JPH08315344A - Floating head slider - Google Patents

Abstract

PURPOSE: To easily work a crown and camber of a desired radius of curvature at a low cost without using a lapping plate of a specific shape. CONSTITUTION: This floating head slider has plural rails 12, 13 which are formed on a front surface 11 and extend in the longitudinal direction, a groove 14 which is formed between these rails, tapered parts 12a, 13a which are disposed on the air inflow end side of the respective rails and a magnetic head which is disposed on the end face on the air outflow end of the one rail. The max. height Rmax of the rear surface is 0.03 to 5μm and the rear surface average roughness/groove plane average roughness with respect to the longitudinal direction is <=0.7. The rear surface average roughness/groove plane average roughness is <=5.0 with respect to the transverse direction and the rear surface formed flat is subjected to polishing, thereby, the crown and chamber are formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flying head slider having a magnetic head for recording / reproducing on / from a magnetic disk or a magneto-optical disk.

[0002]

2. Description of the Related Art Conventionally, a hard disk drive device built in or connected to a computer or the like is shown in FIG.
It is configured as shown in FIG. In FIG. 24, the hard disk drive device 1 is provided with a spindle motor (not shown) on a plane portion of a housing 2 formed of aluminum alloy or the like, and is rotationally driven at a constant angular velocity by the spindle motor. A double-sided magnetic disk 3 is provided.

Further, an arm 4 is attached to the housing 2 so as to be swingable around a vertical axis 4a. A voice coil 5 is attached to one end of this arm 4,
A slider 6 is attached to the other end of the arm 4.

Magnets 7a and 7b are mounted on the housing 2 so as to sandwich the voice coil 5 therebetween. Thus, the voice coil 5 and the magnet 7
The voice coil motor 7 is composed of a and 7b.

When a current is supplied to the voice coil 5 from the outside, the arm 4 moves around the vertical axis 4a based on the force generated by the magnetic fields of the magnets 7a and 7b and the current flowing through the voice coil 5. It is rotated. As a result, the slider 6 attached to the other end of the arm 4 is
As shown by the arrow X in FIG. 25, the magnetic disk 3 is moved substantially in the radial direction. Therefore, the magnetic head 8 (see FIG. 26) provided on the slider 6 performs seek operation on the magnetic disk 3. Thus, recording / recording of information on a predetermined track of the magnetic disk 3 is performed.
Regeneration can take place.

Here, the slider 6 is constructed as shown in FIG. That is, the slider 6 is formed with rails 6a and 6b acting as air bearing surfaces on both sides of a lower surface which is one main surface thereof, and taper portions 6c and 6d are provided on the air inflow end sides of the rails 6a and 6b. Is provided. As a result, as shown in FIG. 25, when the slider 6 approaches the surface of the rotating magnetic disk 3, as the magnetic disk 3 rotates,
The slider 6 receives a levitation force by the airflow flowing between the rails 6a and 6b of the slider 6 and the surface of the magnetic disk 3.

As a result of this levitation force, the slider 6 and the magnetic head 8 attached to the slider 6 levitate from the surface of the magnetic disk 3 with a minute distance (flying amount) d, as shown in FIG. ing. Thus, abrasion damage of the magnetic disk 3 caused by the magnetic head 8 directly contacting the surface of the magnetic disk 3 is prevented. The flying height d is generally about 0.1 μm.

According to the flying-type head slider 6 thus constructed, as shown in FIG. 27, even if the surface of the magnetic disk 3 has some irregularities, the slider 6 and the magnetic disk 6 on the same track can be formed. The flying height d of the head 8 from the surface of the magnetic disk 3 is kept substantially constant.

By the way, in the above hard disk drive device 1, at the time of startup, the flying head slider 6 is used.
In the state of being in contact with the innermost circumference of the magnetic disk 3, the spindle motor starts up. Therefore, at the time of start-up, the head slider 6 moves while rubbing the surface of the magnetic disk 3 first, and then floats above the surface of the magnetic disk 3. Similarly, when the head slider 6 stops,
Will contact the innermost circumference of the magnetic disk 3. Therefore, the surface of the magnetic disk 3 is mirror-finished so that the head slider 6 can smoothly float on the surface of the magnetic disk 3.

