JPH0846007A - Heating apparatus - Google Patents

Abstract

PURPOSE:To provide a board heating apparatus in which a forced-feed mechanism by which a boad is pushed and transferred between conveyer parts in a heating chamber can be constructed into a compact structure and which facilitates the quick and secure detection of a trouble during the transfer. CONSTITUTION:A forced-feeder 45 which is provided in the upper part of the inside of a heating chamber 1 so as to displaced freely in a forced-feed direction, a slider 32 which pulls the forced-feeder 45 with a first wire 41 and moves between conveyers 2 and 3 and conveyers 4 and 5 behind them reciprocally are provided and, further, a sensor which detects the displacement of the force-feeder 45 caused by an abnormal load when a board 6 is transferred from the conveyers 2 and 3 to the conveyers 4 and 5 by the forced-feeder 45 is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating device such as a curing furnace for curing a bond by heating a substrate to which a chip is bonded by a bond or a reflow furnace for soldering an electronic component on the substrate. is there.

[0002]

2. Description of the Related Art A substrate on which chips are bonded by a bond is sent to a curing oven, and the bond is heated and cured. Hereinafter, a curing furnace will be described as an example of a conventional heating device.

FIG. 6 is a perspective view showing the main structure of a conventional curing furnace. Reference numeral 1 denotes a heating chamber, in which four transfer conveyors 2, 3, 4, 5 are arranged. These transfer conveyors 2, 3, 4, 5 are belt conveyors, and racks 9 for supporting the substrates 6 are provided in a protruding manner with a pitch. Incidentally, the drive system of these conveyors 2 to 5 such as a motor is omitted. The transport conveyor 2 and the transport conveyor 3 are arranged side by side, and the substrate 6 is placed on the rack 9 between them to transport the substrate 6 from the lower part to the upper part. That is, the two transfer conveyors 2 and 3 form a first transfer conveyor section. In addition, conveyors 4, 5
Are arranged side by side in the back of the conveyors 2 and 3, and the substrate 6 is placed on the rack 9 between them and the substrate 6 is conveyed from the upper part to the lower part. That is, the two conveyors 4 and 5 form a second conveyor section.

The substrate 6 to which the chip 7 is bonded by the bond 8 is transferred from the outside of the heating chamber 1 to the conveyors 2 and 3.
Is fed onto the rack 9 below (see arrow N1), and is transported from the bottom to the top by these transport conveyors 2 and 3. The substrate 6 that has reached the uppermost portion of the transport conveyors 2 and 3 is pushed in the direction of the arrow N by the pusher 17 and is fed onto the rack 9 between the transport conveyors 4 and 5, and is conveyed by the transport conveyors 4 and 5. After being conveyed from the upper part to the lower part, it is carried out of the heating chamber 1 (see arrow N2). A heater (not shown) is provided inside the heating chamber 1, and the substrate 6 is heated while being transported in the heating chamber 1 as described above, so that the bond 8 is cured.

Next, a pushing mechanism for pushing the substrate 6 in the direction of arrow N will be described. At the upper part of the heating chamber 1, a long horizontal guide rod 11 is arranged so as to penetrate through the heating chamber 1. The guide rod 11 is slidably attached by blocks 12 and 13. A rod 14 and a slider 15 are attached to the outside of the heating chamber 1 by a fixture not shown. This rod 14 and slider 15
Is a rodless cylinder, and the slider 15 is a rod 1
Slide along 4 The slider 15 is connected to the rear portion of the guide rod 11 protruding from the heating chamber.

Below the guide rod 11, a shaft 16 is fixed to a fitting 22 which is slidable on the guide rod 11. A pusher 17 is attached to the front portion of the shaft 16 and a dog 18 is attached to the rear portion thereof.
An optical sensor 20 for detecting the dog 18 is attached to a holder 19 that holds the rear portion of the shaft 16.
The holder 19 is fixed to the lower part of the slider 15. A spring 21 is attached to the shaft 16 between the holding body 19 and the fixture 22, and the spring force causes the shaft 16 to move.
Is rapped in its longitudinal direction.

Therefore, when the slider 15 of the rodless cylinder slides to the right, the guide rod 11, shaft 16 and pusher 17 also move to the right. This allows
The pusher 17 pushes the substrate 6 on the conveyors 2 and 3 onto the conveyors 4 and 5. Here, if the substrate 6 is caught by something during the pushing, a large abnormal load is applied to the pushing element 17, and due to this abnormal load, the shaft 16 relatively retracts because it does not compress the spring 21. Therefore, the dog 18 integrated with the shaft 16 escapes from the sensor 20 (see the dog 18 shown by the chain line), and the sensor 20 detects this. Therefore, the detection signal of the sensor 20 alerts the operator that an abnormal situation has occurred by, for example, sounding a buzzer.

