JPH0822018A - Production of large-sized plane image forming device - Google Patents

Production of large-sized plane image forming device

Info

Publication number
JPH0822018A
JPH0822018A JP15449694A JP15449694A JPH0822018A JP H0822018 A JPH0822018 A JP H0822018A JP 15449694 A JP15449694 A JP 15449694A JP 15449694 A JP15449694 A JP 15449694A JP H0822018 A JPH0822018 A JP H0822018A
Authority
JP
Japan
Prior art keywords
auxiliary member
insulating substrate
image forming
substrate
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15449694A
Other languages
Japanese (ja)
Inventor
Mitsutoshi Hasegawa
光利 長谷川
Tetsuya Kaneko
哲也 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15449694A priority Critical patent/JPH0822018A/en
Publication of JPH0822018A publication Critical patent/JPH0822018A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

PURPOSE:To provide a process for producing a large-sized plane image forming device which has good reproducibility and is capable of making large-area display at a high yield. CONSTITUTION:An insulating substrate 2 is installed onto an auxiliary member 1 not formed with element forming elements 3 and the ends on at least one side of this auxiliary member 1 are formed higher by as much as the thickness of this insulating substrate 2 than the other parts, by which the front surface at the ends formed higher than the other parts of the auxiliary member 1 and the front surface of the insulating substrate 2 are made flat in the process for producing the image forming device for forming the element forming elements 3 on the insulating substrate 2. In addition, the ends formed higher than the other ends of the auxiliary member 1 and the ends on at least one side of the insulating substrate 2 are butted against each other. The central part of the part where the auxiliary member 1 and the insulating substrate 2 are aligned when the insulating substrate 2 is installed on the auxiliary member 1 and the central part of the element forming elements 3 are aligned. The element forming elements 3 are formed up to the ends on at least one side of the insulating substrate 2 butted against the ends of the auxiliary member 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は大型平面画像形成装置に
関し、特に作製容易な小型パネルを組み合せて大型の表
示を可能にする大型平面画像形成装置の製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a large-sized flat image forming apparatus, and more particularly to a method of manufacturing a large-sized flat image forming apparatus which enables a large-sized display by combining small panels which can be easily manufactured.

【0002】[0002]

【従来の技術】従来の平面画像形成装置としては、例え
ばプラズマディスプレイパネルという名称で知られてい
るガス放電パネルや液晶表示パネルがある。その製造方
法としては、パネルサイズと同じ大きさの基板の中央部
に電極配線等の素子形成要素を配置する方法、および図
6に示すような、中央部に素子形成要素が配置されて切
断された基板を接続して、大型パネルを形成する方法が
知られている。
2. Description of the Related Art Conventional flat image forming apparatuses include, for example, a gas discharge panel and a liquid crystal display panel known as a plasma display panel. As a manufacturing method thereof, a method of arranging an element forming element such as an electrode wiring in the central portion of a substrate having the same size as the panel size, and a method of arranging the element forming element in the central portion and cutting the substrate as shown in FIG. A method of connecting large substrates to form a large panel is known.

【0003】図6は、従来の大型平面画像形成装置の製
造方法の一例を示す図である。図6(a)は基板の中央
付近に素子形成要素が配置作成された状態を示し、図6
(b)は基板の端部を切断して整形した状態を示し、図
6(c)は複数の基板を接続して組み合せ、大型パネル
を形成した状態を示す。
FIG. 6 is a diagram showing an example of a conventional method for manufacturing a large-sized flat image forming apparatus. FIG. 6A shows a state in which element forming elements are arranged and formed near the center of the substrate.
6B shows a state in which the ends of the substrate are cut and shaped, and FIG. 6C shows a state in which a plurality of substrates are connected and combined to form a large-sized panel.

【0004】[0004]

【発明が解決しようとしている課題】しかし、上記従来
例では次のような欠点がある。
However, the above-mentioned conventional example has the following drawbacks.

【0005】パネルサイズと同じ大きさの基板の中央に
素子形成要素等を配置する方法の場合は、大型のガラス
基板を完全な均一平面とすることは容易でない。したが
って大型平面画像形成装置の製造歩留りが低く、小型平
面画像形成装置の場合よりも著しく高価になるという問
題点があった。
In the case of the method of arranging the element forming element and the like in the center of the substrate having the same size as the panel size, it is not easy to make a large glass substrate into a completely uniform plane. Therefore, there is a problem that the manufacturing yield of the large-sized flat image forming apparatus is low and the cost is significantly higher than that of the small-sized flat image forming apparatus.

