JPH08271786A - Zoom type optical microscope - Google Patents

Abstract

PURPOSE: To provide a zoom type optical microscope capable of ensuring all the magnifications in a continuously variable range. CONSTITUTION: This zoom type optical microscope is provided with a zoom lens group 38 including movable lens groups 42, 43 and 44 which are moved in the optical axis direction at zooming, where a length measuring unit 72 is arranged over the moving range of the movable lens group 42 whose amount of displacement is in linear relation ship with the magnification, is determined by performing the processing of a signal from the length measuring unit 72 the moved position of the movable lens group 42, and the current magnification for observation is displayed by based on the positional data and objective lens data obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a zoom type optical microscope having a zoom lens group including a movable lens group that moves during zooming.

[0002]

2. Description of the Related Art Conventionally, various zooming methods are known in zoom optical microscopes. Above all,
It is generally known that a part of the zoom lens group is moved along the optical axis to continuously change the focal length to perform zooming.

[0003]

In the above-mentioned zooming method, when focusing on the magnification accuracy, even if the initial magnification and the terminal magnification of zooming can be guaranteed by adjustment or the like, the intermediate magnification therebetween cannot be guaranteed. That is, for the intermediate magnification, the driving source of the zoom optical microscope, for example, the scale engraved on the knob is read, and the magnification is determined from the read value.
Alternatively, a method is conceivable in which the variable resistance is made to follow zooming and the magnification is determined from the resistance value, but none of these methods has a large error and cannot guarantee the optical magnification.

An object of the present invention is to provide a zoom type optical microscope capable of solving such a conventional problem and guaranteeing all magnifications within a continuously variable range.

[0005]

A zoom optical microscope according to the present invention is a zoom optical microscope having a zoom lens group including a movable lens group that moves during zooming, and a position for detecting the moving position of the movable lens group. It is characterized in that a detector is provided.

Further, the zoom optical microscope of the present invention is a zoom optical microscope having a zoom lens group including a movable lens group that moves during zooming, and a position detector for detecting the moving position of the movable lens group, It is characterized in that a magnification calculating means for obtaining an observation magnification based on the position data detected by the position detector and a magnification displaying means for displaying the observation magnification obtained by the magnification calculating means are provided.

Further, the zoom optical microscope of the present invention comprises a zoom lens group including a movable lens group that moves during zooming, and the movable lens group is moved by a moving mechanism having a drive source. In (1), a position detector that detects the moving position of the movable lens group, and a preset magnification that sets the observation magnification based on the position data detected by the position detector while driving the drive source based on a magnification setting command. And a control means for stopping the driving of the drive source when the above condition is met.

[0008]

In the zoom type optical microscope of the present invention, since the position detector for detecting the moving position of the movable lens group is provided,
When the movable lens group moves during zooming, the moving position of the movable lens group is detected by the position detector. Therefore, all the observation magnifications within the continuously variable range can be accurately obtained based on the position data of the movable lens group, the light amount of the illumination system is changed, or the movable lens group has a driving source. In the case of a structure in which it is moved by a moving mechanism, the desired magnification can be automatically set.

Further, a position detector for detecting the moving position of the movable lens group, a magnification calculating means for obtaining an observation magnification based on the position data detected by the position detector, and an observation obtained by the magnification calculating means In a zoom optical microscope equipped with a magnification display means for displaying the magnification, when the movable lens group moves during zooming, the moving position of the movable lens group is detected by a position detector, and then the position data is calculated by the magnification calculation means. The observation magnification is obtained based on the result, and the result is displayed on the magnification display means. Therefore, the current observation magnification can be accurately displayed.

Further, in a zoom type optical microscope in which the movable lens group is moved by a moving mechanism having a drive source, a position detector for detecting the moving position of the movable lens group and the drive source based on a magnification setting command are used. In a zoom optical microscope equipped with a control unit that drives and stops the drive of the drive source when the observation magnification based on the position data detected by the position detector matches a preset magnification set in advance, After setting, when a magnification setting command is given, the drive source is driven. As a result, when the movable lens group moves, the moving position of the movable lens group is detected by the position detector. Eventually, when the observation magnification based on the position data detected by the position detector matches the desired magnification (preset preset magnification), driving of the drive source is stopped. Therefore, the desired magnification can be automatically set.

[0011]

An embodiment of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a side view showing a zoom optical microscope of this embodiment. In FIG. 1, a microscope main body 3 is provided on a base 1 via a movable base 2 so as to be vertically movable by rotating a knob 4. The microscope body 3 is provided with an illumination optical system 11, a processing optical system 21, and an observation optical system 31. In addition, 5 is a mounting table on which an object to be measured is mounted.

The illumination optical system 11 irradiates the inspection object placed on the stage 5 with light through the objective lens 6 arranged on the basic optical axis P _1. Axis P
An optical fiber 12 that is to face the top _1, and is configured from the connected light source to the other end of the optical fiber 12 (not shown). The processing optical system 21 makes the processing laser beam incident from different directions with respect to the basic optical axis P ₁ and irradiates the inspection object through the objective lens 6. The laser oscillator 22 and the mirrors 23, 24, 25,
Beam splitter 26 arranged on the basic optical axis P ₁
It consists of and.

