JPH0821746A - Roll-like stamper for optical encoder scale and manufacture of optical encoder scale using the same - Google Patents

Abstract

PURPOSE:To accurately manufacture a roll-like stamper with a low cost by providing light transmission forming parts and light cut-off forming parts out of a flat surface and a prismatic surface at the stamper, and alternately disposing them at a predetermined interval. CONSTITUTION:Grooves each having a depth of about 60mum and a width of about 6mm are formed as slide surface forming parts 3 on a phosphor bronze board 5 which is mirror-finished, and a plurality of pattern forming parts 4 corresponding to the scale of a width of about 4mm are formed at a pitch of about 10mm. Flat light transmission forming parts 1 and prismatic light cut-off forming parts 2 are alternately formed. Thereafter, it is cleaned, and hard nickel-plated to obtain a phosphor bronze substrate 7. Ultraviolet-curable resin 8 is dropped on an original board 7, a glass board 10 which is treated with silane coupling agent is superposed, the resin 8 is ultraviolet-cured, and peeled from the substrate 7 to obtain a glass original board 11. A metal film 12 is formed on the board 11 by an electroforming method, polished, peeled from the board 11, trimmed, a fastener is welded to obtain a flexible stamper 13, and mounted at a roller having grooves of the same shape as the fastener to obtain a roll-like stamper 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scale, and more specifically, to a roll stamper used for forming rollers and grooves of an optical scale suitable for use in an optical encoder and the like, and a method for manufacturing the optical scale. It is about. Furthermore, an optical encoder using it,
The present invention relates to an information printing device.

[0002]

2. Description of the Related Art Conventionally, in information devices such as printers, optical encoders have often been used to detect the position and speed of movable parts such as carriages.

Such an optical encoder is usually fixed to a movable portion, projects light on an optical scale having an optical code recorded thereon, and photoelectrically converts the modulated light to thereby move the position of the movable portion. It was configured to detect the information as an encoded electrical signal.

In general, as such an optical scale,
The structure shown below has been used. (1) An optical scale provided with slits by etching a metal plate. (2) Silver on a transparent substrate such as glass or plastic,
An optical scale formed by forming a metal such as copper, chromium or aluminum by a method such as vapor deposition or sputtering and etching only the metal layer into a slit shape. (3) Using a photomask obtained by forming a photoresist on a mask blank (having a metal film formed on glass), drawing a slit pattern, and then performing patterning and etching, the silver salt film is exposed. An optical scale made by applying a development process.

However, in these methods, in (1), since the slit width that can be etched is limited to more than twice the metal thickness, a fine code is formed in consideration of the rigidity and durability of the optical scale. It was difficult to do. or,
In (2) and (3), there are drawbacks that the manufacturing process of the optical scale is complicated and the cost is high because the etching process is performed.

Particularly, in the case of an optical scale formed by exposing a silver salt film to light and subjecting it to development processing, the cost of the silver salt film itself is high, and there is a limit to the cost reduction of the optical scale.

Therefore, Igaki et al. Disclose that an optical scale having the shape disclosed in Japanese Patent Laid-Open No. 62-3616 can be used to provide an inexpensive optical scale by injection molding or compression molding.

When the optical encoder having the above-described shape is mounted on an information device such as a printer, the scale length is 210 mm or more for printing on A4 size paper in order to detect the position and speed of a movable part such as a carriage. is there,
The scale width is usually about 3 to 15 mm.

As described above, when the optical scale having a slender elongated shape is molded by injection, the thickness of the optical scale has to be increased, which imposes restrictions on the design of the optical scale. Also, since it is a single-wafer processing, the productivity is very low. On the other hand, regarding compression molding, although a pattern corresponding to a large number of optical scales can be arranged on one stamper, the molding time is long and the productivity is low as a result of the processing for one sheet.

As described above, the conventionally used optical scale cannot be mounted on a low-priced general-purpose printer or the like because the manufacturing cost is high regardless of which manufacturing method is used.

[0011]

On the other hand, there is a roller-groove method (RG method) as a method for producing a low-cost optical scale which has high productivity and low material cost.

That is, a non-light-transmitting portion having a marking portion in a part of the light-transmitting member, the marking portion having a light-transmitting portion, and an inclined surface whose incident angle with respect to an incident light ray is set to a critical angle or more. In a method of manufacturing an optical scale in which and are alternately formed, 1. 1. First step of manufacturing a roll stamper by fixing a stamper having a pattern corresponding to a desired optical scale to a roller. 2. Second step of extruding a thermoplastic resin having a light transmittance of 50% or more at a wavelength to be used from an T-die in a melted state by an extruder. The molten resin is sandwiched between the roll stamper and the mirror surface roll to form a sheet, and at the same time, a series of steps including the third step of transferring the pattern of the optical scale is included, and the thickness is 0.1 to 1.0 mm.
By using the method for producing an optical scale, which is characterized by producing the sheet-like optical scale of, it was possible to find a drastic cost reduction possibility that was impossible in the past.

For example, in the case of manufacturing a thin plate-shaped molded product, the conventional compression method has a cycle of heating and cooling, and the molding tact time for one time is at least about 3 minutes, so that one stamper can be used. Even if the pattern corresponding to the scale of 60 pieces is provided, the production amount per minute is only 20 pieces.

On the other hand, in the RG method of the present invention, even if a pattern corresponding to 15 scales is provided on one stamper, two stampers can be attached to one roller and the molding speed can be increased. Since high-speed molding of 1 to 7 m / min is possible, the production amount per minute is 30 to 210 and the productivity is 1.5 to 10.5 times that of the compression method.

Further, in the RG method, the molding is performed in a state where the resin is melted, so that the molding pressure can be smaller than that in the compression method. That is, the RG method has an advantage that the stamper has good durability.

As described above, the RG method can provide a low-cost molded product because of its extremely high productivity and good durability of the stamper. However, when molding is performed by this method, the cost is further increased. Various measures are required to lower it.
For that purpose, it is necessary to analyze the factors that affect the cost and eliminate the factors that increase the cost.

When the above-described optical scale is manufactured by this method, the costs are most affected by the depreciation cost due to the price of the molding machine and the defective rate of the molded product. In order to reduce the cost of the molding machine, it is effective to narrow the width of the roll and make it compact. In addition, a compact molding device is easier to improve roll mirror surface accuracy, roll eccentricity accuracy, and other accuracy, and is advantageous in terms of installation space, easy handling, safety, cost reduction of incidental equipment, etc. Is.

On the other hand, when a long optical kale is manufactured using an apparatus having a narrow forming roll width, the light transmission forming portion and the light blocking forming portion on the roll stamper are arranged parallel to the forming direction. As a result of various studies, it has been found as a result of various examinations that when molding is performed in this state, air remains at the boundary between the light transmission forming portion and the light blocking forming portion, resulting in a high defect rate.

Therefore, preventing the occurrence of the above-mentioned bubble defects has been an indispensable technical problem in manufacturing a high quality and low cost optical scale. The present invention has been made in order to solve the problems of the prior art as described above,
The purpose is to:

That is, the object of the present invention is to provide a roll-shaped stamper with various air residual prevention mechanisms,
A roll for an optical scale that enables the light transmission forming part and the light blocking forming part on the roll-shaped stamper to be arranged parallel to the molding direction, and can manufacture a long optical scale with high accuracy and at low cost. It is to provide a stamper.

Another object of the present invention is to make it possible to manufacture a continuous optical scale with high precision and at low cost by using a directly stamped roll stamper. Further, an object of the present invention is to use a roll-shaped stamper for an optical scale, which is provided with a light transmission forming portion and a light shielding forming portion, each of which is composed of a mirror surface and a rough surface. An object of the present invention is to provide an optical scale that can be manufactured with high accuracy and low cost without bubble defects by making the step as small as possible.

Another object of the present invention is to achieve an improvement in contrast by manufacturing an optical scale in which an ink is formed on the light blocking portion. Further, the object of the present invention is to
By using the optical scale manufactured by the present invention, a main scale and a subscale are manufactured, a light emitting element and a light receiving element are incorporated, and an optical encoder is manufactured. It is to provide a high-performance and inexpensive optical encoder with a very good rate.

[0023]

DISCLOSURE OF THE INVENTION The present invention is to eliminate air bubble defects generated at a boundary portion between a light transmitting portion and a light shielding portion of an optical scale formed by a roller / groove forming method. An object is to provide a roll-shaped stamper for an optical scale provided with a prevention mechanism.

That is, curved surfaces are formed on the flat surface corresponding to the light transmission forming portion and the light blocking forming portion and the prism surface, and the unevenness of the roll-shaped stamper is provided within a range that does not adversely affect the optical characteristics of the optical encoder scale. A roll-shaped stamper for an optical scale, which has a smooth shape.

Specifically, in a roll-shaped stamper in which the light transmission forming portion and the light blocking formation portion are arranged in parallel to the molding direction, the light transmission forming portion has a concave curved surface (inverted semi-cylindrical shape).
By this, the angle at which the boundary between the light transmission forming portion and the light blocking forming portion contacts the thermoplastic synthetic resin is set to 135 degrees or more.

Further, in a method for producing an optical encoder scale by forming a light transmitting portion and a light shielding portion on a thermoplastic synthetic resin sheet by the roll stamper of the present invention by using an extrusion method, the roll stamper is manufactured. A light transmission forming portion and a light blocking forming portion are provided, each of which is composed of a plane and a quadrangular pyramid.

Further, in a roll-shaped stamper in which the light transmission forming portion and the light shielding formation portion are arranged perpendicular to the molding direction, the light transmission forming portion has a convex curved surface (kamapo shape) and the light shielding formation portion. The inclination angle of the molding direction is 45 degrees or less.

Further, in the roll-shaped stamper in which the light transmission forming portion and the light shielding forming portion are arranged perpendicularly to the molding direction, both the light transmission forming portion and the light shielding forming portion are convex curved surfaces (kamaboko shape). Is characterized in that.

In the roll-shaped stamper in which the light transmission forming portion and the light blocking forming portion are arranged perpendicular to the molding direction, a pattern corresponding to the optical encoder scale adjacent to the sliding surface forming portion is provided. It is characterized in that they are arranged by being shifted by an odd multiple of 0.5 pitch.

Further, in the method for producing an optical encoder scale by forming a light transmitting portion and a light shielding portion on a thermoplastic synthetic resin sheet by the roll stamper of the present invention, the roll stamper has a light transmission forming portion. And a light-blocking forming portion, each of which is composed of a mirror surface and a rough surface, and the mirror surface and the rough surface are alternately arranged at a constant pitch interval.

According to the present invention, the roll-shaped stamper for the optical scale is provided with the air residual prevention mechanism,
It is possible to prevent the occurrence of bubble defects that adversely affect the optical characteristics.

Further, in the roll-shaped stamper in which the light transmission forming part and the light blocking forming part are arranged in parallel to the molding direction, the angle of the light blocking forming part in the molding direction is made obtuse to the limit of the critical angle. In particular, it is possible to prevent the occurrence of bubble defects that adversely affect the optical characteristics. (Here, the critical angle means a limit angle at which the light blocking forming portion formed by using the roll stamper reflects light.)
Further, the height of the light-shielding forming portion is higher than the height of the light-transmitting forming portion, which is obtained by forming ink only on the light-shielding forming portion after molding with a roll-shaped stamper for an optical scale. The optical scale provided prevents the occurrence of bubble defects.

The present invention will be described in detail below. FIG.
(B) is a schematic view of a pattern corresponding to the scale of the flexible stamper provided with the air residual prevention mechanism of the present invention shown in Example 1, 1 is a light transmission forming part of an optical scale, 2 is an optical scale 3 is a light-shielding forming portion, 3 is a sliding surface forming portion for subscale sliding, and 22 is a stamper provided with an air residual prevention mechanism. FIG. 1A is a perspective view of a roll stamper in which a light transmission forming portion and a light blocking forming portion are arranged in parallel to the molding direction, 13 is a flexible stamper of the present invention, and 20 is a flexible stamper. It is a pattern corresponding to the scale, 14
Is a roll stamper formed by fixing a flexible stamper to a roller.

FIG. 2B is a view at the moment when the molten resin is sandwiched between the stamper having a curved surface and the mirror surface roller in the light transmission forming portion of the present invention, and the broken line x-- in FIG. 1B.
It is a schematic sectional drawing when it cut | disconnects by x '. 2 in the figure
4 is a molten resin.

FIG. 2 (A) is a view at the moment when the molten resin is sandwiched between the conventional stamper having no air residual prevention mechanism and the mirror surface roller, and cut along the broken line yy 'in FIG. It is a schematic sectional drawing when doing. In the figure, reference numeral 23 is a bubble defect generated at the boundary between the light transmitting portion and the light blocking portion of the optical scale.

FIG. 10 is a process explanatory view showing a method for manufacturing a phosphor bronze master, 5 is a phosphor bronze substrate which is mirror-finished, 3 is a sliding surface forming portion which is processed by a sintered diamond tool, and 4 is This is a pattern forming portion corresponding to a scale, which is obtained by processing a sliding surface forming portion on a phosphor bronze substrate that has been mirror-finished. Reference numeral 20 is a pattern corresponding to a scale formed by performing a scribe line processing with a single crystal diamond tool, and reference numeral 7 is a phosphor bronze master in which a pattern corresponding to the scale is formed on a mirror surface portion of a phosphor bronze substrate.

