JPH08334519A - Driving device - Google Patents

Abstract

PURPOSE: To form a probe in a structure which is hard to cause vibration and to a piezoelectric drive member, in a scanning-type probe microscope for driving the probe with a tripod type piezoelectric driving device. CONSTITUTION: A driving device for driving a probe is provided with a driving device support body 11 fixed to a stage for placing a sample, XY plane driving members 5 and 6 where one edge is supported by the driving device support body 11 and is driven in a direction in parallel with a sample surface, a Z- direction driving member 7 which is provided at the other edge of the XY plane driving members 5 and 6 and is displaced in a direction vertical to the sample surface, and a probe 8 which is provided at the Z-direction driving member 7 and detects the surface shape of the sample. Then, it also has a post 4 and a vibration-eliminating member 2 which is an elastic substance where one edge is fixed to the post 4 and the other edge is fixed to the other edge of the XY plane driving members 5 and 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an antivibration mechanism for a probe of a scanning probe microscope having a tripot type scanner.

[0002]

2. Description of the Related Art In recent years, a probe is brought closer to the surface of the sample and the probe is scanned in a two-dimensional plane parallel to the surface of the sample to detect tunneling current and atomic force acting between the sample and the probe. Improvements and developments of scanning probe microscopes for detecting and observing the fine mechanism of the sample surface have been actively made.

What is the resolution of these scanning probe microscopes? 0.1 Å in the vertical direction and 0.5 in the horizontal direction
It can have a resolution of less than Angstrom. Therefore, the performance of a scanning probe microscope book or the like cannot be exhibited unless a drive member of the probe has an accuracy equal to or lower than its resolution. Therefore, a driving member using a piezoelectric body that can generate a fine displacement is widely adopted as the only means.

FIG. 6 shows an example of a tripod type piezoelectric driving device which is widely used as a driving member for a scanning probe microscope. This tripod-type piezoelectric drive device is a piezoelectric drive member that is independently displaced in the X and Y directions parallel to the sample surface, and a piezoelectric drive member 61a that is displaced in the X direction and is displaced in the Y direction. Piezoelectric drive member 61
b is fixed via a block 62, and the block 6
2 and a piezoelectric driving member 63 that is displaced in a direction perpendicular to the sample surface.
61b is a support substrate 67 via hinges 66a and 66b.
It is fixed to a and 67b. Then, the piezoelectric drive member 6
3 has a probe 64 at the end on the sample surface 65 side.

As described above, the scanning probe microscope has the probe 6
4 and the piezoelectric driving member 63 are supported by the piezoelectric driving member 61 and the piezoelectric driving member 62, so that the structure easily vibrates and the resolution is easily lowered. FIG. 7 shows another example of a tripod-type piezoelectric drive device that is widely used as a drive member of a scanning probe microscope. This is a scanning probe microscope in which the same piezoelectric drive member as in FIG. 6 is used and the sample is arranged above the probe 75. In this scanning probe microscope, a piezoelectric driving member 71a that is displaced in the X direction and a piezoelectric driving member 71b that is displaced in the Y direction are fixed via a block 72, and the piezoelectric driving member 71a is perpendicular to the sample surface provided in the block 72. And a piezoelectric driving member 73 that is displaced in the direction. The piezoelectric drive member 71a and the piezoelectric drive member 71b are fixed to the support substrates 77a and 77b via hinges 76a and 76b, respectively. The piezoelectric drive members 71a and 71b and the block 72 are supported so as to come into contact with a support member 77c provided below them. When scanning the probe 74 parallel to the sample surface, the piezoelectric driving members 71a, 71
Since b and the block 72 and the support member 77c move while rubbing against each other, the probe is less likely to vibrate than the scanning probe microscope shown in FIG.

However, in the scanning probe microscope shown in FIG. 7, unnecessary friction occurs during scanning of the probe.

[0007]

However, in the scanning probe microscope using the above-mentioned tripod type piezoelectric drive device, the probe is likely to vibrate. for that reason,
Due to the influence of external vibration, the probe vibrated up and down very easily, and the resolution decreased. Further, in the structure in which the probe is directed upward and the piezoelectric drive member is brought into contact with a certain wall to support the probe side, friction occurs when the probe is moved in the direction parallel to the sample plane, The piezoelectric drive device itself has been overloaded.

The present invention relates to a scanning probe microscope in which a probe is driven by a tripot type piezoelectric drive device, which has a structure in which the probe is less likely to vibrate and which does not burden the piezoelectric drive member. To provide.

