JPH08241668A - Beam takeout window - Google Patents

Abstract

PURPOSE: To provide a beam takeout window to take out beams from a vacuum vessel of an electron beam genarating device, with which it is possible to remove and install the window easily and make maintenance and inspection easily. CONSTITUTION: A flange 51 for mounting is contacted with the flange part of a vacuum vessel 52 while a gasket 54 is interposed, and a takeout window 53 is mounted on this flange 51. A drive shaft holding part (1) 65 is secured to the flange part of the vessel 52, and a head swing jig 58 is mounted by a set pin 59, and a drive shaft 60 having stopper 61 and the drive shaft holding part (1) 65 are engaged in such a way as capable of vertical motions, wherein a handle mounting part 56 is installed in the lower part. Together with the drive shaft 61 the mounting flange 51 is sunk from the flange part of vessel 52 by turning the mounting part 67 with handle and further turned from the joint surface to become vertical, so that maintenance of the flange surface and inside the vessel 52 can be made easily. Movement of the jig 58 allows adjusting of an axis dislocation of the drive shaft 60 caused by parallel shift of the joint surface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a beam extraction window for extracting a beam such as an electron beam out of a vacuum system of a vacuum container.

[0002]

2. Description of the Related Art FIG. 7 shows the concept of a conventional electron beam generator having a beam extraction window structure. The electron beam 1 generates thermoelectrons (not shown) generated by energizing and heating the cathode 2 by the cathode power source 11 to the cathode 2 and the anode 3.
It is obtained by applying a voltage from the accelerating power supply 10 during the period and pulling out. The accelerating power supply 10 is connected to both electrodes by wires from the introduction terminals 13 and 14. The anode 2 and the cathode 3 are arranged in a vacuum container 5 whose inside is vacuum-held by a vacuum exhaust device 4. Except for those that need to be performed in a vacuum atmosphere such as metal melting, the processing speed should be improved, and changes in the atmospheric pressure may affect the object to be used. For various reasons such as (evaporation), various processes using electron beams are carried out in the atmosphere.

In the above apparatus, a take-out window 6 which is a thin film made of a metal or an organic substance is provided between the vacuum container 5 and the attaching flange 7 and is attached with take-out bolts 15. The pressure difference between the inside and outside of the vacuum container 5 is held by the extraction window 6, the gasket 8 in the gasket groove 9 and the vacuum container 5, and the electron beam 1 is extracted from the inside of the vacuum container 5 to the atmosphere through the extraction window 6. . In the extraction window 6, the electron beam 1 causes energy loss according to the stopping power determined by the material of the extraction window 6 and the energy of the electron beam 1. Therefore, it is necessary to set the thickness of the extraction window 6 in consideration of the pressure difference between the inside and outside of the vacuum container 5 and the energy reduction amount of the electron beam 1 due to the energy loss.

[0004]

In the above apparatus, the extraction window 6 is formed by corrosion due to atmospheric gas (ozone: generated by interaction between oxygen in the atmosphere and electron beam, and other corrosive gas) and local heating of the thin film portion. Due to deterioration in the vacuum holding property of the gasket 8, it is necessary to periodically replace and maintain the extraction window 6 part. At this time, the conventional device had the following problems.

(1) Since the take-out window 6 is relatively heavy and large in size, it takes a lot of time for maintenance work. In order to solve the problem, as shown in FIG. 8, there is a mounting flange drive mechanism 16 (or a left and right driving mechanism) provided between the mounting flange 7 and the vacuum container 5 part. Also, the mounting flange 7 was a spatial obstacle during the cleaning work of the corresponding surface (including the gasket groove) of the vacuum container and the gasket mounting work. Further, in order to move the mounting flange 7, it is necessary to install the drive mechanism 16 at two or more places, but the conventional drive mechanism 16 can move the mounting flange 7 only linearly with respect to the drive shaft. However, since it was necessary to operate each drive mechanism 16 at the same time or to operate each drive mechanism 16 little by little in order to move the flange, the workability was poor.

(2) It is necessary to install the extraction window 6 at a position corresponding to the gasket 8. However, since the extraction window installation position cannot be fixed in the conventional device, the installation flange is installed (including the drive mechanism). There was a case of rubbing the position.

(3) The flange surface having the gasket groove 9 is often located above or on the side of the operator. In this case, it was difficult to maintain the position of the gasket when installing the mounting flange.

[0008]

In order to solve the above problems, the present invention provides a beam extraction window provided with a window mounting flange having a flange of a beam extraction portion of a vacuum container and a window attached to the flange. , Both flanges can be attached and detached, the inclination of the joint surface can be adjusted, and the window attachment flange can be lowered at the time of maintenance and inspection, and the attachment flange drive mechanism can be rotated almost vertically. Also, a configuration in which a setting pin is provided on the window mounting flange,
Further, a configuration provided with a position holding mechanism for the beam extraction flange gasket is also provided.

