JPH08240597A - Surface shape measuring device - Google Patents

Abstract

PURPOSE: To provide a surface shape measuring device capable of measuring a surface shape with high accuracy even when a piezoelectric element is utilized as a driving source of a moving mechanism. CONSTITUTION: A subject device comprises a contact probe 22 supported via a spring member and moving means 3-7 that move the contact probe 22 relative to an object to be measured. It also comprises a displacement signal output means 15 that outputs a displacement signal of which displacement is in a vertical direction in accordance with the physical quantity of a force acting between the contact probe 22 and object and a control signal output means that outputs a control signal by which the moving means is controlled in accordance with the output signal of the displacement signal output means. It further comprises a calibration means that converts the control signal of the vertical direction outputted from the control signal output means to a value of a height based on calibration data to calibrate it.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface shape measuring apparatus for measuring a fine surface shape of an object to be measured, and more particularly to a stylus type surface shape measuring apparatus equipped with an ultralight load stylus. .

[0002]

2. Description of the Related Art The surface resolution of a conventional stylus type surface profile measuring device or optical surface profile measuring device has been at most 1 μm. On the other hand, recently, by scanning the surface of an object with an ultra-light load using a stylus with a sharp tip, the highest resolution is a high-resolution AFM with atomic-level resolution.
(Atomic Fource Microscope) has been proposed.

(G. Binning, CF Quate and Ch. Gerber, Ph
ys.Rev.Lett.56.930 (1986)) With such a stylus-type surface profile measuring device that scans the surface of an object with an ultra-light load, highly accurate measurement can be expected.

[0004]

Generally, the AFM described above is used.
A piezoelectric body is used as a drive source of a moving mechanism such as a stage or a stylus in an apparatus, such as an apparatus, for measuring a surface shape or the like of an object to be measured at an atomic level. However, since this piezoelectric body has displacement characteristics called so-called hysteresis and creep characteristics, as is well known, the amount of displacement of the piezoelectric body desired by the observer can be expressed in a form including an error caused by the hysteresis and creep characteristics. However, it was difficult to perform highly accurate surface shape measurement. An object of the present invention is to provide a surface profile measuring device capable of performing highly accurate surface profile measurement even when a piezoelectric body is used as a driving source of a moving mechanism.

[0005]

[Means for Solving the Problems] In order to solve the above problems and achieve the object, the present invention takes the following means. A stylus supported via a spring member, a moving unit that relatively moves the stylus and the object to be measured, and the stylus based on a physical quantity that acts between the stylus and the object to be measured. Displacement signal output means for outputting a displacement signal in the height direction of the child, control signal output means for outputting a control signal for controlling the moving means based on the output signal of the displacement signal output means, and the control signal output Calibration means for converting the control signal in the height direction output from the means into a height value based on the calibration data and calibrating it.

As a result of taking the above-mentioned means, the following effects occur. The displacement signal in the height direction of the stylus output from the displacement signal output means is input to the control signal output means, the moving means is controlled by the control signal based on the input signal, and the control signal output means outputs the displacement signal. The output control signal in the height direction is converted into the height value based on the calibration data of the calibration means and is calibrated. Therefore, even when the piezoelectric body is used as the drive source of the moving mechanism, its displacement It is not affected by the characteristics.

[0007]

1 and 2 are a front view and a side view showing a partially broken configuration of a surface profile measuring apparatus according to a first embodiment of the present invention. On the surface plate 1, the Y coarse movement stage 2 and the X coarse movement stage 3 can be moved in the horizontal direction with respect to the surface of the surface plate and in the directions (Y direction and X direction) whose moving directions are orthogonal to each other. It is piled up like this.
The Y coarse movement stage 2 can be manually moved by turning the Y coarse movement stage moving handle 4 by hand. Similarly, the X coarse movement stage 3 can be manually moved by turning the X coarse movement stage moving handle 5 by hand. On the X coarse movement stage 3, a Y fine movement stage 6 moving in the Y direction and an X fine movement stage 7 moving in the X direction are sequentially stacked. Furthermore, on the X fine movement stage 7,
A tripod stage 8 is mounted which is movable in the X and Y directions and in the direction (Z direction) perpendicular to the XY plane. The upper surface of the tripod stage 8 serves as a sample table 9 on which an observation material is placed.