Such a hard disk drive device 1
Is CSS (Contact Start Stop)
This is called a system, but since the head slider 6 contacts the surface of the magnetic disk 3 at the time of starting and stopping,
For example, for a long time, the hard disk drive device 1
When is not used, the head slider 6 is left in contact with the surface of the magnetic disk 3 in a mirror state for a long period of time. Therefore, the surfaces of the rails 6a and 6b that act as the air bearing surface of the head slider 6 may be attracted to the surface of the magnetic disk 3.

Therefore, when the hard disk drive device is started while the surfaces of the rails 6a and 6b are attracted to the surface of the magnetic disk 3, the attraction causes the surface of the magnetic disk 3 to be damaged, so that the magnetic disk 3 is damaged. There is a problem that the recorded magnetic recording information is destroyed and the flying head slider 6 is also destroyed.

For this reason, in the flying head slider 6, as shown in FIG. 28, the entire surface on which the rails 6a and 6b are formed is in the longitudinal direction, that is, in the extending and lateral directions of the rail, and substantially orthogonal to the rail. It is formed to have a convex curvature with respect to the direction. That is, the head slider 6 has a convex crown A in the longitudinal direction as shown in FIG.
And in the lateral direction, as shown in FIG. 30, it has a convex camber B.

As a result, the rails 6a and 6b are provided with the crown A having a convex curvature in the longitudinal direction and the camber B having a convex curvature in the lateral direction, so that the starting time and The contact area with the surface of the magnetic disk 3 when stopped is reduced. Thus, the flying type head slider 6 is prevented from being attracted to the surface of the magnetic disk 3 even if it is left for a long period of time.

[0014]

By the way, in the flying type head slider 6 having such a structure, the rail 6 is used.
The entire surface on the a, 6b side is processed using, for example, a lapping machine. This lapping machine is manufactured so as to have a radius of curvature corresponding to the crown and the camber, whereby the head slider 6 having the crown and the camber described above is formed.

However, such a lapping machine changes its radius of curvature due to wear even after being used several times. Therefore, it is necessary to prepare a large number of lapping machines,
There was a problem that the cost would be high.

A lapping machine having a radius of curvature corresponding to such a crown and camber is relatively difficult to manufacture, and therefore is expensive, and a plurality of types of head sliders having different crowns and cambers are provided. In the case of forming it, it is necessary to prepare a lapping machine corresponding to the crown and the camber for each type, and there is a problem that the cost becomes higher.

In view of the above points, the present invention is a flying type head slider, which can easily and inexpensively process a crown and a camber having a desired radius of curvature without using a lapping machine having a peculiar shape. Is intended to provide.

[0018]

According to the present invention, the above object is to provide a plurality of rails formed on a surface facing a recording medium, grooves formed between the rails, and air of each rail. A taper portion provided on the inflow end side and a magnetic head provided on the end surface on the air outflow end side of one of the rails, and the maximum height R of the back surface.
When max is 0.03 μm to 5 μm, the rear surface average roughness / groove surface average roughness in the rail extending direction is
0.7 or less, the back surface average roughness / groove surface average roughness is 5.0 or less in the direction substantially orthogonal to the rail, and the back surface formed flat is polished, This is achieved by a flying head slider in which the surface has a crown having a convex curvature in the extending direction of the rail and a camber having a convex curvature in a direction substantially orthogonal to the rail.

In the flying head slider according to the present invention, preferably, the crown has a maximum height of 1 to 100 nm.
Is.

In the flying head slider according to the present invention, preferably, the crown is formed to have a desired maximum height by selecting a ratio of back surface average roughness / groove surface average roughness in the rail extending direction. It

In the flying head slider according to the present invention, the camber preferably has a maximum height of 1 to 30 nm.
Is.

In the flying head slider according to the present invention, the camber preferably has a desired maximum height by selecting a ratio of the average back surface roughness / the average groove surface roughness in the direction substantially orthogonal to the rail. It is formed.

[0023]

According to the above construction, the levitation force is generated by the air flow flowing between the surface of the rail acting as an air bearing surface and the surface of the recording medium. Therefore,
The levitation force causes the flying head slider to fly above the surface of the recording medium.

In this case, the surface of the flying head slider is provided with a convex crown and camber. The crown and camber are first formed on the back surface by a flat surface plate or the like, and then the back surface. Is polished over the entire surface. At this time, the back surface has a ratio of the back surface average roughness to the groove surface average roughness of 0.7 or less with respect to the rail extending direction.
A convex crown will be formed. Further, the air-lubricated surface has a ratio of the average back surface roughness to the average groove surface roughness of 5.0 or less in the direction substantially orthogonal to the rail, so that a convex camber is formed by polishing. It will be.