FIG. 11 is a process explanatory view showing a method for manufacturing a flexible stamper of the present invention. In FIG. 11, 7 is a phosphor bronze master having a pattern corresponding to a scale formed on a mirror surface portion of a phosphor bronze substrate, and 8 Is an ultraviolet curing resin for transferring the pattern corresponding to the scale from the phosphor bronze master,
10 is a glass substrate for manufacturing a glass master, and 11 is a glass master having a scale pattern formed on the glass substrate. 9 is a conductive film for forming a metal film on the glass master, 12 is a metal film formed on the glass master on which the conductive film is formed by electroforming, 13 is a metal film polished to a predetermined thickness, It is a flexible stamper obtained by peeling a conductive film and a metal film together from a glass master.

FIG. 12 is a schematic diagram showing the shape of a single crystal diamond bite. In FIG. 12, 6 is a single crystal diamond bite used when manufacturing a stamper having a curved surface in the light transmission forming portion of the present invention. It is A.

FIG. 9 is a schematic sectional view of the RG device.
8 is an extruder for extruding pelletized resin such as PC pellets at a constant speed while melting, 16 is a T-die for bringing the molten resin extruded from the extruder into a molded shape, and 14 is a melt extruded from the T-die. A roll-shaped stamper for transferring a fine pattern of irregularities such as a light transmitting portion, a light shielding portion, and a sliding surface to a resin, and 15 is a mirror surface roller for adjusting the plate thickness of the optical scale and for adjusting the mirror surface. ,
Reference numeral 17 is a continuous sheet for an optical scale obtained by passing a molten resin extruded from a T die of an extruder between a roll stamper and a mirror surface roller, and transferring an uneven pattern of the roll stamper with an appropriate molding pressure. Is.

FIG. 13 is a schematic view showing the shape of a single crystal diamond tool used in manufacturing the stamper shown in Comparative Example 1, which does not have an air residual prevention mechanism.
Is a single crystal diamond bite B.

FIG. 3 is a perspective view of a stamper having no air remaining prevention mechanism. In FIG. 3, 21 is a stamper having no air remaining prevention mechanism. The break line yy '
FIG. 2 (A) shows a schematic cross-sectional view taken along the line.

FIG. 8 shows a flexible stamper in which a light transmission forming portion and a light blocking forming portion are arranged in the molding direction.

FIG. 4 is a schematic view of a pattern corresponding to the scale of the flexible stamper provided with the air residual prevention mechanism of the present invention shown in Embodiment 2. In FIG. The cut-off forming portion is a roll stamper arranged perpendicularly to the forming direction.

FIG. 7 is a schematic view of a phosphor bronze master for manufacturing a flexible stamper according to the third embodiment, which is provided with an air residual prevention mechanism in which the light blocking formation portion is a quadrangular pyramid.

FIG. 14 is a schematic diagram showing the shape of a single crystal diamond bite used in manufacturing the stamper having no air residual prevention mechanism shown in Example 3, 26
Is a single crystal diamond bite C, and 27 is an edge portion which may be rounded.

FIG. 5 is a schematic view of a pattern corresponding to a scale of a flexible stamper provided with an air residual prevention mechanism in which the light blocking formation portion is a quadrangular pyramid. FIG. 6 shows Example 4.
FIG. 3 is a schematic diagram of a staggered pattern flexible stamper shown in FIG.

FIG. 15 is a process explanatory view showing a method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, as shown in FIG. In the figure, 32 is a patterning pattern obtained by applying photoresist, exposing and developing, 28 is a patterned glass substrate on which a patterning pattern is formed, 29 is a patterned glass substrate. Then, a mirror surface forming portion obtained by removing the remaining resist, 30 is a rough surface forming portion obtained in the same manner, and 31 is a mother stamper in which a mirror surface forming portion and a rough surface forming portion are provided on a glass substrate.

FIG. 16 is a schematic diagram of a patterned glass substrate shown in Example 5, and FIG. 17 is a schematic diagram of a flexible stamper manufactured in Example 5, in which 33 is a mirror surface forming portion. And a rough surface forming portion are alternately arranged (a stamper having a mirror surface pattern in a rough surface).

FIG. 18 is a process explanatory view showing a method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, as shown in FIG. In the figure, 34 is a mask member obtained by forming slits of a predetermined pattern of an optical encoder scale on a metal plate. Three
Reference numeral 5 is a nozzle of a sandblasting machine for processing the rough surface forming portion after the mask member is brought into close contact with the surface of the glass substrate. FIG. 19 is a schematic view showing a mask member, in which 37 is a metal plate as a material of the mask member, and 36 is a slit for partially roughening the glass substrate.

FIG. 20 is a schematic diagram of a flexible stamper manufactured in Example 6, in which 38 is a stamper B (a rough surface is formed in the mirror surface) in which mirror surface forming portions and rough surface forming portions are alternately arranged. It is a stamper on which the surface pattern is arranged.

FIG. 21 is a process explanatory view showing a method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, as shown in FIG. In the figure, 39 is a metal plate having a rough surface for providing a rough surface forming portion.

FIG. 22 is a schematic view of a pattern corresponding to the scale of the stamper manufactured in Example 7. FIG. 23 is a process explanatory view showing a method for manufacturing a roll-shaped stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, as shown in FIG. In the above, reference numeral 40 is a metal plate having a mirror surface for providing a mirror surface forming portion. FIG. 24 is a schematic view of a pattern corresponding to the scale of the stamper manufactured in Example 8.

FIG. 25 is a process chart showing a method for manufacturing a directly stamped roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion, each of which is composed of a mirror surface and a rough surface, as shown in FIG. FIG. 41, in which FIG.
Is a directly stamped roll-shaped stamper, in which mirror surface forming portions and rough surface forming portions are alternately arranged, which is manufactured by a sandblasting machine after fixing a mask member on the molding surface of a mirror surface roller.

FIG. 26 is a process explanatory view showing a method for manufacturing a directly stamped roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light shielding forming portion, as shown in FIG. Reference numeral 42 is a direct stamped roll-shaped stamper, which is manufactured by subjecting a mirror surface roller to a carving process and in which light transmission forming portions and light blocking forming portions are alternately arranged. Reference numeral 43 denotes a direct marking roller for carrying out marking processing.

FIG. 27 is a process explanatory view showing a method for manufacturing a roll-shaped stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, as shown in Embodiment 11. In the figure, reference numeral 44 is a recess provided to make the height of the rough surface forming portion higher than that of the mirror surface forming portion, and 45 is a rough surface manufactured by forming an ultraviolet curing resin in the recess and flattening it. This is a flexible stamper in which the height of the forming portion is higher than that of the mirror surface forming portion.

FIG. 28 is a schematic diagram for producing a continuous sheet for an optical scale on which an ink is formed, as shown in Example 12, in which 46 is an optical scale conveyed from a take-up device. Supply roller for applying ink to the continuous sheet for application, 48 is an auxiliary roller A for ensuring more reliable application of ink, and 47 is unnecessary ink for the ink applied to the continuous sheet for optical scale. Removing roller for removing the ink, 49 is an auxiliary roller B for ensuring the removal of the ink more reliably, and 56 is for forming the ink by drying the ink formed only on the rough surface portion (light blocking portion). The warm air dryer 55 is an ink-formed continuous sheet for an optical scale, in which ink is formed only on the rough surface portion (light blocking portion).

FIG. 29 (A) is a detailed cross-sectional view of an ink-formed continuous sheet for an optical scale shown in Example 12,
FIG. 29B is a detailed cross-sectional view when ink is formed on the continuous sheet for an optical scale in which the height of the rough surface portion is higher than that of the mirror surface portion, which is shown in Comparative Example 2, and in FIG. 50 is the ink formed on the rough surface (light blocking portion), 52 is the light blocking portion of the optical scale, 51 is the light transmitting portion of the optical scale, and 53 is the height of the rough surface forming portion is higher than that of the mirror surface forming portion. A continuous sheet for an optical scale manufactured by the flexible stamper (45), and 55 is a continuous sheet for an optical scale in which ink having an improved contrast is formed by forming ink on the rough surface portion (light blocking portion). Further, FIG.
In (B), 54 is a continuous sheet for an optical scale manufactured by a flexible stamper (38) in which the height of the rough surface forming portion is lower than that of the mirror surface forming portion.

FIG. 30 is a perspective view showing the structure of the optical encoder shown in the thirteenth embodiment, 60 is the main scale manufactured by using the continuous sheet for the optical scale formed in the first embodiment, and 59 is the same. A subscale manufactured by using the continuous sheet for an optical scale formed in Example 1,
Reference numeral 57 is a light emitting element that is a light source, and 58 is a light receiving element that receives a light beam that has passed through the main scale and the subscale.

FIG. 31 is a perspective view showing the structure of the optical encoder shown in Comparative Example 3, and 61 is a main scale made of a photoengraving film.

The preferred embodiments of the present invention are shown below. (1) A method for producing an optical encoder scale by forming a light transmission part and a light blocking part on a thermoplastic synthetic resin sheet by a roll stamper using an extrusion method, wherein a light transmission forming part is formed on the roll stamper. A roll stamper for an optical encoder scale, characterized in that each of which a light blocking formation part is provided is composed of a plane and a prism surface, and the plane and the prism surface are alternately arranged at a constant pitch interval.

(2) In the method of producing an optical encoder scale by forming a light transmitting portion and a light shielding portion on a thermoplastic synthetic resin sheet by a roll stamper by using an extrusion method, air remaining in the roll stamper is used. As a prevention mechanism, a flat surface or a curved surface (R surface) is formed on the prism surface, and the uneven shape of the roll-shaped stamper is made gentle within a range that does not adversely affect the optical characteristics of the optical encoder scale. (1) Roll-shaped stamper for optical encoder scale.

(3) In the method for producing an optical encoder scale by forming a light transmitting portion and a light shielding portion on a thermoplastic synthetic resin sheet by a roll stamper using an extrusion method, the roll stamper is coated with a light beam. A roll stamper for an optical encoder scale, characterized in that a transmission forming part and a light blocking forming part are provided, each of which is composed of a plane and a quadrangular pyramid, and the plane and the quadrangular pyramid are alternately arranged at a constant pitch interval.

(4) Step of processing the sliding surface forming portion on the phosphor bronze substrate, then step of processing the light transmission forming portion and the light blocking forming portion, sliding surface forming portion, light transmission forming portion, light blocking formation The process of manufacturing a phosphor bronze master (father stamper) by forming a hard film on the surface where the parts are applied, the UV curable resin (2P resin) is dropped onto the surface of the phosphor bronze master where the cured film is applied A step of producing a glass master by irradiating ultraviolet rays with superposing glass substrates, a step of forming a conductive film on the glass master, a step of forming a metal film by electroforming on the glass master subjected to the conductive treatment, The step of polishing the formed metal film, the step of peeling the conductive film and the metal film together from the glass master, the step of trimming to a predetermined size and the welding of the fixing tool to manufacture the flexible stamper, and the fixing tool same Of the above-mentioned (1) to (3), which comprises a step of forming a groove in a shape of a roll, inserting a fixing tool into the groove, and providing a mechanism for applying tension to at least one of the fixing tools and fixing the flexible stamper to the roller. Manufacturing method of roll-shaped stamper for optical encoder scale.

(5) The method for manufacturing a roll stamper for an optical encoder scale according to the above (4), wherein the hard film of the phosphor bronze master is hard nickel plating. (6) In the roll-shaped stamper in which the light transmission forming portion and the light blocking formation portion are arranged in parallel to the molding direction, the light transmission forming portion has a concave curved surface (inverted semi-cylindrical shape). (2) Roll-type stamper for optical encoder scale.

(7) In the roll-shaped stamper in which the light transmission forming portion and the light shielding formation portion are arranged perpendicular to the molding direction, the light transmission forming portion has a convex curved surface (a semi-cylindrical shape) and a light shielding formation portion. The roll stamper for an optical encoder scale according to the above (2), wherein the inclination angle in the forming direction is 45 degrees or less.

(8) In the roll-shaped stamper in which the light transmission forming portion and the light shielding forming portion are arranged perpendicularly to the molding direction, both the light transmission forming portion and the light shielding forming portion are convex curved surfaces (kamaboko shape). The roll-shaped stamper for an optical encoder scale according to (2) above.

(9) In the roll stamper in which the light transmission forming portion and the light blocking forming portion are arranged perpendicularly to the molding direction, a pattern corresponding to the optical encoder scale adjacent to each other with the sliding surface forming portion separated. The roll-shaped stamper for an optical encoder scale according to (2) above, wherein the roll stamper is arranged by being shifted by an odd multiple of 0.5 pitch.

(10) In the method for producing an optical encoder scale by forming a light transmitting portion and a light shielding portion on a thermoplastic synthetic resin sheet by a roll stamper using an extrusion method, the roll stamper is coated with a light beam. A roll stamper for an optical encoder scale, characterized in that a transmission forming part and a light blocking forming part are provided, each consisting of a mirror surface and a rough surface, and the mirror surface and the rough surface are alternately arranged at a constant pitch interval.

