JPH08290280A - Microscope with laser repair function - Google Patents

Abstract

PURPOSE: To enable visual observation and observation by a photographing means simultaneously by providing an optical path switching means by which an optical path from an objective lens can be switched dividingly to the straight advance direction and a first deflecting direction or to the straight advance direction and a second deflecting direction. CONSTITUTION: If it is desired to perform microscopic observation and TV observation simultaneously, switching is carried out so that the prism 212 of an optical path switching prism 21 enters the optical path. As a result, an observed image from an object 5 is deflected by the prism 212, formed by an eyepiece 23 through the prism 22, simultaneously transmitted through the prism 212, and formed also on the image-pickup surface 31 of a TV camera unit 3, so that the image of the object 5 is displayed on a monitor enabling the TV observation. Consequently, laser repair and TV observation are possible by switching the prism 211 of the optical path switching prism 21 to the optical path, and also, microscopic observation and TV observation are simultaneously performed by switching the prism 212.

Description

Detailed Description of the Invention

[0001]

The present invention relates to a liquid crystal module, IT
The present invention relates to a laser repair function microscope having a laser repair function for repairing a defective portion such as a pattern defect or a short circuit using a laser in a manufacturing process of an O substrate, a color filter and the like.

[0002]

2. Description of the Related Art Conventionally, as an example of an apparatus for laser processing a surface of a sample such as a semiconductor or a high-density multilayer substrate while observing with a TV camera, as disclosed in Japanese Patent Laid-Open No. 23453/1992, an XY stage is used. The sample image is temporarily magnified by a convex lens, transmitted and reflected using a half mirror, the reflected image is formed on the image pickup surface of the TV camera, and the transmitted image is formed on the pattern mask of the laser light source. There is one that was made to image.

Further, as a conventional microscope with a laser repair function, as shown in FIG. 7, a laser oscillation tube 2, a TV camera unit 3, a variable slit 41, and the slit 41 are provided on the straight tube side of a trinocular tube of a microscope body 1. There is one in which a processing laser head 4 having a light source 42 for irradiation is attached.
In this case, the variable slit 41 of the laser head 4 is arranged at the intermediate image position formed by the objective lens 6 and the imaging lens 7,
The TV camera unit 3 is provided in the optical path branched by the beam splitter 9 arranged between the imaging lens 7 and the variable slit 41, and its camera imaging surface 31 is at the imaging position via the relay lens 12. It is arranged. Also, for switching the optical paths of the three-lens-barrel of the microscope body 1,
A switching prism 11 is arranged between the imaging lens 7 and the beam splitter 9 so as to be able to move in and out. In this case, the ratio of the spectral light quantity of the eyepiece: straight cylinder is 0: 100, 100: 0.
Has become.

In order to laser repair the object 5 with such an apparatus, first, the optical path switching prism 11 is removed from the optical path, the straight cylinder (laser head) side is set to 100%, and the objective lens 6 is focused. This focusing is performed by displaying an image of the object 5 on the monitor on the TV camera unit 3 side. At the same time, a slit image of the variable slit 41 appears on the monitor. The laser processing range is set by this slit image, but this range setting is
This is performed by adjusting the opening width of the variable slit 41 with a motor (not shown). In this state, the operator moves the portion of the object 5 to be corrected from the observation image displayed on the monitor to the slit position and adjusts the slit width to perform the correction by the laser.

[0005]

However, in such a conventional case, first, in the former case, the image of the sample surface is formed on the image pickup surface of the TV camera through the half mirror, and therefore the TV camera is used. Image is upside down or left and right with respect to the image of the sample. This causes the operator to handle the sample in reverse, which causes confusion in the work and causes a processing error.

Therefore, it is conceivable to use a trapezoidal prism to adjust the direction of the image, but if this is done, the number of optical components will increase and the mechanism will become more complicated. On the other hand, in the latter case, due to the structure, the distance from the imaging lens 7 to the intermediate image position is about 180 mm, and the distance from the head mounting surface 8 of the straight tube of the trinocular tube to the variable slit 41 is extremely small. Therefore, as shown in the figure, a beam splitter 9 is arranged between the head mounting surface 8 and the variable slit 41, the beam is deflected by this beam splitter 9, and the optical path is bent by a mirror 10, so that the TV
If it is configured to reach the camera unit 3, it is difficult to place the camera imaging surface 31 on the intermediate image surface, and the relay lens 12 serves as an optical path. Therefore, there is a problem that the number of optical components is significantly increased and the structure becomes complicated.

