JPH08262207A - Light reflecting plate, light reflecting plate for reflection type liquid crystal display device, and light-reflecting electrode plate for reflection type liquid crystal display device - Google Patents
Light reflecting plate, light reflecting plate for reflection type liquid crystal display device, and light-reflecting electrode plate for reflection type liquid crystal display deviceInfo
- Publication number
- JPH08262207A JPH08262207A JP7088795A JP8879595A JPH08262207A JP H08262207 A JPH08262207 A JP H08262207A JP 7088795 A JP7088795 A JP 7088795A JP 8879595 A JP8879595 A JP 8879595A JP H08262207 A JPH08262207 A JP H08262207A
- Authority
- JP
- Japan
- Prior art keywords
- light
- thin film
- transparent
- electrode
- liquid crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光反射板と反射型液晶
表示装置用光反射板並びに反射型液晶表示装置用光反射
性電極板に係り、特に、光反射特性に優れた銀が適用さ
れた経時劣化のない保存安定性に優れた光反射板と反射
型液晶表示装置用光反射板並びに反射型液晶表示装置用
光反射性電極板の改良に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light reflection plate, a light reflection plate for a reflection type liquid crystal display device and a light reflection electrode plate for a reflection type liquid crystal display device, and in particular, silver having excellent light reflection characteristics is applied. The present invention relates to improvements in a light reflection plate having excellent storage stability without deterioration with time, a light reflection plate for a reflection type liquid crystal display device, and a light reflection electrode plate for a reflection type liquid crystal display device.
【０００２】[0002]
【従来の技術】液晶表示装置は、画素毎に電圧の印加を
行える電極が配設された一対の電極板とこれ等電極板間
に封入された液晶物質とでその主要部が構成され、上記
両電極間に電圧を印加することにより液晶物質の配向状
態を画素毎に変化させてこの液晶物質を透過する光の偏
光面を制御すると共に、偏光フィルムによりその透過・
不透過を制御して画面表示を行うものである。そして、
上記一対の電極板のうちの一方にカラーフィルター層を
有する電極板を適用することによりカラー画面の表示が
可能となる。2. Description of the Related Art A liquid crystal display device comprises a pair of electrode plates provided with electrodes capable of applying a voltage for each pixel, and a liquid crystal substance enclosed between the electrode plates, which constitutes a main part thereof. By applying a voltage between both electrodes, the alignment state of the liquid crystal substance is changed for each pixel to control the plane of polarization of the light transmitted through this liquid crystal substance, and at the same time, it is transmitted by the polarizing film.
The screen is displayed by controlling opacity. And
A color screen can be displayed by applying an electrode plate having a color filter layer to one of the pair of electrode plates.
【０００３】ところで、この種の液晶表示装置として
は、液晶表示装置の背面側に位置する電極板（以下背面
電極板と称する）の裏面若しくは側面に光源（ランプ）
を配置し、背面電極板側から光線を入射させるバックラ
イト型あるいはライトガイド型のランプ内蔵式透過型液
晶表示装置が広く普及している。By the way, in this type of liquid crystal display device, a light source (lamp) is provided on the back or side of an electrode plate (hereinafter referred to as a back electrode plate) located on the back side of the liquid crystal display device.
, A backlight-type or light-guide-type transmissive liquid crystal display device with a built-in lamp in which light is incident from the back electrode plate side is widely used.
【０００４】しかし、このランプ内蔵式透過型液晶表示
装置においてはそのランプによる消費電力が大きくＣＲ
Ｔやプラズマディスプレイ等他の種類のディスプレイと
略同等の電力を消費するため、液晶表示装置本来の低消
費電力といった特徴を損ない、かつ、携帯先での長時間
の利用が困難になるという欠点を有していた。However, in this transmissive liquid crystal display device with a built-in lamp, the power consumed by the lamp is large and CR is large.
Since it consumes almost the same amount of power as other types of displays such as T and plasma displays, it has the drawback that the original low power consumption characteristics of the liquid crystal display device are impaired and that it is difficult to use it for a long time at the destination of carrying. Had.
【０００５】他方、このようなランプを内蔵することな
く装置の観察者側に位置する電極板（観察者側電極板と
称する）から室内光や自然光等の外光を入射させ、か
つ、この入射光を光反射性背面電極板で反射させると共
に、この反射光で画面表示する反射型液晶表示装置も知
られている。そして、この反射型液晶表示装置ではラン
プを利用しないことから消費電力が小さく、携帯先での
長時間駆動に耐えるという利点を有している。On the other hand, outside light such as room light or natural light is made incident from an electrode plate (referred to as an observer-side electrode plate) located on the observer side of the apparatus without incorporating such a lamp, and this incident light is incident. There is also known a reflection type liquid crystal display device in which light is reflected by a light-reflective back electrode plate and a screen is displayed by this reflected light. In addition, this reflective liquid crystal display device has advantages that it consumes less power because it does not use a lamp and can withstand long-time driving at a portable location.
【０００６】ところで、このような反射型液晶表示装置
としては、例えば、図４に示すように光反射板ｅを背面
電極板ａの外側に配設しかつ２枚の偏光フィルムｄ，ｆ
を使用するタイプの反射型液晶表示装置や、図５に示す
ように光反射板ｅを背面電極板ａの外側に配設しかつ偏
光フィルムｆを１枚だけ使用したタイプの反射型液晶表
示装置、あるいは図６に示すように液晶物質ｃに電圧を
印加する電極として光反射性金属電極ａ'2を適用する反
射型液晶表示装置等が知られている。By the way, in such a reflection type liquid crystal display device, for example, as shown in FIG. 4, a light reflection plate e is disposed outside the back electrode plate a and two polarizing films d and f are provided.
Or a reflective liquid crystal display device of the type in which a light reflection plate e is disposed outside the back electrode plate a and only one polarizing film f is used, as shown in FIG. Alternatively, as shown in FIG. 6, a reflective liquid crystal display device or the like is known in which a light-reflecting metal electrode a′2 is applied as an electrode for applying a voltage to a liquid crystal substance c.
【０００７】以下順に説明すると、図４に示された反射
型液晶表示装置は液晶物質ｃに電圧を印加する透明電極
ａ２を基板ａ１上に備える背面電極板ａと、この背面電
極板ａに対向して配置され基板ｂ１上に透明電極ｂ２を
備える観察者側電極板ｂと、これら両電極板ａ、ｂの間
に封入された液晶物質ｃと、上記背面電極板ａの基板ａ
１の裏面に偏光フィルムｄを介して貼着された光反射板
ｅと、上記観察者側電極板ｂ表面に貼着された偏光フィ
ルムｆとでその主要部が構成され、観察者側電極板ｂ側
から入射した外光を上記光反射板ｅで反射させて画面表
示するものである。尚、上記光反射板ｅとしては、光散
乱性を付与して表示画面の視野角を拡大させるため、例
えば、エンボス加工して細かい凹凸を設けたアルミニウ
ム箔や、機械的に表面を粗化して設けた有機フィルムの
細かい凹凸面にアルミニウム薄膜を成膜したもの等が適
用されている。また、図４においてｇ及びｈは必要に応
じて設けられる位相差フィルムを示しており、説明の便
のため液晶物質ｃの配向膜はその図示を省略している。In the following, the reflective liquid crystal display device shown in FIG. 4 has a back electrode plate a having a transparent electrode a2 for applying a voltage to a liquid crystal substance c on a substrate a1, and a back electrode plate a facing the back electrode plate a. A viewer-side electrode plate b having a transparent electrode b2 disposed on the substrate b1, a liquid crystal substance c enclosed between the two electrode plates a and b, and a substrate a of the back electrode plate a.
1. A light reflection plate e attached to the back surface of 1 through a polarizing film d, and a polarizing film f attached to the surface of the observer-side electrode plate b constitute a main part of the observer-side electrode plate. The external light incident from the b side is reflected by the light reflection plate e and displayed on the screen. As the light reflection plate e, in order to impart a light scattering property to expand the viewing angle of the display screen, for example, an aluminum foil which is embossed and provided with fine irregularities, or a surface which is mechanically roughened is used. For example, an organic film provided with an aluminum thin film formed on a fine uneven surface is applied. Further, in FIG. 4, g and h indicate retardation films provided as necessary, and the illustration of the alignment film of the liquid crystal substance c is omitted for convenience of description.
【０００８】また、図５に示された反射型液晶表示装置
は、偏光フィルムｄが設けられていない点を除き図４に
示された反射型液晶表示装置と略同一である。The reflective liquid crystal display device shown in FIG. 5 is substantially the same as the reflective liquid crystal display device shown in FIG. 4 except that the polarizing film d is not provided.
