JPH0836028A - Semiconductor ic test device - Google Patents

Abstract

PURPOSE:To provide a device for self-diagnosing and evaluating phase linearity of a filter for waveform digitizer, which is provided in a semiconductor IC test device. CONSTITUTION:A switching part B90 is provided in a desirable waveform generating unit 20 built in the semiconductor IC test device, and used for switching the use between the evaluation of phase linearity of a filter for waveform digitizer and other use. As a switching part for switching two signals of the case where the signal of the desirable waveform generating unit 20 passes through the filter for waveform digitizer and the case where the signal does not pass through the filter, a switching part A60 is provided between the filter 30 for waveform digitizer and the switching part B90. A waveform digitizer 40, which receives two signals of the case where the signal passes through the filter and the case where the signal does not pass through the filter, and a digital signal processing 50 are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor IC tester for evaluating the phase linearity of a waveform digitizer filter in the semiconductor IC tester.

[0002]

2. Description of the Related Art Conventionally, the evaluation of the phase linearity of a filter for a waveform digitizer in a semiconductor IC test apparatus cannot be self-diagnosed by the semiconductor IC test apparatus. FIG. 3 is a block diagram showing an example of an apparatus for evaluating phase linearity of a waveform digitizer filter, which is performed by a conventional semiconductor IC test apparatus.
Waveform digitizer filter 3 in the semiconductor IC tester 9
0, waveform digitizer 40, digital signal processing 50, X side connection cable 70, and Y side connection cable 8
It consisted of zero. When evaluating the waveform digitizer filter 30, the waveform signal generator 19 is externally connected to the waveform digitizer filter 30 in the semiconductor IC test apparatus 9, and the waveform digitizer filter 30 may or may not be used. The measurement data is obtained through the waveform digitizer 40 and the digital signal processing 50. When measuring and evaluating the waveform digitizer filter 30, an external waveform signal generator 19 is prepared, the quality of the evaluation signal waveform is confirmed, the work of confirming the location of the waveform digitizer filter 30 built in the semiconductor IC test apparatus, measurement The wiring work and the correction of data were required every time the external waveform signal generator 19 changed.

[0003]

When the phase linearity of the filter for the waveform digitizer is evaluated as described above, a great amount of preparation work is required, and the evaluation cannot be performed immediately. The preparation time may be different each time the equipment is prepared, the wiring is prepared, the external waveform signal generator is prepared, and the external waveform signal generator is different each time the evaluation is performed.Therefore, it is necessary to correct the variations in the external signal generator each time the evaluation is performed. However, the measurement accuracy became a problem and it was very complicated. In order to solve this problem, an arbitrary waveform generator built in the semiconductor IC test apparatus is used as a waveform signal generator. By eliminating the possibility that the external waveform signal generator will change each time it is evaluated, it is possible to use a fixed waveform signal generator and reduce the error for each externally connected waveform signal generator. It is intended to provide a new device for self-diagnosing the evaluation of the phase linearity of a filter for a waveform digitizer built in a semiconductor IC test device.

[0004]

In order to evaluate the phase linearity of a filter for a waveform digitizer and perform self-diagnosis, an arbitrary waveform generator built in a semiconductor IC test device can be used as a waveform signal generator as a switching unit B. Is provided, and a switching unit A is provided as a switching means for switching the signal of the arbitrary waveform generator with and without the waveform digitizer filter. 1. With the waveform digitizer filter, the signal of the arbitrary waveform generator is provided. The switching section B, the switching section A, the waveform digitizer filter, the waveform digitizer, and the digital signal processing are connected in series to obtain measurement data. 2. When not passing through the filter for the waveform digitizer, the signal of the arbitrary waveform generator is connected in series with the switching unit B, the switching unit A, the waveform digitizer, and the digital signal processing to obtain the measurement data. It has become possible to evaluate the phase linearity of the filter for waveform digitizer by the semiconductor IC test apparatus of the present invention.

[0005]

1 is a block diagram of an embodiment of the present invention.
FIG. 2 shows a block diagram of another embodiment. The arbitrary waveform generator 20 built in the semiconductor IC test apparatus 10 is provided with a switching unit B90, which is used for evaluating the phase linearity of the filter for waveform digitizer and for switching between the conventional application and the arbitrary waveform generator 2.
A switching unit A60 is provided for switching between two kinds of signals when the signal of 0 goes through the waveform digitizer filter 30 and when the signal does not go through, and two kinds of signals when the waveform digitizer filter 30 is passed and not. Control of the switching unit A6
0, there are two ways to connect to the waveform digitizer filter 30 and to the waveform digitizer 40. The cable connecting the waveform digitizer filter 30 and the waveform digitizer 40 is the X-side connection cable 70, and the switching unit A60
A cable for connecting between the waveform digitizer 40 and the waveform digitizer 40 is provided as a Y-side connection cable 80, and two kinds of signals with and without the waveform digitizer filter 30 are operated by operating the switching unit A60. Get comparative data via.

