JPH0847093A - Manufacture of piezoelectric ceramic transformer having interdigital electrode - Google Patents
Manufacture of piezoelectric ceramic transformer having interdigital electrodeInfo
- Publication number
- JPH0847093A JPH0847093A JP17441694A JP17441694A JPH0847093A JP H0847093 A JPH0847093 A JP H0847093A JP 17441694 A JP17441694 A JP 17441694A JP 17441694 A JP17441694 A JP 17441694A JP H0847093 A JPH0847093 A JP H0847093A
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- Prior art keywords
- electrodes
- piezoelectric ceramic
- comb
- electrode
- transformer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 230000010287 polarization Effects 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000010248 power generation Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000010304 firing Methods 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910020684 PbZr Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000010338 mechanical breakdown Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、各種の高電圧発生用電
源回路で動作可能な圧電トランス、特に小型化，高信頼
度が要求される小型・薄型でかつ高電圧を発生する圧電
トランスの作製方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric transformer capable of operating with various high-voltage generating power supply circuits, and more particularly, to a compact and thin piezoelectric transformer that is required to be compact and highly reliable and to generate a high voltage. It relates to a manufacturing method.
【０００２】[0002]
【従来の技術】従来、テレビジョンの偏向装置や複写機
の帯電装置など高電圧を必要とする装置内の電源回路で
は高電圧発生用の変圧素子として巻線型の電磁トランス
が用いられてきた。この電磁トランスは磁性体のコアに
導線を巻き付ける構造になっており、高い変性比を実現
するためには巻き付ける導線の数を多くする必要があ
る。そのため、小型・薄型の電磁トランスを実現するの
は非常に困難であった。2. Description of the Related Art Conventionally, a winding type electromagnetic transformer has been used as a transformer element for generating a high voltage in a power supply circuit in a device requiring a high voltage such as a deflecting device of a television or a charging device of a copying machine. This electromagnetic transformer has a structure in which conductive wires are wound around a magnetic core, and it is necessary to increase the number of wound conductive wires in order to realize a high modification ratio. Therefore, it was very difficult to realize a small and thin electromagnetic transformer.
【０００３】これに対し、圧電効果を用いた圧電トラン
スが提案されている。図４に従来の代表的な圧電トラン
スであるローゼン型圧電トランスの構造を示す。このロ
ーゼン型圧電トランスでは、表面に電極が設けられた長
方形状の圧電板において、４１で示す部分は圧電トラン
スの低インピーダンスの駆動部であり、その上下面に電
極４３，４４が設けられており、この部分は図中矢印４
９で示すように厚み方向に分極されている。また、同様
に４２で示す部分は高インピーダンスの発電部分であ
り、その端面に電極４５が設けられており、発電部４２
は図中矢印５０で示すように圧電板の長さ方向に分極さ
れている。On the other hand, a piezoelectric transformer using the piezoelectric effect has been proposed. FIG. 4 shows a structure of a conventional Rosen type piezoelectric transformer, which is a typical piezoelectric transformer. In this Rosen type piezoelectric transformer, in a rectangular piezoelectric plate having electrodes provided on its surface, a portion indicated by 41 is a low impedance driving section of the piezoelectric transformer, and electrodes 43 and 44 are provided on the upper and lower surfaces thereof. , This part is arrow 4 in the figure
It is polarized in the thickness direction as shown by 9. Similarly, a portion indicated by 42 is a high-impedance power generation portion, and an electrode 45 is provided on the end face thereof, and the power generation portion 42
Is polarized in the length direction of the piezoelectric plate as indicated by arrow 50 in the figure.
