JPH04212736A - Roll stamper for molding substrate sheet for information recording medium and its production and production of substrate sheet for information recording medium using roll stamper - Google Patents

Abstract

PURPOSE:To offer a roll stamper for molding a substrate for information recording medium which can consecutively and accurately form a preformat on a resin sheet. CONSTITUTION:Supposing that the length and the width of a preformat pattern 11 of the roll stamper 13 are set as (a) and (b), and the specified length and the width of the preformat of the substrate for the information recording medium 16 are set as A and B, respectively, the value of b/a is made larger than the value of B/A.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roll-shaped stamper for continuously manufacturing substrates for information recording media by forming a concavo-convex preformat on a resin sheet, and a method for manufacturing the same.

0002

2. Description of the Related Art Concave and convex preformats such as track grooves and address pits are formed on substrates of information recording media such as optical disks. For example, Japanese Patent Application Laid-Open No. 56-86721 discloses a method for continuously manufacturing such substrates in large quantities, in which a thermoplastic synthetic resin sheet is heated and softened using an infrared lamp, and then uneven signals are transferred using a forming roll. The method is described.

[0003] The roll stamper used in this method is a thin flat stamper that is attached to a mirror-finished roll base material using an adhesive, or mechanically attached using a jig or the like. It is created by forming a preformat pattern directly on the main body.

By the way, as the uneven preformat pattern formed on the roll stamper, a preformat pattern having the same size as a preformat of a predetermined length and width of an optical card substrate is conventionally used.

However, when a preformat is continuously formed on a resin sheet, a relatively large pressure is applied to the roll stamper, and as the resin cools, contraction occurs in a direction perpendicular to the conveying direction of the resin sheet. Therefore, when using a roll stamper on which a pattern of a predetermined size is formed as described above, the uneven preformat formed on the resin sheet causes problems such as deterioration of transfer accuracy and, specifically, large fluctuations in track pitch. There is a point. In particular, fine patterns such as optical cards are formed and high-density information can be recorded.
In the case of optical recording media used for playback, variations in track pitch can cause errors such as track misalignment.
Even in the optical card standard, the track pitch variation is 12μ.
It is defined as within m±0.1 μm.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and the present invention provides a substrate for information recording media that can continuously and accurately form a concavo-convex preformat on a resin sheet. The object of the present invention is to provide a molding roll stamper and a method for manufacturing the same.

Another object of the present invention is to provide a method for manufacturing a substrate sheet for an information recording medium, which can obtain a substrate sheet for an information recording medium on which a concavo-convex preformat pattern is accurately transferred.

[0008] Furthermore, the present invention provides that the uneven preformat is
An object of the present invention is to provide a substrate sheet for an information recording medium that is accurately formed to a predetermined size and has a good surface condition, and a method for manufacturing the same.

Furthermore, the present invention provides a method for manufacturing a flexible stamper that can be used as a roll stamper for forming information recording medium substrates, which can continuously and accurately form a concavo-convex preformat on a resin sheet. The purpose is to

A further object of the present invention is to provide an electroforming apparatus that can efficiently manufacture flexible stampers.

[0011]

[Means for Solving the Problems] A roll stamper for forming a substrate sheet for an information recording medium of the present invention has a preformat pattern corresponding to the preformat of the information recording medium, and the preformat pattern is continuously printed on a resin sheet. In a roll stamper for forming a substrate sheet for an information recording medium by directly transferring information, when the predetermined length of the preformat of the information recording medium is A, and the predetermined width is B, the preformat pattern is The roll stamper has a length a corresponding to the above length A in the circumferential direction and a width b corresponding to the above width B in the direction perpendicular to the circumferential direction, and the value of b/a is the value of B/A. It is characterized by being formed larger than the

Further, the roll stamper of the present invention has a preformat pattern corresponding to the preformat of the information recording medium, and the preformat pattern is continuously transferred onto the resin sheet to form a substrate sheet for the information recording medium. In a roll stamper for printing, a plurality of preformat patterns are formed in the circumferential direction of the roll stamper, and the preformat pattern extends a predetermined length of the preformat of the information recording medium to A, When the predetermined width is B, the roll stamper has a length a corresponding to the above length A in the circumferential direction, a width b corresponding to the above width B in the direction perpendicular to the circumferential direction, and b/ The value of a is B/A
It is characterized by being formed larger than the value of.

The method for manufacturing a roll stamper of the present invention involves continuously transferring a preformat pattern onto a resin sheet having a plurality of preformat patterns in the circumferential direction corresponding to the preformat of the information recording medium. A method for manufacturing a roll stamper for molding a substrate sheet is characterized by having the following steps.

a) Step of producing a base film master by forming a plurality of preformat patterns corresponding to the preformat of the information recording medium on the surface of the long base film in the longitudinal direction of the base film b) Pattern of the base film master Step c) Forming a conductive film on the formation surface c) Forming a metal film on the conductive film by electroforming d) Peeling the conductive film and the metal film from the base film master to form a plurality of preforms. Creating a long flexible stamper having a format pattern e) Fixing the flexible stamper to a roll base material

[
The method for manufacturing a substrate sheet for an information recording medium of the present invention is a method for manufacturing a substrate sheet for an information recording medium in which a roll stamper having a preformat pattern is used to continuously transfer the preformat pattern onto a resin sheet. The preformat pattern has a length a corresponding to the length A in the circumferential direction of the roll stamper and a circumferential direction, where A is the predetermined length and B is the predetermined width of the preformat of the information recording medium. The present invention is characterized in that a roll stamper is used, which has a width b corresponding to the width B in a direction perpendicular to the width B, and has a value of b/a larger than B/A.