[0008]

As described above, the conventional curing furnace detects a trouble at the time of pushing by detecting the abnormal load applied to the pushing element 17, but the conventional pushing mechanism has a problem. There were the following problems. That is, since the long guide rod 11 is horizontally arranged above the heating chamber 1, and the guide rod 11 largely projects from the heating chamber 1, a large installation space is required in the longitudinal direction of the guide rod 11. There was a problem. Further, when the substrate 6 is large, the pushing stroke by the pushing element 17 must be lengthened, and in order to lengthen the pushing stroke, it is necessary to lengthen the shaft 16, but if the shaft 16 becomes large and heavy. Since the shaft 16 cannot move with a small load, it becomes difficult to detect an abnormal load acting on the pusher 17 with the dog 18 and the sensor 20 with high sensitivity, and it is impossible to detect a trouble at the time of pushing quickly and reliably. There was a problem.

Therefore, it is a first object of the present invention to provide a heating device which can save space. A second object of the present invention is to provide a heating device that can detect troubles during pushing quickly and reliably.

[0010]

To this end, the present invention is directed to a heating chamber, a guide portion disposed inside the heating chamber for guiding a substrate to be pushed by a pusher, and the pusher in the substrate pushing direction. A reciprocating member which holds the heater displaceably and can reciprocate in the heating chamber along the guide portion, a reciprocating member for reciprocating the reciprocating member by pulling the reciprocating member with a towing string, and a pusher in the pushing direction of the substrate. An urging body for urging, a transmission means for transmitting the displacement of the pusher element to the outside of the heating chamber, and a detection means for detecting the displacement outside the heating chamber are provided.

[0011]

According to the above construction, the towed string is stretched along the heating chamber so that the whole can be made compact and compact. In addition, an abnormal load acting on the pusher can be detected with high sensitivity, speed and reliability.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a heating apparatus according to an embodiment of the present invention will be described with reference to the drawings, taking a curing furnace as an example. 1 is a perspective view of a curing furnace according to an embodiment of the present invention, FIG. 2 is a sectional view of the same,
3, 4, and 5 are partial side views of the same. In each drawing, the configuration other than the board pushing mechanism is the same as that of the above-mentioned conventional example, and therefore, the same parts as those of the above-mentioned conventional example are denoted by the same reference numerals and the description thereof is omitted. In FIG. 2, 25 is an inlet for loading the substrate 6 into the heating chamber 1, and 26 is an outlet for transporting the substrate 6 outside the heating chamber 1. See also FIG.
Is a transport conveyor 2 or 3 as a first transport conveyor section.
The substrate 6 placed on the rack (guide portion) 9 is being conveyed from the lower part to the upper part. Note that well-known mechanisms such as a mechanism for loading the substrate 6 into the heating chamber 1 through the inlet 25 and a mechanism for unloading the substrate 6 through the outlet 26 are omitted.

Next, a pushing mechanism for pushing the substrate 6 from the first transport conveyor section (transport conveyors 2, 3) to the second transport conveyor section (transport conveyors 4, 5) will be described.
1 and 2, a guide rail 31 and a slider 32 that slides on the guide rail 31 by a magnetic force are provided on the upper surface of the heating chamber 1. The guide rail 31 and the slider 32 form a rodless cylinder. A frame 33 is installed on the slider 32.
In FIG. 4, an optical sensor (displacement detecting means) 34 and a dog 35 are provided inside the frame 33. The dog 35 is fixed to the inner surface on the left side of the frame 33.
The sensor 34 is elastically supported by a spring member (biasing body) 36 so as to be able to move forward and backward in the lateral direction.

In FIGS. 1 and 2, pulleys 37, 38, 39, 40 are arranged above the heating chamber 1.
These pulleys 37-40 have two
A first wire 41 of the book is stretched. In addition to the wire, a chain or a belt may be used as the tow string. In FIG. 1, a mover (reciprocating member) 42 is provided in the upper part inside the heating chamber 1. The mover 42 is slidably held by two horizontal guide rods 43. One ends of the two first wires 41 are attached to the mover 42, and the other ends are connected to the frame 33.
Attached to each. In FIGS. 1 and 5, a plate 49 is attached to the side surface of the moving element 42. A lever-shaped pusher 45 is rotatably attached to the plate 49 by a pin 46. The plate 49 and the pusher element 45 are connected by a spring 47. The spring force of the spring 47 causes the pusher element 45 to move to the plate 4
It is pressed against a pin-shaped stopper 48 projecting from the plate 9.

In FIG. 1 and FIG. 2, 50 is a second wire (transmitting means), one end of which is attached to the pusher 45. This second wire 50 is the heating chamber 1
It is attached to the sensor 34 by rotating around pulleys 51 and 52 provided on the side of the sensor (see also FIG. 4). Therefore, when the pusher 45 is displaced, this displacement is caused by the second wire 50.
Is transmitted to the outside of the heating chamber 1.

The curing furnace is constructed as described above, and the overall operation will be described below. In FIG. 1, an arrow N
The substrate 6 carried onto the rack 9 between the conveyors 2 and 3 as indicated by 1 is conveyed from the lower part to the upper part (see arrow N3 in FIG. 2). The substrate 6 transported to the top of the transport conveyors 2 and 3 has the transport conveyors 4 and
It is pushed onto the rack 9 between 5 (see arrow N4 in FIG. 2).

