JPH0826459B2 - Multi-chamber type coating device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has a carrying device for carrying a base material such as glass, flat glass or molded glass,
The transport device comprises a transport carriage which is opened upwards and is supported on a sliding element, on which a base material is placed and which is moved from one coating chamber to at least one other coating chamber. The coating chamber can be separated from other coating chambers by a gate that extends at a right angle to the direction of movement of the carrier, and the gate forms an upper portion of the gate and a lower side of the gate that forms a slit opening at a distance from the upper portion. And a multi-chamber coating device such as is formed from parts.

[0002]

2. Description of the Related Art A multi-chamber coating device having a conveying device for conveying flat glass is already known (British Patent Publication No. 2171119, British Patent No. 1604056, U.S. Pat. No. 4,274,936). Same 400
9090 specification). The transport device consists of a transport carriage that is opened upwards and is supported on a sliding element, on which a base material is placed, which is moved from one coating chamber to at least one other coating chamber. To be done.

[0003]

In the case of flat glass, the cross-sectional area is so small that until now the gas transfer occurring between the coating chambers is almost negligible. However, when the coating chambers are closely arranged and another coating treatment is to be performed in the next coating chamber, the gas transfer between the coating chambers causes the formation of the coating layer and the various coating layers when this occurs. This will reduce the quality at and is undesirable and should be avoided.

The object of the invention is therefore to separate the gas between two chambers.

[0005]

According to the invention, the object is, in a multi-chamber coating chamber of the type mentioned at the outset, that the cross-section opening of the gate provided between the two coating chambers is conveyed. Achieved by matching the cross-sectional area of the device and the cross-sectional area of the base material to be moved, or by the transfer device by matching its cross-sectional area with the cross-sectional opening of the gate.

In this way, even very bulky, especially curved flat glass can be easily coated in a multi-chamber coating chamber, adjoining from one coating chamber without significant gas transfer between the coating chambers. It is moved to another coating room. This significantly reduces the cycle time of the base material in each coating chamber and also achieves satisfactory quality.

For this purpose, it is advantageous for the gate between the two coating chambers to consist of a gate upper part and a gate lower part, at least one of which is arranged movably. This allows the cross-section opening to be adapted very quickly to transport devices of various sizes.

It is also advantageous if at least one of the gate parts is arranged such that its height can be adjusted.

Furthermore, it is advantageous if both gate parts are arranged movably in the height direction and in the lateral direction. This ensures that the gate opening is adapted to the various cross-section openings in the shortest possible time.

In another embodiment of the invention, a solution to the object of the invention is that at least part of the gate can be rocked laterally or can be opened downwards.

In another embodiment of the invention, it is advantageous for the cross-sectional opening formed by the two gate parts to be closed by the cross-sectional area of the conveying device and / or the base material.

In an advantageous embodiment of the invention, it is advantageous for the walls extending transversely with respect to the direction of movement of the carrier to be spaced apart from each other approximately corresponding to the length of the cover plate. This ensures that, in the case where multiple transport vehicles are employed, at each position the gate opening remains closed even when the transport vehicle is present at its coating location.

In the present invention, at least one adjustable
Advantageously, the two gate parts can change their position via the adjusting device.

In connection with the construction and arrangement according to the invention, the at least one adjustable gate part can change its position in relation to the movement of the carrier via the adjusting device, which adjusting device is the transmitter or the transmitter. Advantageously, it can be controlled via a sensor. This allows the cross-sectional area of the gate opening to be changed in relation to the transport speed.

It is also advantageous that the total area of the lid plate corresponds approximately to the total area of the cross-section openings of the carrier.

In another embodiment of the invention, the gate between the two coating chambers comprises a gate upper part and a gate lower part, both gate parts being vertically spaced from one another and carrying. It is advantageous to form a through-opening for the carriage whose cross-sectional area can be changed.

By forming the gate in a two-part structure, it is possible to easily form a through opening that is accurately aligned with the height of the carriage.

For this purpose, in particular, the upper part of the gate has two side walls which are arranged at a relative distance, between which the other wall is movable via an adjusting device or a hydraulic cylinder. It is advantageous to be housed. At least the upper part of the gate can be adjusted in height so that it can be adjusted to different heights of the transport device in a short time by using an adjusting device, which can also be formed as a hydraulic cylinder, for example. In this way, gas transfer is sufficiently eliminated by the exact fit to the through-opening of the carrier, so that
Carriers of different heights can also be guided in sequence through the coating chambers without gas transfer between the coating chambers. This is also assisted by the fact that the covering device in the upper part of the gate is fitted to the total area of the carrier or has the same length and width as the carrier.

