JPH08257887A - Device and method for polishing spherical surface - Google Patents

Abstract

PURPOSE: To provide a spherical surface polishing device suited for polishing a point end of a ferrule mounted on a connecting part of an optical connector and to provide a spherical surface polishing method of using this spherical surface polishing device. CONSTITUTION: A device has a polishing disk 11, polishing disk on its own axis rotating means 12 of rotating the polishing disk 11 around its axial center, polishing disk revolving around means 13, 14 of rotating an axial center itself of the polishing disk 11 around a certain axial center, holding means 15a of positioning the end face center of a workpiece in a surface of the polishing disk 11 to hold the workpiece and a linear guide means 15b of pressing an end face of the workpiece held to the holding means 15a to a surface of the polishing disk 11.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spherical polishing apparatus for polishing the tip of an object to be processed into a spherical surface or an oblique spherical surface and a spherical polishing method using the same, and more particularly to a joint portion of an optical fiber connector (optical connector). TECHNICAL FIELD The present invention relates to a spherical polishing apparatus and method suitable for polishing the tip of a ferrule (reinforcing cylindrical rod for joining) attached to a substrate.

[0002]

2. Description of the Related Art Conventionally, various optical connectors have been used in order to detachably connect optical fibers. As an optical connector for a single core, for example, it is necessary to enable splicing with a small axial deviation or an angular deviation (for example, an axial deviation of 1 μm or less in a single mode optical fiber having a core diameter of 10 μm).

Therefore, in an optical connector, an optical fiber is inserted into the center of a ceramic ferrule and fixed by adhesion, and then this optical connector ferrule is inserted into a split sleeve having a precise inner diameter, and the ends of the ferrule are connected to each other. There is a structure in which they are abutted and fastened. Since such an optical connector has excellent connection characteristics, it is widely used in large quantities, especially in the field of optical communication.

FIGS. 5 (a) and 5 (b) respectively show the connection state of the optical connector. The optical connector ferrules 2a and 2b inserted in the split sleeve 1 have a convex spherical surface at the tip in order to improve the light connection characteristics.

The spherical shape of the ferrule of the optical connector is
As shown in FIG. 5 (a), the end surface perpendicular to the optical axis is polished into a convex spherical shape (hereinafter referred to as PC-Phsical co
ntact-connection or PC polishing), as shown in FIG. 5 (b), which is tilted about 8 ° with respect to the optical axis and polished into a convex spherical shape (hereinafter, oblique PC connection or oblique P connection).
C polishing).

In particular, the latter ferrule 2 for oblique PC polishing
In the optical connector provided with b, the reflected light at the connector end face is reflected at twice the tilt angle, and the light reflected at the connection portion is 60
It will be below dB. These values are 1 to 2 orders of magnitude smaller than those of the former optical connector equipped with the PC-polished ferrule 2a. Therefore, the optical connector equipped with the slanted PC-polished ferrule 2b can suppress the influence of noise due to the reflected return light, which is indispensable in optical communication technology such as high-speed digital transmission or analog transmission.

By the way, the ferrule 2a of the optical connector,
The convex spherical shape of the end surface of 2b is formed by polishing. For example, the deviation between the apex of the sphere and the fiber center is 50 μm.
High precision polishing is required such as m or less. Therefore, improvement of workability and operability at the time of polishing has been a problem.

Next, a method of polishing a ferrule using the conventional polishing apparatus will be described. FIG. 6 is an external view of the polishing apparatus of the first conventional example, and FIG.
FIG. 7B shows a ferrule holding method in the case of C polishing, and FIG. 7B shows a ferrule holding method in the case of oblique PC polishing using the same apparatus.

In the case of PC polishing, as shown in FIG. 7 (a), the ferrule 2 has its axis centered perpendicularly to the polishing platen surface 3 and is fixed by a mounting metal fitting 4a.
Are simultaneously polished.

In the case of slanted PC polishing, as shown in FIG. 7 (b), the ferrules 2 are fixed to the polishing plate surface 3 by a specified amount, and fixed by the mounting brackets 4b. Polish at the same time.

In the first conventional polishing apparatus, since the ferrule 2 is fixed by the fittings 4a and 4b during polishing, it does not rotate or swing. In addition, the polishing board 5 has a polishing sheet 7 on the upper surface of an elastic body 6 such as rubber.
It has a structure in which the etc. are attached. The device of this conventional example is P
At the time of C polishing, while supplying the polishing liquid 8 to the upper surface of the rotating polishing sheet 7, the tip of the ferrule 2 is pressed to polish the end surface of the ferrule.