(11) A step of patterning a pattern corresponding to an optical encoder scale on a glass substrate with a photoresist, a step of etching the exposed glass surface by either a dry method or a wet method, an ultraviolet curable resin (2P resin) was dropped on the surface to be etched, a glass substrate was superposed on it, and a glass master was manufactured by irradiating with ultraviolet rays; a step of forming a conductive film on the glass master; and a conductive treatment. A step of forming a metal film on the glass master by electroforming, a step of polishing the formed metal film, a step of peeling the conductive film and the metal film together from the glass master, and a fixture after trimming to a predetermined size. Welding process to manufacture flexible stamper, process of forming sliding surface forming part on flexible stamper, and the same shape as fixture The method of (10) above, which comprises applying a roll to a roll, inserting a fixture into the groove, and providing a mechanism for applying tension to at least one of the fixtures and fixing the flexible stamper to the roller. Manufacturing method of roll-shaped stamper for encoder scale.

(12) A step of slitting a mask member made of glass, metal, ceramic or the like with a pattern of an optical encoder scale, and the mask member having the slit is brought into close contact with a glass substrate and then sandblasted (sludge and water A process of producing a glass substrate by performing a processing method in which a mixed liquid is sprayed on an object with high pressure to perform etching), a process of forming a conductive film on a glass master, and an electroforming method on a glass master that has been subjected to a conductive treatment. A step of forming a metal film, a step of polishing the formed metal film, a step of peeling the conductive film and the metal film together from a glass master, and a step of manufacturing a flexible stamper by welding a fixture after trimming to a predetermined size , The step of forming the sliding surface shape part on the flexible stamper, and also making a groove on the roll that has almost the same shape as the fixture, and fixing it in this groove Insert the said method for producing a roll-shaped stamper for an optical encoder scale (10), characterized in that the flexible stamper a mechanism for consuming tension to at least one of the fastener comprising the step of fixing the roller.

(13) A step of patterning a pattern of an optical encoder scale on a rough metal plate using a photoresist, and an ultraviolet curable resin (2P resin) is dropped on the patterned surface to form a film thinner than the photoresist layer and uniformly over the entire surface. Process, the process of trimming to a predetermined size after removing the photoresist layer, the process of applying the sliding surface forming portion after trimming, the process of forming the sliding surface forming portion, and then welding the fixture to manufacture the flexible stamper. And a step of forming a groove having substantially the same shape as the fixing tool on the roll, inserting the fixing tool into the groove, and providing a mechanism for applying tension to at least one of the fixing tools, and fixing the flexible stamper to the roller. The above (1) characterized in that
0) A method for manufacturing a roll-shaped stamper for an optical encoder scale according to 0).

(14) A step of patterning a pattern corresponding to an optical encoder scale on a metal plate having a mirror surface using a photoresist, a step of etching the exposed metal mirror surface by either a dry method or a wet method, and a photoresist After removing the layer, trimming to a predetermined dimension, after trimming, applying a sliding surface forming part, after applying a sliding surface shape part, welding a fixture to manufacture a flexible stamper, and further fixing A step of forming a groove having substantially the same shape as the tool on the roll, inserting a fixing tool into the groove, and providing a function of applying tension to at least one of the fixing tools, and fixing the flexible stamper to the roller. The method for producing a roll-shaped stamper for an optical encoder scale according to (10) above.

(15) The light transmission forming portions and the light blocking forming portions, mirror surfaces and rough surfaces, are alternately arranged at a constant pitch, and
The roll-shaped stamper for an optical encoder scale according to the above (10), wherein the roll-shaped stamper is arranged continuously in the molding direction (roll rotation direction).

(16) A step of slitting a flexible mask member such as metal or polyimide with a pattern of an optical encoder scale, a step of winding a flexible mask member around a roller and bringing them into close contact, and a roller on which a flexible mask member is formed. Process of performing sand blasting while rotating (processing method of jetting a mixture of sludge and water to an object with high pressure for etching), removing the flexible mask member and cleaning, then forming a dynamic surface on the etched roller The method for manufacturing a roll-shaped stamper for an optical encoder scale according to (10) above, which comprises a step of processing the portion.

(17) The above-mentioned (1), wherein the light-transmitting forming portion and the light-shielding forming portion are arranged at a constant pitch interval in the molding direction (roll rotation direction) and are continuous.
(2) Roll-type stamper for optical encoder scale.

(18) The step of forming the groove of the dynamic surface forming portion in the rotating direction of the mirror surface roll, the groove of the light transmitting forming portion is formed at a constant pitch in the direction orthogonal to the rotating direction, and the light transmitting forming portion and the light are blocked. The method for producing a roll-shaped stamper for an optical encoder scale according to the above (1) or (2), which comprises a step of continuously arranging the forming portions at a constant pitch in the forming direction (roll rotation direction).

(19) In the above (1) to (3), the light blocking formation portion and the light transmission formation portion have a difference, and the height of the light blocking formation portion is higher than that of the light transmission formation portion. Roll-type stamper for optical encoder scale. (20) The roll shape for an optical encoder scale according to the above (10), wherein the light blocking formation portion and the light transmission formation portion have a gap, and the height of the light blocking formation portion is higher than that of the light transmission formation portion. Stamper.

(21) The roll for an optical encoder scale according to the above (10), wherein the rough surface forming portion and the mirror surface forming portion have a gap, and the height of the rough surface forming portion is higher than that of the mirror surface forming portion. Stamper. (22) A method for manufacturing an optical encoder scale, characterized in that the roll stamper for an optical encoder scale according to the above (21) is used as a roll stamper used in an extrusion molding method. (23) A light blocking portion and light transmission An optical encoder scale characterized in that rough surfaces and mirror surfaces, which are parts, are alternately arranged at a constant pitch interval. (24) The encoder scale according to (23), wherein the rough surface portion and the mirror surface portion have a step, and the height of the rough surface portion is lower than that of the mirror surface portion. (25) The encoder scale according to (24) above, wherein the rough surface portion is a fine groove provided in a direction orthogonal to the molding direction.

(26) The encoder scale according to the above (23) to (25), characterized in that ink is formed on the rough surface portion. (27) An optical encoder scale characterized by being continuously manufactured using an extrusion method as a method of forming a light transmitting portion and a light shielding portion in an optical encoder scale for positioning using light. Manufacturing method.

(28) A method for producing an optical encoder scale according to item 28, wherein the roll-shaped stamper for the optical encoder scale described in (1) to (15) above is used as the roll-shaped stamper used in the extrusion method. .

(29) A step of patterning a pattern of an optical encoder scale on a rough metal plate using a photoresist, a step of etching the patterned rough metal plate to form a dent, and a rough step of forming a dent. UV-curing resin (2P resin) is dropped onto the surface metal plate and cured to flatten the depressions in a range where the depressions are not filled, and a step of removing the photoresist layer and trimming to a predetermined size After trimming, the step of forming the sliding surface forming portion, the step of forming the sliding surface forming portion, then the step of welding the fixing tool to manufacture the flexible stamper, and the groove having substantially the same shape as the fixing tool is applied to the roll, Step of inserting a fixing tool into this groove and providing a mechanism for applying tension to at least one of the fixing tools to fix the flexible stamper to the roller Above, wherein the composed al (1
0) A method for manufacturing a roll-shaped stamper for an optical encoder scale according to 0).

(30) An optical encoder using the optical encoder scale according to any one of (23) to (26). (31) An information printing apparatus using the optical encoder of (30) above.

[0083]

EXAMPLES The present invention will be described in more detail below with reference to examples, but the present invention is not limited thereto.

Example 1 First, a method for manufacturing a flexible stamper by an electroforming method will be described based on a process explanatory view showing a method for manufacturing a phosphor bronze master shown in FIG. 10 and a process explanatory view showing a method for manufacturing a flexible stamper shown in FIG. .

As shown in step (A) of FIG.
A groove having a depth of 60 μm and a width of 6 mm is formed as a sliding surface forming portion 3 on the surface of a phosphor bronze substrate 5 of 0 × 200 × 80 mm, and a pattern forming portion 4 corresponding to a scale having a width of 4 mm is formed 11
Book formed. (Pitch of irregularities 10 mm) Sliding surface forming portion 3
The processing method is the phosphor bronze substrate 5 that has been mirror-finished in advance.
Was attached to a grinding machine, and then a sintered diamond bite was used.

Next, as shown in the step (B), the light transmission forming part 1 and the light blocking forming part 2 are formed by using the single crystal diamond tool A6 for the pattern forming part 4 corresponding to the scale.
Was provided. After exchanging the diamond bite from the sintered diamond bite to the single crystal diamond bite A,
By inclining the cutting direction by 90 degrees, the light-transmissive forming portion 1 was subjected to the engraving processing at a right angle to the forming portion 4 of the pattern corresponding to the scale. (The phosphor bronze substrate 5 may be tilted by 90 degrees and reattached to the grinding machine.) 4,700 cutting lines were machined at a cutting depth of 35 μm and a feed pitch of 70.6 μm. The shape of the single crystal diamond tool A is shown in FIG.
As shown in FIG. 3, a curved surface is formed at the tip, and the curved surface makes it possible to obtain the stamper 22 for an optical encoder scale having an air residual prevention mechanism.

After the carving process is finished, cleaning is performed and a hard nickel plating is applied to a thickness of 10 for the purpose of preventing corrosion and surface hardening.
The phosphor bronze master 7 (father stamper) shown in the step (C) was manufactured by forming it into 00Å.

Next, as shown in steps (A) to (C) of FIG. 11, 30 parts by weight of urethane acrylate, 67 parts by weight of neopentyl glycol-modified trimethylolpropane diacrylate, and 3 parts by weight of 1-hydroxycyclohexyl phenyl ketone. After sufficiently degassing the ultraviolet curable resin 8 having the composition ratio of, the amount of 30 g was dropped on the patterned surface of the phosphor bronze master 7 having irregularities.

Next, 1 vo of silane coupling agent was applied to one surface of the glass substrate 10 having a size of 480 × 250 × 15 mm.
A 1% methanol solution (trade name: A-174, Nippon Unicar Co., Ltd.) was spin-coated and baked in an oven under the conditions of 70 ° C. and 2 hours. With the silane coupling treatment surface facing downward, slowly stack from the end and wait until the ultraviolet curable resin 8 has spread to the outer peripheral portion, and then use a metal halide lamp (trade name: UVC-2533, Ushio Electric Co., Ltd.) 160 W / cm, distance between lamps 13
The resin was cured by irradiating ultraviolet rays under the condition setting of 0 mm. After curing, the glass master 11 was obtained by peeling from the phosphor bronze master 7 and forming the uneven scale pattern 19 on one surface of the glass substrate 10.

Further, in the step (D), as a pretreatment for forming a metal film by an electroforming method, a film forming apparatus such as a sputtering apparatus, a vapor deposition apparatus or the like is used to conduct a conductive treatment. The conductive film 9 was formed on the glass master 11 by forming a nickel film having a film thickness of 1000Å by a sputtering device. The work procedure is as shown below. The above-mentioned glass master 11 is sputtered (trade name: SPF-530H,
NICHIDEN protect the effective portion in the mounting mask plate on the sample stage of Anelva Co.), was evacuated chamber, the ultimate vacuum 4.0 × 10 ^-3 Pa, RF power 1 kW, the conditions of base rotational speed 10rpm Reverse sputtering was performed for 10 minutes. Next, under the same conditions, a DC power of 0.5 kW and a film thickness of 10
A 00Å nickel film was formed on the glass master 11.

Next, in steps (E) to (F), the conductive film 9 is formed.
A metal film 12 is formed on the glass master 11 on which the above process has been performed by an electroforming method. In a nickel sulfamate electroforming solution, while rotating the glass master 11 on which the conductive film 9 is applied at 20 to 30 rpm, the time-integrated value of the energizing current is 180 to 360 A.
Under the condition of H (ampere hour), 100 to 200 μm of nickel metal was deposited to form the metal film 12.

The electroforming liquid used here has the following composition.

[0093]

TABLE 1 nickel sulfamate tetrahydrate _{Ni (NH 2 SO 3) 2} · 4H 2 O ] 500 g / 1 boric acid [H ₃ BO _3] 35～38G / 1 pit inhibitor 2.5MI / 1

Next, the metal film 12 is polished, and finally, in the step (F), the conductive film 9 and the metal film 12 are integrally peeled from the glass master 11 and laser cut 440.
After trimming to a size of 180 mm, a fixture is welded to the short sides of both ends to form a light transmission forming portion / light blocking forming portion (35.3 μm / 35.3 μm), step: 22.
The flexible stamper 13 (22) shown in FIGS. 1A and 1B and FIG. 8 in which the pattern 20 corresponding to the 6 μm optical encoder scale was formed was obtained.

The flexible stamper 13 (22) for the optical encoder scale described above is mounted on a roller in which a groove having substantially the same shape as that of the fixture is preliminarily formed, and a size of 440 × 1.
After attaching via a polyimide film of 78 mm and thickness of 100 μm, fill the gap between the fixtures with silicone resin (trade name: KE1204A / KE1204B) and
After the resin was cured at 00 ° C. for 30 minutes, excess resin was removed by a cutter to produce a roll stamper 14 as shown in FIGS. 1 and 4 (A). In this embodiment, as shown in FIG. 1, the roll stamper 14 in which the light transmission forming portion and the light blocking forming portion are arranged in parallel to the molding direction is used.

