JPH08247396A - Actuating device for bomb main valve - Google Patents

Abstract

PURPOSE: To provide a bomb main valve actuating device which is composed so as to open and close the root valve of a bomb through an actuator. CONSTITUTION: In an actuator box 5, a driving shaft 10 is driven by compressed air supplied from a relay box 25, and the driving power is transmitted through a universal joint and a chuck 19 to the handle 4a of a root valve 4, which is opened or closed by the rotation of the handle 4a being clue to the turning of the driving shaft 10. A rotary encoder 20 provided in the actuator box 5 outputs a detection pulse to the turn angle of the driving shaft 10. In a control box 29, the turning position of the driving shaft 10 corresponding to the valve closing position of the main valve 4 is detected by the rotary encoder 20, and the existence of abnormality is judged on the difference of the above detected value from a fixed rotation angle range for informing the exchanging time of a packing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylinder valve actuating device, and more particularly to a cylinder valve actuating device configured to open and close a cylinder valve by an actuator.

[0002]

2. Description of the Related Art A cylinder for storing material gas for semiconductors used in a semiconductor manufacturing process, for example, is housed in a cylinder storage box equipped with an exhaust duct. A main valve is installed to open and close the cylinder for supply. Further, the cylinder storage box is provided with a cylinder main valve actuating device having an actuator for opening and closing the main valve of the cylinder.

This cylinder main valve actuating device has a structure in which an actuator is driven by remote operation. As a conventional example thereof, the applicant has previously proposed the Japanese Utility Model Publication 5-9596.
There is one disclosed in Japanese Patent Publication. In the device of this publication, an actuator is provided above the cylinder, and an operation signal is supplied to the actuator from an operating device provided at a place distant from the installation site of the cylinder. The actuator is composed of a piston / cylinder mechanism, and the cylinder is connected to a pair of air pipes for supplying compressed air to a pair of cylinder chambers formed on both sides of the piston. Therefore, in the actuator, when compressed air is supplied to one cylinder chamber, the piston is driven in the valve opening direction, and when compressed air is supplied to the other cylinder chamber, the piston is driven in the valve closing direction. Has become. Then, the main valve of the cylinder operates in the valve opening direction or the valve closing direction by transmitting the driving torque of the driving shaft that rotates by the sliding motion of the piston of the actuator.

When replacing the cylinder, the original valve of the used cylinder is closed and replaced with a new cylinder, and then the chuck of the connecting member connected to the drive shaft of the actuator is connected to the handle of the original valve. Become. Then, in order to connect the chuck to the handle of the source valve with the source valve closed, confirm that the piston of the actuator has moved to the valve closed position, and check the handle position of the source valve and the piston operating position of the actuator. Match.

After connecting the chuck to the handle in this way, the operator operates the actuator to drive the actuator in the valve opening direction. At that time, the operator has confirmed that the scale indicating the stroke of the actuator and the valve opening degree of the original valve (the turning position of the handle) match.

However, as the opening / closing operation of the main valve is repeated, the seat packing of the valve body contacting the seat portion is gradually deformed or worn, so that the lift amount of the valve body is increased accordingly. Along with this, the rotation angle range of the handle of the source valve is widened, and the initially set valve closing position of the source valve and the valve closing position of the piston of the actuator do not match. That is, the actuator must move the piston in the valve closing direction more than the initial valve closing position by the amount of increase in the valve lift.

However, since the stroke of the piston is limited in the actuator, it is necessary to inform the operator that the seat packing of the valve body is deformed or worn before the piston reaches the sliding end in the valve closing direction. is there. Therefore, in the above-mentioned conventional device, the rotational position of the drive shaft of the actuator is detected by the limit switch, the piston slides in the valve closing direction beyond the initial valve closing position, and the drive shaft moves beyond a predetermined angle. When rotated, the over-rotation detection switch is turned on to light the indicator lamp.