【０００４】この圧電トランスの動作は以下の通りであ
る。外部端子４６，４７から駆動電極４３，４４に電圧
が印加されると、駆動部４１では分極方向に電界が加わ
り分極とは垂直方向に変位する圧電効果（以後、圧電横
効果３１モードと略す）で長さ方向の縦振動が励振さ
れ、トランス全体が振動する。さらに発電部４２では、
分極方向に機械的歪が生じ分極方向に電位差が発生する
圧電効果（以後、圧電縦効果３３モードと略す）によ
り、出力電極４５から外部端子４８に入力電圧と同じ周
波数の電圧が取り出される。このとき、駆動周波数を圧
電トランスの共振周波数と等しくすれば非常に高い出力
電圧が得られる。The operation of this piezoelectric transformer is as follows. When a voltage is applied from the external terminals 46 and 47 to the drive electrodes 43 and 44, an electric field is applied in the polarization direction in the drive unit 41 and the piezoelectric effect is displaced in the direction perpendicular to the polarization (hereinafter referred to as the piezoelectric lateral effect 31 mode). Causes longitudinal vibration in the longitudinal direction to vibrate the entire transformer. Furthermore, in the power generation unit 42,
A voltage having the same frequency as the input voltage is extracted from the output electrode 45 to the external terminal 48 by the piezoelectric effect (hereinafter abbreviated as the piezoelectric longitudinal effect 33 mode) in which mechanical strain is generated in the polarization direction and a potential difference is generated in the polarization direction. At this time, if the drive frequency is made equal to the resonance frequency of the piezoelectric transformer, a very high output voltage can be obtained.
【０００５】なお、高電圧を入力し、低電圧を出力させ
る場合には、縦効果の高インピーダンス部分４２を入力
側とし、横効果の低インピーダンス部分４１を出力側に
すれば良いことは明らかである。When a high voltage is input and a low voltage is output, it is clear that the vertical effect high impedance portion 42 should be the input side and the horizontal effect low impedance portion 41 should be the output side. is there.
【０００６】この圧電トランスは共振状態で使用され、
一般の電磁トランスに比べて（１）巻線構造が不用でエ
ネルギー密度も高いため小型化・薄型化が図れること、
（２）不燃化が図れること、（３）電磁誘導によるノイ
ズがでないこと、など数多くの長所を有している。This piezoelectric transformer is used in a resonance state,
Compared with general electromagnetic transformers, (1) the winding structure is unnecessary and the energy density is high, so it can be made smaller and thinner.
It has many advantages such as (2) non-combustibility, and (3) no noise due to electromagnetic induction.
【０００７】しかし、従来のローゼン型圧電トランスで
は、発電部の電極が振動の腹に位置するため、外部端子
の接続が振動に悪影響を与えたり信頼性が大きく低下す
る等の短所があった。However, in the conventional Rosen type piezoelectric transformer, since the electrodes of the power generation section are located at the antinode of vibration, there are drawbacks such that the connection of the external terminals adversely affects the vibration and the reliability is greatly lowered.
【０００８】そこで本願の発明者らは、圧電磁器の表面
に櫛形電極を形成した圧電磁器トランスを提案した。Therefore, the inventors of the present application have proposed a piezoelectric ceramic transformer in which a comb-shaped electrode is formed on the surface of the piezoelectric ceramic.
【０００９】圧電磁器トランスの表面に櫛形電極を形成
する従来の方法を、図５を参照して説明する。焼成後の
圧電体として不活性な状態にある長方形状の圧電磁器５
０の表面に対向する櫛形電極５１，５２を形成する。櫛
形電極５１は、電極指５３と、電極指を連結する連結電
極５４とから構成され、櫛形電極５２は、電極指５５
と、電極指を連結する連結電極５６とから構成される。A conventional method of forming a comb-shaped electrode on the surface of a piezoelectric ceramic transformer will be described with reference to FIG. Rectangular piezoelectric ceramic 5 in an inactive state as a piezoelectric body after firing
Comb-shaped electrodes 51 and 52 facing the surface of 0 are formed. The comb-shaped electrode 51 includes an electrode finger 53 and a connecting electrode 54 that connects the electrode fingers, and the comb-shaped electrode 52 has an electrode finger 55.
And a connecting electrode 56 for connecting the electrode fingers.
【００１０】この櫛形電極は、導電性ペーストを印刷，
焼成する方法、あるいはスパッタ法，真空蒸着法等、圧
電磁器を化学的物理的に破壊しない方法でさえあればど
の方法でも形成できる。This comb-shaped electrode is printed with a conductive paste,
Any method can be used as long as it is a method of firing, or a method such as a sputtering method or a vacuum deposition method that does not chemically or physically destroy the piezoelectric ceramic.
