JPH08262207A - Light reflecting plate, light reflecting plate for reflection type liquid crystal display device, and light-reflecting electrode plate for reflection type liquid crystal display device - Google Patents

Light reflecting plate, light reflecting plate for reflection type liquid crystal display device, and light-reflecting electrode plate for reflection type liquid crystal display device

Info

Publication number
JPH08262207A
JPH08262207A JP7088795A JP8879595A JPH08262207A JP H08262207 A JPH08262207 A JP H08262207A JP 7088795 A JP7088795 A JP 7088795A JP 8879595 A JP8879595 A JP 8879595A JP H08262207 A JPH08262207 A JP H08262207A
Authority
JP
Japan
Prior art keywords
light
thin film
transparent
electrode
liquid crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7088795A
Other languages
Japanese (ja)
Other versions
JP3498763B2 (en
Inventor
Kenzo Fukuyoshi
Osamu Koga
修 古賀
健蔵 福吉
Original Assignee
Toppan Printing Co Ltd
凸版印刷株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd, 凸版印刷株式会社 filed Critical Toppan Printing Co Ltd
Priority to JP08879595A priority Critical patent/JP3498763B2/en
Publication of JPH08262207A publication Critical patent/JPH08262207A/en
Application granted granted Critical
Publication of JP3498763B2 publication Critical patent/JP3498763B2/en
Anticipated expiration legal-status Critical
Application status is Expired - Fee Related legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553Reflecting elements

Abstract

PURPOSE: To provide a light reflecting plate which uses silver having excellent reflection characteristics of light and does not deteriorate with time, to provide a light- reflecting plate for a reflection type liquid crystal display device, and to provide a light-reflecting electrode plate for a liquid crystal display device.
CONSTITUTION: This light-reflecting electrode plate 1 consists of a glass substrate 11, adhesive layer 12 formed into an electrode shape accurately positioned, silver light-reflecting metal electrode 13, transparent inorg. thin film 14, and moisture-resistant transparent thin film 15 which covers these three layers 12-14 to protect the surface and side faces of the layers. The adhesive layer and the transparent inorg. thin film consist of indium oxide thin films with addition of 3atom% zirconium oxide. The moisture-resistant transparent thin film 15 consists of silicon oxide. The transparent inorg. thin film 14 is firmly adhered to both of the light-reflecting metal thin film 13 and the moisture-resistant transparent thin film 15 to integrate these three layers. Further, the moisture-resistant transparent thin film 15 firmly adhered to the layers protects the light-reflecting metal thin film 13 from sulfur compds. or water content in air and improves the storage stability of the plate.
COPYRIGHT: (C)1996,JPO

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は、光反射板と反射型液晶表示装置用光反射板並びに反射型液晶表示装置用光反射性電極板に係り、特に、光反射特性に優れた銀が適用された経時劣化のない保存安定性に優れた光反射板と反射型液晶表示装置用光反射板並びに反射型液晶表示装置用光反射性電極板の改良に関するものである。 BACKGROUND OF THE INVENTION The present invention relates to an optical reflector and the reflective liquid crystal display device for light reflector and the reflective liquid crystal display device light reflective electrode plates, in particular, silver applied with excellent light reflection property It has been to an improvement of the deterioration over time without storage stability superior light reflection plate reflective liquid crystal display device for light reflector and the reflective liquid crystal display device light reflective electrode plates.

【0002】 [0002]

【従来の技術】液晶表示装置は、画素毎に電圧の印加を行える電極が配設された一対の電極板とこれ等電極板間に封入された液晶物質とでその主要部が構成され、上記両電極間に電圧を印加することにより液晶物質の配向状態を画素毎に変化させてこの液晶物質を透過する光の偏光面を制御すると共に、偏光フィルムによりその透過・ A liquid crystal display device is configured is a main part in the liquid crystal material electrodes that enables the application of the voltage for each pixel is sealed disposed a pair of electrode plates and which like the electrode plates, the by changing the alignment state of the liquid crystal material in each pixel by applying a voltage between the electrodes to control the polarization plane of the light transmitted through the liquid crystal material, the transmitting and the polarizing film
不透過を制御して画面表示を行うものである。 And it performs screen display by controlling the opacity. そして、 And,
上記一対の電極板のうちの一方にカラーフィルター層を有する電極板を適用することによりカラー画面の表示が可能となる。 Display color screen is made possible by applying an electrode plate having one color filter layer of the pair of electrode plates.

【0003】ところで、この種の液晶表示装置としては、液晶表示装置の背面側に位置する電極板(以下背面電極板と称する)の裏面若しくは側面に光源(ランプ) Meanwhile, as the liquid crystal display device of this type, the electrode plate positioned on the rear side of the liquid crystal display device back surface or light source side (hereinafter referred to as the back electrode plate) (Lamp)
を配置し、背面電極板側から光線を入射させるバックライト型あるいはライトガイド型のランプ内蔵式透過型液晶表示装置が広く普及している。 Was placed, back light type or a light guide type lamps built-transmission type liquid crystal display device for entering the light from the back electrode plate side are widely used.

【0004】しかし、このランプ内蔵式透過型液晶表示装置においてはそのランプによる消費電力が大きくCR However, power consumption by the lamp in the lamp built-transmission type liquid crystal display device is large CR
Tやプラズマディスプレイ等他の種類のディスプレイと略同等の電力を消費するため、液晶表示装置本来の低消費電力といった特徴を損ない、かつ、携帯先での長時間の利用が困難になるという欠点を有していた。 For consuming T, a plasma display, or the like other kinds of displays substantially equal power, impair characteristics such as a liquid crystal display device original low power consumption, and the long drawback becomes difficult use on mobile destination It had.

【0005】他方、このようなランプを内蔵することなく装置の観察者側に位置する電極板(観察者側電極板と称する)から室内光や自然光等の外光を入射させ、かつ、この入射光を光反射性背面電極板で反射させると共に、この反射光で画面表示する反射型液晶表示装置も知られている。 [0005] On the other hand, such an electrode plate positioned on the viewer side of the device without a built-in lamp (referred to as a viewer-side electrode plate) is incident external light such as indoor light or natural light from and the incident together to reflect light by the light reflective back electrode plate is also known a reflection type liquid crystal display device for screen display in the reflected light. そして、この反射型液晶表示装置ではランプを利用しないことから消費電力が小さく、携帯先での長時間駆動に耐えるという利点を有している。 Then, there is an advantage that the power consumption since it does not use the ramp in the reflection type liquid crystal display device is small, withstand long driving at a mobile target.

【0006】ところで、このような反射型液晶表示装置としては、例えば、図4に示すように光反射板eを背面電極板aの外側に配設しかつ2枚の偏光フィルムd,f [0006] As such a reflective liquid crystal display device, for example, the polarizing film d two disposed vital to the outside of the back electrode plate a light reflecting plate e as shown in FIG. 4, f
を使用するタイプの反射型液晶表示装置や、図5に示すように光反射板eを背面電極板aの外側に配設しかつ偏光フィルムfを1枚だけ使用したタイプの反射型液晶表示装置、あるいは図6に示すように液晶物質cに電圧を印加する電極として光反射性金属電極a'2を適用する反射型液晶表示装置等が知られている。 The type and the reflection type liquid crystal display device used, the type of reflective liquid crystal display device using only one of the provided life-and-death polarizing film f the light reflection plate e outside of the back electrode plate a, as shown in FIG. 5 , or a reflective type liquid crystal display device or the like for applying a light reflective metal electrode a'2 is known as an electrode for applying a voltage to the liquid crystal material c as shown in FIG.

【0007】以下順に説明すると、図4に示された反射型液晶表示装置は液晶物質cに電圧を印加する透明電極a2を基板a1上に備える背面電極板aと、この背面電極板aに対向して配置され基板b1上に透明電極b2を備える観察者側電極板bと、これら両電極板a、bの間に封入された液晶物質cと、上記背面電極板aの基板a [0007] will be described in turn below, a reflection type liquid crystal display device shown in FIG. 4 is a back electrode plate a having the transparent electrode a2 for applying a voltage to the liquid crystal material c on the substrate a1, facing the back electrode plate a and the observer-side electrode plate b having a transparent electrode b2 on the substrate b1 disposed, the both electrode plates a, a liquid crystal material c that is enclosed between the b, the substrate a of the back electrode plate a
1の裏面に偏光フィルムdを介して貼着された光反射板eと、上記観察者側電極板b表面に貼着された偏光フィルムfとでその主要部が構成され、観察者側電極板b側から入射した外光を上記光反射板eで反射させて画面表示するものである。 And the light reflection plate e which is bonded via a polarizing film d on the rear surface of the 1, a main part in a stuck been polarizing film f to the observer's side electrode plate b surface is configured, the observer-side electrode plate the external light incident from the b-side is to screen display is reflected by the light reflection plate e. 尚、上記光反射板eとしては、光散乱性を付与して表示画面の視野角を拡大させるため、例えば、エンボス加工して細かい凹凸を設けたアルミニウム箔や、機械的に表面を粗化して設けた有機フィルムの細かい凹凸面にアルミニウム薄膜を成膜したもの等が適用されている。 As the above-mentioned light reflector e, in order to widen the viewing angle of the display screen by applying a light scattering, for example, aluminum foil or provided with fine irregularities by embossing, by roughening the mechanical surface such as those of aluminum thin film was deposited is applied to a fine uneven surface of provided organic films. また、図4においてg及びhは必要に応じて設けられる位相差フィルムを示しており、説明の便のため液晶物質cの配向膜はその図示を省略している。 Further, g and h in FIG. 4 shows the retardation film to be provided as needed, the orientation film of the liquid crystal material c for the convenience of explanation are not shown.