Advantageously, the carriage is supported by rollers arranged on the side wall of the coating chamber.

For this purpose, it is further advantageous that the bottom and / or the cover plate on the lower side of the carrier is formed so as to be movable up and down via an adjusting device so that the bottom is adapted to the respective height of the carrier. Is. The rollers are preferably adjusted with the bottom, or an adjusting device for accommodating the rollers is formed in such a way that the rollers change their height with respect to their bottom so that they can be fitted to different heights of the carriage. In addition, the roller can be height-adjustably supported on the side wall of the coating chamber in order to adjust its height independently of the bottom in the coating chamber.

For this purpose, it is advantageous according to the invention that the rollers are housed in the side walls of the coating chamber.

In a preferred embodiment of the invention, the adjusting device is preferably designed as a hydraulic cylinder or as a gear mechanism with a rack and a driveable pinion. Instead of hydraulic cylinders, it is also possible to employ gear transmissions or differently designed adjusting devices for adjusting the components of the bottom of the coating chamber.

In order to ensure that the base material is successfully coated with different materials at the various coating treatment sites,
At least one chamber or intermediate chamber with a suction device is arranged in each coating chamber, which chamber has at least one wall with an opening, through which gas is sucked out of the coating chamber,
Advantageously, gas transfer between the individual coating chambers is prevented.

For this purpose, it is advantageous for the coating chamber as well as the intermediate chamber to be provided with suction devices, respectively.

Furthermore, openings for sucking out gas are provided in the bottom of the coating chamber and the intermediate chamber, and two or more chambers, each with a suction device, are provided on both sides of the coating chamber, for example the openings thereof. Advantageously, it is provided at the bottom of the coating chamber or the chamber connected to the suction device. In this way, the transfer device is advantageously degassed or cleaned so that dirt particles or gas components are not entrained when the transfer device is moved from one coating chamber to another. The substance can thus be treated without problems in each coating chamber with various materials, the individual coating layers having a high degree of purity.

Other advantages and details of the invention are set forth in the claims and the detailed description section of the invention respectively.
Shown in the drawing. The invention of the present invention lies in the features and combinations of all the claims in the claims.

[0027]

1 is a multi-chamber coating device which has a device 3 for conveying a base material 2, such as glass, flat glass, in particular shaped or curved glass. The transport device 3 comprises a transport carriage 5 which is supported via sliding elements or rollers 4 and whose top is open. The curved glass 2 is placed on the bottom 28 of the carrier 5. This curved glass 2 is moved from a front chamber 12 shown schematically in the drawing into a first coating chamber 6 and at least one other coating chamber 6.

It is also possible to connect a plurality of coating chambers 6 in series based on FIGS. 6 to 10 and provide various coating layers on the base material 2 or the glass surface. The base material 2 passes through the last coating chamber 6 and reaches the ventilation chamber 13 through the gate 7 ″.
The ventilation chamber 13 can also be used to reprocess the coating layer. Only the principle of the automatic sputtering device is shown in FIG. A single chamber / manufacturing device or a multi-chamber / manufacturing device can be made on this principle.

The antechamber 12 has the purpose of improving the cleanliness of the coating chamber and thereby shortening the loading time. For this purpose, it is particularly advantageous to pretreat the base material.

In FIGS. 1, 5 to 6 to 10, the curved glass 2 reaches into the first coating chamber 6 via the front chamber 12 and the first gate 7 ', from which the other or the second chamber 2 is reached. 6 to 10 to reach at least the third covering chamber 6 and finally to another or third gate 7 "to reach the ventilation chamber 3. The ventilation chamber 3 is covered. It can also be used to reprocess the bed. The first gate 7'and the last gate 7 "are the front chamber 12 or the ventilation chamber 1.
3 is completely cut off from the coating chamber 6, whereas the intermediate gate 7 has a slit opening 10.

The antechamber 12 of the coating chamber 6 is evacuated via one or several pumps 25 and one or several outlet openings 14 which are indicated by circles in the drawing. 6 and 7, the pump 25 or the pump inlet opening is also provided in the corresponding coating chamber 6 or intermediate chamber 26.

6 to 10 show various embodiments which operate on the same principle as the embodiment in FIG.