【０００９】次に、図６に示された光反射性金属電極を
適用した反射型液晶表示装置は、光反射性金属電極ａ'2
を備える背面電極板（光反射性電極板）ａと、これに対
向して配置され透明電極ｂ２を備える観察者側電極板ｂ
と、これら両電極板ａ、ｂの間に封入された液晶物質ｃ
とでその主要部が構成され、観察者側電極板ｂ側から入
射した外光を光反射性金属電極ａ'2で反射させて画面表
示するものである。尚、上記光反射性金属電極ａ'2とし
ては表面に凹凸が設けられたアルミニウム薄膜や銀薄膜
等が適用されている。また、図６中、ｂ３は光散乱層を
示している。Next, the reflective liquid crystal display device using the light-reflecting metal electrode shown in FIG. 6 has a light-reflecting metal electrode a'2.
A rear electrode plate (light-reflecting electrode plate) a, and an observer-side electrode plate b that is arranged to face the rear electrode plate a and has a transparent electrode b2.
And a liquid crystal substance c enclosed between the two electrode plates a and b
The main part is constituted by and, and external light incident from the observer-side electrode plate b side is reflected by the light-reflecting metal electrode a'2 to be displayed on the screen. As the light reflecting metal electrode a'2, an aluminum thin film, a silver thin film or the like having an uneven surface is applied. Further, in FIG. 6, b3 indicates a light scattering layer.
【００１０】ところで、図４に示すような偏光フィルム
を２枚使用するタイプの反射型液晶表示装置において
は、外光は２枚の偏光フィルムｄ、ｆを２度づつ通過す
るためその通過の度に減衰し易く、その光利用効率が３
０〜１５％程度に低下して明るい画面表示を困難にして
いる。これに対し、図５や図６に示された反射型液晶表
示装置においては偏光フィルムを１枚しか使用しないた
め光減衰が少なく、明るい画面表示が可能である。この
ように明るい画面表示を得るためには偏光フィルムを１
枚だけ使用するタイプ（偏光フィルム１枚タイプ）の反
射型液晶表示装置が適している。By the way, in a reflection type liquid crystal display device of a type using two polarizing films as shown in FIG. 4, external light passes through the two polarizing films d and f twice, so that the degree of passage of the external light is different. The light utilization efficiency is 3
It is reduced to about 0 to 15%, making it difficult to display a bright screen. On the other hand, in the reflective liquid crystal display device shown in FIGS. 5 and 6, since only one polarizing film is used, light attenuation is small and bright screen display is possible. To obtain such a bright screen display, use a polarizing film
A reflective liquid crystal display device of a type that uses only one sheet (one polarizing film type) is suitable.
【００１１】そして、偏光フィルム１枚タイプの反射型
液晶表示装置においては、一般に、ノーマリーホワイト
表示方式が採用されている。以下、図５に従って説明す
ると、両電極ａ２、ｂ２に電圧を印加しない状態では、
観察者側電極板ｂ側から入射した外光はまず偏光フィル
ムｆを透過して直線偏光に変化し、位相差フィルムｇ及
びツイストされた液晶物質ｃによって偏光面が回転さ
れ、背面電極板ａを通過した後、光反射板ｅで反射され
て偏光面が反転し、更に液晶物質ｃと位相差フィルムｇ
で回転され、偏光フィルムｆを透過する。これに対し、
両電極ａ２、ｂ２に電圧が印加された場合には、位相差
フィルムｇを透過した光線は、その偏光面を維持したま
ま液晶物質ｃと背面電極板ａを透過し、光反射板ｅで反
射されて偏光面が反転し、再度、位相差フィルムｇによ
り回転され、偏光フィルムｆで遮断される。A normally white display system is generally adopted in the reflection type liquid crystal display device of one polarizing film type. In the following description with reference to FIG. 5, when no voltage is applied to both electrodes a2 and b2,
External light incident from the observer-side electrode plate b first passes through the polarizing film f and changes into linearly polarized light, and the polarization plane is rotated by the retardation film g and the twisted liquid crystal substance c, and the rear electrode plate a is changed. After passing, it is reflected by the light reflection plate e and the polarization plane is inverted, and the liquid crystal substance c and the retardation film g are further reflected.
It is rotated by and is transmitted through the polarizing film f. In contrast,
When a voltage is applied to both electrodes a2 and b2, the light beam that has passed through the retardation film g passes through the liquid crystal substance c and the back electrode plate a while maintaining its polarization plane, and is reflected by the light reflection plate e. Then, the plane of polarization is reversed, and it is rotated again by the retardation film g and blocked by the polarization film f.
【００１２】尚、図６に示された光反射性金属電極タイ
プの反射型液晶表示装置においては、上記光反射板ｅの
代わりに光反射性金属電極ａ'2によって外光が反射され
る他は図５に示された液晶表示装置と同様である。In the reflection type liquid crystal display device of the light reflecting metal electrode type shown in FIG. 6, outside light is reflected by the light reflecting metal electrode a'2 instead of the light reflecting plate e. Is similar to the liquid crystal display device shown in FIG.
【００１３】ところで、このような偏光フィルム１枚タ
イプの反射型液晶表示装置において上記光反射板ｅや光
反射性金属電極ａ'2としてアルミニウム薄膜を適用した
場合、その光反射率は入射光の偏光面と入射角とに応じ
て変化する。すなわち、アルミニウム薄膜におけるＳ偏
光の反射率ＳAlとＰ偏光の反射率ＰAlは、入射角θに応
じ図７に示すように大きく変化する。そして、入射角θ
の大きい斜め方向からアルミニウム薄膜製の光反射性金
属電極に直線偏光が入射して反射された場合、そのＳ偏
光成分の反射率ＳAlとＰ偏光成分の反射率ＰAlとが互い
に異なることから、反射光中に占めるＳ偏光とＰ偏光の
比率が上記入射光中の比率と異なため、反射光は入射光
と異なる偏光面を有することになる。そして、このよう
に反射光の偏光面が入射光の偏光面と異なりかつその凹
凸表面に対する入射角に応じて変化するため、反射光の
偏光面の制御及びその透過・不透過の制御が困難とな
り、表示画面のコントラストが低下し易い欠点があっ
た。By the way, when an aluminum thin film is applied as the light reflection plate e or the light-reflective metal electrode a'2 in the reflection type liquid crystal display device of such a polarizing film type, the light reflectance thereof is It changes depending on the plane of polarization and the angle of incidence. That is, the reflectance P Al of the reflectance of S-polarized light in the aluminum thin S Al and P-polarized light is largely changed as shown in accordance with Figure 7 to the incident angle theta. And the incident angle θ
Big obliquely to the light reflective metal electrode made of aluminum thin film if the linearly polarized light is reflected by the incident, since the reflectance P Al reflectance S Al and P-polarized light component of the S-polarized light component different from each other Since the ratio of S-polarized light and P-polarized light in the reflected light is different from that in the incident light, the reflected light has a polarization plane different from that of the incident light. Then, since the polarization plane of the reflected light is different from the polarization plane of the incident light and changes depending on the incident angle with respect to the uneven surface, it becomes difficult to control the polarization plane of the reflected light and control the transmission / non-transmission thereof. However, there is a drawback that the contrast of the display screen is easily lowered.
【００１４】これに対し、偏光フィルム１枚タイプの反
射型液晶表示装置において上記光反射板ｅや光反射性金
属電極ａ'2として銀薄膜が適用された場合には、図７に
示すようにそのＳ偏光の反射率ＳAgとＰ偏光の反射率Ｐ
Agがほぼ等しく、しかも極めて高い反射率を有するた
め、明るくしかもコントラストの高い画面表示が可能と
なる。On the other hand, when a silver thin film is applied as the light reflecting plate e or the light reflecting metal electrode a'2 in the reflection type liquid crystal display device of one polarizing film type, as shown in FIG. The reflectance S Ag of the S polarized light and the reflectance P of the P polarized light
Since the Ag is almost equal and the reflectance is extremely high, bright and high-contrast screen display is possible.
