JPH08247138A - Sleeve for dynamic pressure bearing - Google Patents

Sleeve for dynamic pressure bearing

Info

Publication number
JPH08247138A
JPH08247138A JP4821395A JP4821395A JPH08247138A JP H08247138 A JPH08247138 A JP H08247138A JP 4821395 A JP4821395 A JP 4821395A JP 4821395 A JP4821395 A JP 4821395A JP H08247138 A JPH08247138 A JP H08247138A
Authority
JP
Japan
Prior art keywords
dynamic pressure
sleeve
bearing
pressure bearing
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4821395A
Other languages
Japanese (ja)
Inventor
Hiromitsu Muraki
宏光 村木
Ikunori Sakatani
郁紀 坂谷
Katsuhiko Tanaka
克彦 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP4821395A priority Critical patent/JPH08247138A/en
Publication of JPH08247138A publication Critical patent/JPH08247138A/en
Pending legal-status Critical Current

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  • Sliding-Contact Bearings (AREA)

Abstract

PURPOSE: To provide a sleeve for dynamic pressure bearing which can facilitate working, is excellent in corrosion resistance and start/stop durability and has good dimensional accuracy. CONSTITUTION: A dynamic pressure generating groove 11 is formed at the bearing surface 10a of a sleeve 10 consisting of aluminum alloy, and anodic oxidation coating 12 by anodic oxide coating of 2.5μm or less in thickness if formed at the bearing surface 10a at least. Aluminum alloy of soft metal facilitates to process the dynamic pressure generating groove and the anodic oxide coating improves corrosion resistance and surface hardness. The thickness of the anodic oxide coating 12 is lower than an ordinary case, so it is possible to ensure dimensional accuracy necessary to exhibit dynamic pressure bearing feature, and prevent generation of scratches resulting from sliding at the time of starting and stopping.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、動圧軸受用スリーブ
の改良に関し、特に、耐食・耐久性を有する皮膜を薄く
して後加工を不要としながら、しかも寸法精度の良い動
圧軸受用スリーブに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvement of a sleeve for a dynamic pressure bearing, and more particularly, to a sleeve for a dynamic pressure bearing which has a thin film having corrosion resistance and durability and does not require post-processing, and has good dimensional accuracy. Regarding

【0002】[0002]

【従来の技術】従来の動圧軸受、特に作動流体に空気を
用いた動圧空気軸受では、図3に示すように、ステンレ
ス鋼からなる軸1の外周面1aに動圧発生用溝2をエッ
チングにより加工してある。一方、その軸1と共働する
構造用鋼からなるスリーブ3には、耐食性と起動停止耐
久性を確保するためスリーブ表面にニダックスメッキ
(商品名、ニッケルメッキの表面にテフロンを含浸させ
たもの)を施したものが使われている。動圧軸受の場
合、軸受の起動時及び停止時に軸1の外周面1aとスリ
ーブ3の内周面である軸受面3aとが接触回転すること
から、その摺動でスリーブ3の軸受面3aに擦り傷が発
生して耐食性や耐久性が劣化し易くなることを、メッキ
皮膜で防止するものである。
2. Description of the Related Art In a conventional dynamic pressure bearing, in particular, a dynamic pressure air bearing using air as a working fluid, a dynamic pressure generating groove 2 is formed on an outer peripheral surface 1a of a shaft 1 made of stainless steel, as shown in FIG. It is processed by etching. On the other hand, the sleeve 3 made of structural steel that cooperates with the shaft 1 has Nidax plating (product name, nickel plating surface impregnated with Teflon on the surface of the sleeve to ensure corrosion resistance and start-stop durability. ) Has been used. In the case of a dynamic pressure bearing, the outer peripheral surface 1a of the shaft 1 and the bearing surface 3a, which is the inner peripheral surface of the sleeve 3, rotate in contact with each other when the bearing is started and stopped. The plating film prevents abrasion and deterioration of corrosion resistance and durability.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、ステン
レス鋼製の軸の外周面に動圧発生用溝をエッチング加工
するためには、少なくとも溝加工工程でマスキング工程
とエッチング工程と中和工程とが必要であり、そのため
加工に時間がかかりコスト高になるという問題点があ
る。
However, in order to etch the groove for generating a dynamic pressure on the outer peripheral surface of the stainless steel shaft, at least the masking step, the etching step and the neutralization step are required in the groove processing step. Therefore, there is a problem that the processing takes time and the cost becomes high.