The pillar 10 standing on the surface plate 1 has a Z
A coarse movement stage 11 is attached. This Z coarse movement stage 11 is moved in the Z direction perpendicular to the surface plate surface by manually turning the Z coarse movement handle 12. This Z coarse movement stage 11 has an epi-illumination projection tube 13 and an objective lens 14
The optical stylus displacement detection sensor unit 15, which is provided with the above, is attached so that the upper surface of the sample table 9 can be observed. A TV camera 16 is mounted on the epi-illumination tube 13 so that an optical image formed by the objective lens 14 of the stylus displacement detection sensor unit 15 can be captured. An optical fiber bundle 17 is connected to the epi-illumination tube 13, and this optical fiber bundle 17 introduces light for observing an optical image from the outside.

The stylus movement support mechanism 18 is detachably fixed to the stylus displacement detection sensor unit 15. This mechanism 18 includes a stylus X-Y-Z movement mechanism 19, a Z-axis actuator 20 for fine movement of the stylus, and a leaf spring 2 for supporting the stylus.
The entire portion including the stylus 22 and the stylus 22 can be manually moved in the X direction to be fixed at an arbitrary position.
The movement range at that time is a range in which the back surface of the stylus 22 can move from the inside to the outside of the field of view of the objective lens 14.

The stylus XYZ moving mechanism 19 is detachably fixed to the stylus moving support mechanism 18, and includes a Z-axis actuator 20 for finely moving the stylus and a leaf spring 21 for supporting the stylus. , The entire stylus 22 with respect to the objective lens 14, X, Y, Z
Can be manually moved in any direction.
Thus, the position of the laser light of the stylus displacement detection sensor unit 15 is adjusted so as to focus on the back surface of the stylus, and the state can be maintained.

The stylus supporting leaf spring 21 to which the stylus 22 is fixed has one end fixed to the lower end of the Z-axis actuator 20 for fine movement of the stylus, and the other end is displaceable in the Z-axis direction. Installed. Z-axis actuator 20 for fine movement of stylus
Is composed of, for example, a laminated piezoelectric actuator.
The actuator 20 has a stylus XY at the upper end.
The stylus 22 and the stylus supporting leaf spring 21 fixed to the -Z moving mechanism 19 and attached to the lower end are moved in the Z direction with respect to the objective lens 14.

The cover 23 is provided so as to cover the surface plate 1 and all the measuring portions on the surface plate 1. The cables and the measuring part control system are arranged outside the cover 23.

Next, the configuration of each part will be described in detail with reference to FIGS. FIG. 3 is a perspective view showing in detail the configuration of the Y fine movement stage 6 and the X fine movement stage 7. As shown in the drawing, a pair of guide blocks 26a and 26b are provided in parallel along both side edges of the slide plate 25 and are screwed. This pair of guide blocks 26a, 2
Between the two ends of 6b, rectangular leaf springs 27A, 27b are provided.
Are respectively screwed. This rectangular leaf spring 2
A Y table 28 is sandwiched between 7a and 27b. A part of the Y-table 28 is connected to a displacement end of a piezoelectric actuator 29 whose base end is fixed on the slide plate 25, and is driven to be displaced in the Y-direction. A pair of guide blocks 30a and 30b are installed in parallel along both side edges of the Y-table 28 and are screwed. This pair of guide blocks 30
Between the two ends of a and 30b, a rectangular leaf spring 31A,
31b are respectively screwed. The X table 32 is sandwiched between the rectangular leaf springs 31a and 31b. A part of the X-table 32 is connected to the displacement end of a piezoelectric actuator 33 whose base end is fixed on the Y-table 28, and is driven to be displaced in the X-direction. ing. The Y fine movement stage 6 and the X fine movement stage 7 respectively have the Y table 28 and X as described above.
Inside the table 32, a laminated piezoelectric actuator 29,
Since 33 is used as a drive source, the fine movement stage has an extremely compact structure.

The leaf springs 27a, 27b and 31a,
As shown in the exploded view of the leaf spring 31b at the upper right of FIG.
It is screwed with a, 34b, 34c applied.