The observation optical system 31 includes the basic optical axis P ₁
A beam splitter 32 arranged above, a mirror 33 for reflecting _one light split by this beam splitter 32 along an optical axis P ₄ parallel to the basic optical axis P ₁ , and an optical axis P
₄ a television camera 34 which constitutes the placed indirect observation optical system on the insert with respect to the optical axis P ₄ in front of the television camera 34, a mirror 35 provided so as to be retracted, is reflected by the mirror 35 a mirror 36 for reflecting the observation optical axis P ₅ direct light was, an eyepiece lens 37 arranged on the observation optical axis P ₅ directly, disposed on an optical axis P ₄ between the mirrors 33 and 35 It is composed of a zoom lens group 38.

As shown in FIG. 2, the zoom lens group 38 includes a fixed lens group 41 and three movable lens groups 42, 42 and 44 which move in the optical axis P ₄ direction during zooming. There is. The fixed lens 41 and the first movable lens group 42 are housed in the first inner cylinder 52, and the second and third movable lens groups 43 and 44 are housed in the second inner cylinder 54, respectively. The first inner cylinder 52 is formed with a slit 52A that guides the protrusion 42A provided on the first movable lens group 42 slidably in the axial direction, and a spiral groove that engages with the protrusion 42A on the outside. A first outer cylinder 53 having 53A is rotatably fitted. The second inner cylinder 54 has a projection 43 provided on the second and third movable lens groups 43 and 44.
Along with two slits 54A and 54B for guiding A and 44A slidably in the axial direction, respectively,
A second outer cylinder 55 having two spiral grooves 55A and 55B engaging with the protrusions 43A and 44A is rotatably fitted on the outer side.

The first outer cylinder 53 and the second outer cylinder 55 are
It is rotated by the drive device 56. The drive device 56 includes a drive motor 57, gears 59 and 60 fixed to a drive shaft 58 of the drive motor 57, and a gear 61 meshed with the gears 59 and 60 and fixed to the outer cylinders 53 and 55. , 6
2 and. Therefore, when the drive motor 57 rotates, the first and second outer cylinders 53, 55 rotate via the gears 59, 60, 61, 62, and thereby engage with the spiral groove 53A of the first outer cylinder 53. First movable lens group 4
2 upward in FIG. 2, the spiral grooves 55A, 55 of the second outer cylinder 55.
By moving the second and third movable lens groups 43 and 44 engaged with B downward in FIG. 2, the magnification is continuously changed (continuously changed from 1 to 10 times). Has become. Here, the first and second inner cylinders 52, 54, the first, second
The moving mechanism 51 is configured by the second outer cylinders 53 and 55 and the drive device 56.

Of these movable lens groups 42, 43 and 44, the movable lens group in which the magnification and the movement amount have a linear relationship, here, the first movable lens group 42 is moved along the moving range of the first movable lens group 42. A length measuring unit 72 for detecting the moving position of the lens group 42 is provided. The length measuring unit 72 is provided with a main scale 73 provided along the moving range of the first movable lens group 42, and an index scale provided opposite to the main scale 73 and provided on the protrusion 42A of the first movable lens group 42. 74 and both scales 73 and 7
4 is irradiated with light and a detector (not shown) that receives the transmitted light (or reflected light) thereof is included.

The output signal from the length measuring unit 72 is
It is processed by the signal processing circuit 75 shown in FIG. 3 and output as position data of the first movable lens group 42. Here, the length measuring unit 72 and the signal processing circuit 75 constitute a position detector 71 for detecting the moving position of the first movable lens group 42. The output from the position detector 71 is given to the controller 80.

The control device 80 includes a magnification converter 81 as magnification calculation means and a magnification display 8 as magnification display means.
2, an interface circuit 83, a motor controller 84 as control means, a motor driver 85, and an operation panel 86. The magnification converter 81 calculates the current observation magnification from the position data from the position detector 71 and the objective lens data from the operation panel 86, displays the result on the magnification display 82, and through the interface circuit 83. Output to the outside. Further, the motor controller 84 drives the drive motor 57 via the motor driver 85 based on the drive command from the operation panel 86, and when a magnification setting command is given through the operation panel 86 or the interface circuit 83,
After driving the drive motor 57, the observation magnification based on the position data from the position detector 71 is input in advance (operation panel 86
Drive motor 5 when it matches the set magnification input from
7 is stopped.

Next, the operation of this embodiment will be described. First,
After placing the inspection object on the stage 5, the illumination optical system 1
The inspection object is irradiated with light through the first optical fiber 12. Here, the drive motor 57 is operated by operating the operation panel 86 while observing with the television camera 34 or the eyepiece lens 37.
Drive. Then, the first and second outer cylinders 53, 55
Is rotated. Thereby, the spiral groove 5 of the first outer cylinder 53
The first movable lens group 42 engaged with 3A moves upward in FIG.
Since the second and third movable lens groups 43 and 44 engaged with the spiral grooves 55A and 55B of the second outer cylinder 55 are moved downward in FIG. 2, the magnification is continuously changed. At this time, the moving position of the first movable lens group 42 is changed to the position detector 71.
Then, in the magnification converter 81, the observation magnification is calculated from the position data and the objective lens data.
The result is displayed on the magnification display 82.