[0008]

In the structure in which the limit switch detects excessive rotation of the drive shaft of the actuator as described above, the rotational position of the drive shaft corresponding to the operating position of the piston is mechanically detected. For example, if the seat packing of the main valve is deformed or worn, it is not possible to determine how much the drive shaft of the piston should be rotated excessively, and it is normal if the limit switch does not detect it. I was thinking.

However, even before the limit switch detects the excessive rotation of the drive shaft, the seat packing may actually need to be replaced. In the conventional device, especially when the adjustment of the chuck coupling position is repeated, even if the seat packing needs to be replaced, this cannot be detected only by the limit switch, and it is time for the operator to replace the seat packing. There was a problem that I couldn't let you know.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a cylinder main valve operating device that solves the above problems.

[0011]

According to the present invention, there is provided a cylinder main valve actuating device for opening and closing a main valve mounted on a cylinder filled with gas by driving an actuator, wherein a drive shaft of the actuator is the main valve. A rotation angle detecting means for detecting a rotation angle range from the valve opening position to the valve closing position, a storage means for storing an initial rotation angle range detected by the rotation angle detecting means, and the storage means. Abnormality determination that determines an angle difference between the stored rotation angle range and the current rotation angle range detected by the rotation angle detection means, and determines that there is an abnormality when the angle difference exceeds a predetermined value Means and are provided.

[0012]

According to the present invention, the drive shaft of the actuator detects the rotation angle range from the valve open position to the valve close position of the original valve by the rotation angle detection means, and the storage means stores the initial rotation angle range. Keep it. Then, an angle difference between the rotation angle range stored in the storage means and the current rotation angle range detected by the rotation angle detection means is obtained, and when the angle difference becomes equal to or larger than a predetermined value, it is determined to be abnormal. By doing so, even if the valve body lift amount of the original valve increases due to deformation or wear of the seat packing, it is possible to accurately determine how much the drive shaft of the actuator is further rotated from the initial valve closing position. Can be detected. Therefore, it is possible to quantitatively monitor the excessive rotation amount of the drive shaft of the actuator according to the change in the lift amount of the valve body accumulated from the initial state to the present.

[0013]

1 to 3 show an embodiment of a cylinder valve actuating device according to the present invention. 1 is a perspective view showing the overall configuration of the cylinder main valve actuating device, FIG. 2 is a vertical cross-sectional view showing the configuration of an actuator box that drives the main valve of the cylinder to open and close, and FIG. 3 is a plan view of the actuator box. It is a figure.

The cylinder 1 is filled with a semiconductor material gas, and is stored in a box-shaped cylinder storage box 2. Further, the cylinder 1 is held vertically in the cylinder storage box 2 by the cylinder fixing fitting 3. A main valve 4 is attached to the top of the cylinder 1. The main valve 4 is configured such that the valve element moves in the separating direction or the abutting direction with respect to the seat portion according to the rotating direction of the handle 4a, and the valve opening position and the closing position according to the rotating position of the handle 4a. The valve position is set.

Reference numeral 5 denotes an actuator box, which is a cylinder 1
It is installed on the bracket 2a in the cylinder storage box 2 so as to be located above. As shown in FIG. 2, the actuator box 5 is a drive including an air cylinder 6 to which compressed air is supplied, a piston 7 that slides in the air cylinder 6, and a pinion 9 that meshes with a rack 8 of the piston 7. And a shaft 10.