【００１５】[0015]
【発明が解決しようとする課題】このように銀薄膜は優
れた光反射特性を有するが、その反面、空気中に存在す
るイオウ化合物や水分と化合しその表面に硫化物や酸化
物が生成されて変色し易く、液晶表示装置の製造工程に
おいて銀薄膜の光反射率が低下し液晶表示装置の表示画
面の明るさを低下させてしまうことがあった。As described above, the silver thin film has excellent light-reflecting properties, but on the other hand, it forms a sulfide or an oxide on its surface by combining with a sulfur compound or water present in the air. In some cases, the light reflectance of the silver thin film is lowered in the manufacturing process of the liquid crystal display device, and the brightness of the display screen of the liquid crystal display device is lowered.
【００１６】本発明はこのような問題点に着目してなさ
れたもので、その課題とするところは、入射光の入射角
と偏光面に拘らず高い光反射率を有する銀の薄膜を適用
し、しかも経時劣化がなく保存安定性に優れた光反射板
と反射型液晶表示装置用光反射板並びに反射型液晶表示
装置用光反射性電極板を提供することにある。The present invention has been made by paying attention to such a problem, and its object is to apply a silver thin film having a high light reflectance regardless of the incident angle of incident light and the polarization plane. Another object of the present invention is to provide a light reflection plate which is not deteriorated with time and has excellent storage stability, a light reflection plate for a reflection type liquid crystal display device, and a light reflection electrode plate for a reflection type liquid crystal display device.
【００１７】[0017]
【課題を解決するための手段】すなわち、請求項１記載
の発明に係る光反射板は、基板上に、膜厚６０ｎｍ以上
の銀または銀合金から成る光反射性金属薄膜と、この光
反射性金属薄膜の上側に設けられた防湿性透明薄膜と、
上記光反射性金属薄膜と防湿性透明薄膜との間に設けら
れこれら両薄膜を互いに接着させる透明無機薄膜とを備
えることを特徴とするものである。That is, a light reflecting plate according to the invention of claim 1 is a light reflecting metal thin film made of silver or a silver alloy having a film thickness of 60 nm or more on a substrate, and this light reflecting property. A moisture-proof transparent thin film provided on the upper side of the metal thin film,
It is characterized by comprising a transparent inorganic thin film provided between the light-reflecting metal thin film and the moisture-proof transparent thin film and adhering these two thin films to each other.
【００１８】そして、この請求項１記載の発明に係る光
反射板においては、上記透明無機薄膜が光反射性金属薄
膜と防湿性透明薄膜の双方を強固に接着してこれら３層
の薄膜を一体化させ、かつ、強固に接着された防湿性透
明薄膜が上記光反射性金属薄膜を空気中のイオウ化合物
や水分から保護する。従って、上記光反射性金属薄膜の
経時劣化が防止されてその保存安定性が向上するため、
空気中のイオウ化合物や水分に起因した表示欠陥のな
い、明るくコントラストの高い液晶表示装置等を安定し
て製造することが可能となる。In the light reflecting plate according to the present invention, the transparent inorganic thin film firmly adheres both the light reflecting metal thin film and the moisture-proof transparent thin film to integrally form these three thin films. The moisture-proof transparent thin film, which is solidified and firmly adhered, protects the light-reflecting metal thin film from sulfur compounds and moisture in the air. Therefore, since the deterioration of the light-reflecting metal thin film with time is prevented and its storage stability is improved,
It is possible to stably manufacture a bright and high-contrast liquid crystal display device or the like that does not have a display defect caused by a sulfur compound or water in the air.
【００１９】この様な技術的手段において上記防湿性透
明薄膜としては空気中の水分を透過させ難いものであれ
ばよく、例えば、有機材料や無機材料から構成される薄
膜が適用できる。尚、高い防湿性の点から、酸化珪素、
酸化チタン、酸化ジルコニウム、酸化セリウム、酸化タ
ンタル等の金属酸化物の薄膜が好ましく（但し、銀と固
溶しにくい金属の酸化物であることが好ましい）、中で
も価格や成膜速度等の加工適性の点から酸化珪素を基材
とする薄膜が好ましい。請求項２に係る発明はこのよう
な技術的理由に基づいてなされている。In such a technical means, the moisture-proof transparent thin film may be one that does not easily allow moisture in the air to pass therethrough, and for example, a thin film made of an organic material or an inorganic material can be applied. From the viewpoint of high moisture resistance, silicon oxide,
A thin film of a metal oxide such as titanium oxide, zirconium oxide, cerium oxide, or tantalum oxide is preferable (however, a metal oxide that is hard to form a solid solution with silver is preferable), and among them, processing suitability such as price and film forming speed. From this point of view, a thin film based on silicon oxide is preferable. The invention according to claim 2 is based on such a technical reason.
【００２０】すなわち、請求項２に係る発明は、請求項
１記載の発明に係る光反射板を前提とし、上記防湿性透
明薄膜が、酸化珪素を基材とする酸化膜にて構成されて
いることを特徴とするものである。That is, the invention according to claim 2 is based on the light reflecting plate according to the invention according to claim 1, and the moisture-proof transparent thin film is composed of an oxide film having silicon oxide as a base material. It is characterized by that.
【００２１】尚、酸化珪素を基材とする酸化膜として
は、光透過特性の観点からその組成がＳｉＯ2 に近いも
のが望ましい。The oxide film having silicon oxide as a base material preferably has a composition close to that of SiO 2 from the viewpoint of light transmission characteristics.
【００２２】次に、上記透明無機薄膜としては、酸化イ
ンジウム、酸化亜鉛、又は酸化銅を基材とする薄膜が適
用でき、かつ、光反射性金属薄膜を反射型液晶表示装置
の光反射性金属電極に利用した場合そのパターニング適
性に優れ、しかも上記光反射性金属薄膜及び防湿性透明
薄膜との密着性に優れた（特に、防湿性透明薄膜が酸化
珪素を基材とする場合にはこの酸化珪素製の防湿性透明
薄膜との密着性に極めて優れている）酸化インジウムを
主成分とする薄膜が好ましく適用できる。請求項３に係
る発明はこのような技術的理由に基づいてなされてい
る。Next, as the transparent inorganic thin film, a thin film having indium oxide, zinc oxide or copper oxide as a base material can be applied, and a light-reflecting metal thin film is used as a light-reflecting metal of a reflection type liquid crystal display device. When used as an electrode, it has excellent patterning suitability and excellent adhesion to the light-reflecting metal thin film and the moisture-proof transparent thin film (especially when the moisture-proof transparent thin film uses silicon oxide as a base material, this oxidation A thin film containing indium oxide as a main component is preferably applicable because it has excellent adhesion to a moisture-proof transparent thin film made of silicon. The invention according to claim 3 is based on such a technical reason.
【００２３】すなわち、請求項３に係る発明は請求項１
又は２記載の発明に係る光反射板を前提とし、上記透明
無機薄膜が、酸化インジウムを基材とする無機酸化物に
て構成されていることを特徴とするものである。That is, the invention according to claim 3 is claim 1
Alternatively, on the premise of the light reflection plate according to the invention described in 2, the transparent inorganic thin film is composed of an inorganic oxide having indium oxide as a base material.
【００２４】このような透明無機薄膜としては、酸化イ
ンジウム薄膜の他、酸化インジウムに、銀との固溶域が
ないか又は小さく、かつ、液晶物質へのイオン性不純物
の溶出による液晶物質の損傷が起こり難い酸化物を添加
して構成される無機酸化物の薄膜が利用できる。このよ
うな酸化物としては、例えばＢｉ、Ｈｆ、Ｃｅ、Ｔａ、
Ｇｅ、Ｓｉ、Ｐｂ、Ｔｉ、Ｚｒ等の無機酸化物が挙げら
れる。As such a transparent inorganic thin film, in addition to an indium oxide thin film, indium oxide has no or a small solid solution area with silver, and the liquid crystal substance is damaged by elution of ionic impurities into the liquid crystal substance. It is possible to use a thin film of an inorganic oxide that is formed by adding an oxide that does not easily occur. Examples of such oxides include Bi, Hf, Ce, Ta,
Examples thereof include inorganic oxides such as Ge, Si, Pb, Ti and Zr.
【００２５】ところで、上記防湿性透明薄膜の膜厚と透
明無機薄膜の膜厚の合計が可視波長の１／４以上の場
合、防湿性透明薄膜表面の反射光と光反射性金属薄膜表
面の反射光が互いに干渉してこの反射光が着色すること
がある。このような着色を防止するため、防水性透明薄
膜と透明無機薄膜の合計膜厚は可視波長の１／４以下で
あることが望ましい。また、十分な防湿性を得るためそ
の合計膜厚は５ｎｍ以上であることが望ましい。請求項
４に係る発明はこのような技術的理由に基づいてなされ
ている。When the total thickness of the moisture-proof transparent thin film and the transparent inorganic thin film is 1/4 or more of the visible wavelength, the light reflected by the moisture-proof transparent thin film surface and the light-reflecting metal thin film surface are reflected. Light may interfere with each other and the reflected light may be colored. In order to prevent such coloring, the total film thickness of the waterproof transparent thin film and the transparent inorganic thin film is preferably 1/4 or less of the visible wavelength. Further, in order to obtain sufficient moisture resistance, the total film thickness is preferably 5 nm or more. The invention according to claim 4 is based on such a technical reason.
