JPH08217415A - Method for diagnosing ozone-generating equipment - Google Patents

Abstract

PURPOSE: To improve the operating efficiency of the subject equipment by detecting the capacity drop thereof based on the change in the discharge power necessary for standard ozone generation to prevent the equipment from abnormal stop. CONSTITUTION: During the operation of an ozone-generating equipment, the present value UW of ozone-generating power unit is calculated based on discharge power W, ozone concentration C and ozonized air flow Qm to judge whether or not the value UW is raised from the initial value UW0 beyond a specified limit K. If the answer is 'yes', capacity drop of the equipment is informed, thereby the equipment can be diagnosed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of diagnosing ozone generating equipment for diagnosing the state of ozone generating equipment that generates ozone by electric discharge, and in particular, equipment based on a change in discharge power required to generate a standard amount of ozone. The present invention relates to a method for diagnosing ozone generating equipment, which can prevent abnormal stoppage of ozone generating equipment and improve reliability by detecting a decrease in the capacity of the ozone generating equipment.

[0002]

2. Description of the Related Art Conventionally, in the field of water purification, ozone generating equipment has been widely used which generates a large amount of ozone and purifies water by a strong oxidizing power of ozone by contact with gas and liquid.

FIG. 6 is a block diagram showing the configuration of this type of ozone generating equipment. In this ozone generating equipment, the air supplied from the air source blower 1 is dried by the air cooling / drying device 2 to a dew point of about −60 ° C. and supplied to the ozone generator 3.

In the ozone generator 3, a high frequency high voltage supplied from the high frequency inverter power source 4 is applied to the supplied dry air to generate ozone. At the outlet of the ozone generator 3, the ozonized air containing the generated ozone is pressure-measured by the ozonized-air pressure gauge 5, the flow rate is measured by the ozonized-air flow meter 6, and the ozonized-air thermometer 7 is used. The temperature is measured, and the ozone concentration is measured by the ozone concentration meter 8.

On the other hand, the voltage of the high frequency high voltage signal supplied to the ozone generator 3 is converted into a meter input signal through the meter transformer 9 and input to the discharge power meter 10, and the current of the high frequency high voltage signal is measured by the meter. It is converted into a meter input signal via the current transformer 11 and input to the discharge power meter 10. Discharge power meter 1
0 calculates discharge power based on each meter input signal.

Further, the secondary cooling water having a constant temperature supplied from the chiller 12 is heat-exchanged with the circulating cooling water in the heat exchanger 13. The circulating cooling water is supplied to the ozone generator 3 by the circulating water pump 14 to cool the heat generated when ozone is generated. The circulating cooling water whose temperature has risen due to this cooling is measured by the circulating cooling water return thermometer 15 while being returned to the heat exchanger 13.

As an ozone generating facility of this type,
As another configuration, instead of the chiller 12, a system in which a cooling water layer and a cooling water pump circulate the cooling water between the heat exchanger and the cooling water layer can be used.

Further, in such an ozone generating facility, there are items such as a failure of each device, an abnormally high return temperature of circulating cooling water, and an abnormally high temperature of ozonized air as criteria for judging an abnormal occurrence. If any of the above apply, it has been suspended. Furthermore, even if there is no abnormality, this kind of ozone generating equipment is maintained and managed by periodic inspection.

[0009]

However, in the ozone generating equipment as described above, there is a problem that it will be stopped due to an unexpected occurrence of an abnormality. In severe cases, stop the entire water purification treatment plant to which the ozone generating equipment belongs. There is an unavoidable problem.

In the maintenance management by the periodical inspection, if the inspection cycle is short, unnecessary maintenance increases the maintenance cost, and if the inspection cycle is long, the running cost increases due to the increase of the ozone generating power consumption. There is a problem that the probability of equipment stoppage due to the occurrence of an abnormality increases.

The present invention has been made in consideration of the above-mentioned circumstances, and it is possible to prevent an abnormal stoppage of the equipment by detecting a decrease in the capacity of the equipment based on the change in the discharge power required for the generation of a standard amount of ozone. An object of the present invention is to provide a method for diagnosing ozone generating equipment that can improve the operating rate.

