JPH0839030A - Light irradiation apparatus - Google Patents

Abstract

PURPOSE:To miniaturize an irradiation apparatus and to accomplish operations such as washing and surface modification by constituting the apparatus by pivoting it on the light transmitting plate and the reflective plate of a housing in a thing in which the washing, surface modification, etc., of a work are intended by a method in which the work is irradiated with light containing ultraviolet rays from a discharge lamp. CONSTITUTION:An irradiation apparatus 1 is installed between works W which are arranged in the openings 2a, 2b of a housing 2. When the treatment work of the works is conducted outside a clean room, light transmitting plates 7, 7 are turned and moved to the positions (chain line positions) adjacent to reflective plates 8, 8. A discharge lamp is switched on, and after temperature being increased by the lamp 3 with air cooling gas ejected from a spray nozzle 6, the works W are heated by being sprayed with the gas through a reflective mirror 4 and the reflective plate 8. Air-cooling notches 5, 5 are formed so that the flows of air-cooling gas the temperature of which is increased by the lamp 3 collide to make the temperature uniform, accelerating the light irradiation and heating treatment of the works W.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention irradiates a work with light including ultraviolet rays from a discharge lamp and utilizes heat generated when the discharge lamp emits light to clean the work or modify the surface of the work. The present invention also relates to a light irradiation device that is excellent in removing residues attached to the surface of a work, and particularly to a light irradiation device that can be used appropriately even in a clean room.

[0002]

2. Description of the Related Art Generally, a work is cleaned by irradiating it with ultraviolet rays. In this cleaning work, after heating the work by the heating means, light irradiation is performed, and the organic dirt adhering to the work surface is cleaned by using ozone generated when the ultraviolet rays of a specific wavelength decompose and regenerate oxygen. It is configured to do. Further, when the ultraviolet irradiation is performed, the discharge lamp may generate heat and may be damaged. Therefore, the discharge lamp is cooled by air cooling gas, and the air cooling gas which has taken heat by the ventilation means is discharged to the outside of the apparatus.

Further, as another work for cleaning a work, there is a metal foil which requires printing on the surface. In many cases, oil and fat are attached to the surface of this work, and after performing wet cleaning with a cleaning material, it is heated and dried by a heating means.

Further, as a work processing operation, there is an operation of printing on the surface of resin such as plastic. In the case of this resin, especially when the molecules are lined up in order, such as polypropylene, it is necessary to modify the surface of the resin so that it can be printed, and this surface modification work involves rubbing the surface with a gas burner. Further, the surface of the printing position is treated by corona discharge, or a liquid such as hydrofluoric acid is applied to make the surface of the resin rough so that printing can be performed.

On the other hand, as another work processing work, there is a work for removing a residue of a metal mold having irregularities. When a metal mold is used for molding plastic or the like a predetermined number of times, a residue remains in the mold. Therefore, the object to be molded cannot be properly formed, and the operator removes the residue with a brush suitable for the material of the mold. Further, the manufacturing type of the resin lens of the eyeglasses is formed of a glass mold, and when removing the residue of this glass mold, the positioned glass mold is removed and heated in a heating furnace for a predetermined time to remove the residue. It is being removed.

[0006]

However, the following problems have been encountered in the above-mentioned cleaning work, surface modification work, and residue removal work. Since the heating chamber and the ultraviolet irradiation chamber are separately arranged in the ultraviolet cleaning device, the power source is increased, maintenance is complicated, and the device becomes large. Further, although the cleaning effect is enhanced by the generation of ozone gas, the ozone gas corrodes the metal, so that the material of the work is limited.

On the other hand, when irradiating with ultraviolet rays, the cooling gas for cooling the discharge lamp is discarded in a state where the heat of the discharge lamp is taken away, and energy is wasted. In addition, when new heating means is used as described above, new energy is used. Therefore, there has been a demand for the development of an apparatus that can be used while saving energy and has a high processing capacity.

[0008] A metal foil that requires printing may retain oils and fats by wet cleaning. Further, since the wet cleaning requires a drying means and requires an installation space, the size of the apparatus is increased. Further, in the surface modification work of the resin, when the surface modification is performed by performing gas burner, corona discharge, chemical solution coating, or the like, unevenness occurs on the surface of the resin,
The desired color could not be printed because the hue changed. Further, since the operator manually removes the residues of the molding die, the manufacturing work could not be performed for a long time. Further, if the upper and lower molds that have been installed are removed and a cleaning operation is performed, the positioning accuracy of the molds will change, so there has been a demand for a device that can be quickly cleaned without removing the arrangement of the molds.

There is a demand for an apparatus that can be commonly used for the above-described work cleaning work, resin surface modification work, and mold residue removal work, and that can perform each work efficiently and properly. Also, when performing each of the above work,
Depending on the type of the work, it is more efficient to perform the work processing work in the clean room in relation to other work, and an apparatus that can be used without changing the environment of the clean room has been desired. It is important for a device that uses light irradiation to efficiently irradiate light to a work. Also, when the work is arranged on one side and the other, or only on one side, etc. There was a demand for a device suitable for use in setting up the work. Depending on the type of the work, there is a work surface provided with unevenness, and there has been a demand for a device that accurately irradiates light to the uneven position as well as the planar position.

