JPH08325437A - Etchant for cured epoxy resin - Google Patents
Etchant for cured epoxy resinInfo
- Publication number
- JPH08325437A JPH08325437A JP13509095A JP13509095A JPH08325437A JP H08325437 A JPH08325437 A JP H08325437A JP 13509095 A JP13509095 A JP 13509095A JP 13509095 A JP13509095 A JP 13509095A JP H08325437 A JPH08325437 A JP H08325437A
- Authority
- JP
- Japan
- Prior art keywords
- epoxy resin
- alkali metal
- etching
- metal compound
- aqueous solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003822 epoxy resin Substances 0.000 title claims abstract description 70
- 229920000647 polyepoxide Polymers 0.000 title claims abstract description 70
- 239000002904 solvent Substances 0.000 claims abstract description 27
- 230000001588 bifunctional effect Effects 0.000 claims abstract description 23
- 150000001339 alkali metal compounds Chemical class 0.000 claims abstract description 20
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 150000001408 amides Chemical class 0.000 claims abstract description 18
- 239000007864 aqueous solution Substances 0.000 claims abstract description 18
- 229920000642 polymer Polymers 0.000 claims abstract description 16
- 239000004593 Epoxy Substances 0.000 claims abstract description 15
- 239000003054 catalyst Substances 0.000 claims abstract description 11
- 239000000203 mixture Substances 0.000 claims abstract description 9
- 239000003431 cross linking reagent Substances 0.000 claims abstract description 8
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims abstract description 3
- 238000005530 etching Methods 0.000 claims description 37
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 36
- 239000000243 solution Substances 0.000 claims description 29
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical group CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 27
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 claims description 12
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 12
- 229920001187 thermosetting polymer Polymers 0.000 claims description 7
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000000379 polymerizing effect Effects 0.000 claims description 4
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 abstract description 7
- 125000003700 epoxy group Chemical group 0.000 abstract description 6
- 239000012948 isocyanate Substances 0.000 abstract description 5
- 150000002513 isocyanates Chemical class 0.000 abstract description 5
- 239000003795 chemical substances by application Substances 0.000 abstract description 4
- 150000002576 ketones Chemical class 0.000 abstract description 4
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract description 3
- 239000004615 ingredient Substances 0.000 abstract 3
- 239000000376 reactant Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 description 11
- 150000002989 phenols Chemical class 0.000 description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 6
- 239000011259 mixed solution Substances 0.000 description 6
- -1 organic acid salts Chemical class 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 4
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 4
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 238000007788 roughening Methods 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 2
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 229930185605 Bisphenol Natural products 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- 239000005058 Isophorone diisocyanate Substances 0.000 description 2
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 150000004679 hydroxides Chemical class 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 2
- 239000005453 ketone based solvent Substances 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 229910052701 rubidium Inorganic materials 0.000 description 2
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 2
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- PTTPXKJBFFKCEK-UHFFFAOYSA-N 2-Methyl-4-heptanone Chemical compound CC(C)CC(=O)CC(C)C PTTPXKJBFFKCEK-UHFFFAOYSA-N 0.000 description 1
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 1
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- NOHQTLHHNIKWBA-UHFFFAOYSA-N [SiH4].NC(=O)N Chemical compound [SiH4].NC(=O)N NOHQTLHHNIKWBA-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001341 alkaline earth metal compounds Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 150000001642 boronic acid derivatives Chemical class 0.000 description 1
- 150000003842 bromide salts Chemical class 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000006266 etherification reaction Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000004694 iodide salts Chemical class 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- 125000002950 monocyclic group Chemical group 0.000 description 1
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical class C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 150000002903 organophosphorus compounds Chemical class 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- DLRJIFUOBPOJNS-UHFFFAOYSA-N phenetole Chemical compound CCOC1=CC=CC=C1 DLRJIFUOBPOJNS-UHFFFAOYSA-N 0.000 description 1
- 150000004707 phenolate Chemical class 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 125000003367 polycyclic group Chemical group 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920003987 resole Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
- H05K3/4676—Single layer compositions
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Epoxy Resins (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、絶縁材料、接着剤、塗
料などに用いられるフィルム化可能な熱硬化性エポキシ
樹脂硬化物のエッチング液に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an etching solution for a cured thermosetting epoxy resin, which can be used as a film and is used in insulating materials, adhesives, paints and the like.
【0002】[0002]
【従来の技術】エポキシ樹脂は、ポリイミド樹脂と同様
にその電気特性、接着性に優れているため、種々の分野
で利用されている。エポキシ樹脂及びポリイミド樹脂
は、用途が広がるにつれ、樹脂の一部を粗化や除去して
使用するような用途がでてきた。ポリイミド樹脂のエッ
チングに関しては、従来からよく行われており、ヒドラ
ジン等の塩基性溶液でエッチングする方法が、特開昭5
0−4577号公報、特開昭51−27464号公報、
及び特開昭53−49068号公報などにより知られて
いる。2. Description of the Related Art Epoxy resin is used in various fields because it has excellent electric characteristics and adhesiveness like polyimide resin. As the applications of epoxy resins and polyimide resins have expanded, some applications have been made such that a part of the resin is roughened or removed for use. Conventionally, etching of a polyimide resin has been often carried out, and a method of etching with a basic solution such as hydrazine is disclosed in Japanese Patent Laid-Open No. Sho 5-5.
0-4577, JP-A-51-27464,
And known from JP-A-53-49068.
