JPH08243511A - Substrate washer - Google Patents

Abstract

PURPOSE: To obtain a substrate washer in which the thrusting quantity of a roll brush is finely controlled by a simple structure. CONSTITUTION: A conveying roller 2 supports a substrate W from below and conveys it horizontally. A roll brush 4 is arranged above the conveying roller 2 and has roll shafts 4a, 4b extending horizontally. A motor 41 rotates the roll brush 4 around the roll shafts 4a, 4b. A brush supporting means is constituted of links 91a, 91b, rotating plates 92a, 92b, and transmission arms 94. 95. The rotating plates 92a, 92b are driven to a desired rotational angle by a drive source. With the rotation of the rotating plate 92a, the rotational plate 92a is also rotated to the same angle through the transmission arms 94, 95. With it, links 91a, 91b connected to the rotating plates 92a, 92b are vertically moved. As a result, the roll brush 4 is vertically moved, always kept accurately parallel to the substrate W.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate cleaning apparatus for cleaning the surface of a glass substrate for liquid crystals, a substrate for color filters, a substrate for photomasks, a semiconductor wafer or the like, and more particularly to a roll brush. And a substrate cleaning apparatus for cleaning the surface of the substrate.

[0002]

2. Description of the Related Art FIG. 4 is a diagram showing a front structure of a conventional substrate cleaning apparatus for cleaning the surface of a substrate using a roll brush.

In this apparatus, the surface of the substrate W conveyed in the horizontal direction on the conveying roller 2 is cleaned by bringing the roll brush 4 which is rotated by the driving force from the motor 41 into sliding contact therewith.

Here, in the case of adjusting the pushing amount of the roll brush 4 with respect to the surface of the substrate W transported on the transport roller 2, the scale knob 71 is appropriately rotated as indicated by a dotted arrow. As a result, the worms 72a, 72 integrated with the worm shaft connected to the scale knob 71 are formed.
The rotations of b around the horizontal axis are wheels 73a and 73, respectively.
It is converted into rotation about the vertical axis of b and transmitted. With the rotation of the wheels 73a and 73b, the lifting shafts 74a and 74b rotate via the gears respectively connected thereto, and the bearing holders 75a and 75b that rotatably support the roll shafts 4a and 4b of the roll brush 4. Vertically move up and down along the guide shafts 76a and 76b, respectively. As a result, the roll brush 4 is moved up and down by a very small amount while maintaining its posture, and the pushing amount of the roll brush 4 with respect to the surface of the substrate W is finely adjusted.

The roll brush 4 may not be used depending on the substrate W. In such a case, as shown by the solid line arrow, the cylinder 61 is in the OFF state, and the one first link 62a rotates clockwise about the fulcrum F,
The other first link 62b connected to the first link 62a via the transmission link 63 also rotates clockwise around the fulcrum F. As a result, the second links 64a and 64b supported by the first links 62a and 62b so as to be able to move up and down, respectively.
Moves upwards. Then, these second links 64a,
64b and shaft holders 65a and 65b respectively integrated with
The bearing holders 75a and 75b ascend vertically along the guide shafts 76a and 76b, respectively.
As a result, the roll brush 4 is considerably separated from the substrate W, and cleaning by the roll brush is not performed.

[0006]

However, in the above device, the linear motion of the cylinder 61, which is a single drive source, is first
Since the links 62a and 62b and the second links 64a and 64b branch and transmit so as to make a linear motion of the pair of bearing holders 75a and 75b, the number of connecting points increases, and the ascending / descending positions at both ends of the roll brush 4 are delicate. It is relatively difficult to control.

Further, in the above apparatus, the rotary movement of the knob 71 with scale is adjusted by the worms 72a, 72b, the wheel 73a,
Since 73b and the lifting shafts 74a and 74b convert and transmit the pair of bearing holders 75a and 75b so as to make a linear motion, the amount of backlash caused by the asymmetry of the worms 72a and 72b, the wheels 73a and 73b, etc. As a result, the error of the ascending / descending position at both ends of the roll brush 4 is further added due to the difference of the above.

