JPH08229800A - Wiree saw device - Google Patents

Abstract

PURPOSE: To connect a plurality of machining rollers by a link mechanism, also to make a tilt motion of a wire between the machining rollers by a motion of this link mechanism, so that the machining roller can be swiveled by small drive force. CONSTITUTION: At the time of cutting work of a workpiece, both turn members 37, 38 are reciprocated to integrally turn by a prescribed angle around a turn axial line S1 through a connecting link 55 and turn rings 51, 52 by a swiveling motor 57. Consequently, a rotary axial line S2 of machining rollers 13, 14, provided in a position eccentrically placed by a prescribed amount relating to the turn axial line S1 of each turn member 37, 38, is turn displaced in a range of prescribed angle with the turn axial line S1 serving as the center. In this way, both the machining rollers 13, 14 are swiveled alternately in a vertical direction, to tilt a wire 15 between both the rollers 13, 14 against the workpiece. Accordingly, during cutting the workpiece, slurry containing abrasive grains is sufficiently suppled to between the wire 15 and the workpiece, also to discharge cutting chips from therebetween.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a semiconductor material,
The present invention relates to a wire saw device for cutting brittle materials such as magnetic materials and ceramics with a wire.

[0002]

2. Description of the Related Art In a wire saw device, a wire is spirally wound at a predetermined pitch between a plurality of processing rollers, and while the wire travels in one direction or in both directions, a slurry containing abrasive grains is formed on the wire. What is supplied. Then, in this state, the work is pressed against the wire, and the work is cut.

In such a wire saw device, generally, a large amount of slurry containing abrasive grains is supplied between the wire and the work, and the more efficiently the chips are discharged from between them, the better the cutting efficiency of the work. . Therefore, for example, a wire saw device as disclosed in JP-A-60-172460 has been conventionally proposed.

In the device of this publication, the rotation of the eccentric shaft accompanying the traveling of the wire causes the wire to oscillate so that the slurry is supplied and the chips are discharged smoothly. However, in this device, since the wire swing cycle depends on the wire traveling speed, it is impossible to change the wire swing cycle according to the cutting conditions.

To solve this, Japanese Patent Publication No. 6-351
A wire saw device disclosed in JP-A-07-2007 has been proposed. In this apparatus, one hollow disk-shaped rotating member is rotatably arranged around a horizontal axis, and a pair of processing rollers is rotatably supported at a predetermined interval on its end surface. There is. Then, as the wire wound between the rollers travels in one direction or in both directions as the processing roller rotates, the rotating member drives the worm and the worm wheel by the motor when cutting the workpiece. It is reciprocally rotated by a predetermined angle via. As a result, both processing rollers are alternately swung in the vertical direction regardless of the traveling speed of the wire, the wire between both rollers is tilted with respect to the work, and the abrasive grains are included between the wire and the work. A large amount of slurry is supplied and chips are smoothly discharged from between them.

[0006]

However, in this conventional wire saw device, a pair of processing rollers are supported by the end faces of one disk-shaped rotating member, and the rotating member reciprocally rotates. Both processing rollers are rockable. For this reason, it is necessary to form the rotating member large and sturdy so that the weight of the pair of processing rollers can be sufficiently supported, and it is necessary to reciprocally rotate the rotating member together with the pair of processing rollers. There was a problem that a motor with a large driving force was required.

In addition, since the worm and the worm wheel are interposed between the rotating member and the motor, it is necessary to perform a time-consuming gear cutting process on the rotating member and the like, which is troublesome to manufacture.

The present invention has been made by paying attention to the problems existing in such conventional techniques. An object of the invention is to provide a wire saw device which can simplify a supporting structure of a processing roller, can swing the processing roller with a small driving force, and is easy to manufacture. It is in.

[0009]

In order to achieve the above object, in the invention described in claim 1, a plurality of processing rollers are connected by a link mechanism, and the processing is performed by the movement of the link mechanism. The wire between the rollers is configured to tilt.

According to a second aspect of the invention, in the first aspect, the link mechanism has a plurality of rotating members and a connecting link, and each rotating member is eccentric by a predetermined amount from its own rotating axis. The processing rollers are rotatably supported around the rotation axis, and the connecting link connects the rotating members.

According to the third aspect of the present invention, the plurality of processing rollers are swung by the crank mechanism connected to each processing roller, and the swinging causes the wire between the processing rollers to tilt. It is configured in.

According to a fourth aspect of the present invention, in the third aspect, each crank mechanism includes a rotary drive source, an engagement groove provided in each rotary member, and an engagement groove connected to the rotary drive source. A moving roller is provided, and the rotational force generated by the rotary drive source is converted into the movement of the roller in the engagement groove, and each rotating member is rotated within a predetermined angle to swing the processing roller.