【００２６】すなわち、請求項４に係る発明は、請求項
１〜３のいずれかに記載の光反射板を前提とし、上記防
湿性透明薄膜と透明無機薄膜の合計膜厚が、可視光線の
波長の１／４以下で、かつ、５ｎｍ以上であることを特
徴とするものである。That is, the invention according to claim 4 is based on the light reflection plate according to any one of claims 1 to 3, and the total film thickness of the moisture-proof transparent thin film and the transparent inorganic thin film is the wavelength of visible light. Of 1/4 or less and 5 nm or more.
【００２７】次に、請求項１〜４に係る発明において、
基板と光反射性金属薄膜とを強固に接着させるため、こ
れら基板と光反射性金属薄膜との間に接着層を設けるこ
とが望ましい。この接着層としては、基板との接着力及
び光反射性金属薄膜との接着力に優れたものであれば任
意のものを利用することができるが、基板が有機材料の
場合、この基板を透過する水分により光反射性金属薄膜
が損傷を受けないように上記接着剤として防湿性に優れ
たものが望ましい。また、光反射性金属薄膜が反射型液
晶表示装置の光反射性金属電極として利用される場合に
は、イオン溶出が少なく、耐性面で安定した酸化インジ
ウム又は酸化アルミニウムを基材とする無機酸化物が好
ましい。請求項５及び６に係る発明はこのような技術的
理由に基づいてなされたものである。Next, in the invention according to claims 1 to 4,
In order to firmly bond the substrate and the light-reflecting metal thin film, it is desirable to provide an adhesive layer between the substrate and the light-reflecting metal thin film. As this adhesive layer, any adhesive can be used as long as it has excellent adhesiveness to the substrate and adhesiveness to the light-reflective metal thin film, but when the substrate is an organic material, it is transparent to this substrate. It is desirable that the adhesive has excellent moisture resistance so that the light reflecting metal thin film is not damaged by the moisture. In addition, when the light-reflecting metal thin film is used as a light-reflecting metal electrode of a reflective liquid crystal display device, an inorganic oxide containing indium oxide or aluminum oxide as a base material, which has little ion elution and is stable in resistance. Is preferred. The inventions according to claims 5 and 6 are made based on such technical reasons.
【００２８】すなわち、請求項５に係る発明は、請求項
１〜４のいずれかに記載の光反射板を前提とし、上記光
反射性金属薄膜と基板との間に、これらを互いに接着さ
せる接着層が設けられていることを特徴とし、また、請
求項６に係る発明は、請求項５記載の光反射板を前提と
し、上記接着層が、酸化インジウム又は酸化アルミニウ
ムを基材とする無機酸化物にて構成されていることを特
徴とするものである。That is, the invention according to claim 5 is premised on the light reflecting plate according to any one of claims 1 to 4, and an adhesive for adhering the light reflecting metal thin film and the substrate to each other. The invention according to claim 6 is based on the light reflection plate according to claim 5, wherein the adhesive layer is an inorganic oxide having indium oxide or aluminum oxide as a base material. It is characterized by being composed of objects.
【００２９】尚、請求項１〜６記載の発明に係る光反射
板は、反射型液晶表示装置の光反射板や光反射性金属電
極として利用できる他、太陽電池素子の光入射側とは反
対側に配置され、太陽電池素子を透過した光線を反射さ
せる光反射性電極として利用することもできる。すなわ
ち、この光反射性電極を配置した場合、太陽電池素子を
透過した光線がこの光反射性電極の作用で反射され、再
度、太陽電池素子に入射されるためその発電効率を向上
させることが可能となる。The light reflecting plate according to the present invention can be used as a light reflecting plate or a light reflecting metal electrode of a reflection type liquid crystal display device and is opposite to the light incident side of a solar cell element. It can also be used as a light-reflective electrode that is disposed on the side and reflects the light rays that have passed through the solar cell element. That is, when this light-reflecting electrode is arranged, the light rays that have passed through the solar cell element are reflected by the action of the light-reflecting electrode and are incident on the solar cell element again, so that the power generation efficiency can be improved. Becomes
【００３０】次に、請求項７〜１０に係る発明は、請求
項１〜６記載の発明に係る光反射板の用途を特定した発
明に関する。Next, the invention according to claims 7 to 10 relates to the invention in which the use of the light reflecting plate according to the invention according to claims 1 to 6 is specified.
【００３１】すなわち、請求項７に係る発明は、透明電
極を有する背面電極板と、この背面電極板に対向して配
設されかつ透明電極を有する観察者側電極板と、これ等
両電極板間に封入された液晶物質と、上記背面電極板の
外側に設けられた光反射板とを備え、上記透明電極間に
電圧を印加し液晶物質を駆動させて画面表示する反射型
液晶表示装置に適用される上記光反射板を前提とし、基
板上に、膜厚６０ｎｍ以上の銀または銀合金から成る光
反射性金属薄膜と、この光反射性金属薄膜の上側に設け
られた防湿性透明薄膜と、上記光反射性金属薄膜と防湿
性透明薄膜との間に設けられこれら両薄膜を互いに接着
させる透明無機薄膜とを備えることを特徴とし、また、
請求項８に係る発明は、光反射性の金属電極を有する光
反射性電極板と、この光反射性電極板に対向して配設さ
れかつ透明電極を有する観察者側電極板と、これ等両電
極板間に封入された液晶物質とを備え、上記電極間に電
圧を印加し液晶物質を駆動させて画面表示する反射型液
晶表示装置に適用される上記光反射性電極板を前提と
し、基板上に、膜厚６０ｎｍ以上の銀または銀合金から
成る光反射性金属電極と、この光反射性金属電極の上側
に設けられた防湿性の電気絶縁性透明薄膜と、上記光反
射性金属電極と電気絶縁性透明薄膜との間に設けられこ
れらを互いに接着させる透明無機薄膜とを備えることを
特徴とするものである。That is, the invention according to claim 7 is such that a back electrode plate having a transparent electrode, an observer-side electrode plate disposed facing the back electrode plate and having a transparent electrode, and both of these electrode plates. A reflective liquid crystal display device comprising a liquid crystal substance enclosed between the transparent electrode and a light reflection plate provided outside the back electrode plate, and driving a liquid crystal substance by applying a voltage between the transparent electrodes to display a screen. On the premise of the above-mentioned light reflecting plate to be applied, a light reflecting metal thin film made of silver or a silver alloy having a film thickness of 60 nm or more, and a moisture-proof transparent thin film provided on the upper side of the light reflecting metal thin film. , Characterized by comprising a transparent inorganic thin film provided between the light-reflecting metal thin film and the moisture-proof transparent thin film to adhere these two thin films to each other,
The invention according to claim 8 is a light-reflective electrode plate having a light-reflective metal electrode, an observer-side electrode plate disposed so as to face the light-reflective electrode plate and having a transparent electrode, and the like. With a liquid crystal material enclosed between both electrode plates, on the premise of the light-reflective electrode plate applied to a reflective liquid crystal display device for displaying a screen by applying a voltage between the electrodes to drive the liquid crystal material, A light-reflecting metal electrode made of silver or a silver alloy having a film thickness of 60 nm or more on a substrate, a moisture-proof electrically insulating transparent thin film provided on the upper side of the light-reflecting metal electrode, and the light-reflecting metal electrode. And an electrically insulating transparent thin film, and a transparent inorganic thin film for adhering them to each other.
【００３２】尚、請求項７及び８に係る発明において上
記光反射性金属薄膜（光反射性金属電極）、防湿性透明
薄膜（電気絶縁性透明薄膜）、及び、透明無機薄膜につ
いては、請求項１〜６に係る発明において適用される光
反射性金属薄膜、防湿性透明薄膜、及び、透明無機薄膜
と同一の薄膜が利用できる。In the invention according to claims 7 and 8, the light-reflective metal thin film (light-reflective metal electrode), the moisture-proof transparent thin film (electrically insulating transparent thin film), and the transparent inorganic thin film are described in the claims. The same thin films as the light-reflecting metal thin film, the moisture-proof transparent thin film, and the transparent inorganic thin film applied in the inventions according to 1 to 6 can be used.