【0004】また、ニダックスメッキはメッキ自体のコ
ストが高い。そのうえ、メッキ皮膜厚みのばらつきが大
きくて所定の寸法精度の確保がむずかしいため、予めス
リーブを前寸法に研削加工した後に、皮膜厚さ30〜5
0μmのメッキを施し、そのメッキ後に、軸受摺動面や
精度が必要な面をメッキがなくならない程度(10〜2
0μmの取り代の範囲)で再び仕上げ研削を行い、所定
の寸法精度に加工している。そのため、工数が余分にか
かりメッキ自体のコスト高に加えて一層コストが高くな
るという問題点がある。
Further, the cost of the Nidax plating is high. In addition, since there is a large variation in the thickness of the plating film, it is difficult to ensure the predetermined dimensional accuracy.
0 μm plating is applied, and after the plating, the bearing sliding surface and the surface requiring accuracy are not removed by plating (10-2
Finishing grinding is performed again in a machining allowance range of 0 μm, and processing is performed to a predetermined dimensional accuracy. Therefore, there is a problem that an additional man-hour is required and the cost is further increased in addition to the cost of the plating itself.

【0005】そこで、この発明は、このような従来の問
題点に着目してなされたもので、加工が容易で耐食性と
起動停止耐久性に優れ、かつ寸法精度の良い動圧軸受用
スリーブを提供することを目的とする。
Therefore, the present invention has been made in view of such conventional problems, and provides a sleeve for a dynamic pressure bearing which is easy to process, has excellent corrosion resistance and start / stop durability, and has good dimensional accuracy. The purpose is to do.

【0006】[0006]

【課題を解決するための手段】上記の目的を達するこの
発明は、アルミ合金からなるスリーブの軸受面に動圧発
生用溝を設けるとともに、少なくとも当該軸受面に厚さ
が2.5μm以下のアルマイト処理による陽極酸化皮膜
を形成したことを特徴とする。
According to the present invention which achieves the above object, a dynamic pressure generating groove is provided on a bearing surface of a sleeve made of an aluminum alloy, and at least the bearing surface has a thickness of 2.5 μm or less. It is characterized in that an anodized film is formed by the treatment.

【0007】[0007]

【作用】動圧軸受用スリーブを軟質金属であるアルミ合
金製としてその軸受面に動圧発生用溝加工を施すので、
溝加工が容易になる。スリーブ表面はアルマイト処理で
耐食性と表面硬さが向上する。また、アルマイト処理で
生じる陽極酸化皮膜の厚さを2.5μm以下と通常より
薄くして、スリーブの動圧軸受機能を果たすのに必要な
寸法精度を確保する。この皮膜厚さがあれば、起動・停
止時の摺動による擦り傷の発生は防止できる。
[Function] Since the sleeve for the dynamic pressure bearing is made of aluminum alloy which is a soft metal, the bearing surface is grooved for generating the dynamic pressure.
Grooving becomes easy. The sleeve surface is anodized to improve corrosion resistance and surface hardness. In addition, the thickness of the anodized film formed by the alumite treatment is made thinner than usual, 2.5 μm or less, to secure the dimensional accuracy required to fulfill the dynamic pressure bearing function of the sleeve. With this film thickness, it is possible to prevent the occurrence of scratches due to sliding during start / stop.

【0008】陽極酸化皮膜の厚さが2.5μmを越える
と、寸法精度の変化が大きくなって動圧軸受としての機
能が低下する。また、陽極酸化皮膜の厚さ5μm以上で
は皮膜表面粗さが悪くなる。これに対し、陽極酸化皮膜
の厚さ2.5μm以下では皮膜表面粗さは殆ど劣化しな
いことが見い出された。
If the thickness of the anodic oxide coating exceeds 2.5 μm, the dimensional accuracy changes greatly and the function as a dynamic pressure bearing deteriorates. Further, if the thickness of the anodized film is 5 μm or more, the surface roughness of the film becomes poor. On the other hand, it was found that when the thickness of the anodic oxide film is 2.5 μm or less, the film surface roughness is hardly deteriorated.

