JPH08264299A - Insertion light source - Google Patents

Insertion light source

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Publication number
JPH08264299A
JPH08264299A JP6776995A JP6776995A JPH08264299A JP H08264299 A JPH08264299 A JP H08264299A JP 6776995 A JP6776995 A JP 6776995A JP 6776995 A JP6776995 A JP 6776995A JP H08264299 A JPH08264299 A JP H08264299A
Authority
JP
Japan
Prior art keywords
vacuum chamber
electron beam
magnets
light source
rows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6776995A
Other languages
Japanese (ja)
Inventor
Shinichi Bandai
新一 萬代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP6776995A priority Critical patent/JPH08264299A/en
Publication of JPH08264299A publication Critical patent/JPH08264299A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To make the inside of a vacuum chamber possible to keep in the most suitable state for an electron beam to proceed, and generate radiant light efficiently by allowing no emission of gas from a magnet even if the vacuum chamber is pressure-reduced down to a high vacuum state. CONSTITUTION: Inside a vacuum chamber 4 incorporated in an electron storage ring or a linear accelerator, an insertion light source is provided so that a pair of magnets rows 3 composed of plural magnets 2 is arranged so as to sandwich the passing position of an electron beam, and magnets 2 composing the magnets rows 3 are arranged so that the magnets 2 of different polarities face to each other as sandwiching the passing position of the electron beam and a magnetic field facing from the downside to the upside of the vacuum chamber 4 and a magnetic field facing from the upside to the downside of the vacuum chamber 4 are alternately formed. The exposed faces of respective magnets rows 3 are coated by sealing members 17 made of stainless steel thin plate material, and the outer edge portions of the sealing members 17 are airtightly fixed to holders 5 supporting the magnets rows 3.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は挿入光源に関するもので
ある。
FIELD OF THE INVENTION The present invention relates to an insertion light source.

【0002】[0002]

【従来の技術】光速に近い速度で移動する電子がその進
行方向を磁場や電場で曲げられると、電子の軌道の接線
方向に放射光と呼ばれる電磁波(光)を放出する。
2. Description of the Related Art When an electron moving at a speed close to the speed of light is bent in its traveling direction by a magnetic field or an electric field, an electromagnetic wave (light) called radiated light is emitted in the tangential direction of the orbit of the electron.

【0003】近年、高輝度の放射光を発生させる手段と
して、電子蓄積リングの直線部分、あるいは直線加速器
に設けるアンジュレータ装置等の挿入光源の研究開発が
行われている。
In recent years, research and development have been conducted on an insertion light source such as an undulator device provided in a linear portion of an electron storage ring or a linear accelerator, as a means for generating high-intensity radiated light.

【0004】図7は挿入光源の原理を示すものであり、
この挿入光源では、電子蓄積リング、あるいは直線加速
器に組み込まれ且つ電子ビームeが進行する中空構造の
真空チェンバ1の両外側に、複数の同形状の永久磁石2
よりなる一対の磁石列3,3を配置している。
FIG. 7 shows the principle of the insertion light source.
In this insertion light source, a plurality of permanent magnets 2 of the same shape are formed on both outer sides of a vacuum chamber 1 having a hollow structure which is incorporated in an electron storage ring or a linear accelerator and in which an electron beam e advances.
A pair of magnet rows 3 and 3 are arranged.

【0005】上記の真空チェンバ1は、SUS316L
(ステンレス鋼)等の磁化されない材質によって形成さ
れている。
The above vacuum chamber 1 is SUS316L.
It is made of non-magnetizable material such as (stainless steel).

【0006】また、両磁石列3,3を構成する永久磁石
2は、極性が異なる永久磁石2が真空チェンバ1を挟ん
で対向し且つ真空チェンバ1の一側面1aから他側面1
bへ電子ビームeの進行方向に対して直交するように向
う磁場m1と真空チェンバ1の他側面1bから一側面1
aへ電子ビームeの進行方向に対して直交するように向
う磁場m2とが交互に形成されるよう配置されている。
The permanent magnets 2 forming the magnet arrays 3 and 3 are such that the permanent magnets 2 having different polarities face each other across the vacuum chamber 1 and the one side surface 1a to the other side surface 1 of the vacuum chamber 1.
The magnetic field m 1 directed to the direction b perpendicular to the traveling direction of the electron beam e and the other side surface 1b of the vacuum chamber 1 to the one side surface 1
The magnetic fields m 2 are arranged so as to alternate with the magnetic fields m 2 which are oriented orthogonally to the traveling direction of the electron beam e.