The present invention was devised to solve the above-mentioned problems. It has a simple structure, can effectively use energy, can accurately remove residues, and can perform surface modification work. However, it does not change the color tone of the printing, and can quickly and properly clean the work even in a limited space.In addition, cleaning work, surface modification work, and residue removal work can all be done with one device. A light irradiation device that can efficiently irradiate light, is suitable for installation of workpieces, can be used without changing the environment in a clean room, and can appropriately irradiate workpieces with uneven surfaces The purpose is to provide.

[0011]

In order to solve the above problems, the present invention relates to a housing having openings on one side and the other side, a discharge lamp for irradiating light containing ultraviolet rays, which is provided in the housing, A reflecting mirror that reflects the irradiation light to the both opening side provided in the housing apart from the discharge lamp, an air cooling notch provided in the reflecting mirror along the discharge lamp, and an air cooling notch Air-cooling gas spraying means provided along the air-cooling gas supply means provided at a predetermined position of the housing, and discharge means for discharging the air-cooling gas sprayed from the air-cooling gas spraying means toward the discharge lamp to the outside of the housing. The housing is provided with light-transmitting plates of one and the other for opening and closing the openings at both openings of the housing, and one and the other of the light-transmitting plates are in contact with and separated from the light-transmitting plates. Provide a reflector The light-transmitting plate provided in the opening has its base end axially attached along the opening, and at one moving end, one side of the light-transmitting plate is in contact with the periphery of the opening and the facing transparent face is formed. The side end portions of the light plates are in contact with each other, and the reflection plates are provided in left and right pairs in the upper and lower openings, respectively, and the base end portions of the respective reflection plates are axially attached to form a light irradiation device.

Further, the discharge lamp has a structure in which a plurality of the discharge lamps are provided with their axes parallel to each other and are spaced apart from each other, and the irradiation light from the discharge lamp is reflected between the discharge lamps toward one opening side and the other opening side of the housing. A configuration may be adopted in which a reflecting mirror is provided, an air-cooling cutout is provided in the reflecting mirror along the discharge lamp, and an air-cooling gas spraying means is provided along the air-cooling cutout.

Further, the reflecting mirror is formed in a concave shape and is provided at a rear portion of the discharge lamp. Rotating shafts are provided at both ends of the reflecting mirror, and a rotating mechanism is provided on the rotating shaft. The air cooling notch may be provided along the discharge lamp, and the air cooling gas blowing means may be provided along the air cooling notch.

A first reflecting mirror is provided at the rear of the discharge lamp, an air cooling notch is formed at a predetermined position of the first reflecting mirror, and an air cooling gas blowing means is provided behind the reflecting mirror.
A second reflecting mirror may be provided in the light irradiation direction of the discharge lamp to reflect the light from the discharge lamp to one opening side and the other opening side of the housing.

The light irradiating device having the first and second reflecting mirrors uses an electrodeless discharge tube, and is provided with microwave oscillating means for oscillating a specific microwave behind the first reflecting mirrors. A microwave outflow preventing unit may be provided between the discharge lamp and the second reflecting mirror.

Further, the air-cooling gas blowing means may be provided at the rear of the supporting portion for supporting both ends of the discharge lamp, at least on one side of the supporting portion, or the left and right blower pipes covering both ends of the discharging lamp. The air cooling notch may be provided at the discharge lamp supporting position of these air cooling tubes.

The air-cooling notches are provided at positions facing each other, one and the other air-cooling notches are provided with air-cooling gas blowing means, and air-cooling gas is blown from the air-cooling gas blowing means to the discharge lamp. I don't mind.

Further, the works are arranged on the opening side of the one and the other, the temperature detecting means is provided at a predetermined position on at least one side of the works, the signal from the temperature detecting means is processed, and the discharge lamp is processed. It is convenient to provide a control means for controlling at least one of the air cooling gas spraying means and maintaining the temperature of the temperature detecting means at a temperature not higher than the material alteration temperature of the work due to heat.

[0019]

Since the present invention is constructed as described above, it has the following operations. The light emitted from the discharge lamp irradiates the surface of the work and gives light energy to the foreign matter attached to the surface of the work. At the same time, the cooling gas that cools the discharge lamp is blown onto the work in a state where the irradiation heat of the discharge lamp is taken away and heats the work surface. At this time, the discharging means provided in the housing has stopped operating.

On the other hand, the light-transmitting plates axially attached to both openings of the housing move to the position where the openings are closed, and when the apparatus is operated in that state, the air-cooled gas blown to the discharge lamp becomes
Then, it is sprayed on the transparent plate, circulates in the housing, and is discharged from the discharge port. The translucent plate is heated by the air-cooled gas that has deprived heat, and the heated translucent plate radiates radiant heat, and heats the workpiece installed near the translucent plate. Further, the light emitted from the discharge lamp is emitted to the work from a predetermined angle by the reflection plate axially attached along the opening.

When a plurality of discharge lamps are installed (including being installed side by side in the direction parallel to the axis on the coaxial line), it is possible to extend the ultraviolet irradiation device according to the size of the work. Further, when the discharge lamps are installed above and below, the light irradiation of the discharge lamps is dedicated to each work.

In the reflecting mirror, since the rotating mechanism rotates the rotating shafts provided at both ends of the reflecting mirror, light is emitted from one opening of the housing to process one work, and then the rotating mechanism is rotated. By actuating and reversing the reflecting mirror, light from the discharge lamp can be emitted from the other opening of the housing, and the other work can be illuminated. The direct light of the discharge lamp and the reflected light from the first reflecting mirror are irradiated in the horizontal direction, and the second reflecting mirror irradiates the irradiating light on the opening side of one side and the other side of the housing in the direction orthogonal to this irradiating light. reflect. Therefore, an installation space can be secured behind the discharge lamp, and devices such as microwave oscillating means can be installed. Therefore, the discharge lamp can also be used as an electrodeless discharge tube.