【００１１】櫛形電極を形成した後、圧電体として活性
化するために分極処理が行われる（図中の矢印は分極の
方向を示している）。このとき分極しやすいように、キ
ュリー点以下のある程度の高温状態にし、非常に高い直
流電圧Ｖpoleを櫛形電極５１−５２間に印加する。代表
的なＰＺＴ系セラミックスの場合で３〜４ｋＶ／ｍｍ程
度の電界強度が必要である。After the comb-shaped electrodes are formed, polarization treatment is performed to activate them as a piezoelectric body (arrows in the figure indicate polarization directions). At this time, a very high DC voltage V pole is applied between the comb-shaped electrodes 51 and 52 in a high temperature state below a Curie point so as to easily polarize. In the case of typical PZT ceramics, an electric field strength of about 3 to 4 kV / mm is required.
【００１２】[0012]
【発明が解決しようとする課題】上述したように櫛形電
極部の圧電磁器の分極時には非常に高い電界を印加する
必要がある。この電界強度は電極間が絶縁破壊する電界
強度にかなり近い。そのため、対向する２つの電極５
１，５２の間はすべて一定の以上の距離がなければなら
ない。すなわち、電極指５３−５５間の距離ｄ21と同程
度以上に電極指と連結電極の間の距離ｄ22を大きく取ら
なければならない。その結果、電極指５３，５５が交差
している長さｌ2 が小さくなってしまい、圧電体として
有効に作用する長さ方向に分極される領域が小さくなる
という問題がある。As described above, it is necessary to apply a very high electric field when the piezoelectric ceramic of the comb-shaped electrode portion is polarized. This electric field strength is quite close to the electric field strength that causes dielectric breakdown between the electrodes. Therefore, the two opposing electrodes 5
There must be a certain distance or more between 1,52. That is, the distance d 22 between the electrode finger and the connecting electrode must be set larger than the distance d 21 between the electrode fingers 53 and 55. As a result, the length l 2 where the electrode fingers 53 and 55 intersect becomes small, and there is a problem that the region polarized in the length direction that effectively acts as the piezoelectric body becomes small.
【００１３】また、圧電磁器には未分極時に比べ分極時
には電界の方向に伸び、それと垂直な方向には縮む特性
がある。従来の方法で作製した圧電磁器トランスでは、
その長手方向に伸びる領域とそれと垂直に幅方向に伸び
る領域が混在しており、それらの領域の境界付近に大き
な応力が加わり、破壊が生じ易いという問題もある。Further, the piezoelectric ceramic has a characteristic that it expands in the direction of the electric field when it is polarized and contracts in the direction perpendicular to it when it is unpolarized. In the piezoelectric ceramic transformer manufactured by the conventional method,
There is also a problem that a region extending in the longitudinal direction and a region extending in the width direction perpendicular to the region are mixed, and a large stress is applied to the vicinity of the boundary between these regions, so that breakage easily occurs.
【００１４】本発明の目的は、上述の問題を解決し、高
電力・高信頼性を同時に満たすことができる小型・薄型
の、櫛形電極を有する圧電磁器トランスの作製方法を提
供することにある。An object of the present invention is to solve the above-mentioned problems and to provide a method for manufacturing a piezoelectric ceramic transformer having a comb-shaped electrode, which is compact and thin and which can simultaneously satisfy high power and high reliability.
【００１５】[0015]
【課題を解決するための手段】本発明は、主面上に櫛形
電極が配置され、電極指間が交互に逆方向に分極された
構造を有する圧電磁器トランスの作製方法であって、櫛
形電極の寸法以上の長さを有する複数の縞状電極を圧電
磁器の主面上に形成し、各縞状電極間を分極処理した
後、これら縞状の電極を除去し、その後、圧電磁器のキ
ュリー点以下の温度で櫛形電極を形成することを特徴と
する。The present invention is a method of manufacturing a piezoelectric ceramic transformer having a structure in which comb-shaped electrodes are arranged on a main surface and electrode fingers are alternately polarized in opposite directions. After forming a plurality of striped electrodes with a length equal to or greater than the dimension on the main surface of the piezoelectric ceramic, performing a polarization process between each striped electrode, removing these striped electrodes, and then the curie of the piezoelectric ceramic. It is characterized in that the comb-shaped electrode is formed at a temperature below the point.