FIG. 9 shows the construction of the essential parts of a second conventional polishing apparatus. The polishing apparatus of the second conventional example has a configuration in which a resin film 10 is stretched on the upper surface of an elastic polishing disk 9 that is driven to rotate with a constant tension. In the conventional apparatus, when polishing the PC, the tip of the ferrule 2 is pushed into the resin film 10 by a predetermined distance while the polishing liquid 8 is supplied to the upper surface of the rotating resin film 10, and the ferrule 2 is moved along the axis thereof. Rotate forward and backward to polish.

[0013]

By the way, the above-mentioned conventional polishing apparatus has the following problems. The polishing apparatus of the first conventional example cannot rotate the ferrule itself in order to polish a plurality of ferrules at once. In this case, there arises a problem that the processed surface accuracy becomes poor in terms of surface roughness, symmetry of surface shape, and the like. Therefore,
Attempts have been made to increase the precision of the machined surface by rotating and rocking the polishing platen 5 so that the polishing locus of each ferrule has a spiral shape with a thick solid line L shown in FIG.

However, in the above-described polishing apparatus configured to give rotation and swing to the polishing plate, vibration is generated due to the swing of the drive mechanism of the polishing plate, so that the driving speed cannot be increased and the polishing speed can be increased. There is a problem that comes to difficulty.

Further, since such a polishing machine processes the ferrule into a substantially spherical shape generated when it is pressed against the elastic body polishing plate in accordance with the ferrule tip shape, a plurality of ferrules may have different lengths or may be polished. There is a problem in that the holding arm of the ferrule mounting plate falls down due to the pressure and the precision of the polishing process varies.

Further, when performing the PC polishing and the oblique PC polishing by using the same apparatus, it is troublesome to replace the ferrule mounting bracket and change the setting conditions of the apparatus, so that the workability is difficult. There is.

The polishing apparatus of the second conventional example can rotate the ferrule itself in order to polish the ferrules one by one. Therefore, it is possible to realize polishing according to a general polishing method, and it is possible to increase the rotation speed of the polishing plate.

Here, the general polishing method means to rotate the work piece with respect to one rotation of the polishing plate and to move the direction of the polishing eye (streak) of the work piece. Therefore, it refers to a polishing method for improving the precision of the processed surface.

However, the polishing apparatus of the second conventional example is
Since there is a long optical cord behind the ferrule,
It cannot continue to rotate in one direction, and complicated polishing drive control is required to rotate the ferrule forward and backward in the range of about one rotation during polishing. The polishing process by the forward and reverse rotation causes breakage of the optical cord, resulting in a problem that the yield is deteriorated.

Further, when the rotation speed of the polishing disk is increased to shorten the polishing time, the direction of the polishing eyes becomes uneven due to the influence of the rotation stop time at the time of reversing the forward and reverse rotation, and the shape of There are problems such as variations in accuracy.

Further, the second conventional polishing apparatus is a PC
Although it is intended for polishing, there is a problem that a complicated fitting for a ferrule is required to enable diagonal PC polishing, and a person who performs the polishing work requires a great degree of skill.

The main objects to be solved by the present invention are as follows. A first object of the present invention is to provide a spherical polishing apparatus suitable for polishing the tip of a ferrule attached to a joint portion of an optical connector and a spherical polishing method using the same.

A second object of the present invention is to provide a spherical surface polishing apparatus and a spherical surface polishing method using the same, which are capable of highly accurate and reproducible spherical surface polishing at high speed.

A third object of the present invention is to change the mounting angle of the ferrule by a simple tilt adjusting means so that P
It is intended to provide a spherical polishing apparatus and a spherical polishing method using the same, which can easily change C polishing and oblique PC polishing and have good workability.

Other objects of the present invention include the specification, drawings,
In particular, it will be apparent from the description of the claims.

[0026]

[Means for Solving the Problems] To solve the above-mentioned problems,
The present invention is achieved by adopting the novel characteristic construction means and techniques listed below. That is, the first feature of the device of the present invention is a polishing plate, a polishing plate rotating means for rotating the polishing plate around the axis of the polishing plate, and an axis itself of the polishing plate about a certain axis. A polishing plate revolving means, holding means for holding the workpiece by positioning the end face center of the workpiece on the polishing plate surface of the polishing plate, and polishing the end face of the workpiece held by the holding means. A spherical polishing device having a linear guide means for pressing the polishing plate surface of the plate.