The multi-chamber / sputtering device is equipped with a direct current / diode device or a high frequency / diode device. In FIG. 1, only the heating device 15 and the transfer device 3 are schematically shown in the front chamber 12, and the transfer device 3 having the target 16, the plasma 17 and the base material 2 is provided in the coating chamber 6. The adapter 18 of the radio frequency supply is shown schematically.

1 to 4, the intermediate gate 7 is arranged between the individual coating chambers 6 at right angles to the moving direction of the carriage 5 and separates one coating chamber 6 from another coating chamber 6. There is.

In FIG. 1, the first gate 7 ′, the last gate 7 ″ and the gate 7 provided between the two coating chambers 6 are located above the gate upper part 8 and spaced from it and transversely. It comprises a gate lower part 9 which forms a surface opening or a slit opening 10. The gate 7 ',
7 "is opened via an adjusting device (not shown) and is displaced upwards when the transport device 3 is moved from one chamber to the next together with the base material 2. For this purpose the gate 7 ',
The 7 ″ has a vertically movable gate door 45.
The gate door 45 can be adjusted in another way, for example by opening the gate door 45 downwards, upwards or sideways in order to open the cross-sectional opening 10 of the gate 7, 7 ', 7 ".

Gate 7 provided between two coating chambers 6
Is a cover plate 19 that extends horizontally at its lower edge 27 (see FIG. 1).
Has a gate upper part 8 connected to it. The cover plate 19 covers the carrier truck 5 from one coating chamber 6 to another coating chamber 6
Located on the upwardly-opened storage part of the carrier 5 when moving to, thus making the slit opening 10 as small as possible and preventing gas exchange between two adjacent coating chambers 6. To do so.

A second cover plate 47 (see FIGS. 4 and 5) is provided below the cover plate 19 with a space therebetween. The lid plate 47 forms a large slit opening 10 so that the roller 4 and the flange 29 occupy a sufficient space in FIG. In this way, the carrier 5 can be moved from one work place to the next work place without significant gas movement.

Since the cover plate 19 corresponds to the upward cross-section opening 24 of the carrier truck 5 in FIGS. 1, 4 and 5, the carrier truck 5 is transferred from one coating chamber 6 to another coating chamber 6. In this case, the slit opening 10 does not increase. There is only a minimum gap S between the lower side surface of the cover plate 19 and the upper edge of the carrier truck 5. However, this gap S is so small that gas exchange is not performed between the adjacent coating chambers 6. In each case, this is so small that it does not adversely affect the sputtering work place in each coating chamber 6. The slit opening 10 is fitted to the cross-sectional area of the carrier truck 5 in FIG. 4 according to the size of the carrier truck 5. This slit opening 10
According to an advantageous embodiment of the gate 7 in which the gate parts 8, 9 are movably arranged, is related to the cross-sectional area of the front wall 22 of the carrier 5 when the carrier 5 is put into the slit opening 10. To a few mm, that is, about 1 to 2 mm.

When the curved glass in FIG. 5 instead of the flat glass is conveyed on the conveying carriage 5, the conveying carriage 5 therefore has a curved base material or the upper edge 23 of the glass 2 (see FIGS. 3 and 5). It has four sidewalls 22 that terminate at about the same height as. In this way, the slit opening 10 is closed via the large-sized carrier truck 5, and the movement of gas is blocked. When there is nevertheless some gas movement, it is discharged via the pump 25 and the outlet opening 14. That is, in this way, the sputtering is effectively performed in one chamber while using the reaction gas, and the subsequent chamber 6 is operated with another gas.

2 to 5, the side wall 2 of the carrier truck 5 is shown.
2 is provided with a horizontally extending flange 29. The roller 4 is contacted and supported by these flanges 29 (FIG. 2,
(See FIG. 3).

The roller 4 is fixedly arranged on the side wall 30 of the coating chamber 6 in FIGS. When the curved glass 2 is to be conveyed in FIG.
Is adopted. For this purpose, the space between the cover plate 19 and the cover plate 47 or the target 16 and the bottom 31 as described below is used.
The intermediate chamber between (see Figure 2) must be changeable.

By changing the intermediate chamber, it is possible to adopt the carriages 5 having various heights.

