JPH08322270A - Stator for ultrasonic driving device - Google Patents
Stator for ultrasonic driving deviceInfo
- Publication number
- JPH08322270A JPH08322270A JP7153851A JP15385195A JPH08322270A JP H08322270 A JPH08322270 A JP H08322270A JP 7153851 A JP7153851 A JP 7153851A JP 15385195 A JP15385195 A JP 15385195A JP H08322270 A JPH08322270 A JP H08322270A
- Authority
- JP
- Japan
- Prior art keywords
- stator
- piezoelectric vibrator
- electrode
- tip
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、正三角形の圧電振動子
の先端を切り落とした超音波駆動装置のステータに関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stator of an ultrasonic drive device in which a piezoelectric vibrator having an equilateral triangle is cut off.
【0002】[0002]
【従来技術】本出願人は、超音波駆動装置として、扇形
又は二等辺三角計の圧電振動子の一方の面の全面に電極
を接着し、扇形又は二等辺三角計の他方の面に先端から
対抗する円弧又は辺に分割部を設けて2つの電極を接着
し、先端に駆動体を接触させた超音波駆動装置を提案し
た(特願昭63−32414号参照)。2. Description of the Related Art The applicant of the present invention, as an ultrasonic drive device, adheres an electrode to the entire surface of one surface of a piezoelectric vibrator of a fan-shaped or isosceles trigonometer, and from the tip to the other surface of the fan-shaped or isosceles trigonometer. We have proposed an ultrasonic drive device in which two electrodes are adhered to each other by providing divided parts on opposing arcs or sides, and a driver is brought into contact with the tip (see Japanese Patent Application No. 63-32414).
【0003】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな超音波駆動装置では、共振点がいくつもあり、又、
圧電振動子のインピーダンスも数百オームと高く、自動
追尾回路を使用しても調整が困難であり、さらに、超音
波振動子のインピーダンスが高いために高い駆動電圧を
必要とした。However, in such an ultrasonic driving device, there are many resonance points, and
The impedance of the piezoelectric vibrator is as high as several hundreds of ohms, it is difficult to adjust even with the use of an automatic tracking circuit, and the high impedance of the ultrasonic vibrator requires a high driving voltage.
【0004】[0004]
【問題点を解決するための手段】本発明は、正三角形の
3つの先端を僅かに同じ長さだけそれぞれ切り落とし、
該3つの先端に対抗する辺のほぼ中央に固定用切り欠き
を設けた圧電振動子の一方の面の1つの先端に先端チッ
プを接着し、かつ該1つの先端から対抗する辺の中央に
分割部を設けて2つの電極を接着し、他方の面の全面に
電極を接着するものである。According to the present invention, three tips of an equilateral triangle are cut off by slightly the same length,
A tip chip is adhered to one tip of one surface of a piezoelectric vibrator having a fixing notch provided substantially at the center of the side opposite to the three tips, and the tip is divided from the one tip to the center of the opposite side. A part is provided to bond the two electrodes, and the electrodes are bonded to the entire other surface.
【0005】[0005]
【作用】本発明によれば、圧電振動子の形状を正三角形
とし、小型で薄くすることにより、共振点が限定される
ために、自動追尾が容易となり、又、インピーダンスが
低いために、低電圧駆動が容易となり、低価格で構成で
きる。According to the present invention, by making the shape of the piezoelectric vibrator an equilateral triangle, and making it small and thin, the resonance point is limited, which facilitates automatic tracking, and because the impedance is low, it is low. It is easy to drive with voltage and can be constructed at low cost.
【0006】[0006]
【実施例】図1は、本発明の1実施例の超音波駆動装置
のステータの一方の面の構成図、図2は図1のステータ
の他方の面の構成図で、正三角形の圧電振動子1の3つ
の先端2、3、4が同じ長さだけ僅かに切り落とされ、
それら3つの先端2、3、4に対抗する辺5、6、7の
ほぼ中央に支持用切り欠き8、9、10が形成され、
又、1つの先端2からその対抗する辺6の間の中央に分
割部11で分割されて、その両側に2つの電極12、1
3が形成され、支持用切り欠き9の周囲に電極切り取り
部9aがもうけられ、又、圧電振動子1の他方の面の全
面に全面電極14が接着されており、又、支持用切り欠
き8、10の周囲に電極切り取り部8a、10aが形成
されてステータ15が構成されている。1 is a structural view of one surface of a stator of an ultrasonic driving apparatus according to an embodiment of the present invention, and FIG. 2 is a structural view of the other surface of the stator shown in FIG. The three tips 2, 3, 4 of the child 1 are slightly cut off by the same length,
Supporting notches 8, 9, 10 are formed substantially in the center of sides 5, 6, 7 facing the three tips 2, 3, 4.
