JPH0822886A - Uniform heater - Google Patents

Abstract

PURPOSE:To allow a heating surface to have a uniform temperature distribution by allowing heat to be dispersed by a stack of metallic plates formed when a plurality of metallic plates that conduct heat well and a plurality of another metallic plates that conduct less heat are stacked alternately. CONSTITUTION:A disc-shaped heating plate 1 for heating uniformly a material to be treated is formed when a plurality of metallic plates A that conduct heat well and a plurality of metallic plates B that conduct less heat than the metallic plates A are stacked alternately. A spiral sheath heater 2 is attached to one side of this stack of metallic plates by use of brazing metal or crimping. Therefore, the heat of the heater 2 is dispersed as it is conducted by the stack of metallic plates, and a heating surface 3 that heats the side of the material opposite to the heater 2 is allowed to have a uniform surface temperature. When placed on the heating surface 3, the material to be treated can be heated uniformly, thus eliminating variations in products and enhancing quality.

Description

Detailed Description of the Invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a soaking heater which can uniformly heat a material to be processed and has a uniform temperature distribution on a heating surface.

2. Description of the Related Art Conventionally, various heaters have been developed, but none of them have a uniform temperature distribution on a heating surface, such as capable of uniformly heating a material to be processed.

DISCLOSURE OF THE INVENTION The present invention solves the conventional problems and develops a heater having a uniform temperature distribution on the heating surface, such as capable of uniformly heating a material to be processed.

The technical means in the present invention for solving this problem are as follows. A sheathed heater is formed on one side of a metal laminated plate that is formed by alternately stacking metal plates with good thermal conductivity and metal plates with poorer thermal conductivity so that the temperature distribution on the heating surface that heats the material is uniform. It is a soaking heater characterized by having attached. Furthermore, in order to make the temperature distribution even more uniform, a plurality of sheathed heaters are attached to one side of the metal laminated plate in parallel at equal intervals, and a plurality of temperature sensors are provided at key points of the metal laminated plate. The soaking heater is characterized in that a plurality of sheathed heaters are individually controlled in accordance with the measured temperature value.

As described above, the present invention is characterized in that the sheath heater is attached to one surface of the metal laminated plate formed by alternately laminating a plurality of metal plates having good heat conduction and a metal plate having relatively poor heat conduction. With this configuration, the heat of the sheathed heater is dispersed while being transmitted through the metal laminated plate, so that the temperature distribution on the heating surface for heating the material becomes uniform. Also, a plurality of sheathed heaters are attached to one side of the metal laminated plate in parallel at equal intervals, and a plurality of temperature sensors are provided at key points of the metal laminated plate. With the configuration characterized by the above control, the temperature distribution can be made even more accurate.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. In the figure, a disk-shaped heating plate 1 for uniformly heating a material to be processed includes a metal plate A (for example, a copper alloy) having good heat conduction, and a metal plate B having poor heat conduction.
The spiral sheathed heater 2 is attached to one surface of a metal laminated plate formed by alternately laminating a plurality of (for example, stainless steel) by metal brazing or pressure bonding as shown in the figure. Therefore, the heat of the sheath heater 2 is dispersed while being transmitted through the metal laminated plate, and the surface temperature of the heating surface 3 for heating the material on the opposite surface of the sheath heater 2 is made uniform. When the material to be processed is placed on the heating surface 3 and heated, the material to be processed is all uniformly heat-processed, the variation of the processed product is eliminated, and the quality is improved. As a specific example of the metal laminated plate in this example, two copper alloy plates having a thickness of 3 mm are used as the metal plate A, and 1 mm is provided on both sides as the metal plate B.
A five-layer structure was formed by using three stainless steel plates having a thickness of 0.5 mm at the center. The diameter of the metal laminated plate is about 100 mm. Furthermore, the sheath heater 2 is 1 kW (100V)
Is. Note that these are only one specific example, and the configuration, thickness, diameter, wattage of the sheath heater, and the like of the metal layer can be appropriately set as necessary. Next, FIG. 2 shows another embodiment, in which a plurality of rod-shaped sheathed heaters 2a to 2c are brazed on one surface of a rectangular metal laminated plate in parallel and at equal intervals to form a metal laminated plate. A plurality of temperature sensors 4a to 4c are provided by embedding in a place, and the plurality of sheathed heaters 2a to 2c are individually controlled by the controller 5 having the circuit configuration shown in FIG. 3 according to the temperature change of the plurality of temperature sensors 4a to 4c. It is supposed to do. Similar to FIG. 1, the metal laminated plate is formed by alternately laminating a plurality of metal plates A having good heat conduction and metal plates B having poor heat conduction. In this embodiment, a plurality of temperature sensors 4a provided at key points (evenly arranged on the entire surface of the metal laminated plate).
By controlling the respective sheath heaters in the vicinity of the respective temperature sensors by the controller 5 in accordance with the temperature measurement values of ~ 4c, it is possible to perform more accurate uniform heating. For example, if the temperature of the temperature sensor 4a is lower than that of the other temperature sensors 4b and 4c, the current value of the sheath heater 2a near the temperature sensor 4a is increased by the automatic control of the controller 5 to raise the temperature. By finely controlling the temperature, the surface temperature distribution of the heating surface 3 is made more uniform.

As described above, according to the present invention, the heat of the sheathed heater is transmitted through a metal laminated plate formed by alternately laminating a metal plate having good heat conduction and a metal plate having poor heat conduction. As a result, the temperature distribution on the heating surface for heating the material becomes uniform. Therefore, since the material to be processed can be heated uniformly at the same time, variations in processed products are eliminated and quality is improved. Also, a plurality of sheathed heaters are attached to one side of the metal laminated plate in parallel at equal intervals, and a plurality of temperature sensors are provided at key points of the metal laminated plate. With the configuration in which they are individually controlled, the temperature distribution on the heating surface can be made more uniform with even higher accuracy. Therefore, heat processing of semiconductor materials that require uniform heating with high precision,
It is possible to provide a soaking heater that can be widely used for industrial purposes such as the inspection process of measuring temperature sensors.

[Brief description of drawings]

FIG. 1 is a partial cross-sectional perspective view of a soaking heater according to an exemplary embodiment of the present invention.

FIG. 2 is a partial cross-sectional perspective view of a soaking heater according to another embodiment of the present invention.

FIG. 3 is an electric circuit diagram in the embodiment of FIG.

[Explanation of symbols]

 1 heating plate 2, 2a-2c sheathed heater 3 heating surface 4, 4a-4c temperature sensor 5 controller

Claims (2)

[Claims] 1. A soaking heater, wherein a sheathed heater is attached to one surface of a metal laminated plate formed by alternately laminating a metal plate having good heat conduction and a metal plate having poor heat conduction. . 2. A plurality of sheathed heaters are mounted on one side of a metal laminated plate in parallel and at equal intervals, and a plurality of temperature sensors are provided at important points of the metal laminated plate. The soaking heater according to claim 1, wherein the sheathed heater is controlled individually.