【0008】また、図5に示された反射型液晶表示装置は、偏光フィルムdが設けられていない点を除き図4に示された反射型液晶表示装置と略同一である。 [0008] The reflection type liquid crystal display device shown in FIG. 5 is substantially the same as the reflective type liquid crystal display device shown points polarizing film d is not provided, except Figure 4.

【0009】次に、図6に示された光反射性金属電極を適用した反射型液晶表示装置は、光反射性金属電極a'2 [0009] Next, the reflection type liquid crystal display device using the light reflective metal electrode shown in FIG. 6, the light reflective metal electrode a'2
を備える背面電極板(光反射性電極板)aと、これに対向して配置され透明電極b2を備える観察者側電極板b Viewer-side electrode plate b having a back electrode plate (light reflective electrode plate) a, a transparent electrode b2 disposed opposite thereto with a
と、これら両電極板a、bの間に封入された液晶物質c When these electrode plates a, the liquid crystal material c that is enclosed between b
とでその主要部が構成され、観察者側電極板b側から入射した外光を光反射性金属電極a'2で反射させて画面表示するものである。 Its main part is constituted by the one in which the external light incident from the observer side electrode plate b side is reflected by the light reflective metal electrode a'2 to be displayed on the screen. 尚、上記光反射性金属電極a'2としては表面に凹凸が設けられたアルミニウム薄膜や銀薄膜等が適用されている。 Incidentally, the aluminum thin film and a silver thin film or the like is applied to irregularities in the surface are provided as the light reflective metal electrode a'2. また、図6中、b3は光散乱層を示している。 Further, in FIG. 6, b3 indicates the light scattering layer.

【0010】ところで、図4に示すような偏光フィルムを2枚使用するタイプの反射型液晶表示装置においては、外光は2枚の偏光フィルムd、fを2度づつ通過するためその通過の度に減衰し易く、その光利用効率が3 By the way, in the type of reflective liquid crystal display device using two polarizing films as shown in FIG. 4, the external light is two polarizing films d, time of passage for passing increments twice f easily attenuated, the light use efficiency is 3
0〜15%程度に低下して明るい画面表示を困難にしている。 Making it difficult to bright screen display and reduced to about 0-15%. これに対し、図5や図6に示された反射型液晶表示装置においては偏光フィルムを1枚しか使用しないため光減衰が少なく、明るい画面表示が可能である。 In contrast, less light attenuation because only one sheet of polarizing film is not used in the reflective type liquid crystal display device shown in FIGS. 5 and 6, it is possible bright screen display. このように明るい画面表示を得るためには偏光フィルムを1 1 a polarizing film in order to obtain such bright screen display
枚だけ使用するタイプ(偏光フィルム1枚タイプ)の反射型液晶表示装置が適している。 Only the reflection type liquid crystal display device of a type used (polarizing films one type) are suitable sheets.

【0011】そして、偏光フィルム1枚タイプの反射型液晶表示装置においては、一般に、ノーマリーホワイト表示方式が採用されている。 [0011] In the reflection type liquid crystal display device of one type polarizing film are generally normally white display system is adopted. 以下、図5に従って説明すると、両電極a2、b2に電圧を印加しない状態では、 Explaining to FIG 5, in a state where the both electrodes a2, b2 no voltage is applied,
観察者側電極板b側から入射した外光はまず偏光フィルムfを透過して直線偏光に変化し、位相差フィルムg及びツイストされた液晶物質cによって偏光面が回転され、背面電極板aを通過した後、光反射板eで反射されて偏光面が反転し、更に液晶物質cと位相差フィルムg External light incident from the observer side electrode plate b side is changed to linearly polarized light is first transmitted through the polarizing film f, the polarization plane is rotated by the phase difference film g and twisted liquid crystal material c, and back electrode plate a after passing through is reflected by the light reflection plate e polarization plane is reversed, further liquid crystal material c and the phase difference film g
で回転され、偏光フィルムfを透過する。 In the rotation, it passes through the polarizing film f. これに対し、 On the other hand,
両電極a2、b2に電圧が印加された場合には、位相差フィルムgを透過した光線は、その偏光面を維持したまま液晶物質cと背面電極板aを透過し、光反射板eで反射されて偏光面が反転し、再度、位相差フィルムgにより回転され、偏光フィルムfで遮断される。 When a voltage is applied to the electrodes a2, b2 is light transmitted through the retardation film g is transmitted through the back electrode plate a liquid crystal material c while maintaining the polarization plane, reflected by the light reflecting plate e is polarization plane is reversed, again, is rotated by the phase difference film g, it is blocked by the polarizing film f.

【0012】尚、図6に示された光反射性金属電極タイプの反射型液晶表示装置においては、上記光反射板eの代わりに光反射性金属電極a'2によって外光が反射される他は図5に示された液晶表示装置と同様である。 [0012] Incidentally, in the reflection type liquid crystal display device of a light reflective metal electrode type shown in Figure 6, other external light is reflected by the light reflective metal electrode a'2 in place of the light reflector e is the same as the liquid crystal display device shown in FIG.

【0013】ところで、このような偏光フィルム1枚タイプの反射型液晶表示装置において上記光反射板eや光反射性金属電極a'2としてアルミニウム薄膜を適用した場合、その光反射率は入射光の偏光面と入射角とに応じて変化する。 By the way, as the light reflector e and light reflective metal electrode a'2 reflection type liquid crystal display device of such a polarizing film one type is applied an aluminum thin film, the light reflectance of the incident light changes depending on the polarization plane and angle of incidence. すなわち、アルミニウム薄膜におけるS偏光の反射率S AlとP偏光の反射率P Alは、入射角θに応じ図7に示すように大きく変化する。 That is, the reflectance P Al of the reflectance of S-polarized light in the aluminum thin S Al and P-polarized light is largely changed as shown in accordance with Figure 7 to the incident angle theta. そして、入射角θ Then, the incident angle θ
の大きい斜め方向からアルミニウム薄膜製の光反射性金属電極に直線偏光が入射して反射された場合、そのS偏光成分の反射率S AlとP偏光成分の反射率P Alとが互いに異なることから、反射光中に占めるS偏光とP偏光の比率が上記入射光中の比率と異なため、反射光は入射光と異なる偏光面を有することになる。 Big obliquely to the light reflective metal electrode made of aluminum thin film if the linearly polarized light is reflected by the incident, since the reflectance P Al reflectance S Al and P-polarized light component of the S-polarized light component different from each other , the ratio of S-polarized light and P-polarized light occupying the reflected light for different and ratio in the incident light, the reflected light will have a polarization plane different from that of the incident light. そして、このように反射光の偏光面が入射光の偏光面と異なりかつその凹凸表面に対する入射角に応じて変化するため、反射光の偏光面の制御及びその透過・不透過の制御が困難となり、表示画面のコントラストが低下し易い欠点があった。 And thus for polarization plane of the reflected light changes depending on the incident angle to the polarization plane and different and its uneven surface of the incident light, the control of the control and transmission and non-transmission of the polarization plane of the reflected light becomes difficult , the contrast of the display screen there is likely to disadvantage decreases.

【0014】これに対し、偏光フィルム1枚タイプの反射型液晶表示装置において上記光反射板eや光反射性金属電極a'2として銀薄膜が適用された場合には、図7に示すようにそのS偏光の反射率S AgとP偏光の反射率P [0014] In contrast, when the silver thin film is applied as the light reflection plate e and a light reflective metal electrode a'2 reflection type liquid crystal display device of one type polarizing film as shown in FIG. 7 reflectance P of the S-polarized light reflectance S Ag and P-polarized light
Agがほぼ等しく、しかも極めて高い反射率を有するため、明るくしかもコントラストの高い画面表示が可能となる。 Ag is approximately equal, and since having a very high reflectivity, bright and which yet has high screen contrast.

【0015】 [0015]

【発明が解決しようとする課題】このように銀薄膜は優れた光反射特性を有するが、その反面、空気中に存在するイオウ化合物や水分と化合しその表面に硫化物や酸化物が生成されて変色し易く、液晶表示装置の製造工程において銀薄膜の光反射率が低下し液晶表示装置の表示画面の明るさを低下させてしまうことがあった。 THE INVENTION Problems to be Solved] silver thin in this way has excellent light reflecting properties, on the other hand, sulfides or oxides are produced combine with sulfur compounds and moisture present in the air on its surface easily discolored Te, the light reflectance of the silver thin film in the manufacturing process of the liquid crystal display device was sometimes resulting in lowering the brightness of the reduced display screen of the liquid crystal display device.

