JP2006078376A - Optical displacement sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical displacement sensor used for various purposes. <P>SOLUTION: This optical displacement sensor is constituted of at least one sensor head 2 arranged with at least either of a light source 14 or a photodetector 13, and a substrate 1 for mounting the sensor head 2. The sensor head 2 has a plurality of electric connection terminals 54, the substrate 1 has at least one step difference 51 for attaching the sensor head 2, a wiring pattern 30 is formed in a bottom face of the step difference 51 to be connected electrically to the electric connection terminals 54 of the sensor head 2, and the plurality of electric connection terminals 54 in the sensor head 2 are connected to an external circuit via the wiring pattern 30 of the substrate 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical displacement sensor including a sensor head and a substrate on which the sensor head is mounted.

  Conventionally, an optical displacement sensor for detecting a displacement amount of a precision mechanism has been used. Japanese Patent Laid-Open No. 9-126815 discloses an example of such an optical displacement sensor, and FIG. 10 schematically shows the configuration thereof.

  10A and 10B, first, a case where the package 200 is used as a light emitting element package is considered. In this case, the mounting surface of the light emitting element 203 made of an LED, a semiconductor laser, or the like is disposed substantially parallel to the abutting surface 201a of the package body 201, and the light flux from the light emitting element 203 is projected by the light projecting lens 202. Irradiate a scale disk (not shown).

  Next, consider a case where the package 200 is used as a light receiving element package. In this case, the mounting surface of the light receiving element 203 such as a photodiode is disposed substantially parallel to the abutting surface 201 a of the package body 201, and the light receiving element 203 receives the light beam collected by the light receiving lens 202.

The abutting surface 201 a of the package 200 with the base substrate 207 protrudes from the soldering lead 204. Therefore, when the package 200 is mounted on the base substrate 207, the protruding abutting surface 201a is surely applied to the signal line copper foil pattern 205 and the dummy copper foil pattern 206 provided on the base substrate 207. Will be in touch. As a result, when the package 200 is mounted on the base substrate 207, the vertical variation is reduced and the package 200 is not inclined to both sides. Further, the light emitting element (light receiving element) 203 is disposed at a predetermined position with respect to the base substrate 207.
JP-A-9-126815

  The optical displacement sensor has various cable arrangements and fixing positions depending on the user, and it is necessary to design a package shape and a fixing member of the sensor head corresponding to the user. Also, depending on how it is used, sealing a small package may be insufficient and double sealing may be necessary.

  The present invention has been made paying attention to such a problem, and the object of the present invention is to use the sensor head in a variety of applications by changing the electric wiring pattern of the substrate by making the shape of the sensor head common. An optical displacement sensor is provided.

  To achieve the above object, according to a first aspect of the present invention, there is provided an optical system including at least one sensor head on which at least one of a light source and a photodetector is disposed, and a substrate on which the sensor head is mounted. In the displacement sensor, the sensor head has a plurality of electrical connection terminals, the substrate has at least one recess for mounting the sensor head, and the electrical connection terminals of the sensor head are provided on a bottom surface of the recess. And a plurality of electrical connection terminals of the sensor head are configured to be connectable to an external circuit via the wiring pattern of the substrate.

  According to a second aspect of the present invention, in the first aspect, the bottom surface and the side surface of the sensor head are surrounded by the substrate having the concave portion, and the upper surface of the sensor head emits light from the light source. Alternatively, it is covered with a cover member having a translucent portion so that the light received by the photodetector can be incident.

  According to a third aspect of the present invention, in the second aspect, the sensor head is hermetically sealed by the cover member and the substrate having the recess.

  According to a fourth aspect of the present invention, there is provided an optical displacement sensor including at least one sensor head on which at least one of a light source and a photodetector is disposed, and a substrate on which the sensor head is mounted. The head has a plurality of electrical connection terminals, and the substrate is arranged around the sensor head so that light from the light source can be emitted from the sensor head or light received by the photodetector can be incident on the substrate. The formed surrounding members are laminated or integrally formed, and the plurality of electrical connection terminals of the sensor head are configured to be connectable to an external circuit via the wiring pattern of the substrate.

  According to a fifth aspect of the present invention, in the fourth aspect, the bottom surface and the side surface of the sensor head are surrounded by the substrate and a surrounding member laminated or integrally formed on the substrate, and the sensor head. Is covered with a cover member having a translucent portion so that the light from the light source can be emitted or the light received by the photodetector can be incident.

  According to a sixth aspect of the present invention, in the fifth aspect, the sensor head is hermetically sealed by the substrate and a surrounding member laminated or integrally formed on the substrate.

  According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the substrate is configured to be capable of mounting a plurality of same or different types of sensor heads.

  An eighth aspect of the present invention is the sensor according to the seventh aspect, wherein the first sensor head of the plurality of sensor heads detects a one-dimensional displacement amount in a plane substantially parallel to the substrate. The second sensor head is a sensor that detects a one-dimensional displacement amount in a direction perpendicular to the first sensor head in a plane substantially parallel to the substrate.

  Further, a ninth aspect of the present invention is the scale according to the seventh aspect, wherein the first sensor head of the plurality of sensor heads is disposed substantially parallel to the substrate and facing the first sensor head. And the second sensor head is a sensor for detecting a reference position with respect to the displacement amount.