【００３３】次に、上記透明無機薄膜が酸化インジウム
を基材とする無機酸化物にて構成されている場合、この
透明無機薄膜は導電性を有することからこの透明無機薄
膜を上記光反射性金属電極の形状に位置整合させて電極
の一部として利用することが可能となる。請求項９に係
る発明はこの様な理由によりなされている。Next, when the transparent inorganic thin film is composed of an inorganic oxide having indium oxide as a base material, the transparent inorganic thin film has conductivity, and thus the transparent inorganic thin film is formed by the light reflecting metal. It becomes possible to align the shape of the electrode and use it as a part of the electrode. The invention according to claim 9 is made for such a reason.
【００３４】すなわち、請求項９に係る発明は、請求項
８記載の発明に係る反射型液晶表示装置用光反射性電極
板を前提とし、上記透明無機薄膜が、酸化インジウムを
基材とする無機酸化物にて構成され、かつ、この透明無
機薄膜と上記光反射性金属電極とが互いに位置整合して
電極形状に積層されていることを特徴とするものであ
る。That is, the invention according to claim 9 is premised on the light-reflective electrode plate for a reflective liquid crystal display device according to claim 8, wherein the transparent inorganic thin film is an inorganic material containing indium oxide as a base material. The transparent inorganic thin film and the light-reflecting metal electrode are layered in the shape of an electrode so as to be aligned with each other.
【００３５】尚、本発明において上記電極の形状は、そ
の適用される表示装置の種類により異なる。例えば、単
純マトリクス駆動方式の反射型液晶表示装置においては
表示画面の画素に対応する部位をつなぐストライプ形状
である。In the present invention, the shape of the electrode differs depending on the type of display device to which the electrode is applied. For example, in a reflection type liquid crystal display device of a simple matrix drive system, it has a stripe shape connecting parts corresponding to pixels of a display screen.
【００３６】また、上記透明無機薄膜が酸化インジウム
を基材とする無機酸化物にて構成されている場合、銀又
は銀合金から成る光反射性金属電極と酸化インジウムを
基材とする無機酸化物は、いずれも硝酸をエッチング液
としたエッチング処理によりパターニングすることが可
能となる。すなわち、基板上に銀又は銀合金から成る光
反射性金属薄膜と酸化インジウムを基材とする無機酸化
物とを成膜し、かつ、この無機酸化物薄膜上に電極形状
のレジスト膜を形成した後、このレジスト膜から露出し
た部位を硝酸系エッチング液によってエッチング除去す
ることにより、上記光反射性金属薄膜と無機酸化物薄膜
が互いに位置整合した電極形状にパターニングすること
が可能である。また、上記接着層が酸化インジウムを基
材とする無機酸化物の場合、この接着層も上記光反射性
金属薄膜と無機酸化物薄膜のパターニングと同時に、こ
れら光反射性金属薄膜と無機酸化物薄膜に位置整合した
上記電極形状にパターニングすることが可能である。こ
のエッチング液としては、硝酸の他、塩酸や硫酸又は酢
酸等の他種の酸を硝酸に添加して成る硝酸系の混酸、あ
るいは界面活性剤を若干量添加した硝酸等が利用でき
る。When the transparent inorganic thin film is composed of an inorganic oxide having indium oxide as a base material, a light-reflecting metal electrode made of silver or a silver alloy and the inorganic oxide having indium oxide as a base material. Any of these can be patterned by an etching process using nitric acid as an etching solution. That is, a light-reflecting metal thin film made of silver or a silver alloy and an inorganic oxide having indium oxide as a base material were formed on a substrate, and an electrode-shaped resist film was formed on the inorganic oxide thin film. Then, the exposed portion of the resist film is removed by etching with a nitric acid-based etching solution, so that the light-reflecting metal thin film and the inorganic oxide thin film can be patterned into electrode shapes aligned with each other. When the adhesive layer is an inorganic oxide based on indium oxide, this adhesive layer is also patterned at the same time as the patterning of the light-reflecting metal thin film and the inorganic oxide thin film, and at the same time, the light-reflecting metal thin film and the inorganic oxide thin film. It is possible to pattern the above electrode shape aligned with the above. As the etching solution, nitric acid, nitric acid-based mixed acid obtained by adding other kinds of acids such as hydrochloric acid, sulfuric acid or acetic acid to nitric acid, or nitric acid with a slight amount of a surfactant added can be used.
【００３７】次に、上記電気絶縁性透明薄膜が電極形状
の光反射性金属薄膜と無機酸化物薄膜を被覆してその表
面と側端面を保護している場合、この側端面等からの空
気の侵入を抑制してその変色を防止し光反射性金属電極
の保存安定性を一層向上させることが可能となる。請求
項１０に係る発明はこのような技術的理由に基づいてな
されたものである。Next, when the electrically insulating transparent thin film covers the electrode-shaped light-reflecting metal thin film and the inorganic oxide thin film to protect the surface and the side end face, air from the side end face and the like is removed. It becomes possible to suppress the invasion, prevent the discoloration, and further improve the storage stability of the light-reflecting metal electrode. The invention according to claim 10 is based on such a technical reason.
【００３８】すなわち、請求項１０に係る発明は、請求
項８記載の発明に係る反射型液晶表示装置用光反射性電
極板を前提とし、上記電気絶縁性透明薄膜が、互いに位
置整合して電極形状に積層された透明無機薄膜と光反射
性金属電極の表面と側端面を被覆していることを特徴と
するものである。That is, the invention according to claim 10 is premised on the light-reflective electrode plate for a reflective liquid crystal display device according to claim 8, wherein the electrically insulating transparent thin films are aligned with each other to form an electrode. It is characterized in that the transparent inorganic thin film laminated in a shape and the surface and side end surface of the light-reflecting metal electrode are covered.
【００３９】尚、本発明における基板としては、例え
ば、ガラス又は有機樹脂フィルムが利用できる。また、
この基板表面に可視波長と同程度の深さ又はそれ以上の
深さの微細凹凸を設け、この凹凸面に沿って光反射性金
属薄膜（光反射性金属電極）を形成した場合、この光反
射性金属薄膜（光反射性金属電極）表面に上記微細凹凸
が再現されるため入射光を乱反射させて表示画面の視野
角を増大させることが可能となる。また、本発明に係る
光反射板を光反射板外付タイプの反射型液晶表示装置の
光反射板として利用する場合には、上記基板として厚さ
２００〜５００μｍのものが好ましく、他方、光反射性
金属電極タイプの反射型液晶表示装置の光反射性電極板
として利用する場合には、その物理的強度を確保するた
め厚さ０．１〜１．２ｍｍのものが好ましい。As the substrate in the present invention, for example, glass or organic resin film can be used. Also,
When light-reflective metal thin film (light-reflective metal electrode) is formed along the surface of the substrate with fine unevenness having a depth of about the same as the visible wavelength or more, the light reflection Since the fine irregularities are reproduced on the surface of the reflective metal thin film (light-reflective metal electrode), incident light can be diffusely reflected to increase the viewing angle of the display screen. Further, when the light reflection plate according to the present invention is used as a light reflection plate of a reflection type liquid crystal display device of an external light reflection plate type, the substrate having a thickness of 200 to 500 μm is preferable, while the light reflection plate is used. When used as a light-reflective electrode plate of a reflective liquid crystal display device of a reflective metal electrode type, it preferably has a thickness of 0.1 to 1.2 mm in order to secure its physical strength.
【００４０】また、本発明における銀又は銀合金の金属
薄膜としては、銀単体の薄膜の他、銀の拡散を防止しあ
るいはその硬度を増大させるため、銀の固溶限度以下の
濃度で他の元素を添加した合金が利用できる。このよう
な添加元素としては、例えば、Ｍｇ、Ｉｎ、Ａｌ、Ｔ
ｉ、Ｚｒ、Ｃｅ又はＳｉ等が適用できる。The metal thin film of silver or silver alloy in the present invention may be a thin film of silver alone, or other metal at a concentration below the solid solution limit of silver in order to prevent the diffusion of silver or increase its hardness. Alloys with added elements can be used. Examples of such additive elements include Mg, In, Al, T
i, Zr, Ce, Si or the like can be applied.
