JPH08327402A - Rotary encoder - Google Patents

Rotary encoder

Info

Publication number
JPH08327402A
JPH08327402A JP15720695A JP15720695A JPH08327402A JP H08327402 A JPH08327402 A JP H08327402A JP 15720695 A JP15720695 A JP 15720695A JP 15720695 A JP15720695 A JP 15720695A JP H08327402 A JPH08327402 A JP H08327402A
Authority
JP
Japan
Prior art keywords
board
electronic
rotary encoder
substrate
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15720695A
Other languages
Japanese (ja)
Inventor
Akira Ishizuka
公 石塚
Satoru Ishii
哲 石井
Hidefumi Kuroki
英文 黒木
Norito Watanabe
範人 渡辺
Takayuki Kadoshima
孝幸 門島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15720695A priority Critical patent/JPH08327402A/en
Publication of JPH08327402A publication Critical patent/JPH08327402A/en
Pending legal-status Critical Current

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  • Optical Transform (AREA)

Abstract

PURPOSE: To obtain a rotary encoder which is miniaturized, whose diameter is made small and which can be assembled easily by a method wherein respective electronic boards for illumination, light receiving and signal processing are constituted integrally and they are folded so as to be housed inside one enclosure. CONSTITUTION: A light source means LGT and a collimating lens L are mounted on an electronic board CB1 which has been fixed spatially. A luminous flux from the means LGT is changed into a parallel luminous flux by the lens L so as to be shone at a scale disk D. A light receiving means PD which is mounted on an electronic board CB2 detects a luminous flux via a diffracting grating on the disk D and via a slit grating plate SLT. In addition, a signal processing circuit SP which has been mounted on an electronic board CB3 processes a phase modulation signal from the means PD, and it detects rotation information on the disk D (a shaft ES). At this time, the boards CB1 , CB2 , CB3 are constituted of one integrated board, and a composite board in which a reinforcement member has been pasted on a region, to be fixed rigidly, as a region used to install respective elements in the board is farmed. Then, the board is folded so as to be housed and held inside an enclosure Ha .

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はロータリーエンコーダに
関し、特にモータ等の相対回転物体の回転軸に放射状の
回折格子を設けたスケールディスク(回転スケール)を
取着し、該スケールディスクに光源手段からの光束を照
射し、該回折格子から生じる位相変調信号光(強度変調
信号光)を検出することにより該スケールディスク、即
ち回転軸の回転位置、回転位置ずれ量、回転位置ずれ方
向、回転速度、回転加速度等の回転情報を検出するロー
タリーエンコーダに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary encoder, and more particularly, to a scale disk (rotary scale) having a radial diffraction grating provided on the rotation axis of a relative rotating object such as a motor, and the scale disk from a light source means. Of the scale disc, that is, the rotation position of the rotation shaft, the rotation position deviation amount, the rotation position deviation direction, the rotation speed, and the phase modulation signal light (intensity modulation signal light) generated from the diffraction grating. The present invention relates to a rotary encoder that detects rotation information such as rotation acceleration.

【0002】[0002]

【従来の技術】従来よりモータ等の回転機構の回転情報
を高精度に検出する装置の1つとしてロータリーエンコ
ーダがある。このうち格子干渉方式を用いたロータリー
エンコーダは高精度な回転情報を得ることができる為に
多くの分野で利用されている。
2. Description of the Related Art Conventionally, there is a rotary encoder as one of the devices for detecting the rotation information of a rotating mechanism such as a motor with high accuracy. Among them, the rotary encoder using the grating interference method is used in many fields because it can obtain highly accurate rotation information.

【0003】このロータリーエンコーダでは円板状の円
周上に透光部と遮光部の格子模様の回折格子(放射状回
折格子)を複数個、周期的に形成したスケールディスク
を回転軸の一端に取着し、該回転軸の他端を回転機構
(モータ)の回転軸に取着している。そして該放射状回
折格子に光源手段から光束を照射し、該回折格子で回折
された位相変調信号光を検出手段で検出し、該検出手段
からの信号を電気処理回路で処理してスケールディス
ク、即ち回転機構の回転情報を求めている。
In this rotary encoder, a plurality of diffraction gratings (radial diffraction gratings) having a grid pattern of a light transmitting portion and a light shielding portion are periodically formed on a disk-shaped circumference, and a scale disk is periodically formed at one end of a rotary shaft. And the other end of the rotating shaft is attached to the rotating shaft of the rotating mechanism (motor). Then, the radial diffraction grating is irradiated with a light beam from the light source means, the phase-modulated signal light diffracted by the diffraction grating is detected by the detection means, and the signal from the detection means is processed by the electric processing circuit, that is, the scale disk, The rotation information of the rotating mechanism is sought.

