JPH08330484A - Fixing structure of semiconductor element - Google Patents

Fixing structure of semiconductor element

Info

Publication number
JPH08330484A
JPH08330484A JP13484795A JP13484795A JPH08330484A JP H08330484 A JPH08330484 A JP H08330484A JP 13484795 A JP13484795 A JP 13484795A JP 13484795 A JP13484795 A JP 13484795A JP H08330484 A JPH08330484 A JP H08330484A
Authority
JP
Japan
Prior art keywords
semiconductor element
fixed
cooler
semiconductor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13484795A
Other languages
Japanese (ja)
Inventor
Koji Yano
浩司 矢野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13484795A priority Critical patent/JPH08330484A/en
Publication of JPH08330484A publication Critical patent/JPH08330484A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide the unit structure of a semiconductor element and a cooler which is arranged to be easy to be incorporated into a device. CONSTITUTION: Stack units whose key parts are semiconductor elements la and 18 are welded and fixed on both sides of a fixing board 4. For the cord of each part, A and B, which show the parts belong to left side and right side, respectively, are added. Talking to the left side, an insulating spacer 3A, a conductor-cooler 2A, a semiconductor element 1A, a cooler 2A, and a insulating spacer 3A are stacked coaxially in this order on the left flank of the fixing board 4. Two pieces of poles 5A are erected, and a plate spring 6A laid between the left ends adds pressure to the stacked unit, according to the degree of fastening by a nut 7A at the center. This pressure is set to a recommended value for the thermally and electrically well conductivity between the semiconductor element 1A and each cooler 2A on both sides for the first reason and for maintenance of mechanical strength of the semiconductor element 1A for the second reason. In short, the pressure to the right stacked unit and that on the left side are generally different.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、平形固定基板の両側
に、それぞれ半導体素子および導通性をもつ冷却体を同
軸に積層して圧接・固定するようにした、装置に組み込
みやすい半導体素子の固定構造体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor element and a cooling element having electrical conductivity, which are coaxially laminated on both sides of a flat fixed substrate so as to be press-contacted and fixed to each other. Regarding the structure.

【0002】[0002]

【従来の技術】従来例について、図3を参照しながら説
明する。図3は従来例に関し、(a) は側面図、(b) は平
面図である。図において、スイッチ機能をもつ半導体素
子1の2個と、導通性をもつ冷却体2の3個とが交互に
積層され、その全体が絶縁スペーサ3を介し、固定基板
4の片側に対して圧接・固定される。ここで、半導体素
子1は、無停電電源装置などの電力装置に組み込まれる
円柱形の強電用電子部品で、動作時に発熱する。冷却体
2は、この発生熱に対応する、平形で厚さ方向にフィン
を並設して構成される、導通性をもち導体兼用の部品で
ある。一般に、冷却体2は、半導体素子1の片側または
両側に接触・配置される。なお、種類(仕様や寸法)の
異なった半導体素子,冷却体,絶縁スペーサにも、機能
的に同じものとして説明する便宜上、それぞれ同じ符号
1,2,3を付けて示した。
2. Description of the Related Art A conventional example will be described with reference to FIG. FIG. 3 is a side view and FIG. 3B is a plan view of a conventional example. In the figure, two semiconductor elements 1 having a switch function and three cooling elements 2 having conductivity are alternately laminated, and the whole is pressure-bonded to one side of a fixed substrate 4 via an insulating spacer 3.・ Fixed. Here, the semiconductor element 1 is a cylindrical high-power electronic component incorporated in a power device such as an uninterruptible power supply and generates heat during operation. The cooling body 2 is a flat component corresponding to the generated heat and configured by arranging fins in parallel in the thickness direction, and has conductivity and also serves as a conductor. Generally, the cooling body 2 contacts and is arranged on one side or both sides of the semiconductor element 1. It should be noted that semiconductor elements, cooling bodies, and insulating spacers of different types (specifications and dimensions) are denoted by the same reference numerals 1, 2, and 3 for convenience of explanation as being functionally the same.