[0013]

According to the present invention, the wire tilts due to the movement of the link mechanism. Therefore, a large-scale rotating member that supports the processing roller and a gear mechanism are not required.

In the second aspect, the swing of the link causes the eccentric rotation of the rotating member, and the eccentric rotation causes the tilting movement of the processing roller. In the third aspect, the plurality of processing rollers are swung by the crank mechanism connected to each processing roller. Then, the swing causes the wire between the processing rollers to tilt.

According to another aspect of the present invention, the crank mechanism includes a rotary drive source, an engagement groove provided in each rotating member, and a roller connected to the rotary drive source and moving in the engagement groove. Then, the rotational force generated by the rotary drive source is converted into the movement of the roller within the engagement groove, each rotating member is rotated within a predetermined angle, and the processing roller is swung.

[0016]

【Example】

(First Embodiment) A first embodiment of the present invention will be described in detail below with reference to FIGS.

As shown in FIGS. 2 and 3, the cutting mechanism 11
Are mounted on the device frame 12. The cutting mechanism 11 is provided with a processing driving roller 13 and a processing driven roller 14 extending in parallel, and an annular groove 13a,
14a are formed at a predetermined pitch. In the drawings, in order to facilitate understanding, the annular grooves 13a, 14a
The number of is drawn less than it actually is.

A single cutting wire 15 made of steel wire is continuously wound around the annular grooves 13a and 14a of the working rollers 13 and 14, respectively. The wire traveling motor 16 is disposed on the device frame 12, and the machining drive roller 13 is directly rotated by the motor 16 and the machining driven roller 14 is rotated by the traveling force of the wire 15. Then, by rotating these processing rollers 13 and 14, the wire 15 travels in one direction or two directions at a predetermined traveling speed.

The work supporting mechanism 19 is supported by the frame 12 above the cutting mechanism 11 so as to be vertically movable,
The work 20 is detachably set at the lower part thereof. A work lifting motor 21 is arranged on the frame 12, and the work supporting mechanism 19 is vertically moved by this motor 21 via a ball screw or the like (not shown).

The slurry supply pipes 32 are arranged on both sides of the processing position for the work 20, and supply the slurry containing abrasive grains toward the processing position. Then, when the device is in operation, the wire 15 causes the processing roller 1 of the cutting mechanism 11 to operate.
The work supporting mechanism 19 is lowered toward the cutting mechanism 11 while traveling in one direction or in both directions between No. 3 and No. 14. At this time, the slurry is supplied onto the wire 15, the work 20 is pressed against the wire 15, and the work 20 is sliced by the lapping action.

The reel mechanism 22 is mounted on the frame 12, and a reel reel 23 for reeling out the wire 15 is provided.
And a winding reel 24 for winding the wire 15. A pair of reel rotation motors 25 and 26 drive the rotation of the reels 23 and 24. Traverse mechanism 27
Guides the feeding of the wire 15 from the feeding reel 23 and the winding of the wire 15 on the winding reel 24 while traversing.

Then, by rotating the processing drive roller 13 and both reels 23 and 24, the wire 15 is paid out from the pay-out reel 23 to the cutting mechanism 11, and the processed wire 15 is taken up by the take-up reel 24. .

The wire tension applying mechanism 28 is provided with a pair of dancer arms 29, and a dancer roller 30 and a weight 31 are attached to the tips of the dancer arms 29, respectively. The wire guide mechanism 32 is arranged in the vicinity of the cutting mechanism 11 and includes a plurality of guide rollers 33 for guiding the wire 15.

Further, the processing roller 13 of the cutting mechanism 11,
Both ends of the wire 15 wound between the 14 are hooked on the dancer roller 30 of the wire tension applying mechanism 28 via the guide roller 33 of the wire guide mechanism 32 and the guide roller 34 on the frame 12. Then, by rotating both dancer arms 29 with the weight 31,
A predetermined tension is applied to the wire 15 between the processing rollers 13 and 14.

Next, the structure of the swing mechanism for swinging the processing rollers 13 and 14 will be described with reference to FIGS. 1 and 4 to 6. A pair of cylindrical rotating members 37, 3
8 are rotatably supported on the apparatus frame 12 about a horizontal rotation axis S1 via a plurality of brackets 39 and bearings 40 so as to extend in parallel at a predetermined interval.