【0007】上記の真空チェンバ1は、SUS316L
(ステンレス鋼)等の磁化されない材質によって形成さ
れ、真空チェンバ1の内部には、その一側面1aから他
側面1bへ水平に向う磁場m1と、他側面1bから一側
面1aへ水平に向う磁場m2とが電子ビームeの進行方
向に対して交互に生じている。
The above vacuum chamber 1 is SUS316L.
It is formed of a non-magnetized material such as (stainless steel), and inside the vacuum chamber 1, a magnetic field m 1 directed horizontally from one side surface 1a to the other side surface 1b and a magnetic field directed horizontally from the other side surface 1b to the one side surface 1a. and m 2 are generated alternately in the traveling direction of the electron beam e.

【0008】図7に示す挿入光源によって放射光Xを発
生させる際には、真空チェンバ1が組み込まれている電
子蓄積リング、あるいは直線加速器等の内部を高真空状
態に減圧したうえ、電子発生装置等によって真空チェン
バ1の内部に向って電子ビームeを出射させる。
When the emitted light X is generated by the insertion light source shown in FIG. 7, the inside of the electron storage ring in which the vacuum chamber 1 is incorporated, the linear accelerator, or the like is depressurized to a high vacuum state, and then the electron generator is generated. The electron beam e is emitted toward the inside of the vacuum chamber 1 by the above.

【0009】すると、電子ビームeは、先に述べた磁場
1,m2の影響によるローレンツ力を受けて真空チェン
バ1の内部を上下方向に蛇行しながら進行し、その結
果、電子ビームeの軌道が屈曲する箇所において電子ビ
ームeの軌道の接線方向に放射光Xが発生する。
Then, the electron beam e receives the Lorentz force due to the influence of the magnetic fields m 1 and m 2 described above, and travels in the vacuum chamber 1 while meandering in the vertical direction. As a result, the electron beam e The radiated light X is generated in the tangential direction of the trajectory of the electron beam e at the location where the trajectory is bent.

【0010】挿入光源では、両磁石列3,3がより接近
した状態であるほど、電子ビームeに作用する磁場
1,m2が強くなることに起因して、波長が短く且つ高
エネルギーの電磁波が放射光Xに含まれるようになるの
で、近年、図4から図6に示すように、真空チェンバ4
の内部に磁石列3,3を配置した挿入光源が用いられて
いる。
In the insertion light source, the closer the magnet arrays 3 and 3 are to each other, the stronger the magnetic fields m 1 and m 2 acting on the electron beam e are. Since electromagnetic waves are included in the radiated light X, in recent years, as shown in FIGS.
An insertion light source in which magnet rows 3 and 3 are arranged inside is used.

【0011】電子蓄積リング、あるいは直線加速器等に
組み込まれる真空チェンバ4は、略円筒形状のチェンバ
本体4aと、該チェンバ本体4aの一端及び他端のそれ
ぞれに固着された中心部に連結管4b,4cを有する孔
あき円盤形状の鏡板部4d,4eと、前記のチェンバ本
体4aの側部に設けた排気ポート4fとによって構成さ
れており、この真空チェンバ4は、架台(図示せず)あ
るいは隣接する他のチェンバ等に連結されることにより
支持されている。
A vacuum chamber 4 incorporated in an electron storage ring, a linear accelerator or the like comprises a chamber body 4a having a substantially cylindrical shape, and a connecting pipe 4b at the center fixed to one end and the other end of the chamber body 4a. It is composed of perforated disk-shaped end plate portions 4d and 4e having 4c and an exhaust port 4f provided on the side portion of the chamber body 4a. This vacuum chamber 4 is mounted on a stand (not shown) or adjacent It is supported by being connected to another chamber or the like.

【0012】複数の永久磁石2によって形成される磁石
列3は、真空チェンバ4の軸線方向に延びる嵌合溝5a
を有するホルダ5に支持されている。
The magnet array 3 formed by a plurality of permanent magnets 2 has a fitting groove 5a extending in the axial direction of the vacuum chamber 4.
It is supported by a holder 5 having.

