JPH08251954A - Ultrasonic oscillator - Google Patents

Ultrasonic oscillator

Info

Publication number
JPH08251954A
JPH08251954A JP7052536A JP5253695A JPH08251954A JP H08251954 A JPH08251954 A JP H08251954A JP 7052536 A JP7052536 A JP 7052536A JP 5253695 A JP5253695 A JP 5253695A JP H08251954 A JPH08251954 A JP H08251954A
Authority
JP
Japan
Prior art keywords
flexible printed
ultrasonic transducer
printed circuit
circuit board
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7052536A
Other languages
Japanese (ja)
Inventor
Nobuyuki Kojima
信行 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP7052536A priority Critical patent/JPH08251954A/en
Publication of JPH08251954A publication Critical patent/JPH08251954A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a highly reliable rod-like ultrasonic oscillator by preventing insufficient conduction due to chipping of a flexible printed board. CONSTITUTION: The rod-like ultrasonic oscillator 1 comprises a multilayer piezoelectric element 5 and a flexible printed board 6 for feeding power thereto clamped by upper and lower oscillators 2, 3. A cutting prevention means for controlling the strength distribution of the flexible printed board 6 with respect to the bending stress is provided in the vicinity of the conducting part of the flexible printed board 6 serving as an electric contact between the rod-like ultrasonic oscillator 1 and an external connector.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば棒状超音波モー
タへの利用に適する棒状超音波振動子に係るもので特に
フレキシブルプリント基板を有する超音波振動子に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rod-shaped ultrasonic oscillator suitable for use in, for example, a rod-shaped ultrasonic motor, and more particularly to an ultrasonic oscillator having a flexible printed board.

【0002】[0002]

【従来の技術】図5は従来の技術を示す棒状超音波振動
子1の斜視図である。棒状超音波振動子1は金属性の上
部振動体2および下部振動体3、およびこれらに挟まれ
る形で配置される積層圧電素子5、フレキシブルプリン
ト基板6を締結ボルト4により締め付け、一体構造とす
ることで構成される。振動子1の形状、積層圧電素子5
の構成、棒状超音波振動子1の励振駆動の作用等は本発
明とは関わらないので説明は略す。
2. Description of the Related Art FIG. 5 is a perspective view of a rod-shaped ultrasonic transducer 1 showing a conventional technique. The rod-shaped ultrasonic vibrator 1 has a metallic upper vibrating body 2 and a lower vibrating body 3, a laminated piezoelectric element 5 and a flexible printed circuit board 6 which are arranged so as to be sandwiched therebetween, and are fastened with fastening bolts 4 to form an integrated structure. It is composed of Shape of vibrator 1, laminated piezoelectric element 5
The configuration, the operation of driving the rod-shaped ultrasonic transducer 1 for excitation, and the like are not related to the present invention, and a description thereof will be omitted.

【0003】図6に図1に示した従来の棒状超音波振動
子で用いられるフレキシブルプリント基板6の構成を示
す。フレキシブルプリント基板6は棒状超音波振動子1
を構成する下部振動体3と積層圧電素子5により挟ま
れ、締結挟持される挟持部6−a、不図示の導通用コネ
クタとの接続部6−c、及び挟持部6−aと接続部6−
cとの導通を行う導通部6−b、基板電極7、電気的絶
縁を行うカバーコート部8より構成される。
FIG. 6 shows a structure of a flexible printed board 6 used in the conventional rod-shaped ultrasonic vibrator shown in FIG. The flexible printed circuit board 6 is a rod-shaped ultrasonic transducer 1
The lower vibrating body 3 and the laminated piezoelectric element 5, which are included in the above, are clamped and clamped between the lower vibrating body 3 and the laminated piezoelectric element 5. −
It is composed of a conducting part 6-b for conducting with c, a substrate electrode 7, and a cover coat part 8 for electrically insulating.

【0004】[0004]

【発明が解決しようとしている課題】しかしながら、上
記従来例のフレキシブルプリント基板の構成において、
棒状超音波振動子の組立て時、駆動時にフレキシブルプ
リント基板の振動子からの突出部において切断が生じ、
導通不良が発生した。これは棒状超音波振動子の組立て
時、駆動時に、フレキシブルプリント基板に対して面外
方向に折曲げる力が加わるために発生する。
However, in the structure of the above-mentioned conventional flexible printed circuit board,
When assembling the rod-shaped ultrasonic vibrator, cutting occurs at the protruding portion of the flexible printed circuit board from the vibrator during driving,
Continuity failure occurred. This occurs because a bending force is applied to the flexible printed circuit board in an out-of-plane direction when the rod-shaped ultrasonic transducer is assembled and driven.