The second feature of the apparatus of the present invention is that the surface of the polishing plate is concentrically divided into a plurality of polishing band regions, and the polishing band region of the polishing plate is rotated around the axis of the polishing plate. Polishing disk rotation means, polishing disk revolution means for rotating the axis itself of the polishing disk around a certain axis, and positioning the end face center of the workpiece on each polishing disk surface of the polishing disk to move the workpiece. A spherical polishing apparatus having a holding means for holding and a linear guide means for pressing the end surface of the workpiece held by the holding means against the polishing plate surface of the polishing plate.

A third feature of the device of the present invention is that the polishing plate revolution means in the second feature of the device of the present invention rotates the shaft center of the polishing plate itself at a radius corresponding to each polishing zone. It is in the polishing machine.

A fourth feature of the device of the present invention is that between the linear guide means and the holding means in the first, second or third feature of the device of the present invention, further, the polishing plate surface of the polishing plate. On the other hand, the spherical polishing apparatus is provided with an inclination adjusting means for adjusting the inclination of the axis of the workpiece.

A fifth feature of the device of the present invention is that the center of revolution of the polishing plate by the polishing plate revolution means in the first, second, third or fourth feature of the device of the present invention is the tip of the workpiece. This is a spherical polishing device that is set so that the polishing plate surface can be widely used by being separated from the center of the plate by several mm.

A sixth feature of the device of the present invention is that the work piece in the first, second, third, fourth or fifth feature of the device of the present invention is an optical connector ferrule (reinforcing cylinder for joining). It is in a spherical polishing device which is a bar material.

The first feature of the method of the present invention is that a polishing plate, a polishing plate rotation means for rotating the polishing plate around the axis of the polishing plate, and an axis itself of the polishing plate around a certain axis. The polishing plate revolving means for rotating, the holding means for holding the workpiece by positioning the end face center of the workpiece on the polishing plate surface of the polishing plate, and the end face of the workpiece held by the holding means. In a spherical polishing device having a linear guide means for pressing against the polishing plate surface of the polishing plate, a state in which an end surface of the workpiece is pressed against the revolution center of the polishing plate while supplying a polishing liquid to the polishing plate surface of the polishing plate. Then, while rotating the polishing plate surface by the polishing plate rotating means, the axis of the polishing plate itself is rotated around a certain axis by the polishing plate revolution means to polish the end surface of the workpiece into a spherical shape. There is a spherical polishing method.

The second feature of the method of the present invention is that a polishing plate, a polishing plate rotation means for rotating the polishing plate around the axis of the polishing plate, and an axis itself of the polishing plate around a certain axis. The polishing plate revolving means for rotating, the holding means for holding the workpiece by positioning the end face center of the workpiece on the polishing plate surface of the polishing plate, and the end face of the workpiece held by the holding means. A linear guide means for pressing against the polishing plate surface of the polishing plate, and an inclination adjustment provided between the linear guide device and the holding means for adjusting the inclination of the axis of the workpiece with respect to the polishing plate surface of the polishing plate. In the spherical polishing apparatus having the means, the tilt adjusting means tilts the axis of the workpiece, and the end surface of the workpiece is pressed against the revolution center of the polishing board, and the polishing board rotation means is provided. Rotate the surface of the polishing plate with There is a spherical polishing method for polishing the end surface of the workpiece into a spherical shape by supplying the polishing liquid to the polishing surface while rotating the axis of the polishing disk itself around a certain axis by the polishing disk revolution means. .

A third feature of the method of the present invention is that the polishing plate surface of the polishing plate in the first or second feature of the method of the present invention is concentrically divided into a plurality of polishing zone regions. It is in.

A fourth feature of the method of the present invention is that the polishing plate revolution means in the first, second or third feature of the method of the present invention corresponds to the polishing belt axis center itself in each polishing zone region. It is in the spherical polishing method of rotating with a radius of

The fifth feature of the method of the present invention is that the center of revolution of the polishing plate by the revolution plate revolution means in the first, second, third or fourth feature of the method of the present invention is the tip of the workpiece. This is a spherical polishing method in which the polishing plate surface is widely used by being separated from the center of by about several mm.