【0016】本発明はこのような問題点に着目してなされたもので、その課題とするところは、入射光の入射角と偏光面に拘らず高い光反射率を有する銀の薄膜を適用し、しかも経時劣化がなく保存安定性に優れた光反射板と反射型液晶表示装置用光反射板並びに反射型液晶表示装置用光反射性電極板を提供することにある。 [0016] The present invention has been made in view of such problems, and has as its object to apply a thin film of silver having high light reflectance regardless of the incident angle and the polarization plane of the incident light , moreover there is provided a light reflecting plate having excellent storage stability without deterioration over time reflection-type liquid crystal display device for light reflector and the reflective liquid crystal display device light reflective electrode plates.

【0017】 [0017]

【課題を解決するための手段】すなわち、請求項1記載の発明に係る光反射板は、基板上に、膜厚60nm以上の銀または銀合金から成る光反射性金属薄膜と、この光反射性金属薄膜の上側に設けられた防湿性透明薄膜と、 That SUMMARY OF THE INVENTION The light reflecting plate according to a first aspect of the present invention, on a substrate, and a light reflective metal thin film made of the film thickness 60nm or more silver or silver alloy, the light reflection a moisture-resistant transparent thin film provided on the upper side of the metal thin film,
上記光反射性金属薄膜と防湿性透明薄膜との間に設けられこれら両薄膜を互いに接着させる透明無機薄膜とを備えることを特徴とするものである。 It is characterized in further comprising a transparent inorganic thin film to adhere to each other these two films provided between the light reflective metal thin film and moisture resistance transparent film.

【0018】そして、この請求項1記載の発明に係る光反射板においては、上記透明無機薄膜が光反射性金属薄膜と防湿性透明薄膜の双方を強固に接着してこれら3層の薄膜を一体化させ、かつ、強固に接着された防湿性透明薄膜が上記光反射性金属薄膜を空気中のイオウ化合物や水分から保護する。 [0018] Then, in the light reflecting plate according to the invention as claimed in claim 1, wherein, integral thin films of these three layers the transparent inorganic thin film is firmly bonded to both of the light reflective metal thin film and moisture resistance transparent film It is of, and is firmly adhered moisture-resistant transparent film to protect the light reflective metallic thin film from sulfur compounds and moisture in the air. 従って、上記光反射性金属薄膜の経時劣化が防止されてその保存安定性が向上するため、 Therefore, since the storage stability deterioration over time of the light reflective metal thin film is prevented to improve,
空気中のイオウ化合物や水分に起因した表示欠陥のない、明るくコントラストの高い液晶表示装置等を安定して製造することが可能となる。 Without display defects due to sulfur compounds and moisture in the air, it is possible to stably manufacture a highly bright contrast liquid crystal display device or the like.

【0019】この様な技術的手段において上記防湿性透明薄膜としては空気中の水分を透過させ難いものであればよく、例えば、有機材料や無機材料から構成される薄膜が適用できる。 [0019] as long as the above-mentioned moisture-resistant transparent thin film in which hardly not transmit moisture in the air in such a technical means, for example, can be applied a thin film is composed of organic materials and inorganic materials. 尚、高い防湿性の点から、酸化珪素、 Incidentally, from the viewpoint of high moisture resistance, silicon oxide,
酸化チタン、酸化ジルコニウム、酸化セリウム、酸化タンタル等の金属酸化物の薄膜が好ましく(但し、銀と固溶しにくい金属の酸化物であることが好ましい)、中でも価格や成膜速度等の加工適性の点から酸化珪素を基材とする薄膜が好ましい。 Titanium oxide, zirconium oxide, cerium oxide, a thin film is preferable for the metal oxide such as tantalum oxide (provided that it is preferably an oxide of silver and solute difficult metals), inter alia price and processability of the film formation speed, etc. thin film of silicon oxide as a base material is preferable from the viewpoint of. 請求項2に係る発明はこのような技術的理由に基づいてなされている。 The invention according to claim 2 is made based on these technical reasons.

【0020】すなわち、請求項2に係る発明は、請求項1記載の発明に係る光反射板を前提とし、上記防湿性透明薄膜が、酸化珪素を基材とする酸化膜にて構成されていることを特徴とするものである。 [0020] Namely, the invention according to claim 2, assumes a light reflecting plate according to the invention of claim 1, wherein the moisture-resistant transparent thin film are composed of an oxide film to a silicon oxide as a base material it is characterized in.

【0021】尚、酸化珪素を基材とする酸化膜としては、光透過特性の観点からその組成がSiO 2に近いものが望ましい。 [0021] As the oxide film to a silicon oxide as a base material, the composition in terms of the light transmission characteristics it is desirable close to SiO 2.

【0022】次に、上記透明無機薄膜としては、酸化インジウム、酸化亜鉛、又は酸化銅を基材とする薄膜が適用でき、かつ、光反射性金属薄膜を反射型液晶表示装置の光反射性金属電極に利用した場合そのパターニング適性に優れ、しかも上記光反射性金属薄膜及び防湿性透明薄膜との密着性に優れた(特に、防湿性透明薄膜が酸化珪素を基材とする場合にはこの酸化珪素製の防湿性透明薄膜との密着性に極めて優れている)酸化インジウムを主成分とする薄膜が好ましく適用できる。 Next, as the transparent inorganic film, indium oxide, zinc oxide, or copper oxide can a thin film applied to a substrate, and a light reflective metal thin film of the reflection type liquid crystal display device light reflective metal when using the electrode excellent in the patterning suitability, moreover excellent in adhesion between the light reflective metal thin film and the moisture-proof transparent thin film (in particular, the oxidation if the moisture resistance transparent thin film is a base material of silicon oxide film on the basis of very excellent are) indium oxide adhesion with the moisture-resistant transparent thin film made of silicon can be preferably applied. 請求項3に係る発明はこのような技術的理由に基づいてなされている。 The invention according to claim 3 is made based on these technical reasons.

【0023】すなわち、請求項3に係る発明は請求項1 [0023] Namely, the invention according to claim 3 claim 1
又は2記載の発明に係る光反射板を前提とし、上記透明無機薄膜が、酸化インジウムを基材とする無機酸化物にて構成されていることを特徴とするものである。 Or assumes light reflecting plate according to the invention described, the transparent inorganic film is characterized in that it is constituted of indium oxide in the inorganic oxide as a base material.

【0024】このような透明無機薄膜としては、酸化インジウム薄膜の他、酸化インジウムに、銀との固溶域がないか又は小さく、かつ、液晶物質へのイオン性不純物の溶出による液晶物質の損傷が起こり難い酸化物を添加して構成される無機酸化物の薄膜が利用できる。 [0024] As such a transparent inorganic thin film, other indium oxide thin film, indium oxide, or no solid solution region of silver small and damage to the liquid crystal material due to elution of ionic impurities into the liquid crystal material thin configured inorganic oxide by adding occurs hardly oxide can be utilized. このような酸化物としては、例えばBi、Hf、Ce、Ta、 As such an oxide, for example Bi, Hf, Ce, Ta,
Ge、Si、Pb、Ti、Zr等の無機酸化物が挙げられる。 Ge, Si, Pb, Ti, inorganic oxides such as Zr can be cited.

【0025】ところで、上記防湿性透明薄膜の膜厚と透明無機薄膜の膜厚の合計が可視波長の1/4以上の場合、防湿性透明薄膜表面の反射光と光反射性金属薄膜表面の反射光が互いに干渉してこの反射光が着色することがある。 By the way, the reflection of the case where the total thickness of the film thickness and a transparent inorganic thin film of the moisture-resistant transparent thin film is 1/4 or more of the visible wavelengths, the reflected light and the light reflective metal thin film surface of the moisture-resistant transparent thin film surface the light interfere with each other is that the reflected light is colored. このような着色を防止するため、防水性透明薄膜と透明無機薄膜の合計膜厚は可視波長の1/4以下であることが望ましい。 To prevent such coloring, it is desirable that the total thickness of the waterproof transparent thin film and a transparent inorganic thin film is 1/4 or less of the visible wavelength. また、十分な防湿性を得るためその合計膜厚は5nm以上であることが望ましい。 Further, the total thickness to obtain sufficient moisture resistance is desirably 5nm or more. 請求項4に係る発明はこのような技術的理由に基づいてなされている。 The invention according to claim 4 is made based on these technical reasons.

【0026】すなわち、請求項4に係る発明は、請求項1〜3のいずれかに記載の光反射板を前提とし、上記防湿性透明薄膜と透明無機薄膜の合計膜厚が、可視光線の波長の1/4以下で、かつ、5nm以上であることを特徴とするものである。 [0026] Namely, the invention according to claim 4, assumes a light reflection plate according to claim 1, the total thickness of the moisture-resistant transparent film and a transparent inorganic thin film, the wavelength of visible light 1/4 below, and is characterized in that at 5nm or more.