【0005】本来ならフレキシブルプリント基板の幅を
広くして対処すべきではあるが、棒状超音波振動子の使
用環境を考慮するとフレキシブルプリント基板が他の構
造物と干渉するという問題が生じる。又、棒状超音波振
動子は電気エネルギーを機械的振動エネルギーに変換
し、機械的な出力を得る装置であり、振動エネルギーの
損失の増大は棒状超音波振動子の性能に直接関わるもの
である。フレキシブルプリント基板はベースにポリイミ
ド樹脂等比較的軟質の材料を用いており、フレキシブル
プリント基板の質量の増加は棒状超音波振動子のエネル
ギー損失の増加を生じ、この結果、振動子の性能低下を
招くので望ましいものではない。
Originally, the width of the flexible printed circuit board should be widened, but in consideration of the environment in which the rod-shaped ultrasonic transducer is used, there is a problem that the flexible printed circuit board interferes with other structures. Further, the rod-shaped ultrasonic vibrator is a device for converting electric energy into mechanical vibration energy to obtain a mechanical output, and an increase in the loss of vibration energy is directly related to the performance of the rod-shaped ultrasonic vibrator. The flexible printed circuit board uses a relatively soft material such as polyimide resin for the base, and an increase in the mass of the flexible printed circuit board causes an increase in the energy loss of the rod-shaped ultrasonic vibrator, resulting in a decrease in the performance of the vibrator. So not desirable.

【0006】本発明の目的は、フレキシブルプリント基
板の切損による導通不良を防止し、信頼性の高い棒状超
音波振動子を提供することにある。
An object of the present invention is to provide a highly reliable rod-shaped ultrasonic vibrator which prevents defective conduction due to cutting of the flexible printed circuit board.

【0007】[0007]

【課題を解決するための手段および作用】本出願に係る
発明の目的を実現する構成は、請求項1に記載のよう
に、圧電素子と該圧電素子の給電のためのフレキシブル
基板とを2つの振動体間に挟持固定して成る超音波振動
子において、該フレキシブル基板は前記振動体間に挟持
固定される挟持部と、外部へ電気的接続される接続部
と、該挟持部と接続部との導通を行なう導通部とを有
し、該導通部の挟持部付近にフレキシブル基板の曲げ応
力に対する強度分布を制御するよう切断防止手段を設け
たことを特徴とする超音波振動子にある。
According to a first aspect of the present invention, there is provided a piezoelectric element and a flexible substrate for feeding power to the piezoelectric element. In an ultrasonic vibrator sandwiched and fixed between vibrators, the flexible substrate includes a sandwiching part sandwiched and fixed between the oscillators, a connecting part electrically connected to the outside, and the sandwiching part and the connecting part. The ultrasonic transducer is characterized in that a cutting prevention means is provided in the vicinity of the sandwiching portion of the conducting portion so as to control the strength distribution with respect to the bending stress of the flexible substrate.

【0008】この構成によれば、フレキシブルプリント
基板の切損による導通不良を防止し、信頼性の高い例え
ば棒状超音波振動子等を提供することができる。
According to this structure, it is possible to prevent defective conduction due to cutting of the flexible printed circuit board, and to provide a highly reliable rod-shaped ultrasonic transducer or the like.

【0009】上記した構成の切断防止手段としては、請
求項2に記載のように、請求項1において、前記導通部
の挟持部付近において断面二次モーメントを小さくする
ような切欠部を付与することでフレキシブルに構成され
ていることを特徴とする。
As the cutting preventing means having the above-mentioned structure, as described in claim 2, in claim 1, a notch portion for reducing the second moment of area is provided in the vicinity of the sandwiching portion of the conducting portion. It is characterized by being configured flexibly.

【0010】この構成によれば、フレキシブルプリント
基板の撓曲耐久性、対切断性を向上させ、切損による導
通不良を防止することができる。
According to this structure, it is possible to improve the bending durability and the cutting resistance of the flexible printed circuit board and prevent the conduction failure due to the cutting loss.

【0011】上記した構成の他の切断防止手段として
は、請求項3に記載のように、請求項2において、前記
切欠部と同一位置に、前記導通部を絶縁被覆するための
カバーコートの端部を位置付けして構成することもでき
る。
As another cutting prevention means having the above-mentioned structure, as in claim 3, in claim 2, an end of a cover coat for insulatingly covering the conducting portion at the same position as the cutout portion. The parts may be positioned and configured.