Further, in the above apparatus, the roll brush 4
ON / OF of roll brush 4
Since the mechanism for selecting F has a separate drive source and acts on the roll brush 4, its structure is complicated.

Therefore, an object of the present invention is to provide a substrate cleaning apparatus capable of delicately controlling the pushing amount of a roll brush with a simple structure.

[0010]

In order to solve the above problems, a substrate cleaning apparatus according to a first aspect of the present invention is a substrate cleaning apparatus for cleaning a surface of a substrate conveyed in a horizontal direction by using a roll brush. Transporting means for supporting and transporting in a horizontal direction, a roll brush arranged above the transporting means and having a roll shaft extending in the horizontal direction, a brush rotating means for rotating the roll brush around the roll shaft, Driven by this single drive source, the roll brush is moved up and down with respect to the surface of the substrate to be transported and the roll brush is supported at a desired position. In addition to selecting whether the roll brush is used or not for the surface, the roll brush for the surface of the substrate to be transported when the use state of the roll brush is selected. Characterized in that it comprises a brush drive means for adjusting the amount of pushing.

Further, in the substrate cleaning apparatus of the second aspect, the brush driving means displaces both ends of the roll shaft of the roll brush in association with each other.

Further, in the substrate cleaning apparatus according to a third aspect of the present invention, the brush driving means includes a single rotary drive source and a transmission mechanism for converting the rotational movement thereof into a linear movement in the vertical direction of the roll brush and transmitting it to the roll brush. It is characterized by having.

[0013]

According to the substrate cleaning apparatus of the present invention, the substrate is driven by a single driving source to move the roll brush up and down with respect to the surface of the substrate to be transported, thereby supporting the roll brush at a desired position. Select the use or non-use state of the roll brush for the surface of the substrate, and adjust the pushing amount of the roll brush to the surface of the substrate to be transported when the use state of the roll brush is selected. Since the brush driving means is provided, it is not necessary to select the use state or the non-use state of the roll brush and the adjustment of the pushing amount of the roll brush by separate drive sources, and the structure of the device can be simplified. At the same time, it is possible to more accurately control the position of the roll brush with respect to the substrate surface by reducing the error factor that is inherent in the brush driving means.

Further, in the substrate cleaning apparatus of the second aspect, since the brush driving means displaces both ends of the roll shaft of the roll brush in association with each other, the posture of the roll brush is maintained by the drive from the single drive source. Both ends can be reliably supported at desired positions.

According to another aspect of the substrate cleaning apparatus of the present invention, the brush drive means includes a single rotary drive source and a transmission mechanism for converting the rotary motion into a linear motion in the vertical direction of the roll brush and transmitting the linear motion to the roll brush. Since it has, the position of the roll brush in the vertical direction can be adjusted relatively accurately by the rotation angle of the rotary drive source.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A substrate cleaning apparatus according to an embodiment of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a diagram for explaining the front structure of the substrate cleaning apparatus of the embodiment. The transport roller 2 that transports the substrate W in the horizontal direction perpendicular to the paper surface is rotatably supported by the pair of side plates 21a and 21b. These pair of side plates 21a,
The bottom plate 21c connected between the lower ends of 21b is a part for collecting the cleaning liquid flowing down after cleaning the substrate W. One of the left and right rotary shafts 22a and 22b of the transport roller 2 supported by the pair of side plates 21a and 21b is directly or indirectly connected to a rotary drive source via a pulley and a belt (not shown). Therefore, the substrate W on the transport roller 2 is transported in the horizontal direction at a constant speed.

The roll brush 4 for cleaning the surface of the substrate W is rotatably supported by a pair of bearing holders 85a and 85b via bearings 81a and 81b by a pair of roll shafts 4a and 4b provided at both ends thereof. Has been done. The motor 41 is fixed to one bearing holder 85a (on the left side in the drawing) via the bracket 42. The rotation of the motor 41 is caused by the coupling 43
Since it is transmitted to the roll shaft 4a via the roll shaft 4a, the roll brush 4 rotates at a constant speed around a rotation shaft that extends in parallel to the horizontal direction AB through the central axes of the pair of roll shafts 4a and 4b.

