the pitch movement, which are the out-of-plane motion of the ferromagnetic cylinder 106, the out-of-plane motion driving unit 101A, 101B, 101C and in-plane motion driving unit 100A, 100B, 100C The X- and Y-axis motions of the ferromagnetic cylinder 106 by the permanent magnets 100A-2, 100B-2 and 100C-2 may have restoring forces that can be stabilized by generating a spring force to a certain level. Since the motion can be adjusted, the ferromagnetic cylinder can also be rotated using only one in-plane motion drive or only two in-plane motion drives of the three in-plane motion drivers 100A, 100B and 100C. The X-axis driving force is applied to the permanent magnets 100A-2, 100B-2 and 100C-2 of the out-of-plane motion driving parts 101A, 101B and 101C and the in-plane motion driving parts 100A, 100B and 100C. The ferromagnetic cylinder 106 is made larger than the X-axis component force of the restoring force (P-LA) (P-LB) (P-LC) (P-RA) (P-RB) (P-RC) that can be generated by ) Moves in the X-axis direction.

On the other hand, the ferromagnetic cylinder 106 can be translated in the Y-axis direction by the following propulsion principle. That is, a negative directional current is applied to the first concentric solenoid 100A-1, a positive directional current is applied to the second concentric solenoid 100B-1, and a positive directional current is applied to the third concentric solenoid 100C-1. Is applied, the first in-plane motion driving unit 100A generates a force PA in the positive Y-axis direction to the ferromagnetic cylinder 106 and the force generated by the second and third in-plane motion driving units 100B and 100C. The force in the X-axis direction of (PB) (PC) is the same magnitude but the directions are opposite to each other, so they cancel each other out. Here, the force PA in the positive Y-axis direction generated in the first in-plane motion driving unit 100A is the force of the forces PB (PC) generated in the second and third in-plane motions 100B and 100C. Applied to the concentric solenoids 100A-1 of the first in-plane motion driving unit 100A or the concentric solenoids 100B-1 and 100C-1 of the second and third in-plane motion driving units 100B and 100C. By appropriately adjusting the magnitude of the current, a difference in force may occur so that Yaw motion does not occur in the ferromagnetic cylinder 106. Through the generated Y-axis force, the ferromagnetic cylinder 106 can be translated in the positive Y-axis direction. When the current is applied in the opposite direction, the ferromagnetic cylinder 106 translates in the negative Y-axis direction. The Y-axis driving force is applied to the permanent magnets 100A-2, 100B-2 and 100C-2 of the out-of-plane motion driving parts 101A, 101B and 101C and the in-plane motion driving parts 100A, 100B and 100C. The ferromagnetic cylinder 106 is made larger than the Y-axis component force of the restoring force (P-LA) (P-LB) (P-LC) (P-RA) (P-RB) (P-RC) that may be generated by ) Moves in the Y-axis direction.

On the other hand, in the direction of the combination of the forces generated by the in-plane motion drive unit (100A) (100B) (100C) to rotate in the desired direction at the same time as the arbitrary movement in the X-axis and Y-axis direction of the ferromagnetic cylinder 106 By applying a larger current than that to one in-plane motion driving unit, the rotational motion can be generated simultaneously with the translational motion. That is, the first Lorentz force PA generated by applying a positive current to the first in-plane motion driving unit 100A for the negative Y-axis translational movement is directed toward the negative Y-axis direction and the second and third in-planes. Since the sum of the second Lorentz force PB and the third Lorentz force PC generated by applying the same magnitude of current in the negative direction to the motion driving units 100B and 100C, respectively, is directed in the negative Y-axis direction, If the difference between the forces of the first Lorentz force (PA) and the second and third Lorentz forces (PB) (PC) is zero, a negative Y-axis translation occurs, but if the difference is not zero, the translation And rotational movement occur simultaneously. In other words, if the first Lorentz force PA is greater than the sum of the second and third Lorentz forces PB (PC), the rotational movement in the positive Yaw direction simultaneously with the translation in the negative Y-axis direction This happens. Through this, the Y-axis translational motion and the yaw-direction rotational motion can be simultaneously implemented. The method of simultaneously implementing the translational motion and the rotational motion can be equally applied to the simultaneous implementation of the translational motion in the X-axis direction and the rotational motion in the Yaw motion direction.