【0027】次に、請求項1〜4に係る発明において、 Next, in the invention according to claim 1,
基板と光反射性金属薄膜とを強固に接着させるため、これら基板と光反射性金属薄膜との間に接着層を設けることが望ましい。 Order to firmly adhere the substrate and the optical reflective metallic thin film, it is desirable to provide an adhesive layer between these substrates and the light reflective metal thin film. この接着層としては、基板との接着力及び光反射性金属薄膜との接着力に優れたものであれば任意のものを利用することができるが、基板が有機材料の場合、この基板を透過する水分により光反射性金属薄膜が損傷を受けないように上記接着剤として防湿性に優れたものが望ましい。 As the adhesive layer, it can utilize any as long as it has excellent adhesion and adhesive strength between the light reflective metal thin film and the substrate, if the substrate is an organic material, passing through the substrate those light reflective metal thin film excellent in moisture resistance as the adhesive so as not damaged by moisture is desirable. また、光反射性金属薄膜が反射型液晶表示装置の光反射性金属電極として利用される場合には、イオン溶出が少なく、耐性面で安定した酸化インジウム又は酸化アルミニウムを基材とする無機酸化物が好ましい。 Further, when the light reflective metal thin film is utilized as a light-reflective metal electrode of a reflective liquid crystal display device has less ion elution, inorganic oxides stable indium oxide or aluminum oxide resistant surface as a base It is preferred. 請求項5及び6に係る発明はこのような技術的理由に基づいてなされたものである。 The invention according to claim 5 and 6 has been made based on such technical reasons.

【0028】すなわち、請求項5に係る発明は、請求項1〜4のいずれかに記載の光反射板を前提とし、上記光反射性金属薄膜と基板との間に、これらを互いに接着させる接着層が設けられていることを特徴とし、また、請求項6に係る発明は、請求項5記載の光反射板を前提とし、上記接着層が、酸化インジウム又は酸化アルミニウムを基材とする無機酸化物にて構成されていることを特徴とするものである。 [0028] Namely, the invention according to claim 5, assuming a light reflection plate according to claim 1, between the light reflecting metal film and the substrate, thereby adhering the mutually adhesive and wherein the layer is provided, the invention according to claim 6, assumes a light reflection plate according to claim 5, wherein the inorganic oxide the adhesive layer, to a substrate of indium oxide or aluminum oxide and it is characterized in that it is constituted by the object.

【0029】尚、請求項1〜6記載の発明に係る光反射板は、反射型液晶表示装置の光反射板や光反射性金属電極として利用できる他、太陽電池素子の光入射側とは反対側に配置され、太陽電池素子を透過した光線を反射させる光反射性電極として利用することもできる。 [0029] Note that the light reflecting plate according to the invention of claim 6, wherein, in addition to be used as a light reflecting plate and a light reflective metal electrodes of the reflection type liquid crystal display device, opposite to the light incident side of the solar cell element arranged on the side, it can be used as a light reflective electrode that reflects light transmitted through the solar cell element. すなわち、この光反射性電極を配置した場合、太陽電池素子を透過した光線がこの光反射性電極の作用で反射され、再度、太陽電池素子に入射されるためその発電効率を向上させることが可能となる。 That is, in this case where the light reflective electrode is disposed, light transmitted through the solar cell element is reflected by the action of the light reflective electrode, it is possible to improve the power generation efficiency for re-incident on the solar cell elements to become.

【0030】次に、請求項7〜10に係る発明は、請求項1〜6記載の発明に係る光反射板の用途を特定した発明に関する。 Next, the invention according to claim 7 to 10, relates to the invention identifying the application of the light reflecting plate according to the invention of claim 6 wherein.

【0031】すなわち、請求項7に係る発明は、透明電極を有する背面電極板と、この背面電極板に対向して配設されかつ透明電極を有する観察者側電極板と、これ等両電極板間に封入された液晶物質と、上記背面電極板の外側に設けられた光反射板とを備え、上記透明電極間に電圧を印加し液晶物質を駆動させて画面表示する反射型液晶表示装置に適用される上記光反射板を前提とし、基板上に、膜厚60nm以上の銀または銀合金から成る光反射性金属薄膜と、この光反射性金属薄膜の上側に設けられた防湿性透明薄膜と、上記光反射性金属薄膜と防湿性透明薄膜との間に設けられこれら両薄膜を互いに接着させる透明無機薄膜とを備えることを特徴とし、また、 [0031] Namely, the invention according to claim 7, the back electrode plate having a transparent electrode, and the observer-side electrode plate having disposed and having transparent electrodes to face the back electrode plate, which like the two electrode plates a liquid crystal material sealed between, and a light reflecting plate provided outside the back electrode plate, the reflective liquid crystal display device which voltage is applied to and drives the liquid crystal material to be screen between the transparent electrodes applied assumes the light-reflecting plate on a substrate, and a light reflective metal thin film made of the film thickness 60nm or more silver or silver alloy, a moisture-resistant transparent thin film provided on the upper side of the light reflective metal thin film characterized in that it comprises a transparent inorganic thin film to adhere to each other these two films provided between the light reflective metal thin film and moisture resistance transparent film, also,
請求項8に係る発明は、光反射性の金属電極を有する光反射性電極板と、この光反射性電極板に対向して配設されかつ透明電極を有する観察者側電極板と、これ等両電極板間に封入された液晶物質とを備え、上記電極間に電圧を印加し液晶物質を駆動させて画面表示する反射型液晶表示装置に適用される上記光反射性電極板を前提とし、基板上に、膜厚60nm以上の銀または銀合金から成る光反射性金属電極と、この光反射性金属電極の上側に設けられた防湿性の電気絶縁性透明薄膜と、上記光反射性金属電極と電気絶縁性透明薄膜との間に設けられこれらを互いに接着させる透明無機薄膜とを備えることを特徴とするものである。 The invention according to claim 8, and the light reflective electrode plate having a light reflective metal electrode, and the observer-side electrode plate having disposed and having a transparent electrode opposite to the light reflective electrode plates, which like and a liquid crystal material enclosed in both electrode plates, assuming the light reflective electrode plates applied to the reflection type liquid crystal display device which is driven the applied liquid crystal material a voltage between the electrodes by screen display, on a substrate, and a light reflective metal electrode made of film thickness 60nm or more silver or silver alloy, and moisture resistance of electrically insulating transparent thin film provided on the upper side of the light reflective metal electrode, the light-reflective metal electrode further comprising a transparent inorganic thin film to adhere them to each other is provided between the electrically insulating transparent thin film and is characterized in.

【0032】尚、請求項7及び8に係る発明において上記光反射性金属薄膜(光反射性金属電極)、防湿性透明薄膜(電気絶縁性透明薄膜)、及び、透明無機薄膜については、請求項1〜6に係る発明において適用される光反射性金属薄膜、防湿性透明薄膜、及び、透明無機薄膜と同一の薄膜が利用できる。 [0032] Incidentally, the light reflective metallic thin film in the invention according to claim 7 and 8 (light reflective metal electrode), moisture-resistant transparent film (electrically insulating transparent thin film), and, for the transparent inorganic thin film, according to claim light reflective metal thin film to be applied in the invention according to 1-6, moisture-resistant transparent film, and the same thin film and the transparent inorganic thin film can be utilized.

【0033】次に、上記透明無機薄膜が酸化インジウムを基材とする無機酸化物にて構成されている場合、この透明無機薄膜は導電性を有することからこの透明無機薄膜を上記光反射性金属電極の形状に位置整合させて電極の一部として利用することが可能となる。 Next, the transparent if the inorganic thin film is composed of inorganic oxide as a base material of indium oxide, the light reflective metal to the transparent inorganic thin since the transparent inorganic thin film having conductivity is aligned to the shape of the electrode can be utilized as part of the electrode. 請求項9に係る発明はこの様な理由によりなされている。 Invention is made by such reason according to claim 9.

【0034】すなわち、請求項9に係る発明は、請求項8記載の発明に係る反射型液晶表示装置用光反射性電極板を前提とし、上記透明無機薄膜が、酸化インジウムを基材とする無機酸化物にて構成され、かつ、この透明無機薄膜と上記光反射性金属電極とが互いに位置整合して電極形状に積層されていることを特徴とするものである。 [0034] That is, the inorganic invention according to claim 9, assuming a reflection type liquid crystal display device light reflective electrode plates according to the invention of claim 8, in which the transparent inorganic thin film and an indium oxide as a base material it is composed of oxides, and is characterized in that a transparent inorganic thin film and the light reflective metal electrode is laminated on the electrode shape and aligned with each other.

【0035】尚、本発明において上記電極の形状は、その適用される表示装置の種類により異なる。 [0035] The shape of the electrode in the present invention differs depending on the type of the applied display device. 例えば、単純マトリクス駆動方式の反射型液晶表示装置においては表示画面の画素に対応する部位をつなぐストライプ形状である。 For example, in a reflective liquid crystal display device of simple matrix driving method is stripe-shaped connecting portion corresponding to a pixel of the display screen.

