JPH08312900A - Gas supplying and accumulating unit - Google Patents

Abstract

PURPOSE: To provide a gas supplying and accumulating unit capable of being arranged in a narrow floor space. CONSTITUTION: A gas supplying and accumulating unit is provided by integrally constituting inlet and outlet opening/closing valves 14 and 12 for shutting off the flow of a corrosive gas, and a mass flow controller 11 being located in the middle between inlet and outlet opening/closing valves 14 and 12 to control the flow rate of the corrosive gas, as a mass flow unit; and arranging a regulator 17 for adjusting gas pressure, a pressure gage 16 for monitoring pressure, and a manual valve 18 for manually shutting off the flow of the corrosive gas, in parallel to the mass flow unit, to be integrated. The output port of the outlet opening/closing valve 12 and the output common passage 20 of a gas supply system main body are communicated to make the gas supplying and accumulating unit be detachably fittable to a gas supply system main body by an output block 22.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas supply apparatus used in an industrial manufacturing apparatus such as a semiconductor manufacturing apparatus, and more specifically, a plurality of gas supply apparatus units for supplying a plurality of types of gas are integrated. The present invention relates to a gas supply integrated system that can be made compact.

[0002]

2. Description of the Related Art Conventionally, corrosive gases have been used for etching in photoresist processing in semiconductor manufacturing processes. Photoresist processing (photoresist application, exposure,
(Development, etching) is repeated multiple times by changing the type of corrosive gas in the semiconductor manufacturing process, so in the actual semiconductor manufacturing process, a gas supply device that supplies multiple types of corrosive gas as needed is used. There is. Here, the gas supply device that supplies the gas includes a mass flow controller for accurately measuring the flow rate, and an inlet opening and closing provided in front of and behind the mass flow controller to prevent supply gas such as corrosive gas from remaining in the mass flow controller. valve,
An outlet opening / closing valve, a purge valve, a manual valve for manually supplying or shutting off the supply gas, a regulator for adjusting the gas pressure of the supply gas, a pressure gauge for monitoring the pressure of the supply gas, and a supply A filter for removing impurities mixed in the gas is required as a constituent element. Therefore, the conventional gas supply device is configured by connecting them in series.

FIG. 11 shows a conventional gas supply device. FIG.
From the right of 1, the output port of the manual valve block 104 is connected to the input port of the regulator block 103 via the joint 101, the pipe, and the joint 101. A manual valve 18 is attached to the upper part of the manual valve block 104. Also, on the upper part of the regulator block 103,
A regulator 17 is attached. The output port of the regulator block 103 is connected to the input port of the filter 15 via the joint 101, the three-pronged pipe 102, and the joint 101. The pressure gauge 16 is attached to the upper portion of the three-pronged pipe 102. The filter 15 is of a type that enters from one side in the longitudinal direction and exits to the other side, and the output port of the filter 15 is connected to the input port of the input block 108 via the joint 101, the pipe, and the joint 101.

The inlet opening / closing valve 14, the purge valve 13 and the mass flow controller 11 include an input block 108, a flow path direction conversion block 27, a mass flow controller block 28, a flow path direction conversion block 29, and an output block 10.
5 constitutes a mass flow unit. Regarding this mass flow unit, the applicants of the present invention have disclosed in Japanese Patent Laid-Open No. 6-2
Since it has been proposed and described in No. 41400, detailed description will be omitted. An inlet opening / closing valve 14 and a purge valve 13 are attached to the upper part of the input block 108. The lower part of the input block 108 is fixed to a purge common flow path block 19 in which a purge gas supply flow path communicating with the input port of the purge valve 13 is formed. Also, the input block 10
The output port of 8 is connected to the input port of the flow path direction conversion block 27. In addition, the flow path direction conversion block 27
The output port of the mass flow controller block 28
Connected to the input port of. The mass flow controller 11 is attached to the upper part of the mass flow controller block 28.