A sixth feature of the method of the present invention is that the workpiece in the first, second, third, fourth or fifth feature of the method of the present invention is an optical connector ferrule (reinforcing cylindrical rod for joining). Material) is a spherical polishing method.

[0038]

The present invention takes the following actions because it takes the novel means and method as described above.

According to the present invention, even if the workpiece is fixed without being rotated, the revolving of the polishing disk causes the direction of the polishing eyes to move sequentially, so that the same effect as rotating the workpiece can be obtained. Occurs. Therefore, a highly accurate polished shape can be obtained.

According to the present invention, since the workpiece is not rotated, the holding mechanism (grasping mechanism) of the workpiece can have a simple structure and the tilt adjustment mechanism of the axial center of the workpiece can be easily realized. You can The PC polishing or the oblique PC polishing is performed depending on whether the axial center of the work piece is vertically pressed against the surface of the polishing plate or is obliquely pressed.

Further, according to the present invention, since complicated rotation drive control for rotating the polishing disc in the forward and reverse directions is unnecessary, the polishing efficiency can be improved by increasing the rotation number of the polishing disc. In particular, it is suitable for polishing the tip of the ferrule attached to the joint portion of the optical connector into a spherical shape.

[0042]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in more detail with reference to the accompanying drawings on the basis of its apparatus and method.

In the example of the apparatus and the example of the method, the workpiece to be polished is the ferrule (reinforcing cylindrical rod for joining) attached to the joining portion of the connector (optical connector) of the optical fiber. It can also be applied to other workpieces.

(Example of Apparatus) FIG. 1 shows the overall structure of the spherical polishing apparatus A of this apparatus example, FIG. 2 shows the structure of the polishing disk used in this example of the apparatus, and FIG. 3 shows the revolution of the polishing disk of this spherical polishing apparatus. 4 (a) and 4 (b) show the construction of the ferrule holder, respectively.

As shown in FIG. 1, the spherical polishing apparatus 20 of this apparatus example comprises a polishing plate 11, a spindle motor 12, a Z stage 13, an X stage 14, and a holding portion 15 for holding the ferrule 2.

The polishing plate 11 includes a diamond grindstone 11a and a rough polishing grindstone 11 provided from the outer peripheral side toward the inner peripheral side.
b, the finishing polishing grindstone 11c is combined.

Rough polishing whetstone 11b and finish polishing whetstone 11
For c, a single drum-shaped elastic polishing film is used, and a rough polishing zone and a finish polishing zone are divided by a dividing ring 11d.

The diamond grindstone 11a constitutes a grinding zone for removing the adhesive from the end face of the ferrule 2 and forming a flat surface, and the rough polishing grindstone 11b constitutes a polishing zone for forming the end surface of the ferrule 2 into a convex spherical surface for finish polishing. The grindstone 11c constitutes a polishing zone for polishing the convex spherical surface of the ferrule 2 without disturbing mirror surface polishing.

When actually polishing with the polishing plate 11, the ferrule 2 is sequentially pressed from the outer peripheral side toward the center at the radii r1, r2, r3 of the respective polishing zones to perform polishing.

The spindle motor 12 has a mechanism (polishing disk rotation means) in which the axis of the polishing disk 11 is directly connected to the drive shaft of the spindle motor 12 to drive the polishing disk 11 to rotate.

As shown in FIG. 3, the Z stage 13 is provided with a movable portion 13a which moves in the vertical direction (vertical direction), and the spindle motor 12 is mounted and fixed on the movable portion 13a.

The X stage 14 is provided with a movable portion 14a which moves in the lateral direction (horizontal direction), and the Z stage 13 is mounted and fixed on the movable portion 14a.

By controlling the drive of the Z stage 13 and the X stage 14 (polishing disk revolution means), as shown in FIG. 2, the radii r1, r2, and r2 around the axial center of the ferrule 2, respectively.
The polishing plate 11 revolves so as to make a circular motion at r3.

The holding portion 15 is, as shown in FIG.
Holding means for holding the ferrule 2 at a position opposed to the polishing board 11, linear guide means for pressing or retracting the tip of the ferrule 2 to the polishing board 11, and polishing board 11
And a tilt adjusting means for adjusting the tilt of the axial center of the ferrule 2 with respect to the plane.

More specifically, the holding section 15 is
The chuck 15a, the linear guide mechanism 15b, the voice coil motor 15c, the movable portion 15d, the movable bobbin 15e, and the tilt adjusting mechanism 15f are included.