【0012】この構成によれば、フレキシブルプリント
基板の切欠部に応力が集中し易くなり、該切欠部に十分
な曲率をもって曲げ変形を付与することができる。
According to this structure, stress is likely to be concentrated in the cutout portion of the flexible printed board, and bending deformation can be applied to the cutout portion with a sufficient curvature.

【0013】上記した構成の他の切断防止手段として
は、請求項4に記載のように、請求項1において、フレ
キシブルプリント基板の電極に対し焼鈍処理を施したこ
とを特徴とする。
As another cutting prevention means having the above-mentioned structure, as described in claim 4, in claim 1, the electrode of the flexible printed circuit board is annealed.

【0014】この構成によれば、フレキシブルプリント
基板の電極を形成する例えば銅箔等に焼鈍を行なうこと
で、フレキシブルプリント基板の電極の切断を防止する
ことができる。
According to this structure, it is possible to prevent the electrodes of the flexible printed circuit board from being cut off by annealing the copper foil or the like forming the electrodes of the flexible printed circuit board.

【0015】上記した構成の他の切断防止手段として
は、請求項5に記載のように、請求項1において、前記
導通部の挟持部付近においてフレキシブル基板の平面内
で折屈曲部を有することにより得られる。
As another cutting prevention means having the above-mentioned structure, as described in claim 5, in claim 1, by having a bent portion in the plane of the flexible substrate in the vicinity of the holding portion of the conducting portion. can get.

【0016】この構成によれば、前記接続部にかかる変
形応力歪を導通部内だけに分散させることができる。
According to this structure, the deformation stress strain applied to the connecting portion can be dispersed only in the conducting portion.

【0017】上記した各構成を組合せた切断防止手段と
して、請求項6に記載のように、請求項1において、前
記導通部の挟持部付近において断面二次モーメントを小
さくするような切欠部と、フレキシブル基板の平面内で
の屈曲部とを有し、該切欠部と同一位置に、前記導通部
を絶縁被覆するためのカバーコートの端部を位置付け
し、フレキシブル基板の電極の延伸率を向上させるよう
該電極に対し焼鈍処理を施して成ることを特徴とする。
As a cutting prevention means combining the above-mentioned respective structures, as described in claim 6, in claim 1, a notch portion for reducing the second moment of area in the vicinity of the sandwiching portion of the conducting portion, The flexible substrate has a bent portion in a plane, and an end portion of a cover coat for insulatingly coating the conductive portion is positioned at the same position as the cutout portion to improve the extension ratio of the electrode of the flexible substrate. As described above, the electrode is annealed.

【0018】この構成によれば、信頼性の高い例えば棒
状超音波振動子等を安価に提供することができる。
According to this structure, it is possible to provide a highly reliable rod-shaped ultrasonic transducer or the like at low cost.

【0019】[0019]

【実施例】【Example】

(第1実施例)図1は本発明に係る第1実施例の棒状超
音波振動子1の分解斜視図を示すものである。棒状超音
波振動子1を構成は従来例と同一であり、説明は略す。
図2は本発明に係る第1実施例に用いるフレキシブルプ
リント基板6の平面形状を示すものである。フレキシブ
ルプリント基板6は、棒状超音波振動子1を構成する下
部振動体3と積層圧電素子5により挟まれて締結挟持さ
れる挟持部6−a、不図示の導通用コネクタとの接続部
6−c、及び挟持部6−aと接続部6−cとの導通を行
う導通部6−b、電極7、電気的絶縁を行うカバーコー
ト部8より構成される。
(First Embodiment) FIG. 1 is an exploded perspective view of a rod-shaped ultrasonic transducer 1 according to the first embodiment of the present invention. The configuration of the rod-shaped ultrasonic transducer 1 is the same as that of the conventional example, and the description is omitted.
FIG. 2 shows a planar shape of the flexible printed board 6 used in the first embodiment according to the present invention. The flexible printed circuit board 6 is sandwiched between the lower vibrating body 3 which constitutes the rod-shaped ultrasonic transducer 1 and the laminated piezoelectric element 5 and is clamped and clamped, and a connecting portion 6-a for connection with a connector for conduction (not shown). c, a conducting portion 6-b for conducting the holding portion 6-a and the connecting portion 6-c, an electrode 7, and a cover coat portion 8 for electrically insulating.