【0004】[0004]

【発明が解決しようとする課題】最近、回転機構の小型
化に伴ってロータリーエンコーダの小型化及び小径化が
要望されている。従来のロータリーエンコーダでは、複
数個の電子基板にそれぞれ発光素子、受光素子、回路部
品、コネクタ、ケーブル類の各要素を配分して実装、接
続して組み立てていた。この為、組み立てが非常に困難
になり、また基板相互の接続のためのハンダつけ端子や
コネクタの大きさによって小型化を図るのが難しいとい
う問題点があった。
Recently, along with the miniaturization of the rotating mechanism, there has been a demand for miniaturization and diameter reduction of the rotary encoder. In a conventional rotary encoder, light emitting elements, light receiving elements, circuit components, connectors, and cables are distributed and mounted on a plurality of electronic boards, respectively, and assembled. Therefore, there is a problem that the assembly becomes very difficult, and it is difficult to reduce the size depending on the size of the soldering terminal and the connector for connecting the boards to each other.

【0005】本発明はロータリーエンコーダとして必要
な各要素を複数の電子基板に適切に配設すると共に該複
数の電子基板を適切なる材料で一体的に構成して1つの
筐体内に折り畳んで収納することにより装置全体の小型
化及び小径化を図りつつ組み立て易いロータリーエンコ
ーダの提供を目的とする。
According to the present invention, each element required as a rotary encoder is appropriately arranged on a plurality of electronic boards, and the plurality of electronic boards are integrally formed of an appropriate material and folded and housed in one housing. Accordingly, it is an object of the present invention to provide a rotary encoder which is easy to assemble while achieving downsizing and diameter reduction of the entire device.

【0006】[0006]

【課題を解決するための手段】本発明のロータリーエン
コーダは、 (1−1)空間に固定した第1電子基板に実装した光源
手段からの光束を回転スケールに照射し、該回転スケー
ルからの光束を固定スケールを介して空間に固定した第
2電子基板に実装した受光手段で受光し、該受光手段か
らの信号を第3電子基板に実装した信号処理回路で処理
して、該回転スケールの回転情報を得る際、該第1,第
2,第3電子基板を一体化した基板より構成し、該一体
化した基板を少なくとも一部折り畳んで1つの筐体内に
収納保持していることを特徴としている。
A rotary encoder according to the present invention comprises: (1-1) irradiating a rotating scale with a light beam from a light source means mounted on a first electronic substrate fixed in a space, and outputting a light beam from the rotating scale. Is received by the light receiving means mounted on the second electronic board fixed in the space via the fixed scale, and the signal from the light receiving means is processed by the signal processing circuit mounted on the third electronic board to rotate the rotary scale. When obtaining information, the first, second, and third electronic boards are configured by an integrated board, and the integrated board is at least partially folded and housed and held in one housing. There is.

【0007】特に、(1−1−1)前記一体化した基板
をフレキシブルプリント基板をベースにし、固定領域に
補強部材を張合した複合基板より構成したこと、(1−
1−2)前記一体化した基板をリジットプリント基板を
ベースにし、接続領域にフレキシブルプリント基板を張
合した複合基板より構成したこと、(1−1−3)前記
一体化した基板をリジットプリント基板をベースにし、
接続する部分同士を金属ピンにて固定し、電気的接続と
固定とを同時に行った複合基板より構成したこと等を特
徴としている。
In particular, (1-1-1) the integrated substrate is a composite substrate in which a flexible printed circuit board is used as a base and a reinforcing member is attached to a fixing region, (1-
1-2) The integrated board is a rigid printed board as a base, and a flexible printed board is bonded to a connection area of the composite board. (1-1-3) The integrated board is a rigid printed board. Based on
It is characterized in that it is constituted by a composite substrate in which the connecting portions are fixed with metal pins, and electrical connection and fixing are performed at the same time.