【0013】各永久磁石2は、前記の嵌合溝5aにN極
が外部に露出する永久磁石2とS極が外部に露出する永
久磁石2とが隣接するように嵌合され、各永久磁石2の
ホルダ5から露出する面の左右両縁部に当接し且つホル
ダ5に固着された2条のリテナ6,6によりホルダ5に
拘束されている。
The permanent magnets 2 are fitted in the fitting groove 5a such that the permanent magnets 2 whose N poles are exposed to the outside and the permanent magnets 2 whose S poles are exposed to the outside are adjacent to each other. The two retainers 6 and 6 that are in contact with the left and right edges of the surface exposed from the holder 5 and are fixed to the holder 5 are restrained by the holder 5.

【0014】また、真空チェンバ4の上部及び下部に
は、磁石列3,3を互いに近接離反させるための移動機
構7U,7Lが設けられている。
Further, moving mechanisms 7U and 7L for moving the magnet rows 3 and 3 toward and away from each other are provided on the upper and lower portions of the vacuum chamber 4.

【0015】上部の移動機構7Uは、チェンバ本体4a
の頂部を該チェンバ本体4aの内部に向って昇降可能に
貫通する複数のロッド8Uと、チェンバ本体4aの内部
に配置され且つ上面が前記のロッド8Uの下端部に固着
された内部昇降ビーム9Uと、チェンバ本体4aの上方
に配置され且つ下面が前記のロッド8Uの上端部に固着
された支持部材10Uと、該支持部材10Uの上方に配
置され且つ下面が位置調整部材11Uを介して前記の支
持部材10Uの上面に連結された外部昇降ビーム12U
と、該外部昇降ビーム12Uの上方に配置され且つチェ
ンバ本体4aの軸線に向って延びるピストンロッド13
aの先端部が前記の外部昇降ビーム12Uの上面に固着
された流体圧シリンダ(アクチュエータ)13Uとから
構成されており、流体圧シリンダ13Uのシリンダ本体
13bは、架台等の固定構造物14に支持されている。
The upper moving mechanism 7U is a chamber body 4a.
A plurality of rods 8U penetrating the top of the chamber so as to move up and down toward the inside of the chamber body 4a, and an internal lifting beam 9U that is disposed inside the chamber body 4a and has its upper surface fixed to the lower end of the rod 8U. A supporting member 10U which is arranged above the chamber body 4a and whose lower surface is fixed to the upper end of the rod 8U, and a supporting member 10U which is arranged above the supporting member 10U and whose lower surface is positioned via the position adjusting member 11U. External lifting beam 12U connected to the upper surface of member 10U
And a piston rod 13 arranged above the external lifting beam 12U and extending toward the axis of the chamber body 4a.
The tip of a is composed of a fluid pressure cylinder (actuator) 13U fixed to the upper surface of the external lifting beam 12U, and the cylinder body 13b of the fluid pressure cylinder 13U is supported by a fixed structure 14 such as a pedestal. Has been done.

【0016】更に、チェンバ本体4aの内部には、各ロ
ッド8Uのチェンバ本体4aの内部に位置する部分の外
周面を周方向に被覆し且つ上端及び下端がチェンバ本体
4aの内周面頂部及び内部昇降ビーム9Uの上面に気密
に装着されたベローズ15Uが設けられ、また、チェン
バ本体4aの外部には、各ロッド8Uのチェンバ本体4
aの外部に位置する部分の外周面を周方向に被覆し且つ
下端及び上端がチェンバ本体4aの外周面頂部及び支持
部材10Uの下面に気密に装着されたベローズ16Uが
設けられている。
Furthermore, inside the chamber body 4a, the outer peripheral surface of the portion of each rod 8U located inside the chamber body 4a is circumferentially covered, and the upper and lower ends are the inner peripheral surface of the chamber body 4a. A bellows 15U, which is airtightly mounted on the upper surface of the lifting beam 9U, is provided, and the chamber body 4 of each rod 8U is provided outside the chamber body 4a.
A bellows 16U is provided, which covers the outer peripheral surface of the portion located outside of a in the circumferential direction and is hermetically attached to the top of the outer peripheral surface of the chamber body 4a and the lower surface of the support member 10U at the lower and upper ends.