【００４１】尚、銀又は銀合金の金属薄膜は、一般に、
反射面の密度が高いほどその光反射率が増大するため、
上記薄膜表面の法線方向が密度の高い（１１１）面とな
るように揃えて配向させることが望ましい。また、銀又
は銀合金の金属薄膜を成膜するに際して、高成膜速度
で、しかも、高真空側で成膜するほどその密度が増大し
て光反射率が増大する。The metal thin film of silver or silver alloy is generally
The higher the density of the reflecting surface, the more its light reflectance increases, so
It is desirable that the thin film surface be aligned so that the normal direction of the thin film surface is the (111) plane with high density. In addition, when a metal thin film of silver or a silver alloy is formed, the density is increased and the light reflectance is increased as the film is formed at a higher film formation rate and on the higher vacuum side.
【００４２】また、上記銀又は銀合金の金属薄膜の成膜
に際しては基板の温度が低温に維持されていることが望
ましい。基板を高温に加熱した状態で成膜することも可
能であるが、この場合、成膜された薄膜の光反射率が低
下することがある。このような理由から、成膜時におけ
る基板の温度は、好ましくは１８０℃以下、あるいは室
温である。尚、透明無機薄膜や接着層が酸化インジウム
を基材とする場合、そのエッチング適性を確保するた
め、これら透明無機薄膜や接着層も１８０℃以下又は室
温の基板温度で成膜することが望ましい。そして、銀又
は銀合金の金属薄膜と透明無機薄膜及び接着層の全体を
１８０℃以下又は室温の基板温度で成膜した後、これら
積層膜全体を硝酸でエッチングしてパターニングし、次
に２００℃以上の温度でアニーリング処理を施すことに
よりこれら積層膜全体の導電性を増大させることが可能
である。Further, it is desirable that the temperature of the substrate is maintained at a low temperature during the formation of the metal thin film of silver or silver alloy. It is possible to form a film while the substrate is heated to a high temperature, but in this case, the light reflectance of the formed thin film may decrease. For these reasons, the temperature of the substrate during film formation is preferably 180 ° C. or lower, or room temperature. When the transparent inorganic thin film or the adhesive layer uses indium oxide as the base material, it is desirable to form the transparent inorganic thin film or the adhesive layer at a substrate temperature of 180 ° C. or lower or room temperature in order to secure the etching suitability. Then, after the metal thin film of silver or silver alloy, the transparent inorganic thin film, and the adhesive layer are entirely deposited at a substrate temperature of 180 ° C. or lower or room temperature, the entire laminated film is etched and patterned with nitric acid, and then 200 ° C. By performing the annealing treatment at the above temperature, it is possible to increase the conductivity of these laminated films as a whole.
【００４３】尚、この基板上に上述した銀又は銀合金の
金属薄膜や透明無機薄膜等を成膜するに際しては、成膜
前に、この基板表面を洗浄することが望ましい。洗浄の
方法としては、イオンボンバート、逆スパッタリング、
アッシング、紫外線洗浄、グロー放電処理等が例示でき
る。When forming the above-mentioned silver or silver alloy thin metal film or transparent inorganic thin film on this substrate, it is desirable to wash the surface of this substrate before film formation. Ion bombardment, reverse sputtering,
Examples include ashing, ultraviolet cleaning, glow discharge treatment and the like.
【００４４】次に、本発明に係る光反射板を反射型液晶
表示装置の光反射板又は光反射性電極板として利用する
場合、これと共に観察者側電極板を構成する基板として
は、ガラス基板、プラスチックフィルム、プラスチック
ボード等の透明基板が適用でき、また、透明電極として
はＩＴＯやネサ膜等の透明導電膜が適用できる。Next, when the light reflection plate according to the present invention is used as a light reflection plate or a light reflection electrode plate of a reflection type liquid crystal display device, a glass substrate is used as a substrate that constitutes the observer side electrode plate together with the light reflection plate. A transparent substrate such as a plastic film or a plastic board can be applied, and a transparent conductive film such as ITO or a Nesa film can be applied as the transparent electrode.
【００４５】また、上記観察者側電極板に光散乱層を設
けて表示光を散乱させ表示画面の視野角を拡大させた
り、反射防止膜を設けてこの観察者側電極板表面からの
反射を防止することも可能である。この光散乱層は上記
光反射板を構成する基板の液晶物質と接触する内側、あ
るいは偏光フィルムと接触する外側のいずれに設けても
よい。また、観察者側電極板にカラーフィルター層を設
け表示光を着色させてカラー表示することも可能であ
る。Further, a light-scattering layer is provided on the observer-side electrode plate to scatter the display light to expand the viewing angle of the display screen, or an antireflection film is provided to prevent reflection from the observer-side electrode plate surface. It is also possible to prevent it. This light-scattering layer may be provided either on the inner side of the substrate constituting the light-reflecting plate in contact with the liquid crystal substance or on the outer side in contact with the polarizing film. It is also possible to provide a color filter layer on the viewer-side electrode plate to color the display light for color display.
【００４６】[0046]
【作用】この様な技術的手段によれば、基板上に、膜厚
６０ｎｍ以上の銀または銀合金から成る光反射性金属薄
膜と、この光反射性金属薄膜の上側に設けられた防湿性
透明薄膜と、上記光反射性金属薄膜と防湿性透明薄膜と
の間に設けられこれら両薄膜を互いに接着させる透明無
機薄膜とを備えるため、上記透明無機薄膜が光反射性金
属薄膜と防湿性透明薄膜の双方に強固に接着してこれら
３層の薄膜を一体化させ、かつ、強固に接着された防湿
性透明薄膜が上記光反射性金属薄膜を空気中のイオウ化
合物や水分から保護する。According to such technical means, a light-reflecting metal thin film made of silver or a silver alloy having a film thickness of 60 nm or more on a substrate, and a moisture-proof transparent film provided on the upper side of the light-reflecting metal thin film. A thin film, and a transparent inorganic thin film provided between the light-reflecting metal thin film and the moisture-proof transparent thin film to bond these two thin films to each other, so that the transparent inorganic thin film is a light-reflecting metal thin film and a moisture-proof transparent thin film. The moisture-proof transparent thin film firmly adheres to both of them to integrate these three thin films, and protects the light-reflecting metal thin film from sulfur compounds and moisture in the air.
【００４７】[0047]
【実施例】以下、図面を参照して本発明の実施例につい
て詳細に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【００４８】［実施例１］この実施例に係る光反射性電
極板１は、図１に示すように、厚さ０．７ｍｍのガラス
基板１１と、各々位置整合して電極形状に積層された厚
さ１０ｎｍの接着層１２と厚さ１２０ｎｍの銀から成る
光反射性金属電極１３及び厚さ７０ｎｍの透明無機薄膜
１４と、これら接着層１２、光反射性金属電極１３及び
透明無機薄膜１４を一様に被覆してその表面及び側端面
を保護する厚さ３５ｎｍの防湿性透明薄膜１５とでその
主要部が構成されており、かつ、上記接着層１２と透明
無機薄膜１４は、いずれも、酸化ジルコニウム（ＺｒＯ
2 ）を３atom％（原子％）含有する酸化インジウムの薄
膜にて構成されている。また、上記防湿性透明薄膜１５
は酸化珪素（ＳｉＯ2 ）にて構成されている。尚、上記
電極形状は、ピッチ２１０μｍ、幅２００μｍ、電極間
ギャップ１０μｍのストライプパターンに設定されてい
る。[Embodiment 1] As shown in FIG. 1, a light-reflective electrode plate 1 according to this embodiment is laminated in the shape of an electrode with a glass substrate 11 having a thickness of 0.7 mm, respectively. The adhesive layer 12 having a thickness of 10 nm, the light-reflecting metal electrode 13 made of silver having a thickness of 120 nm and the transparent inorganic thin film 14 having a thickness of 70 nm, and the adhesive layer 12, the light-reflecting metal electrode 13 and the transparent inorganic thin film 14 And a moisture-proof transparent thin film 15 having a thickness of 35 nm that covers the surface and side end faces in a similar manner, and the adhesive layer 12 and the transparent inorganic thin film 14 are both oxidized. Zirconium (ZrO
2 ) is composed of a thin film of indium oxide containing 3 atom% (atomic%). In addition, the moisture-proof transparent thin film 15
Is composed of silicon oxide (SiO 2 ). The electrode shape is set to a stripe pattern with a pitch of 210 μm, a width of 200 μm, and an interelectrode gap of 10 μm.
【００４９】そして、この光反射性電極板は、以下のよ
うな方法で製造したものである。The light reflecting electrode plate is manufactured by the following method.
