JPH08269741A - Production of etching parts - Google Patents

Abstract

PURPOSE: To completely remove foreign matter and to decrease the exchange frequencies of tacky adhesive rolls by using the tacky adhesive rolls which come into contact with the surfaces of a metallic blank perpendicularly to a transporting direction and move to the outer side on at least the rear surface side at the end side parts at the time of removing the foreign matter sticking to the surfaces in the both end side parts of the metallic blank to be etched under transformation for the purpose of exposure after formation of resist films. CONSTITUTION: While the tacky adhesive rolls 2 placed in the side end parts of the metallic blank 1 are brought into contact with the surfaces of the metallic blank, the rolls are horizontally moved toward a right or left outer direction A with respect to the transporting direction. The horizontal movement of the tacky adhesive rolls 2 is executed by a step motor 2. The surface parts of the tacky adhesive rolls 2 in contact with the regions in the plate end parts are gradually changed by the movement and are brought particularly into contact with the plate ends having much foreign matter. The parts of the tacky adhesive rolls contaminated in the surfaces and degraded in tacky adhesiveness are extruded outward of the metallic blank 1. Then, the regions in the plate end parts of the metallic blank 1 under transportation are eventually and successively brought into contact with the roll parts having always the good tacky adhesiveness and the complete removal of the foreign matter is made possible.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an etched part on a metal material by a photoetching method.

[0002]

2. Description of the Related Art Conventionally, an etching component typified by a shadow mask used for a color picture tube or a lead frame for a semiconductor device is generally manufactured by a photoetching method. For example, a shadow mask used for a color picture tube or the like is manufactured by the steps shown in the following examples. That is, for example, a low carbon steel plate having a thickness of 0.13 mm is used as a shadow mask material, and both surfaces thereof are degreased, surface-treated, and washed, and then water-soluble photosensitive material composed of, for example, casein or polyvinyl alcohol and ammonium dichromate A resin is applied and dried to form a resist film. Next, the negative pattern of the small hole image is exposed on one surface of the shadow mask material and the negative pattern of the large hole image is exposed on the other surface through the exposure pattern mask. After that, a developing process for dissolving the unexposed and uncured resist film is performed with warm water.

After that, the resist film is subjected to a hardening treatment and a burning treatment, and the first stage etching is performed from both the front and back sides. The etching solution is a ferric chloride having a Baume concentration of 35 to 50, and spray etching is generally performed at a spray pressure of 1.5 to 3.5 kg / cm ² .

Then, the shadow mask material is washed with water and dried, and then a resin is applied to the small hole side to form an etching prevention layer which completely fills the small hole side concave portion formed by the preceding etching. Subsequently, a second etching step of etching the shadow mask material only from the large hole side is performed,
An opening is formed from the large hole side to the small hole. Finally, the etching preventing layer and the resist film are peeled off, washed with water and dried to obtain a flat shadow mask.

In the above-described method for producing an etched component by the photo-etching method, it is general that the etched component is continuously produced on the long strip metal material 1 supplied from the winding roll. During the manufacturing process, the long strip-shaped metal material 1 is transferred to the transport roller 4 as shown in FIG.
It is placed on top and transported.

During the manufacturing process of the etching component, it is desirable that the surface of the metal material is free of foreign matter such as metal particles and resist pieces. When a foreign material is present on the metal material for the etching component, there is a problem that the etching component is defective in shape. For example, when a foreign material adheres to the resist film after the resist film is formed on the metal material, the foreign material blocks light and creates a shadow during pattern exposure in the next step.
The resist film portion under the foreign matter becomes unexposed and uncured. Therefore, in the etching process after the developing process, the metal surface of the portion where the foreign matter adheres is exposed, so that unnecessary etching is performed, which causes a problem that the etched component has a defective shape.

However, since the metal material 1 is carried on the carrying roller 4 as described above, contact with the carrying roller 4 is unavoidable, and the foreign material is rubbed by the carrying roller 4 and the metal material 1. Can easily occur. Especially, it can be said that the plate ends (hereinafter, referred to as plate ends) of the metal material 1 on the left and right in the carrying direction are easily rubbed with the carrying roller 4. The reason may be that the belt-shaped metal material 1 being conveyed is curved and the central portion is easily lifted, and is conveyed on the conveying roller 4 in an arcuate state as shown in FIG. 2 (a). . Further, in order to prevent the contact between the central portion of the metal material 1 on which the etching component is formed and the transport roller, a trapezoidal transport roller 4'as shown in FIG. 2 (b) may be used. In this case, it can be said that the contact between the metal material 1 and the transport roller 4'is only in the plate end region.