  A tenth aspect of the present invention is the scale according to the seventh aspect, wherein the first sensor head of the plurality of sensor heads is disposed substantially parallel to the substrate and facing the first sensor head. The second sensor head is a sensor that detects displacement in a direction substantially perpendicular to the substrate.

  An eleventh aspect of the present invention is the displacement sensor according to the tenth aspect, wherein the second sensor head is capable of detecting a distance perpendicular to the second sensor head and the substrate of the scale, A function of outputting an analog signal corresponding to a distance perpendicular to the second sensor head and the substrate of the scale, or a signal indicating whether the distance is within a specified range or out of a specified range;

  According to a twelfth aspect of the present invention, there is provided an optical displacement sensor comprising a sensor head on which at least one photodetector is disposed, at least one light source head, the sensor head, and a substrate on which the light source head is mounted. The sensor head has a plurality of electrical connection terminals, the substrate has at least one recess for mounting the sensor head and the light source head, and the bottom surface of the recess has the sensor head and the A wiring pattern that is electrically connected to an electrical connection terminal of the light source head is formed, and at least some of the electrical connection terminals of the light source head and the sensor head are connected to an external circuit via the wiring pattern of the substrate. It is configured to be connectable.

  According to a thirteenth aspect of the present invention, the first, fourth or twelfth aspect further includes a fixing member for fixing the substrate, and the fixing member has a shape capable of adjusting a fixing position. Multiple screw holes are provided, some of which have a shape that is expanded in the direction perpendicular to the direction of scale movement, and some of the other screw holes can be rotated around a fixed point. Have a good shape.

  According to a fourteenth aspect of the present invention, in the first, fourth or twelfth aspect, one terminal of the electric wiring pattern of the substrate is connected to an electric terminal and / or a cable.

  According to a fifteenth aspect of the present invention, in the first, fourth, or twelfth aspect, one terminal of the electric wiring pattern of the substrate is connected to a flexible wiring.

  According to a sixteenth aspect of the present invention, in the first, fourth, or twelfth aspect, at least part of the electrical connection terminals of the sensor head are connected to an external lead wire or the like via the electrical wiring pattern. Electrically connected to the flexible wiring, and the electrically connected surface is covered with an insulating resin.

  According to a seventeenth aspect of the present invention, in the first, fourth, or twelfth aspect, the connection between the sensor head and the electrical wiring pattern is performed by soldering, reflow, flip chip connection, pressing with a cover, or the like. It is connected.

  According to an eighteenth aspect of the present invention, in the second or fifth aspect, the cover member is a plate-like glass, quartz, or plastic material having a flat portion substantially parallel to the substrate.

  According to a nineteenth aspect of the present invention, in the second or fifth aspect, the cover member is a translucent resin material formed so as to cover the sensor head.

  ADVANTAGE OF THE INVENTION According to this invention, the optical displacement sensor which can be used for various uses can be provided.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is a perspective view showing a state before mounting of the optical displacement sensor according to the first embodiment of the present invention. The optical displacement sensor of this embodiment is configured by attaching a sensor head 2 and an optoelectronic element 5 to a substrate (hereinafter simply referred to as a substrate) 1.

  The sensor head 2 includes a light source 14, a displacement detection photodetector 13, an origin position detection photodetector 15, a light source drive circuit and a signal processing IC circuit (not shown) on a substrate 40. And the surface of the substrate 40 is sealed with a glass plate 16 in a glass-sealed package. The optoelectronic element 5 is a circuit in which a light source, a photodetector, a resistor, a capacitor, a signal processing circuit, a display element, and components thereof are integrated.

  Further, a step (concave portion) 51 for attaching the sensor head 2 and a step (concave portion) 52 for attaching the optoelectronic element 5 are provided on a part of the substrate 1. The sensor head 2 and the optoelectronic element 5 are attached to the steps 51 and 52, respectively.

  Electrical wiring patterns 30 are provided on the side and bottom surfaces of the steps 51 and 52 of the substrate 1. The sensor head 2 and the optoelectronic element 5 are mounted while visually matching the electrical wiring pattern 30 with the electrical connection terminals 54 of the sensor head 2 and the electrical connection terminals of the optoelectronic element 5.

  2 is a cross-sectional view taken along line AA showing the state after mounting the optical displacement sensor shown in FIG. As shown in FIG. 2, the surface of the sensor head 2 sealed with the glass plate 16 is doubled by covering the surface of the substrate 1 with a light transmissive plate 22 and sealing the periphery with a resin 20. Sealed. The optoelectronic element 5 is similarly sealed with the resin 21. Furthermore, screw holes 24 and 26 are provided in the substrate 1, and the substrate 1 is fixed by screwing through the screw holes 24 and 26.

  Further, although not shown here, it is assumed that a scale attached to the moving member is disposed above the light transmission plate 22. In this scale, two patterns, a pattern for detecting a displacement amount (relative movement amount) and a condensing pattern for detecting a reference position, which are generally different in reflectance at a predetermined cycle, are parallel to each other. Are provided in parallel.

  The light beam emitted from the light source 14 passes through the glass plate 16 of the sensor head 2, further passes through the glass plate 22, and then irradiates the surface of the scale. When the distance between the sensor head 2 and the scale is moved at a predetermined interval, the light beam reflected by the scale causes the light detector 13 on the sensor head 2 to have the same light / dark pattern as that on the scale. A pattern is projected.