【0006】また、図6に示したように小型平面画像形
成装置を組み合せて大型平面画像形成装置を製造する方
法の場合も、基板の素子形成要素が形成されていない端
部を切断するときに欠け、割れ等が生じやすく、また基
板を組み合せるときのアライメント要求精度が高くな
る。このため、歩留りが低く、再現性に乏しい等の問題
点があった。
Also in the method of manufacturing a large-sized flat image forming apparatus by combining the small-sized flat image forming apparatus as shown in FIG. 6, when the end of the substrate where the element forming element is not formed is cut. Chips, cracks and the like are likely to occur, and the required accuracy of alignment when combining substrates is increased. Therefore, there are problems such as low yield and poor reproducibility.

【0007】さらに、補助部材を用いずに素子形成要素
等をあらかじめ基板の端部にまで形成する場合は、印刷
技術で形成すると基板のエッジによって版であるスクリ
ーンマスクのワイヤが切れたりマスクが剥がれたりする
場合もあり、歩留りが低かった。さらに、フォトリソグ
ラフィ技術で素子形成要素等を基板の端部にまで形成す
ると基板のエッジ付近のレジスト等が盛り上がってしま
い、均一なパターンを形成することが困難であった。
Further, when the element forming elements and the like are formed up to the end portion of the substrate in advance without using the auxiliary member, the wire of the screen mask as the plate is cut or the mask is peeled off by the edge of the substrate when formed by the printing technique. In some cases, the yield was low. Further, when the element forming elements and the like are formed up to the end portion of the substrate by the photolithography technique, the resist or the like near the edge of the substrate rises, and it is difficult to form a uniform pattern.

【0008】したがって本発明は、上記の課題を鑑み、
歩留りが高く、再現性が良く、大面積の表示が可能な大
型平面画像形成装置の製造方法を提供することを目的と
する。
Therefore, the present invention has been made in view of the above problems.
An object of the present invention is to provide a manufacturing method of a large-sized flat image forming apparatus which has a high yield, good reproducibility, and can display a large area.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するため
に、本発明の大型平面画像形成装置の製造方法は、絶縁
性基板に素子形成要素を形成する画像形成装置の製造方
法であり、より具体的には、あらかじめ前記絶縁性基板
を前記素子形成要素を形成しない補助部材上に設置し、
前記補助部材の少なくとも1辺の端部を前記絶縁性基板
の厚さだけ他の部分よりも高く形成して、該補助部材の
他の部分よりも高く形成した端部上面と該絶縁性基板の
上面とを平坦にし、かつ該補助部材の他の部分よりも高
く形成した端部と該絶縁性基板の少なくとも1辺の端部
とを突き合わせ、前記補助部材上に前記絶縁性基板を設
置したときの該補助部材と該絶縁性基板とを合せた部分
の中心部と前記素子形成要素の中心部とを一致させ、前
記素子形成要素を前記補助部材の端部と突き合わせた前
記絶縁性基板の少なくとも1辺の端部にまで形成する。
In order to achieve the above object, a method of manufacturing a large-sized flat image forming apparatus of the present invention is a method of manufacturing an image forming apparatus in which element forming elements are formed on an insulating substrate. Specifically, the insulating substrate is previously installed on an auxiliary member on which the element forming element is not formed,
At least one side end of the auxiliary member is formed higher than the other portion by the thickness of the insulating substrate, and the upper surface of the end formed higher than the other portion of the auxiliary member and the insulating substrate. When the upper surface is made flat and the end portion formed higher than the other portion of the auxiliary member is abutted with the end portion of at least one side of the insulating substrate, and the insulating substrate is placed on the auxiliary member. At least the insulating substrate in which the central portion of the portion where the auxiliary member and the insulating substrate are combined is aligned with the central portion of the element forming element, and the element forming element is abutted with the end portion of the auxiliary member. It is formed up to the end of one side.