【0003】また、エポキシ樹脂の粗化やエッチングに
関しては、プリント配線板に用いられるエポキシ樹脂硬
化物の表面粗化処理、デスミア処理、エッチバック処理
に用いられる濃硫酸、クロム酸、アルカリ過マンガン酸
塩などでエッチングする方法が、特開昭54−1449
68号公報や、特開昭62−104197号公報によっ
て知られれている。また、エポキシ樹脂に、アルカリに
可溶なアクリル樹脂を添加して、エッチングする方法
が、特開平5−218651号公報によって知られてい
る。Further, regarding roughening and etching of epoxy resin, concentrated sulfuric acid, chromic acid, and alkaline permanganate used for surface roughening treatment, desmear treatment, and etchback treatment of a cured epoxy resin used for a printed wiring board. A method of etching with salt or the like is disclosed in JP-A-54-1449.
No. 68 and Japanese Patent Laid-Open No. 62-104197. Further, a method of adding an alkali-soluble acrylic resin to an epoxy resin and performing etching is known from JP-A-5-218651.
【0004】[0004]
【発明が解決しようとする課題】無変性のエポキシ樹脂
の硬化物を、粗化、エッチングするのは、濃硫酸、クロ
ム酸、アルカリ過マンガン酸塩を使用していたが、これ
らの液は労働安全衛生法の特定化学物質に該当する薬品
であり、安全上取扱いに十分な注意が必要であり、さら
に取扱い者には定期的に健康診断が義務付けられる。さ
らに濃硫酸は吸水性が強いために、十分な濃度管理が必
要であり、アルカリ過マンガン酸塩でエポキシ樹脂を完
全に除去するには、80℃前後の高温と30分以上の時
間が必要であった。また、エポキシ樹脂をエッチング可
能にするためにアクリル樹脂を添加した変性エポキシ樹
脂の場合、エポキシ樹脂の耐熱性、耐薬品性等の優れた
特性を低下させてしまう。Concentrated sulfuric acid, chromic acid, and alkali permanganate are used for roughening and etching a cured product of an unmodified epoxy resin, but these solutions are labor intensive. It is a chemical that corresponds to a specified chemical substance under the Safety and Health Act, and requires sufficient precautions for safe handling, and the handler is obliged to carry out regular health checkups. Furthermore, since concentrated sulfuric acid has a strong water absorption property, it is necessary to control the concentration sufficiently, and in order to completely remove the epoxy resin with alkaline permanganate, a high temperature of around 80 ° C and a time of 30 minutes or more are required. there were. Further, in the case of a modified epoxy resin to which an acrylic resin is added to enable etching of the epoxy resin, excellent properties such as heat resistance and chemical resistance of the epoxy resin are deteriorated.
【0005】本発明は、取り扱いが容易で、無変性のエ
ポキシ樹脂の除去を可能とするエッチング液を提供する
ことを目的とする。It is an object of the present invention to provide an etching solution which is easy to handle and is capable of removing an unmodified epoxy resin.
【0006】[0006]
【課題を解決するための手段】本発明のエポキシ樹脂硬
化物のエッチング液は、二官能エポキシ樹脂とハロゲン
化二官能フェノール類を触媒の存在下、加熱して重合さ
せたフィルム形成能を有する分子量100,000以上
のエポキシ重合体、架橋剤、多官能エポキシ樹脂からな
る熱硬化性エポキシ樹脂組成物の硬化物をエッチングす
る溶液であって、アミド系溶媒と、アルカリ金属化合物
の水溶液からなることを特徴とする。The etching liquid for a cured epoxy resin of the present invention is a molecular weight having a film-forming ability obtained by heating and polymerizing a bifunctional epoxy resin and a halogenated bifunctional phenol in the presence of a catalyst. A solution for etching a cured product of a thermosetting epoxy resin composition comprising 100,000 or more epoxy polymer, a cross-linking agent, and a polyfunctional epoxy resin, the solution comprising an amide solvent and an aqueous solution of an alkali metal compound. Characterize.
【0007】本発明者らは、鋭意検討の結果、高分子量
エポキシ重合体の分解反応について種々検討した結果、
高分子量エポキシ重合体が、アミド系溶媒中でアルカリ
金属化合物により分解することを見出し、本発明をなし
たものである。As a result of intensive investigations, the present inventors have made various investigations on the decomposition reaction of high molecular weight epoxy polymers.
The present invention is based on the finding that a high molecular weight epoxy polymer is decomposed by an alkali metal compound in an amide solvent.
【0008】以下、本発明を詳細に説明する。本発明の
エッチングの対象となる、熱硬化性エポキシ樹脂組成物
の硬化物は、二官能エポキシ樹脂とハロゲン化二官能フ
ェノール類を触媒の存在下、加熱して重合させたフィル
ム形成能を有する分子量100,000以上のエポキシ
重合体、架橋剤、多官能エポキシ樹脂からなる熱硬化性
エポキシ樹脂組成物の硬化物である。The present invention will be described in detail below. The cured product of the thermosetting epoxy resin composition, which is the object of etching of the present invention, is a molecular weight having a film forming ability obtained by heating and polymerizing a bifunctional epoxy resin and a halogenated bifunctional phenol in the presence of a catalyst. It is a cured product of a thermosetting epoxy resin composition comprising an epoxy polymer of 100,000 or more, a crosslinking agent, and a polyfunctional epoxy resin.
【0009】このようなフィルム形成能を有するエポキ
シ重合体は、分子量が100,000以上の、いわゆる
高分子量エポキシ重合体であり、二官能エポキシ樹脂と
ハロゲン化二官能フェノール類を二官能エポキシ樹脂と
ハロゲン化二官能フェノール類の配合当量比をエポキシ
基/フェノール性水酸基=1:0.9〜1.1とし、触
媒の存在下、沸点が130℃以上のアミド系またはケト
ン系溶媒中、反応固形分濃度50重量%以下で、加熱し
て重合させて得ることができる。Such an epoxy polymer having a film-forming ability is a so-called high molecular weight epoxy polymer having a molecular weight of 100,000 or more, and a bifunctional epoxy resin and a halogenated bifunctional phenol are used as a bifunctional epoxy resin. The compounding equivalent ratio of the halogenated bifunctional phenols is set to epoxy group / phenolic hydroxyl group = 1: 0.9 to 1.1, and in the presence of a catalyst, the boiling point is 130 ° C. or higher in an amide-based or ketone-based solvent, the reaction solid It can be obtained by heating and polymerizing at a concentration of 50% by weight or less.