On the other hand, as shown in Figure 9, the permanent magnets (100A-2) (100B-2) (100C-2) of the in-plane motion drive unit (100A) (100B) (100C) positive Z axis to the ferromagnetic cylinder 106 Directional attraction force (L-PMA) (L-PMA) (L-PMA), and the sum of these attraction forces is the ferromagnetic cylinder, as described earlier in the description of the operation of the out-of-plane motion drive unit 100A, 100B, 100C. A function to reduce the weight of the 106 to a certain level.

As shown in FIGS. 8 and 9, arbitrary initial positions are set to detect movements of the ferromagnetic cylinder 106 in the roll and pitch movement directions, and the ferromagnetic cylinder ( Roll motion of 106 is obtained from the gap of the gap between the first non-contact gap sensor (103A) and the third gap sensor (103C), one of the out-of-plane motion measurement unit, and the information about the roll motion of the ferromagnetic cylinder (106) Pitch motion obtains information about the pitch motion from the gap difference between the second gap sensor 103B and the third gap sensor 103C. And, in order to detect the movement in the Z-axis movement direction of the ferromagnetic cylinder 106, each of the predetermined initial positions are set, the Z-axis movement of the ferromagnetic cylinder 106 is measured out of plane based on this initial position The information on the Z-axis motion is obtained by combining the information on the Roll and Pitch motions by dividing the sum of the gap information from the three gap sensors 103A, 103B and 103C by three.

In addition, an arbitrary initial position is set in order to detect motion in the X-axis direction of the ferromagnetic cylinder 106, and extensions of the X- and Y-axis directions of the ferromagnetic cylinder 106 are made based on the initial position. The X-axis displacement measuring sensor 102B and the Y-axis displacement measuring sensor 102A, which are in-plane motion measuring units respectively disposed on the line, obtain information about the X-axis and Y-axis motion of the ferromagnetic cylinder 106. In addition, an arbitrary initial position is set to detect rotation of the ferromagnetic cylinder 106 in the yaw direction, and the Y-axis displacement is measured on the Y-axis extension line of the ferromagnetic cylinder 106 based on the initial position. Yaw displacement measuring sensor 105 disposed in the opposite direction of sensor 102A obtains information about the movement of the ferromagnetic cylinder 106 in the Yaw direction of motion.

On the other hand, Figure 14 is a flow chart illustrating a rotational motion control method of the ferromagnetic cylinder 106 by the non-contact ferromagnetic rotating device of the present invention described above. Referring to FIG. 14, the ferromagnetic cylinder 106 of the present invention is capable of six degrees of freedom non-contact motion while having a long rotational motion in space. That is, the information about the Z-axis, roll and pitch motion of the ferromagnetic cylinder 106 is detected by the out-of-plane motion measuring unit 103A, 103B, 103C, and inputted to the controller as an error in the difference between the desired out-of-plane motion information. After converting this into modal force information consisting of forces corresponding to the Z-axis, roll and pitch movements through the controller's regulation or servo algorithm, the modal force information is again converted to the driving force LA of each driving unit (LB). (LC) and convert it back into control currents corresponding to these driving forces, respectively, and transfer it to a power amplifier and apply the generated current to each out-of-plane motion driver 101A, 101B, 101C. When the motion information of the ferromagnetic cylinder 106 is changed, it is detected by the out-of-plane motion measuring unit again and the error is repeated by a series of processes such as reflecting the difference with the desired out-of-plane motion information as an error. By controlling to converge close to zero, the Z-axis, the roll, and the pitch motion of the ferromagnetic cylinder 106 can be controlled. In a similar manner, the X, Y and Yaw motions of the ferromagnetic cylinder 106 can also be controlled.