The chuck 15a has a structure capable of gripping and fixing the ferrule 2, and is attached to the movable portion 15d which is interlocked with the movable bobbin 15e. Therefore, since the movable portion 15d of the linear guide mechanism 15b reciprocates by changing the polarity of the current applied to the voice coil motor 15c, the tip of the ferrule 2 held by the chuck 15a is pressed against the polishing plate 11 or retracted. It can be done.

The tilt adjusting mechanism 15f serves to adjust the tilt of the axial center of the ferrule 2 with respect to the polishing surface of the polishing table 11 by rotating the shaft on a horizontal plane. In the case of oblique PC polishing, as shown in FIG.
Polishing is performed while supplying the polishing agent to the.

(Example of Method) Next, a polishing step (grinding step, rough polishing step, finish polishing step) in the case of performing PC polishing using the apparatus of the present apparatus example will be described. In addition, in this example of the method, it was decided to use an apparatus capable of obtaining an arbitrary rotation speed in a revolution speed of about 100 rpm and a rotation speed of several thousands rpm.

[Grinding Step] First, the ferrule 2 is attached and fixed to the retracted chuck 15a. Next, the polishing disk 11 is rotated at a rotation speed N, and the axis of the polishing disk 11 revolves around the axis of the ferrule 2 at a radius r1 and a rotation speed n by the movements of the Z stage 13 and the X stage 14. Drive control.

Subsequently, a (+) current is gradually applied to the voice coil motor 15c to move the chuck 15a, and the ferrule 2 is pressed against the diamond whetstone 11a while flowing a polishing liquid to the diamond whetstone 11a of the polishing plate 11. Then, the pressing force F is maintained for a certain period of time to perform grinding.

After the grinding for a predetermined time is completed, the polarity of the applied current to the voice coil motor 15c is switched,
(-) A current is applied to move the chuck 15a to retract the ferrule 2.

[Rough Polishing Step] First, the polishing plate 11 is rotated at a rotation speed N, and the axis of the polishing plate 11 is moved to the ferrule 2 by the movement of the Z stage 13 and the X stage 14.
Drive control is performed so as to revolve at a radius r2 and a rotation speed n around the axis of.

Next, a (+) current is gradually applied to the voice coil motor 15c to move the chuck 15a, and the ferrule 2 is pressed against the rough polishing grindstone 11b while flowing a polishing liquid to the rough polishing grindstone 11b of the polishing plate 11. It is abutted and held with a pressing force F for a certain period of time for polishing.

After polishing for a predetermined time, the polarity of the current applied to the voice coil motor 15c is switched,
(-) A current is applied to move the chuck 15a to retract the ferrule 2.

[Finishing Step] First, the polishing table 11 is rotated at a rotation speed N, and the Z stage 13 and the X stage are rotated.
By the movement of the stage 14, drive control is performed so that the axis of the polishing plate 11 revolves around the axis of the ferrule 2 at a radius r3 and a rotation speed n.

Next, a (+) current is gradually applied to the voice coil motor 15c to move the chuck 15a, and the ferrule 2 is pressed against the finishing whetstone 11c while flowing the finishing whetstone 11c polishing liquid of the polishing table 11. The pressing force F is maintained for a certain time for polishing.

After polishing for a predetermined time, the polarity of the current applied to the voice coil motor 15c is switched,
(-) A current is applied to move the chuck 15a to retract the ferrule 2. Finally, the ferrule 2 is removed from the chuck 15a to complete a series of polishing steps.

In the case of oblique PC polishing, polishing is performed in the same polishing step as PC polishing, but the tilt adjusting mechanism 15f tilts the axis of the ferrule 2 by θ, and the position of the tip of the ferrule 2 is moved by a movement amount D. It is only necessary to move it and correct the control amount of the revolution position.

According to the apparatus example and the method example described above,
Since the rotation and revolution of the polishing disc 11 are controlled independently, the rotation of the polishing disc 11 can be sped up faster, and the time required for the polishing process can be shortened. Further, by selecting a speed suitable for each step, highly efficient polishing can be performed.

When the net polishing time of the above polishing step in this method example using the apparatus of this device example was measured,
It was about 30 seconds. 1st explained in the section of conventional technology
When compared with the polishing apparatus of the second conventional example, for example, 12 pieces of the polishing apparatus of the first conventional example are used for polishing, but when converted to the polishing time per one, it becomes a little over 1 minute.
In the conventional example of, it takes a little over 2 minutes.