FIG. 4 is a diagram showing the structure of the tripod stage 8 in detail. Actuator support block 3
Reference numeral 5 has a structure having three surfaces that are perpendicular to each other, and is made of a material that is difficult to deform. The X, Y, and Z fine movement piezoelectric actuators 36, 37, and 38 have expansion and contraction capabilities of, for example, several tens of μm. Each of these actuators 36, 37, 38 has one end fixed to each of the three surfaces of the actuator support block 35 that are perpendicular to each other, and the other end of each actuator is made of a material that is not easily deformed. It is fixed to the block 39. Sample table 9
Is fixed to the upper surface of the moving block 39 so that the surface perpendicular to the moving direction of the Z fine-movement piezoelectric actuator 38 is the sample mounting surface.

By changing the voltage applied to each of the fine-movement piezoelectric actuators 36, 37, 38 of the tripod stage 8 having the above-mentioned structure, the sample stage 9 is moved to X, Y, Z.
It moves about several tens of μm in any direction.

FIGS. 5A and 5B and FIG. 6 are views showing the configuration of the displacement detection sensor unit 15 in detail. 5A and 5B are a top view and a side view of the displacement detection sensor unit 15 including the unitized height measurement optical system. An objective lens 14, which is also used as an observation optical system described later, is attached to a support plate 41 which is erected horizontally on a mounting base 40. At a predetermined position on the optical axis K of the objective lens 14, a quarter wavelength plate 42,
A semi-transparent mirror 43 is arranged. A beam splitter 44 is arranged on an optical axis L which is orthogonal to the optical axis K and which passes through the center of the semitransparent mirror 43. A light source 45 that emits a linearly polarized beam is arranged so as to face the light incident end of the beam splitter 44. As the light source 45, it is desirable to use a semiconductor laser composed of a laser diode or the like in a device that dislikes vibration like this device and requires high sensitivity and downsizing. Further, first and second two-divided light receiving elements 48 and 49 are arranged so as to face the two light emitting ends of the beam splitter 44 via a pair of critical angle prisms 46 and 47, respectively. Reference numeral 50 in the figure denotes an optical element such as a cylindrical lens which receives a linearly polarized beam from the light source 45 and shapes the beam shape. The base 40 has a mounting hole 40a for removably mounting the unit 15 to the stage 11.
40b is provided.

FIG. 6 is a view showing the arrangement of the entire optical system in which the displacement detection sensor unit 15 is shown together with the observation optical system and its peripheral portion. In the figure, reference numeral 51 is a filter, 52
Is a semi-transparent mirror, 53 is an imaging lens, 54 is a prism, 55 is an eyepiece lens, 56 is an illumination lamp, 57 is a condenser lens,
58 is a signal processing circuit, 59 is a CPU display, 60
Is a video monitor. Other than the above, it is as described above.

The laser light emitted from the light source 45, that is, the linearly polarized beam, becomes parallel light having a circular cross section by the beam shape shaping element 50, enters the beam splitter 44, and is reflected. As a result, the light becomes light along the optical axis L. This light is reflected by the semitransparent mirror 43 and becomes light along the optical axis K.

On the other hand, the light from the observation illumination light source constituted by the lamp 56, the lens 57, etc. is reflected by the semi-transparent mirror 52, passes through the semi-transparent mirror 43 through the filter 51, and passes through the ray.
Become one with The Light.

The integrated laser light and illumination light are
The light passes through the quarter-wave plate 42 and enters the objective lens 14.
When passing through the quarter-wave plate 42, the laser light is converted from linearly polarized light into circularly polarized light. And this laser light
The light is focused by the objective lens 14 and projected onto the sample on the sample stage 9 as a minute spot for measuring a fine surface shape. The illumination light illuminates the entire field of view through the objective lens 14.

The illumination light reflected from the sample is the objective lens 14, the quarter-wave plate 42, the semitransparent mirror 43, and the filter 5.
1, passing through the semi-transparent mirror 52, an image is formed by the image forming lens 53, refracted by the prism 54, and reaches the field stop surface of the eyepiece lens 55. Further, the light transmitted through the prism 54 is incident on the TV camera 16 equipped with a CCD image pickup device or the like and is imaged.
The image pickup signal is sent to the video monitor 60 and displayed. The quarter-wave plate 42 is installed in a state in which it is slightly inclined from the direction perpendicular to the optical axis. Thereby, the illumination light from the observation illumination light source is not directly reflected and does not enter the observation optical system, and a clear visual field observation image without flare can be obtained.

