JPH08309977A - Ink jet apparatus and manufacture thereof - Google Patents

Abstract

PURPOSE: To obtain an ink jet apparatus excelent in mass productivity and capable of easily performing electrical connection. CONSTITUTION: In an ink jet apparatus, two actuator plates 101, 102 having partition walls 111 formed thereto by the cutting processing of grooves are jointed at the region of the partition walls 111 to obtain an actuator 110. First grooves 114 are formed to the end surface of the actuator 110 and second grooves 119 are formed to the other end surface thereof by cutting processing and metal layers are formed to the inner surfaces of ink liquid chambers 112 and air chambers 113 and the surfaces of the first and second grooves 114, 119 by a plating method. Thereafter, a plurality of the drive electrodes 122a electrically connected to the electrodes 125 in the respective ink liquid chambers and the earth electrodes 123a electrically connected to the electrodes in the air chambers are separated by cutting processing to produce an ink jet apparatus wherein the respective electrodes are formed to the actuator 110.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink ejecting apparatus for ejecting ink droplets for printing and recording, and a method of manufacturing the same, and more specifically, to an ink ejecting apparatus which utilizes displacement of a piezoelectric material. The present invention relates to a device and a manufacturing method thereof.

[0002]

2. Description of the Related Art Among the non-impact type printers, which have been expanding the market to replace the impact type printers used up to now, the principle is the simplest, and multi-gradation and colorization are possible. An example of a printer that is easy to perform is an inkjet printer. Above all, a drop that ejects only the ink drops used for printing
The on-demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
Alternatively, a thermal jet type disclosed in Japanese Patent Publication No. 61-59914 is a typical method.
Of these, the former is difficult to miniaturize, and the latter requires a high heat resistance of the ink in order to apply high heat to the ink, and each has a very difficult problem.

A method proposed to solve the above defects at the same time is disclosed in Japanese Patent Laid-Open No. 63-247051.
It is a shear mode type using the piezoelectric ceramic disclosed in Japanese Patent Publication No.

As shown in FIG. 10, the shear mode type ink jet apparatus 600 comprises a bottom wall 601, a top wall 602 and a shear mode actuator wall 603 therebetween. The actuator wall 603 is bonded to the bottom wall 601 and is polarized in the direction of arrow 611.
And an upper wall 605 bonded to the ceiling wall 602 and polarized in the direction of arrow 609. The actuator walls 603 are paired to form an ink flow path 613 therebetween, and a space 615 narrower than the ink flow path 613 is formed between the next pair of actuator walls 603.

The nozzle 6 is provided at one end of each ink flow path 613.
A nozzle plate 617 having 18 is fixed, and electrodes 619 and 621 are provided as metallized layers on both side surfaces of each actuator wall 603. Each electrode 619, 621
Is covered with an insulating layer (not shown) for insulating the ink. The electrode 621 facing the space 615 is connected to the ground 623, and the electrode 619 provided in the ink flow path 613 is connected to the silicon chip 625 which provides the actuator drive circuit.

Next, a method for manufacturing the ink jet device 600 will be described. First, the piezoelectric ceramic layer polarized in the arrow 611 is bonded to the bottom wall 601, and the piezoelectric ceramic layer polarized in the arrow 609 is bonded to the ceiling wall 602. The thickness of each piezoelectric ceramic layer is as follows.
Equal to 5 height. Next, parallel grooves are formed in the piezoelectric ceramics layer by rotating a diamond cutting disk or the like to form a lower wall 607 and an upper wall 605. Then, the electrode 61 is formed on the side surface of the lower wall 607 by vacuum deposition.
9 is formed, and the electrode layer is provided on the electrode 619.
Similarly, the electrode 621 and the insulating layer are provided on the side surface of the upper wall 605.

The zenith of the upper wall 605 and the zenith of the lower wall 607 are adhered to each other to form an ink flow path 613 and a space 615. Next, a nozzle plate 617 on which the nozzles 618 are formed is adhered to one end of the ink flow passage 613 and the space 615 so that the nozzles 618 correspond to the ink flow passages 613, and the ink flow passages 613 and the space 615 are connected. The other end is connected to silicon chip 625 and ground 623.

Then, the electrode 61 of each ink flow path 613
When the silicon chip 625 applies a voltage to 9, 621, each actuator wall 603 undergoes piezoelectric thickness slip deformation in a direction of increasing the volume of the ink flow path 613, and after a predetermined time, the voltage application is stopped and the ink flow is stopped. Road 613
Of the ink flow path 61 from the increased state to the natural state.
Pressure is applied to the ink in the nozzle 3, and ink drops are generated in the nozzle 61.
It is injected from 8.