Therefore, by using the spherical polishing apparatus of this apparatus example, the polishing time at the ferrule tip of the optical connector can be shortened to 1/2 to 1/4 as compared with the conventional apparatus.

Further, according to the present apparatus example and method example, since the revolution direction can be set to one direction, the revolution of the polishing plate 11 revolves even if the ferrule 2 as the workpiece is not rotated. The direction is sequentially moved, and the same action as if the ferrule 2 is rotated is generated, and a highly accurate polished surface shape can be obtained.

As one example of the comparison of the shape accuracy, the deviation between the center of the optical fiber and the apex of the convex spherical surface (apex deviation) was 50 μm at maximum in the past, but it becomes 30 μm or less in the spherical polishing apparatus of this example. It was possible to confirm the improvement in polishing accuracy.

In the description of the above apparatus example and method example, the center of revolution of the polishing plate 11 and the center of the tip of the ferrule 2 are coincident with each other, but the center of revolution of the polishing plate 11 and the center of the tip of the ferrule 2 are slightly different. Amount, for example, about Hmm 2 by shifting in the Z direction (vertical direction) or the X direction (horizontal direction)
The range used for polishing the polishing table 11 may be expanded by Hmm to improve the durability of the polishing table 11.

Further, in the above-mentioned apparatus example and method example, the divided polishing plate in which several steps are processed by one polishing plate 11 is used.
High-speed and high-precision polishing is also possible when polishing is performed using a polishing plate for the polishing plate 11 that processes only one step, such as the devices of the first and second conventional examples.

Further, in this example of the apparatus, the polishing surface of the polishing plate 11 is configured to be horizontal (vertical), but the configuration may be such that the polishing plate surface is horizontal.

Although the typical apparatus examples and method examples of the present invention have been described above, the present invention is not necessarily limited to the means and method examples of these apparatus examples.
The present invention can be appropriately modified and carried out within a range where the object of the present invention is achieved and the effects described later are obtained.

[0078]

As described above, according to the present invention, since the rotation and the revolution of the polishing plate can be controlled independently, the rotation of the polishing plate can be sped up and the time required for the polishing process can be increased. In addition to the effect of shortening the process, it is possible to achieve highly efficient polishing by selecting a speed suitable for each process.

In particular, it is possible to provide a spherical polishing apparatus and method suitable for polishing the tip of the ferrule attached to the joint portion of the optical connector.

When the inclination adjusting means is provided in the structure of the present invention, the attachment angle of the ferrule can be easily adjusted by the same means, and therefore the PC polishing and the oblique PC polishing can be easily changed.

[Brief description of drawings]

FIG. 1 is a plan view showing the overall configuration of a spherical polishing apparatus of this apparatus example according to the present invention.

FIG. 2 is a perspective view showing a configuration of a polishing board used in this apparatus example.

FIG. 3 is an explanatory view showing a method of revolving the polishing plate of this device example.

FIG. 4A is a plan view showing a configuration of a holding unit of the present apparatus example, and FIG. 4B is a side view showing a configuration of a holding unit of the present apparatus example.

5A is an enlarged cross-sectional view of an essential part showing a connected state of an optical connector, and FIG. 5B is an enlarged cross-sectional view of an essential part showing a connected state of an optical connector of another example.

FIG. 6 is a perspective view showing an external configuration of a first conventional polishing apparatus.

7A is a sectional view showing a method of holding a ferrule in the case of PC polishing, and FIG. 7B is a sectional view showing a method of holding a ferrule in the case of oblique PC polishing.

FIG. 8 is a diagram showing a method of polishing a ferrule end surface of a conventional example.

FIG. 9 is a cross-sectional view showing a main configuration of a polishing apparatus of a second conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Split sleeve 2, 2a, 2b ... Ferrule (optical connector ferrule) 3 ... Polishing board surface 4a, 4b ... Mounting metal fitting 5 ... Polishing board 6 ... Elastic body 7 ... Polishing sheet 8 ... Polishing liquid 9 ... Elastic polishing board 10 ... Resin System film 11 ... Polishing machine 11a ... Diamond grindstone 11b ... Rough grinding grindstone 11c ... Finishing grinding grindstone 11d ... Dividing ring 12 ... Spindle motor 13 ... Z stage 13a, 14a ... Movable part 14 ... X stage 15 ... Holding part 15a ... Chuck 15b・ ・ ・ Linear guide mechanism 15c ・ ・ ・ Voice coil motor 15d ・ ・ ・ Movable part 15e ・ ・ ・ Movable bobbin 15f ・ ・ ・ Tilt adjusting mechanism A ・ ・ ・ Spherical polishing device

