JP3291999B2 - Ink jet print head - Google Patents

Ink jet print head

Info

Publication number
JP3291999B2
JP3291999B2 JP26058795A JP26058795A JP3291999B2 JP 3291999 B2 JP3291999 B2 JP 3291999B2 JP 26058795 A JP26058795 A JP 26058795A JP 26058795 A JP26058795 A JP 26058795A JP 3291999 B2 JP3291999 B2 JP 3291999B2
Authority
JP
Japan
Prior art keywords
ink
print head
jet print
ink jet
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26058795A
Other languages
Japanese (ja)
Other versions
JPH0999557A (en
Inventor
秀明 曽根原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP26058795A priority Critical patent/JP3291999B2/en
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to US08/708,675 priority patent/US6139132A/en
Priority to EP01105378A priority patent/EP1104697B1/en
Priority to EP01105383A priority patent/EP1104698B1/en
Priority to DE69629220T priority patent/DE69629220T2/en
Priority to DE69628954T priority patent/DE69628954T2/en
Priority to DE69625296T priority patent/DE69625296T2/en
Priority to EP96114233A priority patent/EP0761447B1/en
Publication of JPH0999557A publication Critical patent/JPH0999557A/en
Priority to US09/556,587 priority patent/US6460981B1/en
Priority to US09/576,174 priority patent/US6729002B1/en
Priority to US10/102,656 priority patent/US6561633B2/en
Application granted granted Critical
Publication of JP3291999B2 publication Critical patent/JP3291999B2/en
Priority to US10/425,868 priority patent/US7028377B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14419Manifold

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、インクジェットプ
リンタに用いる印字ヘッドの構造に関する。
[0001] 1. Field of the Invention [0002] The present invention relates to the structure of a print head used in an ink jet printer.

【0002】[0002]

【従来の技術】従来のインクジェット式印字ヘッドは、
日本特許公報、特公昭60−8953号公報に示された
ように、インクタンクを構成する容器の壁面に複数のノ
ズル開口を形成すると共に、各ノズル開口と対向するよ
うに伸縮方向を一致させて圧電素子を配設して構成され
ている。この印字ヘッドは、駆動信号を圧電素子に印加
して圧電素子を伸縮させ、この時に発生するインクの動
圧によりインク滴をノズル開口から吐出させて印刷用紙
にドットを形成するものである。
2. Description of the Related Art A conventional ink jet print head is:
As shown in Japanese Patent Publication No. 60-8953, Japanese Patent Publication No. 60-8953, a plurality of nozzle openings are formed on the wall of a container constituting an ink tank, and the directions of expansion and contraction are matched so as to face each nozzle opening. It is configured by disposing a piezoelectric element. In this print head, a drive signal is applied to a piezoelectric element to expand and contract the piezoelectric element, and ink droplets are ejected from nozzle openings by dynamic pressure of ink generated at this time to form dots on printing paper.

【0003】このような形式の印字ヘッドに於いては、
液滴の形成効率や飛翔力が大きいことが望ましい。しか
しながら、圧電素子の単位長さ、及び単位電圧当りの伸
縮率は極めて小さいため、印字に要求される飛翔力を得
るには高い電圧を印加することが必要となり、駆動回路
や電気絶縁対策が複雑化するという問題がある。
[0003] In a print head of this type,
It is desirable that the droplet formation efficiency and the flying force be large. However, since the piezoelectric element has a very small unit length and expansion / contraction ratio per unit voltage, it is necessary to apply a high voltage to obtain the flying force required for printing, which complicates the drive circuit and measures for electrical insulation. There is a problem of becoming.

【0004】このような問題を解決するため、日本特許
公報特開昭63−295269号公報に示されているよ
うに、電極と圧電材料とを交互にサンドイッチ状に積層
したインクジェット式印字ヘッド用の圧電素子が提案さ
れている。この圧電素子によれば電極間距離を可及的に
小さくすることが出来るため、駆動信号の電圧を下げる
ことが出来るという効果がある。特開平4−1052号
公報には上記の積層型圧電素子を基台に固定した後にノ
ズル列ピッチに対応するように圧電素子を加工し、この
圧電素子列を振動板に固着したインクジェット式印字ヘ
ッドが詳細に記されている。
In order to solve such a problem, as disclosed in Japanese Patent Application Laid-Open No. 63-295269, an electrode and a piezoelectric material are alternately laminated in a sandwich form for an ink jet print head. Piezoelectric elements have been proposed. According to this piezoelectric element, the distance between the electrodes can be reduced as much as possible, so that the voltage of the drive signal can be reduced. Japanese Patent Application Laid-Open No. 4-1052 discloses an ink jet print head in which the above-mentioned laminated piezoelectric element is fixed to a base, then the piezoelectric element is processed so as to correspond to the nozzle row pitch, and this piezoelectric element row is fixed to a diaphragm. Is described in detail.