The laser light reflected from the sample passes through the objective lens 14 and the quarter-wave plate 42. At this time, the laser light becomes a linearly polarized light whose vibrating surface is rotated by 90 ° as compared with that at the time of incidence. The laser light reflected by the semi-transparent mirror 43 enters the beam splitter 44 and is divided into two. One of them is projected on the two-divided light receiving element 48 via the critical angle prism 46, and the other is projected on the two-divided light receiving element 49 via the critical angle prism 47. The output signals of the two-divided light receiving elements 48 and 49 are subjected to primary signal processing in the signal processing circuit 58, and then subjected to arithmetic processing in the computer 59 to be displayed on the display 6.
1 and is projected as a stereoscopic image.

Means for obtaining the three-dimensional image is described in JP-A-59-9.
This is an application of a so-called defocus detection method, similar to those disclosed in Japanese Patent Laid-Open No. 0007 and Japanese Patent Laid-Open No. 60-38606. The outline will be described below.

When the surface measurement point of the sample is at the focal position of the objective lens 14, the reflected light passing through the objective lens 14 becomes a parallel light flux. When the surface measurement point of the sample is closer to the focal position of the objective lens 14, the light passing through the objective lens 14 becomes a divergent light beam, and conversely, the surface measurement point of the sample is far from the focal position of the objective lens 14. In the case, the light passing through the objective lens becomes a convergent light flux. That is, when the light beam is deviated from the focus position, both become non-parallel light beams and enter the critical angle prisms 46 and 47. Critical angle prism 46,4
The reflecting surface 7 is preset so as to form a critical angle with respect to the parallel light flux. Therefore, when the non-parallel light flux enters the critical angle prisms 46 and 47, the central light ray enters at the critical angle, but the light flux deviated to one side from the center has an incident angle smaller than the critical angle, and a part of the light is reflected by the prism. It will go out and the rest of the light will be reflected. Further, the light beam deviated from the center to the other has an incident angle larger than the critical angle and is totally reflected. By repeating such an operation several times within the critical angle prism, the detected light amount difference between the light incident at an angle smaller than the critical angle and the light incident at the angle greater than the critical angle is expanded.

Moreover, in that case, depending on whether the surface measurement point of the sample is closer or farther than the focal position of the objective lens 14,
The relationship between big and small is reversed. Such light is divided into two light-receiving elements 4
When light is received at 8 and 49, and the difference between the photoelectrically converted signals is detected, an output signal having a substantially linear relationship with the height of the unevenness on the surface of the sample is obtained.

7A and 7B show a stylus XYZ.
It is a figure showing the composition of moving mechanism 19 in detail. A bar spring upper plate 66 supported by four bar springs 62, 63, 64, 65 is installed on the moving mechanism fixing base 61. The rod spring upper plate 66 can move in the XY direction in the figure by, for example, about several mm due to the bending of the four rod springs 62 to 65. The rod spring upper plate 66 is arranged on the two end faces of the X-moving knob 67 and the Y-moving knob 68 attached to the moving mechanism fixing base 61 so that the tip ends of the respective screw portions of the X-moving knob 67 and the Y-moving knob 68 come into contact with each other at two positions in the orthogonal directions. ing.

The base end of the actuator fixing member 69 is held on the lower surface of the bar spring upper plate 66 via the plate spring 70. The lower end of the rod spring upper plate 66 is stretched by the tip of the Z-direction moving screw 71 attached to the central portion of the fixing member 69 so that the distance from the lower face of the rod spring upper plate 66 is kept constant. . Actuator fixing member 69
The Z-axis actuator 20 for fine movement of the stylus is at the lower end of the base end of the
Is installed.

The Z-axis actuator 20 for fine movement of the stylus is composed of a laminated piezoelectric element, and the lower end portion thereof has a leaf spring 21 for supporting the stylus and a mounting base 7 for the stylus 22.
A holding member 72 for holding 5 is fixed.

By configuring as described above, X, Y
Rotate the moving knobs 67, 68 to move each of these knobs 67, 68.
By pushing the rod spring upper plate 66 with the tip of the screw portion of 68,
The rod spring upper plate 66 is moved in the X and Y directions,
It can be held in any position. Further, by rotating the Z direction moving screw 71 and pushing the lower surface of the rod spring upper plate 66 with the tip of this screw, the actuator fixing member 69 can be displaced in the Z direction and held at an arbitrary position.