On the other hand, Figure 15 shows the structure of a non-contact ferromagnetic rotating device according to another embodiment of the present invention.

In the non-contact ferromagnetic rotary device according to the second embodiment of the present invention, the in-plane motion driving unit is modified in the form of the non-contact ferromagnetic rotary device shown in FIG. 8, as shown in FIG. Along the circumferential direction at the bottom of the support 107 in order to increase the force causing the driving portions 100A '(100B') (100C ') to generate the X, Y and Yaw motions of the ferromagnetic cylinder 106; Each of the in-plane motion driving units 100A ', 100B', and 100C 'is provided with a plurality of permanent magnets 100A'-2A, 100A'-2B, 100A-2C, respectively. 2A, 100B'-2B, 100B-2C) (100C'-2A, 100C'-2B, 100C'-2C) and a plurality of air core solenoids (100A'-1A, 100A'-1B, which are driven according to the application of power) 100A'-1C) (100B'-1A, 100B'-1B, 100B'-1C) (100C'-1A, 100C'-1B, 100C'-1C).

According to the structure, a plurality of permanent magnets 100A'-2A, 100A'-2B, 100A-2C having the same magnetization direction in the Z-axis direction in the in-plane motion driving units 100A ', 100B' and 100C '. ) (100B'-2A, 100B'-2B, 100B-2C) (100C'-2A, 100C'-2B, 100C'-2C) magnetizes the ferromagnetic cylinder 106 and the ferromagnetic cylinder 106 thus magnetized. ) The plurality of permanent magnets (100A'-2A, 100A'-2B, 100A-2C) (100B'-2A, 100B'-2B, 100B-2C) (100C'-2A, 100C'-2B, 100C ' -2C) replaces the magnetic field generating function and is supplied with a concentric solenoid (100A'-1A, 100A'-1B, 100A'-1C) (100B'-1A, 100B'-1B, 100B'-1C) (100C '-1A, 100C'-1B, 100C '-1C) will generate more force in the X, Y and Yaw directions. The principle of generation of these forces is the same as the Lorentz force principle described above with reference to FIG. 13 described above. In this case, power may be applied to the air-core solenoids 100A'-1A (100A'-1B) 100A'-1C of the first in-plane motion driving unit 100A ', respectively, in series, in parallel, or independently. And the third in-plane motion driving unit 100B '(100C') may also take this series, parallel or independent power application.

On the other hand, Figure 16 is a perspective view showing the structure of a non-contact ferromagnetic rotating device according to another embodiment of the present invention, Figure 17 is a cross-sectional view illustrating the operation principle of the in-plane motion driving unit shown in FIG.

16 and 17, the non-contact ferromagnetic rotating apparatus according to the third embodiment of the present invention, in order to further increase the force for generating the X-axis, Y-axis and Yaw motion of the ferromagnetic cylinder 106, In the in-plane motion driving parts 200A, 200B, and 200C, three ferromagnetic rods 200A-3, 200B-3, and 200C-3 are arranged at equal intervals in the circumferential direction at the bottom of the support 107, respectively. At a lower end of the ferromagnetic bars (200A-3) (200B-3) (200C-3) in the circumferential direction of the ferromagnetic bars (200A-3) (200B-3) (200C-3) A first permanent magnet 200A-2A having a magnetization direction 205A in the Z-axis direction and a second permanent magnet 200A-2B having a magnetization direction 205B in the positive Z-axis direction, respectively, First and second having a concentric axis in the circumferential direction of the ferromagnetic bars (200A-3) (200B-3) (200C-3) at the bottom of the first and second permanent magnets (200A-2A) (200A-2B) An air core solenoid (200A-1A) (200A-1B) is disposed, respectively, the ferromagnetic cylinder 106 is the first and second air core disposed at the bottom of the permanent magnet (200A-2A) (200A-2B) The solenoids 200A-1A and 200A-1B are arranged in a state spaced apart from the upper end by a predetermined distance.