The pair of support shafts 41 are composed of the rotating members 37,
The rotating members 37, 38 are each screwed by a screw 42 so as to extend on a rotating axis S2 decentered from the rotating axis S1 of 38 by a predetermined amount.
Is fixed to the tip of the frame 12, and those ends are supported on the frame 12 through the eccentric bearing 43 and the bracket 44. The processing rollers 13 and 14 are rotatably supported on the support shafts 41 via bearings 45 about the rotation axis S2. The bearing 45 is located inside the processing rollers 13 and 14 so as not to touch the slurry or the like.

The rotating shafts 46, 46a are rotatably supported in the rotating members 37, 38 via a pair of bearings 47 about a rotating axis S2. The pulley 17 is attached to the outer end of the one rotating shaft 46, and the drive gear 48 is fixed to the inner end. The four transmission gears 49 are rotatably supported by the respective screws 42 so as to mesh with the drive gear 48, and the inner gear 50 is provided on the end surface of the processing roller 13 so as to mesh with these transmission gears 49. Is fixed.

Rotating members 37, 3 are provided on both rotating axes S1.
8 is arranged, the support shaft 41, the processing rollers 13, 14 and the rotation shafts 46, 46a are arranged on both the rotation axis lines S2, and the pulley 17, the drive gear 48, and the inside are arranged on the one rotation axis line S2. The tooth gear 50 is arranged.

During operation of the apparatus, one rotating shaft 46 is interlockedly rotated by the wire traveling motor 16 via the pulley 17 and a belt (not shown). At this time, the rotation of the rotary shaft 46 is transmitted to the processing roller 13 via the drive gear 48, the transmission gear 49 and the internal gear 50,
The roller 13 is rotated around the rotation axis S2, and the roller 14 is interlocked and rotated via the wire 15,
The wire 15 runs in one direction or in both directions.

The pair of rotating rings 51 and 52 are fitted and fixed to the outer circumferences of the respective rotating members 37 and 38 via a key 53, and projections 54 are provided on the outer circumferences thereof. The connecting link 55 is attached between the protrusions 54 of both the rotating rings 51 and 52 by a pin 56, and the pair of processing rollers 13 and
Both rotating members 37, 38 are integrally rotatably connected to each other via rotating rings 51, 52 so as to alternately swing 14 in the vertical direction.

A swinging motor 57 constituting a driving source as a driving means is arranged on the bracket 39 so as to correspond to the central portion of the connecting link 55, and a driving lever 58 is attached to the motor shaft thereof. There is. The roller 59 is rotatably supported at the tip of the drive lever 58, and an engaging groove 60 as a cam extending in the vertical direction is formed in the connecting link 55 so as to engage with the roller 59. And
When the motor 57 is rotated, the interlocking link 55 is reciprocated between the position shown by the solid line and the position shown by the chain line in FIG. 1 via the drive lever 58, the roller 59 and the engagement groove 60.
A reciprocating rotary motion of a predetermined angle is imparted to both rotary members 37, 38 via the rotary rings 51, 52.

Next, the operation of the wire saw device configured as described above will be described. Now, in this wire saw device, the wire 15 is unwound from the unwound reel 23 of the reel mechanism 22 and is unidirectionally or bidirectionally run between the processing rollers 13 and 14 of the cutting mechanism 11, and then is wound onto the take-up reel 24. Being rolled up. Then, the work supporting mechanism 19 presses the work 20 against the wire 15 while the slurry containing abrasive grains is supplied onto the wire 15 between the processing rollers 13 and 14, and the work 20 is cut. .

At the time of cutting the work 20, as shown in FIGS. 1 and 6, both rotating members 37 and 38 are rotated by the swinging motor 57 via the connecting link 55 and the rotating rings 51 and 52. It is integrally reciprocally rotated by a predetermined angle around the axis S1. For this reason, the rotation axis S2 of the processing rollers 13 and 14 located at a position eccentric to the rotation axis S1 of each of the rotation members 37 and 38 by a predetermined amount is within a predetermined angle range about the rotation axis S1. It is rotated and displaced.

As a result, as shown by the solid line, the broken line and the chain double-dashed line in FIG. 6, both processing rollers 13 and 14 are alternately swung in the vertical direction, and the wire 15 between the rollers 13 and 14 is changed.
Is tilted with respect to the work 20. Therefore, the work 20
During the cutting, the slurry containing abrasive grains is sufficiently supplied between the wire 15 and the work 20, and the chips are smoothly discharged from between them, so that the work 20 can be cut efficiently. .

Therefore, in this embodiment, the motor 5
By changing the number of rotations of 7, the tilting cycle of the wire 15 can be arbitrarily adjusted, and an optimum tilting cycle according to the material and size of the work 20 can be obtained regardless of the wire traveling speed.