Further, the mass flow controller block 28
The output port of is connected to the input port of the output block 105 via the flow path direction conversion block 29. The outlet opening / closing valve 12 is attached to the output block 105. The lower part of the output block 105 is fixed to the output common flow path block 20 in which an output gas supply flow path communicating with the output port of the outlet opening / closing valve 12 is formed. The flow path of FIG. 11 is shown in FIG. 10 by a pneumatic circuit diagram. The purge valve 13A is connected to the flow path between the mass flow controller 11A and the inlet opening / closing valve 14A, and the nitrogen gas supply pipe 19 for purging. The outlet opening / closing valve 12A is connected to a supply gas pipeline 20 that communicates with a vacuum chamber in which etching is performed.

[0006] In one vacuum chamber, a plurality of types of corrosive gases are switched and used to perform etching in complicated steps. Therefore, it is necessary to supply a plurality of types of gas to each vacuum chamber. 1
FIG. 10 shows a circuit diagram for supplying seven kinds of corrosive gases and the like to one vacuum chamber. A gas supply unit that embodies the circuit diagram of FIG. 10 is shown in FIG. 12 as a plan view. That is, the gas supply device of FIG. 11 is arranged in parallel with seven in FIG. The gas supply device shown in FIG. 11 is free from any particular restrictions on the installation direction, but in order to make it as compact as possible, seven gas supply units A, B, C are arranged in parallel as shown in FIG. , D, E, F,
G is configured.

On the other hand, FIG. 13 shows a layout of an etching apparatus having four vacuum chambers. Four vacuum chambers 51A, 51B, 51C and 51D are arranged around the robot 53 installed in the center. Further, two transfer devices 52 for supplying unetched wafers and the like to the vacuum chamber 51 and collecting the processed wafers are arranged. Here, since the gas supply unit shown in FIG. 12 is required for each vacuum chamber 51, four gas boxes 50A, 50B, 50C, 50D are provided near the wall as shown in FIG. , And are connected to the vacuum chambers 51A, 51B, 51C and 51D, respectively.

[0008]

However, the conventional device has the following problems. (1) As shown in FIG. 12, the gas supply unit occupies a large floor space with a length of 520 mm and a width of about 300 mm, so that it is an obstacle to work when it is installed near the vacuum chambers 51A to 51D. . However, as shown in FIG. 13, when the gas supply devices that supply gas to the plurality of vacuum chambers 51A to 51D are put together as a gas box on the wall side, the gas supply devices are connected to the vacuum chambers 51A to 5D.
Piping up to 1D becomes longer, mass flow controller 1
Even if the flow rate is accurately measured with No. 1, there is a problem that the gas flow rate actually supplied to the vacuum chambers 51A to 51D is inaccurate due to the long piping. In addition, depending on the type of gas supplied, there are some that liquefy at room temperature, so that heat retention may be necessary. In that case, the gas boxes 50A-50
If the pipe from D to the vacuum chambers 51A to 51D is long, there is a problem that the whole heat-insulated pipe occupies a space and the working space is narrowed. In addition, the temperature may not be sufficiently maintained, which may adversely affect the etching.

(2) As shown in FIG. 12, the purge valve 13
Are attached to the purge common flow path block 19 by two attachment bolts 106 from above. Further, the outlet opening / closing valve 12 is attached to the common output flow passage block 20 by two attaching bolts 107 from above. However, the mounting bolt 106 and the mounting bolt 107 are located laterally of the purge valve 13 and the outlet opening / closing valve 12 so that the purge valve 13 and the outlet opening / closing valve 12 can be attached and detached from above. Therefore, there is a problem that the width of the gas supply integrated system becomes large.

The present invention is to solve the above-mentioned problems, and is a gas supply system having a plurality of gas supply device units including a mass flow controller, a regulator, a pressure gauge, and a filter, which is installed in a narrow floor space. It is an object to provide a possible integrated gas supply integration system.