【0017】下部の移動機構7Lは、チェンバ本体4a
の底部を該チェンバ本体4aの内部に向って昇降可能に
貫通する複数のロッド8Lと、チェンバ本体4aの内部
に上部の移動機構7Uの内部昇降ビーム9Uの下方に位
置するように配置された内部昇降ビーム9Lと、チェン
バ本体4aの下方に配置され支持部材10L、位置調整
部材11L、外部昇降ビーム12L、流体圧シリンダ1
3Lと、前記のロッド8Lを被覆するベローズ15L,
16Lを備え、前記の流体圧シリンダ13Lのピストン
ロッド13aの先端部を外部昇降ビーム12Lの下面に
固着し且つ流体圧シリンダ13Lのシリンダ本体13b
を固定構造物14に支持させることによって、先に述べ
た上部の移動機構7Uを、チェンバ本体4aの軸線を中
心として上下に反転させた構成をなしている。
The lower moving mechanism 7L is a chamber main body 4a.
A plurality of rods 8L penetrating through the bottom part of the chamber body 4a so as to be able to move up and down, and an interior arranged inside the chamber body 4a so as to be positioned below the internal lifting beam 9U of the upper moving mechanism 7U. Lifting beam 9L, support member 10L arranged below chamber body 4a, position adjusting member 11L, external lifting beam 12L, fluid pressure cylinder 1
3L and bellows 15L for covering the rod 8L,
16L, the tip end of the piston rod 13a of the fluid pressure cylinder 13L is fixed to the lower surface of the external lifting beam 12L, and the cylinder body 13b of the fluid pressure cylinder 13L is provided.
Is supported by the fixed structure 14, the upper moving mechanism 7U described above is vertically inverted about the axis of the chamber body 4a.

【0018】前記の一対の磁石列3,3を支持するホル
ダ5,5は、上述した上部の移動機構7Uの内部昇降ビ
ーム9U及び下部の移動機構7Lの内部昇降ビーム9L
に、極性が異なる永久磁石2が対峙するように取り付け
られている。
The holders 5 and 5 for supporting the pair of magnet rows 3 and 3 have internal lifting beams 9U of the upper moving mechanism 7U and internal lifting beams 9L of the lower moving mechanism 7L described above.
The permanent magnets 2 having different polarities are attached so as to face each other.

【0019】真空チェンバ4を構成する各部材、磁石列
3を支持するホルダ5、両移動機構7U,7Lを構成す
る各部材は、SUS316L(ステンレス鋼)等の磁化
されない材質によって形成され、真空チェンバ4の内部
には、その下方から上方へ垂直に向う磁場m1と、上方
から下方へ水平に向う磁場m2とが電子ビームeの進行
方向に対して交互に生じている。
Each member forming the vacuum chamber 4, the holder 5 supporting the magnet array 3, and each member forming both moving mechanisms 7U, 7L are made of a non-magnetized material such as SUS316L (stainless steel). In the inside of 4, a magnetic field m 1 that vertically extends from the lower side thereof and a magnetic field m 2 that horizontally extends from the upper side to the lower side thereof are alternately generated in the traveling direction of the electron beam e.

【0020】図4から図6に示す挿入光源によって放射
光X(図7参照)を発生させる際には、真空チェンバ4
が組み込まれている電子蓄積リング、あるいは直線加速
器等の内部を高真空状態に減圧したうえ、電子発生装置
等によって真空チェンバ4の内部に向って電子ビームe
を出射させると、該電子ビームeは、先に述べた磁場m
1,m2の影響によるローレンツ力を受けて真空チェンバ
4の内部を左右に蛇行しながら進行し、その結果、電子
ビームeの軌道が屈曲する箇所において電子ビームeの
軌道の接線方向に放射光Xが発生する。
When the emitted light X (see FIG. 7) is generated by the insertion light source shown in FIGS. 4 to 6, the vacuum chamber 4 is used.
The inside of an electron storage ring or a linear accelerator, etc., in which is installed is depressurized to a high vacuum state, and then an electron beam e is directed toward the inside of the vacuum chamber 4 by an electron generator or the like.
When the electron beam e is emitted,
1 and m 2 receives the Lorentz force to meander in the vacuum chamber 4 while meandering left and right, and as a result, the radiated light is tangential to the trajectory of the electron beam e at the position where the trajectory of the electron beam e bends. X is generated.