  The photodetector 13 is configured by arranging photodetectors in an array in a quarter of the period width of the projected light-dark pattern. By connecting every three array elements constituting this photodetector, optical signals having the same phase are detected, and each of the four phases having the A phase, B phase, -A phase, and -B phase is detected. Different signals are obtained. Further, the difference between the A phase signal and the -A phase signal and the B phase and -B phase signals is taken to remove signal noise. The two signals obtained in this way are 90 ° out of phase with each other, but if they are phase-divided, the displacement can be detected with higher resolution than the scale period.

  On the other hand, in order to detect the amount of displacement from the reference position, it is necessary to detect the reference position. Therefore, as described above, the reference position pattern is provided on the scale. The reference position pattern is a pattern in which when the light beam from the light source 14 is applied to the reference position, the reference position pattern is collected and the signal intensity reaches a peak at the focal position.

  In the photodetector 15 for detecting the reference position, the width of the light receiving surface is formed narrow with respect to the moving direction, and is arranged so that a signal can be detected at the position of the condensing peak.

  The optical displacement sensor detects the periodic pattern and the light collection pattern from each pattern on the scale with high accuracy by the respective photodetectors 13 and 15 on the sensor head 2. For the direction perpendicular to the moving direction, it is necessary to attach the two patterns on the scale with high accuracy.

  The light source 14 and the photodetectors 13 and 15 are made of a semiconductor crystal. The surface electrode wiring and the semiconductor surface are protected by a protective film and a sealing member in order to prevent surface oxidation and characteristic deterioration against dust adhesion and humidity. Further, by double-sealing the sensor head 2, stable operation of the sensor head 2 can be expected even under high humidity conditions.

  According to the first embodiment described above, since the shape of the sensor head of the optical displacement sensor is made common and the electric wiring pattern of the substrate is changed, an optical displacement sensor that can be used for various purposes is provided. The

(Second Embodiment)
FIG. 3 is a perspective view showing a state before mounting of the optical displacement sensor according to the second embodiment of the present invention. Note that the description of the points described in the first embodiment is omitted. In the second embodiment, instead of processing a concave step in a predetermined portion of the substrate 1, the light emission of the light source 14 in the sensor head 2 or the incidence of light to the photodetectors 13 and 15 is possible. The surrounding member 25 having an opening 25-1 that can surround the sensor head 2 is laminated or integrally formed. The surrounding member 25 is connected based on the alignment markers 34 and 35 formed on the surface of the substrate 1, thereby forming a stepped shape for attaching the sensor head 2.

  The thickness of the surrounding member 25 is substantially equal to the thickness of the sensor head 2, and the gap between the scale and the sensor head 2 is made as wide as possible so that the sensor head 2 can be moved smoothly. The sensor head 2 is solder-mounted with the electrical connection terminals 54 and the electrical wiring pattern 30 aligned with each other by visual inspection, and the surrounding member 25 is mounted so as to surround the periphery of this portion.

  Further, the surface of the sensor head 2 is sealed by the light transmission plate 22 so as to close the opening 25-1 of the surrounding member 25. By performing double sealing in this manner, operation reliability can be ensured even under high humidity conditions.

  The surrounding member 25 has a shape surrounding the periphery of the sensor head 2, but it is also possible to provide a part of the cutout portion, arrange a cable or the like in this portion, and draw a signal to the outside. When such a notch is provided, the electrical connection part including the sensor head 2 including the part of the cable including resin is cut off from the outside air and kept airtight, which is equivalent to double sealing. Give the effect of.

(Third embodiment)
FIG. 4 is a perspective view showing a state before mounting of the optical displacement sensor according to the third embodiment of the present invention. FIG. 5 is a cross-sectional view taken along the line BB showing a state after mounting the optical displacement sensor shown in FIG. The sensor head 2 and the optoelectronic device 5 are surface-mounted on a substrate 1 having an electric wiring pattern on the surface. The connecting portion of the electric wiring pattern and the connecting portion of each electric terminal 6 of the cable 7 are covered with an insulating resin 23.

  Further, fixing screw holes 8 a, 8 b, 9 a, 9 b are provided at four corners of the substrate 1, and the substrate 1 is covered with a lid-like cover 10. The lid-like cover 10 is provided in order to prevent a decrease in the effective output of the light source 14 due to scratches on the surface of the sensor head 2 or adhesion of dust and adverse effects on the sensing of the photodetectors 13 and 15. The lid-like cover 10 is provided with an opening 11. The light beam emitted from the sensor head 2 through the opening 11 is guided to the scale, or the light beam reflected from the scale is guided to the photodetectors 13 and 15 provided in the sensor head 2. it can.

  Further, the substrate 1 is fixed using screw holes 101a, 101b, 102a, 102b provided in the fixing member 100. Here, the screw hole 101a is fixed, and the screw holes 102a, 101b, and 102b are enlarged for fine adjustment in the direction perpendicular to the scale movement and fine rotation adjustment around the screw hole 101a. . The screw hole 102a is expanded in a direction perpendicular to the moving direction of the scale.

  In order to accurately detect the light beams reflected from the scales corresponding to the photodetectors 13 and 15 and to detect the displacement amount from the origin position with high accuracy, the scale movement direction (arrow direction) The optical displacement sensor head needs to be mounted with high accuracy in the vertical direction, and the above-described screw hole shape is used for fine adjustment in the vertical direction with respect to the mounting scale movement direction.

