JPH08276391A - Suction pad provided with automatic cleaning - Google Patents

Abstract

PURPOSE: To provide the suction pad which automatically remove stains on the suction pad used for carrying a substance in the case of a semiconductor tester with its availability enhanced. CONSTITUTION: The suction pad 2 is pressed on a rubber cleaner 5 after it has been operated given times, after it has been pressed given times set in advance, it is moved to a new place over the rubber cleaner 5 for the suction pad 2 to be pressed. Besides, stains are removed every specified working time by the blast of compressed air from an air blower, or by a brush in stead of the rubber cleaner.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction pad used for sequentially inserting and removing an object to be tested, such as a semiconductor testing apparatus. Contamination caused by a large number of suction operations of the suction pad increases the suction capacity of the object. Drop it. Therefore, the present invention relates to a mechanical device that automatically removes the dirt.

[0002]

2. Description of the Related Art Conventionally, the suction pad is gradually soiled with dirt, dust, and dust in the operating atmosphere by a large number of operations, and after a certain operation, as shown in FIG. The suction pad 2 mounted on the table 1 was wiped with a gauze 3 impregnated with a cleaning material such as an alcohol attached to the finger 4 to remove extraneous matters.

However, in recent years, particularly when a large number of test pieces are tested at the same time, it becomes necessary to stop the tests all at once due to the failure of one suction pad, and to stop the test itself. , Lower utilization rate,
It was inconvenient.

[0004]

SUMMARY OF THE INVENTION It is an object of the present invention to improve the operating rate and reliability of a testing machine by automatically removing the dirt adhering to the surface of the suction pad by the suction pad performing a number of operations.

[0005]

In order to achieve the above object, dirt adhered to the suction pad surface is pressed against a rubber cleaner for strongly adhering and removing the dirt at a predetermined number of times, and scattered by an air blower. A mechanism was provided to force or remove by brushing.

[0006]

【Example】

(Embodiment 1) FIG. 2 shows an example using a rubber cleaner 5, which is fixed to a rubber cleaner support base 6. After the number of operations set arbitrarily,
The suction pad 2 is automatically pressed by the rubber cleaner 5. The use of one time or many times reduces the dirt removing power of the rubber cleaner 5, so that the specified operation is
The pressing position of the suction pad 2 changes to the XY direction and moves to a new surface.

When the entire surface of the rubber cleaner 5 is used up, a signal is sent to the tester, and then stopped and replaced with a new rubber cleaner, or the surface of the rubber cleaner 5 is stopped. Is cleaned with an alcohol or the like, the suction force is restored, and the operation is restarted.

(Embodiment 2) FIG.
Instead of changing the suction pad 2 in the XY directions, the rubber cleaner support base 6 is moved in the XY directions every predetermined number of suctions to remove the dirt on the suction pad on a new surface.

(Embodiment 3) As shown in FIG.
In addition to (2) or (2), the suction pad support 1 or the rubber cleaner support 6 is slightly slid in the XY or XYZ directions when pressed.

(Fourth Embodiment) In FIG. 5, instead of using a rubber cleaner as in the first embodiment, dirt on the adsorption pad 2 is scattered by a compressed air flow 7 from an air blow tube 8.

(Fifth Embodiment) FIG. 6 shows a plate 9 in the fourth embodiment.
An air blow tube 8 equipped with is placed with a small gap with the adsorption pad 2 and a strong compressed air flow 7 removes dirt.

(Sixth Embodiment) FIG. 7 shows the fifth embodiment or the sixth embodiment in which the suction pad 2 and the air blow pipe 8 are covered with a cylindrical tube 10 so that dirt is not scattered around.

(Embodiment 7) FIG. 8 is a view showing Embodiment 6 in which a cylinder 11 with a pressure reducing hole covering the suction pad 2 and the air blow pipe 8 is provided to absorb scattered dirt.

(Embodiment 8) FIG. 9 shows Embodiments 5, 6, 7, and 8.
In place of using the air blow pipe 8, a compressed flow is ejected from the adsorption pad 2 itself, and the dirt of the adsorption pad 2 is scattered by the compressed air flow 7 between the adsorption pad 2 and the plate 9.

(Embodiment 9) In FIG. 10, the dirt on the suction pad 2 is removed by a rotating body 13 having one or a plurality of brushes 12.

(Embodiment 10) In FIG. 11, in place of the brush 12 attached to the rotating body 13 in Embodiment 9, the brush pad 14 which rotates is used to remove dirt from the suction pad 2.