【0003】また、圧接・固定はバネ力によるものであ
る。つまり、半導体素子1および冷却体2などの積層ユ
ニットを左右から挟む形で、固定基板4に立設された2
個の支柱5の上端面に、バー19を架け渡し、このバー
19の中央部に押圧ネジ18を設け、その先端にコイル
バネ17を挿入する。このコイルバネ17の下端面が上
側のスペーサ3の上面と接触し、押圧ネジ18の回転に
よって全体に圧接力が加えられる。ここで、半導体素子
1と冷却体2の間に熱的・電気的な良導性をもたせるた
め、接触面の適正な平行度・平坦度・表面粗さや、接触
面の清浄化、軸線のずれ防止、伝熱性・導電性をもつ粘
着性コンパウンド塗布などの処置をおこなうとともに、
半導体素子の機械的強度をも考慮した適用圧接力の推奨
値(上限・下限の範囲)が定めてある。したがって、こ
こで使用される半導体素子1と冷却体2の種類に応じて
圧接力が推奨値になるように、バネ17の変位が押圧ネ
ジ18を介して調整される。
Further, the pressure contact and the fixing are based on the spring force. That is, the two stacked units such as the semiconductor element 1 and the cooling body 2 are vertically arranged on the fixed substrate 4 so as to sandwich the stacked unit from the left and right.
A bar 19 is bridged over the upper end surface of each column 5, a pressing screw 18 is provided at the center of the bar 19, and a coil spring 17 is inserted at the tip thereof. The lower end surface of the coil spring 17 comes into contact with the upper surface of the upper spacer 3, and a pressing force is applied to the whole by rotation of the pressing screw 18. Here, in order to have good thermal and electrical conductivity between the semiconductor element 1 and the cooling body 2, proper parallelism, flatness, and surface roughness of the contact surface, cleaning of the contact surface, and misalignment of the axis line. Take preventive measures, such as applying adhesive compound with heat conductivity and conductivity, and
Recommended values (upper limit and lower limit) of the applied pressure contact force are set in consideration of the mechanical strength of the semiconductor element. Therefore, the displacement of the spring 17 is adjusted via the pressing screw 18 so that the pressure contact force has a recommended value according to the types of the semiconductor element 1 and the cooling body 2 used here.

【0004】なお、ここには図示しないが、半導体素子
および冷却体の積層ユニットが、半導体素子の種類に応
じて二つの異なった圧接力を必要とするようになったと
き、固定基板の上面側に、先に述べたと同様な積層ユニ
ットの二つを並列的に直立配置し、それぞれの積層ユニ
ットに別々の圧接力を加え得る構造にする。
Although not shown here, when the laminated unit of the semiconductor element and the cooling body requires two different pressure contact forces depending on the type of the semiconductor element, the upper surface side of the fixed substrate. In addition, two of the same laminated units as described above are arranged in parallel in an upright position so that a separate pressure contact force can be applied to each laminated unit.

【0005】[0005]

【発明が解決しようとする課題】従来例では、積層ユニ
ットが二つ必要なときには、それぞれを固定基板の上面
側に並べて直立配置し、それぞれに適正な圧接力を加え
る構造をとったから、横方向寸法が大きくなり、装置に
組み込むとき不便になる恐れがあった。そこで、半導体
素子および冷却体を、全体的に装置に組み込みやすい構
造体にしたいという要請がある。
In the conventional example, when two laminated units are required, they are arranged upright on the upper surface of the fixed substrate and an appropriate pressure contact force is applied to each of them. The size is large, which may be inconvenient when incorporated into the device. Therefore, there is a demand for a structure in which the semiconductor element and the cooling body are wholly easily incorporated into the device.

【0006】この発明が解決すべき課題は、従来の技術
がもつ以上の問題点を解消し、半導体素子および導通性
をもつ冷却体を積層・圧接して、装置に容易に組み込み
できるようにした半導体素子の固定構造体を提供するこ
とにある。
The problem to be solved by the present invention is to solve the above-mentioned problems of the prior art and to make it possible to easily assemble semiconductor devices and conductive cooling bodies by laminating and pressing them into a device. It is to provide a fixed structure for a semiconductor device.

【0007】[0007]

【課題を解決するための手段】この発明は、平形の固定
基板に対しその各側で、一または二以上の平形の半導体
素子およびその各半導体素子の少なくとも片側と接触す
る導通性をもつ平形の冷却体を同軸に積層し、各半導体
素子に係る共通な圧接推奨値に応じた力によって圧接・
固定する、という構成である。
DISCLOSURE OF THE INVENTION The present invention is directed to a flat fixed substrate having one or more flat semiconductor elements on each side thereof and a conductive flat type contacting at least one side of each semiconductor element. The cooling bodies are stacked coaxially, and pressure welding is performed by the force according to the common recommended pressure welding value for each semiconductor element.
It is fixed.

【0008】また、この発明は、圧接・固定に係る手段
が、固定基板の各側に立設された支柱に固定・支持され
る板バネであること、または、各側の支柱の板バネより
外側に位置する合計2箇所において取付枠に固定・保持
されることが好ましい。
Further, according to the present invention, the means for press-contacting / fixing is a leaf spring fixed / supported by a pillar standing on each side of the fixed substrate, or a leaf spring of the pillar on each side. It is preferable to be fixed and held by the mounting frame at a total of two locations located outside.