[0010]

However, in the ink ejecting apparatus 600 having the above-described structure, the electrodes 619 and 621 facing the space 615 are connected to the ground 623,
Electrodes 619 and 62 provided in the ink flow path 613
1 is connected to a silicon chip 625, which provides the actuator drive circuit, but the specific configuration and method of its electrical connection are not disclosed. Therefore, for example, if there are 50 ink flow paths 613, 51 air chambers 615 are required, and the electrodes 619 and 621 have 101 electrical connections, and the 101 locations have a narrow pitch. There is a problem that connection is difficult, the process for that is time-consuming, and mass productivity is poor.

The present invention has been made in order to solve the above-mentioned problems, and provides an ink ejecting apparatus in which electrodes can be easily taken out and highly reliable electrical connection can be provided, and the ink ejecting can be performed. An object of the present invention is to provide a method for manufacturing an ink ejecting apparatus that is easy to manufacture and has excellent mass productivity.

[0012]

In order to achieve this object, an ink ejecting apparatus of the present invention comprises a plurality of ejecting channels for ejecting ink and a plurality of ejecting channels provided on both sides of the ejecting channels and not ejecting ink. A non-ejection channel, a partition wall that separates the ejection channel and the non-ejection channel, and at least a part of which is made of a polarized piezoelectric material; and each of the channels for generating a driving electric field in the piezoelectric material. A plurality of first electrodes provided corresponding to each of the injection channels so as to communicate with the injection channel and not with the non-injection channel.
And a plurality of drive electrodes, which are provided on the inner surface of the first groove and are electrically connected to the electrodes provided on the inner surface of the ejection channel, respectively, and which are independent for each corresponding ejection channel, A plurality of second grooves provided corresponding to each of the non-injection channels so as to communicate with the injection channel and not to communicate with the injection channel, and provided on an inner surface of the second groove, and A common electrode is provided that is electrically connected to all of the electrodes provided on the inner surface of the non-ejection channel and is not electrically connected to the drive electrode.

At least one of the actuator plates has a structure in which a pair of actuator plates made of a piezoelectric material subjected to polarization treatment in the thickness direction are joined to each other, and each actuator plate has a plurality of comb-shaped grooves. The ejection channel and the non-ejection channel may be formed by connecting the plurality of grooves provided in both the pair of actuator plates to each other at a joint surface.

The first groove may also serve as an ink supply communication path for supplying ink to each ejection channel.

In order to achieve the above object, a method of manufacturing an ink ejecting apparatus of the present invention comprises a plurality of ejecting channels through which ink is ejected and both sides of the ejecting channels.
And a plurality of non-ejection channels to which ink is not ejected,
Separating the injection channel and the non-injection channel,
A method for forming an electrode for generating a driving electric field in the piezoelectric material on an actuator having a partition wall at least a part of which is polarized by a piezoelectric material, the method comprising: And a first step of forming a first groove at a position corresponding to each of the injection channels, and a second step at a position corresponding to each of the non-injection channels on the other end surface of the actuator in the channel direction. A second step of forming a groove, and forming a conductive layer on at least the inner surface of the ejection channel, the inner surface of the non-ejection channel, the inner surface of the first groove and the inner surface of the second groove of the actuator. Formed,
A third step of forming a plurality of drive electrodes that are electrically connected to the inner surface of each of the ejection channels and a common electrode that is electrically connected to the inner surfaces of the plurality of non-ejection channels and is not electrically connected to the drive electrodes.

At least one of the actuators has a pair of actuator plates made of a piezoelectric material polarized in the thickness direction, and a plurality of grooves serving as the ejection channels and a plurality of grooves serving as the non-ejection channels. And a step of joining the pair of actuator plates at the partition wall so that the ejection channels correspond to each other and the non-ejection channels correspond to each other.

[0017]

In the ink ejecting apparatus according to the first aspect of the present invention having the above structure, the electrode provided on the inner surface of the first groove and the electrode formed on the inner surface of the ejection channel are electrically connected to each other. A plurality of independent drive electrodes are formed for each corresponding ejection channel, and the electrodes provided on the inner surface of the second groove and the electrodes provided on the inner surface of the non-ejection channel are electrically connected to each other, and A common electrode is formed that is electrically connected to the non-ejection channel. Therefore, electrical connection with the control unit that controls the drive of the ink ejecting apparatus becomes simple.