【0010】この二官能エポキシ樹脂は、分子内に二個
のエポキシ基を持つ化合物であればどのようなものでも
よく、例えば、ビスフェノールA型エポキシ樹脂、ビス
フェノールF型エポキシ樹脂、ビスフェノールS型エポ
キシ樹脂、脂肪族鎖状エポキシ樹脂などがある。これら
の化合物の分子量はどのようなものでもよい。これらの
化合物は何種類かを併用することができる。また、二官
能エポキシ樹脂以外の成分が不純物として含まれていて
も構わない。The bifunctional epoxy resin may be any compound as long as it is a compound having two epoxy groups in the molecule, for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin. , Aliphatic chain epoxy resins, etc. The molecular weight of these compounds may be any. Several kinds of these compounds can be used in combination. Further, components other than the bifunctional epoxy resin may be included as impurities.
【0011】ハロゲン化二官能フェノール類は、ハロゲ
ン原子および二個のフェノール性水酸基を持つ化合物で
あればどのようなものでもよく、例えば、単環二官能フ
ェノールであるヒドロキノン、レゾルシノール、カテコ
ール、多環二官能フェノールであるビスフェノールA、
ビスフェノールF、ナフタレンジオール類、ビスフェノ
ール類、これらのアルキル基置換体のハロゲン化物など
がある。これらの化合物の分子量はどのようなものでも
よい。これらの化合物は何種類かを併用することができ
るし、ハロゲン化されていない二官能フェノール類を併
用してもよい。また、二官能フェノール類以外の成分が
不純物として含まれていても構わない。The halogenated bifunctional phenol may be any compound as long as it has a halogen atom and two phenolic hydroxyl groups, and examples thereof include monocyclic bifunctional phenols such as hydroquinone, resorcinol, catechol and polycyclic. Bifunctional phenol, bisphenol A,
Examples include bisphenol F, naphthalene diols, bisphenols, and halides of these substituted alkyl groups. The molecular weight of these compounds may be any. Several kinds of these compounds can be used in combination, and non-halogenated bifunctional phenols may be used in combination. Further, components other than the bifunctional phenols may be included as impurities.
【0012】触媒はエポキシ基とフェノール性水酸基の
エーテル化反応を促進させるような触媒能を持つ化合物
であればどのようなものでもよく、例えば、アルカリ金
属化合物、アルカリ土類金属化合物、イミダゾール類、
有機りん化合物、第二級アミン、第三級アミン、第四級
アンモニウム塩などがある。中でもアルカリ金属化合物
が最も好ましい触媒であり、アルカリ金属化合物の例と
しては、ナトリウム、リチウム、カリウムの水酸化物、
ハロゲン化物、有機酸塩、アルコラート、フェノラー
ト、水素化物、ホウ水素化物、アミドなどがある。これ
らの触媒は併用することができる。The catalyst may be any compound having a catalytic ability to promote the etherification reaction of the epoxy group and the phenolic hydroxyl group, and examples thereof include alkali metal compounds, alkaline earth metal compounds and imidazoles.
Organophosphorus compounds, secondary amines, tertiary amines, quaternary ammonium salts and the like. Among them, the alkali metal compound is the most preferable catalyst, and examples of the alkali metal compound include hydroxides of sodium, lithium and potassium,
There are halides, organic acid salts, alcoholates, phenolates, hydrides, borohydrides, amides and the like. These catalysts can be used in combination.
【0013】反応溶媒としては、アミド系またはケトン
系溶媒が好ましく、アミド系溶媒としては、沸点が13
0℃以上で、原料となるエポキシ樹脂とフェノール類を
溶解すれば、特に制限はないが、例えば、ホルムアミ
ド、N−メチルホルムアミド、N,N−ジメチルホルム
アミド、アセトアミド、N−メチルアセトアミド、N,
N−ジメチルアセトアミド、N,N,N’,N’−テト
ラメチル尿素、2−ピロリドン、N−メチル−2−ピロ
リドン、カルバミド酸エステルなどがある。これらの溶
媒は併用することができる。また、ケトン系溶媒、エー
テル系溶媒などに代表されるその他の溶媒と併用しても
構わない。The reaction solvent is preferably an amide solvent or a ketone solvent, and the amide solvent has a boiling point of 13
There is no particular limitation as long as the raw material epoxy resin and phenols are dissolved at 0 ° C. or higher. For example, formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N,
Examples include N-dimethylacetamide, N, N, N ′, N′-tetramethylurea, 2-pyrrolidone, N-methyl-2-pyrrolidone, and carbamic acid ester. These solvents can be used in combination. Further, it may be used in combination with other solvents such as a ketone solvent and an ether solvent.