【0009】[0009]

【作用】この発明では、固定基板に対しその各側で、半
導体素子および冷却体が同軸に積層され、各半導体素子
に係る共通な圧接推奨値に応じた力で圧接・固定される
から、半導体素子は機械的に十分な強度が保たれ、冷却
体との間で熱的・電気的な良導性が確保されるととも
に、全体が棒状のユニットになる。
According to the present invention, the semiconductor element and the cooling body are coaxially laminated on each side of the fixed substrate, and the semiconductor element and the cooling element are pressure-contacted and fixed with a force according to the common recommended pressure-contact value for each semiconductor element. The element has a mechanically sufficient strength to ensure good thermal and electrical conductivity with the cooling body, and also becomes a rod-shaped unit as a whole.

【0010】[0010]

【実施例】この発明に係る半導体素子の固定構造体の実
施例について、以下に図を参照しながら説明する。図1
は基本的な構成を示す第1実施例の側面図である。図1
において、平形の固定基板4の両側にそれぞれ、半導体
素子1A,1Bを要部とする積層ユニットが圧接・固定
される。なお各部品には、それが左側,右側に属するの
に応じ、部品自体を示す共通な数字符号の後にそれぞれ
A,Bを付加した。固定基板4の左側について代表的に
述べると、固定基板4の左側面に接して絶縁スペーサ3
A、導通性をもつ(つまり導体兼用)冷却体2A、半導
体素子1A、冷却体2A、絶縁スペーサ3Aをその順に
同軸に積層する。また、端部にナット7A用のネジが切
られた2個の支柱5Aが、この積層ユニットの上下両側
に位置するように固定基板4の左側面に立設される。こ
の支柱5Aの左端部間に架け渡された板バネ6Aの中央
部で、ナット7Aによる締めつけ度合いに応じて積層ユ
ニットに圧接力を加え、これを固定基板4に対して圧接
・固定する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a fixed structure for a semiconductor device according to the present invention will be described below with reference to the drawings. FIG.
FIG. 3 is a side view of the first embodiment showing the basic configuration. FIG.
In the above, the laminated units having the semiconductor elements 1A and 1B as main parts are pressed and fixed to both sides of the flat fixed substrate 4, respectively. It should be noted that A and B are added to the respective parts after the common numeral symbols indicating the parts themselves, as they belong to the left side and the right side. The left side of the fixed substrate 4 will be described as a typical example.
A, a conductive cooling body 2A (that is, also serving as a conductor), a semiconductor element 1A, a cooling body 2A, and an insulating spacer 3A are coaxially laminated in that order. Two columns 5A having nuts 7A threaded at their ends are erected on the left side surface of the fixed substrate 4 so as to be located on the upper and lower sides of this laminated unit. At the central portion of the leaf spring 6A spanned between the left ends of the columns 5A, a pressure contact force is applied to the laminated unit according to the degree of tightening by the nut 7A, and this is pressure contacted / fixed to the fixed substrate 4.

【0011】この圧接力は、先に述べたように、一つに
は半導体素子1Aと両側の各冷却体2Aとの間に熱的・
電気的な良導性をもたせるために、二つには半導体素子
1Aの機械的強度を保つために、ナット7Aの締めつけ
調整によって、推奨値になるように定められる。言い換
えれば、左側の積層ユニットに対する圧接力と、右側の
それとは一般には異なる。また、この第1実施例では、
一つの半導体素子1Aを両側から二つの冷却体2Aで挟
む形をとっているが、半導体素子1Aの発熱量と冷却体
2Aの冷却能力の関係によっては、左側か右側かのいず
れか一つの冷却体2Aだけで十分なこともある。
As described above, this pressure contact force is due to the heat generated between the semiconductor element 1A and the cooling bodies 2A on both sides.
In order to provide good electrical conductivity, it is determined to have a recommended value by adjusting the tightening of the nut 7A in order to maintain the mechanical strength of the semiconductor element 1A. In other words, the pressure contact force on the laminated unit on the left side and that on the right side are generally different. In addition, in this first embodiment,
Although one semiconductor element 1A is sandwiched from both sides by two cooling bodies 2A, either one of the left side and the right side is cooled depending on the relationship between the heat generation amount of the semiconductor element 1A and the cooling capacity of the cooling body 2A. Sometimes body 2A alone is sufficient.