【0005】又、近年PCのカラー化、環境保護による
再生紙の台頭等に伴い、プリンタにも悪い紙質への高印
字品質が要求されてきている。
[0005] In recent years, along with the use of color PCs and the rise of recycled paper due to environmental protection, printers have also been required to have high print quality on poor paper quality.

【0006】この要求に応えるべく、インクジェット式
プリンタでは、にじみの少ないインクの開発や、プラテ
ン近傍にヒーターを取り付けてインクの乾燥速度を早く
する等の対策を施してきた。しかしながらこのことは、
インクジェット式印字ヘッドの構成部品の耐インク性の
確保や、線膨張係数の違いによる熱応力の発生の回避
等、構成部品の選択の自由度や製造条件の自由度を制限
する結果となっている。特開平7−164634号、特
開平7−164636号では、熱による構成部品間の線
膨張係数の違いによる応力を緩和させる構造が開示され
ている。
In order to respond to this demand, ink jet printers have taken measures such as developing ink with less bleeding and installing a heater near the platen to increase the drying speed of the ink. However, this
As a result, the degree of freedom in selecting component parts and manufacturing conditions is limited, such as ensuring the ink resistance of the components of the ink jet print head and avoiding the occurrence of thermal stress due to differences in linear expansion coefficients. . JP-A-7-164634 and JP-A-7-164636 disclose a structure in which a stress caused by a difference in a coefficient of linear expansion between components due to heat is relaxed.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、上記の
ヘッド構造では図7に示すようにC部での応力発生を回
避する事は出来ない。又、C部での応力発生による信頼
性の劣化は多ノズル化に伴いヘッドが大型化するにつれ
て顕在化する課題であった。
However, with the above-described head structure, it is impossible to avoid the occurrence of stress at the portion C as shown in FIG. In addition, the deterioration of reliability due to the generation of stress in the portion C has become a problem that becomes apparent as the head becomes larger with the increase in the number of nozzles.

【0008】本発明の目的は、安価で信頼性の高いイン
クジェット式印字ヘッドを提供することにある。
An object of the present invention is to provide an inexpensive and highly reliable ink jet print head.

【0009】[0009]

【課題を解決するための手段】本発明のインクジェット
式印字ヘッドは、ノズルを有するノズルプレートと、前
記ノズルに連通するインク室、該インク室にインクを供
給するインク流路、インク室とインク流路を連通するイ
ンク供給路とが形成された壁部材と、該壁部材上に積層
された前記圧力室の壁面を構成する振動板とからなるイ
ンク室構成部材と、該振動板と当接し前記ノズルからイ
ンク滴を吐出させるために前記インク室に圧力を発生さ
せる圧力発生部材と、前記インク室構成部材及び前記圧
力発生部材を支持するフレーム部材とを有するインクジ
ェット式印字ヘッドにおいて、前記インク室構成部材と
前記フレーム部材との間に板状の緩衝部材を配置したこ
とを特徴とする。また、前記緩衝部材の圧力発生部材挿
入部に孔部があることを特徴とする。さらに、前記緩衝
部材に振動板のコンプライアンスの逃げ溝があることを
特徴とする。
According to the present invention, there is provided an ink jet print head comprising: a nozzle plate having nozzles;
An ink chamber communicating with the nozzle, and supplying ink to the ink chamber.
The ink flow path to be supplied, and the ink path connecting the ink chamber and the ink flow path.
And a wall member having an ink supply path formed thereon and laminated on the wall member.
And a diaphragm constituting the wall surface of the pressure chamber thus formed.
Ink chamber member and the nozzle in contact with the diaphragm.
Pressure is generated in the ink chamber to eject ink drops.
Pressure generating member, the ink chamber constituting member and the pressure
Ink cartridge having frame member supporting force generating member
In a jet-type print head, a plate-shaped buffer member is disposed between the ink chamber constituting member and the frame member. Further, the pressure generating member is inserted into the buffer member.
There is a hole in the entrance. Further, the present invention is characterized in that the buffer member has an escape groove for compliance of the diaphragm.

【0010】また、前記緩衝部材の線膨張係数(CT
E)が、前記壁部材のCTE<前記緩衝部材のCTE<
前記フレーム部材のCTEで有ることを特徴とする。
Also, the coefficient of linear expansion (CT
E), CTE of the wall member <CTE of the buffer member <
The CTE of the frame member is characterized.