【００１６】[0016]
【作用】対向する櫛形電極の間には分極用の高い電圧が
印加されることはなく、圧電磁器トランスとして動作す
る時の比較的低い電圧に対して絶縁が保てればよい。そ
のため、電極指と対向する連結電極の間の距離は、電極
指間の距離よりも小さくて構わない。そのため電極指の
交差する距離を大きく取れ、その結果、長さ方向に分極
され有効に機能する圧電磁器の領域を大きく取ることが
できる。A high voltage for polarization is not applied between the opposing comb-shaped electrodes, and insulation may be maintained against a relatively low voltage when operating as a piezoelectric ceramic transformer. Therefore, the distance between the connecting electrodes facing the electrode fingers may be smaller than the distance between the electrode fingers. Therefore, the crossing distance of the electrode fingers can be made large, and as a result, the area of the piezoelectric ceramic which is polarized in the length direction and effectively functions can be made large.
【００１７】[0017]
【実施例】以下、図面を用いて本発明の実施例を説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【００１８】本発明の圧電磁器トランスの作製方法の一
実施例を図１，図２に示す。An embodiment of the method for manufacturing the piezoelectric ceramic transformer of the present invention is shown in FIGS.
【００１９】まず図１に示すように、焼成後の圧電体と
して不活性な長方形状の圧電磁器１０の表面に縞状の電
極１１を配置する。この電極の長さは形成しようとする
櫛形電極全体の長さ以上に設定されている。縞状の電極
１１から電気的に交互に接続した電気端子１２，１３を
取り出し、分極用電圧Ｖpoleを印加する（図中の矢印は
分極の方向を示す）。分極処理終了後は、電気端子１
２，１３および縞状電極１１を除去する。First, as shown in FIG. 1, striped electrodes 11 are arranged on the surface of a rectangular piezoelectric ceramic 10 which is inactive as a piezoelectric body after firing. The length of this electrode is set to be equal to or longer than the entire length of the comb-shaped electrode to be formed. The electrical terminals 12 and 13 electrically connected alternately from the striped electrode 11 are taken out, and the polarization voltage V pole is applied (the arrow in the figure indicates the direction of polarization). After the polarization process, electrical terminal 1
2, 13 and the striped electrode 11 are removed.
【００２０】その後、図２に示すように、対向する櫛形
電極１４，１５をキュリー点以下の低温で形成する。櫛
形電極１４は、電極指１６と、電極指を連結する連結電
極１７とから構成され、櫛形電極１５は、電極指１８
と、電極指を連結する連結電極１９とから構成される。
このとき、櫛形電極１４，１５の電極指１６，１８は元
の縞状電極１１の位置に合わせている。Thereafter, as shown in FIG. 2, the comb electrodes 14 and 15 facing each other are formed at a low temperature below the Curie point. The comb-shaped electrode 14 includes an electrode finger 16 and a connecting electrode 17 that connects the electrode fingers.
And a connecting electrode 19 for connecting the electrode fingers.
At this time, the electrode fingers 16 and 18 of the comb-shaped electrodes 14 and 15 are aligned with the positions of the original striped electrodes 11.
【００２１】このような手順で櫛形電極１４，１５を形
成した場合、対向する櫛形電極の間には分極用の高い電
圧が印加されることはなく、圧電磁器トランスとして動
作する時の比較的低い電圧に対して絶縁が保てればよ
い。そのため、電極指と対向する連結電極の間の距離ｄ
12は、電極指間の距離ｄ11よりも小さくて構わない。そ
のため電極指の交差する距離ｌ1 を大きく取れ、その結
果、長さ方向に分極され有効に機能する圧電磁器の領域
を大きく取ることができる。When the comb-shaped electrodes 14 and 15 are formed by such a procedure, a high voltage for polarization is not applied between the opposed comb-shaped electrodes, which is relatively low when operating as a piezoelectric ceramic transformer. It is only necessary to maintain insulation against voltage. Therefore, the distance d between the electrode finger and the connecting electrode facing each other
12 may be smaller than the distance d 11 between the electrode fingers. Therefore, the distance l 1 where the electrode fingers intersect can be set large, and as a result, the region of the piezoelectric ceramic which is polarized in the length direction and effectively functions can be set large.