The method for producing a long stamper of the present invention involves forming a plurality of preformat patterns corresponding to the preformat of an information recording medium on the surface of a long base film in the longitudinal direction of the base film, and forming a base film master. a step of forming a conductive film on the pattern forming surface of the base film master; a step of forming a metal film on the conductive film by electroforming so as to be integrated with the conductive film; It is characterized by having a step of peeling off the conductive film and the metal film from the base film.

The method for producing a flexible stamper of the present invention includes a step of forming a conductive film on the surface of a long base film, a step of forming a metal film on the conductive film by electroforming, and a step of forming a metal film on the metal film. The present invention is characterized by a step of forming a plurality of preformat patterns corresponding to the preformat of the information recording medium in the longitudinal direction of the elongated base film using a photolithography process.

Furthermore, the electroforming apparatus of the present invention has a plurality of preformat patterns corresponding to the preformat of the information recording medium on the surface of the long base film in the longitudinal direction of the base film, and An electroforming apparatus that forms a metal film on the conductive film while continuously conveying a conductive base film master having a conductive film formed on the pattern forming surface, the electroforming device forming a metal film on the conductive film. It is characterized by having an energizing means for energizing the electrically conductive film and the power supply while maintaining a continuous contact state.

By shifting the dimensions of such a concavo-convex preformat pattern from a predetermined shape within a certain range, it is possible to prevent the elongation of the stamper when transferring the concavo-convex preformat onto a resin sheet or the contraction caused by cooling on the resin sheet. Distortion of the concavo-convex preformat transferred to the resin sheet can be canceled out, and a very accurate concavo-convex preformat can be formed on the resin sheet.

Next, the roll stamper for forming an information recording medium substrate of the present invention will be explained in detail with reference to the drawings.

FIG. 1(A) is a schematic diagram showing the manufacturing process of an optical card substrate sheet 15 using the roll stamper 13 for forming an optical card substrate sheet of the present invention.

In FIG. 1A, reference numeral 13 is a roll stamper according to the present invention, in which a stamper 12 having a preformat pattern 11 is fixed to the circumferential surface of a roll base material 21. A roll stamper 13 and a roll 14 disposed opposite to the roll stamper 13
Press the resin sheet to create a preformat pattern 11.
is transferred to obtain an optical card substrate sheet 15. And the preformat pattern 11 that the roll stamper has
, a represents the length in the direction parallel to the conveyance direction of the resin sheet between the outermost tracks of the preformat pattern 11, and b represents the width of the preformat pattern 11 in the direction perpendicular to the conveyance direction of the resin sheet. represents.

In addition, in FIG. 1, (B) shows a substrate 16 for an optical card.
17 indicates a track groove. When the roll stamper of the present invention has a length A and a width B as the predetermined size of this preformat,
The present invention is characterized in that the relationship between the length a and width b of the preformat pattern formed on the surface of the roll stamper and the predetermined length A and width B of the preformat satisfies the following conditions.

[0024]b/a>B/A

In this way, by changing the dimension ratio (b/a) of the uneven preformat pattern formed on the roll stamper and the dimension ratio (B/A) of the predetermined uneven preformat, it is possible to Distortion of the concavo-convex preformat transferred to the resin sheet due to the elongation of the stamper and the contraction of the resin sheet can be offset, and the concave-convex preformat can be formed on the resin sheet very accurately.

[0026] In addition, in the roll stamper of the present invention, when molding a substrate sheet for an optical card, especially A, a and B
When the relationship between and b is as shown in equations (1) and (2) below, the length of the preformat formed on the resin sheet is a'
, the width is b', and each value is set to a predetermined length A and width B.
A roll stamper that can form a more accurate preformat can be obtained.

[0027]

[Outside 1]

Furthermore, regarding B and b, it is preferable that a more accurate preformat can be formed than the case where the relationship shown in equation (3) below is satisfied.

[0029]

[Outside 2]

The shape and size of the concave-convex preformat pattern formed on the roll-shaped stamper of the present invention are not particularly limited and may be any desired shape as long as the concave-convex preformat pattern is formed on the substrate of the information recording medium. can. Further, it is formed on a substrate for an optical recording medium such as an optical disk or an optical card that performs recording and/or reproduction using light. For example, the groove width is 0.1 μm to 5 μm, the pitch is 1 μm to
For concentric, spiral, or striped tracking grooves with a depth of 12 μm and a depth of 0.01 μm to 0.4 μm, and information pits in the micron order, slight expansion or contraction of the size during transfer may cause defects in the optical recording medium. It's connected.

Specifically, for example, due to the elongation of the track groove pattern for an optical card when it is transferred to a resin sheet, the track groove pitch deviates from the standard value and a tracking error occurs, making recording and reproduction impossible. It is what it is.

The roll stamper of the present invention can accurately transfer even minute patterns onto a resin sheet, and is particularly effective in manufacturing substrates for optical recording media such as optical disks and optical cards.

The method for manufacturing the roll stamper 13 of the present invention includes, for example, forming a photoresist layer on a glass master, drawing it with a laser beam or an electron beam, and then developing it to form a resist pattern.
i Obtain a thin Ni stamper by electroforming. Next, as shown in FIG. 2, this Ni stamper is fixed to a mirror-polished roll base material 21 with an adhesive, a jig, or the like to obtain a roll-shaped stamper 13. Alternatively, the uneven preformat pattern may be formed directly on the roll base material or on a pattern forming layer separately formed on the base material.

Further, in the present invention, as shown in FIG. 3, a stamper 31 is used as a flexible stamper 12 fixed to the surface of a roll base material, in which a plurality of preformat patterns 11 are arranged in the circumferential direction of the roll base material. can be used. When such a stamper is used to form a roll stamper as shown in FIG. 4, one preformat pattern of the information recording medium is formed on one flexible stamper, and the preformat pattern of the information recording medium is formed on the circumferential surface of the roll base material. Compared to a roll stamper like the one shown in Figure 2 in which multiple flexible stampers are fixed, the unevenness on the surface of the roll stamper can be significantly reduced, making it possible to produce a substrate sheet for information recording media with a good surface condition. Therefore, an information recording medium with less noise can be produced.