When the crown is formed to a desired maximum height by selecting the ratio of the average back surface roughness / average groove surface roughness in the rail extending direction, the ratio of the average roughness is When properly selected, a crown having an arbitrary shape is formed by polishing.

When the camber is formed to have a desired maximum height by selecting the ratio of the average back surface roughness / average groove surface roughness in the direction substantially orthogonal to the rail, the average roughness If the ratio is appropriately selected, the camber having an arbitrary shape is formed by the polishing process.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to FIGS. In addition, since the Examples described below are preferred specific examples of the present invention, various technically preferable limitations are given. However, the scope of the present invention particularly limits the present invention in the following description. The embodiment is not limited to these embodiments unless otherwise stated.

FIG. 1 shows an embodiment of a flying head slider according to the present invention. In FIG. 1, the flying head slider 10 is formed as a flat rectangular parallelepiped as a whole, and has two rails 12 and 13 on a surface 11 thereof.
A groove portion 14 located between the rails 12 and 13 is provided.

The rails 12 and 13 are disposed on both sides of the surface 11, and the surfaces of the rails 12 and 13 act as so-called air bearing surfaces, so that the rail 1 is provided.
The levitation force of the head slider 10 is generated by the dynamic pressure of the air flow flowing between the surfaces of the magnetic recording disks 2 and 13.

Further, each rail 12, 13 is formed with a taper portion 12a, 13a which gradually descends toward the tip end side in the drawing on the air inflow side. The tapered portions 12a and 13a are formed to have a predetermined angle with respect to the surfaces of the rails 12 and 13 that act as air bearing surfaces.

In the illustrated case, the groove portion 14 is formed so as to extend along the longitudinal direction of the surface 11 from the air inflow end to the air outflow end. Here, the flying head slider 10 has the entire surface 11 of the rail 1
2, 13 in the extending direction, that is, the longitudinal direction in the figure and a direction substantially orthogonal to the rails 12, 13; that is, having a convex curvature in the lateral direction, that is, having a convex crown in the extending direction of the rails. , And has a convex camber in a direction substantially orthogonal to the rail.

The above structure is similar to that of the conventional flying type head slider 6 shown in FIG. 28, but in the flying type head slider 10 according to the embodiment of the present invention, the surface 1
The crown and camber of No. 1 are formed as follows.

That is, as shown in FIGS. 2 and 3, the flying head slider 10 is formed entirely flat by a normal flat platen. Here, the back surface of the flying head slider 10 has a back surface average roughness in the longitudinal direction /
Groove surface average roughness and horizontal surface back surface average roughness /
The groove surface average roughness is selected to be a predetermined value or less.
As a result, as shown in FIGS. 2 and 3, the front surface formed to be flat has a crown A having a convex curvature in the longitudinal direction and a camber having a convex curvature in the lateral direction by polishing the back surface. Molded to have B.

Here, the molding of the crown and the camber by the above-mentioned polishing process is based on the following principle.
That is, as shown in FIG. 6, the flat head slider block 20 has, for example, a length of 25 mm, a width of 2.5 mm, and a thickness of 0.6 mm. Each of them is, for example, 1/4 μ diamond-lap processed. The back surface 22 is, for example, 1 μm.
When the back surface 22 is polished by using a diamond lap, a V-polish # 1500 abrasive, and a V-polish # 320 abrasive, the back surface 22 changes its shape as shown in FIG.

In the graph of FIG. 7, Ra is the center line average roughness, RMS is the root mean square roughness, Rt is the maximum roughness height,
Rmax represents the maximum height of the cross section, and Rz represents the 10-point average roughness. This shape change occurs such that the amount of deformation increases as the roughness increases with respect to the 1/4 μ lap surface of the surface 21, that is, the 1/4 μ lap surface of the surface 21 becomes concave.

By applying the above principle, the air-lubricated surface 11 of the flying head slider 10 is formed in a convex shape. That is, as shown in FIG. 8, the flat head slider block 30 has, for example, a length of 25,4 mm,
It has a width of 2.5 mm and a thickness of 0.6 mm, and a plurality of head sliders 10 are formed integrally in a line.
On the surface 31 of the block 30, rails 12 and 13 and a groove portion 14 are formed in the area of each head slider 10 as shown in FIG. In this case, the rails 12 and 13 are so arranged that the appropriate flying height d of the flying head slider 10 can be obtained.
Is selected.