The pair of bearing holders 85a and 85b for supporting the roll brush 4 include linear balls 86a and 86b.
It is supported by a pair of guide shafts 76a and 76b via b, respectively, and can be smoothly moved vertically along these guide shafts 76a and 76b. The ascending / descending positions of the bearing holders 85a and 85b are set to the pin
It is adjustable by links 91a and 91b connected via 0. These links 91a, 91b
Is a pair of rotating plates 92 that are simultaneously rotated by the same amount in synchronization with the cooperation of the first and second transmission arms 94 and 95.
It is connected to a and 92b via a pin 10 and simultaneously moves up and down by the same amount as the pair of rotary plates 92a and 92b rotate. Therefore, the pair of links 91a, 91
a pair of bearing holders 85a, 85b supported by b
It is possible to always make the up and down position of the left and right match,
The roll brush 4 supported by these can reciprocate with respect to the vertical direction CD while maintaining the state in which the horizontal direction AB is the axis center.

FIG. 2 is a view for explaining the structure of one of the rotary plates 92a, and FIG. 2 (a) is an enlarged front view thereof.
(B) is a right side view. The rotary plate 92a receives a driving force from a drive motor 98 composed of a reversible motor and a stepping motor connected via a rotary shaft 97a, and appropriately rotates in the normal and reverse directions around the rotary shaft 97a. At this time, the rotation angle of the drive motor 98 is detected by the rotary encoder 99a and the sensor 99b, and is constantly monitored by a control device (not shown). Therefore, the rotation angle of the rotary plate 92a is accurately controlled based on the control signal from the control device.

First and second transmission arms 94 and 95 are connected to the opposite positions of the rotary plate 92a on the same radius r via pins 10, respectively. Further, a link 91a is also connected to the connection position of the second transmission arm 95. Therefore, the rotary plate 9 connected to the drive motor 98
Along with the rotation of 2a, the link 91a connected thereto moves up and down. At this time, the rotary plate 9 is driven by the drive motor 98.
Since the rotation angle of 2a is controlled, the link 91a and the bearing holder 85a connected to this extension end are connected.
The vertical position of (see FIG. 1) can be accurately adjusted.

FIG. 3 is a view for explaining the structure of the other rotating plate 92b, and FIG. 3 (a) is an enlarged front view thereof.
(B) is the bottom view. The rotary plate 92b is rotatable about a rotary shaft 97b extending in the horizontal direction.

At the opposite positions on the same radius r of the rotary plate 92b, the other ends of the first and second transmission arms 94 and 95 connected to the rotary plate 92a at one end are the same as in the case of the rotary plate 92a. Are connected to each other via pins 10. Therefore, the rotary plate 92b rotates in the same angle as the rotary plate 92a whose rotation angle is controlled by the drive motor 98 in synchronization with the rotary plate 92a. This is illustrated in FIG.
The first and second parts in the vicinity of the rotary plate 92a shown in (a)
The distance δa between the transmission arms 94 and 95 and the first and second transmission arms 9 near the rotary plate 92b shown in FIG. 3A.
This means that the interval δb of 4,95 is equal.

Further, a link 91b is also connected to the connecting position of the second transmission arm 95. Therefore, as the rotary plate 92a connected to the drive motor 98 rotates, the rotary plate 92b also rotates, and the link 91b connected thereto also moves up and down. At this time, the drive motor 9
The rotation angle of the rotary plate 92a is controlled by 8 and the rotation angle of the rotary plate 92b is also controlled accordingly, so that the link 91b and thus the bearing holder 85b connected to this extended end (see FIG. 1). The vertical position of can be adjusted accurately. As a result, as shown in FIG.
The substrate / brush distance γa on the bearing holder 85a side,
It is possible to precisely match the substrate / brush distance γb on the bearing holder 85b side, and further it is possible to move up and down while keeping the roll brush 4 precisely parallel to the substrate W. That is, the drive motor 98 whose rotation angle is controlled, the links 91a and 91b, and the rotary plates 92a and 92b.
And a support mechanism composed of the transmission arms 94 and 95.
Can be accurately moved up and down. Therefore, the substrate W
It is possible to select either a use state in which the roll brush 4 is brought into contact with the roll brush 4 or a non-use state in which the substrate W is separated from the roll brush 4, and when the roll brush 4 is set in the use state, the surface of the substrate W The pushing amount of the roll brush 4 with respect to can be accurately adjusted.