One embodiment of the operation of the waveform digitizer filter will be described with reference to the block diagram of FIG. The switching unit B is put into the measurement so that the arbitrary waveform generator 20 built in the semiconductor IC test apparatus outputs the Swept Sin waveform. The switching unit B90 is set so that the signal can be input to the switching unit A60. The switching unit A60 is switched to the waveform digitizer filter 30, the Swept Sin waveform is input from the arbitrary waveform generator 20, the waveform digitizer filter 30 is passed, and the signal is input to the waveform digitizer 40 from the X-side connection cable 70. Digital signal processing Obtain the measurement data via 50. Next, the Swept Sin waveform of the arbitrary waveform generator 20 is not passed. On the other side, the switching unit A60 of the waveform digitizer filter 30 is connected to the Y-side connection cable 80. The cable is connected to the input side of the waveform digitizer 40. The measurement data is digital. Measurement data is obtained via the signal processing 50. Phase linearity is evaluated by taking phase difference data on the X side and the Y side. The X-side is the side through which the Swept Sin waveform of the arbitrary waveform generator 20 passes the filter for waveform digitizer for evaluation, and the Y-side is the side that does not pass through the filter for waveform digitizer and the Z side.
To the side.

A block diagram of another embodiment is shown in FIG. Arbitrary waveform generator 20 with built-in semiconductor IC test apparatus 11
A switching unit B90 is provided at the same time and is used for switching between the phase linearity evaluation of the filter for waveform digitizer and the conventional application. The signal of the arbitrary waveform generator 20 may be connected to the X-side connection cable 70 and the waveform digitizer 40, and may be connected to one of the two cases, that is, the case where the signal is not passed through the waveform digitizer filter 30 and the output thereof is input to the digital signal processing 50. The other side is provided so that the waveform digitizer 41 is connected to the Z connection cable 100 side and the output thereof is input to the digital signal processing 51. The X side and the Z side can be simultaneously measured, and the digital signal processing 5
The measurement data on the X side and the Z side are taken from 0 and 51, and the phase difference is calculated to evaluate the phase linearity.

[0008]

Since the present invention is constructed as described above, it has the following effects. 1. Since the switching section A is provided in the arbitrary waveform generator built in the semiconductor IC tester, it operates like a waveform signal generator, and the switching section B for the measurement through the filter for waveform digitizer and the measurement without the waveform is provided. Arbitrary waveform generators can now be used as waveform signal generators so that digitizer filters can be easily compared, eliminating the need to attach a waveform signal generator from the outside every time evaluation is performed, reducing the number of measurement preparation steps. As a result, there is no variation error for each waveform signal generator, and there is no need to make corrections each time the evaluation is performed, improving measurement accuracy. The waveform digitizer switches the switching unit A, takes the measurement data on the X side and the Y side, calculates the phase difference, and evaluates the phase linearity. 2. Waveform digitizer and digital signal processing are installed on X side and Z side, and X side and Z side can be measured at the same time.
The phase linearity is evaluated by taking the measurement data on the X side and the Z side and calculating the phase difference. 3. The phase linearity of the waveform digitizer filter can be evaluated by the semiconductor IC test apparatus of the present invention.

[Brief description of drawings]

FIG. 1 is a block diagram of one embodiment of the present invention.

FIG. 2 is a block diagram of another embodiment of the present invention.

FIG. 3 is a block diagram of a prior art embodiment.

[Explanation of symbols]

 9, 10, 11 Semiconductor IC test equipment 19 External waveform signal generator 20 Arbitrary waveform generator 30 Waveform digitizer filter 40, 41 Waveform digitizer 50, 51 Digital signal processing 60 Switching part A 70 X side connection cable 80 Y side connection Cable 90 Switching part B 100 Z side connection cable

Claims (2)

[Claims] 1. A semiconductor IC test apparatus for self-diagnosing phase linearity of a filter for a waveform digitizer built in the apparatus, wherein a switching section B capable of connecting an arbitrary waveform generator (20) built in the semiconductor IC test apparatus (10). (90) is provided, one side can be connected in series with the waveform digitizer filter (30), the X side connection cable (70), the waveform digitizer (40) and the digital signal processing (50), and the other side is the Y side connection cable. (80) and waveform digitizer (4
0) and the digital signal processing (50) are provided with a switching unit A (60) that can be connected in series, and the semiconductor IC test apparatus is provided with the above configuration. 2. A self-diagnosis semiconductor IC test apparatus for phase linearity of a filter for a waveform digitizer built in the apparatus, wherein a switching section B (90) capable of connecting an arbitrary waveform generator (20) built in the semiconductor IC test apparatus (11). ) Is provided, and one side can be connected in series with the waveform digitizer filter (30), the X side connection cable (70), the waveform digitizer (40), and the digital signal processing (50), and the other side can be connected in series with the Z side. A semiconductor IC test apparatus comprising a connection cable (100), a waveform digitizer (41), and a digital signal processing (51), and having the above configuration.