Here, the surfaces of the rails 12 and 13 are
While being formed as a 1/4 μ diamond lap surface, the surface roughness of the front surface and the back surface 32 of the groove portion 14 is changed by changing the processing method between the surface of the rails 12 and 13. 8 and 9, the arrow X indicates the direction in which the rails 12 and 13 of the flying head slider 10 extend, that is, the direction of the crown, and the arrow Y indicates the rails 12 and 13 of the flying head slider 10. The direction substantially orthogonal to the extending direction, that is, the camber direction is shown.

Therefore, the block 30 has the back surface 3 thereof.
2 is 1 μm diamond lap processing, V Lab # 1500 abrasive,
V Lab # 320 Processed with abrasive and groove 14
However, when processed with Metal # 600, the roughness of the processed surface and the shape of the crown of the rail surface after processing change as shown in FIG. Also, the groove 14
However, when processed with resin 10/15, the roughness of the processed surface and the shape of the crown of the rail surface after processing are as shown in FIG.
It will change as shown in.

On the other hand, the back surface 3 of the block 30
2 is 1 μm diamond lap processing, V Lab # 1500 abrasive,
V Lab # 320 Processed with abrasive and groove 14
However, when processed with Metal # 600, the roughness of the processed surface and the shape of the camber on the rail surface after processing are shown in FIG.
It will change as shown in. Also, the groove 14
However, when processed with resin 10/15, the roughness of the processed surface and the shape of the camber on the rail surface after processing are as shown in FIG.
It changes as shown in 3.

Thus, the flying head slider 10 is
In the state of the block 30, after the surfaces of the rails 12 and 13 are formed flat by a flat surface plate or the like, the surface roughness of the back surface 32 is changed in the longitudinal direction and the lateral direction. The amount of shape change due to polishing of the surface of 13 changes. And this shape change amount is
It also changes depending on the surface roughness of the groove portion 14.

By the way, the surface roughness depends on the measuring method, such as center line average roughness Ra, root mean square roughness RMS, maximum roughness height Rt, maximum cross section height Rmax, and 10-point average roughness. There are measurement parameters such as Rz, especially the center line average roughness Ra and the root mean square roughness RMS, and the maximum roughness height Rt,
With the maximum height Rmax of the cross section and the 10-point average roughness Rz,
There is a difference of about one digit. Therefore, the average roughness of the back surface 32

[0042]

[Equation 1] And the average roughness of the groove surface

[Equation 2] As the roughness

(Equation 3)

Then, when the groove portion 14 is processed by the resin 10/15, the roughness and the rail 12,
The relationship with the amount of change in shape of the camber on the surface of No. 13 is shown in FIG.
4, the relationship between the roughness and the shape change amount of the crowns on the surfaces of the rails 12 and 13 is as shown in FIG. In this case, the center line average roughness Ra and the root mean square roughness RMS are the maximum roughness Rt and the maximum cross section height Rma.
x, 10-point average roughness Rz is approximately the same value.

Here, the center line average roughness Ra, the root mean square roughness RMS, the maximum roughness height Rt, and the maximum cross section height Rma.
When all of the x and 10-point average roughness Rz are combined and regressed, the camber and the crown are expressed as a linear function of the surface roughness and the shape change amount as shown in FIGS. 15 and 17, respectively.

Thus, regarding the crown, the relationship between the shape change amount x1 and the surface roughness y1 is

[Equation 4] For camber, the relationship between the shape change amount x2 and the surface roughness y2 is

(Equation 5) Becomes

Similarly, when the groove portion 14 is processed by the metal # 600, the roughness and the rail 1 are
The relationship with the amount of change in the shape of the camber on the surface of Nos. 2 and 13 is
As shown in FIG. 18, the relationship between the roughness and the shape change amount of the crowns on the surfaces of the rails 12 and 13 is as shown in FIG. Then, the correction coefficient for the change in roughness due to metal processing, that is,

(Equation 6) By multiplying by, the relationship between the surface roughness and the shape change amount of the camber and the crown is corrected as shown in FIGS. 19 and 22, respectively.

Here, the center line average roughness Ra, the root mean square roughness RMS, the maximum roughness height Rt, and the maximum cross-section height Rma.
When all of the x and 10-point average roughness Rz are combined and regressed, the camber and the crown are expressed as a linear function of the surface roughness and the shape change amount as shown in FIGS. 20 and 23, respectively.