Further, the bottom 31 is moved up and down in FIG. 2 via the adjusting device 32, whereby the bottom 31 is moved.
It is adjusted to the height of each case. The adjusting device 32 has a bottom 31
It is composed of a rack 33 and a pinion 34, which are arranged in the. The adjusting device 32 can also be constituted by a hydraulic cylinder. The roller 4 is supported by the side wall 30 of the coating chamber 6 and cannot be adjusted.
However, the roller 4 can also be supported vertically adjustable on the side wall 30 of the coating chamber 6, so that the roller 4 can be fitted with a slit guide (not shown) in order to align it with the transport carriage 5.
Housed in.

Further, the height of the lid plate 19 can be adjusted based on FIG. For this purpose, the cover plate 19 is connected to the adjusting device in FIG. This adjusting device consists of a hydraulic cylinder 49, only part of which is shown in the drawing, or an adjusting device 3 for adjusting the bottom 31 in FIG.
Since it consists of a rack with a drive pinion such as 2, the gate upper part 8 can thus be adjusted to fit the corresponding height of the carrier 3. When adjusting the bottom 31, the lid plate 47 is also adjusted together via an adjusting device (not shown) such as the adjusting device 32. In this way, the slit opening or the gate opening 10 becomes the gate 7 to
It can be quickly adjusted to different heights of the carriage 5 without having to make changes to the 7 ″. The position of the target 16 can be adjusted, if necessary, via a device not shown, such as the embodiment of FIG. Are adjusted together.

The upper part 8 of the gate has two side walls 43 spaced apart from one another (see FIG. 4), with the other wall 44 between these side walls 43 via an adjusting device or hydraulic cylinder 49. Can be moved.

The best separation of the gases between the individual coating chambers 6 is advantageously achieved by the gates 7 provided between the coating chambers 6.

As can be seen from the embodiments shown diagrammatically in FIGS. 6 to 10, a plurality of intermediate chambers 26 are provided between each gate 7-7 ″. The parts shown above for are omitted.

In FIG. 6, one intermediate chamber 26 is provided between each of the two gates 7. A pump 25 is provided or attached to these intermediate chambers 26. The pump 25 also sucks out partially overflowing gas or impurities, so that the gas in one coating chamber 6 and the gas in the next coating chamber 6 are separated from each other. Prevent gas transfer between them.

The object of the invention is also to obtain an economical method with a dynamic gas separation action for flat glass coating processes.

The glass 2 to be coated is transported over rollers 4 or sliding elements (not shown) and without interruption at a constant speed through a plurality of coating chambers 6. These coating chambers 6 are arranged in series in FIGS. 6 to 10, in which coating layers are provided in sequence.

In this device, the separation of the gas is carried out by the gate 7 and the coating chamber 6 is evacuated independently of each other.

Further, as can be seen from FIG. 6, since the wall 37 having the opening 36 is provided between the first coating chamber 6 and the second coating chamber 6, the gas is converted into the target 16 by a simple method.
It can be ensured that no gas is sucked out of the coating chamber 6 having the first target 16 or no gas is transferred from the coating chamber 6 having the first target 16 to the coating chamber 6 having the second target 16. Furthermore, the intermediate chamber 26 with the pump 25 is closed downwards by a bottom 38.

In the case of the embodiment in FIG. 7, an intermediate chamber 26 having a pump 25 is provided on each side of the coating chamber 6, and the intermediate chambers 26 on both sides are connected to the coating chamber 6 via openings 36 provided in a wall 37. Has been done.

In FIGS. 8 and 9, the coating chamber 6 and the intermediate chamber 26 following it have a pump 25.
Similarly here again, the roller 4 is supported on the side wall according to FIG.

In FIG. 9, four modules are provided for two working places with a gas separating unit, and in FIG. 10, eight modules are provided for two working places with a gas separating unit. . Only four modules are shown in FIG.

As can be seen from FIG. 10, two chambers 26 each having a pump 25 are provided on both sides of the coating chamber 6, and the chambers 26 located outside the chambers 26 have a lower bottom 39 with an opening 40. However, the chamber 26 located inside has a wall 41 with an opening 42 adjacent to the coating chamber 6. This further improves the gas separation action, so that a clean surface coating is achieved at each coating work site. The gas is expediently expelled in the region of the conveying device on the one hand through the opening 40 and on the other hand the opening 4 in the side wall 37 of the coating chamber 6
It is discharged via 2.

Further, it is possible to arrange two cathodes or targets 16 in the coating chamber 6.

The upper gate portion 8 is rigidly connected to the upper side wall 11 of the coating chamber 6 in FIGS. 2 and 3 or is spaced apart therefrom. For this one wall 1
A spacer 20 is provided on the upper part 8 of the gate on the other hand.

