JPH0830816B2 - Liquid crystal display terminal structure - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a liquid crystal display device having a large number of pixels in a matrix or similar and arranging MIM elements corresponding to the respective pixels on one substrate. The present invention particularly relates to an electrode terminal shape that rationalizes the manufacturing process of a MIM element liquid crystal display device.

[Prior Art] A MIM element is a metal-insulator-
Abbreviation of metal, which is a material structure that exhibits non-linear voltage-current characteristics. Specifically, Ta-TaOx-Cr, Ta-TaOx-Ta,
Al-AlOx-Al or the like is used. This element has a high resistance at a low voltage and a low resistance at a high voltage and has switching characteristics. By arranging this element in each pixel in the liquid crystal display device, each pixel can be controlled and driven quasi-independently. it can. At least, a high-density matrix screen with 200 × 200 pixels or more can be achieved, and it can be applied to character displays, TV image displays, etc.

TaOx, which is an important part of the MIM element, is usually obtained by anodizing Ta. FIG. 3 shows a plan view of the portion where the MIM element is arranged in the display device and the terminal. TaOx and Ta have the same planar pattern, but the surface of the anodized portion becomes TaOx. The lower side of the MIM element portion 33 is Ta and the surface thereof is TaOx, and the coupling electrodes 32 of Cr or the like intersect to form a MIM element. Further, the coupling electrode 32 is connected to the pixel electrode 31 such as ITO. A suitable liquid crystal layer is provided between the pixel electrode 31 and the counter electrode arranged on the opposite side to form a display pixel.

The anodic oxidation is obtained by immersing the patterned Ta substrate in a citric acid solution or the like, disposing another cathode plate, and applying a voltage of about 30 V between Ta and the cathode plate. Usually, in this process step, the Ta patterns are all bonded and are completed by one-time anodic oxidation. By cutting the glass substrate in the final step, each terminal is separated and completed.

Further, in order to rationalize the process, a method of arranging a plurality of unit substrates on one relatively large substrate and cutting and separating in the final process is adopted. In this case, of course,
The unit board and the terminals can be separated at the same time. In addition, the Ta lines on the large substrate are made into a pattern in which they are all bonded, and the anodic oxidation process is rationalized. The number of unit substrates arranged on the large substrate is preferably 4 to 9 because it is easy to handle. FIG. 4 shows a schematic diagram of four arrangements. The number of Ta lines omitted and the surrounding Ta plane are shown. The Ta lines of the unit substrates 41, 42, 43, 44 all have a single Ta pattern. The broken line indicates the cutting line. As shown in this example, terminal lead-out of the unit substrate is performed on both sides. This is because by drawing out to both sides, the terminal interval can be widened, which is advantageous in manufacturing.

FIG. 5 is an enlarged view of a portion between the substrates 41 and 42 or 43 and 44 in the central portion of FIG. The vertical line 51 is a coupling line for anodizing the Ta line connected to the left and right terminal portions. This line width needs to be several tens of μm or more in order to ensure the anodic oxidation. The part narrowed by the broken line is the part cut off by cutting. in this case,
Since cutting with a scriber device is a method of inserting and breaking a thin cut line, the connecting line 51 always remains in either side and cannot be adopted. The dicing method using a grindstone rotating at a high speed can cut off with a constant width, which is effective in this case.

Conventionally, the dicing method was used to cut off, but the processing capacity was worse than that of the scribing method.

[Problems to be solved by the invention]

It is an object of the present invention to provide an electrode terminal shape on a substrate, which is possible by a scribing method when a unit substrate is separated from a large substrate in a manufacturing process of a MIM element liquid crystal display device.

By totally incorporating the scribe method, the process capability can be improved.

[Means for solving problems]

A terminal structure of a liquid crystal display device of the present invention is a terminal structure of a liquid crystal display device in which liquid crystal is sandwiched between a pair of substrates, and a plurality of signal electrodes are formed on one of the pair of substrates. The terminal portion of the signal electrode termination on the one substrate has a dent, and the dent is formed parallel to the length direction of the electrode terminal and is located at the central portion in the width direction of the electrode terminal. It is characterized by doing.

〔Example〕

FIG. 1 shows an embodiment of the present invention. Two electrode terminals are shown representatively. The broken line on the right side is the outline of the substrate. This is the right end portion, and the left end has a symmetrical shape. The dimension (a + b) is the pitch of the terminal arrangement, a is the terminal width, and b is the inter-terminal width. The terminal pattern has a recessed portion 11 having the same size as the width between terminals. Dimension c is dented part 11
Is the length of

FIG. 2 shows a state in which two unit substrates are combined. The broken line is a cutting line, that is, a scribe line. The left and right terminals are connected in a state of being displaced by a half pitch, and as a result, Ta connection is connected from top to bottom. Moreover, even if a fine scribe line is used for cutting, no extra Ta line remains.

〔The invention's effect〕

As described above, the terminal structure of the liquid crystal display device of the present invention has a liquid crystal sandwiched between a pair of substrates, and a plurality of signal electrodes are formed on one of the pair of substrates. The terminal structure of the signal electrode termination on the one substrate has a dent, and the dent is formed parallel to the length direction of the electrode terminal and the width direction of the electrode terminal. By arranging in the central part of, multiple unit substrates can be arranged on a large substrate, Ta line can be anodized at a time, and the manufacturing method of MIM element substrate that can be easily separated by scribe is secured. it can.

That is, the manufacturing cost of the MIM element substrate can be kept low.

[Brief description of drawings]

FIG. 1 is a diagram showing a shape of an electrode terminal according to an embodiment of the present invention. FIG. 2 is an explanatory view of the embodiment. FIG. 3 is a diagram showing an arrangement row of conventional MIM elements and terminals. FIG. 4 shows an explanatory view of the substrates arranged on the large substrate. FIG. 5 is an explanatory view of an electrode terminal portion of a conventional substrate.

Claims (1)

[Claims] 1. A terminal structure of a liquid crystal display device, wherein a liquid crystal is sandwiched between a pair of substrates, and a plurality of signal electrodes are formed on one of the pair of substrates, wherein the one substrate. The terminal portion of the upper end of the signal electrode has a dent, the dent is formed parallel to the length direction of the electrode terminal, and is located in the central portion in the width direction of the electrode terminal. Liquid crystal display terminal structure.