The cooling gas that has deprived the heat of the discharge lamp heats the surface of the work directly or through the transparent plate. At this time, a temperature detecting means is installed on the work surface side, and the wattage of the discharge lamp and the air-cooled gas are controlled so that the work is not overheated to the material alteration temperature or higher depending on the type of the work. The flow rate is controlled via the control mechanism.

In the above cases, or, in the case where the light-transmitting plate provided in the opening of the housing is opened, the air-cooled gas deprived of the heat of the discharge lamp is directly blown onto the work to blow the work. To heat. Further, in the state where the transparent plate moves to block the opening of the housing, the air-cooled gas that has deprived heat heats the transparent plate, and the radiant heat heats the work. Then, the air-cooled gas that has heated the transparent plate is discharged from the discharging means. Further, the light emitted from the discharge lamp is surely emitted to the work from the reflector plate axially mounted along the opening. Also, the air-cooled gas blown to the discharge lamp is
Since the air is blown from the facing direction, after the heat of the discharge lamp is taken away, the air-cooling gas flow blows almost the same amount on the one opening and the other opening.

By providing both ends of the discharge lamp at the rear of the supporting portion with an air-cooling fan, the air-cooling gas cools the discharge lamp along the longitudinal direction of the discharge lamp, and the heat of the discharge lamp is removed. The gas is blown onto the work through one opening and the other opening of the housing, and heats the work. If the translucent plate blocks both openings, heat the translucent plate to cover both ends of the discharge lamp with air-cooling tubes and form an air-cooling notch at the discharge lamp position of the air-cooling tube. By supplying the air-cooled gas from the supply means to the air-cooled tube, the air-cooled gas is blown from both ends of the discharge lamp toward the center of the discharge lamp,
The air-cooled gas that has deprived heat is guided to one opening side and the other opening side of the housing by the flow of the air-cooled gas.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view in which a part showing the inside of the light irradiation device is omitted, and FIG. 2 is a perspective view in which a part of the light irradiation device is omitted. FIG. 9 is a block diagram showing a control mechanism of the light irradiation device. As shown in FIGS. 1 and 2, a light irradiation device 1 includes a box-shaped housing 2 having openings 2a and 2b formed on one side and the other, and a discharge lamp 3 having both ends supported substantially at the center of the housing 2. , The one and the other reflecting mirrors 4a and 4b provided apart from each other along the longitudinal direction of the discharge lamp 3.
(4), an air cooling notch 5 formed along the discharge lamp 3 at an intermediate position of the reflecting mirror 4, an air cooling gas spray nozzle 6 provided along the air cooling notch 5, and a housing 2
It is provided with an air-cooled gas supply means 6b and an air-cooled gas discharge means 9 provided on the side surface. Further, in both openings 2a and 2b of the housing 2, translucent plates 7 and 7 and reflectors 8 and 8 are axially mounted on their respective bases.

As shown in FIG. 1, the upper and lower reflecting mirrors 4 are provided.
a and 4b are formed along the discharge lamp 3, and the discharge lamp 3 serves as a boundary to form a pair of left and right upper reflecting mirrors 4a and lower reflecting mirrors 4b. The upper and lower reflecting mirrors 4a and 4b each have a parabolic cross section. Is formed so as to be a part of. The left and right sides of the upper and lower reflecting mirrors 4a and 4b are respectively attached to the rear plates 4c and 4b.
It is continuously formed in a box shape via c. The upper and lower reflecting mirrors 4a and 4b (4c) formed in a box shape are supported by supporting legs or inner walls of the left and right housings via a support tool so that the distances from the upper and lower sides of the housing 2 are equal. There is.

At the boundary between the upper and lower reflecting mirrors 4a and 4b, air cooling notches 5 and 5 are formed in a groove shape along the longitudinal direction of the discharge lamp 3. And this air-cooling notch 5,
Air-cooled gas spray nozzles 6, 6 are arranged inside the unit 5. The spray nozzle 6 is provided with spray holes 6a at predetermined positions at appropriate intervals, and is connected to the supply hose 6c of the air-cooled gas supply means 6b. An air-cooled gas discharge means 9 is provided at a predetermined position (side wall in the drawing) of the housing 2. The discharging means 9 is provided with an opening 9a provided on the side wall of the housing 2, a discharging valve 9b provided at the opening 9a, and a discharging hose 9 connected to the discharging valve 9b.
c, an exhaust pump provided at the other end of the connection hose 9c, and the like.

As shown in FIGS. 1 and 2, one opening 2a and the other opening 2b of the housing 2 have openings 2a and 2b, respectively.
The light-transmitting plates 7 and 7 and the reflecting plates 8 and 8 are arranged along a and 2b.
The openings 2a and 2b are attached by shafts so that the openings 2a and 2b can be opened and closed freely. The translucent plate 7 (7) has its base portion pivotally attached to the rotating shaft by a hinge or the like at a symmetrical position in the vicinity of the opening 2a (2b). Then, at one of the moving ends of the left and right translucent plates 7a and 7b,
The side edges of the a and 7b closely contact the peripheral edge of the opening 2a (2b), and the side edges of the left and right translucent plates 7a and 7b contact each other to make the opening 2a (2b) almost airtight. It is configured to cover.