【0021】放射光Xの使用目的に応じて放射光Xの波
長等を変更する際には、上部の移動機構7Uの流体圧シ
リンダ13Uに対して流体圧を付与し、外部昇降ビーム
12U、位置調整部材11U、支持部材10U、ロッド
8U、内部昇降ビーム9Uを介して一方の磁石列3を支
持しているホルダ5を下降あるいは上昇させることによ
り、一方の磁石列3をチェンバ本体4aの軸線に対して
近接あるいは離反させる。
When the wavelength of the emitted light X or the like is changed according to the purpose of use of the emitted light X, fluid pressure is applied to the fluid pressure cylinder 13U of the upper moving mechanism 7U, and the external elevating beam 12U, position. By lowering or raising the holder 5 supporting one magnet row 3 via the adjusting member 11U, the supporting member 10U, the rod 8U, and the internal elevating beam 9U, the one magnet row 3 is aligned with the axis of the chamber body 4a. Move or move away from each other.

【0022】また、同時に、下部の移動機構7Lの流体
圧シリンダ13Lに対して流体圧を付与し、外部昇降ビ
ーム12L、位置調整部材11L、支持部材10L、ロ
ッド8L、内部昇降ビーム9Lを介して他方の磁石列3
を支持しているホルダ5を上昇あるいは下降させること
により、他方の磁石列3をチェンバ本体4aの軸線に対
して近接あるいは離反させる。
At the same time, a fluid pressure is applied to the fluid pressure cylinder 13L of the lower moving mechanism 7L via the external lifting beam 12L, the position adjusting member 11L, the support member 10L, the rod 8L, and the internal lifting beam 9L. The other magnet row 3
By raising or lowering the holder 5 supporting the magnet, the other magnet array 3 is moved toward or away from the axis of the chamber body 4a.

【0023】これによって、一対の磁石列3,3が互い
に近接あるいは離反し、真空チェンバ4の内部を進行す
る電子ビームeに作用する磁場m1,m2の強さが変化す
ることになる。
As a result, the pair of magnet arrays 3 and 3 come close to or away from each other, and the strengths of the magnetic fields m 1 and m 2 acting on the electron beam e traveling inside the vacuum chamber 4 change.

【0024】[0024]

【発明が解決しようとする課題】ところが、磁石列3を
構成する永久磁石2は、粉粒体状のセラミックスを焼成
固化させた焼成物で微視的にみると多孔質体であるた
め、図4から図6に示すように、電子蓄積リング、ある
いは直線加速器等に組み込まれた真空チェンバ4の内部
に磁石列3,3を内装した挿入光源では、電子蓄積リン
グ、あるいは直線加速器等の内部を一旦高真空状態に減
圧したとしても、多孔質体である永久磁石2から空気等
のガスが徐々に放出される。
However, since the permanent magnets 2 constituting the magnet array 3 are porous materials when viewed microscopically as a fired product obtained by firing and solidifying powdery granular ceramics, As shown in FIGS. 4 to 6, in the insertion light source in which the magnet rows 3 and 3 are housed inside the vacuum chamber 4 incorporated in the electron storage ring or the linear accelerator, the inside of the electron storage ring or the linear accelerator is Even if the pressure is once reduced to a high vacuum state, gas such as air is gradually released from the permanent magnet 2 which is a porous body.

【0025】このように永久磁石2からガスが放出され
ると、真空チェンバ4をはじめとする電子蓄積リング、
あるいは直線加速器等の内部を電子ビームeが進行する
のに最適な高真空状態に保つことが困難になり、放射光
X(図7参照)を効率よく発生させることができなくな
る。
When gas is released from the permanent magnet 2 in this manner, an electron storage ring including the vacuum chamber 4
Alternatively, it becomes difficult to maintain the inside of the linear accelerator or the like in a high vacuum state that is optimal for the electron beam e to travel, and the radiated light X (see FIG. 7) cannot be efficiently generated.

【0026】本発明は上述した実情に鑑みてなしたもの
で、磁石からのガスの放出を抑止することが可能な挿入
光源を提供することを目的としている。
The present invention has been made in view of the above situation, and an object thereof is to provide an insertion light source capable of suppressing the emission of gas from a magnet.