【0036】また、上記透明無機薄膜が酸化インジウムを基材とする無機酸化物にて構成されている場合、銀又は銀合金から成る光反射性金属電極と酸化インジウムを基材とする無機酸化物は、いずれも硝酸をエッチング液としたエッチング処理によりパターニングすることが可能となる。 Further, the transparent case where the inorganic thin film is composed of inorganic oxide as a base material of indium oxide, an inorganic oxide to a light reflective metal electrode and indium oxide of silver or a silver alloy as the base material are all made can be patterned by the etching nitric acid as the etching solution. すなわち、基板上に銀又は銀合金から成る光反射性金属薄膜と酸化インジウムを基材とする無機酸化物とを成膜し、かつ、この無機酸化物薄膜上に電極形状のレジスト膜を形成した後、このレジスト膜から露出した部位を硝酸系エッチング液によってエッチング除去することにより、上記光反射性金属薄膜と無機酸化物薄膜が互いに位置整合した電極形状にパターニングすることが可能である。 That is, a light reflective metal thin film and indium oxide of silver or a silver alloy was deposited an inorganic oxide as a base material on the substrate, and to form a resist film of the electrode shape to the inorganic oxide thin film after, by removing etching a portion exposed from the resist film by nitric acid-based etching solution, it can be patterned into an electrode shape of the light reflective metal thin film and the inorganic oxide thin film is positioned aligned with each other. また、上記接着層が酸化インジウムを基材とする無機酸化物の場合、この接着層も上記光反射性金属薄膜と無機酸化物薄膜のパターニングと同時に、これら光反射性金属薄膜と無機酸化物薄膜に位置整合した上記電極形状にパターニングすることが可能である。 Also, in the case of inorganic oxides the adhesive layer has a base of indium oxide, the adhesive layer at the same time as the patterning of the light reflective metal thin film and the inorganic oxide thin film, these light reflective metal thin film and the inorganic oxide thin It can be patterned in the electrode shape located aligned with. このエッチング液としては、硝酸の他、塩酸や硫酸又は酢酸等の他種の酸を硝酸に添加して成る硝酸系の混酸、あるいは界面活性剤を若干量添加した硝酸等が利用できる。 As the etching liquid, other nitrate, it other species of acid of nitric acid formed by adding to nitric mixed acid of nitric acid or the like or a surface active agent was added a slight amount, the use of such as hydrochloric acid or sulfuric acid or acetic acid.

【0037】次に、上記電気絶縁性透明薄膜が電極形状の光反射性金属薄膜と無機酸化物薄膜を被覆してその表面と側端面を保護している場合、この側端面等からの空気の侵入を抑制してその変色を防止し光反射性金属電極の保存安定性を一層向上させることが可能となる。 Next, when the electrically insulating transparent thin film is protecting the surface and the side end face coated with a light reflective metal thin film and the inorganic oxide thin film electrode shape, the air from the side end face, etc. suppressing intrusion thereof to prevent discoloration becomes possible to further improve the storage stability of the light-reflective metal electrode. 請求項10に係る発明はこのような技術的理由に基づいてなされたものである。 The invention according to claim 10 has been made based on such technical reasons.

【0038】すなわち、請求項10に係る発明は、請求項8記載の発明に係る反射型液晶表示装置用光反射性電極板を前提とし、上記電気絶縁性透明薄膜が、互いに位置整合して電極形状に積層された透明無機薄膜と光反射性金属電極の表面と側端面を被覆していることを特徴とするものである。 [0038] That is, invention according to claim 10, assuming a reflection type liquid crystal display device light reflective electrode plates according to the invention of claim 8, said electrically insulating transparent thin film, electrodes positioned aligned with each other and it is characterized in that covering the surface and side end face of the shaped laminated transparent inorganic thin film and the light reflective metal electrode.

【0039】尚、本発明における基板としては、例えば、ガラス又は有機樹脂フィルムが利用できる。 [0039] As the substrate in the present invention can be used, for example, glass or organic resin film. また、 Also,
この基板表面に可視波長と同程度の深さ又はそれ以上の深さの微細凹凸を設け、この凹凸面に沿って光反射性金属薄膜(光反射性金属電極)を形成した場合、この光反射性金属薄膜(光反射性金属電極)表面に上記微細凹凸が再現されるため入射光を乱反射させて表示画面の視野角を増大させることが可能となる。 If this depth comparable to the visible wavelength or more of the depth of the fine unevenness formed on the substrate surface to form a light reflective metal thin film (light-reflective metal electrode) along the uneven surface, the light reflection to diffuse the incident light for the fine irregularities is reproduced sexually metal thin film (light-reflective metal electrode) surface it is possible to increase the viewing angle of the display screen. また、本発明に係る光反射板を光反射板外付タイプの反射型液晶表示装置の光反射板として利用する場合には、上記基板として厚さ200〜500μmのものが好ましく、他方、光反射性金属電極タイプの反射型液晶表示装置の光反射性電極板として利用する場合には、その物理的強度を確保するため厚さ0.1〜1.2mmのものが好ましい。 In the case of using the light reflecting plate according to the present invention as a light reflection plate of the reflection type liquid crystal display device of the type External light reflection plate is preferably one having a thickness of 200~500μm as the substrate, on the other hand, the light reflected when using as a light reflective plate of the reflection type liquid crystal display device of sex metal electrode type, it is preferable thickness 0.1~1.2mm order to ensure the physical strength.

【0040】また、本発明における銀又は銀合金の金属薄膜としては、銀単体の薄膜の他、銀の拡散を防止しあるいはその硬度を増大させるため、銀の固溶限度以下の濃度で他の元素を添加した合金が利用できる。 [0040] As a metal thin film of silver or a silver alloy in the present invention, the silver is used alone other films, for increasing prevent or hardness diffusion of silver, the other at the following concentrations silver solid solubility limit elements can be utilized alloy that was added. このような添加元素としては、例えば、Mg、In、Al、T Such additional element, for example, Mg, an In, Al, T
i、Zr、Ce又はSi等が適用できる。 i, Zr, Ce and Si and the like can be applied.

【0041】尚、銀又は銀合金の金属薄膜は、一般に、 [0041] The metal thin film of silver or a silver alloy, in general,
反射面の密度が高いほどその光反射率が増大するため、 Since the light reflectance higher density of the reflecting surface increases,
上記薄膜表面の法線方向が密度の高い(111)面となるように揃えて配向させることが望ましい。 Be aligned with aligned such normal direction of the film surface is dense (111) plane is preferable. また、銀又は銀合金の金属薄膜を成膜するに際して、高成膜速度で、しかも、高真空側で成膜するほどその密度が増大して光反射率が増大する。 Further, when a metal thin film of silver or a silver alloy, at high deposition speed, moreover, the light reflectance increases its density enough to film in a high vacuum side is increased.

【0042】また、上記銀又は銀合金の金属薄膜の成膜に際しては基板の温度が低温に維持されていることが望ましい。 Further, upon deposition of the metal thin film of the silver or silver alloy is preferable that the temperature of the substrate is maintained at a low temperature. 基板を高温に加熱した状態で成膜することも可能であるが、この場合、成膜された薄膜の光反射率が低下することがある。 It is also possible to deposit while heating the substrate to a high temperature, in this case, the light reflectance of the formed thin film may be decreased. このような理由から、成膜時における基板の温度は、好ましくは180℃以下、あるいは室温である。 For this reason, the temperature of the substrate during deposition is preferably 180 ° C. or less, or a room temperature. 尚、透明無機薄膜や接着層が酸化インジウムを基材とする場合、そのエッチング適性を確保するため、これら透明無機薄膜や接着層も180℃以下又は室温の基板温度で成膜することが望ましい。 Incidentally, when the transparent inorganic thin film or the adhesive layer has a base of indium oxide, therefore to ensure etching suitability, it is desirable to deposit these transparent inorganic thin film or the adhesive layer be 180 ° C. or less, or a room temperature of substrate temperature. そして、銀又は銀合金の金属薄膜と透明無機薄膜及び接着層の全体を180℃以下又は室温の基板温度で成膜した後、これら積層膜全体を硝酸でエッチングしてパターニングし、次に200℃以上の温度でアニーリング処理を施すことによりこれら積層膜全体の導電性を増大させることが可能である。 After the whole of the metal thin film and a transparent inorganic thin film of silver or a silver alloy and the adhesive layer was deposited at 180 ° C. or less, or a room temperature of substrate temperature, the whole stacked layer film is patterned by etching with nitric acid, then 200 ° C. by performing an annealing process at temperatures above it is possible to increase the conductivity of the whole stacked layer film.

【0043】尚、この基板上に上述した銀又は銀合金の金属薄膜や透明無機薄膜等を成膜するに際しては、成膜前に、この基板表面を洗浄することが望ましい。 Incidentally, when a metal thin film or a transparent inorganic thin film or the like of the silver or silver alloy described above on the substrate, before the deposition, it is desirable to wash the substrate surface. 洗浄の方法としては、イオンボンバート、逆スパッタリング、 As the method of washing, ion bombardment, sputter etching,
アッシング、紫外線洗浄、グロー放電処理等が例示できる。 Ashing, ultraviolet cleaning, a glow discharge treatment and the like.