(Fourth embodiment)
FIG. 6 is a perspective view showing a state before mounting of the optical displacement sensor according to the fourth embodiment of the present invention. Since this embodiment is based on 2nd Embodiment, description of a common part is abbreviate | omitted.

  In this embodiment, when the sensor head 2 is attached, the sensor head 2 is mounted on the substrate 1 as in the second embodiment, even if the cable drawing position is 90 ° rotated. Is possible. That is, when the position of the lead wiring to the outside such as a cable is different by 90 degrees, the cable can be arranged by changing the electric wiring pattern 30A on the substrate 1 to the electric wiring pattern 30B corresponding to the position rotated 90 degrees. Become. This is because the circuit board 1 has a multi-layer structure, and without changing the position of the electrical connection with the sensor head 2, the electrical wiring pattern drawn out to the outside is changed to an electrical wiring pattern rotated 90 degrees to connect the cable terminals. Is possible. Thus, by changing the electric wiring pattern without changing the mounting position of the sensor head, it is possible to provide an optical displacement sensor that can cope with various users.

(Fifth embodiment)
FIG. 7 is a perspective view showing a state before mounting of the optical displacement sensor according to the fifth embodiment of the present invention. Since this embodiment is based on 2nd Embodiment, description of a common part is abbreviate | omitted.

  The present embodiment is an embodiment that considers a case where the direction of the moving object to be detected is different when the sensor head 2 is attached. Here, as shown in FIG. 7, it is necessary to make the step 51 portion of the substrate 1 common to the dimensions and connection terminal positions of the sides of the sensor head 2.

  Even if the electrical wiring pattern at the bottom of the step 51 of the substrate 1 is formed in a multi-layer structure and rotated by 90 °, each terminal is connected to each terminal position before the rotation. The electrical wiring pattern 30 can be used without being changed. That is, even a specification in which a plurality of sensor heads are mounted in directions different from each other by 90 degrees can be handled. As described above, by making the shape of the sensor head 2 common and changing the electric wiring pattern of the substrate, it is possible to provide an optical displacement sensor that can cope with various users.

(Sixth embodiment)
FIG. 8 is a diagram for explaining an optical displacement sensor according to the sixth embodiment of the present invention. This embodiment is based on the fifth embodiment, but the description of the contents described in the fifth embodiment is omitted.

  FIG. 8 shows a state in which the plurality of sensor heads 2 and 2 ′ are attached in the X and Y directions different from each other by 90 degrees. The optoelectronic elements 5 and 5 ′ corresponding to the sensor heads 2 and 2 ′ are similarly mounted and arranged. Interconnection between each sensor head 2, 2 ′ and the optoelectronic elements 5, 5 ′ can be handled by changing the wiring pattern on the substrate 1.

  In this embodiment, the configuration of the sensor heads 2 and 2 ′ in the case where a pattern having a predetermined cycle of the scale is provided in two directions of the X and Y axes is shown. As an example of making the scale pattern correspond to two directions, there is a two-dimensional pattern in which patterns of a predetermined period are formed in one direction at regular intervals in both the X and Y directions.

  In order to detect the amount of movement in each of the X and Y directions, it is necessary that the arrangement direction of the light detection element array of the photodetector coincides with the movement direction. For this purpose, in this embodiment, as shown in FIG. 8, the sensor heads are arranged so that the arrangement of the photodetectors is 90 ° different from each other. This configuration can be realized by using the method in the fifth embodiment and mounting the sensor heads by rotating them 90 times in common.

  In this embodiment, since the position displacement information is handled by a common sensor head on one substrate, multiple functions can be realized, and as a result, a low-cost optical displacement sensor can be supplied.

  In this embodiment, an example corresponding to the X and Y axes is shown, but an optical displacement sensor and a signal processing circuit, a numerical display circuit, a warning control circuit, a warning display circuit, and other magnetic and capacitive types, Various applications such as electromagnetic induction can be applied.

(Seventh embodiment)
FIG. 9 is a diagram for explaining an optical displacement sensor according to a seventh embodiment of the present invention. This embodiment is based on the fifth embodiment, but the description of the contents described in the fifth embodiment is omitted.

  FIG. 9 shows that the light source head 14 ′ and the sensor head 2 are attached separately from each other. When the light source head 14 ′ is operated, the temperature around the light source head 14 ′ on the substrate 40 rises due to the generated heat. When the temperature rises, the photoelectric conversion efficiency of the photodetectors 13 and 15 arranged in the sensor head 2 decreases and thermal noise increases. The scale is generally provided with two patterns of relative position detection and reference position detection, and there is an optimum position for detecting each diffraction interference pattern and light collection pattern.

  In the present embodiment, since the light source head 14 'and the sensor head 2 can be arranged at arbitrary positions, an optimum arrangement can be performed only by changing the electric wiring pattern and the substrate. As a result, the degree of freedom in sensor design is widened, and an optical displacement sensor that can accommodate multiple functions and various user specifications can be provided.

  In this embodiment, an example of one light source head and one sensor head is shown. However, a plurality of functions can be realized by combining a plurality of sensor heads, signal processing, a display circuit, and the like with a plurality of light sources.