【0012】図2は実際的な配置をとる第2実施例の側
面図である。図2において、中央よりやや右寄りに位置
する固定基板4に対し、左右の各側に半導体素子、冷却
体その他の部材の積層ユニットを、各板バネ6A,6B
を介して対応する推奨値の圧接力で固定する。積層ユニ
ットの構成は第1実施例と本質的に同じである。すなわ
ち、左側について言えば、発熱する半導体素子1Aは4
個あり、左側の1個を除いて両側に冷却体2Aが配され
る。左側の1個だけは、発熱量が比較的少ないから、そ
の左側だけに冷却体2Aが配される。また、発熱しない
半導体素子9Aの2個は、導体8Aの外周面にネジ込む
形で取り付けられる。また、右側について言えば、発熱
する半導体素子1Bは2個あり、いずれも両側に冷却体
2Bが配される。また、発熱しない半導体素子9Bの1
個は、導体8Bの外周面にネジ込む形で取り付けられ
る。ここで留意すべき点は、固定基板4の左側面と右側
面にそれぞれ立設された各支柱5A,5Bは、それぞれ
の端部近くで各板バネ6A,6Bを対応するナット7
A,7Bを介して位置可調整に保持するとともに、各板
バネ6A,6Bより外側に位置する両側端部で、電力装
置側に固定された、板状部材をU字形に形成して作った
取付枠10の各脚部に、ナット7A,7Bの2個の組で
挟む形で取り付けられる。
FIG. 2 is a side view of the second embodiment having a practical arrangement. In FIG. 2, with respect to the fixed substrate 4 located slightly to the right of the center, a laminated unit of semiconductor elements, a cooling body and other members is provided on each of the left and right sides and the leaf springs 6A and 6B.
Fix with the corresponding recommended pressure contact force via. The structure of the laminated unit is essentially the same as that of the first embodiment. That is, in terms of the left side, the number of semiconductor elements 1A that generate heat is 4
There is one, and the cooling bodies 2A are arranged on both sides except one on the left side. Since only one on the left side has a relatively small amount of heat generation, the cooling body 2A is arranged only on the left side. The two semiconductor elements 9A that do not generate heat are attached to the outer peripheral surface of the conductor 8A by screwing. On the right side, there are two semiconductor elements 1B that generate heat, and the cooling bodies 2B are arranged on both sides of each of them. In addition, 1 of the semiconductor element 9B that does not generate heat
The individual pieces are attached by screwing onto the outer peripheral surface of the conductor 8B. It should be noted here that the columns 5A and 5B, which are erected on the left side surface and the right side surface of the fixed substrate 4, respectively, have the leaf springs 6A and 6B in the vicinity of the respective end portions thereof and the corresponding nuts 7.
It was made by forming a U-shaped plate-shaped member, which is held at the position adjustable via A and 7B, and is fixed to the power device side at both side ends located outside each leaf spring 6A and 6B. It is attached to each leg of the mounting frame 10 so as to be sandwiched by two sets of nuts 7A and 7B.

【0013】[0013]

【発明の効果】この発明によれば、次のような優れた効
果が期待できる。 (1) 固定基板に対しその各側で、半導体素子および冷却
体が同軸に積層されて圧接・固定されるから、半導体素
子および冷却体の積層ユニットの二つが、固定基板を挟
む形で一つの棒状の構造をとることができる。したがっ
て、一般に装置に組み込みやすい。 (2) 両側の各圧接力が対応する各半導体素子に共通な推
奨値をとるから、各側において半導体素子は機械的に十
分な強度が保たれるとともに、冷却体との間で熱的・電
気的な良導性が確保される。 (3) 圧接・固定に係る手段が固定基板の支柱に固定・支
持される板バネであるから、構造的簡素化を支援する。 (4) 構造体は一つのユニットとして、各側の支柱の板バ
ネより外側に位置する合計2箇所で、取付枠に対して確
実かつ容易に固定・保持することができるから、装置へ
の組み込みやすさを支援する。
According to the present invention, the following excellent effects can be expected. (1) On each side of the fixed substrate, the semiconductor element and the cooling body are coaxially stacked and pressed and fixed, so that two of the laminated units of the semiconductor element and the cooling body form one fixed substrate sandwiching the fixed substrate. It can have a rod-shaped structure. Therefore, it is generally easy to incorporate in the device. (2) Since each pressure contact force on both sides has a recommended value common to each corresponding semiconductor element, the semiconductor element on each side has mechanically sufficient strength, and the thermal Electrical conductivity is secured. (3) Since the means for pressure contact / fixing is a leaf spring fixed / supported by the column of the fixed substrate, structural simplification is supported. (4) Since the structure can be securely and easily fixed and held to the mounting frame at a total of two locations located outside the leaf springs of the columns on each side as one unit, it can be incorporated into the device. Support ease.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明に係る第1実施例の側面図FIG. 1 is a side view of a first embodiment according to the present invention.