Another object of the present invention is to provide a method of diagnosing ozone generating equipment, which can detect the performance deterioration of equipment to suggest the cycle of performance deterioration, and thereby optimize the cycle of periodic inspection. To do.

[0013]

According to a first aspect of the present invention, there is provided an ozone generating equipment diagnosing method for diagnosing a state of ozone generating equipment for generating ozone by electric discharge, wherein the discharge power is used when the ozone generating equipment is in operation. A step of calculating a current value of the ozone generating power intensity based on the ozone concentration and the ozonized air flow rate, and a current value of the ozone generating power intensity is lower than an initial value of the ozone generating power intensity. A step of determining whether or not a rise exceeds a predetermined allowable value, and as a result of this determination, indicating that the present value of the ozone generating power consumption unit has risen above the initial value by more than the allowable value. A method for diagnosing ozone generating equipment, comprising the step of notifying deterioration of the capacity of the ozone generating equipment.

According to a second aspect of the present invention, in the method for diagnosing ozone generating equipment according to the first aspect, as a result of the determination, the present value of the ozone generating power consumption unit is the allowable value rather than the initial value. One of the rate of change of the ozonized air temperature and the rate of change of the circulating cooling water return temperature in the ozone generator, and the rate of change calculated above Alternatively, when both of them exceed the applicable permissible change rate, a step of giving a notice of abnormality of the ozone generating equipment is included.

Further, the invention according to claim 3 is an ozone generating equipment diagnosing method for diagnosing a state of ozone generating equipment for generating ozone by discharge, in the ozone generating equipment at the initial operation of the ozone generating equipment. Based on the discharge power for ozone generation, the ozone concentration of ozonized air, the flow rate of ozonized air, and the return temperature of the circulating cooling water, the discharge power required to generate a standard amount of ozone is indicated. The step of setting the dependency of the circulating cooling water return temperature on the value, and at the time of the present operation of the ozone generating equipment, the ozone based on the discharge power amount for ozone generation, the ozone concentration and the ozonized air flow rate. Calculating the current value of the basic unit of power generation, the current circulating cooling water return temperature and the The step of obtaining an initial value of the ozone generating power intensity corresponding to the current circulating cooling water return temperature based on the nature setting content, and the current value of the ozone generating power intensity is more predetermined than the obtained initial value. And a step of determining whether or not the current value of the ozone generation electric power consumption rate exceeds the allowable value above the obtained initial value. At the time of showing, it is a method of diagnosing ozone generating equipment, which includes a step of notifying a decrease in capacity of the ozone generating equipment.

Further, in the invention according to claim 4, in the method for diagnosing ozone generating equipment according to claim 3, as a result of the determination, the current value of the ozone generating power intensity is lower than the determined initial value. When indicating that the temperature does not rise above the allowable value, either one of the step of calculating the rate of change of the ozonized air temperature and the rate of change of the circulating cooling water return temperature, or each of the calculated rate of change, or A method for diagnosing ozone generating equipment, comprising the step of giving a notice of abnormality of the ozone generating equipment when both exceed applicable permissible change rates.

[0017]

Therefore, according to the invention corresponding to claim 1, by taking the means as described above, the ozone generating power consumption unit is based on the discharge power, the ozone concentration and the ozonized air flow rate during the operation of the ozone generating equipment. The current value of the ozone generation power intensity is calculated and it is determined whether or not the current value of the ozone generation power intensity has exceeded the initial value of the ozone generation power intensity by more than a predetermined allowable value. When it shows that the current value of the basic unit has exceeded the initial value and exceeds the allowable value, it is possible to notify that the capacity of the ozone generation facility has deteriorated. By detecting the drop, prevent abnormal stoppage of equipment,
Therefore, the operating rate can be improved.