【0044】次に、本発明に係る光反射板を反射型液晶表示装置の光反射板又は光反射性電極板として利用する場合、これと共に観察者側電極板を構成する基板としては、ガラス基板、プラスチックフィルム、プラスチックボード等の透明基板が適用でき、また、透明電極としてはITOやネサ膜等の透明導電膜が適用できる。 Next, the case of using the light reflecting plate according to the present invention as a light reflecting plate or light reflective plate of the reflection type liquid crystal display device, as a substrate constituting the observer-side electrode plate with which a glass substrate , a plastic film, can be applied a transparent substrate such as a plastic board, also as the transparent electrode can be applied a transparent conductive film such as ITO or Nesa film.

【0045】また、上記観察者側電極板に光散乱層を設けて表示光を散乱させ表示画面の視野角を拡大させたり、反射防止膜を設けてこの観察者側電極板表面からの反射を防止することも可能である。 Further, or to expand the viewing angle of the display screen scatters the display light of the light-scattering layer provided on the viewer-side electrode plate, provided with an anti-reflection film of the reflection from the viewer-side electrode plate surface it is also possible to prevent. この光散乱層は上記光反射板を構成する基板の液晶物質と接触する内側、あるいは偏光フィルムと接触する外側のいずれに設けてもよい。 The light scattering layer may be provided on any of the outer contacting the inside or the polarizing film in contact with the liquid crystal material of the substrate constituting the light reflector. また、観察者側電極板にカラーフィルター層を設け表示光を着色させてカラー表示することも可能である。 It is also possible to color display by the colored display light color filter layer provided on the viewer side electrode plate.

【0046】 [0046]

【作用】この様な技術的手段によれば、基板上に、膜厚60nm以上の銀または銀合金から成る光反射性金属薄膜と、この光反射性金属薄膜の上側に設けられた防湿性透明薄膜と、上記光反射性金属薄膜と防湿性透明薄膜との間に設けられこれら両薄膜を互いに接着させる透明無機薄膜とを備えるため、上記透明無機薄膜が光反射性金属薄膜と防湿性透明薄膜の双方に強固に接着してこれら3層の薄膜を一体化させ、かつ、強固に接着された防湿性透明薄膜が上記光反射性金属薄膜を空気中のイオウ化合物や水分から保護する。 According to such a technical means [action], on a substrate, and a light reflective metal thin film made of the film thickness 60nm or more silver or silver alloy, moisture resistance transparent provided on the upper side of the light reflective metal thin film thin film and, both of these films for a and a transparent inorganic thin film to be bonded to each other, the transparent inorganic thin light reflective metal thin film and moisture resistance transparent thin film provided between the light reflective metal thin film and moisture resistance transparent film both are integrated thin film of these three layers firmly adhered to the, and is firmly adhered moisture-resistant transparent film to protect the light reflective metallic thin film from sulfur compounds and moisture in the air.

【0047】 [0047]

【実施例】以下、図面を参照して本発明の実施例について詳細に説明する。 EXAMPLES Hereinafter, with reference to the accompanying drawings embodiments of the present invention will be described in detail.

【0048】[実施例1]この実施例に係る光反射性電極板1は、図1に示すように、厚さ0.7mmのガラス基板11と、各々位置整合して電極形状に積層された厚さ10nmの接着層12と厚さ120nmの銀から成る光反射性金属電極13及び厚さ70nmの透明無機薄膜14と、これら接着層12、光反射性金属電極13及び透明無機薄膜14を一様に被覆してその表面及び側端面を保護する厚さ35nmの防湿性透明薄膜15とでその主要部が構成されており、かつ、上記接着層12と透明無機薄膜14は、いずれも、酸化ジルコニウム(ZrO [0048] [Example 1] light reflective electrode plate 1 according to this embodiment, as shown in FIG. 1, a glass substrate 11 having a thickness of 0.7 mm, is laminated into an electrode shape and each aligned a light-reflective metal electrode 13 and a thickness of 70nm transparent inorganic thin film 14 consisting of the adhesive layer 12 and the thickness of 120nm thickness 10nm silver, these adhesive layers 12, a light reflective metal electrode 13 and the transparent inorganic thin film 14 one are a main part configuration in the thickness 35nm moisture-resistant transparent film 15 to protect the surface and the side end face covers as, and the adhesive layer 12 and the transparent inorganic film 14, any oxide zirconium (ZrO
2 )を3atom%(原子%)含有する酸化インジウムの薄膜にて構成されている。 And it is configured with 2) at 3 atom% (atomic%) of indium oxide containing thin films. また、上記防湿性透明薄膜15 Further, the moisture-resistant transparent film 15
は酸化珪素(SiO 2 )にて構成されている。 It is composed of silicon oxide (SiO 2). 尚、上記電極形状は、ピッチ210μm、幅200μm、電極間ギャップ10μmのストライプパターンに設定されている。 Incidentally, the electrode shape, pitch 210 .mu.m, width 200 [mu] m, are set to the stripe pattern of the inter-electrode gap 10 [mu] m.

【0049】そして、この光反射性電極板は、以下のような方法で製造したものである。 [0049] Then, the light reflective electrode plates are those prepared by the following method.

【0050】まず、ガラス基板11の表面をアルカリ系界面活性剤と水とで洗浄した後、真空槽内に収容し、逆スパッタリングと呼ばれるプラズマ処理を施してさらに洗浄した。 [0050] First, after cleaning the surface of the glass substrate 11 by the alkaline surfactant and water, and housed in a vacuum chamber, and further washed by performing plasma treatment called reverse sputtering.

【0051】次に、ガラス基板11を真空槽中から取り出すことなく、このガラス基板11を室温に維持した状態で、スパッタリング法により、上記接着層12を構成する薄膜、光反射性金属電極13を構成する薄膜並びに透明無機薄膜14を順次成膜した。 Next, without removing the glass substrate 11 from the vacuum vessel, the glass substrate 11 while maintaining the room temperature, by a sputtering method, a thin film constituting the adhesive layer 12, a light reflective metal electrode 13 the thin and transparent inorganic thin film 14 constituting were sequentially formed.

【0052】次に、周知のフォトリソプロセスに従い、 Next, in accordance with well-known photolithography process,
上記透明無機薄膜14上にストライプパターン形状のレジスト膜を形成し、50%硝酸溶液を適用して上記3層の薄膜をエッチングして上記ストライプパターンに加工した。 A resist film is formed of a stripe pattern on the transparent inorganic film 14, it was formed into the stripe pattern by applying a 50% nitric acid solution to etch the thin film of the three layers.

【0053】次に、防湿性透明薄膜15を成膜し、続いて、220℃、30分のアニール処理を施して上記光反射性電極板1を形成した。 Next, the moisture-resistant transparent film 15 is deposited, followed, 220 ° C., the formation of the light reflective electrode plate 1 is subjected to annealing for 30 minutes.

【0054】こうして得られた光反射性電極板1を空気中で1ケ月間放置してその光反射特性の変化を検査した。 [0054] The light reflective electrode plate 1 thus obtained were examined change in the light reflection characteristic and left for one month in the air. この結果、光反射性金属電極13の表面に外観の変化はまったく観察されず、また光反射率の変化もなかった。 As a result, the appearance of the change in the surface of the light reflective metal electrode 13 is not observed at all, also there was no change in the light reflectance.

【0055】尚、比較のため、ガラス基板上に銀薄膜を成膜しこれを空気中で1ケ月間放置したところ、表面が変色し、その反射率も約10%低下した。 [0055] For comparison, forming a silver thin film on a glass substrate where it was left for one month in air, the surface is discolored and reduced to about 10% reflectance.

【0056】[実施例2]この実施例に係る光反射性電極板2は、図2に示すように、厚さ0.7mmのガラス基板21と、各々位置整合して電極形状に積層された厚さ20nmの接着層22と厚さ120nmの銀から成る光反射性金属電極23並びに厚さ65nmの透明無機薄膜24と、これら接着層22、光反射性金属電極23並びに透明無機薄膜24を一様に被覆してその側端面を保護する厚さ40nmの防湿性透明薄膜25とでその主要部が構成されており、かつ、上記接着層22は酸化アルミニウム(Al 23 )の薄膜にて構成され、他方、透明無機薄膜24は酸化ジルコニウム(ZrO 2 )を3atom [0056] [Example 2] light reflective electrode plates 2 according to this embodiment, as shown in FIG. 2, the glass substrate 21 having a thickness of 0.7 mm, is laminated into an electrode shape and each aligned a light-reflective metal electrode 23 and the thickness 65nm of the transparent inorganic film 24 having a thickness of 20nm adhesive layer 22 and the thickness 120nm of silver, these adhesive layers 22, a light reflective metal electrode 23 and the transparent inorganic thin film 24 one It is a main part configuration in the coated its thickness 40nm to protect the side end surface moisture-resistant transparent thin film 25 as, and the adhesive layer 22 in a thin film of aluminum oxide (Al 2 O 3) is configured, on the other hand, the transparent inorganic film 24 is zirconium oxide (ZrO 2) 3 atom
%含有する酸化インジウムの薄膜にて構成されている。 % Are constituted by a thin film of indium oxide containing.
また、防湿性透明薄膜25は酸化珪素(SiO 2 )にて構成されている。 Further, moisture-resistant transparent thin film 25 is composed of silicon oxide (SiO 2). 尚、上記電極形状は、ピッチ300μ Incidentally, the electrode shape, pitch 300μ
m、幅290μm、電極間ギャップ10μmのストライプパターンである。 m, width 290 [mu] m, a stripe pattern of the inter-electrode gap 10 [mu] m.