The piston 7 includes a first and a second piston portion 13, which form cylinder chambers 11 and 12 in the air cylinder 6.
14 and the connecting portion 1 extending in the piston sliding direction (X direction) so as to connect between the first and second piston portions 13 and 14.
It consists of 5. The connecting portion 15 is integrally provided with a rack 8 with which the pinion 9 meshes, and the piston 7 slides and the drive shaft 10 rotates. The drive shaft 10 extends in a vertical direction orthogonal to the connecting portion 15 and is rotatably supported by a pair of bearings 16 and 17 embedded in the upper and lower wall portions of the air cylinder 6. The drive shaft 10 has a hollow shape, and its lower end projects below the air cylinder 6. Then, the hollow portion 10 at the lower end of the drive shaft 10
The upper end portion 18a of the universal joint 18 is fitted in a. The hollow portion 10a of the drive shaft 10 and the upper end portion 18a of the universal joint 18 are fitted in a state in which the rotation direction is restricted by a spline or the like, and are integrally rotated by the sliding operation of the piston 7. Has become.

The lower end 18b of the universal joint 18 is fitted and fixed to the shaft 19a of the chuck 19. The chuck 19 is formed so as to cover the entire circumference of the handle 4a of the main valve 4, and is reduced in diameter by tightening the mounting screw 19b and fastened in a state of being fitted to the outer circumference of the handle 4a. Therefore, the drive shaft 10 is integrally connected to the handle 4 a of the main valve 4 via the universal joint 18 and the chuck 19.

Therefore, when the piston 7 in the air cylinder 6 is driven by the supply of compressed air, the driving force is transmitted through the transmission mechanism including the rack 8, the pinion 9, the universal joint 18 and the chuck 19 to the main valve 4. Is transmitted to the handle 4a. The main valve 4 is a handle 4a by the reciprocating motion of the piston 7.
The valve is opened or closed by rotating the.

Reference numeral 20 denotes a rotary encoder (rotational angle detecting means), which is provided above the actuator box 5 as shown in FIGS. In this embodiment, the rotary encoder 20 outputs, for example, an absolute position signal corresponding to the rotation angle in parallel regardless of the presence or absence of rotation, so that the number of detection pulses to be output can be selected according to the resolution. The configured absolute type is used.

The lower end of the shaft 20a of the rotary encoder 20 is fitted in the hole 21a of the gear 21 and is connected so as to rotate integrally with the gear 21. The gear 21 is fitted on the upper end of the drive shaft 10 and meshes with a gear 22 that rotates integrally with the drive shaft 10. Therefore, when the piston 7 is driven in the valve closing direction or the valve opening direction to rotate the drive shaft 10, the rotation of the drive shaft 10 is transmitted to the shaft 20a of the rotary encoder 20 via the gears 22 and 21. Gear 2
1 and 22 have the same pitch circle diameter and the same number of teeth, and the rotation angle of the drive shaft 10 is detected by the rotary encoder 20.

Returning to FIG. 1, description will be made again. 25 is a relay box, which is provided on the side surface of the cylinder storage box 2,
Air pipes 26, 27, 28 for supplying compressed air are connected. The relay box 25 is provided with an electromagnetic valve (not shown) for distributing the supplied compressed air to the cylinder chambers 11 and 12 of the air cylinder 6. Therefore, when compressed air from an air source (not shown) is supplied to the relay box 25 through the air pipe 26, the switching operation of each solenoid valve causes the cylinder chamber 1 to pass through the air pipes 27 and 28.
The compressed air is supplied to 1 and 12, and the piston 7 in the air cylinder 6 is driven.

Reference numeral 29 is a control box, which is provided at a location apart from the cylinder storage box 2. Also,
The control box 29 includes a cylinder storage box 2
A remote switch box 30 provided on the front surface of the is connected. The control box 29 and the remote switch box 30 have a valve opening switch 29a,
30a, valve closing switches 29b and 30b, and emergency shutoff switches 29c and 30c are provided. Valve open switch 29
When a and 30a are turned on, the solenoid valve of the relay box 25 is switched, compressed air is introduced into one cylinder chamber 12 via the air pipe 28, and air in the other cylinder chamber 11 is changed to air. It is opened to the atmosphere through the pipe 27. Therefore, the piston 7 slides leftward in FIG. 2 to rotate the drive shaft 10 in the valve opening direction.