【0020】本実施例での振動子1は電気的に2相で駆
動され、それぞれの駆動相は独立したグランド相を持
ち、センサの用途を成すセンサ相を備えているので、外
部との電気的な接続は合計5相となる。この電気的な接
続はすべてフレキシブルプリント基板6により行われる
のでフレキシブルプリント基板6には5つの基板電極7
が形成される。ここで示した振動子1の駆動方法、ある
いは積層圧電素子5の構成等は本発明とは直接の関係を
持たないので説明は略す。
Since the vibrator 1 in this embodiment is electrically driven in two phases, each driving phase has an independent ground phase, and has a sensor phase that serves as a sensor, it is possible to electrically connect to the outside. The total number of connections is 5 phases. Since all the electrical connections are made by the flexible printed board 6, the flexible printed board 6 has five board electrodes 7
Is formed. The driving method of the vibrator 1 shown here, the configuration of the laminated piezoelectric element 5, and the like have no direct relation to the present invention, and therefore the description thereof is omitted.

【0021】フレキシブルプリント基板6のベースはポ
リイミド樹脂で形成され、厚さは約25μmである。
The base of the flexible printed circuit board 6 is made of polyimide resin and has a thickness of about 25 μm.

【0022】フレキシブルプリント基板6の電極7は銅
箔により形成され、厚さは約35μmである。銅箔の露
出部は、銅箔の酸化を防止するためにハンダメッキが施
されている。フレキシブルプリント基板6の導通部6−
bに絶縁のためのカバーコート部8はポリイミド樹脂に
より形成され、厚さは約25μmである。フレキシブル
プリント基板6の電極7はベース材料上に接着剤により
接着されて形成されており、エポキシ系の接着剤が用い
られており厚さは平均15μmである。
The electrodes 7 of the flexible printed board 6 are formed of copper foil and have a thickness of about 35 μm. The exposed portion of the copper foil is solder-plated to prevent the copper foil from being oxidized. Conducting part 6 of flexible printed circuit board 6-
The cover coat portion 8 for insulation on b is formed of a polyimide resin and has a thickness of about 25 μm. The electrode 7 of the flexible printed circuit board 6 is formed by adhering it to the base material with an adhesive, and an epoxy adhesive is used, and the thickness is 15 μm on average.

【0023】棒状超音波振動子1の直径はφ10mmで
あり、フレキシブルプリント基板6の挟持部6−aの直
径もφ10mmで形成される。挟持部6−aの中心から
接続部6−cの端部までは約40mmである。導通部6
−cの幅は約3.25mmである。導通部6−cに形成
されている電極7の幅は全て約0.25mmでピッチは
約0.5mmである。
The diameter of the rod-shaped ultrasonic transducer 1 is φ10 mm, and the diameter of the sandwiching portion 6-a of the flexible printed board 6 is also φ10 mm. The distance from the center of the holding portion 6-a to the end of the connecting portion 6-c is about 40 mm. Conducting part 6
The width of -c is about 3.25 mm. The widths of the electrodes 7 formed in the conducting portions 6-c are all about 0.25 mm and the pitch is about 0.5 mm.

【0024】フレキシブルプリント基板6の導通部6−
bには挟持部6−aの中心より約6.2mm、つまり振
動子の側面より1.2mm離れた位置に導通部6−bの
両側面に対向する形で切欠部6−dが形成される。この
切欠部の位置での導通部6−bの幅は約2.8mmであ
る。また、導通部6−b上のカバーコート部8の端部8
−aは切欠部6−dの位置と同じとなるように形成され
る。
Conducting portion 6 of flexible printed circuit board 6-
In b, a notch 6-d is formed at a position about 6.2 mm from the center of the holding part 6-a, that is, at a position 1.2 mm away from the side surface of the vibrator so as to face both side surfaces of the conducting part 6-b. It The width of the conducting portion 6-b at the position of the cutout portion is about 2.8 mm. In addition, the end portion 8 of the cover coat portion 8 on the conducting portion 6-b.
-A is formed so as to be at the same position as the cutout 6-d.

【0025】前記解決すべき課題の項で示した如く、フ
レキシブルプリント基板6の接続部6−cの幅や厚さを
増やすとフレキシブルプリント基板6による振動エネル
ギーの損失が増加し、振動子の性能の低下を招いてしま
う。さらに棒状超音波振動子1の使用状態を考慮する
と、フレキシブルプリント基板6の導通部6−bの幅を
上記の値以上に増やすことができない。
As described in the section of the problem to be solved, when the width and thickness of the connecting portion 6-c of the flexible printed circuit board 6 are increased, the loss of vibration energy due to the flexible printed circuit board 6 is increased, and the performance of the vibrator is increased. Will lead to a decrease in Further, considering the usage state of the rod-shaped ultrasonic transducer 1, the width of the conducting portion 6-b of the flexible printed circuit board 6 cannot be increased beyond the above value.