Further, in the invention according to claim 2, when the result of the determination according to claim 1 is that the present value of the ozone generating power consumption unit does not exceed the initial value by more than the permissible value, the ozone is generated. Calculate the rate of change of the temperature of the liquefied air and the rate of change of the return temperature of the circulating cooling water in the ozone generator, and when either or both of the calculated rates of change exceed the applicable allowable rate of change, the ozone Since it is possible to give an advance notice of an abnormality in the equipment that has occurred, in addition to the same action as that of claim 1, even when a decrease in capacity is not detected, the sign of an abnormality can be detected, and the abnormal stop can be more effectively performed. Can contribute to prevention.

Further, the invention according to claim 3 is, in the initial operation of the ozone generating equipment, discharge power for ozone generation in the ozone generating equipment, ozone concentration of ozonized air, ozonized air flow rate and circulation. Based on the cooling water return temperature, the dependency of the circulating cooling water return temperature on the initial value of the ozone generation power intensity that indicates the discharge power required to generate a standard amount of ozone is set, and when the ozone generating equipment is currently operating, Based on the discharge power for ozone generation, ozone concentration and the flow rate of ozonized air, calculate the current value of the basic unit of power for ozone generation, and at the time of the current operation of the ozone generation equipment, the current circulating cooling water return temperature and its dependency. Based on the setting contents of, the initial value of the ozone generation power consumption unit corresponding to the current circulating cooling water return temperature was calculated, and the current value of the ozone generation power consumption unit was calculated. It is determined whether or not the current value of the ozone generation power consumption rate exceeds the required initial value by judging whether or not it has risen by more than a predetermined permissible value above the period value. When it indicates, since the deterioration of the capacity of the ozone generating equipment is notified, in addition to the same effect as that of claim 1, the value of the ozone generating basic unit at the initial stage of operation was determined in correspondence with the current circulating cooling water return temperature. Therefore, even if the circulating cooling water return temperature is different between the initial operation time and the current operation time due to a change in season or the like, it is possible to more accurately detect whether or not the capacity of the facility is deteriorated.

Further, according to the invention corresponding to claim 4, as a result of the determination according to claim 3, it is determined that the present value of the ozone generating power consumption rate does not exceed the permissible value above the determined initial value. When calculating, the rate of change of the ozonized air temperature and the rate of change of the circulating cooling water return temperature are calculated, and when either or both of the calculated rate of change exceed the applicable allowable rate of change, the ozone Since it is possible to give an advance notice of an abnormality in the generating equipment, it is possible to exert the same action as the action corresponding to claim 2 in addition to the action corresponding to claim 3.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a configuration in which an ozone equipment diagnostic apparatus 21 according to a first embodiment of the present invention is applied to ozone generation equipment. The same parts as those in FIG. It is omitted and only different parts will be described here.

This ozone equipment diagnostic device 21 has an ozonized air flow rate Qm measured by an ozonized air flow meter 6 and an ozonized air temperature t measured by an ozonized air thermometer 7.
O3, a predetermined ozonized air reference temperature ts, a function of calculating a normalized ozonized air flow rate Qn based on the ozonized air pressure P measured by the ozonized air pressure gauge 5 and the predetermined ozonized air pressure Ps. , The ozone concentration C measured by the ozone concentration meter 8 and the above-mentioned ozonized air temperature tO3
A function to calculate the 0 ° C converted ozone concentration C0 based on
The calculated normalized ozonized air flow rate Qn and the 0 ° C. converted ozone concentration C0 are multiplied to generate the ozone generation amount O3.
And a function of calculating the discharge power W calculated by the discharge power meter 10 by the ozone generation amount O3 to calculate the ozone generation power unit UW, and the ozone generation power unit at the beginning of the operation of the ozone generation facility. A function of subtracting the above-mentioned ozone generation power unit UW from UWo to detect a performance deterioration when the subtraction result is large, and a change rate of the circulating cooling water return temperature tw measured by the circulating cooling water return thermometer 15. Alternatively, it has a function of notifying an abnormal occurrence when the rate of change of the ozonized air temperature t is large. The ozone facility diagnosis device 21 specifically executes the above-described function deterioration detection function and abnormality occurrence notification function according to the procedure shown in the flowchart of FIG. In addition, the ozone equipment diagnostic device 21
Has a display unit 22 and has a function of displaying the fact on the display unit 22 when a performance deterioration is detected or a notice of an abnormality is given.