In the ink ejecting apparatus according to the second aspect, since the partition wall can have different polarization characteristics between the upper portion and the lower portion, a simple electrode can be provided without forming an electrode having a special structure. By using it, the partition can be deformed so as to change the pressure of each channel.

In the ink ejecting apparatus according to the third aspect, the second groove also serves as an ink supply communication path for supplying ink to each ejection channel. Therefore, the configuration is partially simplified.

In the method for manufacturing an ink ejecting apparatus according to the fourth aspect of the present invention having the above-mentioned structure, the actuator is located at one end face in the channel direction of the actuator and at a position corresponding to each of the ejecting channels. 1 groove is formed. A second groove is formed on the other end surface of the actuator in the channel direction and at a position corresponding to each of the non-ejection channels. After forming each groove, a conductive layer is formed on at least the inner surface of the ejection channel, the inner surface of the non-ejection channel, the inner surface of the first groove, and the inner surface of the second groove of the actuator. Then, the conductive layer electrically separated for each channel forms a plurality of drive electrodes that are electrically connected to the inner surfaces of the ejection channels and a common electrode that is electrically connected to the inner surfaces of the non-ejection channels. In this way, an electrode that can be easily electrically connected is formed by simple processing. Further, an ink ejecting device whose drive control is simple is manufactured.

In the method for manufacturing an ink jet device according to a fifth aspect, a pair of actuator plates, at least one of which is made of a piezoelectric material polarized in the thickness direction, is provided.
A plurality of grooves to be the ejection channels and a plurality of grooves to be the non-injection channels are formed, and the pair of actuator plates are joined at the partition wall portion so that the ejection channels correspond to each other and the non-ejection channels correspond to each other. By doing so, an actuator including partition walls having different polarization characteristics in the upper portion and the lower portion can be easily formed.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. However, the same members as those of the conventional technique are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIG. 1, the upper actuator plate 101 polarized in the direction of the arrow 105 and the lower actuator plate 102 polarized in the direction of the arrow 106 are lead zirconate titanate (PZT) piezoelectric ceramics. Made of material.

Both actuator plates 101, 102
Are cut with a diamond blade or the like, and for example, the lower actuator plate 102 has a plurality of grooves 116 having a depth of 150 μm and a width of 50 μm, and the upper actuator plate 101 has a plurality of grooves 115 having a depth of 150 μm and a width of 50 μm. Are formed. Further, the partition walls 111, which are the side surfaces of the groove 115 and the deep groove 116, have a width of 60 μm, for example.
Is.

As shown in FIG. 2, the upper actuator plate 101 and the lower actuator plate 102 are provided with an epoxy adhesive (not shown) so that the groove 115 and the groove 116 correspond to each other. The partition wall 111 is adhered to form the actuator 110. In the present embodiment, the polarization directions of the upper and lower portions of the connected partition walls 111 are reversed. Further, the groove 115 and the groove 116
Is a plurality of ink liquid chambers 11 that are laterally spaced from each other.
2 and air chambers 113 arranged on both sides of the ink liquid chamber 112. The ink liquid chamber 112 corresponds to the ejection channel of the present invention, and the air chamber 113 corresponds to the non-ejection channel of the present invention.

Next, as shown in FIG. 3, the first groove 114 extending in the vertical direction in the figure is provided on one end face of the ink liquid chamber 112 of the actuator 110 in the longitudinal direction, and all the ink liquid chambers are formed. At a position corresponding to 112, for example, 70 μ
The second end extending in the vertical direction in the drawing is formed on the other end surface of the actuator 110 different from the surface on which the first groove 114 is formed in the length direction of the ink liquid chamber 112. The groove 119 is formed in a position corresponding to all the air chambers 13 with a width of, for example, 70 μm.

Next, after performing a predetermined mask treatment on both end faces of the actuator 110 and both end faces in the channel direction, the actuator 110 is made of metal or the like as shown in FIG. 4 by a method such as electroless plating. To provide a conductive layer. By this plating process, the ink liquid chamber 112
A liquid chamber electrode 125 is formed on the inner surface, and a liquid chamber connecting electrode 126 is formed on the inner surface of the first groove 114. Further, an air chamber electrode 124 is formed on the inner surface of the air chamber 113, and an air chamber connecting electrode 127 is formed on the inner surface of the second groove 119. Further, an electrode 122 is formed on the upper surface of the upper actuator plate 101, and an electrode 123 is formed on the lower surface of the lower actuator plate. In the state of FIG. 4, the electrodes 122, 125, 126, 127, 1
23 and 124 are electrically connected to each other.