When the valve closing switches 29b, 30b or the emergency shutoff switches 29c, 30c are turned on,
The solenoid valve of the relay box 25 is switched, the compressed air is introduced into the one cylinder chamber 11 through the air pipe 27, and the air in the other cylinder chamber 12 is opened to the atmosphere through the air pipe 28. Therefore, the piston 7 is
The drive shaft 10 is rotated in the valve closing direction by sliding rightward in the middle.

Therefore, the operator has a control box 29 provided at a place away from the cylinder 1 or a remote switch box 3 provided at the place where the cylinder 1 is installed.
By operating 0, the main valve 4 can be opened or closed. In addition, in the control box 29,
A chucking setting switch 29 that is operated when the chuck 19 is attached to the handle 4a of the original valve 4 when replacing the cylinder.
d is provided. This chucking setting switch 2
When 9d is turned on, the initial rotation angle range from the rotation position (rotation angle) of the drive shaft 10 detected by the rotary encoder 20 is stored as described later.

Further, on the front surface of the control box 29, in addition to the above-mentioned various switches, a valve opening position indicating lamp 3 is provided.
1, a valve closing position display lamp 32, a proper mounting position display lamp 33, an over rotation display lamp 34, and a seat packing replacement timing display lamp 35 are provided. An indicator 36 that digitally displays the rotation angle of the drive shaft 10 and a digital meter 37 that numerically displays the rotation angle of the drive shaft 10 are provided below the various lamps.

Therefore, the operator can know the current rotation angle of the drive shaft 10 by the indicator 36 or the digital meter 37 even if the operator is away from the actuator box 5, and the air cylinder 6 of the actuator box 5 is normal. You can check if it is working.

FIG. 4 is a block diagram showing the structure of the control box 29. The control box 29 is
The switches 29a to 29d and the display lamps 31 to 3
5, an indicator 36, a digital meter 37, a rotation angle detection circuit 38, a control circuit 39, and a memory (RA
M) 40.

The rotation angle detection circuit 38 receives the detection pulse output from the rotary encoder 20 to detect the rotation angle corresponding to the number of pulses, and outputs a binary code (binary number) of the rotation angle. . The control circuit 39 calculates the rotation angle of the drive shaft 10 based on the binary code (binary number) of the rotation angle output from the rotation angle detection circuit 38, and the rotation angle corresponding to the current rotation angle. It outputs a signal, a valve opening position signal, a valve closing position signal, an over-rotation position detection signal, and a proper mounting position detection signal.

Further, the control circuit 39 causes the display lamps 31 to 35, the indicator 36, and the digital meter 37 to perform a display operation according to the rotational position of the drive shaft 10 detected by the rotary encoder 20, and the drive shaft will be described later. An abnormality (deformation or wear of the seat packing) is determined from the rotational position of 10.

In addition, the memory 40 outputs the valve opening position signal, the valve closing position signal, the over-rotation position detection signal, and the proper mounting position detection signal in advance with respect to the rotation angle of the drive shaft 10 and the closing position. The angle data of the valve position, the over-rotation position, and the proper mounting position are stored. As will be described later, in the present embodiment, when the rotation angle of the valve opening position of the source valve 4 is θ = 0 to 5 °, the rotation angle of the valve closing position is θ with reference to the valve opening position.
= 250 ° or more, the rotation angle of the proper mounting position is θ = 270
The rotation angle of the over-rotation position is set to θ = 295 ° or more.

FIGS. 5 and 6 are flowcharts of the processing executed by the control circuit 39, and FIG. 7 is a diagram showing movements of the drive shaft 10 at respective turning positions and valve closing positions. Here, the processing executed by the control circuit 39 will be described. The processing of the flowcharts of FIGS. 5 and 6 is performed at predetermined time intervals (for example, 50 mse).
It is repeatedly executed every c).