Thus, regarding the crown, the relationship between the shape change amount x3 and the surface roughness y3 is

(Equation 7) For camber, the relationship between the shape change amount x2 and the surface roughness y2 is

(Equation 8) Becomes

Thus, based on the above-described experimental example, the average roughness of the grooved surface by the resin 10/15 is set to K, and the roughness is

[Equation 9] And The center line average roughness Ra = 0.018 μm, the root mean square roughness RMS = 0.023 μm, and the maximum roughness R
t = 0.119 μm, maximum cross-section height Rmax = 0.1
55 μm, 10-point average roughness Rz = 0.177 μm.

At this time, regarding the crown, the relationship between the shape change amount x5 and the surface roughness y5 is approximately

[Equation 10] And the camber change amount x6
Is approximately equal to the surface roughness y6

[Equation 11] Given in. As a result, in order to obtain a positive amount of shape change with respect to the crown and the camber, the roughness y5 is
It is 0.7 μm or less, and the roughness y6 is 5.0 μm or less.

Thus, by appropriately selecting the surface roughnesses y5 and y6, a desired amount of change in shape relating to the crown and camber can be obtained, so that the back surface 32 of the flatly formed block 30 can be polished to any desired value. The shaped crown and camber will be processed.

In this case, since it is not necessary to prepare a lapping machine formed in a shape corresponding to the shape of the crown and the camber in order to form the crown and the camber as in the conventional case, it is possible to perform the flat processing by the flat surface plate. After this is performed, the polishing process is performed to form the crown and the camber having a desired shape, so that the component cost and the processing cost are reduced. Also,
Since it is not necessary to prepare a lapping machine for each flying head slider of different types having different crown and camber shapes, a crown and camber of any shape are formed.
The cost will be further reduced.

Although the flying head slider 10 is formed to have the two rails 12 and 13 in the above embodiment, the present invention is not limited to this, and the rails are not limited to this.
The length, width and arrangement should be optimized according to the hard disk drive device actually mounted. Therefore, it should not be limited to the shape, arrangement, etc. shown in the above-mentioned embodiments.

[0054]

As described above, according to the present invention, a crown and a camber having a desired radius of curvature can be easily processed at low cost without using a lapping machine having a peculiar shape.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an embodiment of a flying head slider according to the present invention.

FIG. 2 is a longitudinal sectional view showing a state of the flying type head slider of FIG. 1 before polishing.

3 is a lateral cross-sectional view showing a state of the flying type head slider of FIG. 1 before polishing.

FIG. 4 is a longitudinal cross-sectional view showing a state after polishing of the flying head slider of FIG.

5 is a lateral cross-sectional view showing a state of the flying type head slider of FIG. 1 after polishing.

FIG. 6 is a schematic perspective view of a block before polishing processing showing the principle of the present invention.

7 is a graph showing the relationship between the surface roughness and the amount of shape change of the block of FIG. 6 by various polishing processes.

FIG. 8 is a schematic perspective view of a block in the process of manufacturing the flying head slider of FIG.

9 is a schematic perspective view showing each flying head slider in the block of FIG.

10 is a metal # 60 groove portion of the block of FIG.
7 is a graph showing the relationship between the surface roughness of the back surface and the amount of change in the shape of the crown due to the polishing process when processed with 0.

FIG. 11 is a view showing the groove portion of the block of FIG.
15 is a graph showing the relationship between the surface roughness of the back surface and the amount of change in the shape of the crown due to the polishing process when processed by No. 15.

12 is a metal # 60 groove portion of the block of FIG.
9 is a graph showing the relationship between the surface roughness of the back surface and the amount of change in the shape of the camber due to the polishing process when processed with 0.

FIG. 13 is a diagram showing that the groove portion of the block of FIG.
9 is a graph showing the relationship between the surface roughness of the back surface and the amount of change in the shape of the camber due to polishing when processed with 15 metal # 600.

14 is a graph showing the relationship between the roughness and the amount of camber shape change when the groove of the block of FIG. 8 is processed by a resin.

FIG. 15 is a graph in which the relationship between the roughness in FIG. 14 and the camber shape change amount is regressed.

16 is a graph showing the relationship between the roughness and the amount of crown shape change when the groove of the block of FIG. 8 is processed with a resin.

FIG. 17 is a graph obtained by regressing the relationship between the roughness of FIG. 16 and the amount of crown shape change.

18 is a graph showing the relationship between the roughness and the camber shape change amount when the groove of the block of FIG. 8 is processed by metal.

FIG. 19 is a graph in which the groove surface roughness of FIG. 18 is corrected.