【0057】そして、この光反射性電極板2を使用して、図3に示すように偏光フィルム1枚タイプの反射型液晶表示装置を製造した。 [0057] Then, by using the light reflective electrode plates 2 were prepared reflective liquid crystal display device of one type polarizing film as shown in FIG. すなわち、この反射型液晶表示装置は、光反射性電極板2を背面電極板とし、これに対向して配置され基板31上に透明電極32を備える観察者側電極板3と、これら両電極板2、3の間に封入された液晶物質4とでその主要部が構成され、観察者側電極板3側から入射した外光を光反射性電極23で反射させて画面表示するものである。 That is, the reflection type liquid crystal display device, a light reflective electrode plate 2 and the back electrode plate, and the observer-side electrode plate 3 provided with a transparent electrode 32 on a substrate 31 disposed opposite thereto, the both electrode plates its main part is composed of 2, 3 and the liquid crystal material 4 is enclosed between, in which the external light incident from the viewer-side electrode plate 3 side is reflected by the light reflective electrode 23 by screen display.

【0058】尚、図3中、33は観察者側電極板の基板上に設けられた光散乱層、5は偏光フィルム、6は位相差フィルム、7は反射防止膜を示している。 [0058] In FIG. 3, the light scattering layer provided on the substrate on the observer side electrode plates 33, 5 denotes a polarizing film, phase difference film 6, 7 anti-reflection film.

【0059】 [0059]

【発明の効果】本発明によれば、基板上に、膜厚60n According to the present invention, on the substrate, the film thickness 60n
m以上の銀または銀合金から成る光反射性金属薄膜と、 A light reflective metal thin film made of m or more silver or silver alloy,
この光反射性金属薄膜の上側に設けられた防湿性透明薄膜と、上記光反射性金属薄膜と防湿性透明薄膜との間に設けられこれら両薄膜を互いに接着させる透明無機薄膜とを備えるため、上記透明無機薄膜が光反射性金属薄膜と防湿性透明薄膜の双方に強固に接着してこれら3層の薄膜を一体化させ、かつ、強固に接着された防湿性透明薄膜が上記光反射性金属薄膜を空気中のイオウ化合物や水分から保護する。 To provide a moisture-resistant transparent thin film provided on the upper side of the light reflective metal thin film, and a transparent inorganic thin film to adhere to each other these two films provided between the light reflective metal thin film and moisture resistance transparent thin film, the transparent inorganic film is firmly adhered to both of the light reflective metal thin film and moisture resistance transparent film are integrated thin film of three layers, and firmly adhered moisture resistant transparent thin film is the light-reflective metal thin film to protect from sulfur compounds and moisture in the air.

【0060】従って、光反射性金属薄膜の経時劣化が防止されてその保存安定性が向上するため、空気中のイオウ化合物や水分に起因した表示欠陥のない反射型液晶表示装置等を安定して製造できる効果を有している。 [0060] Therefore, since the aging of the light reflective metal thin film is improved storage stability is prevented, a stable manner without display defects due to sulfur compounds and moisture in air the reflection type liquid crystal display device or the like It has the effect of producing.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】実施例1に係る光反射性電極板の断面図。 Sectional view of a light reflective electrode plate according to [1] Example 1.

【図2】実施例2に係る光反射性電極板の断面図。 Sectional view of a light reflective electrode plate according to Figure 2 Example 2.

【図3】実施例2に係る光反射性電極板が適用された反射型液晶表示装置の断面図。 3 is a cross-sectional view of a reflection type liquid crystal display device where the light reflective electrode plate is applied according to the second embodiment.

【図4】従来例に係る反射型液晶表示装置の断面図。 4 is a cross-sectional view of a reflection type liquid crystal display device according to the related art.

【図5】従来例に係る他の反射型液晶表示装置の断面図。 FIG. 5 is a cross-sectional view of another reflection type liquid crystal display device according to the related art.

【図6】従来例に係る他の反射型液晶表示装置の断面図。 6 is a cross-sectional view of another reflection type liquid crystal display device according to the related art.

【図7】アルミニウム薄膜及び銀薄膜における光反射率を示すグラフ図。 Figure 7 is a graph illustrating a light reflectance in the aluminum thin film and a silver thin film.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 光反射性電極板 2 光反射性電極板 3 観察者側電極板 4 液晶物質 11 ガラス基板 12 接着層 13 反射性金属電極 14 透明無機薄膜 15 防湿性透明薄膜 21 ガラス基板 22 接着層 23 反射性金属電極 24 透明無機薄膜 25 防湿性透明薄膜 31 透明電極 1 light reflective electrode plate 2 light reflective electrode plates 3 the observer side electrode plate 4 a liquid crystal material 11 glass substrate 12 adhesive layer 13 a reflective metal electrode 14 transparent inorganic film 15 moisture-resistant transparent film 21 glass substrate 22 adhesive layer 23 reflective a metal electrode 24 transparent inorganic film 25 moisture-resistant transparent film 31 transparent electrode

Claims (10)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】基板上に、膜厚60nm以上の銀または銀合金から成る光反射性金属薄膜と、この光反射性金属薄膜の上側に設けられた防湿性透明薄膜と、上記光反射性金属薄膜と防湿性透明薄膜との間に設けられこれら両薄膜を互いに接着させる透明無機薄膜とを備えることを特徴とする光反射板。 To 1. A substrate, a light reflective metal thin film made of the film thickness 60nm or more silver or silver alloy, a moisture-resistant transparent thin film provided on the upper side of the light reflective metal thin film, the light-reflective metal light reflecting plate, characterized in that it comprises a transparent inorganic thin film to adhere to each other both of these thin films disposed between the thin film and the moisture-resistant transparent film.
  2. 【請求項2】上記防湿性透明薄膜が、酸化珪素を基材とする酸化膜にて構成されていることを特徴とする請求項1記載の光反射板。 Wherein said moisture-resistant transparent thin film, a light reflection plate according to claim 1, characterized in that it is composed of oxide film containing silicon oxide as a base material.
  3. 【請求項3】上記透明無機薄膜が、酸化インジウムを基材とする無機酸化物にて構成されていることを特徴とする請求項1又は2記載の光反射板。 Wherein said transparent inorganic thin film is claimed in claim 1 or 2 light reflecting plate according to, characterized in that it is constituted by an inorganic oxide to the indium oxide as a base material.
  4. 【請求項4】上記防湿性透明薄膜と透明無機薄膜の合計膜厚が、可視光線の波長の1/4以下で、かつ、5nm The total thickness of wherein said moisture-resistant transparent film and a transparent inorganic thin film is 1/4 or less of the wavelength of visible light, and, 5 nm
    以上であることを特徴とする請求項1〜3のいずれかに記載の光反射板。 Light reflector according to claim 1, characterized in that at least.
  5. 【請求項5】上記光反射性金属薄膜と基板との間に、これらを互いに接着させる接着層が設けられていることを特徴とする請求項1〜4のいずれかに記載の光反射板。 Between wherein said light reflective metallic thin film and the substrate, a light reflecting plate according to any one of claims 1 to 4, characterized in that the adhesive layer to adhere them to each other is provided.
  6. 【請求項6】上記接着層が、酸化インジウム又は酸化アルミニウムを基材とする無機酸化物にて構成されていることを特徴とする請求項5記載の光反射板。 Wherein said adhesive layer is indium oxide or a light reflecting plate according to claim 5, characterized in that it is composed of inorganic oxide to aluminum oxide as a base material.
  7. 【請求項7】透明電極を有する背面電極板と、この背面電極板に対向して配設されかつ透明電極を有する観察者側電極板と、これ等両電極板間に封入された液晶物質と、上記背面電極板の外側に設けられた光反射板とを備え、上記透明電極間に電圧を印加し液晶物質を駆動させて画面表示する反射型液晶表示装置に適用される上記光反射板において、 基板上に、膜厚60nm以上の銀または銀合金から成る光反射性金属薄膜と、この光反射性金属薄膜の上側に設けられた防湿性透明薄膜と、上記光反射性金属薄膜と防湿性透明薄膜との間に設けられこれら両薄膜を互いに接着させる透明無機薄膜とを備えることを特徴とする反射型液晶表示装置用光反射板。 A back electrode plate with a 7. A transparent electrode, a viewer-side electrode plate having the opposite to the back electrode plate disposed and transparent electrode, and a liquid crystal material which like sealed to both electrode plates , and a light reflecting plate provided outside the back electrode plate, in the light-reflecting plate to be applied to a reflective liquid crystal display device by applying a voltage between the transparent electrodes to drive the liquid crystal material to be screen , on a substrate, and a light reflective metal thin film made of the film thickness 60nm or more silver or silver alloy, a moisture-resistant transparent thin film provided on the upper side of the light reflective metal thin film, the light reflective metal thin film and the moisture-proof reflective liquid crystal display device for light reflector, characterized in that it comprises a transparent inorganic thin film to adhere to each other these two films provided between the transparent thin film.
  8. 【請求項8】光反射性の金属電極を有する光反射性電極板と、この光反射性電極板に対向して配設されかつ透明電極を有する観察者側電極板と、これ等両電極板間に封入された液晶物質とを備え、上記電極間に電圧を印加し液晶物質を駆動させて画面表示する反射型液晶表示装置に適用される上記光反射性電極板において、 基板上に、膜厚60nm以上の銀または銀合金から成る光反射性金属電極と、この光反射性金属電極の上側に設けられた防湿性の電気絶縁性透明薄膜と、上記光反射性金属電極と電気絶縁性透明薄膜との間に設けられこれらを互いに接着させる透明無機薄膜とを備えることを特徴とする反射型液晶表示装置用光反射性電極板。 8. A light-reflective electrode plate with a light reflective metal electrode, and the observer-side electrode plate having disposed and having a transparent electrode opposite to the light reflective electrode plates, which like the two electrode plates a encapsulated liquid crystal material between the above-mentioned optical reflective electrode plate used to apply a voltage to drive the liquid crystal material in the reflective type liquid crystal display device for screen display between the electrodes, on a substrate, film a light reflective metal electrode having a thickness 60nm or more silver or silver alloy, an electrically insulating transparent thin film of moisture resistance provided on the upper side of the light reflective metal electrode, the light reflecting metal electrode and electrically insulating transparent reflective liquid crystal display device light reflective electrode plates, characterized in that it comprises a transparent inorganic thin film to adhere them to each other is provided between the thin film.
  9. 【請求項9】上記透明無機薄膜が、酸化インジウムを基材とする無機酸化物にて構成され、かつ、この透明無機薄膜と上記光反射性金属電極とが互いに位置整合して電極形状に積層されていることを特徴とする請求項8記載の反射型液晶表示装置用光反射性電極板。 9. The transparent inorganic film is constituted by an inorganic oxide to the indium oxide as a base material, and, laminated on the transparent inorganic thin film and the light reflective metal electrode and the electrode shape is positioned aligned with each other reflective liquid crystal display device light reflective electrode plates according to claim 8, characterized in that it is.
  10. 【請求項10】上記電気絶縁性透明薄膜が、互いに位置整合して電極形状に積層された透明無機薄膜と光反射性金属電極の表面と側端面を被覆していることを特徴とする請求項8記載の反射型液晶表示装置用光反射性電極板。 10. The electrically insulating transparent thin film, characterized in that it covers the surface and the side end face of the transparent inorganic thin film and the light reflective metal electrode laminated on the electrode shape and aligned with each other claims 8 a reflective liquid crystal display device light reflective electrode plate according.
JP08879595A 1995-03-22 1995-03-22 Light reflection plate and the reflection type liquid crystal display device for light reflector and the reflective liquid crystal display device light reflective electrode plates Expired - Fee Related JP3498763B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08879595A JP3498763B2 (en) 1995-03-22 1995-03-22 Light reflection plate and the reflection type liquid crystal display device for light reflector and the reflective liquid crystal display device light reflective electrode plates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08879595A JP3498763B2 (en) 1995-03-22 1995-03-22 Light reflection plate and the reflection type liquid crystal display device for light reflector and the reflective liquid crystal display device light reflective electrode plates