In FIG. 5, in step S1 (hereinafter “step” is omitted), the rotation angle θ of the drive shaft 10 detected by the rotary encoder 20 is read. Next, in S2, the angle data of the valve opening position, valve closing position, over-rotation position, and proper mounting position stored in the memory 40 are read.

In the next step S3, it is determined whether or not the rotation angle θ of the drive shaft 10 is the valve opening position (θ = 0 to 5 ° in this embodiment). When the rotation angle θ of the drive shaft 10 is the valve opening position, the valve opening position display lamp 31 is turned on in S4, and then the other display lamps other than the valve opening position display lamp 31 are turned off in S5. Then, when the rotation angle θ of the drive shaft 10 is not in the valve opening position or when the process of S5 ends,
Proceed to S6.

At S6, it is determined whether the rotation angle θ of the drive shaft 10 is at the valve closing position (θ = 250 ° or more in this embodiment). When the rotation angle θ of the drive shaft 10 is the valve closing position, the valve closing position indicating lamp 32 is turned on in S7, and then the other indicator lamps other than the valve closing position indicating lamp 32 are turned off in S8. Then, when the rotation angle θ of the drive shaft 10 is not in the valve opening position or when the process of S8 ends,
Proceed to S9.

In S9, it is determined whether or not the rotation angle θ of the drive shaft 10 is the proper mounting position (θ = 270 ° to 275 ° in this embodiment). When the rotation angle θ of the drive shaft 10 is the proper mounting position, the proper mounting position display lamp 33 is turned on in S10, and then the other display lamps other than the proper mounting position display lamp 33 are turned off in S11.

Normally, the chuck 19 is attached to the handle 4 of the main valve 4.
When it is connected to a, the rotation angle θ when the valve is closed is 270 ° to
The sliding position of the piston 7 and the rotating position of the handle 4a are adjusted to be 275 °. And
When the rotation angle θ of the drive shaft 10 is not in the proper mounting position or when the process of S11 is completed, the process proceeds to S12.

In S12, it is determined whether or not the rotation angle θ of the drive shaft 10 is the over-rotation position (θ = 295 ° or more in this embodiment). For example, when the seat packing of the original valve 4 is deformed or worn, or when the chuck 19 coupled to the handle 4a of the original valve 4 slips and the sliding position of the piston 7 and the rotational position of the handle 4a are deviated. When the rotation angle θ of the drive shaft 10 is in the over-rotation position, the over-rotation position display lamp 34 is turned on in S13, and the other display lamps other than the over-rotation position display lamp 34 are turned off in S14. .

In this case, the operator turns on the over-rotation position indicating lamp 34 to allow the sliding position of the piston 7 and the handle 4a.
The attachment position of the chuck 19 with respect to the handle 4a is adjusted so that the rotation position of is matched. And drive shaft 1
When the rotation angle θ of 0 is not the over-rotation position, or S1
When the process of 4 is completed, the process proceeds to S15.

In S15, the chucking setting switch 2
Check if 9d has been operated on. The chucking setting switch 29d is a switch operated by an operator when the chuck 19 is coupled to the handle 4a of the original valve 4 when replacing the cylinder. When the chucking setting switch 29d is on, the process proceeds to S16.

At S16, the solenoid valves of the relay box 25 are switched and controlled to control the piston 7 of the actuator box 5.
Is slid to drive the drive shaft 10 in the valve closing direction, then in the valve opening direction and again in the valve closing direction. That is, the main valve 4 is once closed and then the main valve 4 is opened.
Then, the main valve 4 is closed again.

Next, in S17, the rotation position (rotation angle) of the drive shaft 10 when the original valve 4 is opened and closed in S16 is stored in the memory 40. Then, the rotation angle range α from the valve closed position to the valve open position of the original valve 4 is obtained (S18). Then, the rotation angle range α is stored in the memory 40 as an initial value (S19). Since the chucking setting switch 29d is turned on when the cylinder is replaced, in the next step S20, the memory 40 is replaced before the cylinder replacement.
The count value of the total rotational angle displacement ΣΔα _b stored in is reset (S20). Now, the chuck 19 can
The process of coupling to the handle 4a of the
Return to 1.