[0009]

In order to solve the above-mentioned problems, according to the present invention, a drive device support for supporting a drive device and one end supported by the drive device support are parallel to the sample surface. XY plane driving member that is driven in the direction and its XY
It has a Z-direction driving member which is provided at the other end of the plane driving member and is displaced in a direction perpendicular to the sample surface, and a probe which is provided on the Z-direction driving member and detects the surface shape of the sample. In the drive device for moving the probe, a column and an anti-vibration member, which is an elastic substance, is fixed to the column at one end and is fixed to the other end of the XY plane drive member at the other end.

Further, according to the present invention, a beam extending to the other end of the XY plane drive member is provided, and the support column has a support portion for fixing the vibration isolation member at least above or below the beam. Then, it is preferable to provide a vibration isolation member between the beam and the support. Further, the beam extended to the other end of the XY plane driving member is preferably extended parallel to the sample surface.

Further, according to the present invention, the support portions of the columns are provided above and below the beam, and the sample is provided between the upper support portion and the beam and between the lower support portion and the beam. It is preferable to fix the vibration isolation member in a direction perpendicular to the surface. Still further, it is preferred that the stanchions be fixed to the drive support. Then, regarding the vibration isolation member, it is preferable to provide a rigid plate in the elastic body parallel to the sample surface. Further, it is preferable that the vibration isolation member has a structure in which elastic bodies and hard plates are alternately laminated in a direction perpendicular to the sample surface.

The XY-direction driving member and the Z-direction piezoelectric driving member are preferably made of piezoelectric material. By the way, according to the present invention, a drive device support for supporting the drive device, an XY plane piezoelectric drive member having one end supported by the drive device support and extending and contracting in a direction parallel to the sample surface, and an XY plane thereof are also provided. A Z-direction piezoelectric driving member which is provided at the other end of the piezoelectric driving member and expands and contracts in a direction perpendicular to the sample surface;
In a drive device having a probe for detecting the surface shape of a sample and driving the probe, a column having two support plates and a support plate fixed to an XY plane piezoelectric drive member are provided. A beam arranged between them and a sphere having the same diameter as the distance from the supporting plate to the beam were provided between the beam and the supporting plate. And about a sphere, it is preferred that it is a steel ball.

[0013]

In the drive device in which one end is fixed to the frame and the probe is fixed to the other end, the end to which the probe is fixed is a free end, and thus is easily affected by external vibration. Therefore, in the present invention, the end to which the probe is fixed is fixed to the support via the elastic body. By doing so, even if vibration occurs, the elastic body absorbs the vibration.

Therefore, it becomes possible to prevent the probe from vibrating easily and to prevent the resolution of the scanning probe microscope from deteriorating. Further, although the probe moves on a plane parallel to the sample surface, since it is supported by the elastic body, the elastic body can be deformed by the amount of movement, which does not hinder the movement of the probe. . By the way, the most susceptible vibration is the vibration perpendicular to the direction in which the probe is supported. Therefore, the elastic body is fixed perpendicularly to the sample surface by the beam and the pillar extending from the free end side of the driving member. By doing so, it is possible to effectively absorb the vibration in the Z direction and to further smoothly move the probe on the XY plane. This is because if the elastic body is fixed perpendicularly to the sample surface, vibration in the Z direction is most easily absorbed, and even if the probe moves in the XY directions, the elastic body deforms most in that direction. This is because it becomes easier.

Further, by providing the elastic body above and below the beam extending from the free end side of the piezoelectric driving member, the vibration in the Z direction can be further absorbed. If a rigid plate is provided on the above-mentioned elastic body, it will not be further affected by vibration. Originally, an elastic body is a substance that is more easily deformed than a rigid body. Therefore, the elastic body easily expands and contracts due to the gravity applied to the piezoelectric drive member and the probe, and also expands and contracts to some extent due to vibration. Therefore, when the elastic body is provided with the rigid plate, the amount of expansion and contraction of the elastic body (per length from the end fixed to the beam to the end fixed to the column) is reduced.

Therefore, the elastic body is unlikely to expand or contract even under the influence of gravity or vibration applied to the driving member or the probe, and the distance between the tip of the probe and the sample surface can be kept constant. In particular, the above invention is preferably used for a scanning probe microscope that detects minute irregularities on the sample surface. Since this scanning probe microscope detects unevenness of several nm, it is preferable to use a piezoelectric driving element capable of driving and controlling a minute displacement as a driving member. If a piezoelectric driving element having a structure in which a plurality of piezoelectric bodies are stacked in the displacement direction is used, the displacement amount becomes large, and the probe can be scanned over a relatively wide sample surface.

