JPH084102Y2 - 真空装置 - Google Patents

真空装置

Info

Publication number
JPH084102Y2
JPH084102Y2 JP474090U JP474090U JPH084102Y2 JP H084102 Y2 JPH084102 Y2 JP H084102Y2 JP 474090 U JP474090 U JP 474090U JP 474090 U JP474090 U JP 474090U JP H084102 Y2 JPH084102 Y2 JP H084102Y2
Authority
JP
Japan
Prior art keywords
vacuum
vacuum chamber
pressure
valve body
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP474090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0398939U (enrdf_load_stackoverflow
Inventor
新一 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP474090U priority Critical patent/JPH084102Y2/ja
Publication of JPH0398939U publication Critical patent/JPH0398939U/ja
Application granted granted Critical
Publication of JPH084102Y2 publication Critical patent/JPH084102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Taps Or Cocks (AREA)
  • Self-Closing Valves And Venting Or Aerating Valves (AREA)
JP474090U 1990-01-23 1990-01-23 真空装置 Expired - Lifetime JPH084102Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP474090U JPH084102Y2 (ja) 1990-01-23 1990-01-23 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP474090U JPH084102Y2 (ja) 1990-01-23 1990-01-23 真空装置

Publications (2)

Publication Number Publication Date
JPH0398939U JPH0398939U (enrdf_load_stackoverflow) 1991-10-15
JPH084102Y2 true JPH084102Y2 (ja) 1996-02-07

Family

ID=31508474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP474090U Expired - Lifetime JPH084102Y2 (ja) 1990-01-23 1990-01-23 真空装置

Country Status (1)

Country Link
JP (1) JPH084102Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0398939U (enrdf_load_stackoverflow) 1991-10-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term