[0011]

In order to achieve this object, the gas supply integrated unit of the present invention has the following structure. (1) A first opening / closing valve and a second opening / closing valve which are on a carrier pipeline for supplying the supply gas and shut off the flow of the supply gas; and a flow rate of the supply gas which is between the first and second opening / closing valves. A gas supply integrated unit having a mass flow unit integrally configured with a mass flow controller for controlling a gas pressure of the supply gas, a pressure gauge for monitoring the pressure of the supply gas, and a supply gas At least one of a manual valve that manually shuts off the flow and a filter that removes impurities mixed in the supply gas is arranged in parallel with the mass flow unit to form an integral unit, and a second opening / closing unit is provided. It has a detachable member that connects the flow passage of the valve and the common passage of the gas supply system main body and attaches the entire unit to the gas supply system main body in a detachable manner.

(2) In what is described in (1) 1,
At least one of the regulator, the pressure gauge, the manual valve, and the filter is attached with a mounting bolt from a direction opposite to the mounting direction of the mass flow controller. (3) In the structure described in (1) or (2), the attachment / detachment member is a mounting bracket that is attached / detached by an attachment bolt. (4) In the structure described in (3), a purge valve for supplying a purge gas that removes the supply gas remaining in the mass flow controller and a flow path of the purge valve are connected to each other, and the gas is attached by a mounting bolt. It is characterized by having a purge mounting bracket which is detachably mounted in communication with the purge common flow path of the supply system main body.

(5) A first on-off valve and a second on-off valve which are on the feed gas conveying pipe and shut off the flow of the feed gas,
A gas supply integrated unit having a mass flow unit integrally formed with a mass flow controller for controlling the flow rate of the supply gas, which is intermediate between the first and second opening / closing valves, and manually supplies or shuts off the supply gas. At least one of a manual valve for controlling the supply gas, a regulator for adjusting the gas pressure of the supply gas, and a pressure gauge for monitoring the pressure of the supply gas is installed in the same plane as the mass flow unit in opposite mounting directions and in parallel. Is installed in.

(6) In the structure described in (5), the manual valve and the pressure gauge are attached to the same block as the first opening / closing valve with bolts from opposite directions. (7) In the structure described in (5) or (6), the regulator is connected to an input pipe, an output pipe, an input conversion block for converting a flow path by connecting to the input pipe, and the output pipe. The output conversion block for converting the flow path is integrally fixed. (8) In the structure described in (6), a filter for removing impurities of the supply gas is provided in the same block in a direction orthogonal to the manual valve, the pressure gauge and the first opening / closing valve. It is characterized by being attached.

[0015]

In the mass flow unit of the gas supply integrated unit of the present invention having the above structure, a flow path is formed without using a pipe for connecting the mass flow controller to the first opening / closing valve and the second opening / closing valve. Since they are connected by a flow path block, the length in the flow direction can be made compact. Then, a manual valve for manually supplying or shutting off the supply gas, a regulator for adjusting the gas pressure of the supply gas, and a pressure gauge for monitoring the pressure of the supply gas are integrated, and a mass flow unit and Since the units having substantially the same length are configured and arranged in parallel with the mass flow unit, the entire gas supply integrated unit can be compactly integrated. In addition, the gas supply integrated unit can be easily attached to and detached from the gas supply system body by simply removing the bolts that attach the attachment bracket, which is the attachment / detachment member, to the system body, making it easy to replace parts and improve maintainability. did.