According to such a structure, the first in-plane motion driving unit 200A defines the first permanent magnet 200A-2A having the magnetization direction 205A in the negative Z axis direction and the magnetization direction 205B in the positive Z axis direction. The magnetic field generated by the second permanent magnet 200A-2B has a closed loop magnetic circuit 206 counterclockwise by the ferromagnetic cylinder 106 and the first ferromagnetic rod 200A-3. This causes the ferromagnetic cylinder 106 to interact with the first permanent magnet 200A-2A while being spaced apart by a constant distance 202A in the Z-axis direction below the first permanent magnet 200A-2A. The portion has a magnetic field in the negative Z-axis direction, and the magnetic field thus formed interacts with the positive directional current 201A applied to the first concentric solenoid 200A-1A to generate the first Lorentz force. And, while interacting with the second permanent magnet (200A-2B) and the magnetic field in the positive Z-axis direction at a portion away from the second permanent magnet (200A-2B) by a certain distance (202B) in the Z-axis direction The magnetic field thus formed interacts with the negative directional current 201B applied to the second concentric solenoids 200A-1B to generate a second Lorentz force, while the ferromagnetic cylinder 106 is generated first. The force of the Lorentz force and the second Lorentz force is such that the thrust is greater than the first in-plane motion driving unit 100A of the ferromagnetic rotating device shown in FIG. Since the thrust principle of the ferromagnetic cylinder 106 is equally applied to the second and third in-plane motion driving units 200B and 200C, a description thereof will be omitted. In this case, power may be applied to the air-center solenoids 200A-1A and 200A-1B of the first in-plane motion driver 200A, respectively, in series, in parallel or independently, and the second and third in-plane motion drivers 200B. ) 200C may also take this series, parallel or independent power application.

18 is a perspective view illustrating a structure of a non-contact ferromagnetic rotating device according to still another embodiment of the present invention, and FIG. 19 is a cross-sectional view for describing an operation principle of the in-plane motion driving unit illustrated in FIG. 18.

18 and 19, the non-contact ferromagnetic rotating apparatus according to the fourth embodiment of the present invention, in order to further increase the force for generating the X-axis, Y-axis and Yaw motion of the ferromagnetic cylinder 106, Three ferromagnetic rods 300A-3, 300B-3 and 300C-3 at equal intervals along the circumferential direction of the bottom surface of the support 107 in the in-plane motion driving units 300A, 300B and 300C, respectively. Installed at a lower end of the ferromagnetic rods 300A-3, 300B-3, and 300C-3 in a circumferential direction of the ferromagnetic rods 300A-3, 300B-3, and 300C-3. The first permanent magnet 300A-2A having the magnetization direction 305A in the negative Z axis direction and the second permanent magnet 300A-2B having the magnetization direction 305B in the positive Z axis direction and the negative Z axis And third permanent magnets 300A-2C having magnetization directions 305C in the directions, respectively, and the first, second and third permanent magnets 300A-2A (300A-2B) (300A-2C). Of First, second and third concentric solenoids 300A-1A (300A-1B) 300A-1C having concentric axes in the circumferential direction of ferromagnetic bars 300A-3, 300B-3 and 300C-3 at the bottom ) Are arranged respectively. In addition, the ferromagnetic cylinder 106 has a structure arranged while passing through the air core of the first, second and third air core solenoids 300A-1A, 300A-1B and 300A-1C.