Therefore, if the beam splitter 9 is arranged at the position of the broken line 9'and the mirror 10 is arranged at the position of the broken line 10 ', the position of the intermediate image can be shifted by the amount of the movement of the beam splitter 9. Nevertheless, it is practically difficult to realize as a device. On the other hand, it is possible to dispose the TV camera 5 sideways directly on the horizontal optical axis deflected by the beam splitter 9'without providing the mirror 10 '. If the light is emitted, the TV camera 5 can be arranged at the intermediate image position, but since the observation image of the microscope is turned upside down, the image displayed on the TV monitor and the observation image viewed with the naked eye are in a mirror image relationship, which is not preferable.

There is also a problem that the TV monitor and the microscope cannot be observed at the same time. That is, TV
The resolution of the camera is still inferior to that of the human naked eye, and therefore, it is necessary to perform microscopic observation with the eyes. At this time, the optical path switching prism 11 has to switch the optical path one by one, which is troublesome. If possible, it is preferable that the TV monitor and the microscope observation can be performed at the same time without switching the prism 11.

Further, since the optical path switching prism 11 that is put in and out of the optical path and the beam splitter 9 that deflects light to the TV camera unit 3 side are arranged in two stages in the vertical direction, that is, a prism structure having two stages is provided. Since it is necessary, the mechanism becomes more complicated, and the space for that is wasted.

The present invention has been made in view of the above circumstances, and has a simple laser repair function of a structure capable of simultaneously performing naked-eye observation and observation by the image pickup means and displaying a monitor image correctly by the image pickup means. The purpose is to provide a microscope.

[0011]

According to the present invention, there is provided a processing laser means having a variable slit means for laser repair, and a laser from the processing laser means is imaged on an object and an image of the object. In a microscope with a laser repair function having an image forming optical system including an objective lens for forming an image of an object, an optical path from the objective lens is inserted between the intermediate image position by the image forming optical system and the objective lens. Is provided so as to be divided into a straight traveling direction and a first deflecting direction or a straight traveling direction and a second deflecting direction, respectively.

In the present invention, the image pickup means for picking up an image of the object in the straight direction, the processing laser means in the first deflection direction, and the object in the second deflection direction are observed with the naked eye. And the optical path switching means can be selectively inserted between the intermediate image position by the imaging optical system and the objective lens, one of which is the imaging means and the processing. The laser means for use, and the other has two beam splitters for dividing the optical path into the image pickup means and the naked-eye observation means, respectively. Further, in the present invention, the optical path switching means has a shielding member that prevents the laser light from the processing laser means from entering the naked eye observation means.

[0013]

As a result, according to the present invention, the optical path switching means is inserted between the position of the intermediate image formed by the imaging optical system and the objective lens, and the optical path from the objective lens is imaged by the optical path switching means. Since it is possible to switch between the direction of the processing laser means or the direction of the image pickup means and the naked eye observation means, it is possible to simultaneously perform TV observation by the laser superior and the image pickup means, and at the same time, the TV set by the image pickup means.
The observation and the microscopic observation by the naked eye observation means can be performed at the same time.

According to the present invention, the optical path switching means selectively inserted between the position of the intermediate image formed by the imaging optical system and the objective lens has two beam splitters. Of the beam splitter, the imaging means is arranged in the direction of the optical path passing straight forward and the processing laser means is arranged in the direction of the first deflecting optical path, and the other beam splitter is imaged in the direction of the optical path passing straight forward. Since the means and the macroscopic observation means are respectively arranged in the second deflecting optical path direction, since the imaging means is always arranged in the optical path direction in which these beam splitters go straight forward, It is possible to prevent the image on the TV monitor of the image pickup unit from being opposite to the image on the target member. Further, according to the present invention, since the optical path switching means is provided with the shielding member, it is possible to prevent the laser light from the processing laser means from entering the naked eye observation means.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 shows a schematic configuration of the first embodiment. The same parts as those in FIG. 7 described above are designated by the same reference numerals.

In this case, an optical path switching prism 21 is provided instead of the optical path switching prism 11. The optical path switching prism 21 includes a prism 211 that divides the optical axis of the imaging lens 7 into two directions, that is, the direction of the eyepiece lens 22 and the direction of the TV camera unit 3, and the optical axis of the imaging lens 7 and the direction of the laser head 4 and the TV. It has a prism 212 that divides in the direction of the camera unit 3, and these prisms 21
1, 212 can be switched and inserted into the optical path.