In S15, if the chucking setting switch 29d is not turned on,
Proceeding to S21 in FIG. 6, the rotation angle range α _a from the current valve opening position to the valve closing position is calculated with reference to the current valve closing position (rotation angle). Subsequently, the previous rotation angle range α is subtracted from the current rotation angle range α _a to calculate the advance angle Δα _b between the previous time and this time (S22). This advance angle Δα _b is proportional to the deformation or wear of the seat packing.

In the next step S23, it is checked whether or not the advance angle Δα _b is positive. If Δα _b > 0, the deformation or wear of the seat packing has progressed more than the previous time, so that S
Proceed to 24. However, if Δα _b > 0 is not established in S23, it is determined that the deformation or wear of the seat packing is not different from the previous time, the process proceeds to S26, and the processes of S26 and thereafter are executed.

At S24, the previous total rotation angle displacement ΣΔα
_bThis time the advance angle Δα _bIs added and accumulated
Total rotational angle displacement ΣΔα of the original valve 4_bAsk for. Soshi
Then, the total rotational angle displacement Σ stored in the memory 40 in S25
Δα_bUpdate the count value of.

Then, in S26, the value of the previous rotation angle range α is updated to the value obtained by adding the present advance angle Δα _b . Subsequently, in S27, the current total turning angle displacement ΣΔα _b obtained in S24, the threshold Δα (Δα = 25 ° in this embodiment) read from the memory 40, and the current advance angle Δα _a are calculated. In comparison, when the current total turning angle displacement ΣΔα _b is equal to or greater than the threshold value Δα, it is determined that the turning angle range of the handle 4a of the original valve 4 exceeds 295 ° and is abnormal. Therefore, if ΣΔα _b ≧ Δα in S27, the process proceeds to S28, and the seat packing replacement timing display lamp 35 is turned on.

As described above, by comparing the current total rotational angle displacement ΣΔα _b with the threshold value Δα in S27, it is possible to monitor how much the deformation or wear of the seat packing is advanced. Then, the seat packing replacement timing display lamp 35 is turned on, so that the seat packing replacement timing of the main valve 4 can be accurately known. This completes the seat packing replacement timing determination process, and returns to S1 again.

Therefore, the operator performs the seat packing replacement work of the main valve 4 when the seat packing replacement timing display lamp 35 is turned on. As a result, even if the seat packing of the main valve 4 is deformed or worn beyond the allowable limit,
At that time, it is known that it is time to replace the seat packing, and the seat packing can be replaced before the seat packing cannot be closed, and the valve closing switch 29b,
It is possible to eliminate the inconvenience that the main valve 4 cannot be closed even though the switch 30b or the emergency cutoff switches 29c and 30c are turned on.

After the chuck 19 is mounted on the handle 4a of the main valve 4 as described above, the steps S1 to S15, S
21 to S28 are repeatedly executed. When the valve closing operation and the valve opening operation of the original valve 4 are repeated by operating the valve opening switch 29a and the valve closing switch 29b, the seat packing of the original valve 4 is gradually deformed or worn, and the lift amount of the valve element is increased. Increase. Therefore, the rotation angle range of the drive shaft 10 from the valve closed position to the valve open position is initially α = 2.
Even if it is set to 70 °, this rotation angle range will gradually increase.