Claims (12)

[Claims] 1. A polishing plate, a polishing plate rotation means for rotating the polishing plate around the axis of the polishing plate, and a polishing plate revolution means for rotating the axis itself of the polishing plate around a certain axis. Positioning the end face center of the workpiece on the polishing plate surface of the polishing plate, holding means for holding the workpiece, and a straight line for pressing the end face of the workpiece held by the holding part against the polishing plate surface of the polishing plate And a guide means. 2. A polishing plate having a polishing plate surface concentrically divided into a plurality of polishing band regions, a polishing plate rotating means for rotating the polishing band region of the polishing plate around the axis of the polishing plate, and the polishing. A polishing disk revolving means for rotating the axis of the disk itself around a certain axis; a holding means for positioning the end face center of the workpiece on each polishing disk surface of the polishing disk and holding the workpiece; And a linear guide means for pressing the end surface of the workpiece held by the means against the polishing plate surface of the polishing plate. 3. The spherical polishing apparatus according to claim 2, wherein the polishing disk revolving means rotates the axis of the polishing disk itself at a radius corresponding to each polishing band region. 4. An inclination adjusting means for adjusting the inclination of the axis of the workpiece with respect to the surface of the polishing plate of the polishing plate is further provided between the straight line guiding device and the holding device. The spherical polishing device according to claim 1, 2 or 3. 5. A polishing plate surface can be widely used by separating the revolution center of the polishing plate by the polishing plate revolution means from the center of the tip of the workpiece by about several mm. The spherical polishing apparatus according to claim 1, 2, 3, or 4. 6. The spherical polishing apparatus according to claim 1, wherein the workpiece is an optical connector ferrule (reinforcing cylindrical rod for joining). 7. A polishing disk, a polishing disk rotation means for rotating the polishing disk around the axis of the polishing disk, and a polishing disk revolution means for rotating the axis of the polishing disk itself around a certain axis. Positioning the end face center of the workpiece on the polishing plate surface of the polishing plate, holding means for holding the workpiece, and pressing the end face of the workpiece held by the holding part against the polishing plate surface of the polishing plate. In a spherical polishing device having a linear guide means, while supplying a polishing liquid to the polishing plate surface of the polishing plate, the end surface of the workpiece is pressed against the revolution center of the polishing plate, the polishing plate rotation means While rotating the polishing plate surface, the polishing plate revolving means rotates the axis of the polishing plate itself around a certain axis to polish the end surface of the workpiece into a spherical surface. Polishing method. 8. A polishing disk, a polishing disk rotation means for rotating the polishing disk around the axis of the polishing disk, and a polishing disk revolution means for rotating the axis itself of the polishing disk around a certain axis. Positioning the end face center of the workpiece on the polishing plate surface of the polishing plate, holding means for holding the workpiece, and pressing the end face of the workpiece held by the holding part against the polishing plate surface of the polishing plate. A spherical polishing apparatus having linear guide means and inclination adjusting means provided between the linear guide means and the holding means for adjusting the inclination of the axis of the workpiece with respect to the polishing plate surface of the polishing plate Inclining the shaft center of the workpiece by the inclination adjusting means, and in a state where the end surface of the workpiece is pressed against the revolving center of the polishing disk, the polishing disk surface is rotated by the polishing disk rotation means, Do not supply polishing liquid to the polishing plate surface of the polishing plate. In addition, the polishing disk revolving means rotates the axis of the polishing disk itself around a certain axis to polish the end surface of the workpiece into a spherical surface. 9. The spherical polishing method according to claim 7, wherein the polishing plate surface of the polishing plate is concentrically divided into a plurality of polishing band regions. 10. The spherical polishing method according to claim 7, wherein the polishing disk revolution means rotates the axis of the polishing disk itself at a radius corresponding to each polishing band area. . 11. The polishing plate surface is widely used by separating the revolution center of the polishing plate by the polishing plate revolution means from the center of the tip of the workpiece by about several mm. The method for polishing a spherical surface according to item 8, 8, 9 or 10. 12. The spherical polishing method according to claim 7, wherein the work piece is an optical connector ferrule (reinforcing cylindrical rod for joining).