At the intermediate image position on the optical axis deflected by the prism 211, the eyepiece lens 23 is disposed via the prism 22, and the TV camera unit 3 is disposed in the transmitted optical axis direction. The laser head 4 is arranged at the intermediate image position on the optical axis deflected by the prism 212 via the mirror 10, and the TV camera unit 3 is arranged in the direction of the transmitted optical axis.

Incidentally, such an optical path switching prism 2
1, the prism 211 as shown in FIG.
A shield plate 211a is attached to prevent the laser light from entering the eyepiece 23 side when the laser light from the laser head 4 passes through to the object 5, and the prism 212 is also attached to the eyepiece 23 side. Even if the laser light is erroneously oscillated, a shield plate 212a is attached so as not to enter the eyepiece lens 23 side.

According to this structure, however, first, in order to laser-repair the object 5, the prism 211 of the optical path switching prism 21 is switched so as to enter the optical path. Then, the observation image from the object 5 is the prism 21.
The image of the target object 5 is projected on the monitor through the image pickup surface 31 of the TV camera unit 3, and at the same time, the slit image of the variable slit 41 is projected on the monitor by the deflection by the prism 212. By setting the range of laser processing in this state, the desired portion of the object 5 is corrected by the laser light from the laser head 4.

On the other hand, when the microscope observation and the TV observation are desired to be performed simultaneously, the prism 21 of the optical path switching prism 21 is used.
Switch so that 2 enters the optical path. Then, the observation image from the object 5 is deflected by the prism 212 and is imaged by the eyepiece lens 23 via the prism 22, and at the same time, the observation image from the object 5 is transmitted through the prism 212 and the TV.
An image is also formed on the image pickup surface 31 of the camera unit 3, and the image of the target object 5 is displayed on the monitor so that the TV can be observed.

Therefore, according to such a first embodiment,
By switching the prism 211 of the optical path switching prism 21 on the optical path, laser repair and TV observation can be performed simultaneously, and by switching the prism 212 on the optical path, microscope observation and TV observation can be performed simultaneously. Since the resolution of the TV camera is still inferior to that of the human eye, the optical path switching required for microscope observation is not required at all, as compared with the one required each time. The operation for observing the species can be simplified.

Further, by simply switching the prisms 211 and 212 of the optical path switching prism 21, the optical path from the objective lens 6 is directed toward the eyepiece lens 23, and the TV camera unit 3 is provided.
Direction, the laser head 4 direction can be switched, so compared to a conventional optical path switching prism that is put in and out of the optical path and a beam splitter that deflects light to the TV camera unit side are arranged in two stages in the vertical direction. Since the prism structure having two stages is not required and the prism structure having one stage is sufficient, the entire apparatus can be made compact and the distance from the optical path switching prism 21 to the intermediate image position becomes long, so that the TV camera unit 3, Both the laser head 4 and the eyepiece lens 23 can be directly arranged at the intermediate image position, and the relay lens is not necessary.

Since the prisms 211 and 212 of the optical path switching prism 21 are provided with shield plates 211a and 212a, respectively, which prevent the laser light from the laser head 4 from entering the eyepiece lens 23, respectively. Does not enter the eye through the eyepiece lens 23.

In the first embodiment, the laser oscillator tube 2 and the variable slit 41 are contained in one housing of the laser head 4. However, even if only the variable slit 41 is made independent and arranged at the intermediate image position. Good. Alternatively, the laser oscillation tube 2 may be disposed sideways without the mirror 10. Also,
In the case of a microscope having a configuration in which the distance between the objective lens 6 and the imaging lens 7 is large, the imaging lens 7 is arranged at a position after the optical path switching prism 21 as shown by the broken line in FIG. Eyepiece 23, TV without relay lens
The camera unit 3 and the laser unit 4 can be arranged at the intermediate image position. (Second Embodiment) FIG. 3 shows a schematic configuration of the second embodiment, and in this case also, the same parts as those in FIG. 1 described above are denoted by the same reference numerals.

In this embodiment, the optical path switching prism 21 is used.
A microscope having an extended optical system in which a relay lens 24 is arranged between the lens 22 and the prism 22 on the side of the eyepiece 23 is provided with the laser head 4 having the variable slit 41 built therein and the TV camera unit 3. Further, an optical path bending prism 25 is arranged between the optical path switching prism 21 and the laser head 4, and the object 5 that passes through the imaging lens 7
The observation image from is reflected twice by the optical path switching prism 21 and the optical path bending prism 25, and the variable slit 41 of the laser head 4 is arranged so as to match the intermediate image position. In this way, the configuration in which the relay lens is arranged on the eyepiece side is the same as the number of the object 5 such as an LCD substrate +
It is adopted when handling an object having a size of cm and when it is necessary to dispose the eyepiece lens at a position apart from the optical axis of the objective lens to some extent.