Further, since the manual valve, the regulator and the pressure gauge are mounted by bolts in the opposite direction to the mounting bolts of the mass flow unit including the first opening / closing valve, the second opening / closing valve and the mass flow controller, Can be configured on the same plane as the mass flow unit, and the thickness of the gas supply integrated unit can be reduced. Further, the regulator is integrally fixed with an input pipe, an output pipe, an input conversion block that is connected to the input pipe to convert the flow path, and an output conversion block that is connected to the output pipe and converts the flow path. Therefore, when the regulators are replaced, they can be replaced integrally, so that the replacement work can be performed easily and in a short time.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A gas supply integrated unit according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 4 is a circuit diagram showing the configuration of the gas supply integrated unit. The pipe of the corrosive gas F, which is the supply gas, is connected to the regulator 17 for adjusting the gas pressure of the corrosive gas F. Further, the regulator 17 uses the corrosive gas F
Is connected to a manual valve 18 for supplying or shutting off. On the other hand, between the regulator 17 and the manual valve 18,
A pressure gauge 16 for monitoring the pressure of the corrosive gas F is connected. Further, the manual valve 18 is connected to the filter 15 for removing impurities mixed with the corrosive gas F.

The filter 15 is connected to the inlet opening / closing valve 14 which is the first opening / closing valve. The inlet opening / closing valve 14 is connected to the mass flow controller 11 for measuring the flow rate of the corrosive gas F and supplying a constant amount of the corrosive gas F. Since the mass flow controller 11 uses a commonly used one, detailed description thereof will be omitted. Further, the mass flow controller 11 is connected to the outlet opening / closing valve 12 which is the second opening / closing valve. The outlet port of the outlet opening / closing valve 12 is connected to the output common flow path 20a. The output common channel 20a is connected to the chamber 51 in the semiconductor process. On the other hand, an input port of the purge valve 13 for replacing the remaining corrosive gas F with nitrogen gas is connected between the inlet opening / closing valve 14 and the mass flow controller 11. The output port of the purge valve 13 is connected to the purge common flow path 19a. The common purge flow path 19a is connected to a nitrogen gas supply tank via a purge switching valve 47 and a nitrogen gas pipe 46.

An embodiment embodying the circuit diagram of FIG. 4 is shown in FIG.
It is shown in FIGS. 2, 5 and 6. FIG. 2 is a plan view showing the configuration of one unit of the gas supply integrated unit for supplying the corrosive gas F, and FIG. 1 is a side view thereof.
FIG. 5 is a partial cross-sectional view showing the flow path of the supply gas,
FIG. 6 is a perspective explanatory view for showing the flow path of the supply gas. FIG. 3 is a perspective view showing a state in which a plurality of gas supply integrated units are attached to the gas supply system. First, the corrosive gas F is supplied to the input passage 21 formed in the input block 21 from the gas supply port of the system body (not shown).
a, input pipe 24, regulator input block 26,
It connects to the input flow path 33a formed in the regulator block 33 through the regulator input pipe 30.
The input flow path 33a is connected to the input port of the regulator 17.

As shown in FIGS. 1 and 5, the output port of the regulator 17 is an input channel formed in the channel direction conversion block 29 through the output channel 33b, the regulator output pipe 40, and the regulator output block 31. 29a
Connected to The input flow path 29a is a flow path block 32.
Through the manual valve input passage 32a formed in the
Connected to the input port of. On the other hand, the manual valve input flow path 3
2a is connected to the pressure gauge 16. The output port of the manual valve 18 is connected to the input port of the filter 15 via a filter input flow channel 32b formed in the flow channel block 32. The output port of the filter 15 is connected to the input port of the inlet opening / closing valve 14 via the inlet valve input flow path 32c. The output port of the inlet on-off valve 14 has a purge flow path 32.
d, connected to the input port of the mass flow controller 11 via the mass flow valve input flow path 29b formed in the flow path direction conversion block 29.