【0014】重合体の合成条件としては、二官能エポキ
シ樹脂と二官能フェノール類またはハロゲン化二官能フ
ェノール類の配合当量比は、エポキシ基/フェノール性
水酸基=1:0.9〜1.1であることが望ましい。触
媒の配合量は特に制限はないが、一般にはエポキシ樹脂
1モルに対して触媒は0.0001〜0.2モル程度で
ある。重合反応温度は、60〜150℃であることが望
ましい。60℃より低いと高分子量化反応が著しく遅
く、150℃より高いと副反応が多くなり直鎖状に高分
子量化としない。溶媒を用いた重合反応の際の固形分濃
度は50%以下であればよいが、さらには30%以下に
することが望ましい。このようにしてフィルム形成能を
有する分子量が100,000以上の、いわゆる高分子
量エポキシ重合体を得られる。As the polymer synthesis conditions, the compounding equivalent ratio of the bifunctional epoxy resin and the bifunctional phenols or the halogenated bifunctional phenols is epoxy group / phenolic hydroxyl group = 1: 0.9 to 1.1. Is desirable. The amount of the catalyst compounded is not particularly limited, but the amount of the catalyst is generally about 0.0001 to 0.2 mol per mol of the epoxy resin. The polymerization reaction temperature is preferably 60 to 150 ° C. If it is lower than 60 ° C., the high molecular weight reaction is remarkably slow, and if it is higher than 150 ° C., there are many side reactions and the polymer is not linearly increased in molecular weight. The solid content concentration in the polymerization reaction using a solvent may be 50% or less, and more preferably 30% or less. Thus, a so-called high molecular weight epoxy polymer having a film forming ability and having a molecular weight of 100,000 or more can be obtained.
【0015】この高分子量エポキシ重合体の架橋剤とし
て、架橋剤の反応性制御が容易でワニスの保存安定性が
確保し易い、イソシアネート類を他の活性水素を持つ化
合物でマスク(ブロック)したマスクイソシアネート類
を用いることができる。As a cross-linking agent for this high-molecular-weight epoxy polymer, a mask obtained by masking (blocking) isocyanates with another compound having active hydrogen, in which the reactivity of the cross-linking agent can be easily controlled and the storage stability of the varnish can be easily ensured. Isocyanates can be used.
【0016】イソシアネート類は、分子内に二個以上の
イソシアネート基を有するものであればどのようなもの
でもよく、例えば、フェノール類、オキシム類、アルコ
ール類などのマスク剤でマスクされたヘキサメチレンジ
イソシアネート、ジフェニルメタンジイソシアネート、
イソホロンジイソシアネート、トリレンジイソシアネー
トなどが挙げられる。特に硬化物の耐熱性の向上のため
フェノール類でマスクされたイソホロンジイソシアネー
ト、トリレンジイソシアネートが好ましい。この架橋剤
の量は高分子量エポキシ重合体のアルコール性水酸基
1.0当量に対し、イソシアネート基が0.1〜1.0
当量にすることが好ましい。Any isocyanate may be used as long as it has two or more isocyanate groups in the molecule. For example, hexamethylene diisocyanate masked with a masking agent such as phenols, oximes and alcohols. , Diphenylmethane diisocyanate,
Examples thereof include isophorone diisocyanate and tolylene diisocyanate. In particular, isophorone diisocyanate and tolylene diisocyanate masked with phenols are preferable for improving the heat resistance of the cured product. The amount of the cross-linking agent is 0.1 to 1.0 of the isocyanate group based on 1.0 equivalent of the alcoholic hydroxyl group of the high molecular weight epoxy polymer.
It is preferable to make it equivalent.
【0017】多官能エポキシ樹脂としては、分子内に二
個以上のエポキシ基を持つ化合物であればどのようなも
のでもよく、例えば、フェノールノボラック型エポキシ
樹脂、クレゾールノボラック型エポキシ樹脂、レゾール
型エポキシ樹脂、ビスフェノール型エポキシ樹脂などの
フェノール類のグリシジルエーテルであるエポキシ樹脂
や脂環式エポキシ樹脂、エポキシ化ポリブタジエン、グ
リシジルエステル型エポキシ樹脂、グリシジルアミン型
エポキシ樹脂、イソシアヌレート型エポキシ樹脂、可と
う性エポキシ樹脂などであり、エポキシ樹脂ならば何を
用いても構わないが、特にフェノール型エポキシ樹脂、
またはフェノール型エポキシ樹脂と多官能エポキシ樹脂
との混合物が耐熱性の向上のために好ましい。この多官
能エポキシ樹脂の量は高分子量エポキシ重合体に対し、
20〜100重量%にすることが好ましい。The polyfunctional epoxy resin may be any compound as long as it is a compound having two or more epoxy groups in the molecule, for example, phenol novolac type epoxy resin, cresol novolac type epoxy resin, resol type epoxy resin. , Bisphenol type epoxy resin and other phenolic glycidyl ether epoxy resin and alicyclic epoxy resin, epoxidized polybutadiene, glycidyl ester type epoxy resin, glycidyl amine type epoxy resin, isocyanurate type epoxy resin, flexible epoxy resin Any epoxy resin may be used, but especially a phenol type epoxy resin,
Alternatively, a mixture of a phenol type epoxy resin and a polyfunctional epoxy resin is preferable for improving heat resistance. The amount of this polyfunctional epoxy resin is based on the high molecular weight epoxy polymer,
It is preferably 20 to 100% by weight.
【0018】これらの多官能エポキシ樹脂は、単独でま
たは二種類以上混合して用いても構わない。さらに、多
官能エポキシ樹脂の硬化剤および硬化促進剤を用いる。
エポキシ樹脂の硬化剤および硬化促進剤としては、ノボ
ラック型フェノール樹脂、ジシアンジアミド、酸無水
物、アミン類、イミダゾール類、フォスフィン類などが
挙げられる。また、これらを組み合わせて用いても構わ
ない。さらにシランカップリング剤を添加しても構わな
い。添加するシランカップリング剤としては、エポキシ
シラン、アミノシラン、尿素シラン等が好ましい。These polyfunctional epoxy resins may be used alone or in combination of two or more. Further, a curing agent and a curing accelerator for the polyfunctional epoxy resin are used.