Further, a split portion 11 is split in the center between one tip 2 and its opposing side 6, and two electrodes 12, 1 are provided on both sides thereof.
3 is formed, an electrode cutout portion 9a is provided around the supporting notch 9, and the entire surface electrode 14 is adhered to the entire other surface of the piezoelectric vibrator 1, and the supporting notch 8 is formed. The electrode cutouts 8 a and 10 a are formed around the circumference 10 to form the stator 15.
【0007】そして、電極切り取り部9aは支持用切り
欠き9に半田付け又は導電ペーストで圧電振動子1を支
持するときに電極12、13が接触しないように構成さ
れ、又、電極切り取り部8a、10aは支持用切り欠き
8、10にそれぞれ半田付け又はペーストで支持される
時、他方の面の全面電極14が接触しないように構成さ
れ、さらに、摺動させる先端2の部分は金属又は耐摩耗
性の優れた素材の先端チップ2aを接着している。The electrode cutout 9a is constructed so that the electrodes 12 and 13 do not come into contact with each other when the piezoelectric vibrator 1 is supported by soldering or conductive paste in the support cutout 9, and the electrode cutout 8a, When the supporting notches 8 and 10 are supported by soldering or paste, the whole surface electrode 10a of the other surface does not come into contact with the supporting notches 8 and 10. Further, the sliding tip portion 2 is made of metal or wear-resistant. The tip 2a made of a material having excellent properties is bonded.
【0008】このように構成した本実施例のステータで
は、圧電振動子1の一方の面の一方の電極13と他方の
面の全面電極14の間に発振装置を接続して圧電振動子
1を半面駆動すると、縦軸にインピーダンスを取り、横
軸に周波数を取った図3の実線で示す曲線Aのインピー
ダンスが急激に低くなる点Bにおいて、圧電振動子1は
図4に示すようにベンディング一次モード振動16が発
生し、圧電振動子1の先端チップ2aは矢印17の方向
に接触した駆動体を移動する振動が発生するので、駆動
体を矢印17の方向に直線移動することができる。In the stator of this embodiment having such a structure, the oscillating device is connected between one electrode 13 on one surface of the piezoelectric vibrator 1 and the whole electrode 14 on the other surface of the piezoelectric vibrator 1. When driven half-way, at a point B where the impedance of the curve A shown by the solid line in FIG. 3 in which the vertical axis represents the impedance and the horizontal axis represents the frequency, the impedance sharply decreases, the piezoelectric vibrator 1 is bent as shown in FIG. Since mode vibration 16 is generated and the tip 2a of the piezoelectric vibrator 1 moves in the direction of arrow 17 to move the contacted driving body, the driving body can be linearly moved in the direction of arrow 17.
【0009】さらに、圧電振動子1の電極13と全面電
極14の間に印加する電圧の周波数をさらに高くして行
くと、曲線Aの次にインピーダンスが急激に低くなる点
Cにおいて、図5に示すように、圧電振動子1に縦振動
18及びベンディング2次モード振動19が発生するの
で、縦振動18とベンディング2次モード振動19の合
成振動により、圧電振動子1の先端2に矢印方向19の
楕円振動が発生し、圧電振動子1の先端2に接触した駆
動体を回転させることができる。Further, when the frequency of the voltage applied between the electrode 13 and the entire surface electrode 14 of the piezoelectric vibrator 1 is further increased, at the point C where the impedance sharply decreases next to the curve A, as shown in FIG. As shown, since the longitudinal vibration 18 and the bending secondary mode vibration 19 are generated in the piezoelectric vibrator 1, the combined vibration of the longitudinal vibration 18 and the bending secondary mode vibration 19 causes the tip end 2 of the piezoelectric vibrator 1 to move in the arrow direction 19 The elliptic vibration is generated, and the driving body contacting the tip 2 of the piezoelectric vibrator 1 can be rotated.