On the other hand, the purge passage 32d is provided with the purge valve 13
Is connected to the output port of. The input port of the purge valve 13 is connected to the purge input flow path 36 a formed in the purge input block 36 via the purge input flow path 32 e and the purge gas pipe 35. The purge input channel 36a is
The purge common flow channel block 19 is connected to the purge common flow channel 19a. Mass flow controller 11
The output port is connected to the input port of the outlet opening / closing valve 12 via the output flow passage 27a formed in the flow passage direction conversion block 27 and the output valve input flow passage 25b formed in the output block 25. The output port of the outlet opening / closing valve 12 is connected to the output flow passage 22a formed in the output block 22 via the output valve output flow passage 25a and the output pipe 23. The output flow channel 22a is connected to the output common flow channel 20a formed in the output common flow channel block 20.

The output block 22 is attachable / detachable to / from the output common flow path block 20 by four bolts and constitutes a mounting bracket which is a detachable member. Further, the purge input block 36 is attachable / detachable to / from the purge common flow path block 19 by four bolts, and constitutes a mounting bracket which is an attaching / detaching member. As shown in FIG. 3, the gas supply integrated unit 9 is attached to the gas supply system body 8 with eight mounting bolts. By removing these bolts and the mounting bolts of the input block 21, the gas supply integrated unit 9 can be easily removed from the gas supply system body 8. Here, as shown in FIG. 3, the gas supply integrated unit 9 may be housed in the box 7. Box 7
It is convenient to handle when it is removed.

According to this gas supply integrated unit 9, a mass flow controller unit composed of an outlet opening / closing valve 12, a mass flow controller 11, a purge valve 13 and an inlet opening / closing valve 14, a regulator 17, a pressure gauge 16 and a manual valve 18 is provided. It is attached to the other side on the same plane,
Moreover, since the output block 22 and the purge input block 36 are provided in the same plane outside the gas supply integrated unit 9, the volume of the gas supply integrated unit 9 can be made compact and the integration degree of the gas supply system can be improved. it can.

The regulator 17 includes a regulator input pipe 30, a regulator input block 26, a regulator output pipe 40, and a regulator output block 31.
Is integrally assembled with the flow path direction conversion blocks 27 and 29 as a regulator unit, and is attached from below with four bolts. The regulator 17 is removed as a unit from below and removed. Can be attached. Further, the pressure gauge 16 is attached to the flow path block 32 with four bolts from below by the pressure gauge block 16a.
As a unit, it can be removed and attached from below.

Here, since the conventional pressure gauge 16 is connected to the pipe by a joint in order to be replaceable, the generation of particles due to the sealing material in the joint portion poses a problem. According to the pressure gauge 16 unit, since there is no joint portion, it is possible to reduce the generation of particles. The filter 15 is attached to the flow path block 32 with four bolts in the lateral direction, and the filter 15 can be removed and attached from the lateral direction.

Next, the gas supply integrated unit of the present invention is
A case where a plurality of units are integrated and arranged will be described. FIG. 8 shows a circuit diagram of the required gas supply device. Gases supplied to the vacuum chamber are Fa, Fb, Fc, Fd,
Seven types of corrosive gases, Fe, Ff, and Fg, are prepared. The gas supply integrated unit described above is used for each corrosive gas supply line. That is, the gas supply integrated unit attached to each corrosive gas supply line includes a regulator 17, a pressure gauge 16, a manual valve 18, a filter 15, an inlet opening / closing valve 14, a purge valve 13, a mass flow controller 11, and an outlet opening / closing valve 12. Have The output port of the purge valve 13 is a nitrogen gas pipe 46 via the purge common flow path block 19 and the purge switching valve 47.
Connected to. The nitrogen gas pipe 46 is connected to a nitrogen gas supply tank (not shown). Also, the outlet opening / closing valve 1
The output ports 2A to F are integrated with the output common flow path 20a and connected to the vacuum chamber. Further, a purge valve 48 for replacing the corrosive gas remaining in the output common channel block 20 is mounted on the pipe connecting the output common channel block 20 and the nitrogen gas pipe 46.