【００２２】また、図１，図２から明らかなように、圧
電磁器は全て圧電磁器トランスの長手方向にのみ分極さ
れるため、分極方向が異なる領域が接することが無く、
機械的な破壊の発生を抑えることができる。Further, as is apparent from FIGS. 1 and 2, since the piezoelectric ceramics are all polarized only in the longitudinal direction of the piezoelectric ceramic transformer, regions having different polarization directions do not come into contact with each other.
Occurrence of mechanical damage can be suppressed.
【００２３】次に、具体例を図３を参照して説明する。
本発明に基づく圧電磁器トランスの具体例として、駆動
部２１，発電部２２共に櫛形電極を有する圧電磁器トラ
ンスを作製した。圧電磁器の材料にはＰＺＴ（ＰｂＺｒ
Ｏ3 −ＰｂＴｉＯ3 ）系圧電磁器を用いた。Next, a specific example will be described with reference to FIG.
As a specific example of the piezoelectric ceramic transformer according to the present invention, a piezoelectric ceramic transformer having both the drive unit 21 and the power generation unit 22 having comb-shaped electrodes was manufactured. The material of the piezoelectric ceramic is PZT (PbZr
O 3 -PbTiO 3) system using a piezoelectric ceramic.
【００２４】まず、焼成された圧電磁器ブロックをダイ
アモンドカッターで切断し、＃３０００のＳｉＣ研磨粉
を用いて平行平面研磨することにより、長さ３０ｍｍ，
幅８ｍｍ，厚さ１．０ｍｍの圧電磁器単板２０を用意す
る。圧電磁器単板２０上に縞状のＡｌ電極（図示せず）
を金属マスクを用いた真空蒸着法により形成した。縞状
の電極からは交互に電気端子（図示せず）を取り出し
た。接続には１５０℃で硬化するＡｇペーストを用い
た。First, the fired piezoelectric ceramic block was cut with a diamond cutter, and parallel-plane polished with # 3000 SiC polishing powder to obtain a length of 30 mm,
A piezoelectric ceramic single plate 20 having a width of 8 mm and a thickness of 1.0 mm is prepared. Striped Al electrodes (not shown) on the piezoelectric ceramic single plate 20
Was formed by a vacuum deposition method using a metal mask. Electrical terminals (not shown) were alternately taken out from the striped electrodes. An Ag paste that cures at 150 ° C. was used for connection.
【００２５】その後、駆動部、発電部共に１００℃の絶
縁油中において４ｋＶ／ｍｍの電圧を印加する分極処理
を施した。分極処理の後、Ａｇペーストは有機溶剤で除
去し、Ａｌ電極はＫＯＨ系のエッチング液で除去した。After that, both the drive section and the power generation section were subjected to polarization treatment by applying a voltage of 4 kV / mm in insulating oil at 100 ° C. After the polarization treatment, the Ag paste was removed with an organic solvent, and the Al electrode was removed with a KOH-based etching solution.
【００２６】その後、Ａｕ／Ｔｉ構成の櫛形電極を金属
マスクを用いた真空蒸着法で形成した。図３において、
駆動部２１の櫛形電極を２３，２４で示し、発電部２２
の櫛形電極を２５，２６で示す。真空蒸着の際、圧電磁
器の温度が常にキュリー点以下となるように、基板加熱
は行わなかった。さらに、外部電気端子１２３，１２
４，１２５，１２６を半田により接続した。After that, a comb-shaped electrode having an Au / Ti structure was formed by a vacuum evaporation method using a metal mask. In FIG.
The comb electrodes of the drive unit 21 are indicated by 23 and 24, and the power generation unit 22
The comb-shaped electrodes are indicated by 25 and 26. During vacuum deposition, the substrate was not heated so that the temperature of the piezoelectric ceramic was always below the Curie point. Further, the external electric terminals 123, 12
4,125,126 were connected by solder.