20 is a graph in which the relationship between the roughness of FIG. 19 and the camber shape change amount is regressed.

21 is a graph showing the relationship between the roughness and the amount of change in the shape of the crown when the groove of the block of FIG. 8 is processed by metal.

22 is a graph in which the groove surface roughness of FIG. 21 is corrected.

23 is a graph obtained by regressing the relationship between the roughness of FIG. 22 and the amount of crown shape change.

FIG. 24 is a perspective view showing the configuration of an example of a conventional hard disk drive device.

25 is a schematic perspective view showing the relationship between a magnetic disk and an arm in the hard disk drive device of FIG. 24.

26 is a schematic perspective view showing a flying head slider in the hard disk drive device of FIG. 24.

27 is a schematic diagram showing a flying state of the flying head slider of FIG. 26. FIG.

28 is a more detailed perspective view of the flying head slider of FIG. 26. FIG.

FIG. 29 is a longitudinal cross-sectional view of the flying head slider of FIG. 28.

30 is a lateral cross-sectional view of the flying head slider of FIG.

[Explanation of symbols]

 10 Flying Head Slider 11 Front Surface 12, 13 Rails 12a, 13a Tapered Part 14 Groove 20 Block 21 Front Surface 22 Back Side 30 Flying Head Slider Manufacturing Block 31 Front Side 32 Back Side

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[Procedure amendment]

[Submission date] July 27, 1995

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0034

[Correction method] Change

[Correction content]

Here, the molding of the crown and the camber by the above-mentioned polishing process is based on the following principle. That is, as shown in FIG. 6, the head slider block 20 formed flat has a length of 25 . 4 mm,
Width 2.5 mm, thickness 0.6 mm and its surface 21
The back surface 22 and the back surface 22 are, for example, 1/4 μ diamond-lapped. The back surface 22 is, for example, 1
μ diamond lap, V Lab # 1500 grinding , V Lab # 320 Lab
When the back surface 22 is polished by grinding, the back surface 22 changes its shape as shown in FIG.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0038

[Correction method] Change

[Correction content]

Therefore, in the block 30, the back surface 32 of the block 30 is 1 μm diamond-lapped, V-cut # 1500- cut.
Cut, is processed by the V Labs # 320 grinding, and Group 1
When No. 4 is processed by metal # 600, the roughness of the processed surface and the shape of the crown of the rail surface after the processing are shown in FIG.
It will change as shown in. Also, group 14
However, when processed with resin 10/15, the roughness of the processed surface and the shape of the crown of the rail surface after processing are as shown in FIG.
It will change as shown in.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0039

[Correction method] Change

[Correction content]

On the other hand, the back surface 32 of the block 30 has a 1 μm diamond lap processing, V grinding # 1500 grinding.
Cut, is processed by the V Labs # 320 grinding, and Group 1
4 is processed by metal # 600, the roughness of the processed surface and the shape of the camber of the rail surface after processing are shown in FIG.
It changes as shown in 2. Also, group 1
When No. 4 is processed by the resin 10/15, the roughness of the processed surface and the camber shape of the rail surface after processing change as shown in FIG. 13.

Claims (5)

[Claims] 1. A plurality of rails formed on a surface facing a recording medium, a groove formed between the rails, a taper portion provided on an air inflow end side of each rail, and a rail of the rail. Of these, a magnetic head provided on the end surface of one rail on the air outflow end side, and the maximum height Rmax of the back surface is 0.03 μm to 5 μm.
m, the back surface average roughness / groove surface average roughness is 0.7 or less in the direction in which the rail extends, and the back surface average roughness / in the direction substantially orthogonal to the rail.
The groove surface has an average roughness of 5.0 or less, and by polishing the back surface formed flat,
A flying head slider, wherein the surface is formed with a crown having a convex curvature in a direction in which the rail extends and a camber having a convex curvature in a direction substantially orthogonal to the rail. 2. The crown has a maximum height of 1 to 100.
The flying head slider according to claim 1, wherein the flying head slider has a thickness of nm. 3. The crown is formed to a desired maximum height by selecting a ratio of the average back surface roughness / the average groove surface roughness in the extending direction of the rail. The flying type head slider described in. 4. The camber has a maximum height of 1 to 30.
The flying head slider according to claim 1, wherein the flying head slider has a thickness of nm. 5. The camber is formed to a desired maximum height by selecting a ratio of back surface average roughness / groove surface average roughness in a direction substantially orthogonal to the rail. The flying head slider as described in 1.