Next, a gas supply integrated system of the present invention which embodies the circuit diagram of FIG. 8 will be described. FIG. 3 shows a perspective view. Seven gas supply integrated units 9A, 9B, 9C, 9
D, 9E, 9F and 9G are attached to the gas supply system body 8 in close contact with each other. According to this,
As shown in FIG. 3, the occupied floor area is 1/2 or less of that of the conventional floor area, and the floor area can be greatly reduced.
Since the occupied area can be reduced, even if the gas supply system bodies 8A, 8B, 8C and 8D are arranged in the immediate vicinity of the respective vacuum chambers 51A, 51B, 51C and 51D as shown in FIG. It doesn't get in the way.

As described in detail above, according to the gas supply / integration unit 9 of this embodiment, the inlet opening / closing valve 14 and the outlet which are on the carrier line of the corrosive gas F and shut off the flow of the corrosive gas F. An on-off valve 12, and a mass flow unit in which an inlet on-off valve 14 and an outlet on-off valve 12 are interposed and a mass flow controller 11 for controlling the flow rate of the corrosive gas F are integrally formed. Regulator 17 for adjusting the gas pressure of F, pressure gauge 16 for monitoring the pressure of corrosive gas F, and corrosive gas F
And a manual valve 18 for manually shutting off the flow of the gas flow controller unit are arranged in parallel with the mass flow controller unit and constitute an integrated unit, and the output common port of the outlet opening / closing valve 12 and the output common flow of the gas supply system body 8 Since the gas supply integrated unit 9 has the output block 22 that is detachably attached to the gas supply system body 8 in communication with the passage 20a, the entire gas supply system can be made compact and the floor can be reduced. Since the occupying area can be greatly reduced, it is possible to dispose the gas supply integrated system in the immediate vicinity of the vacuum chamber 51, and at the same time, it can be easily attached to and detached from the system main body, so that it is possible to replace each component. It became easy and the maintainability was improved.

Further, according to the gas supply integrated unit of this embodiment, the manual valve 18, the regulator 17, the pressure gauge 1
Since 6 is attached with bolts from the direction opposite to the mounting bolts of the inlet opening / closing valve 14, the outlet opening / closing valve 12, and the mass flow controller 11, the thickness of the gas supply integrated unit 9 can be made thin and more compact. Also,
According to the gas supply integration system of the present embodiment, two or more gas supply integration units described above are stacked in parallel and arranged, and the outlet opening / closing valves 12A of the respective gas supply integration units,
Since it has the common output flow path block 20 that communicates the output ports of 12B, 12C, 12D, 12E, 12F, and 12G, it is possible to downsize the entire device that supplies a plurality of corrosive gases F, and Since the occupied area can be greatly reduced as compared with the conventional one, the gas supply integrated system can be arranged in the vicinity of the vacuum chambers 51A, 51B, 51C and 51D, and the mass flow controller 1
The gas supply accuracy of No. 1 can be improved.

Next, a second embodiment of the present invention will be described.
Since the basic configuration and the like are almost the same as those of the first embodiment, only different points will be described. FIG. 7 is a perspective view showing the gas supply integrated unit 9 of the second embodiment. An input joint 37a is used instead of the input block 21, an output joint 38a is used instead of the output block 22, and a purge input joint 39a is used instead of the purge input block 36. Also, instead of the output common flow path block 20, the output common flow path pipe 41 is
Instead of the common purge channel block 19, a common purge channel pipe 42 is used. On the gas supply system body 8 side, an input joint 37 for connecting with the input joint 37a.
b, an output joint 38b for connecting with the output joint 38a,
A purge input joint 39b for connecting with the purge input joint 39a is fixed. The output joint 38a and the purge input joint 39a form a detachable member. Input joint 37a, output joint 38a, and purge input joint 39a
The gas supply integrated unit 9 can be easily removed from the gas supply system main body 8 by removing.