  In the embodiment of the present invention, the light source is a general optical displacement as well as an optical semiconductor element such as an edge emitting semiconductor laser, a surface emitting laser, a light emitting element (LED), and a super luminescent diode (SLD). The present invention can also be applied to a light source used for a sensor. Further, although an embodiment of a cable connected to an external electric wiring is shown, a coaxial cable, a flexible wiring, and an optical cable wiring for electrical / optical conversion are also included.

(Appendix)
Inventions having the following configurations can be extracted from the specific embodiments described above.

1. In an optical displacement sensor including at least one sensor head in which at least one of a light source and a light detector is disposed, and a substrate on which the sensor head is mounted.
The sensor head has a plurality of electrical connection terminals,
The substrate has at least one recess for mounting the sensor head, and a wiring pattern that is electrically connected to an electrical connection terminal of the sensor head is formed on the bottom surface of the recess.
A plurality of electrical connection terminals of the sensor head are configured to be connectable to an external circuit via a wiring pattern of the substrate.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the first and fifth embodiments.

(Function, effect)
With this configuration, using various sensor heads prepared in advance, displacement sensors with various performances and functions can be obtained simply by changing the board design such as the layout of electrical wiring, depth of recesses, planar shape, and layout. Develop efficiently at low cost and in a short period of time. In addition, for the device for mounting the displacement sensor, the degree of freedom in designing the sensor mounting (such as the direction of wiring drawing, the range of selection of functions and performance, etc.) is increased, and a significant change (for example, the sensor board and the displacement detection target) Sensors with various functions can be used without changing the design according to the distance to the object.

2. The bottom surface and side surface of the sensor head are surrounded by the substrate having the recess,
The upper surface of the sensor head is covered with a cover member having a translucent portion so that light emission from the light source or incidence of light received by the photodetector is possible. Optical displacement sensor.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the third embodiment.

(Function, effect)
Since the upper surface of the sensor head 2 is covered by the cover member (cover 10), it is possible to prevent destruction when an obstacle or the like collides. In addition, it is possible to prevent a decrease in the effective output of the light source due to dust or dust directly adhering to the surface of the sensor head or scratching, or adverse effects on the sensing of the photodetector.

3. 3. The optical displacement sensor according to 2, wherein the sensor head is hermetically sealed by the cover member and the substrate having the recess.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the first, second, fourth and fifth embodiments.

(Function, effect)
When the cover member (cover 10) is double-sealed together with the sensor head, the airtight reliability and durability of various sensor heads prepared in advance are insufficient for the sensor head alone In addition, the airtight reliability and durability of the entire sensor can be dramatically improved.

4). In an optical displacement sensor including at least one sensor head in which at least one of a light source and a light detector is disposed, and a substrate on which the sensor head is mounted.
The sensor head has a plurality of electrical connection terminals,
A surrounding member formed around the sensor head is laminated or integrally formed on the substrate so that light from the light source in the sensor head can be emitted or light received by the photodetector can be incident. And
A plurality of electrical connection terminals of the sensor head are configured to be connectable to an external circuit via a wiring pattern of the substrate.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the second and fourth embodiments.

(Function, effect)
With this configuration, using various sensor heads prepared in advance, low-cost displacement sensors with various performance and functions can be obtained simply by changing the board design (such as electrical wiring layout) and the arrangement and shape of surrounding members. And it can be developed efficiently in a short period of time. In addition, for a user who installs a displacement sensor, the degree of freedom in designing (mounting direction of wiring, the range of selection of functions and performance) is increased and a large design change (for example, a sensor board and a displacement detection object) Therefore, sensors with various functions can be used without changing the design according to the distance to the sensor.

5. The bottom surface and side surface of the sensor head are surrounded by the substrate and a surrounding member laminated or integrally formed with the substrate,
5. The upper surface of the sensor head is covered with a cover member having a translucent part so that light emission of the light source or incidence of light received by the photodetector is possible. Optical displacement sensor.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the third embodiment.

(Function, effect)
Since the upper surface of the sensor head 2 is covered by the cover member (cover 10), it is possible to prevent destruction when an obstacle or the like collides. In addition, it is possible to prevent a decrease in the effective output of the light source due to dust or dust directly adhering to the surface of the sensor head or scratching, or adverse effects on the sensing of the photodetector.

6). 6. The optical displacement sensor according to claim 5, wherein the sensor head is hermetically sealed by the substrate and a surrounding member laminated or integrally formed on the substrate.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the first, second, fourth and fifth embodiments.

(Function, effect)
When the cover member (cover 10) is double-sealed together with the sensor head, the airtight reliability and durability of various sensor heads prepared in advance are insufficient for the sensor head alone In addition, the airtight reliability and durability of the entire sensor can be dramatically improved.

7). The optical displacement sensor according to any one of 1 to 6, wherein the substrate is configured to be capable of mounting a plurality of same or different types of sensor heads.

(Corresponding Embodiment of the Invention)
Embodiments relating to the present invention correspond to at least the sixth and seventh embodiments.