【0027】[0027]

【課題を解決するための手段】上記目的を達成するため
に本発明では、電子ビームが通過する真空チェンバと、
該真空チェンバの内部に電子ビームの通過位置を挟むよ
うに対向配置された複数の同形状の磁石よりなる一対の
磁石列とを備え、極性が異なる磁石が電子ビームの通過
位置を挟んで対向し且つ真空チェンバの一側から他側へ
電子ビームの進行方向に対して直交するように向う磁場
と真空チェンバの他側から一側へ電子ビームの進行方向
に対して直交するように向う磁場とが電子ビームの進行
方向に交互に形成されるように、前記の磁石列を構成す
る磁石を配置した挿入光源において、各磁石列の露出面
を磁化されない材質の薄板材からなるシール部材によっ
て気密に被覆している。
In order to achieve the above object, the present invention provides a vacuum chamber through which an electron beam passes,
The vacuum chamber is provided with a pair of magnet rows composed of a plurality of magnets of the same shape that are opposed to each other so as to sandwich the electron beam passage position, and magnets having different polarities face each other across the electron beam passage position. In addition, a magnetic field directed from one side of the vacuum chamber to the other side orthogonal to the traveling direction of the electron beam and a magnetic field directed from the other side of the vacuum chamber to the other side orthogonal to the traveling direction of the electron beam. In the insertion light source in which the magnets forming the magnet rows are arranged so as to be alternately formed in the traveling direction of the electron beam, the exposed surface of each magnet row is hermetically covered with a sealing member made of a thin plate material that is not magnetized. are doing.

【0028】[0028]

【作用】本発明の挿入光源においては、真空チェンバの
内部に配置されている磁石列を構成する磁石の露出面を
磁化されない材質の薄板材からなるシール部材により気
密に被覆し、真空チェンバの内部を減圧する際に磁石か
らガスが放出されることを抑止する。
In the insertion light source of the present invention, the exposed surface of the magnets forming the magnet array arranged inside the vacuum chamber is airtightly covered by the sealing member made of a thin plate material that is not magnetized, and the inside of the vacuum chamber is covered. It suppresses the release of gas from the magnet when the pressure is reduced.

【0029】[0029]

【実施例】以下、本発明の実施例を図面を参照しつつ説
明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0030】図1から図3は本発明の挿入光源の一実施
例を示すもので、本実施例における磁石列3、真空チェ
ンバ4、ホルダ5、移動機構7U,7L等の基本的な構
成は先に述べた従来例(図4から図6参照)と同一であ
り、図中、図4から図6と同一の符号を付した部分は同
一物を表している。
FIGS. 1 to 3 show an embodiment of the insertion light source of the present invention. The basic structure of the magnet array 3, the vacuum chamber 4, the holder 5, the moving mechanisms 7U, 7L, etc. in this embodiment is as follows. This is the same as the above-mentioned conventional example (see FIGS. 4 to 6), and in the figure, the parts denoted by the same reference numerals as those in FIGS. 4 to 6 represent the same things.

【0031】本実施例では、複数の永久磁石2より構成
される磁石列3のホルダ5より露出している部分、すな
わち、磁石列3の一端部(電子ビームeの進行方向上流
側の端部)及び他端部(電子ビームeの進行方向下流側
の端部)と他の磁石列3に対向する部分を一体的に被覆
するシール部材17を設け、該シール部材17の外縁部
を電子ビーム溶接等の手段によってホルダ5に気密に固
着している。
In this embodiment, the portion of the magnet array 3 composed of a plurality of permanent magnets 2 exposed from the holder 5, that is, one end of the magnet array 3 (the end on the upstream side in the traveling direction of the electron beam e). ) And the other end (the end on the downstream side in the traveling direction of the electron beam e) and a portion facing the other magnet row 3 are integrally provided with a seal member 17, and the outer edge portion of the seal member 17 is provided with an electron beam. The holder 5 is airtightly fixed by means such as welding.

【0032】このシール部材17は、SUS316L
(ステンレス鋼)等の磁化されない材質の薄板材によっ
て形成されている。
This seal member 17 is made of SUS316L.
It is made of a thin plate material such as (stainless steel) that is not magnetized.