As described above, according to the gas supply / integration unit 9 of the second embodiment, the inlet opening / closing valve 1 for shutting off the flow of the corrosive gas F on the carrier pipe of the corrosive gas F is provided.
4 and an outlet on-off valve 12, and a mass flow controller 11 that is integrally formed with an inlet on-off valve 14 and an outlet on-off valve 12 and a mass flow controller 11 that controls the flow rate of the corrosive gas F. The mass flow controller unit includes a regulator 17 for adjusting the gas pressure of the corrosive gas F, a pressure gauge 16 for monitoring the pressure of the corrosive gas F, and a manual valve 18 for manually shutting off the flow of the corrosive gas F. And an output common port pipe 41 of the gas supply system main body 8 and the output port of the outlet opening / closing valve 12 while being arranged in parallel with each other to form an integral unit.
And an output coupling 3 that connects the entire gas supply integrated unit 9 to the gas supply system body 8 in a detachable manner.
Since the gas supply unit system 8 is provided, the entire gas supply system can be made compact, and the floor occupying area can be significantly reduced. Therefore, the gas supply integrated system is arranged in the immediate vicinity of the vacuum chamber 51. It has become possible.

Although one embodiment of the present invention has been described in detail above, the present invention is not limited to the above embodiment, and various modifications can be made. Further, in this embodiment, the sensor type is used as the pressure gauge 16, but a Bourdon tube type may be used. When the regulator 17 is not used, the regulator 1
You just need to bypass 7. The element of the filter 15 may be either a ceramic type or a metal type. In either case, replacement is easy according to this embodiment.

[0033]

As is apparent from the above description, according to the gas supply integrated unit of the present invention, the first opening / closing valve and the second opening / closing valve for shutting off the flow of the supply gas on the transfer pipeline of the supply gas are provided. An on-off valve and a mass flow unit, which is intermediate between the first and second on-off valves and has a mass flow controller for controlling the flow rate of the supply gas, are integrally provided, and the gas pressure of the supply gas is adjusted. At least one of a regulator for controlling the pressure of the supply gas, a pressure gauge for monitoring the pressure of the supply gas, a manual valve for manually blocking the flow of the supply gas, and a filter for removing impurities mixed in the supply gas. It is arranged in parallel with and constitutes an integral unit, and the flow path of the second opening / closing valve and the common flow path of the gas supply system main body are connected to each other to supply gas to the entire unit. Since it has a detachable member that is detachably attached to the system body, the entire gas supply device can be made compact, and the floor occupying area can be significantly reduced. It became possible to place it in the immediate vicinity of the chamber.

Further, according to the gas supply integrated unit of the present invention, the first on-off valve and the second on-off valve which are on the feed gas conveying pipe and shut off the flow of the feed gas, and the first and second A mass flow unit, which is in the middle of the on-off valve and is integrally configured with a mass flow controller for controlling the flow rate of the supply gas, has a manual valve for manually shutting off the flow of the supply gas, and a gas for the supply gas. Since at least one of the regulator for adjusting the pressure and the pressure gauge for monitoring the pressure of the supply gas is arranged in the same plane as the mass flow unit in opposite mounting directions and in parallel, the gas supply device Since the whole system can be made compact and the floor area can be greatly reduced, it is necessary to place the gas supply integration system in the immediate vicinity of the vacuum chamber. It has become possible.

[Brief description of drawings]

FIG. 1 is a side view showing a specific configuration of a gas supply integrated unit 9 which is an embodiment of the present invention.

FIG. 2 is a plan view showing a specific configuration of a gas supply integrated unit 9.

FIG. 3 is a perspective view showing a gas supply system in which seven gas supply integrated units 9 are incorporated.

FIG. 4 is a circuit diagram showing a configuration of a gas supply integrated unit 9.

FIG. 5 is a partial cross-sectional view showing a gas flow in the gas supply integrated unit 9.

6 is a perspective explanatory view showing a gas flow in the gas supply integrated unit 9. FIG.