【0011】また、前記緩衝部材が金属、金属の中のス
テンレス材、樹脂である事を特徴とする。
[0011] Further, the invention is characterized in that the buffer member is a metal, a stainless steel material among metals, or a resin.

【0012】また、前記振動板に薄肉部を形成すると共
に、前記緩衝部材の前記薄肉部に対応する位置に溝を形
成したことを特徴とする。
Further, a thin portion is formed on the diaphragm, and a groove is formed at a position corresponding to the thin portion of the cushioning member.

【0013】[0013]

【発明の実施の形態】図3、図4は本発明に於けるイン
クジェット式印字ヘッドの斜視図である。
3 and 4 are perspective views of an ink jet print head according to the present invention.

【0014】図1は、本発明に於けるインクジェット式
印字ヘッドのノズル配列に直交する方向の断面図、即
ち、図3に於けるA−A断面図である。
FIG. 1 is a sectional view in a direction perpendicular to the nozzle arrangement of the ink jet print head according to the present invention, that is, a sectional view taken along the line AA in FIG.

【0015】図2は、本発明におけるインクジェット式
印字ヘッドのノズル配列方向の断面図、即ち、図3に於
けるB−B断面図である。
FIG. 2 is a sectional view of the ink jet print head of the present invention in the nozzle arrangement direction, that is, a sectional view taken along the line BB in FIG.

【0016】図1、図2、図4に於いて、インクタンク
(図示されていない)から供給されたインクは、各イン
ク室110に連通する壁部材103に形成されたインク
流路111を通り、各インク室110に対応するように
形成されたインク供給路107を通って、ノズルプレー
ト101、壁部材103、振動板104を積層して構成
されるインク室110に供給される。ここで、インク室
構成部材のノズルプレート101、壁部材103、振動
板104は緩衝部材220とフレーム204に固定され
ている。
In FIGS. 1, 2 and 4, ink supplied from an ink tank (not shown) passes through an ink flow path 111 formed in a wall member 103 communicating with each ink chamber 110. The ink is supplied to the ink chamber 110 formed by laminating the nozzle plate 101, the wall member 103, and the vibration plate 104 through an ink supply path 107 formed so as to correspond to each ink chamber 110. Here, the nozzle plate 101, the wall member 103, and the vibration plate 104 of the ink chamber constituent members are fixed to the buffer member 220 and the frame 204.

【0017】各インク室110に対応して圧力発生部材
105と、ノズル開口部102が配置されており、圧力
発生部材105はベース板201上に配置、固着され、
フレーム204に挿入され、接着剤203で固着されて
いる。ここで、圧力発生部材105は、FPC202を
介したプリンタ本体からの電気信号による伸縮運動によ
り、インク室110を加圧し、ノズル開口部102より
インクを吐出する。
A pressure generating member 105 and a nozzle opening 102 are arranged corresponding to each ink chamber 110, and the pressure generating member 105 is arranged and fixed on a base plate 201,
It is inserted into the frame 204 and fixed with the adhesive 203. Here, the pressure generating member 105 presses the ink chamber 110 by expansion and contraction by an electric signal from the printer main body via the FPC 202, and discharges ink from the nozzle opening 102.

【0018】以下に本ヘッドの製造方法を示す。The method of manufacturing the head will be described below.

【0019】図1において、ベース板201に固着され
た後にノズルピッチに対応するように加工された圧力発
生部材105にFPC202を実装した圧電素子ユニッ
ト501を作製する。
In FIG. 1, a piezoelectric element unit 501 is manufactured in which an FPC 202 is mounted on a pressure generating member 105 which is fixed to a base plate 201 and processed so as to correspond to a nozzle pitch.

【0020】一方、振動板104と壁部材103とノズ
ルプレート101を積層接着したインク室構成部材60
1を作製する。ここで、図2に示すように、振動板10
4は、インク室110に対応する位置に島状突起部20
9と、それ以外の変形しやすい振動膜部210を有す
る。振動板104の島状突起部209は、圧力発生部材
105の端面に塗布した接着剤112により固定されて
おり、圧力発生部材105の変位によるインク室110
の体積変化を効率的に行う効果がある。この様な構成の
振動板104は、金属板上(例えばSUSやNi等、t
=10〜50μm)に振動膜部210となる薄い樹脂層
(例えばPI、PPS、PE等、t=1〜10μm)を
形成し、島状突起部209を残して選択的に金属部分を
エッチングする事によって形成することができる。
On the other hand, the ink chamber constituting member 60 in which the vibration plate 104, the wall member 103, and the nozzle plate 101 are laminated and bonded.
Prepare No. 1. Here, as shown in FIG.
4 is an island-like projection 20 at a position corresponding to the ink chamber 110.
9 and other vibrating membrane portions 210 that are easily deformed. The island-shaped protrusion 209 of the vibration plate 104 is fixed by an adhesive 112 applied to an end face of the pressure generating member 105, and the ink chamber 110 is displaced by the pressure generating member 105.
Has the effect of efficiently changing the volume. The diaphragm 104 having such a configuration is formed on a metal plate (for example, t
= 10 to 50 µm), a thin resin layer (for example, PI, PPS, PE, etc., t = 1 to 10 µm) to be the vibrating film portion 210 is formed, and the metal portion is selectively etched while leaving the island-shaped protrusions 209. Can be formed by things.