According to this structure, the first and third in-plane motion driving units 300A and 300C have the first and third permanent magnets having magnetization directions 305A and 305C in the negative Z-axis direction as shown in FIG. The magnetic field generated by 300A-2A (300A-2C) and the second permanent magnet 300A-2B having the positive magnetization direction 305B in the Z-axis direction is the ferromagnetic cylinder 106 and the first ferromagnetic rod ( 300A-3) to form the counterclockwise closed loop magnetic circuit 306A and the clockwise closed loop magnetic circuit 306B, which causes the ferromagnetic cylinder 106 to have the first and third permanent magnets. Interacting with (300A-2A) (300A-2C), the magnetic field is directed in the negative Z-axis direction at portions separated by a constant distance 302A (302C) in the Z-axis direction below the first and third permanent magnets, respectively. The magnetic field thus formed is the first and third concentric solenoids (300A-1A). ) Interact with the positive direction currents 301A and 301C applied to 300A-1C, respectively, to generate the first and third Lorentz forces, and interact with the second permanent magnets 300A-2B. The magnetic field is formed in the positive Z-axis direction at a portion separated by a predetermined distance 302B in the Z-axis direction below the second permanent magnet 300A-2B, and the magnetic field formed as described above is the second concentric solenoid 300A-1B. The ferromagnetic cylinder 106 receives the force of the generated first, second and third Lorentz forces while interacting with the negative directional current 301B applied to) to generate the second Lorentz force. It will have a larger thrust than the first in-plane motion driving unit 100A of the ferromagnetic rotating device shown in FIG. This method is equally applicable to the second and third in-plane motion drivers 300B and 300C, where the concentric solenoids 300A-1A and 300A-1B of the first in-plane motion drive 300A are provided. -1C) power can be applied in series, parallel or independently, respectively, and the second and third in-plane motion drivers 300B and 300C can also take this series, parallel or independent power application.

1 is a cross-sectional view showing the structure of a conventional reluctance rotary driver.

2 is a cross-sectional view taken along the line AA ′ of FIG. 1.

3 to 5 show the structure of a conventional Lorentz-type rotary driver.

Figure 6 is a view showing the structure of a conventional induction rotary drive.

7 is a perspective view showing a non-contact ferromagnetic rotating device according to an embodiment of the present invention.

Figure 8 is a detailed view showing the internal structure of the non-contact ferromagnetic rotating device shown in FIG.

FIG. 9 is a perspective view illustrating an out-of-plane motion driving unit and an out-of-plane motion measuring unit in FIG. 8; FIG.

10 is a cross-sectional view for explaining the restoring force of the out-of-plane motion drive unit according to the present invention.

11 is a cross-sectional view for explaining the restoring force of the permanent magnet in the in-plane motion drive unit according to the present invention.

FIG. 12 is a perspective view illustrating an in-plane motion driving unit and an in-plane motion measuring sensor part in FIG. 8; FIG.

Fig. 13 is a cross-sectional view illustrating the principle of operation of a ferromagnetic cylinder by an in-plane motion drive unit of the present invention.

14 is a flow chart for explaining a rotational motion control method of a ferromagnetic cylinder by a non-contact ferromagnetic rotating device of the present invention.

15 is a perspective view showing the structure of a non-contact ferromagnetic rotating device according to another embodiment of the present invention.

Figure 16 is a perspective view showing the structure of a non-contact ferromagnetic rotating device according to another embodiment of the present invention.

17 is a cross-sectional view for explaining the principle of operation of the in-plane motion driving unit shown in FIG.

18 is a perspective view showing the structure of a non-contact ferromagnetic rotating device according to another embodiment of the present invention.

19 is a cross-sectional view for explaining the principle of operation of the in-plane motion driving unit shown in FIG.