FIG. 7 is a perspective view showing a configuration of a gas supply integrated unit 9 which is a second embodiment of the present invention.

FIG. 8 is a circuit diagram showing a configuration of a gas supply system.

FIG. 9 is a plan view showing the overall configuration of an etching apparatus equipped with a gas supply system.

FIG. 10 is a circuit diagram showing a configuration of a conventional gas supply system.

FIG. 11 is a side view showing a specific configuration of a conventional gas supply device.

FIG. 12 is a plan view showing a specific configuration of a conventional gas supply device.

FIG. 13 is a plan view showing the overall configuration of an etching apparatus equipped with a conventional gas supply device.

[Explanation of symbols]

 8 gas supply system main body 9 gas supply integrated unit 11 mass flow controller 12 outlet opening / closing valve 13 purge valve 14 inlet opening / closing valve 15 filter 16 pressure gauge 17 regulator 18 manual valve 19 purge common flow passage block 19a common purge flow passage 20 common output flow passage Block 20a Output common flow passage 21 Input block 22 Output block 36 Purge input block 37 Input joint 38 Output joint 39 Purge input joint 41 Output common passage pipe 42 Purge common passage pipe

Claims (8)

[Claims] 1. A first opening / closing valve and a second opening / closing valve for blocking the flow of the supply gas on a feed gas conveying pipe line, and a flow rate of the supply gas in the middle of the first and second opening / closing valves. In a gas supply integrated unit having a mass flow unit integrally configured with a mass flow controller for controlling, a regulator for adjusting the gas pressure of the supply gas, a pressure gauge for monitoring the pressure of the supply gas, and At least one of a manual valve for manually blocking the flow of the supply gas and a filter for removing impurities mixed in the supply gas is arranged in parallel with the mass flow unit and constitutes an integral unit. At the same time, the flow path of the second on-off valve and the common flow path of the gas supply system body are connected to each other, and the entire unit is attached to the gas supply system body. Gas supply integrated unit, characterized in that it comprises a freely attaching detachable member. 2. The device according to claim 1, wherein at least one of the regulator, the pressure gauge, the manual valve, and the filter is attached with a mounting bolt from a direction opposite to a mounting direction of the mass flow controller. A gas supply integrated unit characterized in that 3. The gas supply integrated unit according to claim 1, wherein the attaching / detaching member is a mounting bracket that is attached / detached by a mounting bolt. 4. The purge valve for supplying a purge gas for removing the supply gas remaining in the mass flow controller, and a flow path of the purge valve, which are connected to each other by a mounting bolt according to claim 3. A gas supply integrated unit comprising a purge mounting bracket that is detachably mounted in communication with the purge common channel of the gas supply system body. 5. A first on-off valve and a second on-off valve which are on a feed gas conveying pipe and cut off the flow of the feed gas, and a flow rate of the feed gas which is between the first and second on-off valves. In a gas supply integrated unit having a mass flow unit integrally configured with a mass flow controller for controlling, a manual valve for manually supplying or shutting off the supply gas, and a regulator for adjusting the gas pressure of the supply gas. And a pressure gauge for monitoring the pressure of the supply gas, at least one of which is arranged in parallel with the mass flow unit in opposite mounting directions and in parallel with each other. 6. The gas supply according to claim 5, wherein the manual valve and the pressure gauge are attached to the same block as the first opening / closing valve with bolts from opposite directions. Integrated unit. 7. The regulator according to claim 5, wherein the regulator includes an input pipe, an output pipe, an input conversion block that is connected to the input pipe to convert a flow path, and the output pipe. A gas supply integrated unit, which is integrally fixed to an output conversion block which is connected to the output conversion block for converting a flow path. 8. The filter according to claim 6, wherein a filter for removing impurities of the supply gas is orthogonal to the manual valve, the pressure gauge, and the first opening / closing valve in the same block. A gas supply integrated unit, which is mounted from the direction.