For example, as shown in FIG. 5, a flexible stamper having a plurality of preformat patterns 11 can be used to stamp resists corresponding to the preformat patterns of an information recording medium having sizes a and b by the above-described method. Glass master disk 101 on which a plurality of patterns 102 are formed
A conductive film 114 is sputtered on the conductive film 114, and then a metal film 115 is formed by electroforming, and the conductive film and the metal film are peeled off from the glass master disc to form a flexible structure having a plurality of preformat patterns 11. A sex stamper 31 is obtained.

By fixing this flexible stamper to the roll base material 21 using a fixture 61 shown in FIG. 6 or by screwing or the like, the stamper can be easily replaced and is inexpensive. It is possible to obtain a roll stamper that can be manufactured in the following manner.

[0037] Furthermore, using the flexible stamper produced here as a father stamper, a resin mother stamper is produced by coating and curing an ultraviolet curable resin on the flexible stamper, and this stamper conductive film and metal The flexible stamper of the present invention can also be obtained by forming a film and peeling it off from the mother stamper. Furthermore, the resin mother stamper can also be produced by a cast molding method.

Furthermore, when producing the above-described flexible stamper, instead of using a glass master disk having a plurality of preformat patterns, resist patterns corresponding to the plurality of preformat patterns are formed on the base film 111 as shown in FIG. A conductive film 11 is formed on the pattern forming surface of the base film master 113.
The flexible stamper 31 having a plurality of preformat patterns 11 can also be obtained by forming the metal film 115 by electroforming. In this case, by using a film (base film) as the base material of the master for manufacturing the stamper, for example, a conductive film formed on the base film master 113 can be rolled up, and as needed. It becomes possible to perform electroforming treatment continuously while feeding the material from the roll accordingly.

Furthermore, as shown in FIG. 8, the base film 111
The flexible stamper 31 can also be obtained by directly forming a plurality of patterns 102 corresponding to the preformat pattern 11 to form a base film master 113, and forming a conductive film 114 and a metal film 115 thereon.

Next, a method of performing continuous electroforming using a base film master will be explained.

FIG. 9 shows a conductive film 1 wound into a roll.
14 is a schematic cross-sectional view of an electroforming apparatus that continuously performs electroforming treatment by sending out a base film master 113 having a base film 14 from a roll. FIG. In the figure, metal chips 133 and 134 made of nickel or the like are denoted by 132, which are feed rollers, and are energizing means for energizing the conductive film 114 and the power source 135. Then, as shown in FIG. 9, the nickel chip in the electroforming bath 131 is set as the + side electrode, and the conductive film 114 formed on the surface of the base film master is set as the - side electrode, and the base film master 131 is continuously Send it into the electroforming solution. FIG. 10 shows an enlarged view of the roll 133 which is the energizing means in this device. (A) is a side view of the roll, (B)
is a front view. Here, the rolls 133 are each roll 13
The base film master 113 is sandwiched between 3-1 and 133-2, and the roll 133-2 continuously maintains contact with the conductive film 114 of the base film master. The contact portion is made of at least a conductive material and is connected to a power source. In this embodiment, as shown in FIG. 10(B), both ends of the roll 133-2 are made into conductive parts 133-2a, and the small diameter part located between them is made into a non-conductive part 133-2b.

Further, in the present invention, the means for supplying electricity between the conductive film 114 and the power supply 135 is not limited to the above-mentioned roll-shaped means, but can maintain continuous contact with the conductive film and stably supply the power supply. It is only necessary to be able to obtain continuity with the
As shown in FIG. 0(C), an energizing means constituted by a conductive member 137 having a pressing means 136 such as a spring can also be used.

In either case, the energized portions may be only at both ends of the base film master. By using such an energizing means, there is no restriction on the longitudinal direction of the base film master, and the length of the flexible stamper can be freely set according to the size of the roll base material or preformat pattern.

Then, while transporting the base film master, a nickel metal film of 100 to 200 μm is deposited under electrolytic conditions with a time integrated current of 17 to 34 A·H (amp hours), and then the conductive film 114 and the metal By peeling off the membrane 115 as a whole from the base film and removing the photoresist adhering to the surface, a flexible suntaper 31 having an arbitrary number of preformat patterns can be obtained.

Finally, as shown in FIG. 6, the flexible stamper 31 is held between the roll base material 21 and the stamper fixture 61, and then the stamper fixture is screwed onto the roll base material. The roll damper of the present invention can be obtained by fixing one or more flexible dampers 31 having a plurality of preformat patterns on the circumferential surface of the roll base material.

Further, as shown in FIG. 6(C), the roll stamper of the present invention can be obtained by fixing both ends of the flexible stamper 31 using stamper fixtures and screws. The base film used to manufacture the stamper mentioned above must be one that can withstand various conditions in the electroforming solution, such as acid-resistant (
Any material may be used as long as it has excellent pH (pH 3 to 4) and heat resistance (50 to 70°C), and for example, polyester film is preferably used. In addition, the surface roughness of the base film is 50
~100 Å or less is desirable.

Next, another embodiment of the method for manufacturing the flexible stamper 31 using a base film will be described.

First, a conductive film 114 is formed on the base film 111 by sputtering or the like (FIG. 11(A)).
Next, a metal film 115 is formed by electroforming. Then, the surface of the metal film is polished (FIG. 11(B)).

As the polishing method, it is preferable to perform at least one of dry polishing and wet polishing so that the surface accuracy is within ±3 Newton rings and the surface roughness is 50 to 100 Å or less.