(Function, effect)
By combining multiple sensor heads prepared in advance and mounting them on a single board, various and high-performance functions can be achieved simply by changing the board design (electrical wiring layout, recess depth, planar shape, layout, etc.) It is possible to efficiently develop a displacement sensor with high performance and function at low cost and in a short period of time. In addition, for a device for mounting a displacement sensor, the degree of freedom in designing the sensor mounting (wiring pull-out direction, width of selection of functions and performance) is increased, and various functions can be performed without major design changes. Sensors can be used. Here, since the main function of this optical displacement sensor is a function of detecting the amount of movement or position, the first sensor head is a sensor head capable of detecting displacement. A temperature sensor, a magnetic sensor, a light amount sensor, and the like for correcting a value and monitoring a sensing state, and a heterogeneous sensor head are also included.

8). Of the plurality of sensor heads, the first sensor head is a sensor that detects a one-dimensional displacement amount in a plane substantially parallel to the substrate, and the second sensor head is in a plane substantially parallel to the substrate. 8. The optical displacement sensor according to claim 7, wherein the optical displacement sensor is a sensor that detects a one-dimensional displacement amount in a direction perpendicular to the first sensor head.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the sixth embodiment.

(Function, effect)
By mounting various one-dimensional sensor heads prepared in advance on a single board with different detection directions, the design of the board (such as the layout of electrical wiring, depth of recesses, planar shape, and layout) can be changed. Thus, a displacement sensor capable of detecting a two-dimensional movement amount can be efficiently developed at a low cost and in a short period of time. In addition, for the device to which the displacement sensor is mounted, the degree of freedom in designing the sensor mounting (wiring pull-out direction, selection range of functions and performance) is increased, and various functions can be performed without making major design changes. Sensors can be used.

9. Of the plurality of sensor heads, the first sensor head is an optical encoder head that functions in combination with a scale disposed substantially parallel to the substrate and facing the first sensor head. 8. The optical displacement sensor according to claim 7, wherein the sensor head is a sensor for detecting a reference position with respect to the displacement amount.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the sixth embodiment.

(Function, effect)
By mounting a pre-prepared optical encoder head and a reference position detection sensor on one board, simply changing the board design (electrical wiring layout, recess depth, planar shape, layout, etc.) Encoders with detection functions can be developed efficiently at low cost and in a short period of time. As the reference position detection sensor, various sensors (for example, optical type, magnetic type, capacitive type, electromagnetic induction type, etc.) can be selected according to the user's usage environment, cost, and other needs. In addition, for a user, in a device for mounting a displacement sensor, the degree of freedom in designing the sensor mounting is increased, and a large design change (for example, a design change according to the distance between the sensor substrate and the displacement detection object) is not performed. Encoders with various functions can be used.

10. Of the plurality of sensor heads, the first sensor head is an optical encoder head that functions in combination with a scale disposed substantially parallel to the substrate and facing the first sensor head, and the second sensor head. 8. The optical displacement sensor according to claim 7, wherein the head is a sensor that detects displacement in a direction substantially perpendicular to the substrate.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the sixth embodiment.

(Function, effect)
Changing the board design (electrical wiring layout, depth of recesses, planar shape, layout, etc.) by combining the optical encoder head and a sensor that detects the distance in the direction perpendicular to the board on one board Therefore, a displacement sensor capable of multi-dimensional detection can be efficiently developed at low cost and in a short period of time. In addition, for a device for mounting a displacement sensor, the degree of freedom in designing the sensor mounting (wiring pull-out direction, width of selection of functions and performance) is increased, and various functions can be performed without major design changes. Sensors can be used.

11. The second sensor head is a displacement sensor capable of detecting a distance perpendicular to the second sensor head and the substrate of the scale, and is at a distance perpendicular to the second sensor head and the substrate of the scale. 11. The optical displacement sensor according to claim 10, further comprising a function of outputting a corresponding analog signal or a signal indicating whether the distance is within a specified range or outside the specified range.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the sixth embodiment.

(Function, effect)
An optical encoder head that is a first sensor and a second sensor that detects a distance in a direction perpendicular to the substrate are combined and mounted on one substrate, and the second sensor is a distance between the encoder head and the scale. Therefore, it is possible to detect whether or not the distance between the encoder and the scale is within a specified range. Alternatively, it is possible to correct the driving intensity of the light source, the sensitivity of light detection, or the amount of positional deviation according to the distance between the encoder and the scale.

12 In an optical displacement sensor comprising a sensor head on which at least one photodetector is disposed, at least one light source head, the sensor head, and a substrate on which the light source head is mounted.
The sensor head has a plurality of electrical connection terminals,
The substrate has at least one recess for mounting the sensor head and the light source head, and a wiring pattern is formed on the bottom surface of the recess to electrically connect with the electrical connection terminals of the sensor head and the light source head. And
An optical displacement sensor, wherein at least some of the plurality of electrical connection terminals of the light source head and the sensor head are configured to be connectable to an external circuit via a wiring pattern of the substrate.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the seventh embodiment.

(Function, effect)
As shown in FIG. 9, the sensor head 2 in which at least one light source head 14 ′ and at least one photodetector 13 are arranged, the sensor head 2, and the light source head 14 ′.
It is an optical displacement sensor comprised with the board | substrate 1 which mounts. The sensor head 2 has a plurality of electrical connection terminals, and the substrate 1 has at least one recess for attaching the sensor head 2 and the light source head, and terminals of the sensor head and the light source head on the bottom surface of the recess. A wiring pattern for electrical connection is provided. Compared with the case where the light source is mounted in the sensor head, the light source can be mounted on the substrate without being limited by the shape and arrangement, and the degree of freedom of design is widened. Moreover, by separately mounting the light source and the photodetector, it is possible to reduce the influence of the sensitivity of the photodetector due to the distribution of heat generated by the light source.