【００２７】以上の作製方法において、縞状電極は除去
可能な導電性材料であればＡｌ以外でも良く、また形成
方法も圧電磁器を侵さない方法であれば、スパッタ法，
焼成法，メッキ法等であっても構わない。さらには除去
方法もエッチング液だけではなく、反応性イオンエッチ
ング（ＲＩＥ）や物理的な研磨も可能である。分極後に
形成する櫛形電極も上記以外の方法で構わないが、圧電
磁器の分極が無くならないようそのキュリー点以下の温
度で形成される必要がある。In the above manufacturing method, the striped electrode may be made of any material other than Al as long as it is a conductive material that can be removed, and the forming method is a sputtering method if it does not attack the piezoelectric ceramic.
A firing method, a plating method or the like may be used. Furthermore, not only the etching solution but also reactive ion etching (RIE) and physical polishing can be used as the removing method. A comb-shaped electrode formed after polarization may be formed by a method other than the above, but it is necessary to form the comb-shaped electrode at a temperature below the Curie point so that polarization of the piezoelectric ceramic does not disappear.
【００２８】このようにして作製した圧電磁器トランス
は、最大出力１．５Ｗが得られ、従来の櫛形電極形成後
に分極処理した外形が同一寸法の圧電磁器トランスの最
大出力１．１Ｗと比較して大きく改良された。The piezoelectric ceramic transformer manufactured in this manner has a maximum output of 1.5 W, which is 1.1 W as compared with the maximum output of a conventional piezoelectric ceramic transformer having the same size as the external shape polarized after the formation of comb electrodes. Greatly improved.
【００２９】また、本発明による作製方法により１００
個の圧電磁器トランスを作製したが、分極時あるいはそ
れ以後の作製プロセス間に機械的破壊が発生した試料は
１個も無かった。Further, according to the manufacturing method of the present invention, 100
Although individual piezoelectric ceramic transformers were produced, none of the samples had mechanical breakdown during polarization or during the production process thereafter.
【００３０】[0030]
【発明の効果】以上詳述した如く、本発明に従った作製
方法による圧電磁器トランスは、高電力・高信頼性の特
性を持ち、従来の作製方法による圧電トランスにはない
長所があり、工業的価値も多大である。As described above in detail, the piezoelectric ceramic transformer manufactured by the manufacturing method according to the present invention has characteristics of high power and high reliability, and has advantages that the piezoelectric transformer manufactured by the conventional manufacturing method does not have. It is also of great value.
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明の作製方法の一実施例を示す図である。FIG. 1 is a diagram showing an example of a manufacturing method of the present invention.
【図２】本発明の作製方法の一実施例を示す図である。FIG. 2 is a diagram showing an embodiment of the manufacturing method of the present invention.
【図３】本発明の作製方法を用いて作製した圧電磁器ト
ランスの平面図である。FIG. 3 is a plan view of a piezoelectric ceramic transformer manufactured by using the manufacturing method of the present invention.
【図４】ローゼン型圧電トランスの斜視図である。FIG. 4 is a perspective view of a Rosen type piezoelectric transformer.
【図５】櫛形電極を有する圧電磁器トランスの従来の作
製方法を示す図である。FIG. 5 is a diagram showing a conventional method for manufacturing a piezoelectric ceramic transformer having a comb-shaped electrode.
１０，２０ 圧電磁器 １１ 縞状電極 １２，１３ 分極用端子 １４，１５，２３，２４，２５，２６ 櫛形電極 １６，１８ 電極指 １７，１９ 連結電極 ２１ 駆動部 ２２ 発電部 10, 20 Piezoelectric ceramic 11 Striped electrode 12, 13 Polarizing terminal 14, 15, 23, 24, 25, 26 Comb-shaped electrode 16, 18 Electrode finger 17, 19 Connecting electrode 21 Drive part 22 Power generation part
Claims (3)
交互に逆方向に分極された構造を有する圧電磁器トラン
スの作製方法であって、 櫛形電極の寸法以上の長さを有する複数の縞状電極を圧
電磁器の主面上に形成し、各縞状電極間を分極処理した
後、これら縞状の電極を除去し、その後、圧電磁器のキ
ュリー点以下の温度で櫛形電極を形成することを特徴と
する圧電磁器トランスの作製方法。1. A method of manufacturing a piezoelectric ceramic transformer having a structure in which a comb-shaped electrode is arranged on a main surface and electrode fingers are alternately polarized in opposite directions, which has a length equal to or larger than a size of the comb-shaped electrode. A plurality of striped electrodes are formed on the main surface of the piezoelectric ceramic, the striped electrodes are polarized, then these striped electrodes are removed, and then the comb-shaped electrodes are formed at a temperature below the Curie point of the piezoelectric ceramic. A method for manufacturing a piezoelectric ceramic transformer, which is characterized by forming the same.