【0026】本実施例の振動子1では、フレキシブルプ
リント基板6に平面外方向に曲げる力を加えたとき、導
通部6−bに設けられた切欠部6−dにより断面2次モ
ーメントが小さくなるので、曲げに対する強度が他の部
分より低く、この部分がフレキシブルに曲がり易くなっ
ている。さらに、この切欠部6−dと位置を合わせるよ
うにしてカバーコート部8の端部8−aが形成されてお
り、この端部8−aの効果により切欠部6−dに応力が
集中し易い構造となっている。このため、フレキシブル
プリント基板は図3の様に十分な曲率をもって曲げ変形
を生じ、この結果フレキシブルプリント基板6の電極7
に切断の生じない、信頼性の高い棒状超音波振動子1を
提供することが可能となる。
In the vibrator 1 of this embodiment, when the flexible printed circuit board 6 is subjected to a bending force in the out-of-plane direction, the second moment of area becomes small due to the notch 6-d provided in the conducting portion 6-b. Therefore, the strength against bending is lower than the other portions, and this portion is flexible and easy to bend. Further, the end portion 8-a of the cover coat portion 8 is formed so as to be aligned with the cutout portion 6-d, and stress is concentrated on the cutout portion 6-d due to the effect of the end portion 8-a. It has an easy structure. Therefore, the flexible printed circuit board is bent and deformed with a sufficient curvature as shown in FIG. 3, and as a result, the electrodes 7 of the flexible printed circuit board 6 are deformed.
It is possible to provide a highly reliable rod-shaped ultrasonic transducer 1 which is free from cutting.

【0027】本実施例では圧電素子として積層圧電素子
5を採用したが、これに限定されるものではなく、1枚
の板で構成される圧電素子でも構わない。また、振動子
1の形状、振動子1およびフレキシブルプリント基板6
の形状寸法は本実施例に何等限定されない。
In this embodiment, the laminated piezoelectric element 5 is adopted as the piezoelectric element, but the piezoelectric element is not limited to this and may be a piezoelectric element composed of one plate. Further, the shape of the vibrator 1, the vibrator 1 and the flexible printed board 6
The shape and dimensions of are not limited to those in this embodiment.

【0028】(第2実施例)次に本発明に係る第2実施
例について説明する。第2実施例におけるフレキシブル
プリント基板6の形状は第1実施例で示した図1のもの
と同様であり、説明は略す。
(Second Embodiment) Next, a second embodiment according to the present invention will be described. The shape of the flexible printed circuit board 6 in the second embodiment is the same as that of FIG. 1 shown in the first embodiment, and the explanation is omitted.

【0029】従来例で生じたフレキシブルプリント基板
6の電極7の切断は観測により銅箔の延性の不足が原因
であることが確認された。フレキシブルプリント基板6
に用いられている銅箔は圧延、あるいは電解行程により
形成されるが、フレキシブルプリント基板6の形成の過
程で焼鈍は行われていない。この銅箔の延伸率は約4パ
ーセントであった。
It was confirmed by observation that the disconnection of the electrode 7 of the flexible printed circuit board 6 that occurred in the conventional example was caused by the lack of ductility of the copper foil. Flexible printed circuit board 6
The copper foil used in the above is formed by rolling or electrolytic process, but it is not annealed in the process of forming the flexible printed circuit board 6. The draw ratio of this copper foil was about 4 percent.

【0030】次にフレキシブルプリント基板6を約20
0℃で焼鈍し同じく延伸率を測定したところ10パーセ
ントに向上した。このフレキシブルプリント基板6を実
施例1の場合と同様に棒状超音波振動子1に組んだとこ
ろ、フレキシブルプリント基板6の電極7に切断は発生
せず、良好な結果が得られた。
Next, about 20 flexible printed circuit boards 6 are provided.
When it was annealed at 0 ° C. and the stretching ratio was also measured, it was improved to 10%. When this flexible printed board 6 was assembled to the rod-shaped ultrasonic vibrator 1 in the same manner as in Example 1, cutting was not generated in the electrodes 7 of the flexible printed board 6, and good results were obtained.