【0021】壁部材103は、インクの吐出スピード、
吐出量等を決定する重要なパーツであり、カラープリン
ト化に伴う高画質の要求に応える為には、数ミクロンの
寸法精度が要求される。
The wall member 103 has an ink ejection speed,
It is an important part that determines the discharge amount and the like. To meet the demand for high image quality accompanying color printing, dimensional accuracy of several microns is required.

【0022】この要求に応えるべく本実施例では、結晶
方位(110)面を表面に持つシリコン単結晶基板の異
方性エッチング法により製作した。
In this embodiment, in order to meet this requirement, a silicon single crystal substrate having a crystal orientation (110) plane on its surface was manufactured by anisotropic etching.

【0023】シリコン単結晶基板の異方性エッチング法
は、結晶方位により決まる方向にエッチングが進行す
る。(111)結晶面は、他の結晶面に比べてエッチン
グ速度が極端に遅いため、寸法精度の必要なインク室部
分を(111)面で構成するようにすると、非常に高い
アスペクト比のインク室を高密度に、かつ、高精度に形
成できる。又、この事は、米国特許第4312008号
明細書に於いても公知である。
In the anisotropic etching method for a silicon single crystal substrate, etching proceeds in a direction determined by the crystal orientation. Since the (111) crystal plane has an extremely low etching rate as compared with the other crystal planes, if the ink chamber portion requiring dimensional accuracy is constituted by the (111) plane, the ink chamber having a very high aspect ratio is formed. Can be formed with high density and high precision. This is also known in U.S. Pat. No. 4,311,2008.

【0024】ノズルプレート101はSUS材を所望の
ピッチにプレス法で穴加工する事で作製した。
The nozzle plate 101 was manufactured by forming a hole in a SUS material at a desired pitch by a press method.

【0025】又、フレーム204は圧電素子ユニット5
01と島状突起物209を位置合わせする機能を持たせ
る為、寸法精度、平面度等の高精度が要求される。本実
施例では比較的低コストで、平面度を出す為の後加工、
即ちラップ加工等が容易な材料として液晶ポリマーの射
出成型を採用している。
The frame 204 is provided with the piezoelectric element unit 5.
In order to provide a function of aligning the island-shaped projections 209 with the island-shaped projections 209, high accuracy such as dimensional accuracy and flatness is required. In this embodiment, at relatively low cost, post-processing for obtaining flatness,
That is, injection molding of a liquid crystal polymer is employed as a material that can be easily wrapped.

【0026】従来は、この後、上記振動板104、壁部
材103、ノズルプレート101を積層接着しインク室
構成部材601を作製した後、フレーム204にインク
室構成部材601を接着と同時に圧力発生部材105上
面に接着剤112を塗布した圧電素子ユニット501挿
入し、島状突起物209と圧力発生部材105上面との
位置決め及び接合を図っていた。
Conventionally, thereafter, the vibration plate 104, the wall member 103, and the nozzle plate 101 are laminated and adhered to produce the ink chamber constituting member 601. Then, the ink chamber constituting member 601 is adhered to the frame 204 and the pressure generating member is simultaneously formed. The piezoelectric element unit 501 with the adhesive 112 applied on the upper surface of the pressure generating member 105 is inserted to position and join the island-shaped protrusion 209 and the upper surface of the pressure generating member 105.

【0027】しかしながら、従来の構造では、悪い紙質
への高速印字、高印字品質の要求に応えるべく、ヘッド
の多ノズル化や、にじみの少ないインクの開発、プラテ
ン近傍にヒーターを取り付けてインクの乾燥速度を早く
する等の対策を施してきたことで、インクジェット式印
字ヘッドの、構成部品の耐インク性の劣化や、線膨張係
数の違いによる熱応力の発生による信頼性の劣化等の課
題が顕在化してきた。
However, with the conventional structure, in order to meet the demands for high-speed printing on poor paper quality and high printing quality, the use of multiple nozzles in the head, the development of ink with less bleeding, and the installation of a heater near the platen to dry the ink Due to measures such as increasing the speed, issues such as deterioration of the ink resistance of the components of the ink jet print head and deterioration of the reliability due to the occurrence of thermal stress due to the difference in linear expansion coefficient are apparent. It has become.