That is, extrusion molding is performed in the direction of arrow a shown in FIG. A detailed cross-sectional view of the broken line xx 'is shown in FIG. After this roll-shaped stamper 14 is attached to a device as shown in FIG. 9, a bisphenol A-based polycarbonate (trade name: H-3000R, Mitsubishi Gas Chemical Co., Inc.) is fed from the T die 16 of the extruder 18.
The molten resin of 1. is extruded at a resin temperature of 280 ° C. to 340 ° C., passed through between the roll stamper 14 and the mirror surface roller 15, and the mirror surface roller 1 for the roll stamper 14
0.3mm thickness by adjusting the pressing force of 5 to 2500kgf
A continuous sheet 17 for optical scale having a width of 250 mm was manufactured. In addition, the stamper 22 provided with an air remaining prevention mechanism
The state of molding by is shown in FIG.

As molding conditions, the temperature of the T die 16 was set to 3
20 ℃, the surface temperature of the roll stamper 14 145
C., the resin sheet conveying speed was adjusted to 5 m / min, and the resin extrusion amount was adjusted to 27 Kg / h, and continuous molding was performed for 4 hours. For the optical scale molded in this way, 4 × 4 bubble defects were formed for each scale pattern.
The number of defects was 10 or less, and the performance of the optical scale was scarcely affected.

Further, the transfer accuracy was 95% or more, and a very high quality optical scale could be manufactured in a large amount in a short time. In this example, the measurement of transfer is
Stylus-type level difference measuring device (Product name: Alpha Step 20
0, Tencor Instruments Co., Ltd. The measurement conditions were a scan range of 400 μm, a scan time of 40 seconds, and a needle pressure of 3 mg.

The transfer accuracy was evaluated by the ratio a / A to the value a obtained by measuring the width of the light transmitting portion on the molded optical scale with reference to the value A obtained by measuring the width of the light transmitting portion of the glass master. .

Comparative Example 1 When manufacturing a phosphor bronze master, the light transmission forming portion 1 and the light blocking forming portion 2 were formed in the pattern forming portion 4 corresponding to the scale by using a single crystal diamond tool B25 as shown in FIG. Provided. Depth of cut 30 μm, feed pitch 70.6
With the setting of μm, 4700 marking lines were processed. Other steps were the same as in Example 1, and a stamper 21 having no air residual prevention mechanism was manufactured. FIG. 3 shows a perspective view of the stamper 21 that does not have an air residual prevention mechanism.

Further, it was attached to a roller having a groove having substantially the same shape as that of the fixture in advance in the same manner as in Example 1, and the light transmission forming portion and the light blocking formation as shown in FIGS. 1 (A) and 8 were formed. A roll-shaped stamper 14 (21) whose parts are arranged parallel to the molding direction was produced.

Using this roll-shaped stamper 14 (21) under the same conditions as in Example 1, thickness 0.3 mm × width 250 m
m continuous sheet 17 for optical scale was manufactured. As a result, since extrusion molding is performed in the direction of arrow a shown in FIG. 3, bubble defects 23 are generated as shown in FIG. 2 (A). Incidentally, FIG. 2A is a detailed sectional view taken along the broken line yy 'in FIG. Then 4 for each scale pattern
As a result of examining the number of defects at each of three locations within a range of × 4 mm, the number of defects was about 50 to 100. When the performance as an optical scale was evaluated, the fluctuation of the signal amplitude was 10%.
As described above, the performance of the optical scale was insufficient. Further, when the transfer accuracy was evaluated by the same method as in Example 1, there was a portion where the value of a / A was 80% or less.

Example 2 As shown in FIG. 10 step (A), 450 × 200 ×
A groove having a depth of 60 μm and a width of 6 mm was formed as a sliding surface forming portion 3 on the surface of an 80 mm phosphor bronze substrate 5, and 11 pattern forming portions 4 corresponding to a scale having a width of 4 mm were formed.
(Pitch of unevenness: 10 mm) The sliding surface forming portion 3 was processed by using a sintered diamond bite after the phosphor bronze substrate 5 that had been mirror-finished in advance was attached to a grinding machine.

Next, using the single crystal diamond tool B25 shown in FIG. 13, the light transmission forming portion 1 and the light blocking forming portion 2 were provided in the pattern forming portion 4 corresponding to the scale of FIG. 10A. . After exchanging the diamond bite from the sintered diamond bite to the single crystal diamond bite A, the cutting line is tilted at 90 degrees so that the engraved line of the light transmission forming part 1 is perpendicular to the pattern forming part 4 corresponding to the scale. Processing was performed. Since the shape of the light transmission forming portion 1 is a convex curved surface (kamaboko shape), the cutting depth is 50 μm at both ends of the pattern forming portion 4 corresponding to the scale, and at the central portion of the pattern forming portion 4 corresponding to the scale. 30μ
It was set to be m. Feed pitch setting is 70.6
μm, and 4700 scribed lines were processed.

After the carving process is completed, cleaning is performed, and hard nickel plating is applied to a thickness of 10 for the purpose of preventing corrosion and surface hardening.
The phosphor bronze master 7 (father stamper) was manufactured by forming it into 00Å.

Next, after three glass masters 11 were obtained by the same method as in Example 1, the work was advanced to the polishing step, and the conductive film 9 and the metal film 12 were integrally peeled from the glass master 11. Three pieces prepared by laser cutting and preliminarily trimmed to a size of 440 × 150 mm were prepared.

The above three pieces were welded in parallel with the pattern 20 corresponding to the optical encoder scale, trimmed to a size of 440 × 440 mm by laser cutting, and then the fixture was welded in parallel with the pattern 20 corresponding to the scale. By doing so, it corresponds to the optical encoder scale of the light transmission forming part / light blocking forming part (35.3 μm / 35.3 μm) and step: 17.6 to 37.6 μm shown in FIGS. 4 (A) and 4 (B). The flexible stamper 13 (22) having the pattern 20 was obtained.

Next, the flexible stamper 13 (22) for the optical encoder scale is mounted on a roller having a groove having substantially the same shape as the fixture in advance, and the size is 440 × 43.
After mounting via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 4 (A). The roll-shaped stamper 14 shown in FIG. 4A is formed by extrusion in the direction of arrow a shown in FIG. 4B because the light transmission forming portion and the light blocking forming portion are arranged perpendicular to the forming direction. It will be.

After the roll stamper 14 is attached to the apparatus as shown in FIG. 9, the T die 16 of the extruder 18 is attached.
From amorphous polyolefin (trade name: ZEONEX 250, Nippon Zeon Co., Ltd.) molten resin at 280 ° C.
Roll stamper 1 extruded at a resin temperature of 340 ° C
4 and the mirror surface roller 15 and the pressing force of the mirror surface roller 15 against the roll stamper 14 is 2000 kg.
By adjusting to f, a continuous sheet 17 for optical scale having a thickness of 0.3 mm and a width of 520 mm was manufactured.

As the molding conditions, the temperature of the T die 16 was set to 3
30 ℃, the surface temperature of the roll stamper 14 145
C., the resin sheet conveying speed was adjusted to 4 m / min, and the resin extrusion amount was adjusted to 14.5 kg / h, and continuous molding was performed for 4 hours.

For the optical scale molded in this way, bubble defects were examined at 3 locations in the range of 4 × 4 mm for each scale pattern. The number of defects was 10 or less, and the performance of the optical scale was confirmed. Had little effect. Further, the transfer accuracy was 95% or more, and it was possible to manufacture a very high quality optical scale in a short time and in large quantities.

Example 3 As shown in step (A) of FIG. 7, 450 × 200 × 8
A trapezoidal groove having a depth of 150 μm and a width of 8 mm was formed as a sliding surface forming portion 3 on the surface of a 0 mm phosphor bronze substrate 5, and 11 pattern forming portions 4 corresponding to a scale having a width of 2 mm were formed. (Pitch of unevenness: 10 mm) The sliding surface forming portion 3 was processed by using a sintered diamond bite after the phosphor bronze substrate 5 that had been mirror-finished was attached to a grinding machine.

Next, using the single crystal diamond bite C26 shown in FIG. 14, the light transmission forming section 1 and the light blocking forming section 2 were provided in the pattern forming section 4 corresponding to the scale of FIG. 7A. . After exchanging the diamond bite from the sintered diamond bite to the single crystal diamond bite C, the cutting line is tilted by 90 degrees, and the engraved line of the light transmission forming part 1 is perpendicular to the pattern forming part 4 corresponding to the scale. Processing was performed. Since the light blocking portion 2 has a quadrangular pyramid shape, the cutting depth is 150 μm and the feed pitch is 70.6 μm.
With this setting, 4700 lines were machined. Although the single crystal diamond bite C has a complicated shape as shown in FIG. 14, the edge portion 27 may have some roundness, and in some cases, the tip portion may also have roundness. I do not care.

After the carving process is completed, cleaning is performed, and hard nickel plating is applied to a thickness of 10 for the purpose of corrosion prevention and surface hardening.
The phosphor bronze master 7 (father stamper) shown in the step (B) was manufactured by forming it into 00Å.

Next, after three glass masters 11 were obtained by the same method as in Example 1, the work was advanced to the polishing step, and the conductive film 9 and the metal film 12 were separated from the glass master 11 as a unit, and laser was applied. Three pieces were prepared by preliminarily cutting into a size of 440 × 150 mm.

The above three pieces were welded in parallel with the pattern 20 corresponding to the optical encoder scale, trimmed to a size of 440 × 440 mm by laser cutting, and then the fixture was welded in parallel with the pattern 20 corresponding to the scale. By doing so, the pattern 20 corresponding to the optical encoder scale having the light transmission forming part / light blocking forming part (35.3 μm / 35.3 μm) and the step: 150 μm shown in FIG. 4 (A) and FIG. 5 is formed. Flexible stamper 1
3 (22) was obtained.

Next, the flexible stamper 13 (22) for the optical encoder scale is mounted on a roller having a groove having substantially the same shape as that of the fixture in advance and having a size of 440 × 43.
After mounting via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 4 (A). In the roll-shaped stamper 14 shown in FIG. 4 (A), the light transmission forming portion and the light blocking forming portion are arranged perpendicularly to the molding direction, so that the arrow a shown in FIG.
It will be extruded in the direction of.

After the roll stamper 14 is attached to the apparatus as shown in FIG. 9, the T die 16 of the extruder 18 is attached.
From amorphous polyolefin (trade name: ZEONEX 250, Nippon Zeon Co., Ltd.) molten resin at 280 ° C.
Roll stamper 1 extruded at a resin temperature of 340 ° C
4 and the mirror surface roller 15 and the pressing force of the mirror surface roller 15 against the roll stamper 14 is 2000 kg.
By adjusting to f, a continuous sheet 17 for optical scale having a thickness of 0.3 mm and a width of 520 mm was manufactured.

As the molding conditions, the temperature of the T die 16 was set to 3
30 ℃, the surface temperature of the roll stamper 14 145
C., the resin sheet conveying speed was adjusted to 4 m / min, and the resin extrusion amount was adjusted to 14.5 kg / h, and continuous molding was performed for 4 hours.

For the optical scale molded in this manner, bubble defects were examined at three locations within a range of 4 × 4 mm for each scale pattern. The number of defects was 10 or less, and the performance of the optical scale was confirmed. Had little effect. Further, the transfer accuracy was 95% or more, and it was possible to manufacture a very high quality optical scale in a short time and in large quantities.

Example 4 As shown in FIG. 10 step (A), 450 × 200 ×
A groove having a depth of 60 μm and a width of 6 mm was formed as a sliding surface forming portion 3 on the surface of an 80 mm phosphor bronze substrate 5, and four pattern forming portions 4 corresponding to a scale having a width of 4 mm were formed.
(Pitch of irregularities: 10 mm) The sliding surface forming portion 3 was processed by using a sintered diamond tool after the phosphor bronze substrate 5 that had been mirror-finished was attached to a grinding machine.

Next, the light transmission forming part 1 and the light blocking forming part 2 were provided in the forming part 4 of the pattern corresponding to the scale by using the single crystal diamond tool A6. After exchanging the diamond bite from the sintered diamond bite to the single crystal diamond bite A, the cutting line is tilted by 90 degrees so that the light transmission forming part 1 is lined at right angles to the pattern forming part 4 corresponding to the scale. The processing was performed in a staggered pattern. (The phosphor bronze substrate 5 may be tilted 90 degrees and reattached to the grinding machine.) Depth of cut 35 μm, feed pitch 7
4700 scribed lines were processed with the setting of 0.6 μm.
The single crystal diamond tool A has a curved surface at its tip as shown in FIG. 12, and the curved surface and the zigzag pattern make it possible to obtain the stamper 22 for an optical encoder scale having an air remaining prevention mechanism.

After the completion of the wire processing, washing is carried out and hard nickel plating is applied to a thickness of 1 for the purpose of preventing corrosion and surface hardening.
The phosphor bronze master 7 (father stamper) having a zigzag pattern was manufactured by forming it to 000Å.

Next, in the same manner as in Example 2, the flexible stamper 13 (22) shown in FIG. 6 was obtained in which the fixture was welded in parallel with the pattern 20 corresponding to the scale. Flexible stamper 13 (22) shown in FIG.
Is a light transmission forming portion / light blocking forming portion (35.3 μm / 3
6.3 μm) and the step difference is 22.6 μm.

Next, the flexible stamper 13 (22) for the optical encoder scale is mounted on a roller having a groove having substantially the same shape as that of the fixture in advance, and the size is 440 × 43.
After mounting via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 4 (A). The roll stamper 14 shown in FIG. 4 (A) corresponds to an optical encoder scale in which a light transmission forming portion and a light blocking forming portion are arranged perpendicularly to the molding direction and which are adjacent to each other with a sliding surface forming portion interposed therebetween. It is characterized in that the patterns are arranged in a direction perpendicular to the molding direction with an offset of an odd multiple of 0.5 pitch.