【0031】上記の構成ではフレキシブルプリント基板
6の電極7のベースへの接着にはエポキシ系の接着剤が
用いられており、銅箔に対して焼鈍を行う際の温度はこ
の接着剤の耐熱性に依存している。フレキシブルプリン
ト基板6の材料として銅箔とベースとの接着に接着剤を
用いない無接着剤基板材料を用いたとき、銅箔の焼鈍温
度は250℃まで加えられる。この結果、銅箔の延伸性
はより大きくなり、更に対切断性の良好なフレキシブル
プリント基板6を形成できる。
In the above structure, an epoxy-based adhesive is used to bond the electrode 7 of the flexible printed board 6 to the base, and the temperature at which the copper foil is annealed depends on the heat resistance of this adhesive. Depends on. When an adhesive-free substrate material that does not use an adhesive is used to bond the copper foil and the base as the material of the flexible printed board 6, the annealing temperature of the copper foil is up to 250 ° C. As a result, the stretchability of the copper foil is further increased, and the flexible printed circuit board 6 having excellent cut resistance can be formed.

【0032】このように、本実施例によりフレキシブル
プリント基板6の電極7の切断の問題は解消され、信頼
性の高い棒状超音波振動子1が提供される。
As described above, according to this embodiment, the problem of cutting the electrode 7 of the flexible printed board 6 is solved, and the highly reliable rod-shaped ultrasonic vibrator 1 is provided.

【0033】また、本実施例の効果はフレキシブルプリ
ント基板6の形状に限定されない。 (第3実施例)図4は本発明に係る第3実施例のフレキ
シブルプリント基板6を示すものである。棒状超音波振
動子1の構成は第1実施例と同様であり、ここでの説明
は略す。
The effect of this embodiment is not limited to the shape of the flexible printed board 6. (Third Embodiment) FIG. 4 shows a flexible printed circuit board 6 according to a third embodiment of the present invention. The structure of the rod-shaped ultrasonic transducer 1 is the same as that of the first embodiment, and the description thereof is omitted here.

【0034】フレキシブルプリント基板6は導通部6−
bにおいて、挟持部6−aの中心部から約10mm離れ
た位置でほぼ90°だけ平面内において曲げられてい
る。
The flexible printed board 6 has a conducting portion 6-
In b, it is bent in the plane by about 90 ° at a position separated by about 10 mm from the central portion of the holding portion 6-a.

【0035】フレキシブルプリント基板6への変形力は
接続部6−cより加えられる。また、フレキシブルプリ
ント基板6の形状より変形に対する抗力、あるいは強度
は平面外方向よりも平面内方向のほうが大きい。図6に
示した従来例の様な形状では接続部6−cより加えられ
る変形力により、導通部6−bの挟持部6−a付近に直
接変形が生じてしまう。
A deforming force on the flexible printed circuit board 6 is applied from the connecting portion 6-c. Further, the resistance to deformation or the strength of the flexible printed circuit board 6 is larger in the in-plane direction than in the out-plane direction. In the shape like the conventional example shown in FIG. 6, the deforming force applied from the connecting portion 6-c causes direct deformation in the vicinity of the holding portion 6-a of the conducting portion 6-b.

【0036】本実施例の様にフレキシブルプリント基板
6を導通部6−bで水平面内に曲げた形状とすること
で、接続部6−cに加えられる変形力による歪はフレキ
シブルプリント基板6の導通部6−bに分散され、一部
分に応力が集中することを防止することでフレキシブル
プリント基板6の電極7の切断を防止することが可能と
なる。尚、第1〜第3実施例は当然組合わせ可能であ
る。
As in the present embodiment, the flexible printed circuit board 6 is bent in the horizontal plane at the conducting portion 6-b, so that the strain due to the deformation force applied to the connecting portion 6-c causes the flexible printed circuit board 6 to conduct. It is possible to prevent disconnection of the electrodes 7 of the flexible printed board 6 by preventing the stress from being concentrated on a part of the flexible printed circuit board 6 by being dispersed in the portion 6-b. The first to third embodiments can naturally be combined.

【0037】[0037]

【発明の効果】請求項1に記載の発明によれば、フレキ
シブルプリント基板の切損による導通不良を防止し、信
頼性の高い例えば棒状超音波振動子等を提供することが
できる。
According to the first aspect of the present invention, it is possible to provide a highly reliable, for example, rod-shaped ultrasonic transducer or the like, which prevents conduction failure due to cutting of the flexible printed circuit board.