The reflectors 8 and 8 are the translucent plates 7 and 7 respectively.
The bases of the left and right reflection plates 8a and 8b are attached to the left and right translucent plates 7a and 7b so as to be adjacent to and separated from each other, while sharing the rotation axis. The left and right reflectors 8a and 8b are formed in symmetrical lengths. Further, as shown in FIG. 2, the left and right translucent plates 7a and 7b and the reflectors 8a and 8b are semi-circular position setting tools 1 provided at both ends of the opening 2a (2b).
It is configured so that it can be fixedly set to a desired angle by setting 0. This position setting tool 10 has a semicircular groove 10 at the center.
a is formed, and fixing screws 7c, 7d,
8c and 8d are movably fitted, and the fixing screws 7c, 7d, 8c and 8d are used for the translucent plates 7a and 7b.
The reflectors 8a and 8b are installed at a desired angle.

Therefore, when the light irradiating device 1 having the above structure is used, the work W is placed at the upper and lower openings 2a and 2b of the housing 2 to support the light irradiating device 1 as shown in FIG. It is installed between the works W supported by a table or the like. When the processing work of the work is performed in a room other than the clean room, the upper and lower translucent plates 7 and 7 are opened and the reflectors 8 and 8 are opened.
To a position (position of an imaginary line) adjacent to, and at that position, the translucent plates 7 and 7 are fixed by the position setting tool 10. Then, the discharge lamp 3 is turned on, and the air-cooling gas is sprayed from the spray nozzle 6. After the heat of the discharge lamp 3 is taken away, the air-cooled gas is guided by the reflecting mirrors 4 and 4 and the reflecting plates 8 and 8 through the upper and lower openings 2a and 2b and blown onto the work W,
Heat the work. Further, by providing the air-cooling cutouts at symmetrical positions, after the heat of the discharge lamp 3 is removed, the air-cooling gases collide with each other and flow from the horizontal direction to the vertical direction (vertical direction to horizontal direction). Therefore, the work is irradiated with light and is heated, so that the processing work is quickly performed. By providing the reflectors 8 and 8, the light emitted from the discharge lamp 3 is reflected by the reflectors 8 and 8 and irradiates the work W from a predetermined angle. Therefore, the light emitted from the discharge lamp 3 is irradiated with the direct light from the discharge lamp 3 and the reflected light at a predetermined angle reflected from the reflectors 8 and 8, so that the work W is uneven. Even if it is done, light can be irradiated to all corners without shading, and the distribution property of light irradiation is excellent.

Further, when the processing work of the work is carried out in the clean room, it is necessary to avoid blowing the air-cooling gas onto the work because it is necessary to carry out without changing the environment in the clean room. Therefore, the transparent plate 7,
The upper and lower openings 2a and 2b of the housing 2 are closed by 7 (state shown by the solid line in FIG. 1), and a processing operation is performed.

Therefore, the air-cooled gas sprayed from the spray nozzle 6 is sprayed onto the upper and lower translucent plates 7, 7 in a state where the air-cooled gas is sprayed onto the discharge lamp 3 to remove heat as shown by the arrow in FIG. Then, as indicated by the arrow, the flow flows to the back plate 4c of the reflecting mirror 4, and thereafter, the gas is discharged from the discharge hole 9a to the outside of the apparatus (outside the clean room) via the discharge hose 9c. At this time, the air-cooled gas that has taken away the heat of the discharge lamp 3 heats the upper and lower translucent plates 7 and 7, so that the upper and lower translucent plates 7 and 7 are
Is configured to heat the work W by releasing radiant heat. There is no problem with the translucent plates 7 and 7 that close the openings 2a and 2b as long as they do not affect the environment in the clean room even if the air-cooled gas flows out from the gap to some extent.

Further, when the work W has only one structure, the opening 2a is covered with one light transmitting plate 7 and the reflecting plate 8 is brought into contact with the light transmitting plate 7. Then, with one opening 2a covered, the other opening 2
The work W is irradiated with light from the discharge lamp 3 from b.

Then, as shown in FIG. 9, it is desirable that at least one of the works W is provided with a temperature sensor S adjacent to the work W. The temperature sensor S
Is preferably on almost the same surface as the light irradiation surface of the work W, and is connected to a control mechanism 73 having a CPU and a memory for controlling the temperature of the work W to be heated. Then, the control mechanism 73 is connected to the inverter power source 70 of the discharge lamp 3 and the air cooling gas supply mechanism 71, and the wattage of the discharge lamp 3 and the air cooling gas supply amount are separated by a signal from the control mechanism 73. Control in relation to or. Based on the temperature information sent from the temperature sensor S, the control mechanism 73 is symmetrical with the material alteration temperature of the workpiece inputted in advance, and the workpiece W of the discharge lamp 2 is controlled so that the workpiece W is below the material alteration temperature. It controls wattage and air-cooled gas flow rate. Although the work W has a different limiting temperature depending on its material, the material alteration temperature referred to here is a temperature at which the mechanical and thermal properties of the material do not change.

The flow rate of the air-cooled gas sprayed from the spray nozzle 6 to the discharge lamp 3 is variable, and specifically, in the case of a compressor, a regulator is used.
The regulator is automatically operated. Further, in the case of the blower, the rotational speed of the drive motor is variable so that the speed of the air-cooled gas can be varied. Further, the variable operation of the wattage of the discharge lamp 3 is performed within the range of 100% to 20% by controlling the inverter power supply. The light irradiating device 1 having the above-described configuration may have a configuration in which a plurality of workpieces W can be accommodated by disposing a plurality of them in the axial direction of the discharge lamp 3.