Further, in the wire saw device of this embodiment, the pair of processing rollers 13 and 14 are individually supported by the pair of rotating members 37 and 38, and both rotating members 37 and 38 are moved by the swinging motor 57. The processing rollers 13 and 14 are oscillated by being interlocked and rotated via the connecting link 55. Therefore, unlike the conventional device in which a pair of processing rollers are supported on one disk-shaped rotating member, it is not necessary to form the rotating member in a large size and to be robust, and The support structure can be simplified. Further, unlike the conventional device, it is not necessary to provide a driving source of a large driving force to swing the processing roller, and the processing roller 1 is driven by the swinging motor 57 having a small driving force.
3, 14 can be easily rocked.

As another means, the driving force can be obtained from the rotational force of the wire traveling motor 16 for rotating the processing driving roller 13 via the continuously variable transmission. Moreover, in this embodiment, unlike the conventional device,
Since gears are not used, troublesome gear cutting work is not required, which simplifies production. In addition, both processing rollers 1
Since 3, 14 are connected by one connecting link 55 and the link 55 is swung by one motor 57, the number of parts is reduced and the configuration is simplified.

Further, the swing of the connecting link 55 causes the eccentric rotation of the rotating members 37, 38, and the eccentric rotation causes the working rollers 13, 14 to oscillate, so that the working roller 1
Unlike the case of directly swinging the rollers 3 and 14, the swinging of the working rollers 13 and 14 is smoothly performed, and a favorable result is obtained also in the processing accuracy.

Further, in this embodiment, since the working rollers 13 and 14 are supported by the outer ring of the bearing 45 on the outer periphery of the support shaft 41, the working rollers 13 and 14 are made thin and the mass is reduced. Can be made smaller. Therefore, the load acting on the bearing 45 is reduced, and the life of the bearing can be extended. (Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIGS. In this embodiment, the parts different from the first embodiment will be mainly described.

The pair of rotating rings 51, 52 are fitted and fixed to the outer circumferences of the respective rotating members 37, 38 via the keys 53, and the outer circumferences of the rotating rings 51, 52 engage with the rollers 59 to extend in the longitudinal direction. 60 is formed. And the rotating ring 5
1, 52 are rotated in synchronization with each other to rotate both rotating members 37, 38, and a pair of processing rollers 13, 1
Alternately swing 4 up and down.

A swinging motor 57 constituting a rotary drive source is arranged on the frame 12, and a pulley 70 for transmitting a driving force to the drive lever 58 and the drive lever 58 for the roller 13 is attached to the motor shaft of the swing motor 57. ing. Roller 5
9 is rotatably supported by the tip of the drive lever 58, and is engaged with the engagement groove 60. A belt 73 is provided between the two idle pulleys 72 and the pulleys 70 and 71.
The rotating rings 51 and 52 are rotated at the same speed and reversely.

When the swinging motor 57 is rotated, the rotating rings 51 and 52 are shown by the solid line and chain line in FIGS. 7 and 8 via the drive lever 58, the roller 59 and the engaging groove 60. It is reciprocally moved to and from the position, and a reciprocating rotary motion of a predetermined angle is imparted to both rotary members 37 and 38 via the key 53.

At the time of cutting the work 20, as shown in FIGS. 7 and 8, the rotating members 37 and 38 are integrally formed around the rotating axis S1 by a predetermined angle via the rotating rings 51 and 52. It is reciprocally rotated. Therefore, both rotating members 37, 3
When 8 rotates, the rotation axis S2 of the processing rollers 13 and 14 at a position eccentric to the rotation axis S1 by a predetermined amount,
It is rotationally displaced within a range of a predetermined angle about the rotational axis S1.

In this embodiment, the processing roller 14 is used.
Is rotationally driven by a wire traveling motor 74 via a belt 75. According to this embodiment, since the rotation axis S2 is unlikely to change depending on the swing angle of the rotation rings 51, 52, it is possible to suppress fluctuations in the tension of the wire 15.
Changes in processing conditions can be suppressed. Moreover, the slip of the wire 15 and the abrasion of the processing rollers 13 and 14 can be reduced. In addition, the processing rollers 13, 1
4 vibration can be suppressed.