Next, a resist pattern 102 corresponding to preformat patterns for a plurality of information recording media is formed by a photolithography process (FIG. 11C), and then the metal film 115 is etched to form a plurality of preformat patterns. A flexible stamper 31 can be obtained (
Figure 11(B)).

[0051] As the etching method, dry etching,
An etching method such as wet etching may be used.

[0052] In dry etching, for example, resist
The patterned metal film (electroformed film + conductive film + base film) is etched with C2F6 reactive gas using a dry etching device that allows the metal film to rotate and is equipped with an ion gun for etching. I can,
In wet etching, for example, etching is performed in a solution of hydrofluoric acid and ammonium fluoride NH4F (1:7 weight ratio) for about 1 minute while rotating the metal film (electroformed film + conductive film + base film). .

After etching, O2 plasma ashing is performed using O2 to remove the remaining resist, thereby forming a fine pattern corresponding to the patterning pattern on the metal film.

Flexible stamper 3 produced in this way
1 is fixed to a roll base material so that the peripheral surface of the roll base material and the base film are in contact with each other to obtain a roll stamper of the present invention.

[0055] Also, an adhesive was applied to one side of the base film, and a protective sheet was placed over the formed adhesive layer. Then, on the side opposite to the adhesive layer of the base film,
A plurality of preformat patterns may be formed by performing each of the above steps.

[0056] The thus obtained flexible stamper, which has an adhesive surface on one side and a plurality of predetermined patterns of the upper recording medium formed on the other side, is directly adhered to a roll base material to produce a roll stamper. You can also do that.

[0057] The adhesive used herein is not particularly limited, but natural rubber, styrene-butadiene rubber, recycled rubber, butyl rubber, butadiene-acrylonitrile rubber, polyacrylic acid ester, polyvinyl alkyl ether, etc. are generally used as base polymers. used. In particular, polyacrylic esters and the like having excellent water resistance and heat resistance can be suitably used. Also, something like double-sided tape may be used as the adhesive. There are no particular restrictions on the protective sheet, and it may be used as appropriate in consideration of water resistance and heat resistance.

[0058] Also, when creating a long flexible stamper using a base film in this way, the external size of the preformat of a predetermined information recording medium is set to A (length) as described above. x B (width) and the size of the preformat pattern formed on the flexible stamper is a (length) x b (width) corresponding to A and B above, then b/a>B/
It is preferable to form A. Then, by fixing the flexible stamper to the roll base material so that the length (a) direction of the preformat pattern matches the circumferential direction of the roll base material, distortion of the preformat due to contraction of the resin sheet during extrusion molding is performed. You can get a roll stamper that can prevent this.

In the present invention, metals, semiconductors, dielectrics, or alloys are used as the material for the roll base material, such as A
1. Materials that can be mirror-finished, such as glass, cemented carbide, mold steel (for example, maraging steel), are used, and Cr steel, which can be easily mirror-finished, is particularly preferred.

Next, a method for manufacturing a substrate sheet for an information recording medium using the roll stamper of the present invention will be explained. FIG. 12 is a schematic diagram showing one embodiment of the method for manufacturing a substrate sheet for an information recording medium according to the present invention.

In the figure, 125 is an extruder for extrusion molding, 126 is a T-die, 129 is a pressure molding section, and is composed of three rolls 121, 122, and 123.

At least one of these rolls is a roll stamper of the present invention, and in FIG. 12, 122 is a roll stamper, and 121 and 123 are mirror-finished rolls.

First, the resin pellets 124 charged into the extrusion molding machine 125 are heated and melted in the barrel of the extrusion molding machine, pressurized by a screw, and shaped into a sheet by a T-die. The temperature of the resin at this time is, for example, 260° C. to 330° C. in the case of polycarbonate resin, preferably 280° C. to 320° C., and is continuously extruded from the T-die as a transparent molten resin sheet 127. The T-die is arranged so that this molten sheet is extruded between the rolls 121 and 122 of the pressure forming section 129. Furthermore, the distance between the tip of the T-die and the rolls 121, 122 is set at 1 to prevent the resin from solidifying before it comes into contact with the rollers.
00 mm or less, and the temperature of the surrounding atmosphere between the T-die and the roll is preferably heated to 60° C. or higher.

Next, the resin sheet extruded between the rolls 121 and 122 is pressed between the heated roll stamper 122 and the press roll 123 to transfer the uneven preformat.

The roll stamper of the present invention is maintained at a temperature at which the resin used does not solidify on the roll.

That is, the temperature of the roll stamper is preferably heated to a range of +20 to -20°C above the heat deformation temperature of the resin used. For example, when polycarbonate resin is used, the surface temperature of the roll stamper is preferably 100 to 160°C. Preferably, it is heated. That is, by setting the temperature within the above temperature range, the molten resin sheet is not rapidly cooled, so that shrinkage and other distortions are less likely to occur in the resin sheet. Further, it is preferable that the temperature of the press roll 43 in the pressure forming section is set to be the same as or slightly lower than that of the roll stamper 122.

The temperature of these rolls can be adjusted, for example, by heating them electrically with a heater cast into the rolls,
It is controlled by circulating a heating medium through the center of the roll.

Next, the take-off roll 128 is an important roll for continuous molding, and the roll of the pressure forming section 129 and this take-off roll 128 are driven in synchronization. That is, it is preferable that the circumferential speeds of these two sets of rolls are the same, and that stress such as stretching is not applied to the resin sheet between them. By doing so, it is possible to prevent optical anisotropy from occurring inside the resin sheet.

The thickness of the optical recording medium substrate sheet 127' is determined by the gap between the rolls of the pressure forming section 129, the lip opening of the T-die, and the drawdown rate determined by the ratio of extrusion speed to tension speed. Determined by the degree of stretching.