The lower gate portion 9 (see FIG. 5) is formed similarly to the lower gate portion 8 and extends in the same vertical horizontal plane as the upper gate portion 8. In order to allow the gap width of the slit 10 between the upper gate portion 8 and the lower gate portion 9 to be accurately matched to the transfer device 3 and its base material 2, the lower gate portion 9 is illustrated together with the lid plate 47. 2 and can advantageously be adjusted vertically via an adjusting device as illustrated in FIG. In this way, the lower part 9 of the gate can be adjusted vertically. It is also possible to adjust the gate part horizontally via a device not shown.

Since the laterally extending walls 22 have a distance substantially corresponding to the length of the cover plate 19 (see FIG. 4), the carriage 5 is not located directly below the upper gate portion 8 and, for example, in FIG. The slit opening 10 is always completely or almost completely closed even when it is located below the target. That is, as a result, gas transfer between the coating chambers 6 at each position of the carrier 5 can be sufficiently avoided.

In another embodiment not shown further,
The total cross-sectional area of the transfer device 3 as seen in the direction of movement is calculated for each gate 7,
It is possible to accommodate slit openings 10 of various sizes in 7 ', 7 ".

For this reason, the side wall of the carriage 5 is formed in a length-changeable or telescopic form, and its height can be changed by this to accommodate the base materials 2 (see FIG. 3) of various heights. You can In this case, there is a particularly great advantage and inventive step in ensuring a rapid passage of the base material 2 without the movement of gas between the coating chambers 6 in the multi-chamber coating device 1.

[0063]

According to the present invention, in the multi-chamber type coating apparatus, the movement of gas between the coating chambers can be surely avoided, and the coating process can be performed very quickly and with high quality.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view of a multi-chamber coating device having a device for conveying a base material such as glass, flat glass and / or shaped glass.

FIG. 2 is a cross-sectional view of a gate having a carrier for accommodating flat glass.

FIG. 3 is a cross-sectional view of a gate having a carrier for accommodating curved glass.

FIG. 4 is a schematic view of a gate having a horizontally extending plate.

FIG. 5 is a perspective view of the carriage just before being inserted into the cross-section opening of the gate.

FIG. 6 is a schematic view of a first embodiment of a coating chamber and an intermediate chamber of a multi-chamber coating device.

FIG. 7 is a schematic view of the same second embodiment.

FIG. 8 is a schematic view of the third embodiment.

FIG. 9 is a schematic view of the fourth embodiment.

FIG. 10 is a schematic view of the fifth embodiment.

[Explanation of symbols]

1 multi-chamber type coating device 2 glass = foundation material 3 carrier device 4 sliding element, roller 5 carrier vehicle 6 coating chamber 7 intermediate gate 7'first gate 7 "third or final gate 8 gate upper part 9 gate lower part 10 Slit opening, cross-section opening = gate (7, 7 ',
7 ″) Gate opening 11 Wall 12 Front chamber 13 Ventilation chamber 14 Exit opening 15 Heating device 16 Target 17 Plasma 18 Adapter 19 Cover plate 20 Spacer 22 Side wall, Front wall of carrier 5 23 Curved base material or upper edge of glass 2 24 Transverse Sectional Opening of Transport Vehicle 5 S Slit 25 Pump 26 Chamber or Intermediate Chamber 27 Edge 28 Bottom of Transport Vehicle 5 29 Flange 30 Sidewall 31 Bottom 32 Adjuster 33 Rack 34 Pinion 36 Open 37 Wall 38 Bottom 39 Bottom 40 Open 41 Wall 42 opening 43 wall 44 wall 45 gate door 47 cover plate 49 hydraulic cylinder

Claims (21)