Next, as shown in FIG. 5, the electrode 123 and the electrode 1 are formed by a first electrode separation groove 121 formed in the lower portion of the lower actuator 102 of the actuator 110 by cutting using a diamond blade or the like.
26 is electrically separated from each other to form a ground electrode 123a. In addition, on the upper part of the upper actuator 101 of the actuator 110, a plurality of second electrode separation grooves 120 formed by cutting using a diamond blade or the like is formed at a position corresponding to the air chamber 113, so that the electrode 122 causes each ink Electrically separated for each liquid chamber 112,
A plurality of drive electrodes 122a are formed.

Here, the ground electrode 123a is electrically connected to all the air chamber electrodes 124 via the air chamber connecting electrode 127 and serves as a common electrode. The drive electrode 122a is
Liquid chamber electrodes 1 respectively corresponding to the liquid chamber connecting electrodes 126
It is in continuity with 25.

Next, as shown in FIG. 6, the substrate 140 having the drive electrode pattern 141 formed thereon and the upper portion of the upper actuator portion 101 of the actuator 110 are bonded to each other. At that time, the drive electrode pattern 141 and each drive electrode 122a are electrically and mechanically joined by a method such as soldering. In addition, the actuator 110
Of the air chamber 11 on one end surface on the side where the first groove 114 is formed.
Join the stop plate 133 with a complete lid on 3.
At this time, the first groove 114 is not completely covered, and the passage sandwiched by the first groove 114 and the sealing plate 133 is an ink supply communication passage for introducing ink into the ink liquid chamber 112. Play the role of.

In the actuator 110, a nozzle plate 131 having nozzles 132 provided at positions corresponding to the positions of the respective ink liquid chambers 112 is adhered to the end surface opposite to the one end surface to which the sealing plate 133 is joined. To be done. This nozzle plate is made of a plastic such as polyalkylene (for example, ethylene) terephthalate, polyimide, polyetherimide, polyetherketone, polyethersulfone, polycarbonate, or cellulose acetate.

As a result, the actuator 110
Includes an ink liquid chamber 112, a partition wall 111 of which at least a part is made of piezoelectric ceramics, a liquid chamber electrode 125, a liquid chamber connecting electrode 126, an air chamber electrode 124, a ground electrode 123a, and a drive electrode 122a. And the ink ejecting apparatus 100.

Next, the configuration of the control unit of this embodiment will be described with reference to FIG. 7 which is a block diagram of the control unit. As shown in the figure, the driving electrode pattern 141 on the substrate 140 is formed.
Are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54, and the ground line 55 are also connected to the LSI chip 51.
The ground electrode 123a that is electrically connected to all the air chamber electrodes 124 in the air chamber 113 is connected to the ground line 55 by a known method such as wire bonding. LSI
The chip 51 determines which nozzle 132 should eject the ink droplet from the data appearing on the data line 53, based on the continuous clock pulses supplied from the clock line 52. And the LSI chip 5
No. 1 applies the voltage V of the voltage line 54 to the drive electrode pattern 141 which is electrically connected to the liquid chamber electrode 125 of the driven ink liquid chamber 112, and applies the voltage V of the voltage line 54 to the liquid chamber electrodes 125 of the ink liquid chambers 112 other than the ink liquid chamber 112. The ground line 55 is connected to the conductive drive electrode pattern 141 to be grounded.

Next, the operation of the ink ejecting apparatus 100 according to the manufacturing method of this embodiment will be described with reference to FIGS. In order to eject ink droplets from the ink liquid chamber 112a shown in FIG. 8, a voltage pulse is applied to the corresponding liquid chamber electrode 125a. (It means to apply a voltage to the indoor electrode 125 and ground the liquid indoor electrode 125 which is not instructed). Then, as shown in FIG. 9, an arrow 107 is formed on the partition wall 111a.
Direction, an electric field in the direction of arrow 108 is generated in the partition wall 111b, and the partition walls 111a and 111b move toward each other due to the piezoelectric thickness sliding effect. Then
The volume of the ink liquid chamber 112a decreases, and the pressure in the ink liquid chamber 112a including the vicinity of the nozzle 132 increases. As a result, the ink in the ink liquid chamber 112 a becomes an ink droplet and is ejected from the nozzle 132.