Next, a second embodiment of the present invention will be described with reference to FIG. As shown in FIG. 3, the light irradiation device 20
Is provided with a housing 12 having openings 12a and 12b formed on one side and the other, and discharge lamps 13 and 13 which are vertically arranged side by side inside the housing 12 so as to be separated from each other.
The light irradiation from 3, 13 causes the openings 12a on one side and the other side,
The concave reflecting mirrors 14a and 14b that reflect the light 12b are provided, respectively. In addition, these reflecting mirrors 14a and 14b
Is a position along the upper and lower discharge lamps 13, 13
An air-cooling gas blower pipe 16 is formed on the back surface side of each of the air-cooling gases 3 and 13. Then, at a predetermined position of the blower pipe 16, a blowing hole 15 is formed as a notch for air cooling by drilling up to the reflecting mirrors 14a and 14b. Further, an air-cooled gas supply unit and an exhaust unit 19 are provided on the side wall of the housing 2.

Both openings 12a of the housing 12 are
12b includes translucent plates 17 (17a, 17b), 17 (1
7a, 17b) are provided with their bases pivoted. Therefore, the translucent plates 17, 17 allow the openings 12a,
12b can be opened and closed. Then, a reflection plate 18 (18
a, 18b) and 18 (18a, 18b) are provided.
The reflection plates 18 and 18 are provided so as to share a rotation axis with the translucent plates 17 and 17. These translucent plate 17 and reflective plate 18 are position setting tools 1 provided at both ends of the opening.
The predetermined angle is set to 0 (see FIG. 2).

Therefore, in the case of processing a work and operating in a clean room, the translucent plate 17,
The work is performed by irradiating light with 17 closing the openings 12a and 12b and blowing the air-cooling gas to the discharge lamp through the air-cooling gas blowing holes 15, 15. When used outside the clean room, the translucent plates 17 and 17 are moved to open the openings 12a and 12b to perform the work. The details of the configuration including the temperature sensor S are the same as those shown in the first embodiment. In addition, the light irradiation device 20 having the above configuration
Is a parabolic cross-section,
It may be an ellipse or an ellipse close to a perfect circle. Further, the blowing nozzle may be provided in the blower pipe 16.

Next, a third embodiment will be described with reference to FIG. As shown in FIG. 4, the light irradiation device 30 includes a housing 22 having openings 22a and 22b on one side and the other side,
Discharge lamps 23, 23 ... Separated in the housing 22 in the left-right direction, reflecting mirrors 24a, 24b .. provided between the discharge lamps, and the reflecting mirrors provided on both end sides of the discharge lamp 23. Cylindrical supports 24, 24 that support 24a, 24b ... And have a reflecting mirror surface, air-cooling gas blowers 26, 26 provided in the support 24, air-cooling gas supply means, and discharge means 29. It has and. The openings 22a, 22b have the openings 22a, 22b.
b along the transparent plate 27 (27a, 27b), 27 (27
a, 27b) The base is pivoted. Therefore, the openings 22a and 22b can be opened and closed by the translucent plates 27 and 27. In addition, the rotating shafts of the light transmitting plates 27, 27 are shared, and the reflecting plates 28 (28a, 28b), 28 (28a, 28).
b) is provided and is configured to come into contact with and separate from the transparent plates 27, 27.

The support 24 is formed in a rectangular tube shape and has openings formed at positions on both ends of the discharge lamp 23. The support body 24 is supported by the support legs in the housing 22 or at both end positions of the housing 22, so that the support body 24 is vertically spaced from the housing 22 at equal intervals. Has been. Further, the air-cooling gas blower pipe 26 has an air-cooling notch 26a,
26a ... Are formed corresponding to the number of discharge lamps 23. A support portion 26b of the discharge lamp 23 is formed on the back side of each air-cooling cutout portion 26a. The blower pipe 26 is
It is connected to the air-cooled gas supply hose (see Fig. 1),
The air-cooling gas is blown along the longitudinal direction of the discharge lamp 23 through the air-cooling notch 26a and the opening of the support 24.

The transparent plate 27 (27a, 27)
b), 27 (27a, 27b) and the reflector 28 (28
a, 28b) and 28 (28a, 28b) are fixed to a predetermined angle by a position setting tool (see FIG. 1). The air-cooled gas that cools the discharge lamps 23, 23 ...
It is sprayed along the longitudinal direction of the discharge lamp 23. Then, the air-cooled gas blown from the left and right collides with each other at substantially the central position of the discharge lamp 23, advances in the vertical direction, and is blown to both openings 22a and 22b of the housing 22. Further, the air-cooling gas may be blown from a direction orthogonal to the discharge lamp 23. That is, each of the reflecting mirrors 24a (24b ...) Is formed as a set of two with a space therebetween, an air-cooling gas spray nozzle is provided between the two reflecting mirrors, and an air-cooling notch is provided at a predetermined position of the reflecting mirrors. A part is formed. Then, the other configuration of the light irradiation device 20 is the same as that of the first embodiment (for example, the configuration in which the temperature sensor is provided in the work W and the control mechanism controls it). The operation of the light irradiation device 20 is the same as that shown in the first embodiment.