13. The screw hole provided in the fixing member for fixing the substrate has a shape capable of adjusting the fixing position, and the adjusting means is configured so that the shape of the hole provided in the fixing portion is perpendicular to the moving direction of the scale. 13. The optical displacement sensor according to any one of 1, 4, and 12, wherein the other hole has a shape that is widened and is capable of minute rotation around a fixed point.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the third embodiment.

(Function, effect)
Since the vertical direction affects the shape and signal intensity of the displacement detection signal with respect to the relative movement direction of the scale and the sensor head 2, it must be fixed to the fixing member 100 with high accuracy. For this reason, the shape of the screw hole 102a provided in the fixing member 100 is expanded in a direction perpendicular to the moving direction of the scale, and the other holes 101b and 102b are formed in a shape capable of minute rotation around the screw hole 101a. As a result, the position perpendicular to the moving direction of the scale and the position of the minute rotation are adjusted.

14 The optical displacement sensor according to any one of 1, 4, and 12, wherein one terminal of the electric wiring pattern of the substrate is connected to an electric terminal and / or a cable.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the third embodiment.

(Function, effect)
One terminal of the electric wiring pattern of the substrate 1 is connected to the electric terminal 6 and the cable 7 and connected to a power source, a display element, a movable control circuit, etc., and a displacement sensor control system is configured.

15. The optical displacement sensor according to any one of 1, 4, and 12, wherein one terminal of the electric wiring pattern of the substrate is connected to a flexible wiring.

(Corresponding Embodiment of the Invention)
At least the first embodiment corresponds to the embodiment relating to the present invention.

(Function, effect)
In order to insert the optical displacement sensor in a limited space, flexible wiring that can reduce the wiring routing space is used. In order to correspond to this application, one terminal of the electric wiring pattern of the substrate is connected to the flexible wiring.

16. At least some of the plurality of electrical connection terminals of the sensor head are electrically connected to an external lead wire or flexible wiring via the electrical wiring pattern, and the electrically connected surface is covered with an insulating resin. 13. The optical displacement sensor according to any one of 1, 4, and 12, wherein

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the third embodiment.

(Function, effect)
When connecting electrical wiring pattern terminals to lead wires or flexible wiring, the connection surface is covered with an insulating resin to prevent contact failure due to corrosion of the connection area or increase in wiring resistance even under high temperature and high humidity conditions. It can be expected that the stability of the operation of the optical displacement sensor can be ensured.

17. The optical sensor according to any one of 1, 4, and 12, wherein the sensor head and the electrical wiring pattern are connected by soldering, reflow, flip chip connection, pressing by a cover, or the like. Displacement sensor.

(Corresponding Embodiment of the Invention)
At least the first embodiment corresponds to the embodiment relating to the present invention.

(Function, effect)
Connection between the sensor head and the electric wiring pattern is easy because it can be surface-mounted while confirming the mounting position on the surface by soldering, reflow, flip-chip connection or the like.

  Further, for the purpose of detachable sensor head portion, pressing connection is possible while confirming the position of the sensor head and the electrode pattern on the substrate by surface observation with a cover or the like.

18. 6. The optical displacement sensor according to claim 2, wherein the cover member is a plate-like glass, quartz, or plastic material having a flat portion substantially parallel to the substrate.

(Corresponding Embodiment of the Invention)
At least the first, second, and fifth embodiments correspond to the embodiments relating to the present invention.

(Function and effect)
When the cover member (cover 10) is double-sealed together with the sensor head, the airtight reliability and durability of various sensor heads prepared in advance are insufficient for the sensor head alone In addition, the airtight reliability and durability of the entire sensor can be dramatically improved.

19. 6. The optical displacement sensor according to claim 2, wherein the cover member is a translucent resin material formed so as to cover the sensor head.

(Corresponding Embodiment of the Invention)
The embodiment relating to the present invention corresponds to at least the third embodiment.

(Function, effect)
The sensor head 2 is double-sealed with a translucent resin material (insulating resin 23) formed so as to cover the sensor head 2, and various sensor heads prepared in advance. When the sensor head alone has insufficient airtight reliability and durability, the airtight reliability and durability of the entire sensor can be dramatically improved.

It is a perspective view which shows the state before mounting of the optical displacement sensor concerning 1st Embodiment of this invention. It is AA sectional drawing which shows the state after mounting of the optical displacement sensor shown in FIG. It is a perspective view which shows the state before mounting of the optical displacement sensor concerning 2nd Embodiment of this invention. It is a perspective view which shows the state before mounting of the optical displacement sensor concerning 3rd Embodiment of this invention. It is BB sectional drawing which shows the state after mounting of the optical displacement sensor shown in FIG. It is a perspective view which shows the state before mounting of the optical displacement sensor concerning 4th Embodiment of this invention. It is a perspective view which shows the state before mounting of the optical displacement sensor concerning 5th Embodiment of this invention. It is a figure for demonstrating the optical displacement sensor concerning 6th Embodiment of this invention. It is a figure for demonstrating the optical displacement sensor concerning 7th Embodiment of this invention. It is a figure which shows the structure of the optical displacement sensor which concerns on a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Board | substrate 2 ... Sensor head 5 ... Optoelectronic element 13 ... Photo detector 14 ... Light source 15 ... Photo detector 16 ... Glass plate 22 ... Light transmission board 30 ... Electric wiring pattern 51 ... Step 52 ... Step 54 ... Electrical connection terminal