After this roll stamper 14 was attached to an apparatus as shown in FIG.
3 mm x 520 mm wide continuous sheet for optical scale 1
7 was produced. For the optical scale molded in this way, bubble defects of 4 × 4 mm for each scale pattern
The number of defects was 10 or less, and there was almost no effect on the performance of the optical scale. Further, the transfer accuracy was 95% or more, and it was possible to manufacture a very high quality optical scale in a short time and in large quantities.

Example 5 A method for manufacturing a roll stamper for an optical encoder scale, in which a light transmission forming portion and a light blocking forming portion are provided and each has a mirror surface and a rough surface, will be described with reference to FIG. As shown in FIG. 15 step (A), 450 × 200 × 80 mm
A photoresist is formed on the surface of the glass substrate 10.
As the photoresist, Az1370 (company name: Hoechst Japan) is used, which is dropped on a glass substrate and is spun to 50
It was applied to a film thickness of 00Å. After that, 90 ℃ ・ 30min
Pre-baking was performed under the conditions of.

Next, a laser exposure apparatus, Mirror
Projector Mask Aligner MA
Using an exposure apparatus such as P-1500 (company name: Canon),
A predetermined pattern (stripe shape) corresponding to the optical encoder scale is exposed, and the developer Az312MIF is exposed.
By developing with (Company name: Hoechst Japan), the patterning pattern 32 corresponding to the optical encoder scale was formed. Through the above steps, FIG.
The patterned glass substrate 28 shown in Step 5A and FIG. 16 is obtained.

Next, in step (B), the exposed glass surface is etched in order to provide a light transmission forming portion and a light blocking forming portion (mirror surface and rough surface). For the etching, a dry method was selected and a sputtering device was used. The patterned glass substrate 28 is sputtered (trade name: S
PF-530H was attached to the sample stage of Nichiden Anelva Co., Ltd., and after evacuating the chamber, the ultimate vacuum was 4.0 × 10 ⁻³ Pa, RF power 1 kW, and substrate rotation speed 1
Reverse sputtering was performed for 10 minutes under the condition of 0 rpm. Through the above steps, the mother stamper 31 provided with the mirror surface forming portion 29 and the rough surface forming portion 30 was manufactured.

Next, in the step (C), the scale pattern 19 having a size of 480 × 250 × 1 is formed by the same method as in the first embodiment.
Glass master 1 formed on one side of a 5 mm glass substrate 10
Got 1.

Further, after conducting a conductive film forming step, a metal film forming step by electroforming, a polishing step, and a peeling step in the same manner as in Example 1, laser cutting was performed to trim the size to 440 × 180 mm, and both ends were cut. By welding a fixture to the short side of the flexible stamper 13 (3
3) was obtained. This flexible stamper 13 (3
3), a rough surface forming portion 30 and a mirror surface forming portion 29 having a width of 4 mm.
4700 (pattern corresponding to one optical encoder scale) × 11 are provided in parallel with the long side of the stamper at a pitch of 70.6 μm.

The flexible stamper 13 (33) for the optical encoder scale described above is mounted on a roller having a groove having substantially the same shape as the fixture in advance and a size of 440 × 17.
After attaching via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 1 (A).

After the roll-shaped stamper 14 was attached to a device as shown in FIG. 9, the bisphenol A type polycarbonate (trade name: H-
3000R, Mitsubishi Gas Chemical Co., Ltd. 280 molten resin
C. to 340.degree. C. at a resin temperature, pass through between the roll stamper 14 and the mirror surface roller 15, and apply a pressing force of the mirror surface roller 15 to the roller stamper 14 to 2500.
The continuous sheet 17 for an optical scale having a thickness of 0.4 mm and a width of 250 mm was manufactured by adjusting to kgf.

As the molding conditions, the temperature of the T die 16 was set to 3
20 ℃, the surface temperature of the roll stamper 14 145
C., the resin sheet conveying speed was adjusted to 5 m / min, and the resin extrusion amount was adjusted to 36 kg / h, and continuous molding was performed for 4 hours.

For the optical scale molded in this way, bubble defects were examined at 3 locations within a range of 4 × 4 mm for each scale pattern. The number of defects was 10 or less, and the optical scale performance was It had almost no effect.
Further, the transfer accuracy was 99% or more, and a good optical scale could be manufactured in a short time in a large amount.

Example 6 A method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, will be described with reference to FIG. As shown in FIG. 18 step (A), slits 36 of a predetermined pattern (stripe shape) of an optical encoder scale are formed on a metal plate 37 of 480 × 250 × 1 mm to obtain a mask member 34 shown in FIG. It was

The material used for the mask member 34 is
Any material may be used as long as it has slits, and for example, glass, ceramics, or the like can be used.
This time, a slit 36 was formed by using a YAG laser welding apparatus: JK701 (manufactured by Lumonix) using a stainless steel metal plate 37.

Next, in step (B), since the glass substrate 10 is provided with a light transmission forming portion and a light blocking forming portion (mirror surface and rough surface), the mask member 34 is superposed and fixed on the glass substrate 10. After that, a mixed liquid of sludge and water was jetted at a high pressure from the nozzle 35 of the sandblasting machine to etch the exposed glass surface. In the step (C), after the etching, the glass substrate 10 was washed with water and dried to manufacture the glass master 11 having the scale pattern 19 formed thereon.

Further, after conducting a conductive film forming step, a metal film forming step by electroforming, a polishing step, and a peeling step in the same manner as in Example 1, laser cutting was performed to trim the size to 440 × 180 mm, and both ends were cut. By welding a fixture to the short side of the flexible stamper 13 (3
8) was obtained. This flexible stamper 13 (3
8) includes a rough surface forming portion 30 and a mirror surface forming portion 29 with a width of 4 mm.
4700 (pattern corresponding to one optical encoder scale) × 11 are provided in parallel with the long side of the stamper at a pitch of 70.6 μm.

The flexible stamper 13 (38) for the optical encoder scale described above is mounted on a roller having a groove having substantially the same shape as that of the fixture in advance and a size of 440 × 17.
After attaching via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 1 (A).

After the roll-shaped stamper 14 was attached to the apparatus as shown in FIG. 9, the bisphenol A type polycarbonate (trade name: H-
3000R, Mitsubishi Gas Chemical Co., Ltd. 280 molten resin
C. to 340.degree. C. at a resin temperature, pass through between the roll stamper 14 and the mirror surface roller 15, and press the mirror surface roller 15 against the roll stamper 14 at a pressure of 2500 k.
By adjusting to gf, a continuous sheet 17 for an optical scale having a thickness of 0.3 mm and a width of 250 mm was manufactured.

As the molding conditions, the temperature of the T die 16 was set to 3
20 ℃, the surface temperature of the roll stamper 14 145
C., the resin sheet conveying speed was adjusted to 5 m / min, and the resin extrusion amount was adjusted to 27 kg / h, and continuous molding was performed for 4 hours.

For the optical scale molded in this way, bubble defects were examined at 3 locations in the range of 4 × 4 mm for each scale pattern. The number of defects was 10 or less, and the performance of the optical scale was confirmed. Had little effect. Further, the transfer accuracy was 99% or more, and a good optical scale could be manufactured in a short time in a large amount.

Example 7 A method for manufacturing a roll stamper for an optical encoder scale in which a light transmission forming portion and a light blocking forming portion are each provided with a mirror surface and a rough surface will be described with reference to FIG. Figure 21
480 x 250 x 300, as shown in step (A)
A photoresist is formed on the rough surface portion of the metal plate 39 having a rough surface of μm. The surface roughness of the rough surface portion is 1 to 100 μm, preferably 10 to 50 μm. In this example, the metal plate 39 having a rough surface with a surface roughness of 20 μm was used. Az1370 (company name: Hoechst Japan) was used as the photoresist, and the photoresist was dropped on a metal plate 39 having a rough surface and applied with a spinner to a film thickness of 5 μm. After that, 90 ℃, · 30
Prebaking was performed under the condition of min.

Next, a laser exposure apparatus, Mirror
Projector Mask Aligner / MP
Using an exposure apparatus such as A-1500 (company name: Canon),
Exposing a predetermined pattern on the optical encoder scale,
Developer Az312MIF (Company name: Hoechst: Japan)
The patterning pattern 32 of the optical encoder scale was formed by developing with.

Next, in the step (B), the exposed rough surface of the metal plate 39 having the rough surface on which the patterning pattern 32 is formed is flattened (mirrored). Specifically, the ultraviolet curable resin 8 used in Example 1 is dropped on the metal plate 39 having a rough surface on which the patterning pattern 32 is formed, and then the spinner 3 is used.
It was applied to a film thickness of μm. (It means a film thickness of 3 μm from the convex portion of the rough surface.) Furthermore, after the metal plate 39 having the rough surface which has undergone the above steps is set in the vacuum chamber and a predetermined vacuum degree is reached, the metal halide lamp ( Product name: UV
Using C-2533, USHIO INC., 160W
/ Cm and a lamp distance of 130 mm, the resin was cured by irradiation with ultraviolet rays.

Next, in the step (C), a solvent (acetone) is used.
Then, the patterning pattern 32 was removed by immersing in the substrate and washing with pure water. Further, after providing the sliding surface forming portion 3 by forming a groove having a depth of 50 μm and a width of 6 mm between the forming portions 4 of the pattern corresponding to the scale using the sintered diamond bite as in Example 1. 440 by laser cutting
The flexible stamper 13 (38) provided with the sliding surface forming portion shown in FIG. 22 was obtained by trimming to a size of 180 mm and welding the fixtures to the short side portions at both ends. The flexible stamper 13 (38) has a width of 4 mm and a rough surface shape portion 30 and a mirror surface forming portion 29 with a pitch of 7.
470 parallel to the long side of the stamper with a setting of 0.6 μm
There are 0 (pattern corresponding to one optical encoder scale) × 11.

The flexible stamper 13 (38) for the optical encoder scale described above is mounted on a roller having a groove having substantially the same shape as the fixture in advance and a size of 440 × 17.
After attaching via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 1 (A).

After the roll-shaped stamper 14 was attached to the apparatus as shown in FIG. 9, the bisphenol A type polycarbonate (trade name: H-
3000R, Mitsubishi Gas Chemical Co., Ltd. 280 molten resin
C. to 340.degree. C. at a resin temperature, pass through between the roll stamper 14 and the mirror surface roller 15, and press the mirror surface roller 15 against the roll stamper 14 with a pressing force of 2500.
The continuous sheet 17 for an optical scale having a thickness of 0.3 mm and a width of 250 mm was manufactured by adjusting to kgf.

As the molding conditions, the temperature of the T die 16 was set to 3
20 ℃, the surface temperature of the roll stamper 14 145
C., the resin sheet conveying speed was adjusted to 5 m / min, and the resin extrusion amount was adjusted to 27 kgf / h, and continuous molding was performed for 4 hours.

For the optical scale molded in this way, bubble defects were examined at 3 locations within a range of 4 × 4 mm for each scale pattern. The number of defects was 10 or less, and the performance of the optical scale was confirmed. Had little effect. Further, the transfer accuracy was 99% or more, and a good optical scale could be manufactured in a short time in a large amount.

Example 8 A method for manufacturing a roll stamper for an optical encoder scale, in which a light transmission forming portion and a light blocking forming portion are provided and each has a mirror surface and a rough surface, will be described with reference to FIG.

As shown in FIG. 23, step (A), 48
A photoresist is formed on the mirror surface portion of the metal plate 40 having a mirror surface of 0 mm × 250 mm × 250 μm. The surface roughness of the mirror surface portion is 0 to 10 μm, preferably 0 to 5 μm.
In this embodiment, a metal plate 40 having a mirror surface with a surface roughness of 2 μm or less was used. Further, nickel having high purity was used as the material of the metal plate 40 having a mirror surface. Photoresist is
Using Az1370 (Company name: Hoechst Japan), drop on a metal plate 40 having a mirror surface and spin with a spinner of 5000 Å
Was applied to a film thickness of. Then, prebaking was performed at 90 ° C. for 30 minutes.

Next, a laser exposure apparatus, Mirror
Projector Mask Aligner / MP
Using an exposure apparatus such as A-1500 (company name: Canon),
Exposing a predetermined pattern on the optical encoder scale,
Developer Az312MIF (Company name: Hoechst: Japan)
The patterning pattern 32 corresponding to the optical encoder scale was formed by developing with.

Next, in step (B), the exposed mirror surface of the metal plate 40 having the mirror surface on which the patterning pattern 32 is formed is roughened. Specifically, the patterning pattern 32
After attaching the metal plate 40 having a mirror surface formed with the sample to a sample stage of a sputtering device (trade name: SPF-530H, Nichiden Anerva Co., Ltd.) and evacuating the inside of the chamber, an ultimate vacuum of 4.0 × 10 ⁻³ Pa , RF power 1k
Reverse sputter is performed under the conditions of W and substrate rotation speed of 10 rpm.
It was done for a minute. Through the above steps, the mirror surface forming portion 29 and the rough surface forming portion 30 could be provided.