【図2】第2実施例の側面図FIG. 2 is a side view of the second embodiment.

【図3】従来例に関し、(a) は側面図、(b) は平面図FIG. 3A is a side view and FIG. 3B is a plan view of a conventional example.

【符号の説明】[Explanation of symbols]

1A,1B 半導体素子 2A,2B 冷却体 3A,3B 絶縁スペーサ 4 固定基板 5A,5B 支柱 6A,6B 板バネ 7A,7B ナット 8A,8B 導体 9A,9B 半導体素子 10 取付枠 1A, 1B Semiconductor element 2A, 2B Cooling body 3A, 3B Insulation spacer 4 Fixed substrate 5A, 5B Post 6A, 6B Leaf spring 7A, 7B Nut 8A, 8B Conductor 9A, 9B Semiconductor element 10 Mounting frame

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】平形の固定基板に対しその各側で、一また
は二以上の平形の半導体素子およびその各半導体素子の
少なくとも片側と接触する導通性をもつ平形の冷却体を
同軸に積層し、各半導体素子に係る共通な圧接推奨値に
応じた力によって圧接・固定することを特徴とする半導
体素子の固定構造体。
1. A flat fixed substrate is coaxially laminated on each side thereof with one or more flat semiconductor elements and a flat cooling body having electrical conductivity in contact with at least one side of each semiconductor element. A fixed structure for a semiconductor element, which is press-contacted and fixed by a force according to a common recommended pressure-contact value for each semiconductor element.
【請求項2】請求項1に記載の固定構造体において、圧
接・固定に係る手段は、固定基板の各側に立設された支
柱に固定・支持される板バネであることを特徴とする半
導体素子の固定構造体。
2. The fixed structure according to claim 1, wherein the means for press-contacting / fixing is a leaf spring fixed / supported by a pillar standing on each side of the fixed substrate. Fixed structure of semiconductor device.
【請求項3】請求項2に記載の固定構造体において、各
側の支柱の板バネより外側に位置する合計2箇所におい
て取付枠に固定・保持されることを特徴とする半導体素
子の固定構造体。
3. The fixing structure for a semiconductor element according to claim 2, wherein the supporting structure is fixed and held by a mounting frame at a total of two positions outside the leaf springs of the columns on each side. body.
JP13484795A 1995-06-01 1995-06-01 Fixing structure of semiconductor element Pending JPH08330484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13484795A JPH08330484A (en) 1995-06-01 1995-06-01 Fixing structure of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13484795A JPH08330484A (en) 1995-06-01 1995-06-01 Fixing structure of semiconductor element

Publications (1)

Publication Number Publication Date
JPH08330484A true JPH08330484A (en) 1996-12-13

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JP13484795A Pending JPH08330484A (en) 1995-06-01 1995-06-01 Fixing structure of semiconductor element

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Country Link
JP (1) JPH08330484A (en)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
JP2010016402A (en) * 2009-10-07 2010-01-21 Denso Corp Coolant cooling type both sides cooling semiconductor device
WO2016174695A1 (en) * 2015-04-27 2016-11-03 東芝三菱電機産業システム株式会社 Pressure-contact type semiconductor element stack

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010016402A (en) * 2009-10-07 2010-01-21 Denso Corp Coolant cooling type both sides cooling semiconductor device
WO2016174695A1 (en) * 2015-04-27 2016-11-03 東芝三菱電機産業システム株式会社 Pressure-contact type semiconductor element stack
JPWO2016174695A1 (en) * 2015-04-27 2017-10-26 東芝三菱電機産業システム株式会社 Stack for pressure contact type semiconductor device
CN107851642A (en) * 2015-04-27 2018-03-27 东芝三菱电机产业系统株式会社 Crimp type semiconductor devices stacks
AU2015393305B2 (en) * 2015-04-27 2018-11-15 Toshiba Energy Systems & Solutions Corporation Pressure-contact type semiconductor element stack
US10283478B2 (en) 2015-04-27 2019-05-07 Toshiba Mitsubishi-Electric Industrial Systems Corporation Pressure contact type semiconductor device stack
CN107851642B (en) * 2015-04-27 2020-07-10 东芝三菱电机产业系统株式会社 Crimping type semiconductor device stack

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