Next, a fourth embodiment of the present invention will be described with reference to FIG. As shown in FIG. 5, the light irradiation device 40
Is a housing 32 having one and the other openings 32a and 32b, and the rotation support shafts 31c and 3 are attached to the housing 32.
1c, a reflecting mirror 34 having a parabolic cross section, a discharge lamp 33 provided at a predetermined position of the reflecting mirror 34, an air cooling notch 35 formed on the top side of the reflecting mirror 34, and the air cooling An air-cooling nozzle 36 provided in the cooling notch 35,
A rotation mechanism 31 provided on one side of the rotation support shaft 31c, light transmitting plates 37, 37 capable of opening and closing the both opening portions 32a, 32b, and provided so as to be capable of contacting and separating from the light transmitting plate. And reflectors 38, 38. In addition, the housing 32
An air-cooled gas supply hose 36b and an air-cooled gas discharge means 39 are provided at predetermined positions.

In the reflecting mirror 34, the rotating support shafts 31c and 31c are rotated by the operation of the rotating mechanism 31, so that the reflecting mirror 3 is rotated.
4 is rotated 180 degrees so that the direction of light irradiation from the discharge lamp 33 can be reversed. The rotating mechanism 31 includes a drive motor 31a, a drive belt 31b, pulleys, and the like. The spray nozzle 36 has a spray hole 3
6a are formed at appropriate intervals. Further, an air-cooled gas supply hose 36b is connected to one end of the spray nozzle 36.

In the vicinity of the side wall inside the housing 32,
Air-cooled gas control plates 34c, 34c are attached along the longitudinal direction. An air-cooled gas discharge means 39 is attached to a predetermined position of the housing 32. The discharging means 39 includes a discharging hole 39a, a discharging valve 39b provided in the discharging hole 39a, a discharging hose 39c connected to the discharging valve 39b, and the like. In addition,
The transparent plates 37 (37a, 37b), 37 (37a, 3)
7b) has its base end with respective openings 32a, 32b.
Is installed along the axis of the reflecting plate 38 (3
8a, 38b) and 38 (38a, 38b) share a rotation axis. The translucent plates 37, 37 and the reflective plates 38, 38 are configured to be fixed at a predetermined angle by a position setting tool (see FIGS. 1 and 2). This light irradiation device 4
When the work W is processed by operating 0, it is the same as that shown in the first embodiment except that the reflecting mirror 34 is rotated in the light irradiation direction. Further, the configuration of the other control mechanism is the same as that of the first embodiment.

Next, a fifth embodiment of the present invention will be described with reference to FIGS. 6 and 7. As shown in FIG. 6, the light irradiation device 50 is provided with a housing 42 having openings 42a and 42b on one side and the other side, a discharge lamp 43 provided in the housing 42, and a rear side of the discharge lamp 43. A first reflecting mirror 44 having a parabolic cross section, a microwave oscillating device 42d provided on the rear side of the first reflecting mirror 44, and the discharge lamp 4
No. 3 second reflecting mirror 41 provided in the light irradiation direction and having a V-shaped cross section
A blower fan 46 as a means for supplying air-cooled gas provided on the rear side of the housing 42, a means 49 for discharging air-cooled gas provided on the front side of the housing 42, and the openings 4
Light-transmitting plates 47, 47 that open and close 2a, 42b
And reflective plates 48, 48 provided so as to come into contact with and separate from the translucent plates 47, 47. The transparent plates 47, 47
Is provided with its base end axially attached along the respective openings 42a, 42b, and the reflectors 48, 48,
They share the axis of rotation. The light transmitting plates 47, 47 and the reflecting plates 48, 48 are position setting tools (see FIGS. 1 and 2).
Therefore, it can be fixed at a predetermined angle.

Further, the first reflecting mirror 44 has an air cooling notch 45 formed along the discharge lamp 43.
A conductive mesh (tungsten mesh) is provided between the fourth reflection mirror 4 and the second reflection mirror 41 so that microwaves are not lost to the outside of the device. Then, the discharge lamp 43
When an electrodeless discharge tube is used, a microwave of a specific wavelength is oscillated from a microwave generation part behind the first reflecting mirror, and the microwave is absorbed by the electrodeless discharge tube. , Metal iodide, noble gas, etc.)
It irradiates light. The air-cooled gas supply means 46
Uses a blower fan. The control mechanism and the discharging means 49 have the same configuration as in the above-described first embodiment.

Therefore, as for the light emitted from the discharge lamp 43, the reflected light from the first reflecting mirror and the direct light from the discharge lamp 43 are applied to the second reflecting mirror 41, and one and the other from the second reflecting mirror. The work W is illuminated by being reflected by the openings 42a and 42b. The operation of blowing the heat-deprived air-cooled gas to the workpiece W to heat it or heating the workpiece W using the radiant heat of the translucent plate 47 is the same as in the first embodiment.

FIG. 7 shows an application example of the above-mentioned structured light irradiation device. As a configuration of the light irradiation device 60 configured to perform light irradiation on the work W with a time lag, the second reflecting mirror 51 is formed in a flat plate shape, and the second supporting mirror 51 is provided with a rotation support shaft. A rotation mechanism including a drive motor, a drive belt, and a pulley for rotating the rotation support shaft at least 90 degrees is provided. Therefore, the light emitted from the discharge lamp 43 is reflected by the second reflecting mirror 51 set at a predetermined angle and is emitted to the work W from one opening 42a. And
By rotating the second reflecting mirror 51 in the direction of 90 degrees and turning on the discharge lamp 43, the work W can be irradiated with light from the other opening 42b. The light irradiation device 6 of FIG.
At 0, the air-cooled gas discharge means 59 is installed in the housing 42 substantially at the center side.