【0008】[0008]

【実施例】図1は本発明の実施例1の要部断面図、図2
は図1の一部分を抽出した要部斜視図である。
1 is a cross-sectional view of the essential parts of Embodiment 1 of the present invention, and FIG.
FIG. 2 is a perspective view of a main part of which a part of FIG. 1 is extracted.

【0009】図中、Hはロータリーエンコーダ(エンコ
ーダ)である。HaはロータリーエンコーダHの各要素
を包含する筐体である。Dはスケールディスク(回転ス
ーケル)であり、その円板上の円周上には透光部と遮光
部の格子模様の回折格子、又は透過型の凹凸部より成る
位相差の回折格子(放射状回折格子)を複数個、所定の
周期で放射状に配列している。スケールディスクDはエ
ンコーダHの回転軸ESの一端の取付部に取付けられて
いる。
In the figure, H is a rotary encoder. Ha is a housing containing each element of the rotary encoder H. D is a scale disk (rotary squelch), and a diffraction grating with a grating pattern of a light-transmitting portion and a light-shielding portion or a phase-diffraction diffraction grating (radial diffraction) formed on the circumference of the disc. A plurality of grids are radially arranged at a predetermined cycle. The scale disk D is attached to an attachment portion at one end of the rotary shaft ES of the encoder H.

【0010】LGTは光源手段であり、例えばLEDや
半導体レーザ等から成っている。Lはコリメーターレン
ズであり、光源手段LGTからの光束を平行光束として
いる。光源手段LGTとコリメーターレンズLは空間的
に固定した電子基板CB1に実装している。
The LGT is a light source means, and is composed of, for example, an LED or a semiconductor laser. L is a collimator lens, which collimates the light flux from the light source means LGT. The light source means LGT and the collimator lens L are mounted on the electronic board CB1 which is spatially fixed.

【0011】光源手段Lからの光束をコリメーターレン
ズで平行光束としてスケールディスクDを照射してい
る。SLTはスリット格子板(固定スケール)、PDは
受光手段(検出手段)であり、光源手段Lからの光束の
うちスケールディスクDの回折格子とスリット格子板S
LTを介した光束を検出している。受光手段PDとスリ
ット格子板SLTは空間的に固定した電子基板CB2に
実装している。SPは信号処理回路であり、電子基板C
B3に実装しており、受光手段PDからの信号(位相変
調信号)を処理してスケールディスクD(回転軸ES)
の回転情報を検出している。
The collimator lens irradiates the scale disc D with a light beam from the light source means L as a parallel light beam. SLT is a slit grating plate (fixed scale), PD is a light receiving means (detecting means), and among the light flux from the light source means L, the diffraction grating of the scale disk D and the slit grating plate S are included.
The light flux passing through the LT is detected. The light receiving means PD and the slit grid plate SLT are mounted on an electronic board CB2 which is spatially fixed. SP is a signal processing circuit, and electronic board C
It is mounted on B3 and processes a signal (phase modulation signal) from the light receiving means PD to process the scale disk D (rotation axis ES).
The rotation information of is detected.

【0012】本実施例では電子基板CB1,CB2,C
B3を一体化した1つの基板CBより構成している。こ
のとき該基板CBを、例えばフレキシブルプリント基板
をベースにし、基板CBのうち各要素を設ける領域とな
る硬く固定したい領域に補強部材を張合した複合基板よ
り構成している。そして基板CBを折り畳んで(本実施
例ではS字状に折り畳んで)筐体Ha内に収納保持して
いる。
In this embodiment, electronic boards CB1, CB2, C
It is composed of one substrate CB in which B3 is integrated. At this time, the substrate CB is composed of, for example, a flexible printed substrate as a base, and a composite substrate in which a reinforcing member is attached to a region of the substrate CB where the respective elements are to be rigidly fixed and fixed. Then, the board CB is folded (folded into an S shape in this embodiment) and stored and held in the housing Ha.

【0013】このように本実施例では、スケールディス
クDを挟んで両側にフレキシブルプリント板より成る電
子基板CB1,CB2を対向配置し、このうち電子基板
CB1に光源手段及びコリメーターレンズLを、また電
子基板CB2に受光手段PD及びスリット格子板SLT
を、各々実装、固定している。また電子基板CB3に2
値化回路やラインドライバー等の信号処理回路を実装し
ている。
As described above, in this embodiment, the electronic boards CB1 and CB2 made of flexible printed boards are arranged on both sides of the scale disk D so as to face each other, of which the electronic board CB1 is provided with the light source means and the collimator lens L. The electronic substrate CB2 is provided with a light receiving means PD and a slit grating plate SLT.
Are mounted and fixed respectively. 2 on the electronic board CB3
A signal processing circuit such as a digitization circuit and a line driver is mounted.