【0010】特に印刷等の技術で前記素子形成要素を形
成する場合、該素子形成要素の中心部を印刷用スクリー
ンマスクの印刷有効エリアの中心部と一致させている。
In particular, when the element forming element is formed by a technique such as printing, the central portion of the element forming element is aligned with the central portion of the print effective area of the printing screen mask.

【0011】また上記本発明の大型平面画像形成装置の
製造方法は、前記素子形成要素を前記絶縁性基板に形成
する際に、アライメントマーカを該絶縁性基板と前記補
助部材とを突き合わせた接続部に形成し、該絶縁性基板
側の該アライメントマーカをアライメントさせて複数の
該絶縁性基板を接合することができる。
Further, in the method for manufacturing a large-sized flat image forming apparatus according to the present invention, when the element forming element is formed on the insulating substrate, a connection portion in which an alignment marker is brought into contact with the insulating substrate and the auxiliary member. It is possible to bond the plurality of insulating substrates by aligning the alignment marker on the side of the insulating substrate.

【0012】さらに上記本発明の大型平面画像形成装置
の製造方法は、前記素子形成要素が形成された複数の前
記絶縁性基板を共通の裏面はり合せ板上に平面的に接合
して所望の面積の表示パネルを構成することができる。
Further, in the method for manufacturing a large-sized flat image forming apparatus according to the present invention, a plurality of the insulating substrates having the element forming elements are planarly bonded on a common rear surface laminating plate to have a desired area. Display panel can be configured.

【0013】[0013]

【作用】[Action]

(1)絶縁性基板を補助部材上に設置し、絶縁性基板の
少なくとも1辺の端部と補助部材の他の部分よりも高く
形成した端部とを突き合わせて、素子形成要素を補助部
材の端部と突き合わせた絶縁性基板の少なくとも1辺の
端部にまで形成するので、素子形成要素とアライメント
マーカとを形成した絶縁性基板の端部を切断することな
く複数の絶縁性基板を接続でき、歩留りが高く、再現性
が良く、大面積の表示が可能な大型平面画像形成装置を
製造することができる。
(1) An insulative substrate is placed on an auxiliary member, and at least one end of the insulative substrate is abutted with an end formed higher than the other portions of the auxiliary member, so that the element forming element of the auxiliary member is formed. Since the insulating substrate is formed up to the end of at least one side of the insulating substrate that abuts against the end, it is possible to connect a plurality of insulating substrates without cutting the end of the insulating substrate on which the element forming element and the alignment marker are formed. In addition, it is possible to manufacture a large flat image forming apparatus which has a high yield, good reproducibility, and can display a large area.

【0014】(2)アライメントマーカを絶縁性基板と
補助部材とを突き合わせた接続部に形成し、絶縁性基板
側のアライメントマーカをアライメントさせて複数の絶
縁性基板を接合するので、絶縁性基板を容易に精度良く
接合することができ、歩留りが高く、再現性が良く、大
面積の表示が可能な大型平面画像形成装置を製造するこ
とができる。
(2) Since the alignment marker is formed in the connection portion where the insulating substrate and the auxiliary member are butted to each other, and the plurality of insulating substrates are joined by aligning the alignment marker on the insulating substrate side, the insulating substrate is It is possible to manufacture a large-sized flat image forming apparatus that can be easily and accurately joined, has a high yield, has good reproducibility, and can display a large area.

【0015】(3)素子形成要素が形成された複数の絶
縁性基板を共通の裏面はり合せ板上に平面的に接合して
所望の面積の表示パネルを構成するので、歩留りが高
く、再現性が良く、大面積の表示が可能な大型平面画像
形成装置を製造することができる。
(3) Since a plurality of insulating substrates on which element forming elements are formed are planarly bonded on a common back surface laminating plate to form a display panel having a desired area, the yield is high and the reproducibility is high. It is possible to manufacture a large-sized flat image forming apparatus capable of displaying a large area.

【0016】[0016]

【実施例】以下、第1および第2実施例によって、本発
明を詳細に説明する。
The present invention will be described in detail below with reference to the first and second embodiments.