【0038】請求項2に記載の発明によれば、フレキシ
ブルプリント基板の撓曲耐久性、対切断性を向上させ、
切損による導通不良を防止することができる。
According to the second aspect of the present invention, the flexible printed circuit board is improved in bending durability and cut resistance,
It is possible to prevent defective conduction due to cutting.

【0039】請求項3に記載の発明によれば、フレキシ
ブルプリント基板の切欠部に応力が集中し易くなり、該
切欠部に十分な曲率をもって曲げ変形を付与することが
できる。
According to the third aspect of the present invention, stress is likely to be concentrated in the cutout portion of the flexible printed board, and bending deformation can be applied to the cutout portion with a sufficient curvature.

【0040】請求項4に記載の発明によれば、フレキシ
ブルプリント基板の電極を形成する例えば銅箔等に焼鈍
を行なうことで、フレキシブルプリント基板の電極の切
断を防止することができる。
According to the fourth aspect of the invention, the electrodes of the flexible printed circuit board can be prevented from being cut by annealing the copper foil or the like forming the electrodes of the flexible printed circuit board.

【0041】請求項5に記載の発明によれば、前記接続
部にかかる変形応力歪を導通部内だけに分散させること
ができる。
According to the fifth aspect of the invention, the deformation stress strain applied to the connecting portion can be dispersed only in the conducting portion.

【0042】請求項6に記載の発明によれば、信頼性の
高い例えば棒状超音波振動子等を安価に提供することが
できる。
According to the sixth aspect of the invention, it is possible to provide a highly reliable, for example, rod-shaped ultrasonic transducer at a low cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】第1実施例の棒状超音波振動子の分解斜視図FIG. 1 is an exploded perspective view of a rod-shaped ultrasonic transducer according to a first embodiment.

【図2】第1実施例で用いられるフレキシブルプリント
基板の平面図
FIG. 2 is a plan view of a flexible printed circuit board used in the first embodiment.

【図3】第1実施例においてフレキシブルプリント基板
を曲げた状態を示した側面図
FIG. 3 is a side view showing a state in which the flexible printed circuit board is bent in the first embodiment.

【図4】第3実施例で用いられるフレキシブルプリント
基板の平面図
FIG. 4 is a plan view of a flexible printed circuit board used in the third embodiment.

【図5】従来例の棒状超音波振動子の全体斜視図FIG. 5 is an overall perspective view of a conventional rod-shaped ultrasonic transducer.

【図6】従来例のフレキシブルプリント基板の平面図FIG. 6 is a plan view of a conventional flexible printed circuit board.

【図7】従来例においてフレキシブルプリント基板を曲
げた状態を示した側面図
FIG. 7 is a side view showing a state in which a flexible printed circuit board is bent in a conventional example.

【符号の説明】[Explanation of symbols]

1…棒状超音波振動子 2…上部振動体 3…下部振動体 4…締結ボルト 5…積層圧電素子 6…フレキシブル
プリント基板 7…電極 8…カバーコート
DESCRIPTION OF SYMBOLS 1 ... Rod-shaped ultrasonic vibrator 2 ... Upper vibrator 3 ... Lower vibrator 4 ... Fastening bolt 5 ... Laminated piezoelectric element 6 ... Flexible printed circuit board 7 ... Electrode 8 ... Cover coat part