【0014】そして電子基板CB1と電子基板CB2の
間には光源駆動用配線を、電子基板CB2と電子基板C
B3の間には信号接続線及び電力供給線をフレキシブル
基板にて一体的に構成している。また電子基板CB1の
光源手段LGTと電子基板CB2の受光手段は1つのフ
レキシブル基板の同一面上に実装している。
Light source driving wirings are provided between the electronic boards CB1 and CB2, and the electronic boards CB2 and C are provided.
Between B3, the signal connection line and the power supply line are integrally configured by a flexible substrate. The light source means LGT of the electronic board CB1 and the light receiving means of the electronic board CB2 are mounted on the same surface of one flexible board.

【0015】本実施例では以上のように各要素を構成す
ることにより、小型、小径、そして組み立て易いロータ
リーエンコーダを得ている。
In this embodiment, by constructing each element as described above, a rotary encoder having a small size, a small diameter and easy to assemble is obtained.

【0016】図3は本発明の実施例2の要部断面図であ
る。図中、図1,図2で示した要素と同一要素には同符
号を付している。
FIG. 3 is a sectional view of the essential portions of Embodiment 2 of the present invention. In the figure, the same elements as those shown in FIGS. 1 and 2 are designated by the same reference numerals.

【0017】本実施例ではスケールデイィスクDを挟ん
で両側にエポキシプリント板より成る電子基板CB1,
CB2を対向配置し、このうち電子基板CB1に光源手
段及びコリメーターレンズLを、また電子基板CB2に
受光手段PD及びスリット格子板SLTを、各々実装、
固定している。また電子基板CB3に2値化回路やライ
ンドライバー等の信号処理回路を実装している。
In this embodiment, an electronic board CB1 made of an epoxy printed board on both sides of the scale disk D is provided.
CB2 is arranged to face each other, of which the light source means and the collimator lens L are mounted on the electronic board CB1, and the light receiving means PD and the slit grating plate SLT are mounted on the electronic board CB2.
It is fixed. Further, a signal processing circuit such as a binarization circuit and a line driver is mounted on the electronic board CB3.

【0018】そして電子基板CB1と電子基板CB2の
間には光源駆動用配線を、電子基板CB2と電子基板C
B3の間には信号接続線及び電力供給線をフレキシブル
基板にて接続して一体的に構成している。また電子基板
CB1の発光手段LGTと電子基板CB2の受光手段P
Dは一体化した基板の同一面上に実装している。
Light source driving wirings are provided between the electronic boards CB1 and CB2, and electronic board CB2 and electronic board C are provided.
Between B3, a signal connection line and a power supply line are connected by a flexible substrate to be integrally configured. Further, the light emitting means LGT of the electronic board CB1 and the light receiving means P of the electronic board CB2 are provided.
D is mounted on the same surface of the integrated substrate.

【0019】図4,図5は本発明の実施例3の要部断面
図である。図中、図1,図2で示した要素と同一要素に
は同符号を付している。
FIG. 4 and FIG. 5 are sectional views of the essential portions of Embodiment 3 of the present invention. In the figure, the same elements as those shown in FIGS. 1 and 2 are designated by the same reference numerals.

【0020】本実施例ではスケールデイィスクDを挟ん
で両側にエポキシプリント板より成る電子基板CB1,
CB2を対向配置し、このうち電子基板CB1に光源手
段及びコリメーターレンズLを、また電子基板CB2に
受光手段PD及びスリット格子板SLTを、各々実装、
固定している。また電子基板CB3に2値化回路やライ
ンドライバー等の信号処理回路を実装している。
In this embodiment, an electronic board CB1 made of epoxy printed boards on both sides of the scale disk D is provided.
CB2 is arranged to face each other, of which the light source means and the collimator lens L are mounted on the electronic board CB1, and the light receiving means PD and the slit grating plate SLT are mounted on the electronic board CB2.
It is fixed. Further, a signal processing circuit such as a binarization circuit and a line driver is mounted on the electronic board CB3.