【0017】初めに、第1実施例について説明する。図
1は、本発明の大型平面画像形成装置の製造方法の第1
実施例を示す図である。図1(a)は青板ガラス製の補
助部材1の断面図であり、図1(b)は青板ガラス製の
補助部材1の上に青板ガラス製の基板2aを設置した状
態の正面図および断面図であり、図1(c)は基板2を
接続した状態の正面図である。
First, the first embodiment will be described. FIG. 1 shows a first method of manufacturing a large-sized flat image forming apparatus according to the present invention.
It is a figure showing an example. FIG. 1A is a cross-sectional view of a soda-lime glass auxiliary member 1, and FIG. 1B is a front view and a cross-section of a soda-lime glass auxiliary member 1 on which a soda-lime glass substrate 2a is installed. FIG. 1C is a front view of the state in which the substrate 2 is connected.

【0018】図1(a)に示す青板ガラス製の補助部材
1に、図1(b)に示すように上面が平坦になるように
青板ガラス製の基板2aを設置した後、印刷技術によっ
て基板2a上に、素子形成要素3aと、基板2a、2
b、2c、2dを接合する際のアライメントのための円
形のアライメントマーカ9aを形成する。このアライメ
ントマーカ9aは、補助部材1と基板2aとの接続部分
の各辺に1箇所ずつ、それぞれ半円形となるような位置
に形成する。このとき、印刷のスクリーンマスクの有効
エリア6の中心と素子形成要素3aの中心および補助部
材1の中心とをそれぞれほぼ一致させている。同様にし
て素子形成要素3b、3c、3d、およびアライメント
マーカ9b、9c、9dをそれぞれ基板2b、2c、2
d上に形成する。
After the blue plate glass substrate 2a is placed on the blue plate glass auxiliary member 1 shown in FIG. 1 (a) so that the upper surface is flat as shown in FIG. 1 (b), the substrate is formed by a printing technique. 2a, the element forming element 3a and the substrates 2a, 2
A circular alignment marker 9a for alignment when joining b, 2c, and 2d is formed. The alignment marker 9a is formed at one position on each side of the connecting portion between the auxiliary member 1 and the substrate 2a, and is formed in a semicircular position. At this time, the center of the effective area 6 of the screen mask for printing, the center of the element forming element 3a, and the center of the auxiliary member 1 are substantially aligned with each other. Similarly, the element forming elements 3b, 3c, 3d and the alignment markers 9b, 9c, 9d are respectively attached to the substrates 2b, 2c, 2 respectively.
formed on d.

【0019】その後、図1(c)に示すように、接合部
材7によって半円形のアライメントマーカ9a、9b、
9c、9dがそれぞれ円形になるようにアライメントさ
せて、基板2a、2b、2c、2dを接合することによ
ってガス放電(プラズマ)型画像形成装置を作製する。
Thereafter, as shown in FIG. 1 (c), the semi-circular alignment markers 9a, 9b,
A gas discharge (plasma) type image forming apparatus is manufactured by aligning 9c and 9d so as to form a circular shape and joining the substrates 2a, 2b, 2c and 2d.

【0020】ただし、本発明において、補助部材は青板
ガラスに限らず、セラミックス系、石英等、基板上面と
補助部材上面の高さが一致し、補助部材に適用できるも
のであれば、構造材料に関しては特に制限なく使用でき
る。基板も青板ガラスに限らず、セラミック系、石英
等、絶縁性のものであればよい。
However, in the present invention, the auxiliary member is not limited to soda lime glass, but any structural material can be used as long as the heights of the upper surface of the substrate and the upper surface of the auxiliary member are the same, such as ceramics and quartz, and the auxiliary member can be applied. Can be used without particular limitation. The substrate is not limited to soda lime glass, but may be any insulating material such as ceramics and quartz.

【0021】さらに、素子形成要素を形成する方法とし
て印刷技術を用いたが、フォトリソグラフィ技術、真空
薄膜形成技術、エッチング技術等であってもよい。
Further, although the printing technique is used as the method for forming the element forming element, it may be a photolithography technique, a vacuum thin film forming technique, an etching technique or the like.

【0022】本発明は、ガス放電(プラズマ)型平面画
像形成装置(PDP)ばかりでなく、蛍光表示管(VF
D)、表面伝導型電子放出素子(SCE型)である画像
装置、およびその製造方法としても有効である。
The present invention is applicable not only to a gas discharge (plasma) type planar image forming apparatus (PDP) but also to a fluorescent display tube (VF).
D), an image device that is a surface conduction electron-emitting device (SCE type), and a method for manufacturing the same.