【0010】なお、図4及び図5では、圧電振動子1の
一方の面の電極13と他方の面の全面電極14の間に発
振装置を接続した例を示したが、圧電振動子1の一方の
面の電極12と他方の面の電極14の間に発振装置を接
続すると、図4の矢印17は反対方向にベンディング一
方モード振動が発生し、又、図5では、矢印19の方向
が反転した楕円振動が発生し、圧電振動子1の先端チッ
プ2aに接触した駆動体をそれぞれ反対方向に駆動する
ことができる。4 and 5, an example in which an oscillating device is connected between the electrode 13 on one surface of the piezoelectric vibrator 1 and the whole surface electrode 14 on the other surface is shown. When an oscillating device is connected between the electrode 12 on one surface and the electrode 14 on the other surface, bending one-mode vibration occurs in the opposite direction to the arrow 17 in FIG. 4, and in FIG. Inverted elliptical vibration is generated, and the driving bodies that are in contact with the tip 2a of the piezoelectric vibrator 1 can be driven in opposite directions.
【0011】ちなみに、一方の面の電極12、13と他
方の面の電極14の間に発振装置を接続して圧電振動子
1を全面駆動すると、図3の点線で示す曲線Dのインピ
ーダンスが急激に低くなる点Eにおいて、図6に示すよ
うに圧電振動子1の中心から3つの先端2、3、4の方
向に呼吸振動20、21、22が発生するが、この呼吸
振動20、21、22は圧電振動子1の先端2、3、4
が1度に突出するだけであるので、圧電振動子1の先端
チップ2aに接触した駆動体を押し出すだけになる。Incidentally, when an oscillating device is connected between the electrodes 12 and 13 on one surface and the electrode 14 on the other surface and the piezoelectric vibrator 1 is entirely driven, the impedance of the curve D shown by the dotted line in FIG. 6, the respiratory vibrations 20, 21, 22 are generated from the center of the piezoelectric vibrator 1 toward the three tips 2, 3, 4, as shown in FIG. Reference numeral 22 denotes the tips 2, 3, 4 of the piezoelectric vibrator 1.
Only protrudes once, so that only the driving body in contact with the tip tip 2a of the piezoelectric vibrator 1 is pushed out.
【0012】図7は本発明の他の実施例の圧電振動子の
辺6側から見たステータの構成図で、2つの圧電振動子
1A、1Bの全面電極14A、14Bを互いに接着し、
分割部11A、11Bで分割されたそれぞれ2つの電極
12A、13A、12B、13Bが外側になるようにス
テータ23を構成する。FIG. 7 is a constitutional view of a stator of a piezoelectric vibrator according to another embodiment of the present invention as seen from the side 6 side, and the whole surface electrodes 14A and 14B of the two piezoelectric vibrators 1A and 1B are adhered to each other,
The stator 23 is configured such that the two electrodes 12A, 13A, 12B and 13B divided by the dividing portions 11A and 11B are on the outside.
【0013】このように構成した本実施例では、圧電振
動子1A、1Bの先端チップ(図示せず)が同方向の横
振動又は回転振動を発生するように発振装置を接続して
もよいし、互いに反対方向になるように横振動又は回転
振動を発生するようにすることにより、トルクを2倍に
したり、対抗する駆動体を逆方向に駆動することができ
る。In this embodiment thus constructed, the oscillator may be connected so that the tips (not shown) of the piezoelectric vibrators 1A and 1B generate lateral vibration or rotational vibration in the same direction. By generating the transverse vibration or the rotational vibration in the opposite directions, the torque can be doubled, or the opposing driving body can be driven in the opposite direction.
【0014】[0014]
【発明の効果】以上の説明から明らかなように、本発明
の超音波駆動装置のステータでは、正三角形の先端を僅
かに切り取った圧電振動子の一方の面に2つの電極を接
着し、他方の面に全面電極を設け、2つの電極の一方と
全面電極との間に発振装置を接続することにより、圧電
振動子の先端に横方向の振動及び回転振動を発生し、こ
の先端に駆動体を接触させることにより、駆動体を直線
方向に駆動したり、回転することができ、又、圧電振動
子の形状を正三角形とすることにより、共振点が限ら
れ、自動追尾回路により調整が容易となり、又、インピ
ーダンスが低いので、印加電圧が低くて良いという利点
があり、圧電振動子の共振と先端チップの共振の合成に
より振幅が増幅される。As is apparent from the above description, in the stator of the ultrasonic driving apparatus of the present invention, two electrodes are bonded to one surface of the piezoelectric vibrator in which the tip of an equilateral triangle is slightly cut off, and the other is bonded to the other surface. By providing a full-scale electrode on the surface of the piezoelectric element and connecting an oscillating device between one of the two electrodes and the full-scale electrode, lateral vibration and rotational vibration are generated at the tip of the piezoelectric vibrator, and a driving member is provided at this tip. The actuator can be driven or rotated in a linear direction by touching with, and the shape of the piezoelectric vibrator is an equilateral triangle, which limits the resonance point and facilitates adjustment by the automatic tracking circuit. In addition, since the impedance is low, there is an advantage that the applied voltage can be low, and the amplitude is amplified by the combination of the resonance of the piezoelectric vibrator and the resonance of the tip chip.