In this case, the mounting position of the chuck 19 with respect to the handle 4a of the original valve 4 is shifted so that the valve closing position is θ = 27.
It is adjusted to be 0 ° to 275 °. The movement of the valve closing position due to this adjustment work can be expressed as shown in FIG. In FIG. 7, the valve closing position at the beginning of cylinder replacement is S ₁ (θ = 270 ° to 275 °), but the main valve 4 is opened (O ₁ ) and the main valve 4 is closed again ( S ₂ ), the second valve closing position S ₂ becomes θ≈280 °.
Further, when the next opening (O ₂ ) and closing (S ₃ ) of the main valve 4 are performed, the third valve closing position S ₂ becomes θ> 295 °.

Therefore, when the over-rotation position display lamp 34 is turned on in S13, the operator turns the handle 4a so that the sliding position of the piston 7 and the turning position of the handle 4a coincide with each other.
The attachment position of the chuck 19 with respect to is adjusted. As a result, the fourth valve closing position shifts to S ₄ and the normal position θ =
It is returned to 270 ° to 275 °.

When the next opening (O ₄ ) and closing (S ₅ ) of the main valve ₄ is performed, the fifth valve closing position S ₅ is θ> 275 °.
When the original valve 4 is opened (O ₅ ) and closed (S ₆ ), the sixth closing position S ₆ is θ> 295 °. Here, again, the operator must move the sliding position of the piston 7 and the handle 4a.
The attachment position of the chuck 19 with respect to the handle 4a is adjusted so that the rotation position of is matched. As described above, when the work of adjusting the mounting position of the chuck 19 with respect to the handle 4a is repeated, the valve closing position is adjusted to the proper mounting position. The packing has reached the limit of use and needs to be replaced.

However, in this embodiment, as described above, in S21 to S28 described above, the present turning angle range α _a is obtained from the present valve closing position (turning angle θ), and then the present turning angle. If the previous rotation angle range α is subtracted from the range α _a and the difference in the advance angle Δα _b between the previous time and this time is positive, the seat packing of the main valve 4 is deformed or worn more in this time than in the previous time. I understand that. In that case, after S24,
The accumulated total turning angle displacement ΣΔα _b of the main valve 4 is calculated, the count value of the total turning angle displacement ΣΔα _b stored in the memory 40 is updated, and the value of the turning angle range α is set to the present advance angle. Since the value is updated by adding Δα _b , the deformation or wear of the seat packing accumulated from the beginning of cylinder replacement is quantitatively expressed by the total rotational angle displacement ΣΔα _b .

Further, the current total turning angle displacement ΣΔα _b is compared with the threshold value Δα, and when the current total turning angle displacement ΣΔα _b is equal to or greater than the threshold value Δα, the turning angle of the handle 4a of the original valve 4 is compared. Since the range exceeds 295 ° and it is determined that there is an abnormality, the seat packing replacement timing display lamp 35 is turned on.
No matter how many times the adjustment work of the mounting position of 9 is performed, the actual seat packing replacement time can be accurately determined and notified. As a result, it is possible to solve the problem that the seat packing is replaced before the seat packing is deformed or worn out so that the main valve 4 cannot be closed.

When the original valve 4 attached to the cylinder 1 is not new and the original valve 4 used a plurality of times by gas refilling is attached, the seat packing is deformed or worn to some extent when the cylinder is replaced. However, by calculating the current advance angle Δα _b based on the average rotation angle range α _M stored in advance in the memory 40, the replacement timing of the seat packing is determined regardless of the number of times the original valve 4 is used. be able to.

With this, even when the cylinders are replaced a plurality of times, the seat packing replacement timing of the main valve 4 can be accurately known. Then, the seat packing replacement timing determination process ends, and the process returns to S1. In the above embodiment, the case where the gas used in the semiconductor manufacturing process is filled in the cylinder 1 has been described as an example, but the present invention is not limited to this, and the present invention is also applied to a cylinder filled with a gas other than these. Of course you can.

