JPH08267765A - Manufacture of ink jet recording head - Google Patents

Abstract

PURPOSE: To bond accurately a piezoelectric element right above a pressurizing chamber to increase and uniformize the ink feed speed from a nozzle of a recording head. CONSTITUTION: A base 1 having an ink passage provided with an ink pressurizing chamber 4, an ink nozzle 2 and the like is bonded with a vibration plate 6, and a piezoelectric plate forming a plurality of piezoelectric elements 7 by cutting is applied temporarily on the given position of a jig through an adhesive tape not expandable nor shrinkable against cutting force, cut into the dimension set for the pressurizing chamber 4, and bonded just as it is on the vibration plate 6 on the jig for the vibration plate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a method for manufacturing an ink jet recording head, in which a plurality of piezoelectric elements are adhered to the position of a diaphragm corresponding to a pressure chamber.

[0002]

2. Description of the Related Art An ink jet recording head according to the present invention has a simple structure and has few failures and is widely used in printers, facsimiles and the like, and further development is expected in the future. This recording head has a piezoelectric element with electrode layers formed on the front and back sides at a position corresponding to the pressure chamber of a vibration plate that is joined by providing an ink flow path including a pressure chamber on a metal / glass / silicon substrate. The structure is adhered, and when a voltage is applied to the piezoelectric element, the piezoelectric element is deformed to the pressure chamber side and one drop of ink can be ejected from the nozzle. This piezoelectric element is made by dicing a thin piezoelectric plate
By cutting called (dicing), rectangular parts having a side of 5 mm or less corresponding to the pressurizing chamber were formed, and the positions of the parts were adjusted and bonded one by one on the diaphragm.

This recording head usually has a temperature of 5 to 35.
Since the normal printing function and the durability of 2 billion times are required at a temperature of 5 to 85% RH at a temperature of 850 ° C., the piezoelectric element needs to be well bonded to an optimum position with respect to the pressure chamber.

[0004]

A thermosetting epoxy resin, which is a liquid, is often used as the adhesive between the piezoelectric element and the diaphragm described in the prior art, and a large number of piezoelectric elements must be positioned by hand. There is a limit, and the piezoelectric element on the liquid may be displaced and adhered during the heat curing step. An object of the present invention is to provide a method of manufacturing an ink jet recording head in which a piezoelectric element is adhered at an accurate position with respect to a pressure chamber.

[0005]

SUMMARY OF THE INVENTION According to the present invention, a vibrating plate and a piezoelectric element are bonded to a substrate having a pressure chamber and a nozzle, and ink is ejected from the nozzle by deformation of the piezoelectric element into the pressure chamber. In the manufacturing method using the jigs for the piezoelectric plate and the vibration plate, the piezoelectric element is formed by temporarily attaching the piezoelectric plate to a position determined by the jig for the piezoelectric plate via an adhesive tape that does not expand or contract against the force. A plate is cut corresponding to a plurality of pressurizing chambers, and a plurality of small piezoelectric plates are cured with an adhesive to the diaphragm at a predetermined position of the diaphragm jig that is guided with the piezoelectric plate jig. It is a plate-making method.

Further, according to the present invention, a vibrating plate and a piezoelectric element are adhered to a substrate having a pressure chamber and a nozzle, and the ink is ejected from the nozzle by the deformation of the piezoelectric element into the pressure chamber. In the manufacturing method using the jig for the vibration plate and the piezoelectric element, the piezoelectric element is temporarily attached to the position corresponding to the pressure chamber of the jig for the piezoelectric element by the chip mounting machine via the adhesive tape. This is a manufacturing method in which a diaphragm located at a predetermined position of a diaphragm jig guided by each other is cured via an adhesive.

[0007]

According to the present invention, the piezoelectric plate can be fixed to the jig for the piezoelectric plate by utilizing the adhesive force of the adhesive tape (so-called dicing tape), and the position of the jig for the piezoelectric plate is used as a reference. The piezoelectric element can be formed without shifting to the position of the pressure chamber by cutting the non-stretchable adhesive tape against the force by cutting with a precision cutting machine with a sharp blade with low cutting resistance corresponding to the pressure chamber .