【図1】本発明の実施例の超音波駆動装置のステータの
一方の面の平面図である。FIG. 1 is a plan view of one surface of a stator of an ultrasonic drive device according to an embodiment of the present invention.
【図2】図1のステータの他方の面の平面図である。FIG. 2 is a plan view of the other surface of the stator shown in FIG.
【図3】図1のステータのインピーダンスと印加した電
圧の周波数との関係を示した図である。3 is a diagram showing the relationship between the impedance of the stator of FIG. 1 and the frequency of the applied voltage.
【図4】図1のステータのベンディング一次モードの振
動の方向を示した図である。4 is a diagram showing a direction of vibration of a bending primary mode of the stator of FIG.
【図5】図1のステータのベンディング二次モードの振
動の方向を示した図である。5 is a diagram showing directions of vibration in a bending secondary mode of the stator of FIG.
【図6】図1のステータの呼吸振動を示した図である。FIG. 6 is a diagram showing respiratory vibration of the stator of FIG.
【図7】本発明の他の実施例の超音波駆動装置のステー
タの側面図である。FIG. 7 is a side view of a stator of an ultrasonic drive device according to another embodiment of the present invention.
1 圧電振動子 2、3、4 先端回路 2a 先端チップ 5、6、7 辺 8、9、10 固定用切り欠き 11 分割部 12、13 電極 14 全面電極 15 ステータ DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator 2, 3, 4 Tip circuit 2a Tip chip 5, 6, 7 Sides 8, 9, 10 Fixing notch 11 Dividing part 12, 13 Electrode 14 Full surface electrode 15 Stator
Claims (2)
だけそれぞれ切り落とし、該3つの先端に対抗する辺の
ほぼ中央に固定用切り欠きを設けた圧電振動子の一方の
面の1つの先端に先端チップを接着し、かつ該1つの先
端から対抗する辺の中央に分割部を設けて2つの電極を
接着し、他方の面の全面に電極を接着することを特徴と
する超音波駆動装置のステータ。1. A piezoelectric vibrator, wherein three tips of an equilateral triangle are cut off by slightly the same length, and a fixing notch is provided substantially at the center of a side facing the three tips. Ultrasonic drive, characterized in that a tip is adhered to the tip, a split portion is provided in the center of the side facing from the one tip to adhere two electrodes, and the electrodes are adhered to the entire other surface. The stator of the device.
着して、2つの圧電振動子を並列駆動することを特徴と
する請求項1記載の超音波駆動装置のステータ。2. The stator for an ultrasonic wave drive device according to claim 1, wherein the two electrodes of the two piezoelectric vibrators are adhered to each other to drive the two piezoelectric vibrators in parallel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7153851A JPH08322270A (en) | 1995-05-29 | 1995-05-29 | Stator for ultrasonic driving device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7153851A JPH08322270A (en) | 1995-05-29 | 1995-05-29 | Stator for ultrasonic driving device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08322270A true JPH08322270A (en) | 1996-12-03 |
Family
ID=15571496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7153851A Pending JPH08322270A (en) | 1995-05-29 | 1995-05-29 | Stator for ultrasonic driving device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08322270A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7825566B2 (en) | 2007-08-08 | 2010-11-02 | Konica Minolta Opto, Inc. | Ultrasonic actuator and method for manufacturing piezoelectric deformation portion used in the same |
US7944129B2 (en) | 2007-07-13 | 2011-05-17 | Konica Minolta Opto, Inc. | Ultrasonic actuator and magnetic recording apparatus using the same |
-
1995
- 1995-05-29 JP JP7153851A patent/JPH08322270A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7944129B2 (en) | 2007-07-13 | 2011-05-17 | Konica Minolta Opto, Inc. | Ultrasonic actuator and magnetic recording apparatus using the same |
US7825566B2 (en) | 2007-08-08 | 2010-11-02 | Konica Minolta Opto, Inc. | Ultrasonic actuator and method for manufacturing piezoelectric deformation portion used in the same |
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