【００５０】まず、ガラス基板１１の表面をアルカリ系
界面活性剤と水とで洗浄した後、真空槽内に収容し、逆
スパッタリングと呼ばれるプラズマ処理を施してさらに
洗浄した。First, the surface of the glass substrate 11 was washed with an alkaline surface active agent and water, then housed in a vacuum chamber and subjected to a plasma treatment called reverse sputtering for further washing.
【００５１】次に、ガラス基板１１を真空槽中から取り
出すことなく、このガラス基板１１を室温に維持した状
態で、スパッタリング法により、上記接着層１２を構成
する薄膜、光反射性金属電極１３を構成する薄膜並びに
透明無機薄膜１４を順次成膜した。Next, without removing the glass substrate 11 from the vacuum chamber, while maintaining the glass substrate 11 at room temperature, the thin film constituting the adhesive layer 12 and the light-reflecting metal electrode 13 were formed by the sputtering method. The constituent thin film and the transparent inorganic thin film 14 were sequentially formed.
【００５２】次に、周知のフォトリソプロセスに従い、
上記透明無機薄膜１４上にストライプパターン形状のレ
ジスト膜を形成し、５０％硝酸溶液を適用して上記３層
の薄膜をエッチングして上記ストライプパターンに加工
した。Next, according to the well-known photolithography process,
A stripe-pattern resist film was formed on the transparent inorganic thin film 14, and a 50% nitric acid solution was applied to etch the three-layer thin films to form the stripe pattern.
【００５３】次に、防湿性透明薄膜１５を成膜し、続い
て、２２０℃、３０分のアニール処理を施して上記光反
射性電極板１を形成した。Next, a moisture-proof transparent thin film 15 was formed, and subsequently, an annealing treatment at 220 ° C. for 30 minutes was performed to form the light-reflective electrode plate 1.
【００５４】こうして得られた光反射性電極板１を空気
中で１ケ月間放置してその光反射特性の変化を検査し
た。この結果、光反射性金属電極１３の表面に外観の変
化はまったく観察されず、また光反射率の変化もなかっ
た。The light-reflective electrode plate 1 thus obtained was allowed to stand in the air for one month and the change in its light-reflecting property was examined. As a result, no change in appearance was observed on the surface of the light-reflective metal electrode 13, and there was no change in light reflectance.
【００５５】尚、比較のため、ガラス基板上に銀薄膜を
成膜しこれを空気中で１ケ月間放置したところ、表面が
変色し、その反射率も約１０％低下した。For comparison, when a silver thin film was formed on a glass substrate and left in the air for 1 month, the surface was discolored and its reflectance was reduced by about 10%.
【００５６】［実施例２］この実施例に係る光反射性電
極板２は、図２に示すように、厚さ０．７ｍｍのガラス
基板２１と、各々位置整合して電極形状に積層された厚
さ２０ｎｍの接着層２２と厚さ１２０ｎｍの銀から成る
光反射性金属電極２３並びに厚さ６５ｎｍの透明無機薄
膜２４と、これら接着層２２、光反射性金属電極２３並
びに透明無機薄膜２４を一様に被覆してその側端面を保
護する厚さ４０ｎｍの防湿性透明薄膜２５とでその主要
部が構成されており、かつ、上記接着層２２は酸化アル
ミニウム（Ａｌ2Ｏ3）の薄膜にて構成され、他方、透明
無機薄膜２４は酸化ジルコニウム（ＺｒＯ2 ）を３atom
％含有する酸化インジウムの薄膜にて構成されている。
また、防湿性透明薄膜２５は酸化珪素（ＳｉＯ2 ）にて
構成されている。尚、上記電極形状は、ピッチ３００μ
ｍ、幅２９０μｍ、電極間ギャップ１０μｍのストライ
プパターンである。[Embodiment 2] As shown in FIG. 2, the light-reflective electrode plate 2 according to this embodiment is laminated in the shape of an electrode with a glass substrate 21 having a thickness of 0.7 mm, respectively, in position alignment. The adhesive layer 22 having a thickness of 20 nm, the light-reflecting metal electrode 23 made of silver having a thickness of 120 nm, and the transparent inorganic thin film 24 having a thickness of 65 nm, and the adhesive layer 22, the light-reflecting metal electrode 23, and the transparent inorganic thin film 24 And a moisture-proof transparent thin film 25 having a thickness of 40 nm which covers the side end face in the same manner, and the adhesive layer 22 is a thin film of aluminum oxide (Al 2 O 3 ). On the other hand, the transparent inorganic thin film 24 contains 3 atom of zirconium oxide (ZrO 2 ).
% Indium oxide thin film.
The moisture-proof transparent thin film 25 is made of silicon oxide (SiO 2 ). The electrode shape has a pitch of 300 μm.
m, width 290 μm, and interelectrode gap 10 μm.
【００５７】そして、この光反射性電極板２を使用し
て、図３に示すように偏光フィルム１枚タイプの反射型
液晶表示装置を製造した。すなわち、この反射型液晶表
示装置は、光反射性電極板２を背面電極板とし、これに
対向して配置され基板３１上に透明電極３２を備える観
察者側電極板３と、これら両電極板２、３の間に封入さ
れた液晶物質４とでその主要部が構成され、観察者側電
極板３側から入射した外光を光反射性電極２３で反射さ
せて画面表示するものである。Then, using this light-reflective electrode plate 2, as shown in FIG. 3, a reflection type liquid crystal display device of one polarizing film type was manufactured. That is, in this reflection type liquid crystal display device, the light-reflective electrode plate 2 is used as a back electrode plate, and the viewer-side electrode plate 3 is disposed opposite to the light-reflective electrode plate and has the transparent electrode 32 on the substrate 31, and both of these electrode plates. The liquid crystal substance 4 enclosed between the two and three forms a main part of the liquid crystal substance, and external light incident from the observer-side electrode plate 3 side is reflected by the light-reflecting electrode 23 to display a screen.
【００５８】尚、図３中、３３は観察者側電極板の基板
上に設けられた光散乱層、５は偏光フィルム、６は位相
差フィルム、７は反射防止膜を示している。In FIG. 3, 33 is a light scattering layer provided on the substrate of the observer side electrode plate, 5 is a polarizing film, 6 is a retardation film, and 7 is an antireflection film.
【００５９】[0059]
【発明の効果】本発明によれば、基板上に、膜厚６０ｎ
ｍ以上の銀または銀合金から成る光反射性金属薄膜と、
この光反射性金属薄膜の上側に設けられた防湿性透明薄
膜と、上記光反射性金属薄膜と防湿性透明薄膜との間に
設けられこれら両薄膜を互いに接着させる透明無機薄膜
とを備えるため、上記透明無機薄膜が光反射性金属薄膜
と防湿性透明薄膜の双方に強固に接着してこれら３層の
薄膜を一体化させ、かつ、強固に接着された防湿性透明
薄膜が上記光反射性金属薄膜を空気中のイオウ化合物や
水分から保護する。According to the present invention, a film thickness of 60 n is formed on a substrate.
a light-reflecting metal thin film made of silver or a silver alloy of m or more;
A moisture-proof transparent thin film provided on the upper side of the light-reflecting metal thin film, and a transparent inorganic thin film provided between the light-reflecting metal thin film and the moisture-proof transparent thin film to bond these two thin films to each other, The transparent inorganic thin film is strongly adhered to both the light-reflective metal thin film and the moisture-proof transparent thin film to integrate these three thin films, and the strongly adhered moisture-proof transparent thin film is the light-reflective metal. Protects thin films from sulfur compounds and moisture in the air.
【００６０】従って、光反射性金属薄膜の経時劣化が防
止されてその保存安定性が向上するため、空気中のイオ
ウ化合物や水分に起因した表示欠陥のない反射型液晶表
示装置等を安定して製造できる効果を有している。Therefore, deterioration of the light-reflecting metal thin film with time is prevented and its storage stability is improved, so that a reflective liquid crystal display device or the like having no display defect due to a sulfur compound or water in the air can be stably provided. It has the effect of being manufactured.
【図１】実施例１に係る光反射性電極板の断面図。FIG. 1 is a cross-sectional view of a light-reflective electrode plate according to Example 1.
【図２】実施例２に係る光反射性電極板の断面図。FIG. 2 is a sectional view of a light-reflective electrode plate according to Example 2.
【図３】実施例２に係る光反射性電極板が適用された反
射型液晶表示装置の断面図。FIG. 3 is a sectional view of a reflective liquid crystal display device to which the light reflective electrode plate according to Example 2 is applied.