106: ferromagnetic cylinder

107: support

100A, 100B, 100C: In-plane motion drive

100A-1,100B-1,100C-1: air core solenoid,

100A-2,100B-2,100C-2: Permanent magnet

101A, 101B, 101C: Out-of-plane motion drive

101A-1,101B-1,101C-1: Electromagnet

101A-2, 101B-2, 101C-2: Iron Core Core

102A, 102B, 105: In-plane motion measuring unit

103A, 103B, 103C: Out-of-plane motion measuring unit

200A-3,200B-3,200C-3: Ferromagnetic Rod

Claims

A support installed on the ground;

An air core solenoid which is installed at equal intervals along the circumferential direction of the support and is operated by application of a permanent magnet and a power source so as to generate a force capable of moving the ferromagnetic material in the X-axis, Y-axis and Yaw movement directions. And a plurality of in-plane motion drive unit having;

It is installed at the bottom of the support at equal intervals along the circumferential direction, and is provided with an iron core and an electromagnet operated according to the application of a power source to generate a force capable of moving the ferromagnetic material in the Z-axis, roll and pitch movement directions. Non-contact ferromagnetic rotary device characterized in that it comprises a drive out of plane

The non-contact ferromagnetic material rotation of claim 1, wherein the bottom surface of the support is installed at equal intervals along the circumferential direction, and an out-of-plane motion measuring unit is further installed to detect non-contact Z-axis, roll, and pitch motion of the ferromagnetic material. Device

The non-contact ferromagnetic rotating device according to claim 1 or 2, further comprising: an in-plane motion measuring unit installed on the bottom of the support and detecting non-contact X-axis and Y-axis motion and Yaw motion of the ferromagnetic material.

According to claim 3, The in-plane motion measuring unit,

An X-axis displacement measuring sensor installed at a predetermined distance in the X-axis direction from the center of the bottom portion of the support and non-contactly detecting the X-axis displacement of the outer surface of the ferromagnetic material;

A Y-axis displacement measuring sensor installed at a predetermined distance in the negative Y-axis direction from the center of the bottom of the support and detecting non-contacting Y-axis displacement of the outer surface of the ferromagnetic material;

Non-contact ferromagnetic rotating device, characterized in that the Yaw displacement measuring sensor is installed a predetermined distance away from the center of the bottom surface of the support in the positive Y-axis direction to detect the Yaw motion that is the rotation of the ferromagnetic material in a non-contact

4. The ferromagnetic material of claim 3, wherein the ferromagnetic material is positioned at a predetermined distance in the Z-axis direction so as not to come into contact with the in-plane motion driving part, the out-of-plane motion driving part, and the out-of-plane motion measuring part. Non-contact ferromagnetic rotating device, characterized in that installed

The method of claim 3, wherein the plurality of in-plane and out-of-plane motion driving units, a plurality of in-plane and out-of-plane motion measuring units, a power amplifier, an analog-to-digital converter, a digital-to-analog converter, a control algorithm and a computer to make contactless contact with the ferromagnetic material. Non-contact ferromagnetic rotating device further comprises a control unit for controlling the six degrees of freedom motion

According to claim 1, wherein the in-plane motion drive unit,

Three permanent magnets installed at equal intervals of 120 degrees along the circumferential direction of the bottom of the support to have the same magnetization direction in the Z-axis direction;

It is installed at the bottom of each permanent magnet and consists of three air core solenoids having a co-axial axis in the circumferential direction,

Non-ferromagnetic ferromagnetic rotating device, characterized in that the ferromagnetic material is arranged in the air core of each of the air core solenoid.

The non-contact ferromagnetic rotating device according to claim 1, wherein a width of an iron core of the out-of-plane motion driving unit is equal to a value obtained by subtracting an inner diameter from an outer diameter of the ferromagnetic material.

The non-contact ferromagnetic rotating device according to claim 1, wherein the width of the permanent magnet of the in-plane motion driving unit is equal to a value obtained by subtracting the inner diameter from the outer diameter of the ferromagnetic material.