【0028】特に、線膨張係数の違いによる熱応力の発
生は、接着硬化等ヘッド製造工程中でさらされる環境温
度の高温化、ヘッド使用環境の高温化等により顕在化し
てきた。
In particular, the generation of thermal stress due to the difference in the coefficient of linear expansion has become apparent due to an increase in the environmental temperature exposed during the head manufacturing process, such as adhesion hardening, and an increase in the environment in which the head is used.

【0029】特開平7−164634号、特開平7−1
64636号では、熱による構成部品間の線膨張係数の
違いによる応力を緩和させる構造が開示されている。
JP-A-7-164634, JP-A-7-1
No. 64636 discloses a structure that relieves stress caused by a difference in linear expansion coefficient between components due to heat.

【0030】しかしながら、上記のヘッド構造では図7
に示すようにC部での応力発生を回避する事は出来な
い。
However, in the above head structure, FIG.
As shown in (1), it is impossible to avoid the occurrence of stress in the portion C.

【0031】又、C部での応力発生による信頼性の劣化
は多ノズル化に伴いヘッドが大型化するにつれて顕在化
する課題であった。
Further, the deterioration of reliability due to the generation of stress in the portion C has become a problem that becomes apparent as the size of the head increases as the number of nozzles increases.

【0032】図7の構造に対して本発明のヘッドは、図
1に示すようにインク室構成部材601とフレーム20
4との間隙に、線膨張係数の違いにより発生する応力を
緩衝する緩衝部材220を設置している。
In contrast to the structure shown in FIG. 7, the head according to the present invention comprises an ink chamber forming member 601 and a frame 20 as shown in FIG.
4, a buffer member 220 for buffering a stress generated due to a difference in linear expansion coefficient is provided.

【0033】この構造によれば、インク室構成部材60
1をフレーム204上の緩衝部材220で受ける事にな
るため、図7のC部のような応力発生は少ない。
According to this structure, the ink chamber constituting member 60
7 is received by the buffer member 220 on the frame 204, so that stress generation as in the portion C in FIG. 7 is small.

【0034】ここで、緩衝部材220の材質は、緩衝部
材220の線膨張係数(以下CTE)と、ノズルプレート
101、壁部材103、振動板104で形成するインク
室構成部材601の発生応力を支配する部品、即ち、剛
性が大きく、フレーム204のCTEとの差が最も大き
な部品である壁部材103のCTEと、フレーム204
のCTEとの間に、壁部材103のCTE<緩衝部材2
20のCTE<フレーム204のCTEの関係が有る材
料として、SUS430を採用した。
Here, the material of the cushioning member 220 governs the linear expansion coefficient (hereinafter referred to as CTE) of the cushioning member 220 and the stress generated in the ink chamber constituting member 601 formed by the nozzle plate 101, the wall member 103, and the vibration plate 104. That is, the CTE of the wall member 103, which is a component having a large rigidity and the largest difference from the CTE of the frame 204, and the frame 204
CTE of the wall member 103 <cushion member 2
SUS430 was adopted as a material having a relationship of 20 CTE <CTE of the frame 204.

【0035】ちなみにSUS430のCTEは、9E−
6/℃である。本実施例で採用したヘッド構成部品の材
質、CTE、ヤング率、板厚は表1の通り。
Incidentally, the CTE of SUS430 is 9E-
6 / ° C. Table 1 shows the material, CTE, Young's modulus, and plate thickness of the head components used in this example.

【0036】この事で、温度上昇によるフレーム204
の膨張を緩衝部材220で制限出来た為、インク室構成
部材601とフレーム204の界面に発生する応力を小
さくすることが出来た。
In this case, the temperature of the frame 204 caused by the temperature rise is increased.
Since the expansion of the ink chamber can be restricted by the buffer member 220, the stress generated at the interface between the ink chamber constituting member 601 and the frame 204 can be reduced.

【0037】この事で、ヘッド製造工程上の温度上昇、
使用環境温度の変化に対して信頼性の高いヘッドを提供
できた。
Due to this, the temperature rise in the head manufacturing process,
A highly reliable head can be provided with respect to changes in the operating environment temperature.

【0038】ここで、緩衝部材220は、図1に示すよ
うに圧力発生部材挿入部に孔部130と、振動板104
のコンプライアンスの逃げ溝131を設ける必要があ
る。
Here, as shown in FIG. 1, the buffer member 220 has a hole 130 in the pressure generating member insertion portion and a diaphragm 104.
It is necessary to provide an escape groove 131 for compliance.