【0023】また、本発明の接合方法は4分割したパネ
ルの接合に限定されることなく、例えば2分割や3分
割、または5分割以上のパネルの接合にも応用すること
が可能である。
The joining method of the present invention is not limited to the joining of panels divided into four, but can be applied to the joining of panels divided into two, three or five or more.

【0024】次に、本発明の第2実施例について説明す
る。図2および図3は、本発明の大型平面画像形成装置
の製造方法の第2実施例を示す図であり、マトリックス
配線に形成した表面伝導型電子放出素子を素子形成要素
とする画像形成装置である。図2(a)は4分割した基
板のうちの1つを示す図であり、図2(b)は基板の全
体図である。また、図3(a)は図2(b)の中心部分
の拡大図であり、図3(b)は図2(b)の断面図であ
る。
Next, a second embodiment of the present invention will be described. 2 and 3 are views showing a second embodiment of the method of manufacturing a large-sized flat image forming apparatus of the present invention, which is an image forming apparatus using a surface conduction electron-emitting device formed on a matrix wiring as an element forming element. is there. FIG. 2A is a diagram showing one of the four divided substrates, and FIG. 2B is an overall view of the substrate. 3 (a) is an enlarged view of the central portion of FIG. 2 (b), and FIG. 3 (b) is a sectional view of FIG. 2 (b).

【0025】まず、絶縁性青板ガラス製の基板12a
を、同一材料の絶縁性青板ガラス製の補助部材11aに
設置した後、印刷技術によって順次、基板12aにAg
導体のX方向配線13を形成し、基板12aと補助部材
11aとの接続部4aに円形のアライメントマーカ35
aを厚み10μmで形成し、基板12aにガラスペース
トによる層間絶縁膜層14を厚み30μmで形成し、基
板12aにAg 導体のY方向配線15を厚み10μmで
形成し、XY方向のマトリックス配線を形成する。この
とき、マトリックス配線領域の中心部が、補助部材11
aとこれに設置した基板12aとを一体とみなしたとき
の中心部とほぼ一致させる。
First, the substrate 12a made of insulating soda lime glass
Are placed on the auxiliary member 11a made of insulating soda lime glass of the same material, and then Ag is sequentially printed on the substrate 12a by a printing technique.
A circular alignment marker 35 is formed on the connecting portion 4a between the substrate 12a and the auxiliary member 11a by forming the conductor X-direction wiring 13.
a is formed to have a thickness of 10 μm, the interlayer insulating film layer 14 made of glass paste is formed to have a thickness of 30 μm on the substrate 12a, the Y-direction wiring 15 of Ag conductor is formed to have a thickness of 10 μm on the substrate 12a, and XY-direction matrix wiring is formed. To do. At this time, the central portion of the matrix wiring region is located at the auxiliary member 11
a and the substrate 12a installed thereon are made to substantially coincide with the central portion when regarded as one body.

【0026】次に、膜厚1000ÅのNi 素子電極16
をフォトリソグラフィ法と真空蒸着法によって、電極間
隔2μmパターンで形成し、さらにPd からなる微粒子
電子放出部17を形成し、素子形成要素18aとする。
ここで、図3(a)の青板ガラス製の基板12の基板接
続部34側の端辺から微粒子電子放出部17までの距離
はそれぞれ約1mm、青板ガラス製の基板12のアライ
メント側の端辺からマトリックス配線までの距離はそれ
ぞれ約5mmである。
Next, the Ni element electrode 16 having a film thickness of 1000 Å
Are formed by a photolithography method and a vacuum deposition method in a pattern of electrode intervals of 2 μm, and a fine particle electron emission portion 17 made of Pd is formed to form an element forming element 18a.
Here, the distance from the edge of the soda lime glass substrate 12 on the side of the substrate connection portion 34 to the particle electron emission portion 17 in FIG. 3A is about 1 mm, and the edge of the soda lime glass substrate 12 on the alignment side. To the matrix wiring are each about 5 mm.