[0070] As another manufacturing method of the present invention, a preformed resin sheet may be heated and softened, and an accurate concave/convex preformat may be transferred by pressing it with the roll stamper of the present invention. An information recording medium substrate sheet having a format can be obtained.

The resin used in the present invention is preferably a thermoplastic resin that is amorphous and essentially optically isotropic, such as polycarbonate, polyetherimide, polymethyl methacrylate, etc. , polyolefin, etc. can be used.

[0072]

EXAMPLES Example 1 A flexible stamper having nine optical card preformat patterns shown in FIG. 3(A) was manufactured.

Note that the length (A) is the predetermined size of the preformat on the optical card board shown in FIG. 1(B).
30.990mm, width (B) is set to 85.590mm, and within this area, parallel to the width direction of the preformat,
It is assumed that 2583 track grooves each having a groove width of 3 μm are formed in a stripe shape.

The length a of the preformat pattern of the stamper corresponding to this preformat is 3.
1.021 mm and width b of 85.847 mm, 2583 track groove patterns each having a width of 3 μm and a height of 3000 Å corresponding to the track grooves were fabricated in this region parallel to the width direction of the preformat pattern.

The manufacturing method of this stamper is as shown in FIG. 3.
A photoresist (product name: AZ-1370; manufactured by Hoechst Japan) was coated with a spinner to a thickness of 3000 Å on a 40 mm x 340 mm x 10 mm thick glass substrate and heated at 90°C.
Pre-baking was carried out under conditions of 10 minutes.

Next, a laser exposure device (product name: Mirror Projection Mask Aligner MPA-1500
(manufactured by Canon Inc.)) corresponding to the above size.
The pre-format patterns are exposed and the developer Az3 is applied.
A glass master disk 101 having a preformat pattern for light guarding was produced by developing with 12MIF (manufactured by Hoechst Japan Co., Ltd.) (Step A).

Furthermore, as shown in FIG. 2B, as a pretreatment for forming a metal film by electroforming, a conductive treatment is performed using a sputtering device to form a film with a thickness of 1000 Å to 2.
By depositing a 000 Å thick nickel film, the conductive film 11
4 was formed on a glass master disk.

Next, as shown in the same figure (C), a nickel film 1 with a thickness of 100 to 200 μm is formed on the conductive film by electroforming.
15 was formed.

The electroforming solution used here had the following composition.

Nickel sulfamate tetrahydrate [Ni(
NH2SO3)2・4H20]500g/l boric acid [H3
BO3] 35-38g/l Bit inhibitor 2.5
ml/l

Finally, as shown in FIG. 5(D), the conductive film and the metal film are simultaneously peeled off from the glass master, the photoresist adhering to the surface is removed, and a preformat pattern is formed. A flexible stamper with a size of 300 mm x 300 mm as shown in FIG. 3(A) was obtained.

FIG. 6 shows the three flexible stampers thus obtained.
As shown in (B), both ends of the stamper 31 are screwed onto the fixture 61, and a roll base with a diameter of 300 mm is fixed so that the length (a) direction of the preformat pattern matches the circumferential direction of the roll base material. A roll stamper shown in FIG. 4 was produced by fixing it to a material.

Next, using this roll stamper, the image shown in FIG.
An apparatus for manufacturing an optical card substrate sheet shown in No. 2 was manufactured.

[0084] As shown in Fig. 12, the screw diameter is 35mmφ.
A substrate sheet for an optical recording medium was prepared using an extrusion molding machine using a 20 cm wide coat hanger type T-die set downward in extruder 1.

A polycarbonate resin (trade name: Panlite L-1250; manufactured by Teijin Kasei) was used as the resin. In the pressure forming section 129, the rolls 121 and 123 are mirror-finished rolls,
The roll 122 is the previously created roll stamper.

The extrusion conditions for the resin sheet are as follows: The barrel temperature of the extruder 125 is 300°C in part a (Ta) of the extruder 125, and b
part (Tb) = 300°C, part c (Tc) = 320°C,
A molten resin sheet was formed by setting the temperature Td of the T-die 126 to 320°C. The resin temperature at this time is 280℃~320℃
It was ℃.

[0087] The roll stamper 122 is maintained at 140°C, and the roll 121 is kept at a temperature of 1 to 2°C lower than the roll 122.
The temperature of roll 123 is lower than that of roll 122.
The temperature was maintained at 21°C higher.

[0088] The gap between the lip of the T-die and the pressure molding part is 5
0 mm, and the atmosphere from the extrusion of the resin sheet to the pressure molding section was controlled to be 60° C. or higher by surrounding it with a heating box. The lip opening of the T-die is 0.48 mm, the gap between the rolls 121 and 122 in the pressure molding section is 0.4 mm, and the preformat pattern of the roll stamper 122 is transferred to the resin sheet to form an optical card with a thickness of 0.4 mm. We created a substrate sheet for this purpose.

The molding speed of the resin sheet was 2 m/min. Regarding the preformat on the optical card substrate sheet formed in this way, let the length of the preformat in the direction parallel to the conveying direction of the resin sheet be a', and the length in the perpendicular direction be b'. , their a' and b' were measured, and the deviation in the values of a' and B' was measured based on the predetermined dimensions A and B of the preformat.

Example 2 A flexible stamper having six optical card preformat patterns as shown in FIG. 3(A) was manufactured.

Further, the size of the predetermined preformat of the optical card is the same as in Example 1, and the length a of the preformat pattern formed on the stamper corresponding to this preformat is 31.036 mm, and the width b is 85 mm.
．． 932 mm, a width of 3 μm corresponding to the track groove in this area parallel to the width direction of the preformat pattern.
2583 track groove patterns were arranged at equal intervals.

[0092] This stamper was produced using the method shown in FIG.