Examples of curing agents and curing accelerators for epoxy resins include novolac type phenol resins, dicyandiamide, acid anhydrides, amines, imidazoles, and phosphines. Also, these may be used in combination. Further, a silane coupling agent may be added. The silane coupling agent to be added is preferably epoxy silane, amino silane, urea silane or the like.
【0019】本発明のエッチング液は、アミド系溶媒、
アルカリ金属化合物の水溶液を配合、混合して調製する
ことができる。The etching solution of the present invention is an amide solvent,
It can be prepared by mixing and mixing an aqueous solution of an alkali metal compound.
【0020】本発明のエッチング液構成成分であるアミ
ド系溶媒は、どのようなものでもよく、例えば、ホルム
アミド、N−メチルホルムアミド、N,N−ジメチルホ
ルムアミド、アセトアミド、N−メチルアセトアミド、
N,N−ジメチルアセトアミド、N,N,N’,N’−
テトラメチル尿素、2−ピロリドン、N−メチル−2−
ピロリドン、カルバミド酸エステルなどがある。これら
のうち、N,N−ジメチルホルムアミド、N,N−ジメ
チルアセトアミド、N−メチル−2−ピロリドンがエポ
キシ樹脂硬化物を膨潤させる効果があり、分解物の溶解
性が良好なために特に好ましい。これらの溶媒は併用す
ることができる。また、ケトン系溶媒、エーテル系溶媒
などに代表されるその他の溶媒と併用しても構わない。The amide solvent which is a constituent of the etching solution of the present invention may be any solvent such as formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide,
N, N-dimethylacetamide, N, N, N ', N'-
Tetramethylurea, 2-pyrrolidone, N-methyl-2-
Examples include pyrrolidone and carbamic acid ester. Of these, N, N-dimethylformamide, N, N-dimethylacetamide, and N-methyl-2-pyrrolidone are particularly preferable because they have the effect of swelling the epoxy resin cured product and have good solubility of the decomposed product. These solvents can be used in combination. Further, it may be used in combination with other solvents such as a ketone solvent and an ether solvent.
【0021】ここで併用できるケトン系溶媒は、どのよ
うなものでもよく、例えば、アセトン、エチルエチルケ
トン、2−ペンタノン、3−ペンタノン、2−ヘキサノ
ン、メチルイソブチルケトン、2−ヘプタノン、4−ヘ
プタノン、ジイソブチルケトン、シクロヘキサノンなど
がある。Any ketone-based solvent may be used here, for example, acetone, ethyl ethyl ketone, 2-pentanone, 3-pentanone, 2-hexanone, methyl isobutyl ketone, 2-heptanone, 4-heptanone. , Diisobutyl ketone, cyclohexanone, etc.
【0022】ここで併用できるエーテル系溶媒は、どの
ようなものでもよく、例えば、ジプロピルエーテル、ジ
イソプロピルエーテル、ジブチルエーテル、アニソー
ル、フェネトール、ジオキサン、テトラヒドロフラン、
エチレングリコールジメチルエーテル、エチレングリコ
ールジエチルエーテル、ジエチレングリコールジメチル
エーテル、ジエチレングリコールジエチルエーテルなど
がある。Any ether type solvent may be used in combination, for example, dipropyl ether, diisopropyl ether, dibutyl ether, anisole, phenetole, dioxane, tetrahydrofuran,
Examples include ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, and diethylene glycol diethyl ether.
【0023】本発明のエッチング液構成成分であるアル
カリ金属化合物は、リチウム、ナトリウム、カリウム、
ルビジウム、セシウム等のアルカリ金属化合物で水に溶
解するものであればどのようなものでもよく、例えば、
リチウム、ナトリウム、カリウム、ルビジウム、セシウ
ム等の金属、水素化物、水酸化物、ホウ水素化物、アミ
ド、フッ化物、塩化物、臭化物、ヨウ化物、ホウ酸塩、
リン酸塩、炭酸塩、硫酸塩、硝酸塩、有機酸塩、フェノ
ール塩などが使用できる。これらのうち、アルカリ金属
水酸化物が好ましく、水酸化リチウム、水酸化ナトリウ
ム、水酸化カリウムが特に好ましい。Alkali metal compounds which are constituents of the etching solution of the present invention include lithium, sodium, potassium,
Any alkali metal compound such as rubidium and cesium can be used as long as it is soluble in water.
Metals such as lithium, sodium, potassium, rubidium and cesium, hydrides, hydroxides, borohydrides, amides, fluorides, chlorides, bromides, iodides, borates,
Phosphates, carbonates, sulfates, nitrates, organic acid salts, phenolic salts and the like can be used. Of these, alkali metal hydroxides are preferable, and lithium hydroxide, sodium hydroxide and potassium hydroxide are particularly preferable.
【0024】本発明のエッチング液は、アミド系溶媒と
アルカリ金属化合物の水溶液からなり、アルカリ金属化
合物水溶液のアルカリ金属化合物濃度はどのような濃度
でも構わないが、0.5重量%から60重量%の範囲が
好ましい。アルカリ金属化合物水溶液のアルカリ金属化
合物濃度が0.5重量%より低いとエポキシ樹脂硬化物
の分解速度が低下するため好ましくなく、60重量%よ
り高いと水にアルカリ金属化合物が完全に溶解できない
ので好ましくない。The etching solution of the present invention comprises an amide solvent and an aqueous solution of an alkali metal compound, and the concentration of the alkali metal compound in the aqueous solution of the alkali metal compound may be any concentration, but is from 0.5% by weight to 60% by weight. Is preferred. When the concentration of the alkali metal compound in the aqueous solution of the alkali metal compound is lower than 0.5% by weight, the rate of decomposition of the cured epoxy resin is lowered, which is not preferable, and when it is higher than 60% by weight, the alkali metal compound cannot be completely dissolved in water, which is preferable. Absent.