This pushing is performed as follows. That is, in FIG. 2, the slider 32 forming the rodless cylinder slides leftward on the guide rail 31. Then, the first wire 41 rotates in the direction of the arrow N5, whereby the mover 42 (FIG. 1) moves to the right. Then pusher 4
5 moves to the right (N4 direction) integrally with the mover 42,
At its lower end, the substrate 6 is pushed from the conveyors 2, 3 to the conveyors 4, 5. Rack 9 of conveyors 4 and 5
The substrate 6 pushed upward is transported from the upper portion to the lower portion by the rotation of the transport conveyors 4 and 5 (see arrow N6 in FIG. 2). When it reaches the bottom of the conveyors 4, 5,
It is carried out of the heating chamber 1 through the outlet 26 (see arrow N2 in FIG. 2). The pusher 45 that has pushed the substrate 6 onto the conveyors 4 and 5 returns to the original position shown in FIG. 2 when the slider 32 slides to the right.

Next, the operation when trouble occurs during pushing will be described. As described above, when the pusher 45 pushes the substrate 6, the substrate 6 may be caught by the belt portions of the conveyors 2 to 5, and a large abnormal load may act on the pusher 45. In this case, as indicated by the chain line in FIG. 5, the pusher 45 is displaced by rotating clockwise around the pin 46 while extending the spring 47 due to this abnormal load. Then, the second wire 50 has an arrow N7.
Pulled in the direction, the sensor 34 shown in FIG. 4 moves to the right while compressing the spring member 36, escapes from the dog 35, and detects this. Therefore, the output signal of the sensor 34 alerts the operator that an abnormal state has occurred by, for example, sounding a buzzer (not shown), or stops the operation of the apparatus.
Therefore, the worker takes countermeasures against this abnormal state.
As described above, according to the present device, the occurrence of a trouble at the time of pushing can be detected swiftly and surely, and therefore, the after-action can be swiftly performed.

The present invention is not limited to the above embodiment, and for example, the dog 35 may be attached to the second wire 50 and the sensor 34 may be fixed to the frame 33 side. Further, the displacement detecting means may be one that can detect this displacement by a method or principle different from that of the optical sensor 34. Furthermore, the present invention can be applied not only to the curing furnace but also to a reflow device for soldering electronic components to a board.

[0020]

As described above, according to the present invention, a trouble in pushing a substrate from a first transport conveyor section to a second transport conveyor section by a pusher can be detected quickly and reliably with high sensitivity. be able to. In addition, by stretching a tow string such as a wire along the heating chamber, the whole can be made compact and space can be saved.

[Brief description of drawings]

FIG. 1 is a perspective view of a curing furnace according to an embodiment of the present invention.

FIG. 2 is a sectional view of a curing furnace according to an embodiment of the present invention.

FIG. 3 is a partial side view of a curing furnace according to an embodiment of the present invention.

FIG. 4 is a partial side view of a curing furnace according to an embodiment of the present invention.

FIG. 5 is a partial side view of the curing furnace according to the embodiment of the present invention.

FIG. 6 is a perspective view showing a main configuration of a conventional curing furnace.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 heating chamber 2,3 transfer conveyor (1st transfer conveyor part) 4,5 transfer conveyor (2nd transfer conveyor part) 6 board 7 chip 8 bond 31 guide rail (reciprocating movement means) 32 slider (reciprocating movement) Means) 34 sensor (displacement detecting means) 35 dog (displacement detecting means) 41 first wire 45 pusher 50 second wire

Claims (3)

[Claims] 1. A heating chamber, a guide portion disposed inside the heating chamber for guiding a substrate to be pushed by a pusher, and the pusher held so as to be displaceable in the pushing direction of the substrate. A reciprocating member capable of reciprocating along the guide portion, a reciprocating means for reciprocating the reciprocating member by pulling the reciprocating member with a towing string, and a biasing force for urging the pusher element in the pushing direction side of the substrate. A heating device comprising: a body, a transmission means for transmitting the displacement of the pusher element to the outside of the heating chamber, and a detection means for detecting the displacement outside the heating chamber. 2. The heating device according to claim 1, wherein the transmitting means is a wire. 3. A heating chamber, a first transfer conveyor section for transferring the substrate from the lower part to the upper part in the heating chamber, and the first transfer conveyor section which is arranged in parallel with the substrate from the upper part. A heating device comprising: a second transfer conveyor section that transfers downwardly; and a transfer means that transfers the substrate from the first transfer conveyor section to the second transfer conveyor section. The reciprocating member is attached to the upper part inside the heating chamber so as to be reciprocally movable in the pushing direction, the reciprocating member is disposed on the reciprocating member so as to be displaceable in the pushing direction of the substrate, and the pushing member is And a reciprocating means for reciprocating between the first transfer conveyor section and the second transfer conveyor section by pulling with a tow string, and the pusher moves the substrate from the first transfer conveyor section. The second transport controller A heating device comprising: a transmission unit that transmits a displacement due to an abnormal load to the outside of the heating chamber when the sheet is pushed to the bare portion; and a displacement detection unit that detects the displacement outside the heating chamber.