Next, the application of the drive voltage is stopped to increase the volume of the ink liquid chamber 112a from the reduced state to the natural state, and the ink formed by the first groove 114 from the ink supply source (not shown). Ink liquid chamber 11 via the supply connection path
Ink is supplied into 2a.

In the above embodiment, first, the driving voltage is applied in the direction in which the volume of the ink liquid chamber 112a is reduced to eject ink droplets, and then the application of the driving voltage is stopped to move the ink liquid chamber 112a. Although the ink was supplied to the ink liquid chamber 112a by increasing the volume to the natural state, first, the drive voltage was applied so that the volume of the ink liquid chamber 112a was increased to supply the ink to the ink liquid chamber 112a. The application of the drive voltage may be stopped, the volume of the ink liquid chamber 112a may be reduced from the increased state to the natural state, and the ink in the ink liquid chamber 112a may be ejected as ink droplets.

As described above, according to the manufacturing method of the present embodiment, the ink ejecting apparatus 100 cuts the grooves 115 and 116 to form the partition walls 111, and the two actuator plates 101 and 102 having the partition walls 111 are separated from each other. After joining at the parts and forming the first groove 114 on one end surface and the second groove 119 on the other end surface by cutting, the inner surface of the ink chamber 112, the inner surface of the air chamber 113, and the first groove 114. , A metal layer is formed on the surface of the second groove 119, and the drive electrode 122 that is electrically connected to the liquid chamber electrode 125 is electrically and mechanically soldered to the substrate 14
It is made by joining with 0. As described above, since it is manufactured only by cutting and simple plating, it is excellent in mass productivity.

Further, the ink ejecting apparatus 100 of the present embodiment.
Since the partition 111 has only one bonded portion, the energy loss of the bonded portion is small. Furthermore, in the air chamber 113,
Since it is filled with air, the partition wall 111 can be easily deformed and the voltage can be low. Also, so-called crosstalk is reduced.

Further, the first groove portion 114 has the ink chamber 1
Since the ink supply communication path for introducing the ink to the ink jet printer 12 is formed, the configuration of the ink ejecting apparatus 100 is partially simplified.

Further, the drive electrodes 122a which are electrically connected to the liquid chamber electrodes 125 can be formed at a wider pitch than in the conventional case.
Therefore, electrical connection with the electrode pattern 141 formed on the substrate 140 is easy.

In the ink ejecting apparatus and the method of manufacturing the same of this embodiment, both the upper actuator plate 101 and the lower actuator plate 102 are lead zirconate titanate-based (P
ZT) is used as the ceramic material, but either one may be made of ceramic having no piezoelectricity or a resin material.

In the above embodiment, all the air chamber electrodes 124 are always grounded, all the liquid chamber electrodes 125 are normally grounded, and a voltage is applied to the corresponding liquid chamber electrodes 125 when ink is ejected. However, the voltage V is always applied to all the air chamber electrodes 124, and the voltage V is also applied to all the liquid chamber electrodes 125 in the normal state. The ink ejection may be controlled by grounding the corresponding liquid chamber electrode 125 at the time of ejecting the ink and setting the other liquid chamber electrodes 115 in a high impedance state. According to this control, an electric field is not generated in the ink liquid chamber 112, so that the ink chamber 112 due to an electrical effect is generated.
The deterioration of the ink inside and the deterioration of the liquid chamber electrode 125 are not caused.

Further, in the ink ejecting apparatus 100 of the present embodiment, the first groove 114 is provided so as to reach from the upper surface to the lower surface of the actuator 110, but within the range of communicating with the ink liquid chamber 112, Actuator 11
0 may be provided from the upper surface to the middle of the lower surface. Similarly, in the ink ejecting apparatus 100 of the present embodiment, the second groove 119 is provided so as to reach from the upper surface to the lower surface of the actuator 110, but the actuator 110 is provided within a range in which the second groove 119 communicates with the ink liquid chamber 112. It may be provided from the lower surface to the middle of the upper surface.

[0044]

As described above, in the ink ejecting apparatus of the present invention, the drive electrode and the common electrode can be formed with a pitch wider than that of the conventional one, so that the electric connection to the substrate is easy.

Further, in the manufacturing method, the actuator with electrodes is produced only by performing the simple processing of collectively forming the conductive layers and the cutting processing, which is excellent in mass productivity.

[Brief description of drawings]

FIG. 1 is a perspective view showing a manufacturing process of an ink ejecting apparatus according to an embodiment of the invention.