【0021】そして電子基板CB1と電子基板CB2の
間には光源駆動用配線を、電子基板CB2と電子基板C
B3の間には信号接続線及び電力供給線を複数個の金属
ピンPNで半田接続し、一体的に構成している。
Light source driving wiring is provided between the electronic boards CB1 and CB2, and the electronic boards CB2 and C are connected to each other.
A signal connection line and a power supply line are solder-connected with a plurality of metal pins PN between B3 to integrally form them.

【0022】尚、本発明の各実施例においては、次の如
く各要素を変更して構成しても良い。 (イ)一体化されたフレキシブル基板の展開形状や折り
畳み方法を変更すること (ロ)複数の金属ピンをアレイ化して、信号、電力等を
並列して伝送すること (ハ)折り畳まれたフレキシブル基板を樹脂で相互に固
定すること。
In each embodiment of the present invention, each element may be modified as follows. (B) Changing the unfolded shape and folding method of the integrated flexible board (b) Arraying multiple metal pins to transmit signals, power, etc. in parallel (c) Folded flexible board Fix each other with resin.

【0023】[0023]

【発明の効果】本発明によれば以上のように、ロータリ
ーエンコーダとして必要な各要素を複数の電子基板に適
切に配設すると共に該複数の電子基板を適切なる材料で
一体的に構成して1つの筐体内に少なくとも一部折り畳
んで収納することにより装置全体の小型化及び小径化を
図りつつ組み立て易いロータリーエンコーダを達成する
ことができる。
As described above, according to the present invention, each element required as a rotary encoder is appropriately arranged on a plurality of electronic boards, and the plurality of electronic boards are integrally formed of a suitable material. By folding and storing at least a part in one housing, it is possible to achieve a rotary encoder that is easy to assemble while achieving downsizing and downsizing of the entire apparatus.

【0024】特に本発明によれば、3つの電子基板ユニ
ットの連結が省スペースに行えるようになり、小型、小
径なロータリーエンコーダが容易に組み立てることがで
きるという効果が得られる。
In particular, according to the present invention, it is possible to connect the three electronic board units in a space-saving manner, and it is possible to obtain an effect that a small-sized and small-diameter rotary encoder can be easily assembled.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の実施例1の要部断面図FIG. 1 is a sectional view of a main part of a first embodiment of the present invention.

【図2】 図1の一部分を抽出した要部斜視図FIG. 2 is a perspective view of a main part of which a part of FIG. 1 is extracted.

【図3】 本発明の実施例2の要部断面図FIG. 3 is a sectional view of an essential part of a second embodiment of the present invention.

【図4】 本発明の実施例3の要部断面図FIG. 4 is a cross-sectional view of the essential parts of Embodiment 3 of the present invention.

【図5】 本発明の実施例3の要部断面図FIG. 5 is a cross-sectional view of the essential parts of Embodiment 3 of the present invention.

【符号の説明】[Explanation of symbols]

H ロータリーエンコーダ Ha 筐体 LGT 光源手段 D スケールディスク CB1,CB2,CB3 電子基板 ES 回転軸 L コリメーターレンズ PD 受光手段 SP 信号処理回路 SLT スリット格子板 H rotary encoder Ha housing LGT light source means D scale disk CB1, CB2, CB3 electronic board ES rotation axis L collimator lens PD light receiving means SP signal processing circuit SLT slit grid plate

───────────────────────────────────────────────────── フロントページの続き (72)発明者 渡辺 範人 神奈川県川崎市中原区今井上町53番地 キ ヤノン株式会社小杉事業所内 (72)発明者 門島 孝幸 神奈川県川崎市中原区今井上町53番地 キ ヤノン株式会社小杉事業所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Norito Watanabe 53 Imaiue-cho, Nakahara-ku, Kawasaki-shi, Kanagawa Canon Inc., Kosugi Plant (72) Inventor Takayuki Kadoshima 53 Imaiue-cho, Nakahara-ku, Kawasaki-shi, Kanagawa Canon Inc. Kosugi Office