【0027】同様にして、素子形成要素18b、18
c、18d、およびアライメントマーカ35b、35
c、35dを基板12b、12c、12d上に形成す
る。
Similarly, the element forming elements 18b, 18
c, 18d, and alignment markers 35b, 35
c, 35d are formed on the substrates 12b, 12c, 12d.

【0028】その後、基板12a、12b、12c、1
2dに基板接続部34を設けて、裏面はり合せ板25上
で、アライメントマーカ35a、35b、35c、35
dがそれぞれ円形になるようアライメントし、接着剤2
6によって接合する。さらに枠部材接続部22によって
基板12に設置されている枠部材23を通して、発光体
19を形成したフェースプレート20と一体化し、画像
形成素子24とする。駆動処理回路21はマトリックス
配線部分に接続されている。
After that, the substrates 12a, 12b, 12c, 1
2d is provided with a board connecting portion 34, and on the back side laminating plate 25, alignment markers 35a, 35b, 35c, 35 are provided.
Align so that d is circular, and glue 2
Join by 6. Further, through the frame member 23 installed on the substrate 12 by the frame member connecting portion 22, it is integrated with the face plate 20 on which the light emitting body 19 is formed to form an image forming element 24. The drive processing circuit 21 is connected to the matrix wiring portion.

【0029】以上第1および第2実施例においては、ア
ライメントマーカの形状は円形として説明したが、円形
(楕円含む)に限らず、多重の円形(楕円も含む)、多
角形等であっても良い。また、アライメントマーカをX
方向配線13の作成時に形成したが、層間絶縁膜層1
4、Y方向配線15、およびNi 素子電極16のいずれ
かの作成時に形成してもよい。さらに、アライメントマ
ーカの形成位置は、素子形成要素に接していなければ良
く、基板接続部34の中央部にあっても良いし、1辺の
アライメントに複数個設けても良い。
In the first and second embodiments, the shape of the alignment marker has been described above as a circle, but the shape is not limited to a circle (including an ellipse), but may be a multiple circle (including an ellipse) or a polygon. good. Also, set the alignment marker to X
Although formed when the direction wiring 13 was formed, the interlayer insulating film layer 1
4, the Y-direction wiring 15 and the Ni element electrode 16 may be formed when any one of them is formed. Furthermore, the alignment marker may be formed at a position not in contact with the element forming element, may be at the center of the substrate connecting portion 34, or may be provided at a plurality of positions for one side alignment.

【0030】図4および図5は、本発明の大型平面画像
形成装置の製造方法における補助部材の他の実施例を示
す図である。図4(a)は正面図、(b)はA−A’断
面図であり、図5(a)は正面図、(b)はB−B’断
面図である。補助部材がこれらの形状の場合は、図4で
は基板の4辺の端部まで、図5では基板の3辺の端部ま
で、素子形成要素を形成することができる。このため、
本発明の第1および第2実施例で説明した補助部材に比
較して、基板上のより広範囲に素子形成要素を形成する
ことができる。
FIGS. 4 and 5 are views showing another embodiment of the auxiliary member in the method of manufacturing the large-sized flat image forming apparatus of the present invention. 4A is a front view, FIG. 4B is a sectional view taken along line AA ′, FIG. 5A is a front view, and FIG. 5B is a sectional view taken along line BB ′. When the auxiliary member has these shapes, the element forming element can be formed up to the end portions of the four sides of the substrate in FIG. 4 and up to the end portions of the three sides of the substrate in FIG. For this reason,
As compared with the auxiliary member described in the first and second embodiments of the present invention, the element forming element can be formed in a wider area on the substrate.

【0031】[0031]

【発明の効果】以上説明したように本発明は、以下に記
述する効果を有する。
As described above, the present invention has the effects described below.