The operation of blowing the heat-deprived air-cooled gas to the work W to heat it or to use the radiant heat of the transparent plate 47 to heat the work W is the same as in the first embodiment.

When the work W is in the vertical position,
It is convenient to dispose the temperature sensor S on the upper side in view of the property that heat rises. Although the discharge lamp has an output of 3 kW depending on the wattage, the heat generated by the discharge lamp is instantly increased to 300 ° C. or higher. Therefore, the air-cooled gas that has deprived the emitted heat directly or indirectly heats the surface of the works W installed on one side and the other side. Therefore, the work is 200
It will be heated around C.

In addition, depending on the type of work, the control mechanism has a control mechanism that controls the amount of air-cooled gas sprayed and the wattage of the discharge lamp because the material deterioration temperature is low, such as plastic, depending on the processing work. Is controlled so that the heating temperature of the work is below the material alteration temperature. Of course, when the material alteration temperature of the work is low, it is convenient to use a discharge lamp with a small wattage from the beginning. In the case of plastics, the heat-resistant temperature on the high temperature side of the heat-resistant temperatures at which the plastic can be used in that state is the material alteration temperature.

Further, when the work W is a work which is not desired to be removed from a once set position such as a die, as shown in FIGS. 1 and 2, the light irradiation device 1 is installed between one work W and the other work W. To do. At this time, when the work is set in the vertical position, the light irradiation device 1 is supported on the lower work W side by the support legs. Then, the upper work W is positioned and positioned so that the upper work W is at a predetermined position from the discharge lamp 3.

Further, as the means for cooling the discharge lamp along the axial direction of the discharge lamp, the structure shown in FIG. 8 may be used other than the one using the blower tube shown in FIG. That is, both ends of the discharge lamp 64 are supported by 65, and the blower fan 62 installed behind the supporting member is operated to cool the discharge lamp 64 along the axial direction. As shown by the phantom line, a partition plate 63 may be attached and a plurality of air-cooling cutout holes 66 may be formed in the partition plate 63. Reference numeral 61 is an air-cooled gas supply unit.

It is needless to say that the work W can be cleaned, the residue removed and the surface modified by using the light irradiation device of the other embodiment. Further, when it is convenient to perform each work with a time lag, one of the works and the other work may be used by covering the opening with one reflection plate, and each light irradiation device can be used. Also,
When the wattage of the discharge lamp is controlled by the control mechanism, the discharge lamp is configured to have a shutter to block light, or the discharge lamp is turned off to instantly set the wattage to 0. It doesn't matter. Further, when controlling the air-cooling gas blowing means, it may be controlled by lowering the temperature of the air-cooling gas or by increasing the flow rate of the air-cooling gas, and the temperature, flow rate and flow rate of the air-cooling gas may be controlled respectively. It is convenient to have a configuration to control.

Depending on the type of discharge lamp, even if the pulse peak temperature is several hundred degrees C to several thousands degrees C based on the design, such as an optical pulse discharge lamp, the surface temperature of the irradiation surface of the work is low. Therefore, this optical pulse discharge lamp may be used. Further, the light irradiation device can also be used for drying printing ink, paint and adhesive. Then, it may be used for irradiation of infrared polymerization, visible light, ultraviolet polymerization and the like. Further, the discharge lamp used in the light irradiation device may be a discharge lamp in which mercury and metal iodide are enclosed, or may be a discharge lamp in which the enclosed material is only a rare gas. Of course, electric lights can be used.
A light meter may be installed on the surface of the work to control the surface temperature of the work from the light quantity of the light irradiation device, or the surface temperature of the work may be controlled by using the light meter and the temperature sensor together.

[0057]

As described above, the present invention exhibits the following excellent effects. Since the light irradiating device has a transparent plate and a reflective plate axially attached to one opening side of the housing and the other opening side of the housing, even when used in a clean room, the work is heated and processed by the radiant heat of the transparent plate. It is possible. Of course, when used outside the clean room, the work can be heated by the air-cooled gas that has deprived the heat of the discharge lamp. Further, the light irradiation device can be miniaturized, and the work can be operated without narrowing the interval between the works and removing the works in the installed state. Further, since it is not necessary to add a power source according to the device and the structure of the device is simple, maintenance can be facilitated.

Since the light irradiating device uses the heat emitted from the discharge lamp as the heating means for the work, it is not necessary to provide a new heating means, and the energy of the device can be effectively used. Further, since the work is irradiated with light while being heated, each work such as cleaning, removal of residues, and surface modification can be appropriately performed in a short time. In addition, the residue attached to the work W is
Can be completely removed in a short time. Further, even if unevenness is formed on the work, the work is irradiated with the direct light from the discharge lamp by the reflected light at a predetermined angle from the reflector, so that it is possible to irradiate every corner without shading. Excellent light distribution characteristics.

When the work surface modification work is performed by the light irradiation device, the work can be performed without unevenness on the surface, so that the desired color can be printed on the work without changing the hue to be printed.

In the light irradiation device, the air-cooled gas blown to the discharge lamp is blown from the direction orthogonal to the longitudinal direction of the discharge lamp or along the longitudinal direction of the discharge lamp to remove the heat generated by the discharge lamp, and then the work. Since the work is heated by being sprayed on or through a transparent plate, almost the same amount of thermal energy can be applied to the work installed on one side and the work installed on the other side to appropriately heat the work. When performing a cleaning operation, the presence or absence of ozone in the discharge lamp can be selected according to the type of the work, and the adverse effect of the oxidizing action can be prevented, so deterioration due to corrosion of the machine can be prevented.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a light irradiation device showing a first embodiment of the present invention.