[Claims] 1. A transport device (3) for transporting a base material (2) such as glass, flat glass or shaped glass, which transport device (3) opens upwards and is supported on a sliding element (4). A carrier vehicle (5), on which the base material (2) is placed, and the base material (2) is located in the coating chamber (6) to at least one other coating chamber. The coating chamber (6) is moved to (6) and can be separated from the other coating chamber (6) by the gate (7) extending at right angles to the moving direction of the transport carriage (5), and the gate (7). In a multi-chamber coating device in which the upper part of the gate (8) and the lower part of the gate (9) forming a slit opening (10) spaced from it are provided Gate (7) provided between (6)
The cross-sectional opening (10) of the transport device (3) is aligned with the cross-sectional area of the transport device (3) with respect to the direction of movement of the transport device (3) and the cross-sectional area of the base material (2) to be moved, or the transport device (3) is Multi-chamber type coating device, characterized in that its cross-sectional area is matched to the cross-sectional opening (10) of the gate (7, 7 ', 7 "). 2. A gate (7) between two coating chambers (6) comprises an upper gate part (8) and a lower gate part (9), at least one of which (8, 9) is a gate part. The multi-chamber coating device according to claim 1, wherein the multi-chamber coating device is movably arranged. 3. Multi-chamber coating device according to claim 1 or 2, characterized in that at least one gate part (8, 9) is arranged such that its height can be adjusted. 4. Multichamber coating device according to claim 1, characterized in that at least one of the gate parts (8, 9) is arranged so as to be movable in the height direction and in the lateral direction. 5. Multichamber type according to claim 1, characterized in that both gate parts (8, 9) are arranged movably in height and in lateral direction. Coating equipment. 6. At least part of the gate (7) and the gate door (45) can be swung sideways or can be opened upwards or downwards. Multi-chamber coating device. 7. A cross-section opening (10) formed by both gate parts (8, 9) by adjusting the conveying device (3) or part thereof or by adjusting one of the gate parts (8, 9). 7. The cross-sectional area of the carrier device (3) and the base material (2) are matched to each other.
The multi-chamber coating device according to any one of 1. 8. Walls (22) extending transversely with respect to the direction of movement of the carrier (5) are spaced apart from one another approximately corresponding to the length of the lid plate (19). Claim 1
8. The multi-chamber coating device according to any one of items 1 to 7. 9. Multichamber coating according to claim 1, characterized in that at least one adjustable gate part (8, 9) is adjustable in its position via an adjusting device. apparatus. 10. The adjustable at least one gate part (8, 9) can change its position in relation to the movement of the transport carriage (5) via an adjusting device, which adjusting device can act as a transmitter or sensor. The multi-chamber coating device according to claim 1, wherein the multi-chamber coating device can be controlled via 11. The total area of the cover plate (19) is a carriage (5).
Multi-chamber coating device according to any one of the preceding claims, characterized in that it substantially corresponds to the total area of the transverse cross-section openings (24). 12. A gate (7) between two coating chambers (6, 26) comprises a gate upper part (8) and a gate lower part (9).
Both gate portions (8, 9) being arranged at a vertical distance from each other and forming a through-opening for the carriage (5) whose cross-sectional area is variable. Item 12. The multi-chamber type coating device according to any one of items 1 to 11. 13. The upper gate portion (8) has two side walls (43) spaced relative to each other, with another wall (44) between the side walls (43) and a regulator or liquid. 13. The multi-chamber coating device according to claim 1, wherein the multi-chamber coating device is housed movably via a pressure cylinder (49). 14. The transport carriage (5) is supported by rollers (4) arranged on the side wall (30) of the coating chamber (6). The multi-chamber coating device described in 1. 15. Bottom (3) on the lower side of the carrier vehicle (5).
1) and the cover plate (47) are formed so as to be movable up and down via the adjusting device (32), and the carrier vehicle (5) is adjusted to the respective height of the carrier device (3). The multi-chamber coating device according to any one of claims 1 to 14. 16. Roller (4) is provided on the side wall (3) of the coating chamber (6).
0) The multi-chamber coating device according to any one of claims 1 to 15, which is housed in 17. A pinion (3) whose adjusting device (32) is drivable as a hydraulic cylinder or with a rack (33).
4) The multi-chamber coating device according to any one of claims 1 to 16, wherein the multi-chamber coating device is formed as a gear mechanism having 4) and 4). 18. At least one chamber with suction device or intermediate chamber (26) is arranged in each coating chamber (6),
This chamber has at least one wall (3 with an opening (36)
7) and the gas is sucked out of the coating chamber (6),
18. Multi-chamber coating device according to claim 1, characterized in that gas transfer between the individual coating chambers (6) is prevented. 19. The coating chamber (6) and the intermediate chamber (26) are each equipped with a suction device.
19. The multi-chamber coating device according to any one of items 1 to 18. 20. An opening according to claim 1, characterized in that an opening for sucking out gas is provided in the bottom (39) of the coating chamber (6) or the intermediate chamber (26). Multi-chamber coating device. 21. Two or more chambers (26) each having a suction device are provided on each side of the coating chamber (6). Multi-chamber coating device.