【0039】この緩衝部材220の製造方法としては、
プレス加工が望ましいが、緩衝部材板厚が厚くなってく
ると、プレスによる加工変形、バリの発生が課題となっ
てくる。この時は、所望の形状に加工した複数枚のSU
S板を、接着剤、拡散接合等の方法で積層接着して緩衝
材220として利用しても同等の効果が得られる。
The method for manufacturing the cushioning member 220 is as follows.
Pressing is desirable, but when the thickness of the cushioning member increases, processing deformation and burr generation due to pressing become problems. At this time, a plurality of SUs processed into a desired shape
The same effect can be obtained even when the S plate is laminated and adhered by a method such as an adhesive or diffusion bonding and used as the cushioning material 220.

【0040】又、緩衝部材220の他の材料として、熱
硬化性樹脂を利用しても良い。熱硬化性樹脂には、射出
成型により容易に所望の形状が得ることが出来、CTE
が小さい材料が多いので有効である。
As another material of the cushioning member 220, a thermosetting resin may be used. The desired shape can be easily obtained by injection molding for thermosetting resin.
Is effective because there are many small materials.

【0041】[0041]

【表1】 [Table 1]

【0042】この後、従来と同様に図2に示すように、
フレーム204と緩衝部材220にインク室構成部材6
01を接着と同時に、圧力発生部材105上面に接着剤
112を塗布した圧電素子ユニットを挿入し、島状突起
物209と圧力発生部材105上面との位置決め及び接
合を行い、インクジェット式印字ヘッドを得る。
Thereafter, as shown in FIG.
The ink chamber constituting member 6 is attached to the frame 204 and the buffer member 220.
At the same time as bonding, the piezoelectric element unit having the adhesive 112 applied to the upper surface of the pressure generating member 105 is inserted, and the island-shaped protrusion 209 and the upper surface of the pressure generating member 105 are positioned and joined to obtain an ink jet print head. .

【0043】本実施例のヘッドの斜視図を図5に示し
た。ヘッド仕様は以下の通り。
FIG. 5 is a perspective view of the head of this embodiment. The head specifications are as follows.

【0044】[0044]

【表2】 [Table 2]

【0045】本発明のヘッド構造は水平方向の線膨張係
数の違いにより発生する応力を緩和するだけでなく、垂
直方向、即ち、インク吐出方向の圧力発生部材105と
フレーム204との熱による変形の差を小さくできる。
The head structure of the present invention not only relieves the stress generated due to the difference in the coefficient of linear expansion in the horizontal direction, but also reduces the deformation of the pressure generating member 105 and the frame 204 in the vertical direction, that is, in the ink ejection direction, due to heat. The difference can be reduced.

【0046】このことは、ヘッド製造時の接着剤硬化温
度で釣り合った圧力発生部材105上面とフレーム20
4上面が、常温に戻ることで発生する圧力発生部材10
5のインク室側への突出を抑える効果があり、これによ
り、インク吐出バラツキを小さくすることが出来た。
This means that the upper surface of the pressure generating member 105 and the frame 20 are balanced at the adhesive curing temperature at the time of manufacturing the head.
4 Pressure generating member 10 generated when upper surface returns to normal temperature
5 has an effect of suppressing the protrusion of the ink No. 5 toward the ink chamber, thereby reducing the variation in ink ejection.

【0047】本実施例では、圧力発生部材として電界方
向と垂直方向の変位を利用したd31方向の積層型圧電
素子を使用した例を示したが、本発明は、これに限定さ
れるものではなく、図6に示すように、電界方向と同方
向の変位を利用したd33方向の変位を利用した圧電素
子であっても同等の効果を有する事が出来る。
In this embodiment, an example is shown in which a laminated piezoelectric element in the d31 direction using displacement in the direction perpendicular to the electric field direction is used as the pressure generating member. However, the present invention is not limited to this. As shown in FIG. 6, the same effect can be obtained even with a piezoelectric element utilizing displacement in the d33 direction utilizing displacement in the same direction as the direction of the electric field.

【0048】[0048]

【発明の効果】以上説明したように、本発明のインクジ
ェット式印字ヘッドによれば、インク室構成部材とフレ
ーム220との線膨張係数の違いを緩衝し、信頼性の高
いインクジェット式印字ヘッドを提供できる。
As described above, according to the ink jet print head of the present invention, the difference in the coefficient of linear expansion between the ink chamber constituting member and the frame 220 is buffered, and a highly reliable ink jet print head is provided. it can.