Claims (19)

In an optical displacement sensor including at least one sensor head in which at least one of a light source and a light detector is disposed, and a substrate on which the sensor head is mounted.
The sensor head has a plurality of electrical connection terminals,
The substrate has at least one recess for mounting the sensor head, and a wiring pattern that is electrically connected to an electrical connection terminal of the sensor head is formed on the bottom surface of the recess.
A plurality of electrical connection terminals of the sensor head are configured to be connectable to an external circuit via a wiring pattern of the substrate. The bottom surface and side surface of the sensor head are surrounded by the substrate having the recess,
2. The upper surface of the sensor head is covered with a cover member having a translucent portion so that light from the light source can be emitted or light received by the photodetector can be incident thereon. The optical displacement sensor described. 3. The optical displacement sensor according to claim 2, wherein the sensor head is hermetically sealed by the cover member and the substrate having the recess. In an optical displacement sensor including at least one sensor head in which at least one of a light source and a light detector is disposed, and a substrate on which the sensor head is mounted.
The sensor head has a plurality of electrical connection terminals,
A surrounding member formed around the sensor head is laminated or integrally formed on the substrate so that light from the light source in the sensor head can be emitted or light received by the photodetector can be incident. And
A plurality of electrical connection terminals of the sensor head are configured to be connectable to an external circuit via a wiring pattern of the substrate. The bottom surface and side surface of the sensor head are surrounded by the substrate and a surrounding member laminated or integrally formed with the substrate,
5. The upper surface of the sensor head is covered with a cover member having a translucent portion so that light from the light source can be emitted or light received by the photodetector can be incident thereon. The optical displacement sensor described. 6. The optical displacement sensor according to claim 5, wherein the sensor head is hermetically sealed by the substrate and a surrounding member laminated or integrally formed on the substrate. The optical displacement sensor according to any one of claims 1 to 6, wherein the substrate is configured to be capable of mounting a plurality of same or different types of sensor heads. Of the plurality of sensor heads, the first sensor head is a sensor that detects a one-dimensional displacement amount in a plane substantially parallel to the substrate, and the second sensor head is in a plane substantially parallel to the substrate. 8. The optical displacement sensor according to claim 7, wherein the optical displacement sensor is a sensor that detects a one-dimensional displacement amount in a direction perpendicular to the first sensor head. Of the plurality of sensor heads, the first sensor head is an optical encoder head that functions in combination with a scale disposed substantially parallel to the substrate and facing the first sensor head. 8. The optical displacement sensor according to claim 7, wherein the sensor head is a sensor that detects a reference position with respect to the displacement amount. Of the plurality of sensor heads, the first sensor head is an optical encoder head that functions in combination with a scale disposed substantially parallel to the substrate and facing the first sensor head, and the second sensor head. 8. The optical displacement sensor according to claim 7, wherein the head is a sensor that detects displacement in a direction substantially perpendicular to the substrate. The second sensor head is a displacement sensor capable of detecting a distance perpendicular to the second sensor head and the substrate of the scale, and is at a distance perpendicular to the second sensor head and the substrate of the scale. 11. The optical displacement sensor according to claim 10, further comprising a function of outputting a corresponding analog signal or a signal indicating whether the distance is within a specified range or outside the specified range. In an optical displacement sensor comprising a sensor head on which at least one photodetector is disposed, at least one light source head, the sensor head, and a substrate on which the light source head is mounted.
The sensor head has a plurality of electrical connection terminals,
The substrate has at least one recess for attaching the sensor head and the light source head, and a wiring pattern is formed on the bottom surface of the recess to electrically connect with the electrical connection terminals of the sensor head and the light source head. And
An optical displacement sensor, wherein at least some of the plurality of electrical connection terminals of the light source head and the sensor head are configured to be connectable to an external circuit via a wiring pattern of the substrate. The fixing member further includes a fixing member, and the fixing member is provided with a plurality of screw holes having a shape capable of adjusting a fixing position, and some of the screw holes are perpendicular to the moving direction of the scale. 13. The screw hole according to claim 1, wherein the other part of the screw hole has a shape that can be finely rotated about a fixed point. Optical displacement sensor The optical displacement sensor according to claim 1, wherein one terminal of the electric wiring pattern of the substrate is connected to an electric terminal and / or a cable. The optical displacement sensor according to claim 1, wherein one terminal of the electric wiring pattern of the substrate is connected to a flexible wiring. At least some of the electrical connection terminals of the sensor head are electrically connected to an external lead wire or flexible wiring via the electrical wiring pattern, and the electrically connected surface is covered with an insulating resin. The optical displacement sensor according to any one of claims 1, 4, and 12. The connection between the sensor head and the electric wiring pattern is performed by soldering, reflow, flip chip connection, pressing by a cover, or the like. Optical displacement sensor. 6. The optical displacement sensor according to claim 2, wherein the cover member is a plate-like glass, quartz, or plastic material having a flat portion substantially parallel to the substrate. 6. The optical displacement sensor according to claim 2, wherein the cover member is a translucent resin material formed so as to cover the sensor head.

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