(Embodiment 11) FIG. 12 shows Embodiments 9 to 10 in which a compressed flow is ejected from the rotating body 13 or the brush support 14 having a brush so that the effect of the compressed air flow 7 is also synergized and the adsorption pad 2 is soiled. To remove.

[0018]

By providing the mechanism for automatically removing the dirt on the suction pad, not only the conventional tester does not have to be regularly stopped and cleaned, but the suction pad always operates normally. As a result, the operating rate and reliability of the testing machine have improved.

[Brief description of drawings]

FIG. 1 shows a conventional method for removing dirt from a suction pad.

FIG. 2 is a method according to the present invention, in which a suction pad is moved and pressed against a rubber cleaner to remove dirt.

FIG. 3 is a method according to the present invention, in which a rubber cleaner is moved and pressed against an adsorption pad to remove dirt.

FIG. 4 is a method according to the present invention, which shows a method of removing dirt from the suction pad by microvibrating one or both of them when the suction pad and the rubber cleaner are pressed.

FIG. 5 is a method according to the present invention, showing a method of removing dirt on the adsorption pad by a compressed air flow.

FIG. 6 is a method according to the present invention, showing a method of removing dirt on the adsorption pad surface by a strong compressed air flow.

FIG. 7 shows a structure according to the present invention, in which dirt is prevented from scattering by an air blower.

FIG. 8 is a method according to the present invention and shows a structure in which dirt scattered by an air blower is absorbed through a pressure reducing hole.

FIG. 9 is a method according to the present invention, and shows a method of removing dirt on the adsorption pad by a compressed air flow using the adsorption pad itself.

FIG. 10 is a method according to the present invention, and shows a method of removing dirt on the suction pad with a brush attached to the rotating body.

FIG. 11 is a method according to the present invention, and shows a method of removing dirt on the suction pad by a brush that rotates.

FIG. 12 is a method according to the present invention, which shows a method for removing stains on an adsorption pad by a synergistic effect of a brush and an air blower.

[Explanation of symbols]

 1 adsorption pad support 2 adsorption pad 3 gauze 4 fingers 5 rubber cleaner 6 rubber cleaner support 7 compressed air flow 8 air blower tube 9 plate 10 cylinder 11 pressure reducing hole cylinder 12 brush 13 rotor 14 Brush props

Claims (11)

[Claims] 1. In a semiconductor testing apparatus, in a suction pad for transporting a device under test using a suction pad (2), by pressing the suction pad (2) against a rubber cleaner (5) a plurality of times, A suction pad with automatic cleaning that cleans the suction pad (2). 2. The construction means according to claim 1, wherein the suction pad (2) is moved for cleaning, and the rubber is moved.
An adsorption pad with automatic cleaning that cleans by moving the rubber cleaner (5) and pressing it against the adsorption pad (2) instead of pressing it against the cleaner (5). 3. Adsorption with automatic cleaning, characterized in that, in addition to the constitutional means according to claims 1 and 2, the adsorption pad (2) or the rubber cleaner (5) is slightly vibrated when being pressed. Pat. 4. The suction pad with automatic cleaning according to claim 1, wherein the dirt of the suction pad (2) is blown away by a compressed air stream (7) instead of the rubber cleaner (5). 5. The component according to claim 4, wherein the nozzle tip of the air blower is provided with a plate (9), and a minute gap is provided between the suction pad (2) and the plate (9). A suction pad with automatic cleaning, which blows off dirt on the suction pad (2) with a strong air flow. 6. The structure according to claim 4, wherein the cover-shaped cylinder (1) does not scatter the scattered dirt to the surroundings.
A suction pad with automatic cleaning characterized by having 0). 7. The suction pad with automatic cleaning according to claim 6, wherein the cover is provided with a decompression hole at its tip to always absorb dirt. 8. The constituent means according to claim 4, wherein instead of newly preparing the air blow pipe (8), the adsorption pad itself is used, and a compressed flow is supplied from the adsorption pad (2) itself during cleaning. An adsorption pad with automatic cleaning, which is characterized in that it is blown out and cleaned by an air flow ejected from a gap with a plate (9) arranged at the tip of the adsorption pad with a minute gap. 9. The suction pad with automatic cleaning according to claim 1, wherein cleaning is performed by a rotating body (13) having a brush (12) at a tip thereof, instead of the rubber cleaner. . 10. The suction pad with automatic cleaning according to claim 8, wherein the tip of the brush (12) itself rotates or is accompanied by microvibration. 11. In addition to the constituent means according to claims 9 and 10, the jet airflow is emitted from the brush (12) itself.
A suction pad with automatic cleaning that is synergistic with the air blow effect of.