Next, in the step (C), a solvent (acetone) is used.
Then, the patterning pattern 32 was removed by immersing in the substrate and washing with pure water. Further, similarly to Example 1, a sliding diamond forming tool was used to form a sliding surface forming portion 3 by forming a groove having a depth of 50 μm and a width of 6 mm between the forming portions 4 of the pattern corresponding to the scale. Then, the flexible stamper 13 (33) provided with the sliding surface forming portion shown in FIG. 24 is trimmed by laser cutting to a size of 440 × 180 mm, and fixing tools are welded to the short sides of both ends.
was gotten. This flexible stamper 13 (33)
The width of 4 mm, the rough surface forming portion 30 and the mirror surface forming portion 29 are provided in parallel with the long side portion of the stamper at a pitch of 70.6 μm, and 4700 (pattern corresponding to one optical encoder scale) × 11 are provided. Has been.

The flexible stamper 13 (33) for the optical encoder scale described above is mounted on a roller having a groove having substantially the same shape as that of the fixture in advance and a size of 440 × 17.
After attaching via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 1 (A).

After the roll stamper 14 was attached to the apparatus as shown in FIG. 9, the bisphenol A type polycarbonate (trade name: H-
3000R, Mitsubishi Gas Chemical Co., Ltd. 280 molten resin
The resin is extruded at a resin temperature of 340 to 340 ° C., passed through between the roll stamper 14 and the mirror surface roller 15, and the pressing force of the mirror surface roller 15 against the roll stamper 14 is 2500 k.
By adjusting to gf, a continuous sheet 17 for an optical scale having a thickness of 0.3 mm and a width of 250 mm was manufactured.

Molding conditions and molding time were the same as in Example 7. The optical scale molded in this manner was also evaluated under the same conditions as in Example 7. As a result, the number of defects was 10 or less, and the performance of the optical scale was hardly affected. The transfer accuracy is 99%
As described above, it was possible to manufacture a good optical scale in a short time and in large quantities.

Example 9 A method for manufacturing a directly stamped roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, will be described with reference to FIG.

A slit 3 having a predetermined pattern of an optical encoder scale is formed on a metal plate 37 of 942 × 200 × 1 mm.
Four 6 (4 mm × 35.3 μm) were formed over the entire length in the long side direction to obtain a mask member 34 shown in FIG.

The material used for the mask member 34 is
Any material can be used as long as it has slits, and for example, a polyimide film or the like can be used.
In this embodiment, a slit 36 is formed by a carbon dioxide laser device using a stainless steel metal plate 37.

Next, as shown in step (A) of FIG. 25, the mask member 34 was wound around the mirror-finished roller 15 and fixed with gum tape and an instant adhesive. A point to be careful when fixing is that the mask member 34 is brought into close contact with the mirror surface roller 15, and the mirror surface roller 15 except for the slit 36.
It is of utmost importance that the mirror surface of is not exposed.
The mirror roller 15 has a cylindrical shape with a diameter of 300 mm and a roller surface length of 500 mm, and is made of carbon steel. The mirror-finished roller 15 had a molding surface on which a chromium film having a mirror-finished surface was formed.

Next, in step (B), an etching process was performed in order to provide a light transmission forming portion and a light blocking forming portion (mirror surface and rough surface) on the mirror surface (molding surface) of the mirror surface roller 15. More specifically, as shown in FIG. 25 (B), while the mirror surface roller 15 to which the mask member 34 is fixed is rotated in the direction of arrow a at a rotation speed of 5 to 10 rpm, a mixed liquid of sludge and water is applied to the sandblasting machine. The exposed mirror surface was etched by jetting with high pressure from the nozzle 35, and the rough surface forming portion 30 was provided. The particle size of the sludge was selected so that the surface roughness of the rough surface forming portion 30 was 50 μm.

Finally, the mask member 34 is attached to the mirror surface roller 1.
By removing pure water from No. 5 and washing with pure water and air blowing, a directly stamped roll-shaped stamper 41 shown in step (C) in which mirror surface forming portions and rough surface forming portions were alternately arranged was manufactured.
This direct stamped roll stamper 41 has a width of 4 mm
The pitch of the rough surface forming portion 30 and the mirror surface forming portion 29 is 70.6μ.
With the setting of m, they are continuously arranged in the extrusion direction (the conveying direction of the continuous sheet for optical scale).

After the roll stamper 41 with the direct marking is attached to the apparatus as shown in FIG.
A bisphenol A-based polycarbonate (trade name: H-3000R, Mitsubishi Gas Chemical Co., Inc.) molten resin is extruded from a die 16 at a resin temperature of 280 ° C. to 340 ° C., and directly between the stamped roll-shaped stamper 41 and the mirror surface roller 15. And the pressing force of the mirror-finished roller 15 against the directly stamped roll-shaped stamper 41 was adjusted to 2500 kgf to manufacture a continuous sheet 17 for an optical scale having a thickness of 0.3 mm and a width of 250 mm.

Molding conditions and molding time were the same as in Example 7. The optical scale molded in this manner was also evaluated under the same conditions as in Example 7. As a result, the number of defects was 10 or less, and the performance of the optical scale was hardly affected. The transfer accuracy is 99
% Or more, and a good optical scale could be manufactured in a short time and in a large amount. Further, the directly stamped roll-shaped stamper 41 is the same as the first to eighth embodiments and the first embodiment.
Unlike the roll stamper 14 used in 1, the pattern 20 corresponding to the scale is continuously arranged in the extrusion direction (the conveying direction of the optical scale continuous sheet).
Continuous sheet 17 for optical scale manufactured in this example
The pattern of the optical scale that was transferred to was also transferred continuously. Therefore, directly stamped roll stamper 41
Is manufactured using. Optical scales are great for any size.

Example 10 A method of manufacturing a directly stamped roll-shaped stamper for an optical encoder scale provided with a light transmission forming portion and a light blocking forming portion will be described with reference to FIG. As shown in FIG. 26 step (A), the diameter is 300 mm and the roller surface length is 500 m.
The m-cylindrical direct marking roller 43 was provided with the pattern forming portion 4 corresponding to the scale. Specifically, a groove having a depth of 60 μm and a width of 6 mm was formed as a sliding surface forming portion 3 on the mirror surface of the direct marking roller 43, and five pattern forming portions 4 corresponding to a scale having a width of 4 mm were formed. The sliding surface forming portion 3 was processed by using a sintered diamond tool after mounting the direct marking roller 43, which was previously mirror-finished, on the grinding machine.

In addition, the groove direction of the groove processing of the sliding surface forming portion 3 is
The extrusion was performed in parallel with the extrusion direction (the conveying direction of the continuous sheet for optical scale). The material for the direct marking roller 43 was phosphor bronze, which had a proven record in the production of the phosphor bronze master of Example 1. However, the material of the direct marking roller 43 is not limited to phosphor bronze, and any material can be used as long as it can be machined by a diamond tool. For example, carbon steel may be used.

Next, as shown in step (B) of FIG. 26, the single crystal diamond bit A6 shown in FIG. 12 is used for the forming portion 4 of the pattern corresponding to the scale to form the light transmitting forming portion 1 and the light blocking forming portion. 2 was provided.

Specifically, after exchanging the diamond bite from the sintered diamond bite to the single crystal diamond bite A, the cutting direction is tilted by 90 degrees so that the pattern forming portion 4 corresponding to the scale is exposed at a right angle. The scribe line processing of the transmission forming portion 1 was performed.

Depth of cut 35 μm, feed pitch 70.6
The mirror surface (molding surface) of the roller 43 for direct marking with the setting of μm
A carved line was processed on the entire surface of. After solvent cleaning, pure water cleaning, and air blowing, hard nickel plating is applied to a film thickness of 500 to 1000 for the purpose of preventing corrosion and surface hardening.
By forming it into Å, a directly stamped roll-shaped stamper 42 in which light transmission forming portions and light blocking forming portions are alternately arranged was manufactured. The direct stamped roll stamper 42 has a width of 4 mm and a light transmission forming portion 1 and a light blocking forming portion 2 with a pitch of 7 mm.
With the setting of 0.6 μm, they are continuously arranged in the extrusion direction (the conveying direction of the continuous sheet for optical scale).

After the roll stamper 42 with the direct marking is attached to the device as shown in FIG. 9, the bisphenol A type polycarbonate (trade name: H-3000R, Mitsubishi Gas Chemical Co., Inc.) is fed from the T die 16 of the extruder 18. ) Is extruded at a resin temperature of 280 ° C. to 340 ° C., and is passed between the directly stamped roll stamper 42 and the mirror roller 15, and the pressing force of the mirror roller 15 against the directly stamped roll stamper 42 is adjusted to 2500 kgf. Thus, a continuous sheet 17 for an optical scale having a thickness of 0.3 mm and a width of 250 mm was manufactured.

Molding conditions and molding time were the same as in Example 7. The optical scale molded in this manner was also evaluated under the same conditions as in Example 7. As a result, the number of defects was 10 or less, and the performance of the optical scale was hardly affected. The transfer accuracy is 99
% Or more, and a good optical scale could be manufactured in a short time and in a large amount.

Further, the roll stamper 42 directly stamped
Is different from the roll-shaped stamper 14 used in Examples 1 to 8 and Example 11, and the pattern 20 corresponding to the scale is continuously arranged in the extrusion direction (the conveying direction of the optical scale continuous sheet). Therefore, the pattern of the optical scale transferred to the optical scale continuous sheet 17 manufactured in this example was also continuously transferred. Therefore, the optical scale manufactured by using the directly stamped roll-shaped stamper 42 is extremely excellent in that it can be applied to any size.

Example 11 A method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, will be described with reference to FIG. As shown in FIG. 27 step (A), 480 mm × 250 mm ×
A photoresist is formed on the rough surface portion of the metal plate 39 having a rough surface of 300 μm. The surface roughness of the rough surface portion is 1 to 100 μ.
m, preferably 10 to 50 μm. In this embodiment,
A metal plate 39 having a rough surface with a surface roughness of 10 μm was used. As the photoresist, Az1370 (Company name: Hoechst Japan) was used, and it was dropped onto the metal plate 39 having a rough surface and applied with a spinner to a film thickness of 10 μm. Then 9
Prebaking was performed at 0 ° C. for 30 minutes.

Next, the laser exposure apparatus, Mirror
Projector Mask Aligner / MP
Using an exposure apparatus such as A-1500 (company name: Canon),
A predetermined pattern of the optical encoder scale was exposed and developed with a developer Az312MIF (company name: Hoechst: Japan) to form a patterning pattern 32 of the optical encoder scale.

Next, in step (B), the exposed rough surface of the metal plate 39 having the rough surface on which the patterning pattern 32 is formed is etched to form the recess 44, and then the recess 44.
Only the surface was flattened (mirrored). Specifically, a metal plate 39 having a rough surface on which the patterning pattern 32 is formed is attached to a sample stage of an ion milling apparatus, the inside of the chamber is evacuated, and then the Ar gas pressure is 1.1 × 10 ⁻⁴ Tor.
r, chiller set temperature 10 ° C, INO SOURCE O
Milling was performed for 8 hours under the conditions of UTPUT 1 Kv (200 mA), sample stage angle of 90 °, and sample stage rotation speed of 10 rpm. By going through the above steps,
A dent 44 having a depth of 10 μm or more was formed.

Further, the ultraviolet curable resin 8 used in Example 1 was dropped on the metal plate 39 having a rough surface in which the depressions 44 were formed, and was applied with a spinner to a film thickness of 2 μm. (It means a film thickness of 2 μm from the convex portion on the bottom surface of the depression 44.) The film thickness of the ultraviolet curable resin 8 for flattening the depression 44 may be any μm. However, as shown in step (B) of FIG. 27, the bottom surface of the recess 44 must be entirely covered with the ultraviolet curable resin 8 at least when the ultraviolet curable resin 8 is cured.

Metal plate 39 having a rough surface obtained through the above steps
Is set in the vacuum chamber, and after reaching a predetermined vacuum degree, a metal halide lamp (trade name: UVC-253
3. Using Ushio Electric Co., Ltd., the resin was cured by irradiating ultraviolet rays under the conditions of 160 W / cm and a lamp distance of 130 mm.

Next, in the step (C), a solvent (acetone) is used.
After removing the patterning pattern 32 by immersing it in pure water and washing with pure water, laser cutting 440 × 180
The flexible stamper 13 (4) is characterized in that the height of the rough surface forming portion is higher than that of the mirror surface forming portion by trimming to a size of mm and welding fixing tools to the short side portions of both ends.
5) was obtained.

The flexible stamper 13 (45) in which the height of the rough surface forming portion is higher than that of the mirror surface forming portion is a flexible stamper 13 as shown in FIG. 20 when viewed from the molding surface side and has a width of 4 mm and the rough surface forming portion 30. The mirror surface forming portion 29 is provided with a pitch of 70.6 μm and 4700 (pattern corresponding to one optical encoder scale) × 11 pieces are provided in parallel with the long side portion of the stamper.

The flexible stamper 13 (45) for the optical encoder scale described above is mounted on a roller having a groove having substantially the same shape as that of the fixture in advance and a size of 440 × 17.
After attaching via a polyimide film having a thickness of 8 mm and a thickness of 100 μm, the gap between the fixtures was filled with silicone resin in the same manner as in Example 1 to produce a roll stamper 14 as shown in FIG. 1 (A).

After the roll stamper 14 was attached to the apparatus as shown in FIG. 9, the bisphenol A type polycarbonate (trade name: H-
3000R, Mitsubishi Gas Chemical Co., Ltd. 280 molten resin
C. to 340.degree. C. at a resin temperature, pass through between the roll stamper 14 and the mirror surface roller 15, and press the mirror surface roller 15 against the roll stamper 14 at a pressure of 2500 k.
By adjusting to gf, a continuous sheet 17 for an optical scale having a thickness of 0.3 mm and a width of 250 mm was manufactured.