That is, according to the present invention, (1) a flange of a beam extraction portion for extracting a beam of a beam of electrons, ions, etc. from the vacuum container and the flange is attached so as to be joined to the flange, and the beam is attached to the vacuum container Beam extraction window equipped with a window mounting flange having a window for extracting from the vacuum system to the outside of the vacuum system And a detachable and detachable mounting flange drive mechanism that lowers the window mounting flange by the drive shaft during maintenance work and that allows the joint surface to rotate substantially vertically. A beam extraction window is provided.

(2) Further, in the above-mentioned invention (1),
There is provided a beam extraction window characterized in that the window attachment flange is provided with an extraction window position setting pin.

(3) Further, in the invention of (1) or (2), a position holding structure for a vacuum holding gasket is provided on a surface of the beam extraction portion flange side which is in contact with the window mounting flange surface. A beam extraction window according to claim 1 or 2 is provided.

[0012]

In the invention of (1), the window mounting flange is lowered by the rotation of the drive shaft of the mounting flange drive mechanism during maintenance work.
For this descent, for example, the joining of both flanges is released, the window mounting flange is lowered by its own weight along with the descent of the drive shaft, and the drive shaft is held at a predetermined position by a stopper or the like. If this state is left as it is, it will be a spatial obstacle in maintenance work, so at this lowered position, the window mounting flange is rotated by the mounting flange drive mechanism so as to be vertical. This rotation may be performed, for example, by a mechanism in which the central portion of the end of the window mounting flange is supported by a rotating shaft and the flange surface is rotated vertically. Therefore, it becomes easy to access the flange surface of the beam extraction portion of the vacuum container and the inside of the vacuum container, which facilitates maintenance and inspection. Further, when adjusting the parallelism of the joint surfaces when the two flanges are joined, the drive shaft can be tilted and tilted so that the deviation of the shaft center can be adjusted.

In the invention of (2), it has the same operation and effect as the invention of (1), and since the window mounting flange is provided with the window position setting pin, the window is detached and mounted at the time of window inspection. Will be easier.

At the time of the occurrence of (3), the same action and effect as the above (1) or (2) are obtained, and since the gasket position holding mechanism is provided, the gasket is securely inserted in the groove. Therefore, the degree of vacuum due to the joining of both flanges is completely retained.

[0015]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a side view showing a part of the extraction window, omitting details of the electron beam generator and the like, and FIG. 2 is a view showing the bottom surface of the flange. FIG. 1 shows a mounting flange drive mechanism with a swing mechanism and the flange inverting mechanism. In FIGS. 1 and 2, the mounting flange 51 and the vacuum container 52 are fixed by bolts (not shown).
The vacuum in the vacuum container 52 is the extraction window 53 and the gasket groove 5.
It is held by the gasket 54 in the No. 5. A mounting flange drive mechanism with a swing mechanism is installed between the end of the mounting flange 51 and the vacuum container 52. The mounting flange drive mechanism with a swing mechanism mainly includes a handle mounting portion 56, a handle 57 (see FIG. 3), a swing jig 58, a stop pin 59, a drive shaft 60, a stopper 61, a mounting flange installation portion 62, a rotary shaft. 63, a stop pin 64, a drive shaft holding portion (1) 65, and a drive shaft holding portion (2) 66.

The following procedure is used to separate the mounting flange 51 from the flange surface of the vacuum container 52 having the gasket groove 55. As shown in FIG. 2B, the handle mounting portion 5
The drive shaft 60 fixed to the handle mounting portion 56 is rotated by rotating the handle 57 installed in 6 in the direction opposite to the mounting direction (determined by the tap cutting direction). The handle 57 is attachable / detachable.
The position of the mounting flange 51 is the swinging jig 58 that cuts the tap corresponding to the handle mounting portion 56 and the rotating shaft 63.
It is held by the drive shaft holding portion (2) 66, which is fixed to the flange surface of the gasket groove 55 of the vacuum container 52. At this time, as described above, by rotating the handle 57, the mounting flange 51 can be gradually separated from the gasket groove 55 flange surface and moved downward. Due to the mounting position, (1) mounting flange 5 along with the work
When 1 goes down, gravity naturally causes
(2) When the mounting flange 51 can be moved laterally as the work is performed, the mounting flange 51 can be appropriately moved away from the gasket groove 55 flange surface by manual operation or the like. At this time, if the flange surface of the gasket groove 55 and the mounting flange 51 are completely removed, a work is required for the mounting again, so that the space between them is held by the stopper 61 mounted on the drive shaft 60.