Further, as shown in FIG. 4, each prism 211 and 212 of the optical path switching prism 21 is fixed on a moving table 26 which moves in a direction perpendicular to the optical path, and the prism 2
11 and the prism 212 are separately inserted into the optical path. This moving table 26 serves as a moving guide mechanism.
The slide guide 261 is used.

Further, these prism 211 and prism 2
The transmittance and reflectance of 12 are 50:50 (TV camera: laser head) and 80:20 (TV camera: eyepiece lens), respectively. In addition, the laser light is emitted from the eyepiece lens 23.
In order to prevent the incident light from being incident on the prisms 211 and 212, as described in FIG.
2a is provided.

Even in such a structure, however, in order to repair the object 5 by laser, the prism 211 of the optical path switching prism 21 is inserted into the optical path by manual operation. Then, also in this case, the observation image from the target object 5 is transmitted through the prism 212 and is imaged on the image pickup surface 31 of the TV camera unit 3 to project the image of the target object 5 on the monitor, and at the same time, the prism 212 By projecting the slit image of the variable slit 41 on the monitor by deflection and setting the laser processing range in this state, the laser head 4
The desired portion of the object 5 is corrected by the laser light from the.

When it is desired to carry out the microscope observation and the TV observation at the same time, the optical path switching prism 21 is manually operated.
Prism 212 is inserted into the optical path. Then, the object 5
The observation image from is deflected by the prism 212, the intermediate image of the imaging lens 7 is imaged in front of the eyepiece lens 23 by the relay lens 24 and the total reflection prism 22, and at the same time, the observation image from the object 5 is The light is transmitted without being reflected by the prism 212, is imaged on the image pickup surface 31 of the TV camera unit 3, and an image of the target object 5 is displayed on the monitor, which enables TV observation.

Therefore, according to such a second embodiment,
The prism 211 or 21 of the optical path switching prism 21
By forming an intermediate image of the imaging lens 7 that passes straight through 2 on the imaging surface 31 of the TV camera unit 3, the position of the TV camera unit 3 is set to a position of a straight cylinder with respect to the object 5 and the objective lens 6. Since the image is arranged, the image on the TV monitor or the like does not become the opposite of the image of the object 5, and it is possible to eliminate the cause of confusion on the part of the operator and eliminate machining errors. You can

Further, conventional optical components such as a relay lens and a mirror for guiding the optical path to the TV camera unit 3 side between the objective lens 5 and the optical axis of the TV camera unit 3 can be omitted, so that the structure is simplified. Can also be realized.

It is also possible to use an AF mechanism with a TV camera. In this case, 27 is A in FIG.
The F mechanism and 28 are dichroic mirrors. Further, instead of the TV camera, a 35 mm camera is arranged to take a picture, and the prism 211 and the prism 212 are used.
The optical path through can also be used for other purposes. (Third Embodiment) FIG. 5 shows a schematic structure of an optical path switching prism 21 used in the third embodiment. In this case, the mounting position of the prism 211 is 90 when viewed from above.
A shield plate 213 for blocking the laser is provided between the prisms 211 and 212, which is rotated once. By doing so, in the above-described first and second examples, the eyepiece 2
3, the TV camera unit 3 and the laser head 4 are arranged in a line with respect to the TV 3 as shown in FIG.
Since the camera unit 3 and the laser head 4 are arranged side by side, the space for disposing them can be made effective and the device can be made compact. Also, the prism 211
By changing the mounting position of the above, the shield plate 212a in the prism 212 is not required and only one shield plate 213 can be used, so that the number of parts can be reduced.

Although the above description has been given based on the embodiments, the present invention includes the following inventions. (1) A processing laser means having a variable slit means for laser repair, and an objective lens for focusing a laser from the processing laser means on an object and for forming an image of the object. In a microscope with a laser repair function having an image forming optical system including the optical system, the microscope is inserted between an intermediate image position by the image forming optical system and the objective lens, and an optical path from the objective lens is used as a straight traveling direction and a first deflection direction. Alternatively, the microscope with a laser repair function is provided with an optical path switching means capable of switching so as to be divided into a straight traveling direction and a second deflection direction.

With this arrangement, TV observation can be performed simultaneously by the laser beam and the image pickup means, and at the same time,
The TV observation by the image pickup means and the microscope observation by the naked eye observation means can be performed at the same time. In particular, there is no need to switch the optical paths for performing the TV observation and the microscope observation, and the operation for this kind of observation is performed. Easy to do. Moreover, since the optical path switching means may have a one-stage prism structure, the entire apparatus can be made compact.