By the way, according to the present invention, in order to keep the tip of the probe and the surface of the sample at fixed positions, a steel ball may be inserted between the other end of the piezoelectric driving member and the supporting flat plates arranged above and below it. , A similar effect is obtained. When the piezoelectric driving member is driven in the direction parallel to the sample surface, the steel ball rolls and the free end of the piezoelectric driving member is always moved by the steel ball and the supporting flat plate in the direction perpendicular to the sample surface. Is supported.

Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited thereto.

[0019]

【Example】

(Embodiment 1) FIG. 1 is a perspective view of the entire structure of a piezoelectric drive device for a probe of an atomic force microscope according to Embodiment 1 of the present invention. This piezoelectric drive device has one end fixed to the frame 11 via a hinge 9a and an X-direction piezoelectric drive member 5 which is displaced in the X direction parallel to the sample surface 13 and one end via a hinge 9b. The Y-direction piezoelectric drive member 6 fixed to the frame 11 and displaced in the Y direction, which is a direction parallel to the sample surface 13 and perpendicular to the X direction.
And have.

By the way, the X-direction piezoelectric drive member 5 is a drive member that is formed by laminating a plurality of piezoelectric bodies in the X-direction and expands and contracts in the X-direction by applying a voltage to each piezoelectric body. The Y-direction piezoelectric drive member 6 is a drive member that is formed by stacking a plurality of piezoelectric bodies in the Y direction and that expands and contracts in the Y direction by applying a voltage to each piezoelectric body. The other end of the X-direction piezoelectric drive member 5 is fixed to the block 10 via a hinge 9c. These piezoelectric driving members are very effective as a driving member for a probe of a scanning probe microscope because they can accurately control a minute distance and can be easily controlled.

The other end of the Y-direction piezoelectric drive member 6 is
It is fixed to the block 10. A Z-direction piezoelectric drive member 7 that is displaced in the Z direction perpendicular to the sample surface 13 is fixed to the block 10, and a probe is attached to the end of the Z-direction piezoelectric drive member 7 on the sample surface side. 8 are provided. As described above, the piezoelectric drive device according to the first embodiment includes the block 1
0 is a kind of free end.

The probe 8 is a probe of an atomic force microscope, and the amount of bending of the probe 8 changes due to the atomic force generated between the tip of the probe 8 and the sample. The amount is measured to measure the uneven shape of the sample surface. Further, the block 10 is provided with a free end support beam 3 which is a plate parallel to the sample surface 13. A free end supporting flat plate 4 fixed to the frame 11 is provided above the free end supporting beam 3. Further, between the free end supporting beam 3 and the free end supporting flat plate 4, there is provided a free end supporting member 2 in which elastic bodies 1a and rigid plates 1b are alternately laminated. Has one end fixed to the free end supporting flat plate 4 and the other end fixed to the free end supporting beam 3. The free end support member 2 is provided on the free end support flat plate 4 and the free end support beam 3 so that the axis of the free end support member 2 is substantially parallel to the Z direction. The frame 11 is supported by a micrometer 12 on a stage on which a sample is placed. By adjusting the micrometer 13, the distance between the sample 14 and the probe 8 can be made close in advance.

By the way, the free end supporting member 2 is laminated in order of the elastic body 1a, the rigid plate 1b, the elastic body 1a, ..., The rigid plate 1b, and the elastic body 1a so as to be substantially parallel to the sample surface 13. Has been done. The hardness of the elastic body 1a is 50H.
A s (Shore hardness) silicone rubber was used, and a 0.1 mm thick stainless steel strip was used for the rigid plate 1b. When the elastic body 1a and the rigid plate 1b are laminated in this way,
It can be smoothly deformed in a direction perpendicular to the stacking direction (Z direction), and hardly deformed in the stacking direction. Further, in order to further bring out such an effect, in the first embodiment, the free end supporting beam 3 and the free end supporting flat plate 4 are provided so as to be parallel to the sample surface 13.