【0049】また、ヘッド製造時の接着剤硬化温度で釣
り合った圧力発生部材上面とフレーム上面が、常温に戻
ることで発生する圧力発生部材のインク室側への突出を
抑える効果があり、これにより、インク吐出バラツキを
小さくすることができる。
Further, the upper surface of the pressure generating member and the upper surface of the frame, which are balanced by the adhesive curing temperature at the time of manufacturing the head, have the effect of preventing the pressure generating member from projecting toward the ink chamber when the temperature returns to normal temperature. In addition, variations in ink ejection can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のインクジェット式印字ヘッドの一実施
例を示す図3に於けるA−A断面図。
FIG. 1 is a sectional view taken along the line AA in FIG. 3 showing one embodiment of an ink jet print head of the present invention.

【図2】本発明のインクジェット式印字ヘッドの一実施
例を示す図3に於けるB−B断面図。
FIG. 2 is a sectional view taken along the line BB in FIG. 3, showing one embodiment of the ink jet print head of the present invention.

【図3】本発明のインクジェット式印字ヘッドの一実施
例を示す斜視図。
FIG. 3 is a perspective view showing one embodiment of an ink jet print head of the present invention.

【図4】本発明のインクジェット式印字ヘッドの一実施
例を示す斜視図。
FIG. 4 is a perspective view showing one embodiment of an ink jet print head of the present invention.

【図5】本発明のインクジェット式印字ヘッドの一実施
例を示す斜視図。
FIG. 5 is a perspective view showing one embodiment of an ink jet print head of the present invention.

【図6】本発明のインクジェット式印字ヘッドの一実施
例を示す断面図。
FIG. 6 is a sectional view showing an embodiment of the ink jet print head of the present invention.

【図7】従来のインクジェット式印字ヘッドを示す断面
図。
FIG. 7 is a sectional view showing a conventional ink jet print head.

【符号の説明】[Explanation of symbols]

101 ノズルプレート 102 ノズル開口部 103 壁部材 104 振動板 105 圧力発生部材 131 コンプライアンス逃げ溝 209 島状突起物 210 振動膜部 220 緩衝部材 DESCRIPTION OF SYMBOLS 101 Nozzle plate 102 Nozzle opening 103 Wall member 104 Vibration plate 105 Pressure generating member 131 Compliance escape groove 209 Island-like projection 210 Vibrating film part 220 Buffer member