(2) In the microscope with a laser repair function described in (1), an image pickup means for picking up an image of an object in the straight-ahead direction and the processing laser means in the first deflection direction are provided.
Macroscopic observation means for observing the object with the naked eye are arranged in the second deflection direction, and the optical path switching means selectively selects between the intermediate image position by the imaging optical system and the objective lens. Two beam splitters which can be inserted and which divide the optical path into the image pickup means and the processing laser means, and the other into the image pickup means and the naked eye observation means, respectively.

With this arrangement, the image pickup means is always arranged in the direction of the optical path through which the beam splitter passes straight, so that the TV monitor image of the image pickup means is opposite to the image of the target member. It is possible to prevent the cause of confusion in the work for the operator, eliminate processing mistakes, etc. Also, conventional optical components such as relay lenses and mirrors for guiding the optical path to the imaging means side. By omitting, it is possible to simplify the configuration.

(3) In the microscope with a laser repair function described in (1), the optical path switching means has a shielding member for preventing the laser light from the processing laser means from entering the naked eye observation means. There is. In this way, there is no risk that the laser light from the processing laser means will enter the eye.

[0038]

As described above, according to the present invention, it is possible to simultaneously perform the TV observation by the image pickup means and the microscopic observation by the naked eye observation means. In particular, the optical path for performing the TV observation and the microscope observation can be switched. It is not necessary at all and the operation for this kind of observation can be simplified. Also,
Since the optical path switching means may have a one-stage prism structure, the entire apparatus can be made compact.

Further, since the image pickup means is arranged in the optical path direction which always goes straight to the beam splitter, the TV monitor image of the image pickup means is prevented from being opposite to the image of the target member. Therefore, it is possible to eliminate the cause of confusion in the work for the operator, eliminate processing mistakes, and eliminate the conventional optical components such as relay lenses and mirrors for guiding the optical path to the imaging means side. As a result, the configuration can be simplified.

Further, since each beam splitter of the optical path switching means has a shielding member for preventing the laser light from the processing laser means from entering the naked eye observation means, the laser from the processing laser means is used. There is no fear that light will enter your eyes.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of an optical path switching prism used in the first embodiment.

FIG. 3 is a diagram showing a schematic configuration of a second embodiment of the present invention.

FIG. 4 is a diagram showing a configuration of an optical path switching prism used in a second embodiment.

FIG. 5 is a diagram showing a configuration of an optical path switching prism used in a third embodiment of the present invention.

FIG. 6 is a diagram showing a schematic configuration of a third embodiment.

FIG. 7 is a diagram showing a schematic configuration of an example of a conventional microscope with a laser repair function.

[Explanation of symbols]

1 ... Microscope main body, 2 ... Laser oscillation tube, 3 ... TV camera unit, 31 ... Imaging surface, 4 ... Processing laser head, 41
... variable slit, 42 ... light source, 5 ... object, 6 ... objective lens, 7 ... imaging lens, 21 ... optical path switching prism,
211, 212 ... Prism, 211a, 212a ... Shielding plate, 22 ... Prism, 23 ... Eyepiece lens, 24 ... Relay lens, 25 ... Optical path bending prism, 26 ... Moving base,
261 ... Ant, 27 ... AF mechanism, 28 ... Dichroic mirror.

Claims (3)

[Claims] 1. A processing laser means having a variable slit means for laser repair, and an objective for imaging a laser from the processing laser means on an object and for forming an image of the object. In a microscope with a laser repair function having an image forming optical system including a lens, the microscope is inserted between an intermediate image position by the image forming optical system and the objective lens, and an optical path from the objective lens is set in a straight direction and a first direction. A microscope with a laser repair function, comprising an optical path switching means capable of switching so as to be divided into a deflection direction or a straight traveling direction and a second deflection direction. 2. An image pickup means for picking up an image of an object in the straight traveling direction, and the processing laser means in the first deflection direction,
Macroscopic observation means for observing the object with the naked eye are respectively arranged in the second deflection direction, and the optical path switching means selectively selects between the intermediate image position by the imaging optical system and the objective lens. Is insertable, one of which is in the imaging means and the processing laser means,
The microscope with a laser repair function according to claim 1, wherein the other has two beam splitters that divide an optical path into the image pickup unit and the naked-eye observation unit, respectively. 3. The laser repair function according to claim 2, wherein the optical path switching means has a shield member for preventing the laser light from the processing laser means from entering the naked eye observation means. microscope.