FIG. 2 shows how the X-direction piezoelectric driving member 5 extends and the free end supporting member 2 deforms. This figure shows a state in which the X-direction piezoelectric drive member 5 extends and generates a force in the right direction. Then, due to the force, a shear stress is applied to each elastic body 1a of the free end support member 2, and the free end support member 2 is laterally deformed. When vibration occurs and a force in the Z direction is applied to the free end support member 2, the elastic body 1 is compressed by the stress in the vertical direction. However, since the rigid plate 1b having high tensile strength is sandwiched between the elastic bodies 1, the crush amount of the elastic body 1a can be suppressed to be small.

As described above, the mechanism is capable of cutting the vibration in the Z direction and does not hinder the horizontal scanning of the probe. Further, in the piezoelectric driving device of the first embodiment, the rigidity of the X-direction piezoelectric driving member 5 and the Y-direction piezoelectric driving member 6 that substantially support the probe 8 is not sufficient, and even if they flex, the free end By providing the supporting beam 3 and the free-end supporting flat plate 4 and providing the free-end supporting member 2 between them, it is possible to play the role of a guide that can always maintain a fixed positional relationship with the sample surface 13. (Embodiment 2) FIG. 3 is a perspective view showing the overall configuration of a piezoelectric drive device according to Embodiment 2 of the present invention.

The same reference numerals as those in FIG. 3 and those in FIG. 1 are the same as those in the first embodiment, and the description thereof is omitted here. The piezoelectric driving device according to the second embodiment has one end fixed to the frame 11 and the block 33a fixed to the other end, and is displaced in the Y direction, which is a direction parallel to the sample surface 13, in the Y direction piezoelectric driving member 32. And one end of which is fixed to the block 33a and the other end of which is fixed to the block 33b, and which is displaced in the X direction which is a direction parallel to the sample surface 13 and a direction perpendicular to the Y direction. A piezoelectric driving device having a directional piezoelectric driving member. The Z-direction piezoelectric driving member 7 is fixed to the block 33b, and the probe 8 is provided at the sample-side end of the Z-direction piezoelectric driving member 7.

Then, the block 33a and the block 33
Free end support beams 3 are provided in the respective b, and free end support flat plates 4 are provided above the respective free end support beams 3. The free end supporting member 2 which is the same as that of the first embodiment is provided between each free end supporting beam 3 and the free end supporting flat plate 4. In this way, the free-end support beams 3 are provided at the ends of the X-direction piezoelectric drive member and the Y-direction piezoelectric drive member that are not directly fixed to the frame 11, and the free end support member 2 and the free end support flat plate 4 are interposed therebetween. Frame 1
Supported by 1.

In this piezoelectric driving device, when the Y-direction piezoelectric driving member 32 expands and contracts, the free end supporting member 2 fixed to the block 33a via the free end supporting beam 3 is the first embodiment.
Similarly to the free end support member 2 of FIG.
Is deformed in the same direction as the displacement. Similarly, the free end support member 2 fixed to the block 33b via the free end support beam 3 also deforms similarly. When the X-direction piezoelectric drive member 33 expands and contracts, the free-end support member 2 fixed to the block 33b via the free-end support beam 3 moves in the same direction as the X-direction piezoelectric drive member 31 is displaced. Deform.

When the Y-direction piezoelectric drive member 32 and the X-direction piezoelectric drive member 31 are simultaneously displaced, the free end support member 2 fixed to the block 33b via the free end support beam 3 is driven in the X direction piezoelectric drive. The member 31 and the Y-direction piezoelectric drive member 32 are displaced in the same direction as the resultant force. Thus, by providing the free end support beam 3 and the free end support member 2 at the ends of the respective piezoelectric drive members not fixed to the frame 11 and fixing them to the free end support flat plate 4,
Even if the X-direction piezoelectric drive member 31 or the Y-direction piezoelectric drive member 32 does not have sufficient rigidity, the distance from the sample surface 13 can be kept constant without bending. Also,
When the path from the fixed end to the probe is long as in the piezoelectric drive device of the second embodiment, it is very easy to vibrate, but by providing the free end support member 2, the problem of vibration can be solved. . (Embodiment 3) FIG. 4 is a perspective view showing the overall configuration of a piezoelectric drive device according to Embodiment 3 of the present invention.

The same reference numerals as those in FIG. 4 and those in FIG. 1 are the same as those in the first embodiment, and the description thereof is omitted here. By the way, in the fourth embodiment, the free end supporting flat plates 4a and 4b are provided above and below the free end supporting beam 3 provided in the block 10. An elastic body 41 is provided between the free end support beam 3 and the free end support flat plate 4a and between the free end support beam 3 and the free end support flat plate 4b. The free end supporting flat plates 4a and 4b are fixed to the frame 11. As the elastic body 41, neoprene rubber having a hardness of 90 Hs (Shore hardness) was used.