First, the thickness is 10 μm, the length is 1000 mm,
A sheet of polyester (Lumiror, manufactured by Toray Industries, Inc.) with a width of 300 mm was sandwiched between a Ni stamper with a pattern corresponding to the preformat pattern described above and chrome steel with a thickness of 2 mm, and a pressure of 10 kg/cm2 was applied at 200°C. In addition, the preformat pattern was transferred by heating and pressurizing for 2 minutes to produce a base film master 113 having a plurality of preformat patterns as shown in FIG.

Next, as shown in FIG. 8A, a conductive film 114 was formed on the preformat pattern formation surface.

Next, this conductive film-coated base film master was wound up into a roll, and nickel was formed on the conductive film to a thickness of 220 μm using an electroforming apparatus shown in FIG. At this time, the feed speed of the base film master was 40 mm/min, and the electrolytic conditions were 250 AH.

Next, the conductive film and the nickel film were peeled off from the base film master to obtain a long flexible stamper. This long stamper is cut into a flexible stamper having six preformat patterns, and then the length of the preformat pattern (a) is
6(c) so that the direction matches the circumferential direction of the roll base material.
) to produce a roll stamper.

Using this roll stamper, an extrusion molding device was fabricated in the same manner as in Example 1, and a substrate sheet for an optical card was molded. The length (a') and width (b') of the sample were evaluated for deviation from the predetermined length (A) and width (B).

Example 3 A flexible stamper having nine optical card preformat patterns 11 shown in FIG. 3(A) was manufactured.

Note that the size of the predetermined preformat of the optical card is the same as in Example 1, and the length a of the preformat pattern 11 formed on the stamper corresponding to this preformat is 31.005 mm, and the width b.
is 85.676 mm, and 25 track groove patterns with a width of 3 μm and a height of 3000 Å corresponding to the track grooves are formed in this area parallel to the width direction of the preformat pattern.
83 pieces were arranged at equal intervals.

[0100] This stamper was produced using the method shown in FIG.

First, as shown in FIG. 11(A), a film with a thickness of 1,000 to 2
A conductive film 114 was formed on the base film 111 by depositing a 000 Å nickel film using a sputtering device.

The base film 111 having the electrically conductive film 114 was wound up into a roll, and a metal film 115 was formed on the electrically conductive film using an electroforming apparatus shown in FIG. That is, first, as shown in FIG. 9, the nickel chip 132 in the electroforming tank is set as the + side electrode and the base film coated with the conductive film is set as the negative side, and the base film is placed in the nickel sulfamate electroforming solution. While moving the base film coated with the conductive film 114 in the direction of the arrow in FIG.
00 to 200 μm of nickel metal is deposited to form metal film 1.
15 was formed.

The electroforming solution used here had the following composition.

Nickel sulfamate tetrahydrate [Ni(
NH2SO3)2.4H2O] 500g/l boric acid [
H3BO3] 35-38g/l pit inhibitor 2
．． 5ml/l

Next, the polishing method for polishing the surface of the metal film 115 involves two steps: dry polishing and wet polishing.
230 (trade name) for 8 hours, and wet polishing for 16 hours using Suede 7355-000F42S (trade name) as the polishing cloth and POLIPLA 700 (trade name) as the abrasive. The degree of polishing is as follows: surface precision is within ±3 Newton rings, surface roughness is 50 to 100.
It was set to be less than angstrom.

Next, Az137 was used as a photoresist.
0 (manufactured by Hoechst Japan), and was applied onto the polished metal film 115 using a roll coater to a thickness of 3000 Å. Thereafter, prebaking was performed at 90° C. for 30 minutes. Next, a preformat pattern (stripe shape) for an optical card is exposed using a laser exposure device and a mirror projection mask aligner MPA-1500 (manufactured by Canon Inc.), and a developer Az312MIF is used.
(manufactured by Hoechst Japan) and post-baked to form a resist pattern. Finally, the metal film 115 is formed by wet etching.

Wet etching is performed by rotating the metal film (electroformed film + conductive film + base film) with a solution of hydrofluoric acid and ammonium fluoride NH4F (1:7 weight ratio).
Etching was performed in about minutes.

After etching, O2 plasma ashing was performed using O2 to remove the remaining resist, thereby forming a preformat pattern 11 on the metal film 115 to obtain a long flexible stamper. Next, this stamper was cut to fit a roll base material with a diameter of 300 mm, and similarly to Example 2, it was fixed so that the length (a) direction of the preformat pattern coincided with the circumferential direction of the roll stamper to prepare an optical card substrate. A sheet was formed.

As described above, the dimensional deviations between a' and b' of Examples 1 to 3 and the respective values of A and B were measured, and the results are shown in Table 1.

Example 4 A flexible stamper 12 having a preformat pattern for an optical card shown in FIG. 2(A) was manufactured.

[0111] The size of the predetermined preformat of the optical card is the same as in Example 1, and corresponding to this preformat, the length a of the preformat pattern formed on the stamper is 31.012 mm, and the width b is 31.012 mm. 85.803 mm, and 2583 track groove patterns each having a width of 3 μm corresponding to the track grooves were produced in this area parallel to the width direction of the preformat pattern.

[0112] The stamper 12 has a thickness of about 200 μm and a size of 90 mm x 90 mm using a normal photolithography process.
A card having one preformat pattern for an optical card with a size of 1 was fabricated.

FIG. 6 shows the nine flexible stampers thus obtained.
As shown in (B), attach both ends of the stamper 12 to the fixture 15.
3 and screws to a roll base material with a diameter of 300 mm so that the length (a) direction of the preformat pattern matches the circumferential direction of the roll stamper to produce the roll stamper shown in FIG. 2(A). did.

Using this roll stamper, an optical card substrate sheet was manufactured in the same manner as in Example 1, and the sizes a' and b of the preformat formed on the resin sheet were
' was evaluated. The results are shown in Table-1.