The present invention can be modified and embodied as follows. (1) In the above-described embodiment, the rotary rings 51 and 52 are omitted, and the operating protrusions 54 are integrally formed on the outer circumferences of the rotating members 37 and 38, and the connecting links 5 are connected to the operating protrusions 54.
Configure to connect 5. (2) In the above-described embodiment, the swinging motor 57 causes one rotating ring 51 to reciprocate integrally with the rotating member 37, and this reciprocating rotation is performed by the connecting link 55 to the other rotating ring 52. The rotation ring 52 is transmitted.
To reciprocate integrally with the rotating member 38. (3) Each rotating member 37, 38 is formed in a disk shape, and a supporting shaft 41 is provided at an eccentric position on the end face of each of the rotating members 37, 38 so as to project from the supporting shaft 4.
1 to support the processing rollers 13 and 14. (4) In a wire saw device provided with a plurality of processing rollers of three or more, only a pair of processing rollers corresponding to the work 20 is configured to swing vertically.

Further, technical ideas other than the claims understood from the above embodiment will be described below. (A) A wire saw device in which the rotating members 37 and 38 are provided with a supporting shaft 41 at their ends, and the processing rollers 13 and 14 are supported on the outer periphery of the supporting shaft 41 via bearings 45.

With this structure, the load on the bearing 41 can be reduced. (B) The wire saw device according to claim 4, wherein the rotary drive source and the roller moving in the engagement groove each include a pulley, and a belt is hung between the pulleys. With this configuration,
The rollers can be moved smoothly.

[0048]

According to the invention described in claim 1, the wire tilts due to the movement of the link mechanism. Therefore, it is possible to obtain the tilting cycle of the wire according to the work type regardless of the traveling speed of the wire, and to eliminate the need for a large-scale rotating member that supports the processing roller and the gear mechanism. The driving force for driving is small, and the structure can be simplified to facilitate manufacture.

According to the second aspect of the invention, the swing of the link causes the eccentric rotation of the rotating member, and the eccentric rotation causes the tilting movement of the processing roller. Therefore, the tilting motion of the wire is smoothly performed, and high-precision machining is possible.

According to the third and fourth aspects of the invention, in addition to the above effects, it is possible to suppress fluctuations in the tension of the wire and suppress changes in processing conditions, and
It is possible to reduce the slip of the wire and the abrasion of the processing roller, and it is possible to suppress the vibration of the processing roller.

[Brief description of drawings]

FIG. 1 illustrates a wire saw device according to a first embodiment, which includes
Sectional drawing in 1 line.

FIG. 2 is a front view showing the entire wire saw device.

FIG. 3 is a plan view of the wire saw device.

FIG. 4 is a partial cross-sectional view showing an enlarged swing mechanism of a processing roller.

FIG. 5 is a partial plan view showing a drive configuration of the swing mechanism.

FIG. 6 is an explanatory view for explaining the operation of the swing mechanism of the processing roller.

FIG. 7 is a sectional view showing a wire saw device according to a second embodiment.

FIG. 8 is an explanatory view for explaining the operation of the swing mechanism of the processing roller.

[Explanation of symbols]

11 ... Cutting mechanism, 12 ... Device frame, 13 ... Machining drive roller, 14 ... Machining driven roller, 15 ... Cutting wire, 19 ... Work support mechanism, 20 ... Work, 37, 38
... Rotating member, 41 ... Support shaft, 46, 46a ... Rotation shaft, 5
1, 52 ... Rotation ring, 55 ... Connection link, 57 ... Motor, S1 ... Rotation axis, S2 ... Rotation axis.

Claims (4)

[Claims] 1. A spirally wound wire between a plurality of working rollers is caused to travel by the rotation of a working roller held eccentrically to tilt the wire, and a slurry containing abrasive grains is supplied to the wire. While pressing the work,
A wire saw device configured to cut the workpiece, wherein the plurality of processing rollers are connected by a link mechanism, and the wire between the processing rollers is tilted by the movement of the link mechanism. 2. The link mechanism has a plurality of rotating members and a connecting link, and each rotating member is capable of rotating the processing roller about a rotation axis decentered from the rotation axis of itself by a predetermined amount. The wire saw device according to claim 1, wherein the wire saw device supports and the connecting link connects between the rotating members. 3. A working roller, which is eccentrically held to tilt a wire spirally wound between a plurality of working rollers, is caused to travel, and a slurry containing abrasive grains is supplied to the wire. While pressing the work,
In a wire saw device for cutting the work, the plurality of processing rollers are swung by a crank mechanism connected to each processing roller, and the swinging causes the wires between the processing rollers to tilt. Wire saw device configured in. 4. Each crank mechanism includes a rotary drive source, an engagement groove provided in each rotating member, and a roller that is connected to the rotary drive source and moves in the engagement groove. The wire saw device according to claim 3, wherein the force is converted into movement of the roller in the engagement groove, each rotating member is rotated within a predetermined angle, and the processing roller is rocked.