【0025】本発明のエッチング液は、アミド系溶媒
に、アルカリ金属化合物の水溶液を配合して調製する
が、どのような割合で配合しても相分離が起きてしま
う。しかしながら相分離しているために、エポキシ樹脂
の分解物が容易にアミド系溶媒相に溶解が可能である。
また、エッチングの際にエッチング液を90℃前後まで
加熱して使用しても構わない。The etching solution of the present invention is prepared by mixing an amide solvent with an aqueous solution of an alkali metal compound, but phase separation occurs even if it is mixed in any proportion. However, since the phases are separated, the decomposition product of the epoxy resin can be easily dissolved in the amide solvent phase.
Also, the etching solution may be heated to about 90 ° C. before use.
【0026】エッチング方法として、相分離したエッチ
ング液中に浸してもよいが、高速攪拌して均一に分散さ
せたエッチング液中に浸すのが好ましい。さらに気泡を
発生させたり、超音波により振動を与えたりしても構わ
ない。液中に浸さなくともスプレー等を使用しても構わ
ないし、さらに高圧をかけても構わない。As an etching method, it may be immersed in an etching solution which is phase-separated, but it is preferably immersed in an etching solution which is agitated at high speed and uniformly dispersed. Further, bubbles may be generated or vibration may be applied by ultrasonic waves. A spray or the like may be used without being immersed in the liquid, and further high pressure may be applied.
【0027】[0027]
実施例1 臭素化高分子量エポキシ重合体、フェノール樹脂マスク
化ジイソシアネート、クレゾールノボラック型エポキシ
樹脂からなる、フィルムの厚さが50μmの熱硬化性エ
ポキシ接着フィルムAS−3000E(日立化成工業株
式会社製、商品名)を、170℃、30分加熱して、エ
ポキシ樹脂組成物の硬化フィルムを作製した。この硬化
フィルムは、強靱であり、引っ張っても折っても割れた
り切れたりしなかった。エッチング液として、N,N−
ジメチルホルムアミド80重量%、水酸化ナトリウムの
水溶液(水酸化ナトリウム濃度:50重量%)20重量
%の混合溶液を調製した。硬化フィルムを60℃のエッ
チング液に浸し、軽く振とうしたところ、硬化フィルム
は15分で完全に溶解した。Example 1 Thermosetting epoxy adhesive film AS-3000E (manufactured by Hitachi Chemical Co., Ltd.) having a film thickness of 50 μm, which is composed of a brominated high molecular weight epoxy polymer, a phenol resin masked diisocyanate, and a cresol novolac type epoxy resin. (Name) was heated at 170 ° C. for 30 minutes to prepare a cured film of the epoxy resin composition. This cured film was tough and did not break or break when pulled or folded. As an etchant, N, N-
A mixed solution of 80% by weight of dimethylformamide and 20% by weight of an aqueous solution of sodium hydroxide (concentration of sodium hydroxide: 50% by weight) was prepared. When the cured film was immersed in an etching solution at 60 ° C. and shaken lightly, the cured film completely dissolved in 15 minutes.
【0028】実施例2 エッチング液として、N,N−ジメチルホルムアミド8
0重量%、水酸化カリウムの水溶液(水酸化カリウム濃
度:50重量%)20重量の混合溶液を調製した。実施
例1で作製した硬化フィルムを60℃のエッチング液に
浸し、軽く振とうしたところ、硬化フィルムは15分で
完全に溶解した。Example 2 N, N-dimethylformamide 8 was used as an etching solution.
A mixed solution of 0% by weight and 20% by weight of an aqueous solution of potassium hydroxide (potassium hydroxide concentration: 50% by weight) was prepared. The cured film prepared in Example 1 was dipped in an etching solution at 60 ° C. and shaken lightly. The cured film completely dissolved in 15 minutes.
【0029】実施例3 エッチング液として、N,N−ジメチルホルムアミド8
0重量%、水酸化リチウムの水溶液(水酸化リチウム濃
度:10重量%)20重量%の混合溶液を調製した。実
施例1で作製した硬化フィルムを60℃のエッチング液
に浸し、軽く振とうしたところ、硬化フィルムは45分
で完全に溶解した。Example 3 N, N-dimethylformamide 8 was used as an etching solution.
A mixed solution of 0 wt% and an aqueous solution of lithium hydroxide (lithium hydroxide concentration: 10 wt%) of 20 wt% was prepared. The cured film prepared in Example 1 was dipped in an etching solution at 60 ° C. and shaken lightly. The cured film completely dissolved in 45 minutes.
【0030】実施例4 エッチング液として、N,N−ジメチルホルムアミド8
0重量%、水酸化ナトリウムの水溶液(水酸化ナトリウ
ム濃度:10重量%)20重量%の混合溶液を調製し
た。実施例1で作製した硬化フィルムを60℃のエッチ
ング液に浸し、軽く振とうしたところ、硬化フィルムは
25分で完全に溶解した。Example 4 N, N-dimethylformamide 8 was used as an etching solution.
A mixed solution of 0% by weight and an aqueous solution of sodium hydroxide (sodium hydroxide concentration: 10% by weight) 20% by weight was prepared. The cured film prepared in Example 1 was dipped in an etching solution at 60 ° C. and shaken lightly. The cured film completely dissolved in 25 minutes.
【0031】実施例5 エッチング液として、N,N−ジメチルアセトアミド8
0重量%、水酸化ナトリウムの水溶液(水酸化ナトリウ
ム濃度:20重量%)20重量%の混合溶液を調製し
た。実施例1で作製した硬化フィルムを60℃のエッチ
ング液に浸し、軽く振とうしたところ、硬化フィルムは
20分で完全に溶解した。Example 5 N, N-dimethylacetamide 8 was used as an etching solution.