電極指間が交互に逆方向に分極された構造を有する圧電
磁器トランスの作製方法であって、 形成すべき櫛形電極の寸法以上の長さを有する複数の縞
状電極を圧電磁器の主面上に形成し、 縞状電極を交互に接続して２つの電気端子を取り出し、
これら電気端子間に分極用電圧を印加して、各縞状電極
間を分極処理し、 縞状電極を除去し、 縞状電極の位置に電極指を合わせて、圧電磁器のキュリ
ー点以下の温度で対向櫛形電極を形成する、ことを特徴
とする圧電磁器トランスの作製方法。2. A comb-shaped electrode is arranged on the main surface of the piezoelectric ceramic,
A method for manufacturing a piezoelectric ceramic transformer having a structure in which electrode fingers are alternately polarized in opposite directions, wherein a plurality of striped electrodes having a length equal to or larger than a dimension of a comb-shaped electrode to be formed are formed on a main surface of the piezoelectric ceramic. And connecting the striped electrodes alternately to take out the two electrical terminals,
A polarization voltage is applied between these electrical terminals to perform a polarization process between the striped electrodes, remove the striped electrodes, place the electrode fingers on the striped electrodes, and set the temperature below the Curie point of the piezoelectric ceramic. 1. A method for manufacturing a piezoelectric ceramic transformer, characterized in that the opposing comb-shaped electrodes are formed by.
子を接続することを特徴とする請求項２記載の櫛形電極
を有する圧電磁器トランスの作製方法。3. A method of manufacturing a piezoelectric ceramic transformer having a comb-shaped electrode according to claim 2, wherein external electric terminals are connected to the respective comb-shaped electrodes facing each other.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17441694A JP2727969B2 (en) | 1994-07-26 | 1994-07-26 | Method of manufacturing piezoelectric ceramic transformer having comb-shaped electrode |
| US08/348,925 US5576590A (en) | 1994-07-26 | 1994-11-25 | Piezoelectric ceramic transformer |
| EP94118587A EP0694978B1 (en) | 1994-07-26 | 1994-11-25 | Piezoelectric ceramic transformer |
| DE69412247T DE69412247T2 (en) | 1994-07-26 | 1994-11-25 | Piezoelectric transformer |
| US08/665,913 US5806159A (en) | 1994-07-26 | 1996-06-19 | Piezoelectric ceramic transformer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17441694A JP2727969B2 (en) | 1994-07-26 | 1994-07-26 | Method of manufacturing piezoelectric ceramic transformer having comb-shaped electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0847093A true JPH0847093A (en) | 1996-02-16 |
| JP2727969B2 JP2727969B2 (en) | 1998-03-18 |
Family
ID=15978176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17441694A Expired - Lifetime JP2727969B2 (en) | 1994-07-26 | 1994-07-26 | Method of manufacturing piezoelectric ceramic transformer having comb-shaped electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2727969B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101010738B1 (en) * | 2008-12-29 | 2011-01-25 | 전자부품연구원 | Piezoelectric speaker |
| JP2020064977A (en) * | 2018-10-17 | 2020-04-23 | キヤノン株式会社 | Piezoelectric transformer and electronic apparatus |
-
1994
- 1994-07-26 JP JP17441694A patent/JP2727969B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101010738B1 (en) * | 2008-12-29 | 2011-01-25 | 전자부품연구원 | Piezoelectric speaker |
| JP2020064977A (en) * | 2018-10-17 | 2020-04-23 | キヤノン株式会社 | Piezoelectric transformer and electronic apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2727969B2 (en) | 1998-03-18 |
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