The free-end supporting beam 3 is arranged between the free-end supporting flat plate 4a and the free-end supporting flat plate 4b thus fixed to the frame 11, and the free-end supporting beam 3 and the free-end supporting flat plate 4a are arranged. By providing the elastic body 41 between the free end support beam 3 and the free end support flat plate 4b, the sample surface 13
Since vibrations in the vertical direction are suppressed from both the upper and lower directions, it can be quickly and efficiently damped.

By selecting a polymer material having a high vibration absorbing property for the elastic body 41, the vibration can be further damped. The elastic body 41 preferably has a higher hardness than the elastic body used in the first and second embodiments. In addition to neoprene rubber, an elastic body such as natural rubber or viton rubber may be used. Since the piezoelectric drive device of the third embodiment supports the free end support beam 3 from both the upper side and the lower side even if the X-direction piezoelectric drive member 5 and the Y-direction piezoelectric drive member 6 having low rigidity are used, The distance between the sample surface 13 and the probe can always be kept constant without the piezoelectric driving members bending.

Further, even if a free end support member having the same structure as that of the first embodiment in which a rigid plate is inserted in the elastic body 41 is used,
A similar effect can be expected. Further, in Example 3, even in the configuration of the piezoelectric driving member as shown in FIG. 3 (the one having only one fixed end), by providing the free end supporting flat plate on the upper side and the lower side of the free end supporting beam, Even if an elastic body is provided between the free end supporting beam and the free end supporting flat plate, the same effect can be expected. (Embodiment 4) FIG. 5 is a perspective view showing the overall configuration of a piezoelectric drive device according to Embodiment 4 of the present invention.

By the way, the same reference numerals as those in FIG. 5 and FIG. 4 are the same, so that the description thereof is omitted here. By the way, in Example 4, the steel ball 51a is provided between the free end supporting beam 3 and the free end supporting flat plate 4a, and the steel ball 51 is also provided between the free end supporting beam 3 and the free end supporting flat plate 4b.
b is provided. The diameter of the steel ball 51a is equal to that of the free end support beam 3
Has a length substantially equal to the distance between the free end supporting flat plate 4a and is made of stainless steel. The diameter of the steel ball 51b is substantially the same as the distance between the free end supporting beam 3 and the free end supporting flat plate 4b, and is made of the same material as the steel ball 51a.

By supporting the free end of the piezoelectric driving member with such a steel ball, the X-direction piezoelectric driving member 5 or Y having low rigidity can be used.
Even if the directional piezoelectric driving member 6 is used, the distance between the probe 8 and the sample surface 13 can be kept constant. Further, in the fourth embodiment, when the probe 8 is moved in the XY directions, a force that deforms the elastic body is not required, so the X-direction piezoelectric drive member 5, the Y-direction piezoelectric drive member 6, and a drive circuit that drives these. Does not burden Since the portion to be rubbed is the hard sphere 51, it is rolling friction, and the ends of the X-direction piezoelectric drive member 5 and the Y-direction piezoelectric drive member that are not fixed to the frame 11 are supported by a plate as described in the prior art. Therefore, the friction can be reduced, and the X-direction piezoelectric drive member 5, the Y-direction piezoelectric drive member 6, and a drive circuit for driving these are not burdened.

Further, with respect to vibration, it is more difficult to vibrate in the Z direction as compared with the case where the block 10 is not fixed. If you want to further eliminate the effect of vibration,
Instead of the steel balls 51a and 51b, it is preferable to use a spherical body provided with an elastic body along the outer peripheral surface of the steel ball. In addition, in Example 4,
Even in the configuration of the piezoelectric driving member as shown in FIG. 3 (the one having only one fixed end), the free end supporting beam and the free end are provided by providing the free end supporting flat plate on the upper side and the lower side of the free end supporting beam. The same effect can be expected even if a steel ball or a spherical body having an elastic body is provided between the supporting flat plate and the supporting flat plate.

The piezoelectric driving device described above has a remarkable effect on the piezoelectric driving device of the probe of the scanning atomic force microscope, the scanning tunnel microscope, or the scanning near-field microscope, which detects minute irregularities. Have. In particular, since these microscopes have to detect irregularities of several angstroms, the detection error becomes large due to minute changes in the flexure of the support of the probe and vibration of the probe, and the shape of the sample surface must be accurate. This is because it becomes impossible to detect.