Therefore, the X, Y moving knobs 67, 68
And the Z-axis actuator 20 for fine movement of the stylus, the leaf spring 21 for supporting the stylus, and the stylus 22 are fixed to the actuator fixing member 69 by the Z-direction moving screws 71. It is configured so that it can be moved to an arbitrary position in the Z direction and that state can be maintained.

FIGS. 8A and 8B show details of an example of the configuration of the stylus 22 and the stylus supporting leaf spring 21. The stylus 22 is made of diamond, for example,
The tip is processed to about 0.1 μmR. This stylus 2
2 is fixed near the tip of the stylus supporting leaf spring 21. The stylus supporting leaf spring 21 is made of, for example, stainless steel, and has a length of 3 mm, a width of 2 mm, and a thickness of 20 μm.
It is processed to a certain size.

The proximal end portion of the stylus supporting leaf spring 21 is fixed to a mounting base 75 made of a material which does not easily deform. The mounting base 75 has mounting screw holes 76, and can be fixed to the holding member 72 with screws or the like.

With the above-described structure, after fixing the mounting base 75, the tip of the stylus 22 is brought into contact with the sample surface with a light load, and when scanning in the surface direction, the contact is made according to the surface shape of the sample. The needle 22 moves up and down, and the stylus supporting leaf spring 21 bends accordingly.

9 to 11 are block diagrams showing the configuration of the measuring unit and the control unit for controlling the measuring unit of the present apparatus, which are divided into three parts, respectively. The measuring unit main body shown in FIG. 9, the control unit shown in FIG. 10, and the computer unit shown in FIG. 11 are connected to each other at corresponding points indicated by corresponding numbers surrounded by circles in each drawing. There is.

9 to 11, the high-voltage amplifier 80 drives the Y fine movement stage 6, the X fine movement stage 7, the tripot stage 8 and the Z-axis actuator 20 for fine movement of the stylus. It was installed in. This high-voltage amplifier 8
0 is connected to D / A boards 81 and 82 for supplying a control signal to the amplifier 80, a Z fine movement adjusting section 83, and a Z-axis feedback controller 84.

The sensor controller 85 is provided for controlling the laser light of the stylus displacement detection sensor unit 15 and processing the detected height information signal. The output signal is connected so as to be input to the A / D board 86 and the Z-axis feedback controller 84. Although not shown, the sensor controller 85 is provided with a meter capable of monitoring the output signal based on the detected height information.

The Z-axis feedback controller 84 is
The control signal comprises an electric circuit for outputting a tripod stage Z-axis control signal for keeping the distance between the back surface of the stylus and the objective lens 14 constant based on the output signal of the sensor controller 85. Is supplied to the Z axis of the tripod stage 8 via a high voltage amplifier 80. Also, a connection is made so that a tripod stage Z-axis control signal can be input to the A / D board 86.

D / A boards 81, 82 and A / D boards
The mode 86 is connected to the computer 87 and controls the measuring system scanning system and the drive system, and processes height information signals. Further, a menu for operating the measuring section, a CRT 88 for displaying the measurement result, and a plotter 89 for hard-copying the measurement result are connected to the computer 87.

The lamp house light control device 90 is a light source for observation illumination and has a light control function. This lamp house light control device 90 uses a fiber bundle 17 to make an epi-illumination tube 13
And is capable of supplying illumination light to the epi-illumination tube 13.

The TV camera 16 is a T for controlling the TV camera.
It is connected to the V camera controller 91. Also TV
A color monitor 92 (corresponding to the video monitor 60 in FIG. 6) is connected to the controller 91 in order to display an image obtained by the camera 16.

Next, the operation method and operation of the present apparatus constructed as described above will be described. The general operation procedure is as follows. (1) Adjusting the position of the stylus (2) Setting the measurement position (3) Contact between the stylus and the surface of the sample to be measured (4) Surface shape measurement (5) Measurement data processing and result display (6) Result output Will be described in detail below. (1) Stylus position adjustment The backside of the stylus 22 is the stylus displacement detection sensor unit 1
The position of the stylus 22 is adjusted so as to come to the laser light focus position from 5. That is, the entire stylus XYZ moving mechanism 19 is moved by the stylus moving support mechanism 18 of FIGS. 1 and 2, and the stylus 22 is placed within the field of view of the objective lens 14.