【0009】そこでこの発明の陽極酸化皮膜の厚さを
2.5μm以下と規定する。
Therefore, the thickness of the anodic oxide coating of the present invention is specified to be 2.5 μm or less.

【0010】[0010]

【実施例】以下、この発明の実施例を図面を参照して説
明する。図1は、この発明の動圧軸受用スリーブの一実
施例の断面図である。このスリーブ10はアルミ合金製
で、その内周面である軸受面10aに動圧発生用溝11
を設けてある。そして、スリーブ10の全表面に、図2
に示すように厚さtが2.5μm以下のアルマイト処理
による陽極酸化皮膜12が形成されている。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of an embodiment of a sleeve for a dynamic pressure bearing of the present invention. The sleeve 10 is made of an aluminum alloy, and a bearing surface 10a, which is an inner peripheral surface thereof, has a groove 11 for generating dynamic pressure.
Is provided. Then, on the entire surface of the sleeve 10, as shown in FIG.
As shown in, the anodized film 12 having a thickness t of 2.5 μm or less is formed by the alumite treatment.

【0011】このスリーブ10は、素材であるアルミ合
金の丸棒(ダイカスト品又は鍛造品でもよい)を材料と
し、概略、以下の製造工程を経て得られたものである。 (1)切削工程 材料の丸棒を切削加工して所定寸法に仕上げる。 (2)溝加工工程 切削加工したものの内周面に、ボール転造による塑性加
工で動圧発生用溝11を形成する。ここで、ボール転造
とは、スリーブ内周面よりも僅かに突出するように複数
個の硬質ボールを軸の先端に放射状に配置した治具を、
スリーブ内周面に左または右方向に回しながら軸方向に
押し込みながら動圧発生用溝を転造するものである。
The sleeve 10 is made of an aluminum alloy round bar (which may be a die cast product or a forged product) as a material, and is roughly obtained through the following manufacturing steps. (1) Cutting process A round bar of material is cut and finished to a predetermined size. (2) Grooving step The dynamic pressure generating groove 11 is formed on the inner peripheral surface of the cut one by plastic working by ball rolling. Here, ball rolling means a jig in which a plurality of hard balls are radially arranged at the tip of the shaft so as to slightly project from the inner peripheral surface of the sleeve.
The groove for dynamic pressure generation is rolled on the inner circumferential surface of the sleeve while rotating in the left or right direction and pushing in the axial direction.

【0012】(3)盛り上がり除去加工 ボール転造による塑性加工で生じた動圧発生用溝周辺の
盛り上がりを必要に応じて除去するもので、リーマ通し
やボール通し、またはホーニング加工によりスリーブ内
径面を仕上げ加工する。 次に、以下の(4)〜(7)の洗浄工程により常法通り
アルマイト処理の前処理を行う。
(3) Ridge removal processing This is to remove the bulge around the groove for dynamic pressure generation caused by the plastic working by ball rolling, if necessary. Finish processing. Next, the pretreatment of the alumite treatment is performed in the usual manner by the following washing steps (4) to (7).

【0013】(4)脱脂 (5)水洗 (6)アルカリ洗浄 (7)水洗 (8)アルマイト処理(電気化学的に陽極酸化皮膜をつ
ける) この発明のアルマイト処理にあっては、形成される陽極
酸化皮膜12の厚さtを、通常行われているアルマイト
処理とは異なり、2.5μm以下に規制している。
(4) Degreasing (5) Washing with water (6) Washing with alkali (7) Washing with water (8) Alumite treatment (electrochemically applying an anodized film) In the alumite treatment of the present invention, the formed anode is formed. Unlike the usual alumite treatment, the thickness t of the oxide film 12 is regulated to 2.5 μm or less.

【0014】陽極酸化皮膜形成が終了したら、続いて常
法通り (9)水洗 (10)封孔処理(皮膜表面の微細な孔を塞ぐ) (11)検査 を行う。
After the formation of the anodic oxide film is completed, following the usual method, (9) washing with water (10) sealing treatment (closing fine pores on the film surface) (11) inspection.