A mixed solution of 0% by weight and an aqueous solution of sodium hydroxide (sodium hydroxide concentration: 20% by weight) 20% by weight was prepared. The cured film prepared in Example 1 was dipped in an etching solution at 60 ° C. and shaken lightly. The cured film completely dissolved in 20 minutes.
【0032】実施例6 エッチング液として、N−メチル−2−ピロリドン80
重量%、水酸化ナトリウムの水溶液(水酸化ナトリウム
濃度:20重量%)20重量%の混合溶液を調製した。
実施例1で作製した硬化フィルムを60℃のエッチング
液に浸し、軽く振とうしたところ、硬化フィルムは25
分で完全に溶解した。Example 6 N-methyl-2-pyrrolidone 80 was used as an etching solution.
A mixed solution containing 20% by weight of an aqueous solution of sodium hydroxide (sodium hydroxide concentration: 20% by weight) was prepared.
The cured film produced in Example 1 was dipped in an etching solution at 60 ° C. and shaken lightly to give a cured film of 25
Completely dissolved in minutes.
【0033】比較例1 実施例1で作製した硬化フィルムを60℃のN,N−ジ
メチルホルムアミドに浸し、軽く振とうしたところ、2
4時間後でもフィルムは原形をとどめていた。Comparative Example 1 The cured film prepared in Example 1 was dipped in N, N-dimethylformamide at 60 ° C. and lightly shaken to give 2
The film remained in its original shape even after 4 hours.
【0034】比較例2 実施例1で作製した硬化フィルムを60℃の20重量%
水酸化ナトリウムの水溶液に浸し、軽く振とうしたとこ
ろ、24時間後でもフィルムは原形をとどめていた。Comparative Example 2 The cured film prepared in Example 1 was used at 20% by weight at 60 ° C.
When immersed in an aqueous solution of sodium hydroxide and shaken lightly, the film remained in its original shape even after 24 hours.
【0035】比較例3 実施例1で作製した硬化フィルムを60℃の5重量%水
酸化ナトリウム、5重量%過マンガン酸カリウムの混合
水溶液に浸し、軽く振とうしたところ、60分後でもフ
ィルムは表面が粗化されただけだった。Comparative Example 3 The cured film prepared in Example 1 was immersed in a mixed aqueous solution of 5% by weight sodium hydroxide and 5% by weight potassium permanganate at 60 ° C. and shaken lightly. The surface was only roughened.
【0036】[0036]
【発明の効果】以上に説明したように、本発明によっ
て、アミド系溶媒、アルカリ金属化合物の水溶液からな
る相分離したエッチング液により、二官能エポキシ樹脂
とハロゲン化二官能フェノール類を触媒の存在下、加熱
して重合させたフィルム形成能を有する分子量100,
000以上のエポキシ重合体、架橋剤、多官能エポキシ
樹脂からなる熱硬化性エポキシ樹脂組成物の硬化物をエ
ッチングすることができ、かつ、濃硫酸、クロム酸、ア
ルカリ過マンガン酸塩等の取り扱いに注意を要する薬品
を用いずにエッチングできる溶液を提供することができ
る。As described above, according to the present invention, a bifunctional epoxy resin and a halogenated bifunctional phenol are present in the presence of a catalyst by a phase-separated etching solution comprising an amide solvent and an aqueous solution of an alkali metal compound. , A molecular weight of 100 having a film-forming ability when heated and polymerized,
000 or more epoxy polymer, cross-linking agent, cured product of thermosetting epoxy resin composition consisting of polyfunctional epoxy resin can be etched, and for handling concentrated sulfuric acid, chromic acid, alkali permanganate, etc. It is possible to provide a solution that can be etched without the use of sensitive chemicals.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中祖 昭士 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akashi Nakaso 1500 Ogawa, Shimodate City, Ibaraki Prefecture Hitachi Chemical Co., Ltd. Shimodate Research Center
Claims (4)
ェノール類を触媒の存在下、加熱して重合させたフィル
ム形成能を有する分子量100,000以上のエポキシ
重合体、架橋剤、多官能エポキシ樹脂からなる熱硬化性
エポキシ樹脂組成物の硬化物をエッチングする溶液であ
って、アミド系溶媒と、アルカリ金属化合物の水溶液か
らなることを特徴とするエポキシ樹脂硬化物のエッチン
グ液。1. An epoxy polymer having a molecular weight of 100,000 or more, a cross-linking agent, and a polyfunctional epoxy resin having a film-forming ability, which is obtained by polymerizing a bifunctional epoxy resin and a halogenated bifunctional phenol by heating in the presence of a catalyst. A solution for etching a cured product of a thermosetting epoxy resin composition, which comprises an amide solvent and an aqueous solution of an alkali metal compound.
アミド、N,N−ジメチルアセトアミド、N−メチル−
2−ピロリドンのいずれかであることを特徴とする請求
項1に記載のエポキシ樹脂硬化物のエッチング液。2. An amide-based solvent is N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-
It is any one of 2-pyrrolidone, The etching liquid of the epoxy resin hardened material of Claim 1 characterized by the above-mentioned.
化物であることを特徴とする請求項1または2に記載の
エポキシ樹脂硬化物のエッチング液。3. The etching solution for an epoxy resin cured product according to claim 1, wherein the alkali metal compound is an alkali metal hydroxide.