The illumination light from the lamp house light control device 90 is incident on the epi-illumination tube 13 through the optical fiber bundle 17 to capture the optical image on the back surface of the stylus 22 with the TV camera 16 and the TV camera. Via controller 91,
It is displayed on the color monitor 92. While looking at the image on the color monitor 92, the X-moving knob 67, the Y-moving knob 68, and the Z-direction moving screw 7 of the stylus X-Y-Z moving mechanism 19.
Turn 1 to adjust the position of the stylus 22 so that the laser light spot of the stylus displacement detection sensor unit 15 is focused on the center of the back surface of the stylus.

At this time, as means for performing fine adjustment in the Z direction,
By adjusting the Z fine movement adjustment unit 83, the expansion / contraction operation of the Z-axis actuator 20 for fine movement of the stylus may be used. By the series of operations described above, the displacement detection sensor unit 15 can detect the vertical movement of the stylus 22. (2) Measurement position setting The measurement sample is placed on the upper surface of the sample table 9. From the state of step (1), the stylus moving support mechanism 18 brings the stylus 22 out of the field of view of the objective lens 14. While viewing the optical image on the color monitor 92, the Z coarse movement stage 12 is moved by the Z axis coarse movement handle 12 to obtain the surface image of the measurement sample, and then the Y coarse movement stage 2 and the X coarse movement are performed. The moving stage 3 is manually moved to move the position to be measured to the displacement detection sensor unit 1
The laser light spot position of 5 is set. At this time, as a means for finely adjusting the position, the control signal from the computer 87 is applied to the Y fine movement stage 6 and the X fine movement stage 7 by the D / A.
It is also possible to use a means for moving and holding by giving it through the board 81 and the high voltage amplifier 80.

The width of the stylus supporting leaf spring 21 is set to
If the diameter is reduced to about 0 μm, the measurement position can be set without taking the stylus 22 out of the field of view of the objective lens 14 by performing the above operation. (3) Contact between the stylus and the surface of the sample to be measured From the state of step (2), raise the Z coarse movement stage 11,
The stylus moving support mechanism 18 brings the stylus 22 into the visual field of the objective lens 14. By performing this operation,
The stylus 22 is set to the position adjusted by the operation of step (1). In this state, the Z coarse movement stage 11 is moved down and moved until just before the tip of the stylus 22 comes into contact with the measurement sample by visual measurement.

Next, while the output signal of the sensor controller 85 is being monitored by the attached meter, the Z fine movement adjusting section 83 is operated to operate the Z-axis actuator 20 for fine movement of the stylus. When the tip of the stylus 22 comes into contact with the measurement material,
Since the monitor meter of the sensor controller 85 swings,
The stylus 22 is set at a required position. At this time, monitor
The contact load of the stylus 22 on the sample can be known from the amount of deflection of the probe.

The Z fine movement adjusting section 83 is replaced with a computer 87.
With the configuration that can be controlled by, the contact operation can be performed numerically by the computer operation. (4) Surface shape measurement In the state of step (3), the output signal of the sensor controller 85 is input to the Z-axis feedback controller 84, and the Z-axis control signal is used as the control signal for the A / D board. Input to 86. By doing so, the output signal of the sensor controller 85 is always constant, that is, the back surface of the stylus is always at a constant distance from the sensor unit 15 for detecting stylus displacement. 8 Z axis is Z
It is controlled by a shaft feedback controller 84 via a high voltage amplifier 80. Thus, the change in the sample surface position can be detected from the Z-axis control signal.

Here, X and Y of the tripod stage 8
A control signal from a computer 87 is applied to the shaft through a D / A board 82 and a high-voltage amplifier 80 to drive the stage 8 so that the stylus 22 allows an arbitrary range on the sample surface. Scanning two-dimensionally, the Z axis of the tripod stage 8 is driven up and down according to the unevenness of the sample surface. Further, the same drive signal is sent to the computer 8 via the A / D board 86.
By incorporating in 7, the unevenness of the sample surface is calculated.
Will be stored in the data. At this time, the unevenness of the sample surface is the amount of movement of the tripod stage 8 in the Z-axis, for example, 1
It is possible to measure up to a range of about 0 μm.

Thus, the stylus 22 and the sample (measurement object)
A control signal in the height direction between the sample and the stylus 22 is obtained based on the physical quantity that acts between and. (5) Measurement data processing and result display When the measurement is completed in step (4), the control signal obtained by the above-mentioned control signal output means, that is, the X and Y positions on the sample surface and the height at that position. Information and the like are stored in the computer 87 as measurement data.