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 空間に固定した第1電子基板に実装した
光源手段からの光束を回転スケールに照射し、該回転ス
ケールからの光束を固定スケールを介して空間に固定し
た第2電子基板に実装した受光手段で受光し、該受光手
段からの信号を第3電子基板に実装した信号処理回路で
処理して、該回転スケールの回転情報を得る際、該第
1,第2,第3電子基板を一体化した基板より構成し、
該一体化した基板を少なくとも一部折り畳んで1つの筐
体内に収納保持していることを特徴とするロータリーエ
ンコーダ。
1. A rotary scale is irradiated with a light beam from a light source means mounted on a first electronic substrate fixed to a space, and a light beam from the rotary scale is mounted on a second electronic substrate fixed to the space via a fixed scale. The light receiving means receives the light and the signal from the light receiving means is processed by the signal processing circuit mounted on the third electronic board to obtain the rotation information of the rotary scale. Composed of an integrated substrate,
A rotary encoder, wherein at least a part of the integrated substrate is folded and housed and held in one housing.
【請求項2】 前記一体化した基板をフレキシブルプリ
ント基板をベースにし、固定領域に補強部材を張合した
複合基板より構成したことを特徴とする請求項1のロー
タリーエンコーダ。
2. The rotary encoder according to claim 1, wherein the integrated substrate is a composite substrate having a flexible printed circuit board as a base and a reinforcing member bonded to a fixed region.
【請求項3】 前記一体化した基板をリジットプリント
基板をベースにし、接続領域にフレキシブルプリント基
板を張合した複合基板より構成したことを特徴とする請
求項1のロータリーエンコーダ。
3. The rotary encoder according to claim 1, wherein the integrated board is a composite board in which a rigid printed board is used as a base and a flexible printed board is attached to a connection region.
【請求項4】 前記一体化した基板をリジットプリント
基板をベースにし、接続する部分同士を金属ピンにて固
定し、電気的接続と固定とを同時に行った複合基板より
構成したことを特徴とする請求項1のロータリーエンコ
ーダ。
4. The composite substrate, wherein the integrated substrate is a rigid printed circuit board as a base, and the connecting portions are fixed by metal pins, and electrical connection and fixing are simultaneously performed. The rotary encoder according to claim 1.
JP15720695A 1995-05-30 1995-05-30 Rotary encoder Pending JPH08327402A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15720695A JPH08327402A (en) 1995-05-30 1995-05-30 Rotary encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15720695A JPH08327402A (en) 1995-05-30 1995-05-30 Rotary encoder

Publications (1)

Publication Number Publication Date
JPH08327402A true JPH08327402A (en) 1996-12-13

Family

ID=15644532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15720695A Pending JPH08327402A (en) 1995-05-30 1995-05-30 Rotary encoder

Country Status (1)

Country Link
JP (1) JPH08327402A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009300240A (en) * 2008-06-12 2009-12-24 Microtech Laboratory Inc Rotary encoder
JP2016057127A (en) * 2014-09-08 2016-04-21 日本精工株式会社 Sensor and sensor manufacturing method
JP2017106934A (en) * 2017-03-16 2017-06-15 日本精工株式会社 Optical encoder unit
US10139252B2 (en) 2014-08-06 2018-11-27 Nsk Ltd. Optical sensor
CN109073412A (en) * 2016-02-25 2018-12-21 日本精工株式会社 The manufacturing method of sensor, the substrate of sensor and sensor
US10337892B2 (en) 2014-08-06 2019-07-02 Nsk Ltd. Sensor and method of manufacturing sensor
US10378932B2 (en) 2014-08-06 2019-08-13 Nsk Ltd. Sensor having generating and detecting units on a substrate with a curve or bent shape in a cylindrical housing and method of manufacturing sensor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009300240A (en) * 2008-06-12 2009-12-24 Microtech Laboratory Inc Rotary encoder
US10139252B2 (en) 2014-08-06 2018-11-27 Nsk Ltd. Optical sensor
US10337892B2 (en) 2014-08-06 2019-07-02 Nsk Ltd. Sensor and method of manufacturing sensor
US10378932B2 (en) 2014-08-06 2019-08-13 Nsk Ltd. Sensor having generating and detecting units on a substrate with a curve or bent shape in a cylindrical housing and method of manufacturing sensor
JP2016057127A (en) * 2014-09-08 2016-04-21 日本精工株式会社 Sensor and sensor manufacturing method
CN109073412A (en) * 2016-02-25 2018-12-21 日本精工株式会社 The manufacturing method of sensor, the substrate of sensor and sensor
US11231298B2 (en) 2016-02-25 2022-01-25 Nsk Ltd. Sensor, sensor substrate, and sensor manufacturing method
JP2017106934A (en) * 2017-03-16 2017-06-15 日本精工株式会社 Optical encoder unit

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