A support installed on the ground;

A plurality of in-plane motion driving parts installed at equal intervals along the circumferential direction of the bottom of the support and generating a force capable of moving the ferromagnetic material in the X-axis, Y-axis, and Yaw motion directions;

It is installed at the bottom of the support at equal intervals along the circumferential direction, and is provided with an iron core and an electromagnet operated according to the application of a power source to generate a force capable of moving the ferromagnetic material in the Z-axis, roll and pitch movement directions. Including an out-of-plane drive,

Each of the in-plane motion driving unit,

A plurality of permanent magnets installed at equal intervals along the circumferential direction of the bottom of the support to have the same magnetization direction in the Z-axis direction;

It is installed at the lower end of each permanent magnet and consists of a plurality of air core solenoids having a co-axial axis in the circumferential direction,

The ferromagnetic material is a non-contact ferromagnetic rotating device, characterized in that formed in the non-contact state penetrating through the plurality of air core solenoid.

The non-contact ferromagnetic material rotation of claim 10, wherein the bottom surface of the support is installed at equal intervals along the circumferential direction, and an out-of-plane motion measurement unit is further installed to detect the Z-axis, roll, and pitch motion of the ferromagnetic material in a non-contact manner. Device

12. The non-contact ferromagnetic rotating device according to claim 10 or 11, further comprising an in-plane motion measuring unit installed on the bottom of the support and detecting non-contact X-axis and Y-axis motion and Yaw motion of the ferromagnetic material.

The method of claim 12, wherein the in-plane motion measuring unit,

The non-contact contact of the ferromagnetic material according to claim 12, wherein the plurality of in-plane and out-of-plane motion driving units, a plurality of in-plane and out-of-plane motion measuring units, a power amplifier, an analog / digital converter, a digital / analog converter, a control algorithm and a computer. Non-contact ferromagnetic rotating device further comprises a control unit for controlling the six degrees of freedom motion

The non-contact ferromagnetic rotating device according to claim 10, wherein the width of the iron core of the out-of-plane motion driving unit is equal to a value obtained by subtracting the inner diameter from the outer diameter of the ferromagnetic material.

The non-contact ferromagnetic rotating device according to claim 10, wherein the width of the permanent magnet of the in-plane motion driving unit is equal to a value obtained by subtracting the inner diameter from the outer diameter of the ferromagnetic material.

A support installed on the ground;

The in-plane motion driving unit

A ferromagnetic rod installed at equal intervals along the circumferential direction of the bottom of the support;

A plurality of permanent magnets installed at equal intervals along the circumferential direction at the lower end of the ferromagnetic rod so as to have the same magnetization direction in the Z-axis direction;

It is installed at the lower end of each permanent magnet and consists of a plurality of air core solenoid having an air core axis in the circumferential direction,

The ferromagnetic material is disposed in a non-contact state through the plurality of concentric solenoids,

Non-contact ferromagnetic rotary device characterized in that the ferromagnetic rod, the permanent magnet and a closed loop magnetic circuit leading to the permanent magnet and the ferromagnetic body are formed by applying currents in opposite directions to neighboring air core solenoids.

The information about the motion of the ferromagnetic material is detected through the in-plane motion measuring unit and the out-of-plane motion measuring unit, and the difference between these in-plane motion information and the out-of-plane motion information of the desired ferromagnetic material is inputted to each controller as an error. After converting the modal force information consisting of the forces for each motion through the regulation or servo algorithm of the modulus, the modal force information is again converted to the driving force of each in-plane motion driver and out-of-plane motion driver. To the control currents corresponding to these driving forces, respectively, and converts them back to a power amplifier, and transfers the generated currents to the respective in-plane motion driving units and the out-of-plane motion driving units, so that the motion information of the ferromagnetic material is As it changes, it is detected again by the in-plane motion measuring unit and the out-of-plane motion measuring unit and again By repeating a series of processes such as reflecting the difference between the information and the out-of-plane motion information as an error to control the error close to zero (zero) by controlling the six degrees of freedom motion of the ferromagnetic material, characterized in that Non-contact ferromagnetic rotating device control method