Further, in the above-described embodiment, the construction in which the main valve 4 is opened and closed by using the actuator having the air cylinder 6 and the piston 7 has been described, but other actuators (for example, a motor and a hydraulic cylinder) are used. It can also be applied to the configuration. Further, in the above embodiment, S2
In FIG. 7, the current total rotation angle displacement ΣΔα _b is compared with the threshold value Δα to monitor how much the deformation or wear of the seat packing is advanced. The rotation angle θ of the drive shaft 10 is 300. When it reaches 0 ° and ΣΔα _b becomes 25 ° or more, the over-rotation position display lamp 34 and the seat packing replacement time display lamp 35 are turned on at the same time.

However, the threshold value Δα set in the memory 40
When the value of is set to 40 ° or 50 °, for example, the over-rotation position display lamp 34 is turned on first, and the rotation angle θ of the drive shaft 10 is 315 ° to 32 °.
At the time when the angle becomes 5 °, the seat packing replacement time display lamp 35 can be turned on. Therefore, by changing the value of the threshold value Δα to an arbitrary value, it is possible to shift the lighting timing of the over-rotation position display lamp 34 and the seat packing replacement timing display lamp 35.

[0058]

As described above, according to the present invention, the rotation angle detecting means detects the rotation angle range of the drive shaft of the actuator from the valve opening position to the valve closing position of the original valve, and the initial value is stored in the storage means. The rotation angle range is stored, and the angle difference between the rotation angle range stored in the storage means and the current rotation angle range detected by the rotation angle detection means is obtained, and the angle difference is equal to or greater than a predetermined value. If the valve seat lift of the main valve increases due to deformation or wear of the seat packing, the drive shaft of the actuator is rotated to an extra degree from the initial valve closing position. It can accurately detect whether it is moving. Therefore, it is possible to quantitatively monitor the over-rotation amount of the drive shaft of the actuator according to the change in the lift amount of the valve body accumulated from the initial state to the present, and the accumulated deformation amount and wear of the seat packing. It is possible to accurately detect the replacement timing of the seat packing by quantitatively determining the amount. Further, the number of parts is smaller than that in the conventional configuration in which a plurality of limit switches are arranged, the configuration is simplified, and the position detection accuracy of the valve opening / closing can be improved.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of an embodiment of a cylinder main valve actuating device according to the present invention.

FIG. 2 is an enlarged view showing internal structures of a chuck, a universal joint, and an actuator box.

FIG. 3 is a plan view of an actuator box.

FIG. 4 is a block diagram showing a configuration of a control box.

FIG. 5 is a flowchart of processing executed by a control circuit.

FIG. 6 is a flowchart of a process executed after the process of FIG.

FIG. 7 is a diagram showing movement of each rotation position and valve closing position of the drive shaft.

[Explanation of symbols]

 1 cylinder 2 cylinder storage box 4 main valve 5 actuator box 6 air cylinder 7 piston 10 drive shaft 18 universal joint 19 chuck 20 rotary encoder 25 relay box 26-28 air piping 29 control box 29a, 30a valve open switch 29b, 30b valve closed Switch 29c, 30c Emergency shutoff switch 29d Chucking setting switch 30 Remote switch box 31 Valve opening position indicator lamp 32 Valve closing position indicator lamp 33 Proper mounting position indicator lamp 34 Over rotation indicator lamp 35 Seat packing replacement time indicator lamp 36 Indicator 37 Digital Meter 38 Rotation angle detection circuit 39 Control circuit 40 Memory (RAM)

Claims (1)

[Claims] 1. A cylinder source valve actuating device for opening and closing a source valve mounted on a gas-filled cylinder by driving an actuator, wherein a drive shaft of the actuator extends from an open position to a closed position of the source valve. Rotation angle detection means for detecting the rotation angle range of, the storage means for storing the initial rotation angle range detected by the rotation angle detection means, and the rotation angle range stored in the storage means. Abnormality determination means for determining an angle difference from the current rotation angle range detected by the rotation angle detection means, and determining an abnormality when the angle difference exceeds a predetermined value. A cylinder valve actuating device characterized by.