Here, when a defective portion is found in the inspection object, the defective portion is positioned at the center of the visual field, and then the laser oscillator 22 is excited. Then, the processing laser beam is applied to the inspection object through the mirrors 23, 24, 25 and the beam splitter 26. As a result, the defective portion is removed. At this time, the TV camera 3
In step 4, the removal status of the inspection object can be visually confirmed. While the processing laser beam is irradiating the inspection object, the direct observation optical axis P ₅ is blocked by a shutter device (not shown), so that it cannot be confirmed through the eyepiece lens 37. That is, the observer is safe.

When a desired magnification is set on the operation panel 86 and a magnification setting command is given, the motor controller 84 drives the drive motor 57 through the motor driver 85. Then, the moving position of the movable lens group 42 is detected by the position detector 71 and then given to the motor controller 84. Motor controller 84
Determines the observation magnification from the position data, and stops the drive of the drive motor 57 when the magnification matches the desired magnification. Therefore, the desired magnification can be automatically set.

According to this embodiment, the movable lens groups 42, 4
In a zoom type optical microscope equipped with a zoom lens group 38 including 3, 44, a position detector 71 for detecting the moving position of the first movable lens group 42 and an observation magnification based on an output from the position detector 71. Since the magnification converter 81 to be obtained and the magnification display 82 for displaying the observation magnification obtained by the magnification converter 81 are provided, the observation magnification at the present time can be accurately displayed. Therefore, it is possible to guarantee all the magnifications within the continuously variable range.

When the movable lens group 42, 43, 44 is moved by the moving mechanism 51 having the drive motor 57 and the observation magnification based on the position data from the position detector 71 matches the preset desired magnification. Since the motor controller 84 for stopping the drive motor 57 of the moving mechanism 51 is provided in the above, if the desired magnification is set in advance, the movable lens groups 42, 4 can be driven by driving the moving mechanism 51.
Since the driving of the moving mechanism 51 is stopped when the observation magnifications of the zoom lens group 38 reach the desired magnification by moving the zoom lenses 3 and 44, the desired magnification can be automatically set.

Further, among the movable lens groups 42, 43 and 44, the moving position of the first movable lens group 42 in which the magnification and the moving amount have a linear relationship is detected, and therefore the observation magnification is obtained from the position data. Can be easily obtained.

Although the present invention has been described above with reference to the preferred embodiments, the present invention is not limited to these embodiments, and modifications can be made without departing from the gist of the present invention. For example, as the position detector 71, in addition to the photoelectric length measuring unit 72 described in the above embodiment, particularly for an optical head mounted on an image processing type measuring instrument, which requires high precision (high resolution) Is preferably a holoscale. Further, in the above embodiment, the position detector 71 detects the moving position of the first movable lens group 42, but it detects the moving position of the other second or third movable lens group 43, 44. May be. Further, in the above-described embodiment, the moving position of the first movable lens group 42 is detected by the position detector 71, and the illumination optical system is detected according to the position data detected by the position detector 71, that is, according to the observation magnification. It is also possible to automatically adjust the light amount of 11.

[0026]

As described above, according to the zoom type optical microscope of the present invention, since the position detector for detecting the moving position of the movable lens group that moves during zooming is provided, the position data of the movable lens group can be used continuously. All magnifications within the variable range can be guaranteed. Therefore, the observation magnification is obtained based on the position data of the movable lens group, or the light amount of the illumination system is changed, and in the case of a structure in which the moving lens is moved by a moving mechanism having a driving source, the desired magnification is obtained. Can be set automatically.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a diagram showing a zoom lens group, a moving mechanism, and a length measuring unit in the same example.

FIG. 3 is a block diagram showing a circuit configuration in the embodiment.

[Explanation of symbols]

 38 Zoom Lens Group 42, 43, 44 Movable Lens Group 51 Moving Mechanism 57 Drive Motor (Drive Source) 71 Position Detector 81 Magnification Converter (Magnification Calculating Means) 82 Magnification Indicator (Magnification Displaying Means) 84 Motor Controller (Control Means) )

Claims (3)

[Claims] 1. A zoom optical microscope including a zoom lens group including a movable lens group that moves during zooming, wherein a position detector that detects a moving position of the movable lens group is provided. microscope. 2. A zoom optical microscope equipped with a zoom lens group including a movable lens group that moves during zooming, and a position detector that detects a moving position of the movable lens group, and a position detected by this position detector. A zoom type optical microscope comprising: a magnification calculation means for obtaining an observation magnification based on data; and a magnification display means for displaying the observation magnification obtained by the magnification calculation means. 3. A zoom optical microscope including a zoom lens group including a movable lens group that moves during zooming, wherein the movable lens group is moved by a moving mechanism having a drive source. And a drive of the drive source when the observation source based on the position data detected by the position detector and a position detector that detects A zoom optical microscope, characterized by being provided with a control means for stopping.