FIG. 2 is a perspective view of the light irradiation device according to the present invention with a part thereof omitted.

FIG. 3 is a perspective view, partly in section, of a light irradiation device showing a second embodiment of the present invention.

FIG. 4 is a perspective view, partly in section, of a light irradiation device showing a third embodiment of the present invention.

FIG. 5 is a sectional view of a light irradiation device showing a fourth embodiment of the present invention.

FIG. 6 is a side view, partly in section, of a light irradiation device showing a fifth embodiment of the present invention.

FIG. 7 is a side view, partly in section, of a light irradiation device showing an application example of the fifth embodiment of the present invention.

FIG. 8 is a partial cross-sectional view showing another air-cooled gas spraying means of the present invention.

FIG. 9 is a block diagram showing a control mechanism of the light irradiation device of the present invention.

[Explanation of symbols]

1, 20, 30, 40, 50, 60 Light irradiation device 2, 12, 22, 32, 42, 52 Housing 3, 13, 23, 33, 43, 53 Discharge lamp 4, 14, 24, 34, 44, 54 Reflecting mirrors 5, 15, 26a, 35, 45, air cooling notches 6, 36 spray nozzles (air cooling gas spraying means) 6b, air cooling gas supply means 7, 17, 27, 37, 47 translucent plates 8, 18, 28, 38, 48 Reflector 9, 19, 29, 39, 49, 59 Air-cooled gas discharging means 10 Position setting tool 16, 26 Blower pipe (air-cooling gas spraying means) 46 62 Blower fan (air-cooling gas spraying means)

Claims (9)

[Claims] 1. A housing having openings on one side and the other, a discharge lamp for irradiating light including ultraviolet rays provided in the housing, and both opening sides provided in the housing apart from the discharge lamp. A reflecting mirror for reflecting the irradiation light, an air-cooling notch provided on the reflecting mirror along the discharge lamp, an air-cooling gas blowing means provided along the air-cooling notch, and at a predetermined position of the housing. An air-cooled gas supply means provided,
Discharge means for discharging the air-cooled gas blown from the air-cooled gas blowing means toward the discharge lamp to the outside of the housing, in the vicinity of both openings of the housing, one opening and the other closing each opening In addition to the transparent plate, the one and the other reflecting plates are provided so as to come into contact with and separate from each of the transparent plates, and the transparent plate provided in the opening has a base end portion along the opening. And one side end of the light-transmitting plate abuts on the periphery of the opening at one moving end, and the side end of the facing light-transmitting plate abuts, and the reflector is attached to the upper and lower openings. A light irradiation device, characterized in that a pair of right and left sides are provided, and a base end portion of each reflection plate is axially attached. 2. A plurality of the discharge lamps are provided such that their axes are parallel to each other and are spaced apart from each other, and a reflecting mirror for reflecting light emitted from the discharge lamps to the both opening sides is provided between the discharge lamps, and the discharge lamps are The light irradiation device according to claim 1, wherein an air-cooling cutout portion is provided on the reflecting mirror along the electric lamp, and air-cooling gas spraying means is provided along the air-cooling cutout portion. 3. The reflecting mirror is formed in a concave shape and is provided at a rear portion of the discharge lamp. Rotating shafts are provided at both ends of the reflecting mirror, and a rotating mechanism is provided on one of the rotating shafts. An air-cooling notch is provided on the reflecting mirror along the discharge lamp, and air-cooling gas spraying means is provided along the air-cooling notch.
The light irradiation device according to. 4. A first reflecting mirror is provided at a rear portion of the discharge lamp, an air cooling notch is formed at a predetermined position of the first reflecting mirror, and an air cooling gas spraying means is provided behind the reflecting mirror to discharge the air. The light irradiation device according to claim 1, further comprising a second reflecting mirror that reflects light from the discharge lamp toward one opening side and the other opening side of the housing in a light irradiation direction of the electric lamp. 5. The discharge lamp is an electrodeless discharge tube, comprising microwave oscillating means for oscillating a specific microwave behind the first reflecting mirror, and between the discharge lamp and the second reflecting mirror. The light irradiation device according to claim 4, further comprising microwave outflow prevention means. 6. The air-cooled gas blowing means is provided with a cooling fan behind at least one side of a supporting portion for supporting both ends of the discharge lamp and at least one side of the supporting portion.
The light irradiation device according to. 7. The air-cooling gas blowing means is a left and right blower pipe that covers both ends of the discharge lamp, and air-cooling gas is supplied from the supply means to these blower tubes, and a notch for air-cooling is provided at the discharge lamp supporting position of the blower tube. The light irradiation device according to claim 1, 2, 3, 4, or 5, which is provided with a portion. 8. The air cooling notches are provided at positions facing each other through a discharge lamp, and one and the other air notches are provided with air cooling gas blowing means. Or the light irradiation device according to 6. 9. A work is arranged on the side of the opening of the one and the other, a temperature detecting means is provided at a predetermined position on at least one side of the work, a signal from the temperature detecting means is processed, and the discharge lamp is processed. 5. The control means for controlling at least one of the air cooling gas spraying means and maintaining the temperature of the temperature detecting means at a temperature not higher than the material alteration temperature of the work due to heat is provided. Light irradiation device.