Publications (2)

Publication Number Publication Date
JPH08262207A true JPH08262207A (en) 1996-10-11
JP3498763B2 JP3498763B2 (en) 2004-02-16

Family

ID=13952800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08879595A Expired - Fee Related JP3498763B2 (en) 1995-03-22 1995-03-22 Light reflection plate and the reflection type liquid crystal display device for light reflector and the reflective liquid crystal display device light reflective electrode plates

Country Status (1)

Country Link
JP (1) JP3498763B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0838714A3 (en) * 1996-10-22 1999-08-11 Seiko Epson Corporation Reflective liquid crystal panel substrate
JP2001142056A (en) * 1999-11-10 2001-05-25 Kyocera Corp Reflective liquid crystal display device
JP2001221908A (en) * 1999-11-26 2001-08-17 Furuya Kinzoku:Kk Reflector
EP1158345A2 (en) * 2000-05-25 2001-11-28 Seiko Epson Corporation Protective film covering reflective film in a liquid crystal device
EP1158344A2 (en) * 2000-05-25 2001-11-28 Seiko Epson Corporation Liquid crystal device and method for making the same
JP2007291529A (en) * 2001-03-13 2007-11-08 Kiyousera Opt Kk Metal film-coated member and method for producing the same
US7872728B1 (en) 1996-10-22 2011-01-18 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6933996B2 (en) 1996-10-22 2005-08-23 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same
US7872728B1 (en) 1996-10-22 2011-01-18 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same
US7868961B2 (en) 1996-10-22 2011-01-11 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same
US7532292B2 (en) 1996-10-22 2009-05-12 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same
US7324171B2 (en) 1996-10-22 2008-01-29 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same
US6344888B2 (en) 1996-10-22 2002-02-05 Seiko Epson Corporation Liquid crystal panel substrate liquid crystal panel and electronic device and projection display device using the same
US7184105B2 (en) 1996-10-22 2007-02-27 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device having the same
US7158205B2 (en) 1996-10-22 2007-01-02 Seiko Epson Corporation Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same
EP0838714A3 (en) * 1996-10-22 1999-08-11 Seiko Epson Corporation Reflective liquid crystal panel substrate
JP2001142056A (en) * 1999-11-10 2001-05-25 Kyocera Corp Reflective liquid crystal display device
JP2001221908A (en) * 1999-11-26 2001-08-17 Furuya Kinzoku:Kk Reflector
JP4632519B2 (en) * 1999-11-26 2011-02-23 株式会社フルヤ金属 Reflector
EP1158344A2 (en) * 2000-05-25 2001-11-28 Seiko Epson Corporation Liquid crystal device and method for making the same
EP1158345A2 (en) * 2000-05-25 2001-11-28 Seiko Epson Corporation Protective film covering reflective film in a liquid crystal device
US6747723B2 (en) 2000-05-25 2004-06-08 Seiko Epson Corporation Liquid crystal device having multi-layer electrode, method of making the same, and electronic apparatus
EP1158344A3 (en) * 2000-05-25 2003-09-10 Seiko Epson Corporation Liquid crystal device and method for making the same
EP1158345A3 (en) * 2000-05-25 2003-09-03 Seiko Epson Corporation Protective film covering reflective film in a liquid crystal device
JP2007291529A (en) * 2001-03-13 2007-11-08 Kiyousera Opt Kk Metal film-coated member and method for producing the same

Also Published As

Publication number Publication date
JP3498763B2 (en) 2004-02-16

Similar Documents

Publication Publication Date Title
JP4425059B2 (en) Polarizing optical element, and a display device using the same
US3736047A (en) Liquid crystal display device with internal anti-reflection casting
CN1188731C (en) Liquid crystal device and its producing method and electronic device
US5728456A (en) Methods and apparatus for providing an absorbing, broad band, low brightness, antireflection coating
CN1194248C (en) The liquid crystal device and electronic equipment
US20060119937A1 (en) Multilayer wire-grid polarizer
US20040175577A1 (en) Structure of a light-incidence electrode of an optical interference display plate
JP2529741B2 (en) Optical interference el element
CN1221815C (en) Optical device, optical system and projector with barrier layer
US6040056A (en) Transparent electrically conductive film-attached substrate and display element using it
JP2887530B2 (en) Vehicle especially rearview mirror for motor vehicles
EP1130420A2 (en) Transparent laminate, method for producing the same, and plasma display panel
US6853420B2 (en) Transflective liquid crystal display with backlight and reflection film
WO2001006308A1 (en) Lcd, electronic device and substrate of lcd
WO1999053369A1 (en) Liquid crystal display and electronic device
JP2002542513A (en) Transmission / reflection switching type display device
CN1510494A (en) Electrochromism element
JP3482827B2 (en) Transflective liquid crystal display device
JP2005502077A (en) Antireflection film and related methods
KR100254151B1 (en) Transparent electrically conductive film attatched substrate
WO2000048039A1 (en) Liquid-crystal display
KR20040015307A (en) Polarizers coated with optically functional layers
KR100411959B1 (en) A multilayer conductive film, and a transparent electrode plate and a liquid crystal display device using the same
WO1999067680A1 (en) Reflective liquid crystal display
KR20040019032A (en) Polarizers for use with liquid crystal displays

Legal Events

Date Code Title Description
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071205

Year of fee payment: 4

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081205

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091205

Year of fee payment: 6

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091205

Year of fee payment: 6

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101205

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111205

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121205

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121205

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131205

Year of fee payment: 10

LAPS Cancellation because of no payment of annual fees