【0015】アルミ合金のスリーブ10にアルマイト処
理を施すと、前処理のアルカリ洗浄でスリーブ表面が僅
かに除去されて内径寸法が大きくなる。続くアルマイト
処理の陽極酸化皮膜生成により、今度はスリーブ内径寸
法は小さくなろうとする。そこで、アルカリ洗浄の時間
をコントロールするとともに、陽極酸化皮膜の厚さを
2.5μm以下にコントロールすると、両者が相殺し合
ってアルマイト処理の前後でのスリーブの寸法変化を殆
どなくすことができ、高い寸法精度を確保することが可
能である。
When the aluminum alloy sleeve 10 is subjected to the alumite treatment, the surface of the sleeve is slightly removed by the alkali cleaning as a pretreatment, and the inner diameter is increased. Due to the subsequent formation of anodized film by the alumite treatment, the inner diameter of the sleeve tends to be smaller. Therefore, by controlling the alkali cleaning time and controlling the thickness of the anodized film to 2.5 μm or less, the two cancel each other out, and the dimensional change of the sleeve before and after the alumite treatment can be almost eliminated, which is high. It is possible to secure dimensional accuracy.

【0016】また、アルカリ洗浄を実施することによ
り、動圧軸受用スリーブ外形の切削加工や動圧発生用溝
の転造加工等に伴って生じる軸受摺動面の微細なバリが
除去されるから、従来の動圧軸受用スリーブの製造過程
で行われるブラッシングやテーピングなどによるバリ取
り工程が省略できる利点もある。すなわち、通常行われ
ているアルマイト処理を適用した場合には陽極酸化皮膜
の厚さが略5μm以上であるため、寸法精度の変化が大
きくなり過ぎて動圧軸受として機能するスリーブの寸法
精度を確保することが難しかったが、陽極酸化皮膜の厚
さを2.5μm以下に抑えることにより、はじめてアル
マイト処理の動圧軸受用スリーブを実用化することがで
きたのである。また、陽極酸化皮膜の厚さを2.5μm
以下にすると、5μm以上の場合に比べてスリーブ表面
の押し込み硬さは低下するが、軸受摺動面にわずかな陽
極酸化皮膜があるだけで擦り傷を防ぐには十分な表面硬
さは確保できるから、動圧軸受に必要な起動・停止耐久
性への影響は特に問題にはならないことが本発明者等の
研究で判明した。更に、通常のアルマイト処理では表面
の粗さが悪くなるが、陽極酸化皮膜の厚さを2.5μm
以下にすると、表面粗さがほとんど劣化しないので実用
上の効果は極めて大きいものがある。
Further, by carrying out the alkali cleaning, fine burrs on the bearing sliding surface caused by cutting the outer shape of the sleeve for the dynamic pressure bearing, rolling the dynamic pressure generating groove, etc. are removed. Another advantage is that the deburring process such as brushing or taping, which is performed in the conventional manufacturing process of the sleeve for the dynamic pressure bearing, can be omitted. That is, when the alumite treatment that is usually performed is applied, the thickness of the anodized film is approximately 5 μm or more, so the dimensional accuracy changes too much and the dimensional accuracy of the sleeve that functions as a dynamic pressure bearing is secured. Although it was difficult to do so, by suppressing the thickness of the anodic oxide film to 2.5 μm or less, it was possible to put the sleeve for dynamic pressure bearing of the alumite treatment into practical use for the first time. The thickness of the anodized film is 2.5 μm.
If the thickness is less than 5 μm, the indentation hardness of the sleeve surface will be lower than in the case of 5 μm or more, but a slight anodic oxide film on the bearing sliding surface can secure sufficient surface hardness to prevent scratches. The inventors of the present invention have found that the influence on the starting / stopping durability required for the dynamic pressure bearing does not cause any particular problem. Furthermore, the surface roughness deteriorates with normal alumite treatment, but the thickness of the anodic oxide film is 2.5 μm.
In the following cases, the surface roughness is hardly deteriorated, so that the practical effect is extremely large.