As the molding conditions, the temperature of the T die 16 was set to 3
20 ℃, the surface temperature of the roll stamper 14 145
C., the resin sheet conveying speed was adjusted to 5 m / min, and the resin extrusion amount was adjusted to 27 kg / h, and continuous molding was performed for 4 hours.

For the optical scale molded in this way, bubble defects were examined at 3 locations within a range of 4 × 4 mm for each scale pattern. The number of defects was 10 or less, and the performance of the optical scale was confirmed. Had little effect. Further, the transfer accuracy was 99% or more, and a good optical scale could be manufactured in a short time in a large amount.

Example 12 The flexible stamper 13 (4) used in Example 11 was used.
5) was attached to a roller having a groove having substantially the same shape as the fixture in advance through a polyimide film having a size of 440 × 178 mm and a thickness of 100 μm, and then a gap between the fixtures was formed in the same manner as in Example 1. Filled with silicone resin, Figure 1
A roll stamper 14 as shown in (A) was produced.

After the roll-shaped stamper 14 was attached to a device as shown in FIG. 9, the bisphenol A type polycarbonate (trade name: H-
3000R, Mitsubishi Gas Chemical Co., Ltd. 280 molten resin
C. to 340.degree. C. at a resin temperature, pass through between the roll stamper 14 and the mirror surface roller 15, and apply a pressing force of the mirror surface roller 15 to the roller stamper 14 to 2500.
0.3mm thickness x 250mm width by adjusting to kgf
The continuous sheet 17 for optical scale is a mirror roller 15
And a roll stamper 14 from the take-up device.

Next, as shown in FIG. 28, the conveyed continuous sheet for optical scale 17 is sandwiched by the ink supply roller 46 and the auxiliary roller A48, and ink is transferred to the entire transfer surface of the continuous sheet for optical scale 17. 50 was applied thinly and uniformly. The optical scale continuous sheet 17 coated with the ink 50 advances in the direction of arrow a, which is the direction of conveyance of the continuous sheet, and the ink removing roller 47 and the auxiliary roller B4.
It is pinched again at 9 and only the unnecessary ink 50 is removed.
The ink 50 used was black for printing.

In this embodiment, the flexible stamper 1 is characterized in that the height of the rough surface forming portion is higher than that of the mirror surface forming portion.
Since 3 (45) was used, continuous sheet 1 for optical scale
In the unevenness of 7, the height of the rough surface portion is lower than that of the mirror surface portion.
Therefore, as shown in FIG. 29A, the ink 50 is removed at the mirror surface portion (light transmitting portion) and is formed only at the rough surface portion (light blocking portion).

Finally, the ink 50 formed only on the rough surface portion (light blocking portion) was dried by passing through the warm air dryer 56 to manufacture the ink-formed continuous sheet 55 for an optical scale. Although the drying temperature was set at 60 ° C. in this embodiment, the continuous sheet 17 for optical scale is used.
It may be changed according to the conveying speed, molding conditions, and the like.
The molding conditions were the same as in Example 11.

As a result of examining the ink-formed optical scale formed in this way for 3 scale defects in 3 × 4 × 4 mm for each scale pattern, 10 bubble defects were found. Below, there were no ink stain defects.

Further, the transfer accuracy is 99% or more, and the contrast between the light transmitting portion and the light shielding portion is higher than that of the optical scale manufactured in Example 11, and a very high quality optical scale can be obtained in a short time. It was possible to manufacture in large quantities.

Comparative Example 2 The flexible stamper 13 (3 used in Example 7
8) was attached to a roller having a groove having substantially the same shape as that of the fixture in advance through a polyimide film having a size of 440 × 178 mm and a thickness of 100 μm, and then the gap between the fixtures was made into silicone in the same manner as in Example 1. Filled with resin, Figure 1
A roll stamper 14 as shown in (A) was produced.

After this roll stamper 14 was attached to a device as shown in FIG. 9, the same resin as in Example 12 was used and extruded under the same conditions to obtain a thickness of 0.3 mm and a width of 250 mm.
After forming the continuous sheet 17 for an optical scale of No. 3, the ink supply roller 46 was processed in the same manner as in Example 12.
And the auxiliary roller A48, and the ink 50 was applied thinly and uniformly on the entire transfer surface of the optical scale continuous sheet 17. The optical scale continuous sheet 17 coated with the ink 50 advances in the direction of arrow a, which is the conveying direction of the continuous sheet, and is sandwiched again by the ink removing roller 47 and the auxiliary roller B49 to remove only the unnecessary ink 50. .

In this embodiment, since the flexible stamper 13 (45) whose height of the rough surface forming portion is lower than that of the mirror surface forming portion is used, the unevenness of the continuous sheet 17 for an optical scale is such that the height of the rough surface portion is higher than that of the mirror surface portion. It became expensive. Therefore, as shown in FIG. 29B, the ink 50 is removed at the rough surface portion (light blocking portion) and is formed only on the mirror surface portion (light transmitting portion).

Finally, the ink 50 formed only on the mirror surface portion (light transmitting portion) was dried by passing through the warm air dryer 56 to manufacture a continuous sheet for an optical scale on which the ink was formed. The drying temperature was set and each molding condition was the same as in Example 12.

As a result of examining the ink-formed optical scale formed in this way at three locations in each of the scale patterns, in each of the scale patterns, in a range of 4 × 4 mm, 10 bubble defects were found. Below, the transfer accuracy is 9
Although it was 9% or more, since ink was formed on the mirror surface portion (light transmitting portion) where ink should not be formed, an ink stain defect occurs on the entire surface and a defective product that cannot be used as an optical scale is manufactured. It was

As is apparent from this example, the continuous sheet 17 for an optical scale has irregularities in which the height of the light blocking portion is lower than that of the light transmitting portion, as an indispensable condition for manufacturing the optical scale on which the ink is formed. Must be present.

Example 13 The optical scale continuous sheet 17 of the present invention and the ink-formed continuous sheet 55 for an optical scale were cut with a cutter to manufacture a main scale 60 and a sub-scale 59 of an optical encoder.

Next, as shown in FIG. 30, the light emitting element 57 is formed.
After attaching the light receiving element 58 and the subscale 59, the light emitting element 57 was made to emit light, and the light receiving element 58 received the light, the photoelectrically converted electric signal was detected. As a result, the amplitude peak value of the electric signal was 1054 mV, and the average value was 608 mV. there were. In this study, the subscale 59 was made of the optical scale continuous sheet 17 of Example 1, and the main scale 60 was also made of the optical scale continuous sheet 17 of Example 1.

Next, in order to measure the molded products manufactured in the other examples, the sub-scale 59 was not replaced, and the main scale 60 formed the continuous sheet 17 for the optical scale other than the example 1 and the ink. As a result of sequentially exchanging and detecting electric signals using the one manufactured by the optical scale continuous sheet 55, the amplitude peak value of the electric signals of the main scale 60 manufactured in all the examples was around 1000 mV, and the average value was also It was around 600 mV, and it was found that the signal characteristics were improved by 20% or more as compared with the commonly used optical encoder.

The main scale of a generally used optical encoder is manufactured by using a photoengraving film, and any one of a PET film, a sub-coating layer, a gelatin back layer and an emulsifier which is a constituent member of the photoengraving film is used. Since the filler is mixed in, the light transmittance of the light transmitting portion is poor. On the other hand, the main scale 60 used in this study has a very good light transmittance in the light transmitting portion, and it is considered that the signal characteristics are improved by 20% or more.

As described above, if the light transmittance of the light transmitting portion is very good, the spec of the light emitting element or the light receiving element can be reduced, so that a high-performance and inexpensive optical encoder can be manufactured. Further, since the pitch of the light transmitting portion / light blocking portion can be relatively easily reduced, it is most suitable for an information printing apparatus such as a printer, which will become finer in the future.

Comparative Example 3 As shown in FIG. 31, a main scale 61 of a photoengraving film and a subscale 59 used in Example 13 were used as a main scale of an optical encoder, and a light emitting element 58 and a light receiving element were used. After attaching 58, the electric signal was detected by the same procedure as in Example 13. As a result, the amplitude peak value of the electric signal was 800 mV, and the average value was 472 mV. The difference in the constituent parts from Example 13 is only the main scale 61 made of photoengraving film, so it can be considered that the cause of the poor signal characteristics is also due to the filler mixed in the constituent members of the photoengraving film.

[0206]

As described above, the roll-shaped stamper for an optical scale of the present invention is provided with various air remaining prevention mechanisms, so that the light-transmission forming portion and the light-shielding forming portion on the roll-shaped stamper are provided. It is possible to dispose parallel to the molding direction, and a long optical scale with high accuracy,
Moreover, it can be manufactured at low cost. Further, by using the stamped roll stamper directly, a continuous optical scale can be manufactured with high accuracy and at low cost. The optical scale produced by this roll-shaped stamper was very excellent in that it could be applied to any size.

Further, by using a roll-shaped stamper for an optical scale, which is provided with a light transmission forming portion and a light shielding forming portion, each of which is composed of a mirror surface and a rough surface, it is possible to make a step between the light transmission forming portion and the light shielding forming portion By making it as small as possible, it has become possible to manufacture a high-precision, low-cost optical scale without bubble defects.

Further, by manufacturing the optical scale in which the ink is formed in the light shielding portion, the improvement of the contrast can be achieved. Using the optical scale manufactured by the present invention, a main scale and a subscale were manufactured, and a light-emitting element and a light-receiving element were incorporated to manufacture an optical encoder. Turned out to be very good. Therefore, the specifications of the light emitting element or the light receiving element can be reduced, so that a high-performance and inexpensive optical encoder can be manufactured.

Further, since the pitch of the light transmitting portion / light blocking portion can be relatively easily reduced, the optical scale of the present invention can be applied to an information printing apparatus such as a printer, which will become finer in the future. It is possible to mount the manufactured optical encoder and provide high-quality, highly reliable products at low cost.

[Brief description of drawings]

FIG. 1A is a perspective view of a roll stamper in which a light transmission forming portion and a light blocking forming portion are arranged in parallel to a molding direction, and FIG. 1B shows a first embodiment. It is a schematic diagram of a pattern corresponding to a scale of a flexible stamper provided with an air residual prevention mechanism of the present invention.

FIG. 2 (A) is a schematic sectional view at the moment when molten resin is sandwiched between a conventional stamper having no air residual prevention mechanism and a mirror surface roller, and FIG. 2 (B) shows the present invention. FIG. 3 is a schematic cross-sectional view at the moment when molten resin is sandwiched between a stamper having a curved surface in the light transmission forming portion and a mirror surface roller.

FIG. 3 is a perspective view showing a stamper having no air residual prevention mechanism.

FIG. 4 is a schematic view of a pattern corresponding to a scale of a flexible stamper provided with an air residual prevention mechanism of the present invention shown in Example 2.

FIG. 5 is a schematic view of a pattern corresponding to a scale of a flexible stamper provided with an air residual prevention mechanism in which a light blocking formation portion is formed of a quadrangular pyramid.

FIG. 6 is a schematic view of a staggered pattern flexible stamper according to a fourth embodiment.

FIG. 7 is a schematic view of a phosphor bronze master for manufacturing a flexible stamper provided with an air residual prevention mechanism in which the light blocking formation portion of the present invention is a quadrangular pyramid, which is shown in Embodiment 3;

FIG. 8 is a schematic view showing a flexible stamper in which a light transmission forming portion and a light blocking forming portion are arranged in parallel to a molding direction.

FIG. 9 is a schematic cross-sectional view of an RG device.

FIG. 10 is a process explanatory view showing the manufacturing method of the phosphor bronze master.

FIG. 11 is a process explanatory view showing the method for manufacturing the flexible stamper of the present invention.

FIG. 12 is a schematic view showing the shape of a single crystal diamond bite.

FIG. 13 is a schematic view showing the shape of a single crystal diamond bite.

FIG. 14 is a schematic view showing the shape of a single crystal diamond tool.

FIG. 15 is a process explanatory view showing a method of manufacturing a roll-shaped stamper for an optical encoder scale, which is provided with a light transmission forming part and a light blocking forming part and each has a mirror surface and a rough surface, which is shown in Example 5;

FIG. 16 is a schematic view of a patterned glass substrate shown in Example 5.

FIG. 17 is a schematic view of a flexible stamper manufactured in Example 5.

FIG. 18 is a process explanatory view showing a method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion, each of which is composed of a mirror surface and a rough surface, as shown in Example 6;

FIG. 19 is a schematic view showing a mask member.

20 is a schematic view of a flexible stamper manufactured in Example 6. FIG.

FIG. 21 is a process explanatory view showing a method for manufacturing a roll-shaped stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion and each has a mirror surface and a rough surface, which is shown in Example 7;

22 is a schematic view of a pattern corresponding to the scale of the stamper manufactured in Example 7. FIG.

FIG. 23 is a process explanatory view showing a method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming part and a light blocking forming part and each has a mirror surface and a rough surface, as in Example 8;

FIG. 24 is a schematic view of a pattern corresponding to the scale of the stamper manufactured in Example 8.

FIG. 25 is a process explanatory view showing a method for producing a directly stamped roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion, each of which is composed of a mirror surface and a rough surface, as shown in Example 9; is there.