The mounting flange 51 is a vacuum container 52.
If it is only separated from the flange surface having the gasket groove 55, it will become a spatial obstacle during maintenance work of the window. Especially due to the mounting position, the mounting flange 5
In the structure in which 1 is lowered downward, cleaning of the inside of the gasket groove 55 and attachment work of the gasket 54 are greatly hindered.
For this reason, in the embodiment of the present invention, as shown in FIG. 4, the mounting flange 51 is configured to be rotatable about the rotary shaft 63 shown in FIG. The rotary shaft 63 is fixed to the handle mounting portion 56 by a stop pin 64 and a drive shaft holding portion (1) 65. After setting the length of the drive shaft 60 to be sufficiently long in consideration of the mounting flange width, the mounting flange 51 is lowered away from the gasket groove 55 flange surface of the vacuum container 52 and then mounted as shown in (b). By rotating 51 so that the flange surface of the gasket groove 55 and the surface of the mounting flange 51 are perpendicular to each other with the rotating shaft 63 as an axis, the gasket groove 55 flange surface of the vacuum container 52, and further the gasket during maintenance of the inside of the vacuum container 52. Access to the groove 55 and the inside of the vacuum container 52 is facilitated. That is, the mounting flange 51 does not become a spatial obstacle.

When a large mounting flange or the like is used, it is necessary to provide at least two mounting flange drive mechanisms with a swing mechanism in order to facilitate maintenance work. It is practically difficult to drive the same amount. At this time, when each drive shaft can be driven only linearly on the same shaft in the space, it is necessary to sequentially move each flange drive mechanism by a small amount, resulting in poor work efficiency. For this reason, in the embodiment of the present invention, as shown in FIG. 3, the following swinging mechanism is provided so that the moving shaft in the space of each flange drive mechanism can be independently deflected.

In the space, the vacuum container 52 and the drive shaft holding portion (2) 66 are in a fixed position. At this time the handle 57
The drive shaft 60 moves by rotating the drive shaft 60. At this time, the drive shaft 60 moves in the same axial direction as the tap portion cut on the swing jig 58. When the mounting flange 51 and the gasket groove 55 are not parallel to each other when the flange drive mechanism is driven, the shaft of the drive shaft 60 is the drive shaft holding portion (2) 66.
However, the difference is about the position of the stop pin 59 connecting the swing jig 58 and the drive shaft holding portion (2) 66 as shown in FIG. 3 (a). Can be freely displaced and can be tilted as shown in (b), so that the deviation can be absorbed.

It should be noted that the above description has been made in detail regarding the case where the mounting flange 51 is separated from the gasket groove 55 flange surface of the vacuum container 52, but when carrying out the mounting work, the handle 57 is turned in the direction opposite to the above direction. It can be implemented by

FIG. 5 shows the extraction window position setting pin. As shown in the figure, mounting pins 75 are installed at several places on the mounting flange 51. At this time, a hole is formed in the flange surface of the vacuum container 52 having the gasket groove 55 and a portion of the extraction window (not shown) corresponding to the pin position. When attaching an extraction window (not shown) during maintenance work, the attachment pin corresponding hole of the extraction window (not shown) is hooked on the attachment pin 75 of the attachment flange 51. After this, the drive device is used to set the mounting flange 51 in the vacuum container 52 with the extraction window (not shown) mounted thereon. In this process, the setting position of the extraction window (not shown) will not be displaced from the predetermined position. In this example, the case where the flange surface of the vacuum container 52 having the gasket groove 55 is located on the upper side or the side surface is described.

When the gasket groove flange surface is on the lower side, the mounting flange 51 is placed on the gasket groove flange surface from above, so that the mounting pin 7
5 is to be attached to the gasket groove portion flange surface side, and a hole is to be made in a portion of the attaching flange corresponding to the pin position.

FIG. 6 shows a structure for retaining the position of the gasket in the gasket groove, (a) is a plan view of the gasket groove,
(B) is the AA arrow view. In both figures, the gasket 80 is installed in the gasket groove 81 in the gasket groove portion flange surface 82 of the vacuum container (not shown). Usually, the gasket groove 81 is often oriented downward or sideways, and the gasket 80 in the gasket groove 81 is disengaged from the gasket groove 81 by gravity at this time. In order to avoid the problem, the pressing plate 8 is placed in several places around the gasket groove 81.
3. Gasket groove flange surface 82 of the pressing plate 83
A screw pin 84 and a spring washer 85 for mounting to are installed.