Examples 5 and 6 As Examples 5 and 6, preformat patterns were transferred in the same manner as in Example 1, except that the dimensions a and b of the preformat patterns were set to the sizes shown in Table 1.

[0116] The results are shown in Table-1.

Comparative Example 1 As a comparative example, dimensions a and b of the preformat pattern
The preformat pattern was transferred in the same manner as in Example 1, except that A and B were made equal to the dimensions A and B of the predetermined preformat, respectively. The results are shown in Table-1.

[0118]

[Table 1]

[0119]

As explained above, by the roll stamper of the present invention and the method for manufacturing a substrate sheet for an information recording medium using the same, it is possible to accurately transfer a concavo-convex preformat onto a resin sheet.

[0120] Furthermore, it has become possible to continuously produce a resin sheet on which a concavo-convex preformat has been accurately transferred.

In particular, as a pre-format of an optical card, for example, the track groove 17 has a groove width of 2.5 μm and a pitch of 1.
Stripes of 2 μm are formed, but the standard stipulates that variations in the track pitch must be suppressed within a range of 12 μm ± 0.1 μm, and if it deviates from this range, a tracking error will occur in the recording/reproducing light. It becomes easier. Therefore, when extrusion molding is used to form a rectangular preformat for an optical card having a size of A×B as shown in FIG. As the length corresponding to B, the circumferential length of the roll stamper is a,
When the length in the direction perpendicular to the circumferential direction is b, by making the value of b/a larger than the value of B/A, the cooling of the resin sheet after extrusion molding and transfer of the preformat can be Since the dimensions of the preformat pattern due to shrinkage can be corrected, it is possible to mass-produce high-quality substrates for optical cards with less tracking error.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of a roll stamper of the present invention. (A) A schematic diagram of a method for manufacturing an optical card substrate using the roll stamper of the present invention. (B) A plan view of a predetermined preformat of the optical card substrate.

FIG. 2 is a schematic diagram of a roll stamper of the present invention. (A) Schematic diagram of a roll stamper for forming an optical card substrate. (B) Schematic diagram of a roll stamper for forming an optical disc substrate.

FIG. 3 is a schematic diagram of a flexible stamper of the present invention. (A) Schematic diagram of a stamper for molding an optical card substrate. (B) Schematic diagram of a stamper for molding an optical disc substrate.

FIG. 4 is a schematic diagram showing another embodiment of the roll stamper of the present invention.

FIG. 5 is a process diagram showing the manufacturing process of the flexible stamper of the present invention.

FIG. 6 is a schematic diagram showing a method of fixing a flexible stamper to a roll base material. (A) A schematic diagram showing an embodiment of a method for fixing a flexible stamper to a roll base material. (B) A schematic diagram of a roll stamper formed by fixing a plurality of flexible stampers to a roll base material. (C) A schematic diagram of a roll stamper formed by fixing both ends of a flexible stamper.

FIG. 7 is a process diagram showing another method for manufacturing a flexible stamper.

FIG. 8 is a process diagram showing still another method of manufacturing a flexible stamper.

FIG. 9 is a schematic diagram of an electroforming apparatus used for manufacturing the flexible stamper of the present invention.

10 is a schematic diagram of an energizing means of the electroforming apparatus of FIG. 9. FIG. (A) A side view of a roll-shaped energizing means. (B) A front view of the roll-shaped current supply means. (C) A schematic diagram showing another embodiment of the energizing means.

FIG. 11 is a process diagram showing still another method of manufacturing a flexible stamper.

FIG. 12 is a schematic diagram showing a method of manufacturing a substrate sheet for an information recording medium using the roll stamper of the present invention.

FIG. 13 is a plan view of the base film master of the present invention.

[Explanation of symbols]

11 Preformat pattern 12 Stamper 13 Roll stamper 14 Pressure roll 15 Substrate sheet for optical card 16 Optical card substrate 17 Track groove 21 Roll base material 31 Flexible stamper 61 Stamper fixture 101 Glass master disc 102 Resist pattern 111 Base film 113 Base film master 114 Conductive film 115 Metal film 121,123 Mirror roll 122 Roll stamper 124 Resin pellets 125 Ruder 126 T-die 127 Resin sheet 128 Conveyance roll 129 Pressure forming part 131 Electroforming tank 132 Nickel chip 133,134 Energizing means 135 Power supply 136 Pressing means 137 Conductive member

Claims (1)