The above-mentioned measurement data indicating the height information is stored in advance in the computer 8 for each line scanning during measurement.
It is obtained by converting the voltage value, that is, the control signal in the height direction into a height value and calibrating it based on the calibration data stored in 7.

The measurement data can be displayed on the CRT in the form of a bird chart, a contour map or the like by performing an operation in accordance with the menu displayed on the computer CRT 88. (6) Result output The measurement data displayed on the computer CRT88 in step (5) can be displayed by operating the menu on the CRT88.
It can be output to the plotter 89 connected to the computer 87.

Regarding the operation of the entire configuration, the above steps (1) to
As described above through step (6), especially steps (4) to (6) are so constructed that the computer can be operated while observing the CRT menu.

[0053]

According to the present invention, the control signal in the height direction of the stylus output from the control signal output means is converted into a height value based on the calibration data of the calibration means and calibrated. Therefore, even when a piezoelectric body is used as a drive source of the moving mechanism, it is possible to avoid being affected by the displacement characteristic. Therefore, it is possible to provide a surface profile measuring device capable of highly accurate surface profile measurement.

[Brief description of drawings]

FIG. 1 is a partially cutaway front view showing the configuration of a surface profile measuring apparatus according to a first embodiment of the present invention.

FIG. 2 is a side view showing a partially broken configuration of the surface profile measuring apparatus according to the first embodiment of the present invention.

FIG. 3 is an exploded perspective view showing in detail the configuration of an X fine movement stage and a Y fine movement stage according to the first embodiment of the present invention.

FIG. 4 is a perspective view showing a configuration of a tripod stage according to the first embodiment of the present invention.

5A and 5B are views showing a configuration of a displacement detection sensor unit according to the first embodiment of the present invention, FIG. 5A being a top view and FIG. 5B being a side view.

FIG. 6 is a diagram showing the overall configuration of an optical system showing the displacement detection sensor unit according to the first embodiment of the present invention together with an observation optical system and the like.

FIG. 7 is a stylus XYZ according to the first embodiment of the present invention.
It is a figure which shows the structure of a moving mechanism, (a) is a top view, (b) is a BB arrow sectional drawing.

FIG. 8 is a diagram showing in detail the configuration of a stylus and a stylus supporting leaf spring according to the first embodiment of the present invention, in which (a) is a side view and (b) is a bottom view.

FIG. 9 is a block diagram showing a configuration of a measurement unit main body according to the first embodiment of the present invention.

FIG. 10 is a block diagram showing a configuration of a control unit according to the first embodiment of the present invention.

FIG. 11 is a block diagram showing a configuration of a computer unit according to the first embodiment of the present invention.

[Explanation of symbols]

2 ... Y coarse movement stage 3 ... X coarse movement stage 6 ... Y fine movement stage 7 ... X fine movement stage 8 ... tripot stage 9 ... sample stage 11 ... Z coarse movement stage 13 ... vertical illuminator 14 ... objective lens 15 ... Displacement sensor unit 18 ... touch Hariko insert supporting mechanism 19 ... touch Hariko X-Y-Z movement mechanism 20 ... touch Hariko fine control Z-axis actuator - motor 21 ... Leaf spring for supporting a stylus 22. Stylus

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Fumio Uchino 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (72) Shinji Aramaki 2-43-2 Hatagaya, Shibuya-ku, Tokyo Olympus Optical Co., Ltd. (72) Inventor Ikuzo Nakamura 2-43-2 Hatagaya, Shibuya-ku, Tokyo Olympus Optical Co., Ltd. (72) Inventor Yasushi Sato 2-43-2 Hatagaya, Shibuya-ku, Tokyo Olympus Optical Co., Ltd.

Claims (1)

[Claims] 1. A stylus supported via a spring member, a moving means for relatively moving the stylus and the object to be measured, and a physical quantity acting between the stylus and the object to be measured. Displacement signal output means for outputting a displacement signal in the height direction of the stylus based on, and control signal output means for outputting a control signal for controlling the moving means based on an output signal of the displacement signal output means. A surface shape measuring apparatus, comprising: a calibration means for converting a height direction control signal output from the control signal output means into a height value based on calibration data and calibrating the height value.