【0033】図1から図3に示す挿入光源によって放射
光X(図7参照)を発生される際には、真空チェンバ4
が組み込まれている電子蓄積リング、あるいは直線加速
器等の内部を高真空状態に減圧したうえ、電子発生装置
等によって真空チェンバ4の内部に向って電子ビームe
を出射させると、該電子ビームeが磁場m1,m2の影響
によるローレンツ力を受けて真空チェンバ1の内部を左
右に蛇行しながら進行し、その結果、電子ビームeの軌
道が屈曲する箇所において電子ビームeの軌道の接線方
向に放射光Xが発生する。
When the emitted light X (see FIG. 7) is generated by the insertion light source shown in FIGS. 1 to 3, the vacuum chamber 4
The inside of an electron storage ring or a linear accelerator, etc., in which is installed is depressurized to a high vacuum state, and then an electron beam e is directed toward the inside of the vacuum chamber 4 by an electron generator or the like.
When the electron beam e is emitted, the electron beam e undergoes Lorentz force due to the influence of the magnetic fields m 1 and m 2 and travels inside the vacuum chamber 1 while meandering left and right, and as a result, the orbit of the electron beam e bends. At X, radiation light X is generated in the tangential direction of the trajectory of the electron beam e.

【0034】また、放射光Xの使用目的に応じて放射光
Xの波長等を変更する際には、先に述べた従来例(図4
から図6参照)と同様に、流体圧シリンダ13U,13
Lを作動させることによって、一対の磁石列3,3を近
接あるいは離反させ、真空チェンバ4の内部を進行する
電子ビームeに作用する磁場m1,m2の強さを調整す
る。
When changing the wavelength of the emitted light X or the like according to the purpose of use of the emitted light X, the conventional example described above (see FIG. 4) is used.
From FIG. 6), the fluid pressure cylinders 13U, 13
By operating L, the pair of magnets 3 and 3 are moved toward or away from each other, and the strengths of the magnetic fields m 1 and m 2 acting on the electron beam e traveling inside the vacuum chamber 4 are adjusted.

【0035】このとき、本実施例においては、磁石列3
の一端部及び他端部と他の磁石列3に対向する部分がシ
ール部材17によって被覆されているので、真空チェン
バ4が組み込まれている電子蓄積リング、あるいは直線
加速器等の内部を高真空状態に減圧しても、各磁石列
3,3を構成する永久磁石2から空気等のガスが放出さ
れない。
At this time, in this embodiment, the magnet array 3
Since one end portion and the other end portion of the magnet and a portion facing the other magnet row 3 are covered with the seal member 17, the inside of the electron storage ring in which the vacuum chamber 4 is incorporated, or the linear accelerator is in a high vacuum state. Even if the pressure is reduced to 1, the gas such as air is not released from the permanent magnets 2 forming the magnet rows 3 and 3.

【0036】従って、真空チェンバ4をはじめとする電
子蓄積リング、あるいは直線加速器等の内部を電子ビー
ムeが進行するのに最適な状態に保つことが可能にな
り、放射光X(図7参照)を効率よく発生させることが
できる。
Therefore, it is possible to keep the inside of the electron storage ring including the vacuum chamber 4 or the linear accelerator in an optimum state for the electron beam e to travel, and the radiated light X (see FIG. 7). Can be efficiently generated.

【0037】なお、本発明の挿入光源は上述した実施例
のみに限定されるものではなく、シール部材をアルミニ
ウム合金等のステンレス鋼以外の磁化されない材質によ
って形成させる構成とすること、その他、本発明の要旨
を逸脱しない範囲において種々変更を加え得ることは勿
論である。
The insertion light source of the present invention is not limited to the above-mentioned embodiment, and the seal member is made of a non-magnetizable material other than stainless steel such as aluminum alloy, and the other aspects of the present invention. It goes without saying that various changes can be made without departing from the scope of the invention.