【0017】ここで、本発明の動圧軸受用スリーブと共
働する相手部材の軸の材質について述べる。軸の材質
は、オーステナイト系ステンレス鋼であるSUS30
3,SUS304にちっ化処理したものや、セラミック
コーティングしたものが、マルテンサイト系ステンレス
鋼のSUS440Cよりもアルミ合金の熱膨張係数に近
いので、周囲温度が変化しても軸受すきまの変化が少な
くて好ましい。また、耐食性の点でも、オーステナイト
系ステンレス鋼にするとマルテンサイト系ステンレス鋼
よりも錆にくいので好ましい。さらに、オーステナイト
系ステンレス鋼は表面がやわらかいので、表面処理とし
てちっ化処理やセラミックコーティングすると表面を硬
くでき、軸受性能上や取り扱い上からも好ましい。
The material of the shaft of the mating member that cooperates with the dynamic pressure bearing sleeve of the present invention will now be described. The material of the shaft is SUS30, which is austenitic stainless steel.
3, SUS304 with nitriding treatment or ceramic coating is closer to the thermal expansion coefficient of aluminum alloy than SUS440C of martensitic stainless steel, so there is little change in bearing clearance even when ambient temperature changes. preferable. Also in terms of corrosion resistance, austenitic stainless steel is preferable because it is less likely to rust than martensitic stainless steel. Further, since the surface of austenitic stainless steel is soft, the surface can be hardened by performing a nitriding treatment or a ceramic coating as a surface treatment, which is preferable in terms of bearing performance and handling.

【0018】なお、上記実施例の動圧軸受用スリーブ1
0では、その内周面(軸受面)10aに動圧発生用溝1
1を設けているが、外周面10bを軸受面として動圧発
生用溝を設けて、軸の代わりに相手部材(例えばハウジ
ング)の内周面と共働するようにした動圧軸受にも適用
できる。その場合は、動圧軸受用スリーブ10の外周面
10bに動圧発生用溝を加工する。その溝加工は、塑性
加工や切削加工とは限らず、その他として、アルマイト
処理後に溝以外の部分をマスキングしておき、溝をショ
ットブラスト加工や電解エッチングにより形成すること
もできる。この場合も、寸法精度確保のための軸受面の
後加工は不要であるから加工が容易である。また、動圧
軸受用スリーブと共働する相手部材にもアルミ合金にア
ルマイト処理したものを用いると、熱膨張係数を等しく
できるので周囲温度が変化しても軸受すきまが変化しな
いから好ましい。
Incidentally, the sleeve 1 for the dynamic pressure bearing of the above embodiment.
At 0, the dynamic pressure generating groove 1 is formed on the inner peripheral surface (bearing surface) 10a.
1 is provided, but it is also applied to a dynamic pressure bearing in which a groove for dynamic pressure generation is provided with the outer peripheral surface 10b as a bearing surface so as to cooperate with the inner peripheral surface of a mating member (eg, housing) instead of the shaft. it can. In that case, a groove for dynamic pressure generation is formed on the outer peripheral surface 10b of the dynamic pressure bearing sleeve 10. The groove processing is not limited to the plastic processing and the cutting processing. Alternatively, the groove other than the groove may be masked after the alumite treatment, and the groove may be formed by shot blast processing or electrolytic etching. Also in this case, the post-machining of the bearing surface for ensuring the dimensional accuracy is unnecessary, and therefore the machining is easy. Further, it is preferable to use an aluminum alloy anodized aluminum alloy as the counterpart member that cooperates with the dynamic pressure bearing sleeve, because the thermal expansion coefficient can be made equal and the bearing clearance does not change even when the ambient temperature changes.

【0019】また、上記実施例では、動圧軸受用スリー
ブ10の全表面にアルマイト処理による陽極酸化皮膜を
設けたものを示したが、これに限らず、当該陽極酸化皮
膜は動圧軸受用スリーブの軸受面となる面にのみ形成し
ても良い。また、動圧発生用溝11の溝形状は図示のも
のに限定されず、要は有効に動圧を発生できるものであ
れば良い。
In the above embodiment, the dynamic pressure bearing sleeve 10 is provided with the anodized film by alumite treatment on the entire surface, but the present invention is not limited to this, and the anodized film is the dynamic pressure bearing sleeve. It may be formed only on the surface which will be the bearing surface. Further, the groove shape of the dynamic pressure generating groove 11 is not limited to that shown in the figure, and any point may be used as long as it can effectively generate the dynamic pressure.