FIG. 2 is a perspective view showing a manufacturing process of the ink ejecting apparatus.

FIG. 3 is a perspective view showing a manufacturing process of the ink ejecting apparatus.

FIG. 4 is a cross-sectional view showing a manufacturing process of the ink ejecting apparatus.

FIG. 5 is a perspective view showing a manufacturing process of the ink ejecting apparatus.

FIG. 6 is a perspective view showing a manufacturing process of the ink ejecting apparatus.

FIG. 7 is a block diagram showing a control unit of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 8 is an explanatory diagram showing an operation of the ink ejecting apparatus according to the embodiment of the present invention.

FIG. 9 is an explanatory diagram showing an operation of the ink ejecting apparatus.

FIG. 10 is a diagram showing a conventional ink ejecting apparatus.

[Explanation of symbols]

 100 Ink Ejector 101 Upper Actuator Plate 102 Lower Actuator Plate 105 Polarization Direction 106 Polarization Direction 110 Actuator 111 Partition 112 Ink Liquid Chamber 113 Air Chamber 114 First Groove 115 Groove 116 Groove 119 Second Groove 120 Second Electrode Separation Groove 121 First Electrode Separation Groove 122 Drive Electrode 123 Grounding Electrode 124 Air Chamber Electrode 125 Liquid Chamber Electrode 126 Liquid Chamber Connecting Electrode 127 Air Chamber Connecting Electrode

Claims (5)

[Claims] 1. A plurality of ejection channels that eject ink, a plurality of non-ejection channels that are provided on both sides of the ejection channel and that do not eject ink, and the ejection channel and the non-ejection channel are separated from each other and polarized. An ink-jet device having a partition wall at least a part of which is formed by a piezoelectric material and an electrode provided on an inner surface of each channel for generating a driving electric field in the piezoelectric material. A plurality of first grooves provided so as to correspond to each of the injection channels so as not to communicate with the non-injection channel, and the first groove is provided on the inner surface of the first groove, and the injection is performed. A plurality of drive electrodes that are electrically connected to the electrodes provided on the inner surface of the channel and are independent for each corresponding ejection channel; and the non-ejection channel A plurality of second grooves provided corresponding to each of the non-injection channels so as not to communicate with the non-injection channel, and the second groove provided on the inner surface of the second groove. Conductive to all of the electrodes provided on the inner surface of the injection channel,
An ink ejecting apparatus comprising: a common electrode that is not electrically connected to the drive electrode. 2. At least one has a structure in which a pair of actuator plates made of a piezoelectric material subjected to polarization treatment in the thickness direction are joined to each other, and the actuator plates each have a plurality of comb-like grooves, The ink according to claim 1, wherein the ejection channel and the non-ejection channel are formed by allowing the plurality of grooves provided in both the pair of actuator plates to communicate with each other at a joint surface. Injection device. 3. The ink ejecting apparatus according to claim 1, wherein the first groove also serves as an ink supply communication path for supplying ink to each ejection channel. 4. A plurality of ejection channels for ejecting ink, a plurality of non-ejection channels provided on both sides of the ejection channel and not ejected with ink, the ejection channel and the non-ejection channel being separated from each other, and A method of manufacturing an ink ejecting apparatus, comprising forming an electrode for generating a driving electric field in the piezoelectric material on an actuator having a partition wall at least a part of which is polarized by a channel direction of the actuator. A first step of forming a first groove at one end face of the actuator at a position corresponding to each of the injection channels, and at a second end face of the actuator in the channel direction at a position corresponding to each of the non-injection channels. To the second
And a conductive layer on at least the inner surface of the ejection channel, the inner surface of the non-ejection channel, the inner surface of the first groove, and the inner surface of the second groove of the actuator. Forming a plurality of drive electrodes that are electrically connected to the inner surfaces of the ejection channels, and a common electrode that is electrically connected to the inner surfaces of the plurality of non-ejection channels and not electrically connected to the drive electrodes.
And a step of manufacturing the ink jetting apparatus. 5. The actuator has a pair of actuator plates, at least one of which is made of a piezoelectric material polarized in the thickness direction, and has a plurality of grooves serving as the ejection channels and a plurality of grooves serving as the non-ejection channels. And a step of forming a pair of the actuator plates,
The method of manufacturing an ink jetting apparatus according to claim 4, wherein the non-jetting channel is formed so as to correspond to the non-jetting channels so as to correspond to each other.