The support mechanism for the roll brush 4 in the embodiment (links 91a, 91b, rotary plates 92a, 92) is used.
b and the transmission arms 94, 95) have a small number of drive elements, so that not only errors during assembly but also errors during operation are small. Furthermore, a pair of links 91a and 91b connecting the pair of rotating plates 92a and 92b.
Has a structure in which forces act in the mutually assisting direction, so that both links 91 during the lifting operation of the roll brush 4 are
The difference in the amount of vertical movement of a and 91b can be made extremely small, and the roll brush 4 can be smoothly moved up and down while being kept in parallel with the substrate W with extremely high precision.

[0026]

As described above, according to the substrate cleaning apparatus of the first aspect, the roll brush is driven by the single drive source to move up and down with respect to the surface of the substrate to be conveyed. By supporting at a desired position, it is possible to select either the use state or non-use state of the roll brush with respect to the surface of the substrate to be transported, and the substrate to be transported when the usage state of the roll brush is selected. Since the brush drive means for adjusting the pushing amount of the roll brush with respect to the surface is provided, it is not necessary to perform selection of the used state or the unused state of the roll brush and the adjustment of the pushed amount of the roll brush by separate drive sources, and the device The structure can be simplified, and the error factors inherent in the brush driving means are reduced to more accurately control the position of the roll brush with respect to the substrate surface. It is possible.

According to the substrate cleaning apparatus of the second aspect,
Since the brush drive means displaces both ends of the roll shaft of the roll brush in association with each other, the posture of the roll brush can be maintained by the drive from the single drive source and both ends can be reliably supported at desired positions. .

According to the substrate cleaning apparatus of the third aspect,
Since the brush driving means has a single rotary drive source and a transmission mechanism for converting the rotational motion thereof into a linear motion in the vertical direction of the roll brush and transmitting the linear motion to the roll brush, the position of the roll brush in the vertical direction is controlled by the rotary drive source. It can be adjusted relatively accurately by the angle of rotation of the.

[Brief description of drawings]

FIG. 1 is a diagram illustrating a front structure of a substrate cleaning apparatus according to an embodiment.

FIG. 2 is an enlarged view of a part of the apparatus shown in FIG.

FIG. 3 is an enlarged view of a part of the apparatus shown in FIG.

FIG. 4 is a diagram illustrating a front structure of a conventional substrate cleaning apparatus.

[Explanation of symbols]

 W substrate 2 transport roller 4 roll brush 85a, 85b bearing holder 91a, 91b link 92a, 92b rotating plate 94, 95 first and second transmission arm 98 drive motor

Claims (3)

[Claims] 1. A substrate cleaning apparatus for cleaning the surface of a substrate transported in the horizontal direction by using a roll brush, a transport means for supporting the substrate from below and transporting the substrate in the horizontal direction, and a transport means disposed above the transport means. , A roll brush having a roll shaft extending in the horizontal direction, a brush rotating means for rotating the roll brush around the roll shaft, and a single drive source, driven by this drive source,
Select whether the roll brush is used or not for the surface of the substrate to be transported by raising and lowering the roll brush to the desired position to support the roll brush at the desired position. And a brush driving unit that adjusts the pressing amount of the roll brush with respect to the surface of the substrate that is conveyed when the usage state of the roll brush is selected. 2. The substrate cleaning apparatus according to claim 1, wherein the brush driving means displaces both ends of the roll shaft of the roll brush in association with each other. 3. The brush drive means has a single rotary drive source and a transmission mechanism for converting the rotary motion thereof into a linear motion in the vertical direction of the roll brush and transmitting the linear motion to the roll brush. 1. The substrate cleaning apparatus according to 1.