Therefore, as shown in the example of FIG. 3, in the plate end region, metal particles generated by rubbing with the transport roller 4 and
It can be said that a lot of resist pieces and the like that are rubbed against the transport roller 4 after the resist film is peeled off from the resist film adhere as the foreign matter 6.

Conventionally, as a means for removing foreign matter on the metal material 1, a roll having an adhesive surface (hereinafter referred to as an adhesive roll 2) is provided so as to contact the metal material 1 as shown in FIG. Proposed. That is, the adhesive roll 2 is brought into contact with the metal material 1 so that the foreign matter on the metal material is adhered to the adhesive roll, thereby removing the foreign matter in the plate end region. However, in this method, as shown in FIG. 4, the foreign matter 6 adheres to the surface of the pressure-sensitive adhesive roll 2 in a region in contact with the particularly soiled plate edge region of the metal material, and the adhesiveness of the pressure-sensitive adhesive roll 2 rapidly decreases. As a result, the foreign matter in the plate edge region cannot be sufficiently removed, and the problem of the above-mentioned defective shape occurs.

Further, the adhesive roll 2 in which foreign matter is adhered in a band shape and the adhesiveness of the part is lowered is replaced with a new adhesive roll even if the other part is still adhesive. However, there is a problem in that the adhesive roll 2 having reduced adhesiveness must be frequently cleaned in some cases, which is very inefficient in replacement labor and work.

[0011]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an etching component obtained by the photoetching method has a defective shape due to a foreign substance in the plate edge region. The present invention seeks to provide a method of manufacturing a non-etched component.

[0012]

That is, the present invention has a resist film forming step of forming a resist film by applying a photosensitive resin on at least one surface of a strip-shaped metal material, and the resist film has a predetermined pattern. A pattern exposure step of exposing through the exposure mask, a developing step of developing the metal material to expose a part of the metal surface from the resist film according to a predetermined pattern, and etching the metal material to expose the metal exposed portion. In a method of manufacturing an etching component using a photo-etching method having at least a film removing step of removing a resist film after the etching step and the etching step, at least on the lower surface side of the metal material being conveyed, on the surface. The adhesive rolls having adhesiveness are contacted with the metal material in the left and right plate end regions with respect to the metal material conveying direction, respectively. The adhesive which is provided at a right angle to the metal material transport direction and which is provided with means for sequentially moving the adhesive rolls to the right or left outer direction with respect to the metal material transport direction, in contact with the metal material plate end region. The problem described above is solved by providing a method for manufacturing an etching component, which is characterized by sequentially changing the roll portion.

Description will be given below with reference to the drawings showing examples of the present invention. In FIG. 1, a metal material 1 is a long metal plate supplied from a winding roll, and degreased and surface-finished on both sides according to the manufacturing process of the shadow mask described in the above (Prior Art). After the cleaning treatment, a water-soluble photosensitive resin composed of casein or polyvinyl alcohol and ammonium dichromate is applied to both surfaces thereof, for example, by using a coating roll or the like and dried to form a resist film. Yes, it is being transported on the transport roller 4.

Next, as shown in FIG. 1 (a), adhesive rolls 2 are provided at right and left plate end regions on the left and right sides of the metallic material 1 being conveyed so as to be in contact with the metallic material 1 at right angles to the conveying direction. ing.

Here, as described in the above section (Prior Art), the present inventors have used a method using an adhesive roll 2 which has been conventionally used for removing foreign matters adhering to a metal material 1. In the above, it was noted that the reason for rapidly decreasing the adhesiveness of the adhesive roll 2 was that the adhesive roll portion in contact with the soiled plate edge region was always constant.

Therefore, the inventors of the present invention have made extensive studies to solve this problem, and sequentially move the adhesive roll 2 provided to remove the foreign matter on the metal material 1 to bring the adhesive roll into contact with the plate edge region. It is proposed that the parts be changed sequentially.

That is, in the present invention, a means for sequentially moving the adhesive roll 2 provided in the plate end region is used, and FIG.
As indicated by the arrow A, the respective adhesive rolls 2 are horizontally moved in the right or left outer direction with respect to the transport direction of the metal material 1 being transported, while keeping the contact with the metal material 1 horizontally. It is a feature.