水酸化ナトリウム、水酸化カリウムのいずれかであるこ
とを特徴とする請求項3に記載のエポキシ樹脂硬化物の
エッチング液。4. The alkali metal compound is lithium hydroxide,
The etching solution for an epoxy resin cured product according to claim 3, which is either sodium hydroxide or potassium hydroxide.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13509095A JP3286116B2 (en) | 1995-06-01 | 1995-06-01 | Epoxy resin cured product etchant |
JP29809698A JPH11193334A (en) | 1995-06-01 | 1998-10-20 | Etchant for cured epoxy resin |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13509095A JP3286116B2 (en) | 1995-06-01 | 1995-06-01 | Epoxy resin cured product etchant |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29809698A Division JPH11193334A (en) | 1995-06-01 | 1998-10-20 | Etchant for cured epoxy resin |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08325437A true JPH08325437A (en) | 1996-12-10 |
JP3286116B2 JP3286116B2 (en) | 2002-05-27 |
Family
ID=15143608
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13509095A Expired - Fee Related JP3286116B2 (en) | 1995-06-01 | 1995-06-01 | Epoxy resin cured product etchant |
JP29809698A Pending JPH11193334A (en) | 1995-06-01 | 1998-10-20 | Etchant for cured epoxy resin |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29809698A Pending JPH11193334A (en) | 1995-06-01 | 1998-10-20 | Etchant for cured epoxy resin |
Country Status (1)
Country | Link |
---|---|
JP (2) | JP3286116B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001025317A2 (en) * | 1999-10-07 | 2001-04-12 | Hitachi Chemical Co., Ltd. | Method of treating epoxy resin-cured product |
JP2001172426A (en) * | 1999-10-07 | 2001-06-26 | Hitachi Chem Co Ltd | Method for treating epoxyresin-cured product |
JP2002363339A (en) * | 2001-06-12 | 2002-12-18 | Hitachi Chem Co Ltd | Solution for treating cured epoxy resin, method of treatment by using it, and treated product |
JP2005255902A (en) * | 2004-03-12 | 2005-09-22 | Hitachi Chem Co Ltd | Treating liquid for epoxy resin cured product, and treating method using the same |
JP2007297641A (en) * | 1999-10-07 | 2007-11-15 | Hitachi Chem Co Ltd | Method of recycling epoxy resin-cured product |
-
1995
- 1995-06-01 JP JP13509095A patent/JP3286116B2/en not_active Expired - Fee Related
-
1998
- 1998-10-20 JP JP29809698A patent/JPH11193334A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001025317A2 (en) * | 1999-10-07 | 2001-04-12 | Hitachi Chemical Co., Ltd. | Method of treating epoxy resin-cured product |
JP2001172426A (en) * | 1999-10-07 | 2001-06-26 | Hitachi Chem Co Ltd | Method for treating epoxyresin-cured product |
WO2001025317A3 (en) * | 1999-10-07 | 2002-05-02 | Hitachi Chemical Co Ltd | Method of treating epoxy resin-cured product |
US6962628B1 (en) | 1999-10-07 | 2005-11-08 | Hitachi Chemical Co., Ltd. | Method of treating epoxy resin-cured product |
JP2007297641A (en) * | 1999-10-07 | 2007-11-15 | Hitachi Chem Co Ltd | Method of recycling epoxy resin-cured product |
JP2002363339A (en) * | 2001-06-12 | 2002-12-18 | Hitachi Chem Co Ltd | Solution for treating cured epoxy resin, method of treatment by using it, and treated product |
JP2005255902A (en) * | 2004-03-12 | 2005-09-22 | Hitachi Chem Co Ltd | Treating liquid for epoxy resin cured product, and treating method using the same |
Also Published As
Publication number | Publication date |
---|---|
JPH11193334A (en) | 1999-07-21 |
JP3286116B2 (en) | 2002-05-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3476027B2 (en) | Manufacturing method of epoxy resin | |
JP3286117B2 (en) | Epoxy resin cured product etchant | |
JP3286116B2 (en) | Epoxy resin cured product etchant | |
US4785061A (en) | Method for reducing the aliphatic halide content of epoxy resins using a solvent mixture including a polar aprotic solvent | |
JPS585925B2 (en) | Epoxy resin composition for carbon fiber prepreg | |
JP3286115B2 (en) | Epoxy resin cured product etchant | |
JP4062554B2 (en) | Etching solution for cured epoxy resin | |
JP4765202B2 (en) | Treatment solution for cured epoxy resin, treatment method and treatment product using the same | |
JP3104314B2 (en) | Epoxy resin composition | |
JPH09316445A (en) | Etching solution for epoxy resin cured product | |
JP2702515B2 (en) | Purification method of epoxy resin | |
JP2532119B2 (en) | Method for producing multifunctional epoxy resin | |
JPH06184513A (en) | Production of assistant for epoxy adhesive, and epoxy adhesive | |
JP2000143847A (en) | Etching method for cured epoxy resin | |
JP5002865B2 (en) | Epoxy adhesive film and adhesion method | |
JP5271467B2 (en) | Temporary bonding method using epoxy adhesive film | |
JP2774345B2 (en) | Novel epoxy resin and its production method | |
JPH05295090A (en) | Epoxy resin composition | |
JP2000129021A (en) | Processing method for cured epoxy resin | |
JPH05209110A (en) | Epoxy resin composition for printed-wiring board | |
JP2000143844A (en) | Etching process for epoxy resin cured product | |
JPH045284A (en) | Production of epoxy compound | |
JPH11147934A (en) | Epoxy resin composition and high-molecular-weight epoxy film prepared therefrom | |
JPH10147765A (en) | Production of epoxy adhesive film | |
JPH07196767A (en) | Epoxy resin composition and its cured product |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 6 Free format text: PAYMENT UNTIL: 20080308 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 7 Free format text: PAYMENT UNTIL: 20090308 |
|
LAPS | Cancellation because of no payment of annual fees |