[Scope of Claims] [Claim 1] A substrate sheet for an information recording medium is formed by having a preformat pattern corresponding to a preformat of an information recording medium and continuously transferring the preformat pattern onto a resin sheet. In the roll stamper for the purpose of the present invention, when the predetermined length of the preformat of the information recording medium is A and the predetermined width is B, the preformat pattern corresponds to the length A in the circumferential direction of the roll stamper. It has a length a, a width b corresponding to the width B in the direction perpendicular to the circumferential direction, and the value of b/a is larger than the value of B/A. Roll stamper for forming substrate sheets for information recording media. 2. The molding roll stamper according to claim 1, wherein the information recording medium is an optical card. 3. Let A be the predetermined length of the preformat of the optical card, and B be the predetermined width of the preformat pattern of the optical card. 3. The molding roll stamper according to claim 2, which has a width b corresponding to the width B in a direction perpendicular to the direction, and the A and a and the B and b have the following relationship. 0.05≦{(a-A)/A}×100≦0.150.
1≦{(b-B)/B}×100≦0.5 [Claim 4]
The molding roll stamper according to claim 3, wherein the above B and b have the following relationship. 0.2≦{(b-B)/B}×100≦0.4.Claim 5: A preformat pattern corresponding to a preformat of an information recording medium, the preformat pattern being placed on a resin sheet, In a roll stamper for forming a substrate sheet for an information recording medium by continuous transfer, a plurality of preformat patterns are formed in the circumferential direction of the roll stamper, and the preformat pattern is When the predetermined length of the preformat of the information recording medium is A and the predetermined width is B, the length a corresponding to the length A in the circumferential direction of the roll stamper and the width B in the direction perpendicular to the circumferential direction. has a width b corresponding to
A roll stamper for forming a substrate sheet for an information recording medium, characterized in that the value of b/a is larger than the value of B/A. 6. The roll stamper has a roll base material and a flexible stamper fixed to the surface of the roll base material, and the preformat pattern is formed on the surface of the flexible stamper. 6. The molding roll stamper according to claim 5, wherein a plurality of roll stampers are formed in the circumferential direction. 7. A molding roll stamper according to claim 6, further comprising means for fixing said flexible stamper to said roll base material. 8. The fixing means includes a stamper fixing device for holding the flexible stamper between the roll base material and screwing means for fixing the fixing device to the roll base material. Roll stamper for molding. 9. A roll stamper having a plurality of preformat patterns in the circumferential direction corresponding to the preformat of the information recording medium, and forming a substrate sheet for an information recording medium by continuously transferring the preformat pattern onto a resin sheet. The manufacturing method is characterized by having the following steps. a) A process of forming a plurality of preformat patterns corresponding to the preformat of an information recording medium on the surface of a long base film in the longitudinal direction of the base film to produce a base film master. b) A step of forming a conductive film on the pattern-forming surface of the base film master. c) A step of forming a metal film on the conductive film by electroforming. d) A step of peeling off the conductive film and the metal film from the base film master to produce a long flexible stamper having a plurality of preformat patterns. e) fixing the flexible stamper to a roll substrate. 10. The preformat pattern has a length a and a width B corresponding to the length A, where A is the predetermined length and B is the predetermined width of the preformat of the information recording medium. It is formed to have a corresponding width b and a value of b/a larger than the value of B/A, and is formed so that the circumferential direction of the roll base material and the length direction of the preformat pattern match. 10. The method for manufacturing a roll stamper according to claim 9, wherein the flexible stamper is fixed to a roll base material. 11. A method for manufacturing a substrate sheet for an information recording medium in which a roll stamper having a preformat pattern is used to continuously transfer the preformat pattern onto a resin sheet, wherein the preformat pattern is When the predetermined length of the preformat of the recording medium is A and the predetermined width is B, the length a corresponds to the above length A in the circumferential direction of the roll stamper, and the above width B corresponds to the direction perpendicular to the circumferential direction. 1. A method of manufacturing a substrate sheet for an information recording medium, comprising using a roll stamper having a width b and a value of b/a larger than B/A. 12. The information recording medium substrate sheet according to claim 11, which uses a roll stamper in which a flexible stamper having a plurality of preformat patterns in the circumferential direction of the roll stamper is fixed to the peripheral surface of a roll base material. Production method. 13. A step of producing a base film master by forming a plurality of preformat patterns corresponding to the preformat of an information recording medium on the surface of the long base film in the longitudinal direction of the base film, a pattern of the base film master; A step of forming a conductive film on the formation surface, a step of forming a metal film on the conductive film by electroforming so as to be integrated with the conductive film, and peeling off the conductive film and the metal film from the base film. A method for manufacturing a long flexible stamper, comprising the step of: 14. Claim 13, wherein the metal film is formed by electroforming while continuously conveying the base film master.
A method for manufacturing a flexible stamper. 15. The flexible electroforming apparatus according to claim 13, wherein an electroforming device having an energizing means for energizing the conductive film and a power source is used in the step of forming a metal film on the conductive film by electroforming. Method of manufacturing a sex stamper. 16. The method for manufacturing a flexible stamper according to claim 15, wherein the current supply means is a roll having a conductive portion. 17. The method for manufacturing a flexible stamper according to claim 15, wherein the energizing means is a conductive member having means for pressing against the conductive film. 18. The preformat pattern of the flexible stamper has a length a corresponding to the length A, where A is the predetermined length and B is the predetermined width of the preformat of the information recording medium. , and has a width b corresponding to the width B, and a value of b/a is larger than a value of B/A. 19. A step of forming a conductive film on the surface of a long base film, a step of forming a metal film on the conductive film by electroforming, and a photolithography process on the metal film to form an information recording medium. A method for manufacturing a flexible stamper, comprising the step of forming a plurality of preformat patterns corresponding to a preformat in the longitudinal direction of the elongated base film. 20. The flexible method according to claim 19, wherein a long base film having a conductive film formed on its surface is continuously conveyed and electroforming is performed to form a metal film on the conductive film. Stamper manufacturing method. 21. In the step of forming a metal film on the conductive film by electroforming, a continuous contact state with the conductive film is maintained to conduct electricity between the conductive film and a power supply. 21. The method for manufacturing a flexible stamper according to claim 20, which uses an electroforming device having an energization means for controlling the temperature. 22. The preformat pattern of the flexible stamper has a length corresponding to the length A, where A is the predetermined length and B is the predetermined width of the preformat of the information recording medium. 20. The method of manufacturing a flexible stamper according to claim 19, wherein the stamper has a width b corresponding to the width B, and the value of b/a is larger than the value of B/A. 23. A plurality of preformat patterns corresponding to the preformat of the information recording medium are provided on the surface of the long base film in the longitudinal direction of the base film, and the preformat pattern forming surface of the base film is conductive. An electroforming apparatus that forms a metal film on the conductive film while continuously conveying a conductive base film master on which a conductive film is formed, the electroforming device continuously conveying a conductive base film master on which a conductive film is formed, and continuously contacts the conductive film. 1. An electroforming device comprising an energizing means for energizing the conductive film and a power source while maintaining the state.