【0038】[0038]

【発明の効果】以上述べたように、本発明の挿入光源に
よれば、磁石列を構成する磁石の露出部分を磁化されな
い材質の薄板材からなるシール部材によって被覆してい
るので、真空チェンバを高真空状態に減圧しても、磁石
からガスが放出されず、真空チェンバの内部を電子ビー
ムが進行するのに最適な状態に保つことが可能になり、
放射光を効率よく発生させることができる、という優れ
た効果を奏し得る。
As described above, according to the insertion light source of the present invention, the exposed portion of the magnets forming the magnet array is covered with the sealing member made of a thin plate material that is not magnetized, so that the vacuum chamber is provided. Even if the pressure is reduced to a high vacuum state, no gas is released from the magnet, and it becomes possible to keep the inside of the vacuum chamber in an optimal state for the electron beam to travel.
The excellent effect that radiated light can be efficiently generated can be exhibited.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の挿入光源の一実施例を示す横断面図で
ある。
FIG. 1 is a cross-sectional view showing an embodiment of an insertion light source of the present invention.

【図2】本発明の挿入光源の一実施例を示す縦断面図で
ある。
FIG. 2 is a vertical sectional view showing an embodiment of the insertion light source of the present invention.

【図3】図1に示す永久磁石とホルダとシール部材の詳
細を示す横断面図である。
FIG. 3 is a cross-sectional view showing details of the permanent magnet, the holder, and the seal member shown in FIG.

【図4】従来の挿入光源の一実施例を示す横断面図であ
る。
FIG. 4 is a cross-sectional view showing an example of a conventional insertion light source.

【図5】従来の挿入光源の一実施例を示す縦断面図であ
る。
FIG. 5 is a vertical sectional view showing an example of a conventional insertion light source.

【図6】図4に示す永久磁石とホルダの詳細を示す横断
面図である。
6 is a transverse cross-sectional view showing details of a permanent magnet and a holder shown in FIG.

【図7】挿入光源の原理を示す部分切断斜視図である。FIG. 7 is a partially cutaway perspective view showing the principle of the insertion light source.

【符号の説明】[Explanation of symbols]

2 磁石 3 磁石列 4 真空チェンバ 17 シール部材 e 電子ビーム m1 磁場 m2 磁場2 magnets 3 magnet array 4 vacuum chamber 17 sealing member e electron beam m 1 magnetic field m 2 magnetic field

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 電子ビームが通過する真空チェンバと、
該真空チェンバの内部に電子ビームの通過位置を挟むよ
うに対向配置された複数の同形状の磁石よりなる一対の
磁石列とを備え、極性が異なる磁石が電子ビームの通過
位置を挟んで対向し且つ真空チェンバの一側から他側へ
電子ビームの進行方向に対して直交するように向う磁場
と真空チェンバの他側から一側へ電子ビームの進行方向
に対して直交するように向う磁場とが電子ビームの進行
方向に交互に形成されるように、前記の磁石列を構成す
る磁石を配置した挿入光源において、各磁石列の露出面
を磁化されない材質の薄板材からなるシール部材によっ
て気密に被覆したことを特徴とする挿入光源。
1. A vacuum chamber through which an electron beam passes,
The vacuum chamber is provided with a pair of magnet rows composed of a plurality of magnets of the same shape that are opposed to each other so as to sandwich the electron beam passage position, and magnets having different polarities face each other across the electron beam passage position. In addition, a magnetic field directed from one side of the vacuum chamber to the other side orthogonal to the traveling direction of the electron beam and a magnetic field directed from the other side of the vacuum chamber to the other side orthogonal to the traveling direction of the electron beam. In the insertion light source in which the magnets forming the magnet rows are arranged so as to be alternately formed in the traveling direction of the electron beam, the exposed surface of each magnet row is hermetically covered with a sealing member made of a thin plate material that is not magnetized. An insertion light source characterized by the above.
JP6776995A 1995-03-27 1995-03-27 Insertion light source Pending JPH08264299A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6776995A JPH08264299A (en) 1995-03-27 1995-03-27 Insertion light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6776995A JPH08264299A (en) 1995-03-27 1995-03-27 Insertion light source

Publications (1)

Publication Number Publication Date
JPH08264299A true JPH08264299A (en) 1996-10-11

Family

ID=13354489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6776995A Pending JPH08264299A (en) 1995-03-27 1995-03-27 Insertion light source

Country Status (1)

Country Link
JP (1) JPH08264299A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019175766A (en) * 2018-03-29 2019-10-10 日立金属株式会社 Insertion light source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019175766A (en) * 2018-03-29 2019-10-10 日立金属株式会社 Insertion light source

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