【図４】従来例に係る反射型液晶表示装置の断面図。FIG. 4 is a cross-sectional view of a reflective liquid crystal display device according to a conventional example.
【図５】従来例に係る他の反射型液晶表示装置の断面
図。FIG. 5 is a cross-sectional view of another reflective liquid crystal display device according to the conventional example.
【図６】従来例に係る他の反射型液晶表示装置の断面
図。FIG. 6 is a cross-sectional view of another reflective liquid crystal display device according to the conventional example.
【図７】アルミニウム薄膜及び銀薄膜における光反射率
を示すグラフ図。FIG. 7 is a graph showing the light reflectance of an aluminum thin film and a silver thin film.
１ 光反射性電極板 ２ 光反射性電極板 ３ 観察者側電極板 ４ 液晶物質 １１ ガラス基板 １２ 接着層 １３ 反射性金属電極 １４ 透明無機薄膜 １５ 防湿性透明薄膜 ２１ ガラス基板 ２２ 接着層 ２３ 反射性金属電極 ２４ 透明無機薄膜 ２５ 防湿性透明薄膜 ３１ 透明電極 1 Light-Reflecting Electrode Plate 2 Light-Reflecting Electrode Plate 3 Observer-side Electrode Plate 4 Liquid Crystal Material 11 Glass Substrate 12 Adhesive Layer 13 Reflective Metal Electrode 14 Transparent Inorganic Thin Film 15 Moisture-Proof Transparent Thin Film 21 Glass Substrate 22 Adhesive Layer 23 Reflective Metal electrode 24 Transparent inorganic thin film 25 Moisture-proof transparent thin film 31 Transparent electrode
Claims (10)
合金から成る光反射性金属薄膜と、この光反射性金属薄
膜の上側に設けられた防湿性透明薄膜と、上記光反射性
金属薄膜と防湿性透明薄膜との間に設けられこれら両薄
膜を互いに接着させる透明無機薄膜とを備えることを特
徴とする光反射板。1. A light-reflecting metal thin film made of silver or a silver alloy having a film thickness of 60 nm or more on a substrate, a moisture-proof transparent thin film provided on the upper side of the light-reflecting metal thin film, and the light-reflecting metal. A light reflection plate comprising: a thin inorganic film and a moisture-proof transparent thin film, and a transparent inorganic thin film that adheres these thin films to each other.
する酸化膜にて構成されていることを特徴とする請求項
１記載の光反射板。2. The light reflecting plate according to claim 1, wherein the moisture-proof transparent thin film is composed of an oxide film having silicon oxide as a base material.
材とする無機酸化物にて構成されていることを特徴とす
る請求項１又は２記載の光反射板。3. The light reflecting plate according to claim 1, wherein the transparent inorganic thin film is composed of an inorganic oxide having indium oxide as a base material.
膜厚が、可視光線の波長の１／４以下で、かつ、５ｎｍ
以上であることを特徴とする請求項１〜３のいずれかに
記載の光反射板。4. The total thickness of the moisture-proof transparent thin film and the transparent inorganic thin film is 1/4 or less of the wavelength of visible light and 5 nm.
It is above, The light-reflecting plate in any one of Claims 1-3 characterized by the above-mentioned.
れらを互いに接着させる接着層が設けられていることを
特徴とする請求項１〜４のいずれかに記載の光反射板。5. The light reflection plate according to claim 1, further comprising an adhesive layer provided between the light reflective metal thin film and the substrate for adhering them to each other.
ルミニウムを基材とする無機酸化物にて構成されている
ことを特徴とする請求項５記載の光反射板。6. The light reflecting plate according to claim 5, wherein the adhesive layer is made of an inorganic oxide having indium oxide or aluminum oxide as a base material.
電極板に対向して配設されかつ透明電極を有する観察者
側電極板と、これ等両電極板間に封入された液晶物質
と、上記背面電極板の外側に設けられた光反射板とを備
え、上記透明電極間に電圧を印加し液晶物質を駆動させ
て画面表示する反射型液晶表示装置に適用される上記光
反射板において、 基板上に、膜厚６０ｎｍ以上の銀または銀合金から成る
光反射性金属薄膜と、この光反射性金属薄膜の上側に設
けられた防湿性透明薄膜と、上記光反射性金属薄膜と防
湿性透明薄膜との間に設けられこれら両薄膜を互いに接
着させる透明無機薄膜とを備えることを特徴とする反射
型液晶表示装置用光反射板。7. A back electrode plate having a transparent electrode, an observer-side electrode plate which is disposed so as to face the back electrode plate and has a transparent electrode, and a liquid crystal substance which is enclosed between these two electrode plates. A light reflection plate provided on the outside of the back electrode plate, wherein the light reflection plate is applied to a reflection type liquid crystal display device for displaying a screen by driving a liquid crystal substance by applying a voltage between the transparent electrodes. A light-reflective metal thin film made of silver or a silver alloy having a film thickness of 60 nm or more on a substrate, a moisture-proof transparent thin film provided on the light-reflective metal thin film, and the light-reflective metal thin film and moisture-proof A light reflection plate for a reflection type liquid crystal display device, comprising: a transparent inorganic thin film which is provided between the transparent thin film and which adheres these two thin films to each other.
板と、この光反射性電極板に対向して配設されかつ透明
電極を有する観察者側電極板と、これ等両電極板間に封
入された液晶物質とを備え、上記電極間に電圧を印加し
液晶物質を駆動させて画面表示する反射型液晶表示装置
に適用される上記光反射性電極板において、 基板上に、膜厚６０ｎｍ以上の銀または銀合金から成る
光反射性金属電極と、この光反射性金属電極の上側に設
けられた防湿性の電気絶縁性透明薄膜と、上記光反射性
金属電極と電気絶縁性透明薄膜との間に設けられこれら
を互いに接着させる透明無機薄膜とを備えることを特徴
とする反射型液晶表示装置用光反射性電極板。8. A light-reflective electrode plate having a light-reflective metal electrode, an observer-side electrode plate disposed facing the light-reflective electrode plate and having a transparent electrode, and both electrode plates. A light-reflecting electrode plate which is applied to a reflective liquid crystal display device in which a liquid crystal substance enclosed between the electrodes is applied and a voltage is applied between the electrodes to drive the liquid crystal substance to display a screen. A light-reflecting metal electrode made of silver or a silver alloy having a thickness of 60 nm or more, a moisture-proof electrically insulating transparent thin film provided on the upper side of the light-reflecting metal electrode, the light-reflecting metal electrode and an electrically insulating transparent electrode. A light-reflective electrode plate for a reflective liquid crystal display device, comprising: a transparent inorganic thin film which is provided between the thin film and which adheres them to each other.
材とする無機酸化物にて構成され、かつ、この透明無機
薄膜と上記光反射性金属電極とが互いに位置整合して電
極形状に積層されていることを特徴とする請求項８記載
の反射型液晶表示装置用光反射性電極板。9. The transparent inorganic thin film is composed of an inorganic oxide containing indium oxide as a base material, and the transparent inorganic thin film and the light-reflecting metal electrode are aligned with each other and laminated in an electrode shape. The light-reflective electrode plate for a reflective liquid crystal display device according to claim 8, wherein the light-reflective electrode plate is provided.
整合して電極形状に積層された透明無機薄膜と光反射性
金属電極の表面と側端面を被覆していることを特徴とす
る請求項８記載の反射型液晶表示装置用光反射性電極
板。10. The electrically insulating transparent thin film covers the surfaces and side end faces of the transparent inorganic thin film and the light-reflecting metal electrode which are aligned with each other and are laminated in the shape of an electrode. 8. A light-reflective electrode plate for a reflective liquid crystal display device according to item 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08879595A JP3498763B2 (en) | 1995-03-22 | 1995-03-22 | Light reflection plate, light reflection plate for reflection type liquid crystal display device, and light reflection electrode plate for reflection type liquid crystal display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08879595A JP3498763B2 (en) | 1995-03-22 | 1995-03-22 | Light reflection plate, light reflection plate for reflection type liquid crystal display device, and light reflection electrode plate for reflection type liquid crystal display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08262207A true JPH08262207A (en) | 1996-10-11 |
| JP3498763B2 JP3498763B2 (en) | 2004-02-16 |
Family
ID=13952800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP08879595A Expired - Fee Related JP3498763B2 (en) | 1995-03-22 | 1995-03-22 | Light reflection plate, light reflection plate for reflection type liquid crystal display device, and light reflection electrode plate for reflection type liquid crystal display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3498763B2 (en) |
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