FIG. 26 is a process explanatory diagram illustrating a method for manufacturing a directly stamped roll stamper for an optical encoder scale, which is provided with a light transmission forming portion and a light blocking forming portion, according to the tenth embodiment.

FIG. 27 is a process explanatory view showing a method for manufacturing a roll stamper for an optical encoder scale, which is provided with a light transmission forming part and a light blocking forming part and each has a mirror surface and a rough surface, as shown in Example 11;

FIG. 28 is a schematic view for producing a continuous sheet for an optical scale on which an ink is formed, which is shown in Example 12.

FIG. 29 (A) is a detailed cross-sectional view of the continuous sheet for an optical scale on which ink is formed as shown in Example 12, and FIG. 29 (B) is Comparative Example 2 where the height of the rough surface portion is a mirror surface. FIG. 6 is a detailed cross-sectional view when ink is formed on a continuous sheet for an optical scale higher than the height of the sheet.

FIG. 30 is a perspective view showing a configuration of an optical encoder shown in Example 13;

31 is a perspective view showing a configuration of an optical encoder shown in Comparative Example 3. FIG.

[Explanation of symbols]

1 Light Transmission Forming Part 2 Light Blocking Forming Part 3 Sliding Surface Forming Part 4 Pattern Forming Part Corresponding to Scale 5 Phosphor Bronze Substrate 6 Single Crystal Diamond Tool A 7 Phosphor Bronze Master 8 Ultraviolet Curing Resin 9 Conductive Film 10 Glass Substrate 11 Glass Master 12 Metal Film 13 Flexible Stamper 14 Roll Stamper 15 Mirror Surface Roller 16 T Die 17 Continuous Sheet for Optical Scale 18 Extruder 19 Scale Pattern 20 Scale Corresponding Pattern 21 Stamper Without Air Remaining Prevention Mechanism 22 Air Remaining Stamper 23 with prevention mechanism 23 Bubble defect 24 Molten resin 25 Single crystal diamond bite B 26 Single crystal diamond bite C 27 Edge part 28 Patterned glass substrate 29 Mirror surface forming part 30 Rough surface forming part 31 Mother stamper 32 Turning pattern 33 Stamper A 34 in which mirror surface forming portions and rough surface forming portions are alternately arranged Mask member 35 Nozzle 36 Slit 37 Metal plate 38 Stamper B 39 in which mirror surface forming portions and rough surface forming portions are alternately arranged Metal having rough surface Plate 40 Metal plate having mirror surface 41 Direct stamped roll-shaped stamper in which mirror surface forming portions and rough surface forming portions are alternately arranged 42 Direct stamped roll stamper 43 in which light transmission forming portions and light blocking forming portions are alternately arranged 43 Direct Marking roller 44 Dimple 45 Rough surface forming part is higher in height than the mirror surface forming part 46 Ink supply roller 47 Ink removing roller 48 Auxiliary roller A 49 Auxiliary roller B 50 Ink 51 Light transmitting part 52 Light blocking part 53 Flexible stamper ( 45) Continuous sheet for optical scale manufactured in 45) Flexi Continuous sheet for optical scale manufactured by Bull Stamper (38) 55 Continuous sheet for optical scale formed with ink 56 Hot air dryer 57 Light emitting element 58 Light receiving element 59 Subscale 60 Main scale 61 Main made of photoengraving film scale

Claims (31)

[Claims] 1. A roll stamper used for manufacturing an optical encoder scale by forming a light transmitting part and a light blocking part on a thermoplastic synthetic resin sheet by using an extrusion method, wherein A roll stamper for an optical encoder scale, characterized in that a transmission forming part and a light blocking forming part are provided, each of which is composed of a flat surface and a prism surface, and the flat surface and the prism surface are alternately arranged at a constant pitch interval. 2. A roll stamper used for producing an optical encoder scale by forming a light transmitting part and a light blocking part on a thermoplastic synthetic resin sheet by using an extrusion method, wherein air remains in the roll stamper. The flat surface or a prism surface is formed as a curved surface as a prevention mechanism, and the uneven shape of the roll-shaped stamper is made gentle within a range that does not adversely affect the optical characteristics of the optical encoder scale. Roll-type stamper for optical encoder scale. 3. A roll stamper used for manufacturing an optical encoder scale by forming a light transmitting part and a light blocking part on a thermoplastic synthetic resin sheet by using an extrusion method, wherein A roll stamper for an optical encoder scale, characterized in that a transmission forming part and a light blocking forming part are provided, each of which is composed of a plane and a quadrangular pyramid, and the plane and the quadrangular pyramid are alternately arranged at a constant pitch interval. 4. A step of processing a sliding surface forming part on a phosphor bronze substrate, then a step of processing a light transmission forming part and a light blocking forming part, the sliding surface forming part, the light transmission forming part, and a light blocking forming part. The process of manufacturing a phosphor bronze master by forming a hard film on the surface where the parts are applied, dropping the ultraviolet curable resin on the surface of the phosphor bronze master where the hardened film is applied, overlaying the glass substrate on top of it A step of manufacturing a glass master by irradiating, a step of forming a conductive film on the glass master, a step of forming a metal film on the glass master that has been subjected to the conductivity treatment by electroforming, and polishing the formed metal film A step of peeling the conductive film and the metal film together from the glass master, a step of manufacturing a flexible stamper by fixing a fixture after trimming to a predetermined size, and a step of fixing the flexible stamper to a roller. 2. The method according to claim 1, wherein
4. A method for manufacturing a roll stamper for an optical encoder scale according to any one of items 1 to 3. 5. The method for manufacturing a roll stamper for an optical encoder scale according to claim 4, wherein the hard film of the phosphor bronze master is hard nickel plating. 6. A roll stamper in which a light-transmitting forming portion and a light-shielding forming portion are arranged parallel to a molding direction,
The roll-shaped stamper for an optical encoder scale according to claim 2, wherein the light transmission forming portion has a concave curved surface. 7. A roll stamper in which a light transmission forming portion and a light blocking forming portion are arranged perpendicular to a molding direction,
The roll-shaped stamper for an optical encoder scale according to claim 2, wherein the light transmission forming portion is a convex curved surface, and the inclination angle of the light blocking formation portion in the molding direction is 45 degrees or less. 8. A roll stamper in which a light transmission forming portion and a light blocking forming portion are arranged perpendicularly to the molding direction,
The roll-shaped stamper for an optical encoder scale according to claim 2, wherein both the light transmission forming portion and the light blocking forming portion are convex curved surfaces. 9. A roll stamper in which a light transmission forming portion and a light blocking forming portion are arranged perpendicularly to a molding direction,
The roll-shaped stamper for an optical encoder scale according to claim 2, wherein the patterns corresponding to the optical encoder scales adjacent to each other with the sliding surface forming portion separated are arranged by being shifted by an odd multiple of 0.5 pitch. 10. A roll stamper used for manufacturing an optical encoder scale by forming a light transmitting part and a light blocking part on a thermoplastic synthetic resin sheet by using an extrusion method, wherein A roll stamper for an optical encoder scale, characterized in that a transmission forming part and a light blocking forming part are provided, each consisting of a mirror surface and a rough surface, and the mirror surface and the rough surface are alternately arranged at a constant pitch interval. 11. A step of patterning a pattern corresponding to an optical encoder scale on a glass substrate with a photoresist, a step of etching the exposed glass surface by either a dry method or a wet method, and an ultraviolet curable resin. Drop on the surface to be etched, superimpose a glass substrate on it and irradiate with ultraviolet rays to manufacture a glass master, a step of forming a conductive film on the glass master, and a glass master that has been subjected to conductivity treatment. A step of forming a metal film by a casting method, a step of polishing the formed metal film, a step of separating the conductive film and the metal film from the glass master as a unit, a trimming to a predetermined size, and then fixing a fixing tool and a flexible stamper. , The step of forming the sliding surface forming part on the flexible stamper, and the flexible stamper on the roller. The method for manufacturing a roll-shaped stamper for an optical encoder scale according to claim 10, comprising a fixing step. 12. A glass substrate is manufactured by performing a step of slitting a mask member made of glass, metal, ceramic or the like with a pattern of an optical encoder scale, adhering the slit mask member to a glass substrate and then sandblasting. , A step of forming a conductive film on the glass master, a step of forming a metal film on the glass master that has been subjected to the conductive treatment by electroforming, a step of polishing the formed metal film, a conductive film and a metal The step of peeling the film as a unit from the glass master, the step of manufacturing a flexible stamper by fixing the fixture after trimming to a predetermined size, the step of forming the sliding surface shape part on the flexible stamper, and further fixing the flexible stamper to the roller The roll shape for an optical encoder scale according to claim 10, characterized in that Stamper manufacturing method. 13. A step of patterning a pattern of an optical encoder scale on a rough metal plate using a photoresist, a step of dropping an ultraviolet curable resin on the patterned surface to form a layer thinner than the photoresist layer and uniformly over the entire surface.
A step of trimming to a predetermined size after removing the photoresist layer, a step of applying a sliding surface forming part after trimming, a step of manufacturing a flexible stamper by fixing a fixture after applying the sliding surface forming part, The method for manufacturing a roll-shaped stamper for an optical encoder scale according to claim 10, further comprising the step of fixing the flexible stamper to a roller. 14. A step of patterning a pattern corresponding to an optical encoder scale on a mirror surface metal plate using a photoresist, a step of etching the exposed metal mirror surface by either a dry method or a wet method, and a photoresist layer After trimming, the step of trimming to a predetermined size, the step of forming a sliding surface forming portion after trimming, the step of manufacturing a flexible stamper by fixing a fixture after forming a sliding surface shape portion, The method for manufacturing a roll-shaped stamper for an optical encoder scale according to claim 10, comprising a step of fixing the stamper to a roller. 15. The optical encoder scale according to claim 10, wherein the mirror surface and the rough surface, which are the light transmission forming portion and the light blocking forming portion, are alternately arranged at a constant pitch and are continuously arranged in the molding direction. Roll stamper. 16. A step of slitting a flexible mask member made of metal, polyimide or the like with a pattern of an optical encoder scale, a step of winding a flexible mask member around a roller so as to be in close contact, and a roller on which the flexible mask member is formed is rotated. 11. The optical encoder scale according to claim 10, further comprising: a step of sandblasting while performing the process, a step of removing the flexible mask member, cleaning, and a step of processing the dynamic surface forming portion on the etched roller. Roll stamper manufacturing method. 17. The optical element according to claim 1, wherein the light transmission forming portion and the light blocking forming portion are arranged at a constant pitch interval in the molding direction and are continuous. Roll stamper for rotary encoder scale. 18. A step of forming a groove of a jerk surface forming portion in a rotation direction of a mirror surface roll, a groove of a light transmission forming portion is formed in a direction orthogonal to the rotation direction at a constant pitch interval, and a light transmission forming portion and a light blocking formation are formed. The method for producing a roll-shaped stamper for an optical encoder scale according to claim 4, comprising a step of continuously arranging the parts at a constant pitch interval in the molding direction. 19. The light blocking formation section and the light transmission formation section have a difference, and the height of the light blocking formation section is higher than that of the light transmission formation section. A roll-shaped stamper for the optical encoder scale described in 1. 20. The optical encoder scale according to claim 10, wherein the light blocking formation portion and the light transmission formation portion have a gap, and the height of the light blocking formation portion is higher than that of the light transmission formation portion. Roll stamper. 21. The roll shape for an optical encoder scale according to claim 10, wherein the rough surface forming portion and the mirror surface forming portion have a gap, and the height of the rough surface forming portion is higher than that of the mirror surface forming portion. Stamper. 22. A method of manufacturing an optical encoder scale, wherein the roll stamper for an optical encoder scale according to claim 21 is used as a roll stamper used in an extrusion molding method. 23. An optical encoder scale characterized in that a rough surface and a mirror surface which are light blocking portions and light transmitting portions are alternately arranged at a constant pitch interval. 24. The optical encoder scale according to claim 23, wherein the rough surface portion and the mirror surface portion have a step, and the height of the rough surface portion is lower than that of the mirror surface portion. 25. The optical encoder scale according to claim 24, wherein the rough surface portion is a fine groove provided in a direction orthogonal to the molding direction. 26. The optical encoder scale according to claim 23, wherein ink is formed on the rough surface portion. 27. As an optical encoder scale for positioning using light, as a method of forming a light transmitting portion and a light shielding portion, an extrusion method is used to continuously manufacture the optical encoder scale. Manufacturing method of encoder scale. 28. An optical encoder according to claim 27, wherein the roll stamper used in the extrusion method is the roll stamper for an optical encoder scale according to any one of claims 1 to 15. Scale manufacturing method. 29. A step of patterning an optical encoder scale pattern on a rough metal plate using a photoresist, a step of etching the patterned rough metal plate to form a recess, and a rough surface having a recess. A step of flattening the depressions by dropping an ultraviolet curable resin on the metal plate and curing the resin in a range where the depressions are not filled,
After removing the photoresist layer, trimming to a predetermined size, after trimming, applying a moving surface forming portion, after applying the moving surface forming portion, a fixture is fixed and a flexible stamper is manufactured. 11. The method for manufacturing a roll-shaped stamper for an optical encoder scale according to claim 10, comprising a step of fixing a flexible stamper to a roller. 30. An optical encoder using the optical encoder scale according to any one of claims 23 to 26. 31. An information printing apparatus using the optical encoder according to claim 30.