For example, in the example of FIG. 1, the roll shaft 5 holding the adhesive roll 2 is successively moved horizontally by the step motor 3 or the like in the outer direction to the right or left with respect to the conveying direction of the metal material 1. As a result, as shown in FIG. 1B, the adhesive roll 2 held by the roll shaft 5 also moves horizontally in the outward direction of the metal material 1 while maintaining contact with the metal material 1. Although the step motor 3 is shown only on one side of the metal material 1 in the example of FIG. 1, it has a similar structure on both sides.

By sequentially moving the pressure-sensitive adhesive roll 2 to the right or left outer direction with respect to the transport direction of the metal material 1, the surface portion of the pressure-sensitive adhesive roll 2 in contact with the plate end region is also changed sequentially. Here, the part of the adhesive roll that comes into contact with the plate edge part that is particularly soiled with a foreign substance and the surface is soiled and has reduced adhesiveness is
The metal material 1 is successively extruded to the outside. Next, the plate edge region is successively brought into contact with the central portion of the metal material 1 which is in contact with the portion with less foreign matter attached, which is a clean portion with less foreign matter attached to the adhesive roll, that is, a portion having adhesiveness. As a result, at the plate edge of the metal material 1 being conveyed,
The parts of the adhesive roll having adhesiveness are always in contact with each other, and the foreign matter on the plate end is removed by the adhesive roll.

After that, the metal material 1 from which the foreign matter on the edge of the plate has been removed is subjected to a conventional pattern exposure process, and then,
A shadow mask is obtained by performing a process such as a developing process and an etching process.

In the above description, the location where the adhesive roll is provided is after the resist film forming step and before the exposure step, but this is because when foreign matter adheres to the resist film before the exposure step (the conventional technique). This is because, as described in the section (4), unnecessary etching is performed because the metal surface of the portion to which the foreign matter adheres is exposed in the etching step, which causes the etching component to easily have a defective shape. However, the location where the adhesive roll according to the present invention is provided is not limited to this, and it can be said that the above-mentioned adhesive roll may be provided in another manufacturing process.

The form of the foreign matter removing means in the plate end region used in the present invention is not necessarily limited to the form shown in FIG. For example, in FIG. 1, the pair of adhesive rolls 2 are provided in the left and right plate end regions so as to sandwich the plate end region, but the adhesive roll 2 is configured such that the transport roller 4 and the metal material 1 come into contact with each other, for example, metal. It can be said that it may be provided only on the lower surface side of the material 1.

[0023]

In the method of manufacturing an etched part according to the present invention,
By sequentially moving the pressure-sensitive adhesive roll provided in the plate end region of the metal material in the outer direction to the right or left with respect to the transport direction of the metal material, the surface portion of the pressure-sensitive adhesive roll in contact with the plate end region is sequentially changed. . As a result, the part of the adhesive roll that is particularly in contact with the plate edge part that is soiled with foreign matter and whose surface is soiled and whose adhesiveness is reduced is extruded to the outside of the metal material one after another, and then in the plate edge area, the central part of the metal material is placed. A clean portion with little foreign matter attached, that is, a portion having adhesiveness, which was in contact with the area with little foreign matter attached, comes into contact with the adhesive roll. As a result, the plate end of the metal material being conveyed can always come into contact with the part of the adhesive roll having adhesiveness, and the foreign matter on the plate end is efficiently removed by the adhesive roll.

[0024]

EXAMPLES Examples in which the present invention is used for manufacturing a shadow mask will be described below. <Example> As the metal material 1, that is, the shadow mask material, a long metal sheet having a width of 60 cm supplied from a winding roll, and a low expansion iron-nickel alloy material having a plate thickness of 0.13 mm is used. I was there.

Next, after degreasing and surface-treating the shadow mask material, a water-soluble photosensitive resin composed of polyvinyl alcohol and ammonium dichromate is applied on the surface of the shadow mask material by a roll coating method and dried to form a resist. A film was formed.

Then, as shown in FIG.
A pair of adhesive rolls are provided at right angles to the conveying direction so that the shadow mask material is sandwiched in each of the left and right plate end regions with respect to the conveying direction of the shadow mask material being conveyed and the shadow mask material is in contact with the shadow mask material. As the adhesive roll, a urethane roller having a self-adhesive property and a length of 80 mm was used.