Further, in these piezoelectric driving devices, the structure in which the free end supporting flat plate 4 is fixed to the frame 11 is adopted, but the stage for placing the sample and the vibration system may be fixed at the same place.

[0039]

According to the present invention, the probe is less likely to vibrate in the direction perpendicular to the sample surface without disturbing the scanning of the probe in the direction parallel to the sample surface. Further, even if the piezoelectric driving member supporting the probe is not high in rigidity, it is possible to prevent the piezoelectric driving member from bending.

[Brief description of drawings]

FIG. 1 is a perspective view of the overall configuration of a piezoelectric drive device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing an operation of a free end support member 2 of the first embodiment.

FIG. 3 is a perspective view of the entire configuration of a piezoelectric drive device according to a second embodiment of the present invention.

FIG. 4 is a perspective view of the overall configuration of a piezoelectric drive device according to a third embodiment of the present invention.

FIG. 5 is a perspective view of the entire configuration of a piezoelectric drive device of Example 4 according to the present invention.

FIG. 6 is a perspective view of an overall configuration showing an example of a conventional piezoelectric drive device.

FIG. 7 is a perspective view of an overall configuration showing an example of a conventional piezoelectric drive device.

[Explanation of symbols]

 1a Elastic body 1b Steel plate 2 Free end support member 3 Free end support beam 4 Free end support flat plate 5 X direction piezoelectric drive member 6 Y direction piezoelectric drive member 7 Z direction piezoelectric drive member 8 Probe 9a, 9b, 9c Hinge 10 Block 11 Frame 12 Micrometer 13 Sample surface 41 Elastic body 51 Steel ball 61a X direction piezoelectric drive member 61b Y direction piezoelectric drive member 62 Block 63 Z direction piezoelectric drive member 64 Probe 65 Sample surface 66a, 66b Hinge 67a, 67b Support member 71a X Direction piezoelectric drive member 71b Y direction piezoelectric drive member 72 block 73 Z direction piezoelectric drive member 74 probe 76a, 76b hinge 77a, 77b support member

Claims (10)

[Claims] 1. A drive device support body for supporting a drive device; an XY plane drive member having one end supported by the drive device support body and driven in a direction parallel to a sample surface; and an XY plane drive member. A Z-direction drive member that is provided at the other end and is displaced in a direction perpendicular to the sample surface, and a probe that is provided on the Z-direction drive member and that detects the surface shape of the sample In the drive device for moving the probe, a support column and an anti-vibration member, which is an elastic substance, has one end fixed to the support column and the other end fixed to the other end of the XY plane drive member. Drive device for a probe characterized by: 2. A beam extending to the other end of the XY plane drive member is provided, and the support column has a support portion that fixes the vibration isolation member at least above or below the beam, The drive device according to claim 1, wherein the vibration isolation member is provided between the beam and the column. 3. The driving device according to claim 2, wherein the beam extending to the other end of the XY plane driving member extends parallel to the sample surface. 4. The support portion of the column is provided above and below the beam, and between the upper support portion and the beam and between the lower support portion and the beam. 3. The drive device according to claim 1, wherein the vibration isolation member is fixed in a direction perpendicular to the sample surface. 5. The drive device according to claim 1, wherein the support column is fixed to the drive device support body. 6. The anti-vibration member has a rigid plate provided in the elastic body parallel to the sample surface.
The drive device according to claim 5. 7. The vibration isolating member is characterized in that the elastic body and the rigid plate are alternately laminated in a direction perpendicular to the sample surface, according to any one of claims 1 to 6. The drive device described. 8. The drive device according to claim 1, wherein the XY direction drive member and the Z direction piezoelectric drive member are made of a piezoelectric material. 9. A drive device support for supporting a drive device, an XY plane piezoelectric drive member having one end supported by the drive device support and extending and contracting in a direction parallel to a sample surface, and the XY plane piezoelectric drive. In a driving device for driving a probe, which is provided at the other end of the member, has a Z-direction piezoelectric driving member that expands and contracts in a direction perpendicular to the sample surface, and a probe for detecting the surface shape of the sample. A column having two supporting flat plates, a beam fixed to the XY plane piezoelectric driving member and arranged between the two supporting flat plates, and each of the beams between the beam and the supporting flat plate. A driving device provided with a sphere having the same diameter as the distance from the supporting flat plate to the beam. 10. The drive device according to claim 9, wherein the sphere is a steel ball.