Further, according to the present invention, a piezoelectric element is supported in the air by a small suction tool by a machine such as a chip mounting machine capable of accurately mounting components on a printed wiring board, and the rotation angle is corrected by image processing thereof. After the mounting direction is determined, it can be placed in a place corresponding to the pressure chamber, and the adhesive force of the adhesive tape can be used to prevent displacement. Further, the piezoelectric element and the vibration plate can be aligned with each other by the guides of the two jigs described above, and the adhesive tape can be adapted to the dimensional change due to the thermal expansion coefficient of the two jigs. Can be accurately bonded to the position of the diaphragm corresponding to.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The substrate 1 shown in FIG. 1 is the same as the conventional example, and includes an ink nozzle 2, an ink passage 3a, an ink pressurizing chamber 4, an ink diaphragm 3
b, the ink reservoir 5 is formed. The vibrating plate 6 having the ink supply hole 8 is joined to the substrate 1 to form an ink flow path, and the piezoelectric element 7 described with reference to FIG. . In FIG. 2, the electrode layer 9 is adhered to the surface of the insulating diaphragm 6a,
The piezoelectric element 7 described with reference to FIG. 3 is adhered via a conductive adhesive 10.

The jig 11 for the piezoelectric plate shown in FIG.
11a and 11b are provided, and a piezoelectric plate 13 having a thickness of 100 μm is temporarily attached to a predetermined position of the non-stretchable adhesive tape 12. Next, the piezoelectric plate 13 is cut from the positional relationship of the jig 11 by a precision cutting machine (not shown) so as not to cut the adhesive tape 12 so as to correspond to the pressure chamber of the recording head, to form the piezoelectric element 7 in (b). Then, the adhesive 10 is applied on the vibration plate 6 joined to the substrate 1 to the jig 15 for positioning the vibration plate having the shaft 15a that fits the guide 11a and the guide 11b and the shaft 15b (not shown), and then the piezoelectric element 7 is applied. The jig 11 provided with the jig is fitted to the jig 15, and pressure and heat are applied to cure the adhesive 10. Then, the adhesive tape 12 is peeled off to complete the recording head.

In the method of manufacturing the recording head according to the second aspect of the present invention, the machine described in the operation is used to position the piezoelectric element 7 on the adhesive tape 12 as shown in FIG. To do.

[0012]

According to the present invention, the piezoelectric element can be bonded to the pressurizing chamber so as to be aligned by cutting or accurately mounting the piezoelectric element, so that the ink ejection speed is uniform, the non-defective rate is high, and the bonding step is performed. It is possible to provide a manufacturing method of a recording head which can be shortened and is highly economical, and an inexpensive recording head and a recording device.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view of a bonded portion of a piezoelectric element.

3A to 3C are assembly process diagrams of the piezoelectric element of the present invention, in which FIG. 3A is a sticking view of the piezoelectric plate, FIG. 3B is a plan view of the piezoelectric plate after cutting, and FIG.

[Explanation of symbols]

 1 Substrate 7 Piezoelectric Element 10 Adhesive 12 Adhesive Tape 13 Piezoelectric Plate

Claims (2)

[Claims] 1. A piezoelectric head and a vibrating plate of a recording head, wherein a vibration plate and a piezoelectric element are bonded to a substrate having a pressure chamber and a nozzle, and ink is ejected from the nozzle by deformation of the piezoelectric element into the pressure chamber. In the manufacturing method using the jig, the piezoelectric element is temporarily attached to the piezoelectric plate at a position determined by the jig for the piezoelectric plate via an adhesive tape that does not expand and contract against the force. Is a plurality of small piezoelectric plates that are cut in accordance with the above and are cured by an adhesive on the vibration plate at a predetermined position of the vibration plate jig that is guided with the piezoelectric plate jig. Inkjet recording head manufacturing method. 2. A piezoelectric head and a vibrating plate of a recording head, wherein a vibrating plate and a piezoelectric element are bonded to a substrate having a pressure chamber and a nozzle, and ink is ejected from the nozzle by deformation of the piezoelectric element into the pressure chamber. In the manufacturing method using the jig, the piezoelectric element is temporarily attached to the piezoelectric element jig at positions corresponding to a plurality of pressure chambers by the chip mounting machine via the adhesive tape, and the piezoelectric element jig is guided to each other. A method of manufacturing an ink jet recording head, characterized in that the diaphragm is cured by an adhesive on a diaphragm at a predetermined position of the diaphragm jig.