【0032】(1)絶縁性基板を補助部材上に設置し、
絶縁性基板の少なくとも1辺の端部と補助部材の他の部
分よりも高く形成した端部とを突き合わせて、素子形成
要素を補助部材の端部と突き合わせた絶縁性基板の少な
くとも1辺の端部にまで形成することによって、素子形
成要素とアライメントマーカとを形成した絶縁性基板の
端部を切断することなく複数の絶縁性基板を接続でき、
スクリーンマスクのワイヤの断線、マスクの損傷がな
く、また、欠け、割れ等で基板を破損することがなく、
歩留りが高く、再現性が良く、大面積の表示が可能な大
型平面画像形成装置を製造することができるという効果
を有する。
(1) An insulating substrate is placed on the auxiliary member,
An end of at least one side of the insulative substrate in which the element forming element is in contact with the end of the auxiliary member by abutting the end of at least one side of the insulative substrate and the end formed higher than the other portion of the auxiliary member. By forming up to the part, it is possible to connect a plurality of insulating substrates without cutting the end of the insulating substrate on which the element forming element and the alignment marker are formed,
There is no wire breakage of the screen mask or damage to the mask, and there is no damage to the substrate due to chipping, cracking, etc.
There is an effect that it is possible to manufacture a large-scale flat image forming apparatus which has a high yield, good reproducibility, and can display a large area.

【0033】(2)アライメントマーカを絶縁性基板と
補助部材とを突き合わせた接続部に形成し、絶縁性基板
側のアライメントマーカをアライメントさせて複数の絶
縁性基板を接合することによって、絶縁性基板を容易に
精度良く接合することができ、歩留りが高く、再現性が
良く、大面積の表示が可能な大型平面画像形成装置を製
造することができるという効果を有する。
(2) An insulating substrate is formed by forming an alignment marker at a connecting portion where an insulating substrate and an auxiliary member are butted against each other, aligning the alignment marker on the insulating substrate side, and joining a plurality of insulating substrates. Can be easily joined with high precision, yield is high, reproducibility is good, and a large-scale flat image forming apparatus capable of displaying a large area can be manufactured.

【0034】(3)素子形成要素が形成された複数の絶
縁性基板を共通の裏面はり合せ板上に平面的に接合して
所望の面積の表示パネルを構成することによって、歩留
りが高く、再現性が良く、大面積の表示が可能な大型平
面画像形成装置を製造することができるという効果を有
する。
(3) A plurality of insulating substrates having element forming elements are planarly bonded on a common rear surface laminating plate to form a display panel having a desired area, so that the yield is high and reproduction is possible. It is possible to manufacture a large-sized flat image forming apparatus which has good properties and can display a large area.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の大型平面画像形成装置の製造方法の第
1実施例を示す図
FIG. 1 is a diagram showing a first embodiment of a method for manufacturing a large-sized flat image forming apparatus of the present invention.

【図2】本発明の大型平面画像形成装置の製造方法の第
2実施例を示す図
FIG. 2 is a diagram showing a second embodiment of a method for manufacturing a large-sized flat image forming apparatus of the present invention.

【図3】本発明の大型平面画像形成装置の製造方法の第
2実施例を示す図
FIG. 3 is a diagram showing a second embodiment of a method for manufacturing a large-sized flat image forming apparatus of the present invention.

【図4】本発明の大型平面画像形成装置の製造方法にお
ける補助部材の他の実施例を示す図
FIG. 4 is a diagram showing another embodiment of the auxiliary member in the manufacturing method of the large-sized flat image forming apparatus of the present invention.

【図5】本発明の大型平面画像形成装置の製造方法にお
ける補助部材の他の実施例を示す図
FIG. 5 is a diagram showing another embodiment of the auxiliary member in the method of manufacturing a large-sized flat image forming apparatus of the present invention.

【図6】従来の大型平面画像形成装置の製造方法の一例
を示す図
FIG. 6 is a diagram showing an example of a method for manufacturing a conventional large-scale flat image forming apparatus.

【符号の説明】[Explanation of symbols]

1、11a 補助部材 2、12 基板 3、18 素子形成要素 4 基板と補助部材との接続部 6 スクリーンマスクの有効エリア 7 接合部材 9、35 アライメントマーカ 13 X方向配線 14 層間絶縁膜層 15 Y方向配線 16 Ni 素子電極 17 微粒子電子放出部 19 発光体 20 フェースプレート 21 駆動処理回路 22 枠部材接続部 23 枠部材 24 画像形成素子 25 裏面はり合せ板 26 接着剤 34 基板接続部 1, 11a Auxiliary member 2, 12 Substrate 3, 18 Element forming element 4 Connection part between substrate and auxiliary member 6 Effective area of screen mask 7 Joining member 9, 35 Alignment marker 13 X-direction wiring 14 Inter-layer insulating film layer 15 Y direction Wiring 16 Ni Element electrode 17 Particulate electron emission section 19 Light emitter 20 Face plate 21 Drive processing circuit 22 Frame member connecting section 23 Frame member 24 Image forming element 25 Backside bonding plate 26 Adhesive 34 Board connecting section