【0020】[0020]

【発明の効果】以上、説明したように、この発明によれ
ば、アルミ合金製のスリーブの軸受面に動圧発生用溝を
設けると共に、アルマイト処理による陽極酸化皮膜を形
成したものとしたため、加工が容易でしかも耐食性と起
動停止耐久性に優れた動圧軸受用スリーブが得られると
いう効果がある。また、陽極酸化皮膜の厚さを2.5μ
m以下としたため、アルマイト処理後に軸受面を特別に
後加工しなくても、バリがなくしかも寸法精度の良い動
圧軸受用スリーブが得られるという効果を奏する。
As described above, according to the present invention, since the dynamic pressure generating groove is formed on the bearing surface of the sleeve made of aluminum alloy and the anodized film is formed by the alumite treatment, It is easy to obtain, and there is an effect that a sleeve for a dynamic pressure bearing having excellent corrosion resistance and start / stop durability can be obtained. The thickness of the anodized film is 2.5μ.
Since it is set to m or less, there is an effect that a sleeve for a dynamic pressure bearing having no burrs and good dimensional accuracy can be obtained without special post-processing of the bearing surface after the alumite treatment.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す動圧軸受用スリーブの
断面図である。
FIG. 1 is a cross-sectional view of a dynamic pressure bearing sleeve showing an embodiment of the present invention.

【図2】図1のII部の拡大図である。FIG. 2 is an enlarged view of a portion II in FIG.

【図3】従来の動圧軸受(スリーブと軸)の断面図であ
る。
FIG. 3 is a cross-sectional view of a conventional dynamic pressure bearing (sleeve and shaft).

【符号の説明】[Explanation of symbols]

10 スリーブ 10a 軸受面 11 動圧発生用溝 12 陽極酸化皮膜 10 sleeve 10a bearing surface 11 dynamic pressure generating groove 12 anodized film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 アルミ合金からなるスリーブの軸受面に
動圧発生用溝を設けるとともに、少なくとも当該軸受面
に厚さが2.5μm以下のアルマイト処理による陽極酸
化皮膜を形成したことを特徴とする動圧軸受用スリー
ブ。
1. A dynamic pressure generating groove is provided on a bearing surface of a sleeve made of an aluminum alloy, and an anodized film having a thickness of 2.5 μm or less is formed by alumite treatment on at least the bearing surface. Sleeve for dynamic pressure bearing.
JP4821395A 1995-03-08 1995-03-08 Sleeve for dynamic pressure bearing Pending JPH08247138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4821395A JPH08247138A (en) 1995-03-08 1995-03-08 Sleeve for dynamic pressure bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4821395A JPH08247138A (en) 1995-03-08 1995-03-08 Sleeve for dynamic pressure bearing

Publications (1)

Publication Number Publication Date
JPH08247138A true JPH08247138A (en) 1996-09-24

Family

ID=12797139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4821395A Pending JPH08247138A (en) 1995-03-08 1995-03-08 Sleeve for dynamic pressure bearing

Country Status (1)

Country Link
JP (1) JPH08247138A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003097543A (en) * 2001-09-25 2003-04-03 Koyo Seiko Co Ltd Dynamic pressure bearing and its manufacturing method
JP2007040536A (en) * 2006-10-16 2007-02-15 Jtekt Corp Dynamic pressure bearing and its manufacturing method
JP2016109219A (en) * 2014-12-08 2016-06-20 コニカミノルタ株式会社 Dynamic pressure bearing, and optical deflection device and image formation device having the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003097543A (en) * 2001-09-25 2003-04-03 Koyo Seiko Co Ltd Dynamic pressure bearing and its manufacturing method
US6779924B2 (en) 2001-09-25 2004-08-24 Koyo Seiko Co., Ltd. Dynamic pressure bearing and method of manufacturing the same
US6904682B2 (en) 2001-09-25 2005-06-14 Koyo Seiko Co., Ltd. Dynamic pressure bearing and method of manufacturing the same
JP2007040536A (en) * 2006-10-16 2007-02-15 Jtekt Corp Dynamic pressure bearing and its manufacturing method
JP2016109219A (en) * 2014-12-08 2016-06-20 コニカミノルタ株式会社 Dynamic pressure bearing, and optical deflection device and image formation device having the same

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