Here, each of the adhesive rolls provided in the plate edge region is kept in contact with the shadow mask material, and the step motor 3 is used to move the metal material 1 in the conveying direction as shown in FIG. 1 (b). It is moved to the right or left outward direction at a speed of 0.3 mm / min.

Next, the shadow mask material from which the foreign matter on the edge of the plate is removed by the above-described method is described above (prior art).
A flat type shadow mask used for a color picture tube or the like was obtained by performing a pattern exposure step, followed by a development step, an etching step and the like according to the steps described in the above section.

Next, in the shadow masks obtained in the above-mentioned examples, the presence or absence of shape defects due to the adhesion of foreign matter to the resist film before the pattern exposure step was examined, but no abnormality was observed. Further, in the above example, the adhesive roll was replaced when the adhesive roll remained about 35 mm in the end region of the shadow mask material, and the adhesive roll was replaced with a new one in a cycle of 2.5 hours. In the conventional method, the replacement cycle of the adhesive roll was about 25 minutes, and at that time, the portion of the adhesive roll in contact with the end region of the shadow mask material lost the adhesive force.

[0030]

According to the method of manufacturing an etched part according to the present invention, the plate edge of the metal material is sequentially moved in the outer direction to the right or left with respect to the conveying direction of the metal material by successively moving the adhesive roll to the plate edge. The surface portion of the adhesive roll that is in contact with the partial area is sequentially changed. As a result, the part of the adhesive roll that is particularly in contact with the plate edge part that is soiled with foreign matter and whose surface is soiled and whose adhesiveness is reduced is extruded to the outside of the metal material one after another, and then in the plate edge area, the central part of the metal material is placed. The region is in contact with a region having a small amount of adhered foreign matter, and is successively in contact with a clean region having a small amount of adhered foreign substances on the adhesive roll, that is, a region having adhesiveness. With this, the plate end region of the metal material being conveyed can always contact the region of the adhesive roll having adhesiveness, and the foreign matter in the plate end region is efficiently removed by the adhesive roll.

Therefore, the problems that have occurred in the conventional method,
That is, the adhesiveness of the adhesive roll is reduced, and the foreign matter that has not been removed from the plate edge area is peeled off from the metal material due to vibration during transportation, etc. The problem of causing defects can be prevented.

Further, in the conventional method, the tackiness of the portion where the foreign matter is adhered in a strip shape is lowered, but even if the sticky roll is still sticky at other portions, it is frequently replaced with a new sticky roll. Although it had to be replaced, in the present invention it is possible to use almost the entire area of the adhesive roll as a foreign matter removal area, so the usable time of the adhesive roll is increased,
It can be said that the present invention is practically excellent in obtaining a high-quality etched component, since it can be said that the time and effort for exchanging the adhesive roll can be reduced.

[0033]

[Brief description of drawings]

1A and 1B are perspective explanatory views showing a main part of an embodiment of a method for manufacturing an etched component according to the present invention.

2A and 2B are cross-sectional explanatory views showing an example of a metal material conveyed on a conveyance roller.

FIG. 3 is an explanatory plan view showing an example of adhesion of foreign matter to a metal material.

FIG. 4 is a perspective explanatory view showing a main part of an example of a conventional method of manufacturing an etched component.

[Explanation of symbols] 1 Metal material 2 Adhesive roll 3 Step motor 4 Transport roller 5 Roll shaft 6 Foreign matter

Claims (2)

[Claims] 1. A resist film forming step of forming a resist film by applying a photosensitive resin on at least one surface of a strip-shaped metal material, and a pattern for performing exposure through an exposure mask having a predetermined pattern on the resist film. An exposure step, a developing step of developing the metal material to expose a part of a metal surface from a resist film according to a predetermined pattern, a step of etching the metal material to etch a metal exposed portion, and a resist after the etching step In a method for producing an etching component using a photoetching method having at least a film-peeling step of peeling a film, a pressure-sensitive adhesive roll having surface tackiness is provided on at least a lower surface side of a metal material being conveyed, Provided at right and left sides of the plate in the material conveying direction at right angles to the metal material conveying direction so as to be in contact with the metal material. And a means for sequentially moving each of the pressure-sensitive adhesive rolls in an outer direction to the right or left with respect to the metal material transport direction, and sequentially changing the portion of the pressure-sensitive adhesive roll that is in contact with the metal material plate end region. Method for manufacturing etched parts. 2. The method for producing an etched component according to claim 1, wherein during the process for producing the etched component, the location where the adhesive roll is provided is after the resist film forming step and before the exposure step.