Claims (7)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 ノズルを有するノズルプレートと、前記
ノズルに連通するインク室、該インク室にインクを供給
するインク流路、インク室とインク流路を連通するイン
ク供給路とが形成された壁部材と、該壁部材上に積層さ
れた前記圧力室の壁面を構成する振動板とからなるイン
ク室構成部材と、 該振動板と当接し前記ノズルからインク滴を吐出させる
ために前記インク室に圧力を発生させる圧力発生部材
と、 前記インク室構成部材及び前記圧力発生部材を支持する
フレーム部材とを有するインクジェット式印字ヘッドに
おいて、 前記インク室構成部材と前記フレーム部材との間に板状
緩衝部材を配置したことを特徴とするインクジェット
式印字ヘッド。
A nozzle plate having a nozzle;
Ink chamber communicating with the nozzle, supplying ink to the ink chamber
Ink flow path, an ink path that connects the ink chamber and the ink flow path.
A wall member on which a supply channel is formed, and a wall member laminated on the wall member.
And a diaphragm constituting a wall surface of the pressure chamber.
A chamber member and an ink droplet ejected from the nozzle in contact with the diaphragm
Pressure generating member for generating pressure in the ink chamber
And supporting the ink chamber constituent member and the pressure generating member.
Ink jet print head with frame member
Oite, plate between the frame member and the ink chamber structure member
An ink jet print head , wherein the buffer member is disposed.
【請求項2】前記緩衝部材の圧力発生部材挿入部に孔部2. A hole in a pressure generating member insertion portion of the buffer member.
があることを特徴とする請求項1記載のインクジェット2. The ink jet according to claim 1, wherein:
式印字ヘッド。Type print head.
【請求項3】前記緩衝部材に振動板のコンプライアンス
の逃げ溝があることを特徴とする請求項1記載のインク
ジェット式印字ヘッド。
3. The ink jet print head according to claim 1, wherein said buffer member has an escape groove for compliance of the diaphragm.
【請求項4】 前記緩衝部材の線膨張係数(CTE)
が、前記壁部材のCTE<前記緩衝部材のCTE<前記
フレーム部材のCTEで有ることを特徴とする請求項1
記載のインクジェット式印字ヘッド。
4. A linear expansion coefficient of the buffer member (CTE)
2. The relationship of CTE of the wall member <CTE of the buffer member <CTE of the frame member is satisfied.
The ink-jet print head according to claim 1.
【請求項5】 前記緩衝部材が金属である事を特徴とす
る請求項1記載のインクジェット式印字ヘッド。
5. The ink jet print head according to claim 1, wherein a said cushioning member is a metal.
【請求項6】 前記緩衝部材がステンレス材である事を
特徴とする請求項1記載のインクジェット式印字ヘッ
ド。
6. ink jet print head according to claim 1, wherein a said cushioning member is a stainless steel material.
【請求項7】 前記緩衝部材が樹脂である事を特徴とす
る請求項1記載のインクジェット式印字ヘッド。 【請求項8 前記振動板に薄肉部を形成すると共に、
前記緩衝部材の前記薄肉部に対応する位置に溝部を形成
したことを特徴とする請求項1、3、4または5記載の
インクジェット式印字ヘッド。」 にあります。
7. The ink jet print head according to claim 1, wherein a said cushioning member is a resin. 8. to form a thin portion on the diaphragm,
6. The ink jet print head according to claim 1, wherein a groove is formed at a position corresponding to the thin portion of the buffer member. ".
JP26058795A 1995-09-05 1995-10-06 Ink jet print head Expired - Lifetime JP3291999B2 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP26058795A JP3291999B2 (en) 1995-10-06 1995-10-06 Ink jet print head
EP96114233A EP0761447B1 (en) 1995-09-05 1996-09-05 Ink jet recording head and method of producing the same
EP01105383A EP1104698B1 (en) 1995-09-05 1996-09-05 Ink jet recording head and method of producing the same
DE69629220T DE69629220T2 (en) 1995-09-05 1996-09-05 Ink jet recording head and its manufacturing method
DE69628954T DE69628954T2 (en) 1995-09-05 1996-09-05 Ink jet recording head and method of manufacturing the same
DE69625296T DE69625296T2 (en) 1995-09-05 1996-09-05 Ink jet recording head and its manufacturing method
US08/708,675 US6139132A (en) 1995-09-05 1996-09-05 Ink jet recording head with nozzle communicating hole having smaller width than pressurizing chambers in direction of array of pressurizing chambers
EP01105378A EP1104697B1 (en) 1995-09-05 1996-09-05 Ink jet recording head and method of producing the same
US09/556,587 US6460981B1 (en) 1995-09-05 2000-04-20 Ink jet recording head having spacer with etched pressurizing chambers and ink supply ports
US09/576,174 US6729002B1 (en) 1995-09-05 2000-05-23 Method of producing an ink jet recording head
US10/102,656 US6561633B2 (en) 1995-09-05 2002-03-22 Ink jet recording head having spacer with etched pressurizing chambers and ink supply ports
US10/425,868 US7028377B2 (en) 1995-09-05 2003-04-30 Method of producing an ink jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26058795A JP3291999B2 (en) 1995-10-06 1995-10-06 Ink jet print head

Publications (2)

Publication Number Publication Date
JPH0999557A JPH0999557A (en) 1997-04-15
JP3291999B2 true JP3291999B2 (en) 2002-06-17

Family

ID=17350024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26058795A Expired - Lifetime JP3291999B2 (en) 1995-09-05 1995-10-06 Ink jet print head

Country Status (1)

Country Link
JP (1) JP3291999B2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11320880A (en) * 1998-05-19 1999-11-24 Seiko Epson Corp Ink-jet type recording head
JP4724905B2 (en) * 2000-08-24 2011-07-13 セイコーエプソン株式会社 Liquid ejector
JP3815285B2 (en) 2001-10-09 2006-08-30 ブラザー工業株式会社 Inkjet head
JP3687662B2 (en) 2002-07-05 2005-08-24 セイコーエプソン株式会社 Liquid jet head
JP4713069B2 (en) * 2003-08-12 2011-06-29 ブラザー工業株式会社 Inkjet printer head
JP2008114561A (en) * 2006-11-08 2008-05-22 Ricoh Co Ltd Liquid discharge head, liquid discharge device, and image forming device
JP2008238594A (en) * 2007-03-27 2008-10-09 Seiko Epson Corp Liquid jet head, and liquid jet apparatus
JP5927761B2 (en) * 2011-02-04 2016-06-01 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, and method of manufacturing liquid ejecting head
JP5707244B2 (en) * 2011-06-17 2015-04-22 東芝テック株式会社 Inkjet head
JP6708945B2 (en) 2015-10-30 2020-06-10 セイコーエプソン株式会社 Liquid ejector
JP6624372B2 (en) 2015-10-30 2019-12-25 セイコーエプソン株式会社 Liquid ejection device

Also Published As

Publication number Publication date
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