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 絶縁性基板に素子形成要素を形成する画
像形成装置の製造方法において、 前記絶縁性基板を前記素子形成要素を形成しない補助部
材上に設置し、 前記補助部材の少なくとも1辺の端部を前記絶縁性基板
の厚さだけ他の部分よりも高く形成して、該補助部材の
他の部分よりも高く形成した端部上面と該絶縁性基板の
上面とを平坦にし、かつ該補助部材の他の部分よりも高
く形成した端部と該絶縁性基板の少なくとも1辺の端部
とを突き合わせ、 前記補助部材上に前記絶縁性基板を設置したときの該補
助部材と該絶縁性基板とを合せた部分の中心部と前記素
子形成要素の中心部とを一致させ、 前記素子形成要素を前記補助部材の端部と突き合わせた
前記絶縁性基板の少なくとも1辺の端部にまで形成する
ことを特徴とする、大型平面画像形成装置の製造方法。
1. A method of manufacturing an image forming apparatus for forming an element forming element on an insulating substrate, wherein the insulating substrate is placed on an auxiliary member on which the element forming element is not formed, and at least one side of the auxiliary member is provided. The end portion is formed higher than the other portion by the thickness of the insulating substrate, and the upper surface of the end portion formed higher than the other portion of the auxiliary member and the upper surface of the insulating substrate are made flat, and When the insulating substrate is placed on the auxiliary member, the insulating member and the insulating member are insulated from each other by abutting an end portion formed higher than the other portion of the auxiliary member and an end portion of at least one side of the insulating substrate. The central portion of the portion where the substrate is combined with the central portion of the element forming element are aligned with each other, and the element forming element is formed up to at least one side edge of the insulating substrate that is abutted against the end portion of the auxiliary member. Large size, characterized by Method for manufacturing a surface image forming apparatus.
【請求項2】 前記素子形成要素を前記絶縁性基板に形
成する際に、アライメントマーカを該絶縁性基板と前記
補助部材とを突き合わせた接続部に形成し、該絶縁性基
板側の該アライメントマーカをアライメントさせて複数
の該絶縁性基板を接合する、請求項1に記載の大型平面
画像形成装置の製造方法。
2. When forming the element forming element on the insulating substrate, an alignment marker is formed at a connecting portion where the insulating substrate and the auxiliary member are abutted, and the alignment marker on the side of the insulating substrate. The method for manufacturing a large-sized flat image forming apparatus according to claim 1, wherein the plurality of insulating substrates are bonded by aligning the two.
【請求項3】 前記素子形成要素が形成された複数の前
記絶縁性基板を共通の裏面はり合せ板上に平面的に接合
して所望の面積の表示パネルを構成する、請求項1また
は2に記載の大型平面画像形成装置の製造方法。
3. The display panel having a desired area is formed by planarly bonding a plurality of the insulating substrates having the element forming elements on a common back surface laminating plate. A method for manufacturing the large-sized flat image forming apparatus described.
JP15449694A 1994-07-06 1994-07-06 Production of large-sized plane image forming device Pending JPH0822018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15449694A JPH0822018A (en) 1994-07-06 1994-07-06 Production of large-sized plane image forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15449694A JPH0822018A (en) 1994-07-06 1994-07-06 Production of large-sized plane image forming device

Publications (1)

Publication Number Publication Date
JPH0822018A true JPH0822018A (en) 1996-01-23

Family

ID=15585523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15449694A Pending JPH0822018A (en) 1994-07-06 1994-07-06 Production of large-sized plane image forming device

Country Status (1)

Country Link
JP (1) JPH0822018A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071819A (en) * 2000-08-31 2002-03-12 Toshiba Corp Detector unit, radio-computed tomograph and method of manufacturing for radio-computed tomograph

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071819A (en) * 2000-08-31 2002-03-12 Toshiba Corp Detector unit, radio-computed tomograph and method of manufacturing for radio-computed tomograph

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