JPH0837156A - Maintenance method of semiconductor fabrication apparatus - Google Patents

Abstract

PURPOSE:To raise the operating ratio of the apparatus by processing wafers with the recipes for a plurality of specified different processings, counting the number of times of execution or execution time of the events or recipes and notifying the maintenance time when the counted value has reached the preset value. CONSTITUTION:Each time when the specified event A is completed, it is counted up. When such count value n has reached the preset value B, a maintenance alarm is generated to notify the maintenance time to a worker. After it is notified, a vount value n of the controller counter is cleared to 0 by the confirming operation by the worker. The counting is then started again and the maintenance time is also notified in the similar manner. This can also be applied to the other events C, D,.... When the maintenance time is notified, the maintenance work of apparatus can be done. Thereby, since the maintenance check work by the worker can be reduced and maintenance can also be designated and set even for the different events, the operating ratio of the apparatus can be raised.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention
The present invention relates to a maintenance method capable of rationally performing maintenance of a semiconductor manufacturing device that performs processing such as heat treatment.

[0002]

2. Description of the Related Art FIG. 5 is a flow chart for explaining automatic operation of a conventional device. A plurality of different processing recipes are arranged according to the purpose to form one sequence. The combination can be changed to suit the diversification of processing contents.
The process 1 is a wafer process using a plurality of different process recipes, the process 2 is a wafer process using another process recipe, and the processes 1 and 2 are both processes in succession. The apparatus of FIG. 5 fills a boat with wafers, raises the boat to carry it into the reaction chamber, performs a desired treatment, lowers the boat to carry it out of the reaction chamber, and removes the treated wafer from the boat. It is to be removed.

FIG. 6 is an explanatory diagram of events and recipes for wafer processing. The operation parameter is input to the event, and the recipe function is to sequentially operate the events on the time axis. With this recipe function, the wafer processing process can be automatically executed in the apparatus. However, since the above-described conventional semiconductor manufacturing apparatus chemically treats the reaction gas on the surface of the wafer by chemical reaction and decomposition, it is necessary to perform maintenance such as cleaning regularly on the portion exposed to the generated gas. Further, the reaction chamber is contaminated with by-products and the like accompanying the use of the reaction gas. Therefore, maintenance such as cleaning must be performed according to the number of processes.

[0004]

Since the determination of the maintenance time of the semiconductor manufacturing equipment is made based on the number of times of wafer processing and the processing time, if the same sequence is used, it can be judged by experience, but there are many different sequences in the same equipment. It is difficult to determine the timing when you go, and you always need to check the inside of the device.If the period is short, the operating time of the device cannot be extended,
Further, if it is too long, there is a problem that the yield of wafers deteriorates due to by-products.

[0005]

In order to solve the above-mentioned problems, the method of the present invention treats a wafer with a plurality of different processing recipes designated or registered in advance,
Counts the number of times or times the event or recipe is executed, and when the count value reaches the set value, an alarm is generated to notify the maintenance time, or a pre-registered maintenance recipe is automatically generated. To start.

[0006]

[Operation] The number of executions or execution time of an event or recipe is counted, and when the count value reaches the set value,
An alarm will be issued to notify the maintenance time, and maintenance will be performed. Alternatively, the pre-registered maintenance recipe is automatically started, and the maintenance is automatically performed.

[0007]

1 is a flow chart for explaining the first embodiment of the method of the present invention. In the first embodiment, since the maintenance time depends on the event using the reaction gas, a table that can count these events is provided and the number of maintenance times is set in advance. The controller counts each time an event designated in advance ends, and when the count value reaches the set value, an alarm is generated to notify the operator of the maintenance time. For example, the designated event A is counted each time it finishes, and when the count value B reaches the set value n, a maintenance alarm is generated and the operator is informed of the maintenance time. After the notification, the count value of the counter of the controller is cleared to 0 by the confirmation operation of the operator, the counting is started again, and the maintenance time is similarly notified. Other events C, D ... Can be similarly explained. By knowing the maintenance time, the device will be maintained.

According to the first embodiment, it is possible to reduce the maintenance check work of the operator and to specify and set even for different events, so that it is possible to increase the operation rate of the apparatus. Further, it is possible to optimize the maintenance time, improve the throughput, and prevent damage to production due to forgetting maintenance. Further, since this event can be designated even in a mechanical operation event, it can be used also as a mechanical maintenance alarm, and an alarm can be set based on the total time by integrating the time with a counter.

FIG. 2 is an explanatory diagram showing the ID configuration of event setting and recipe setting in the second embodiment, FIG. 3 is an explanatory diagram showing the configuration of the same maintenance table, and FIG. 4 is an explanatory flowchart and maintenance of the second embodiment. It is a figure which shows a setting and a display example. In the second embodiment, conventionally used events and recipes are registered in a table having an individual identification code (ID), and discrimination is performed by this ID number in subsequent checks and operations (see FIG. 2). An automatic maintenance table is provided in the system, and the events and recipes that affect the maintenance time, the number of times these are used (set), and the events and recipes to be performed after the number of times are registered (see FIG. 3). The controller always checks the start and end of events and recipes and starts counting at the same time. When the limit (set) number of times is reached, the event and recipe registered in the automatic maintenance table are executed even if the next event and recipe are reserved. After this maintenance operation is completed, the limit number of times is cleared and the reserved event and recipe are started again. Clear the limit number and log the date and time at that point (LO
G) and store it as the latest maintenance information (see FIG. 4). For example, executing an event and a recipe, counting each time the event and the recipe A are finished, and when the count value m reaches a set value u, automatically start the maintenance event and the recipe Q,
Perform maintenance automatically and register the date and time when finished. After that, the above operation is repeated.

According to the second embodiment, the maintenance can be automatically performed every predetermined period, and the automation of the maintenance can increase the operating rate of the apparatus and improve the throughput. In addition, it is possible to prevent damage to production due to forgetting maintenance, and because the maintenance time can be set for each device, not only a small number of maintenance personnel can perform maintenance on a large number of equipment in order, but also the maintenance date and time can be displayed by the maintenance information display. There is an effect such as being able to know. Although the example of counting the number of times is given, the time can be accumulated by the timer of the event and the recipe itself, and automatic maintenance can be performed by setting the accumulated time.

[0011]

As is apparent from the above description, according to the present invention, it is possible to increase the operation rate of the apparatus, improve the throughput, and prevent damage to production due to forgetting maintenance.

[Brief description of drawings]

FIG. 1 is a flow chart for explaining a first embodiment of the method of the present invention.

FIG. 2 is an explanatory diagram showing an ID configuration of event setting and recipe setting in the second embodiment.

FIG. 3 is an explanatory diagram showing a configuration of a maintenance table of the same.

FIG. 4 is a diagram illustrating a flowchart for explaining a second embodiment and an example of maintenance setting / display.

FIG. 5 is a flowchart for explaining automatic operation of a conventional device.

FIG. 6 is an explanatory diagram of an event and a recipe for performing wafer processing.

Claims (2)

[Claims] 1. A wafer is processed by a plurality of designated recipes for different processing, the number of times and / or execution time of an event and a recipe are counted, and an alarm is generated when the count value reaches a set value. A maintenance method for a semiconductor manufacturing apparatus, characterized in that the maintenance time is notified and the maintenance is performed. 2. A wafer is processed by a plurality of pre-registered recipes for different processing, the number of times and / or execution time of an event and a recipe are counted, and when the count value reaches a set value, the wafer is pre-registered. A maintenance method for a semiconductor manufacturing apparatus, which automatically starts a maintenance recipe that has been performed and performs maintenance automatically.