The installation procedure is as follows. First, it is confirmed that the pressing plate 83 is not outside the gasket groove 81. If the pressing plate 83 is inside the gasket groove 81, the pressing plate 83 is retracted outside the gasket groove 81 by turning the screw pin 84. After this, the gasket 80 is fitted into the gasket groove 81 before and after the gasket position holding structure. While holding the gasket 80 with a hand or the like so that it will not come out of the gasket groove 81, the screw pin 84 is held by the pressing plate 8.
3 is rotated in a direction opposite to the direction in which it is retracted from the gasket groove 81, so that the pressing plate 83 is advanced into the gasket groove 81 so that the pressing plate 83 is sandwiched between the pressing plate 83 and the gasket groove 81. Fix inside. The gasket 80 holds the vacuum in the vacuum container (not shown) by pressing it with a mounting flange (not shown). At this time, the gasket 80 is deformed, but since the installation position of the pressing plate 83 can be slightly deformed by installing the spring washer 85, the deformation is caused by the pressing plate 83.
Absorbs by moving to the outside of the gasket groove 81.

According to such an embodiment, during maintenance work of the electron beam generator, the installation flange drive mechanism can minimize the spatial obstruction of the installation flange 51, and the installation of the flange 51 can be prevented. The removal work can be done efficiently. Further, the take-out window can be easily attached, and the gasket 80 is securely held in the gasket groove 81 by the pressing plate 83.

[0026]

As described above in detail, according to the present invention, in the beam extraction window provided with the flange for the beam extraction portion of the vacuum container and the window mounting flange having the window attached to the flange, Both flanges can be attached and removed, the joint surface inclination can be adjusted, and the window attachment flange can be lowered during maintenance and inspection, and the attachment flange drive mechanism can be rotated almost vertically. Further, since the structure provided with the window setting flange setting pin and the structure provided with the position holding mechanism for the beam extraction portion flange gasket are also provided, the following effects can be obtained.

(1) During maintenance and inspection, it becomes easy to inspect the flange surface and access to the inside of the vacuum container, thus improving work efficiency.

(2) At the time of maintenance and inspection of the take-out window, the window can be removed and the position at the time of mounting can be accurately fixed, and the re-assembly can be surely performed.

(3) Since the output window and the gasket required for holding the vacuum can be surely attached at the predetermined positions, the degree of vacuum can be surely held and the operation rate of the apparatus is improved.

[Brief description of drawings]

FIG. 1 is a side view of a mounting flange drive mechanism for a beam extraction window according to an embodiment of the present invention.

FIG. 2 is a plan view of a mounting flange in FIG.

3A and 3B are operation explanatory views of a mounting flange mechanism according to an embodiment of the present invention, FIG. 3A shows displacement of a swing jig, and FIG. 3B shows a tilted state of a drive shaft.

FIG. 4 shows a rotated state of a mounting flange of a beam extraction window according to an embodiment of the present invention, (a) is a front view thereof,
(B) shows a side view, respectively.

FIG. 5 is a plan view showing a window mounting pin arrangement of a mounting flange of a beam extraction window according to an embodiment of the present invention.

FIG. 6 shows a mounting state of a gasket of a beam extraction window according to an embodiment of the present invention, (a) is a plan view of the mounting portion,
(B) shows the AA arrow line view, respectively.

FIG. 7 is a cross-sectional view showing a structure of an extraction window portion of a conventional electron beam generator.

FIG. 8 is a cross-sectional view showing a state during maintenance work of a lead-out window portion of a conventional electron beam generator.

[Explanation of symbols]

 51 Mounting Flange 52 Vacuum Container 53 Outlet Window 54 Gasket 55 Gasket Groove 56 Handle Mounting Part 57 Handle 58 Swing Jig 59 Fixing Pin 60 Drive Shaft 61 Stopper 62 Mounting Flange Setting 63 Rotating Shaft 64 Stopping Pin 65 Drive Shaft Retaining Part (1) 66 Drive shaft holding part (2) 75 Mounting pin 80 Gasket 81 Gasket groove 83 Holding plate 84 Screw pin

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shin Urano 4-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Mitsubishi Heavy Industries Ltd. Hiroshima Research Institute (72) Hideaki Sekido 10 Oe-cho, Minato-ku, Nagoya Mitsubishi Heavy Industries Ltd. Ceremony Company Nagoya Aerospace Systems Works

Claims (3)

[Claims] 1. A flange of a beam extraction part for extracting the beam from a vacuum container for generating a beam of electrons, ions, etc. and a window for attaching the beam to the outside of the vacuum system from the vacuum container. In a beam extraction window having a window mounting flange having, a driving shaft capable of sliding and swinging through both flange surfaces,
A mounting flange drive mechanism that allows both flanges to be joined and mounted, separated and removed, and that the window mounting flange be lowered by the drive shaft during maintenance work and that the joint surface be rotatable substantially vertically. And a beam extraction window. 2. The beam extraction window according to claim 1, wherein the window attachment flange is provided with an extraction window position setting pin. 3. The beam extraction window according to claim 1, wherein a position holding structure of a vacuum holding gasket is provided on a surface of the beam extraction portion flange side which is in contact with the window mounting flange surface.