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 圧電素子と該圧電素子の給電のためのフ
レキシブル基板とを2つの振動体間に挟持固定して成る
超音波振動子において、該フレキシブル基板は前記振動
体間に挟持固定される挟持部と、外部へ電気的接続され
る接続部と、該挟持部と接続部との導通を行なう導通部
とを有し、該導通部の挟持部付近にフレキシブル基板の
曲げ応力に対する強度分布を制御するよう切断防止手段
を設けたことを特徴とする超音波振動子。
1. An ultrasonic transducer comprising a piezoelectric element and a flexible substrate for feeding power to the piezoelectric element sandwiched and fixed between two vibrating bodies, wherein the flexible substrate is sandwiched and fixed between the vibrating bodies. A sandwiching portion, a connecting portion electrically connected to the outside, and a conducting portion that conducts electricity between the sandwiching portion and the connecting portion are provided, and a strength distribution against bending stress of the flexible substrate is provided near the sandwiching portion of the conducting portion. An ultrasonic transducer, which is provided with cutting prevention means for controlling.
【請求項2】 請求項1において、切断防止手段は、前
記導通部の挟持部付近において断面二次モーメントを小
さくするような切欠部を付与することでフレキシブルに
構成されていることを特徴とする超音波振動子。
2. The cut preventing means according to claim 1, wherein the cut preventing means is configured to be flexible by providing a cutout portion for reducing a moment of inertia of area in the vicinity of the sandwiching portion of the conducting portion. Ultrasonic transducer.
【請求項3】 請求項2において、前記切欠部と同一位
置に、前記導通部を絶縁被覆するためのカバーコートの
端部を位置付けしたことを特徴とする超音波振動子。
3. The ultrasonic transducer according to claim 2, wherein an end portion of a cover coat for insulatingly coating the conducting portion is positioned at the same position as the cutout portion.
【請求項4】 請求項1において、切断防止手段とし
て、フレキシブル基板の電極に対し焼鈍処理を施したこ
とを特徴とする超音波振動子。
4. The ultrasonic transducer according to claim 1, wherein the electrode of the flexible substrate is annealed as a cutting prevention means.
【請求項5】 請求項1において、切断防止手段は、前
記導通部の挟持部付近においてフレキシブル基板の平面
内で折曲部を有することを特徴とする超音波振動子。
5. The ultrasonic transducer according to claim 1, wherein the cutting prevention means has a bent portion in the plane of the flexible substrate near the sandwiching portion of the conducting portion.
【請求項6】 請求項1において、切断防止手段は、前
記導通部の挟持部付近において断面二次モーメントを小
さくするような切欠部と、フレキシブル基板の平面内で
の屈曲部とを有し、該切欠部と同一位置に、前記導通部
を絶縁被覆するためのカバーコートの端部を位置付け
し、フレキシブル基板の電極の延伸率を向上させるよう
該電極に対し焼鈍処理を施して成ることを特徴とする超
音波振動子。
6. The cutting prevention means according to claim 1, wherein the cutting prevention means has a cutout portion for reducing a moment of inertia of area in the vicinity of the holding portion of the conducting portion, and a bending portion in a plane of the flexible substrate. An end portion of a cover coat for insulatingly coating the conductive portion is positioned at the same position as the cutout portion, and the electrode of the flexible substrate is annealed so as to improve the extension ratio of the electrode. Ultrasonic transducer.
JP7052536A 1995-03-13 1995-03-13 Ultrasonic oscillator Pending JPH08251954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7052536A JPH08251954A (en) 1995-03-13 1995-03-13 Ultrasonic oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7052536A JPH08251954A (en) 1995-03-13 1995-03-13 Ultrasonic oscillator

Publications (1)

Publication Number Publication Date
JPH08251954A true JPH08251954A (en) 1996-09-27

Family

ID=12917501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7052536A Pending JPH08251954A (en) 1995-03-13 1995-03-13 Ultrasonic oscillator

Country Status (1)

Country Link
JP (1) JPH08251954A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008086153A (en) * 2006-09-28 2008-04-10 Taiheiyo Cement Corp Ultrasonic motor
WO2009007047A2 (en) * 2007-07-06 2009-01-15 Eth Zurich Piezoelectric device for detecting or generating forces and torques in multiple directions
KR100963559B1 (en) * 2009-07-20 2010-06-15 범진아이엔디(주) Slim type speaker
WO2016185899A1 (en) * 2015-05-15 2016-11-24 株式会社村田製作所 Drive unit and drive device
JP2019118850A (en) * 2017-12-28 2019-07-22 Tdk株式会社 Vibration method of vibration device
US11825180B2 (en) 2020-05-15 2023-11-21 Murata Manufacturing Co., Ltd. Vibration device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008086153A (en) * 2006-09-28 2008-04-10 Taiheiyo Cement Corp Ultrasonic motor
WO2009007047A2 (en) * 2007-07-06 2009-01-15 Eth Zurich Piezoelectric device for detecting or generating forces and torques in multiple directions
WO2009007047A3 (en) * 2007-07-06 2009-04-09 Eth Zuerich Piezoelectric device for detecting or generating forces and torques in multiple directions
KR100963559B1 (en) * 2009-07-20 2010-06-15 범진아이엔디(주) Slim type speaker
WO2016185899A1 (en) * 2015-05-15 2016-11-24 株式会社村田製作所 Drive unit and drive device
JPWO2016185899A1 (en) * 2015-05-15 2018-02-22 株式会社村田製作所 Drive unit and drive device
JP2019118850A (en) * 2017-12-28 2019-07-22 Tdk株式会社 Vibration method of vibration device
US11607707B2 (en) 2017-12-28 2023-03-21 Tdk Corporation Method for vibrating a vibration device
US11825180B2 (en) 2020-05-15 2023-11-21 Murata Manufacturing Co., Ltd. Vibration device

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