Next, a method of diagnosing ozone generating equipment by the ozone equipment diagnosing device 21 configured as described above will be described with reference to FIG. Now, as described above, it is assumed that ozone is generated by the operation of the ozone generating equipment. At this time, the discharge power meter 10 calculates the discharge power W based on the following equation (1) (ST1).

[0024]

[Equation 1]

Subsequently, the discharge power meter 10 sends the calculated discharge power W to the ozone facility diagnostic device 21. On the other hand, the ozone facility diagnostic device 21 calculates the normalized ozonized air flow rate Qn based on the measured ozonized air flow rate Qm, ozonized air temperature tO3, and ozonized air pressure P as shown in the following equation (2). Calculate to. Qn = Qm × {(273 + ts) / (273 + t03)} 1/2 × {(1.033 + P) / (1.033 + Ps)} ^1/2 (2) Next, the measured ozone concentration C and Ozonized air temperature t
Based on O3, the 0 ° C converted ozone concentration C0 is calculated as shown in the following equation (3). C0 = C × (273 + ts) / 273 (3) Then, based on the normalized ozonized air flow rate Qn calculated from the equation (2) and the 0 ° C. converted ozone concentration C0 calculated from the equation (3). Then, the ozone generation amount O3 is calculated by the following (4)
It is calculated as shown in the formula (ST2). O3 = Qn × C0 (4) Next, based on the discharge power W calculated from the equation (1) and the ozone generation amount O3 calculated from the equation (4), the ozone generation power unit UW is calculated as follows. It is calculated as shown in the equation (5) (ST3). UW = W / O3 (5) At the beginning of the operation of the ozone generating facility, the ozone generating power unit UW0 is calculated in the same manner as described above. Therefore, it is possible to determine whether or not the capacity of the ozone generating equipment is deteriorated by determining whether or not the current ozone generating power consumption unit UW is higher than the ozone generating power consumption unit UW0 at the initial stage of operation (ST4).

That is, the decrease in the ozone generation capacity is caused when the current ozone generation power unit UW rises above the power generation unit change determination constant K higher than the ozone generation power unit UW0 at the beginning of operation. This is applicable when the formula (6) is satisfied. UW-UW0> K (6) Here, when the expression (6) is satisfied, the display unit 22 is controlled so as to display the message "increase in unit ozone generation power UW" (ST5).

Thus, it is possible to notify the operator of the deterioration of the capacity of the ozone generating equipment, and expect the operator to perform preventive maintenance measures and to judge the periodic inspection timing before the abnormality of the ozone generating equipment occurs.

On the other hand, if the equation (6) is not satisfied, then it is determined by the following (7) whether or not the rate of change of the circulating cooling water return temperature tw exceeds a predetermined circulating cooling water return temperature abnormality determination constant L. Then, it is further determined by the following equation (8) whether or not the change rate of the ozonized air temperature t03 exceeds a predetermined ozonized air temperature change rate abnormality determination constant M (ST6). dtw / dt> L (7) dt03 / dt> M (8) Here, when either or both of the formula (7) and the formula (8) are satisfied, a sign of occurrence of some abnormality in the ozone generating facility Then, the display unit 22 is controlled so as to display the message "Ozone generating facility abnormality notice" (ST7).

As a result, as described above, it is possible to expect the operator to carry out preventive maintenance measures before an abnormality occurs. In addition, when both (7) type | formula or (8) type | formula are not satisfy | filled, it is judged that ozone generating equipment is normal, and the diagnostic process of ozone generating equipment is complete | finished.

As described above, according to the first embodiment, at the time of initial operation of the ozone generating equipment, the ozone generating power consumption unit UW0 at the initial operation is calculated using the equations (1) to (5), Similarly, at the time of the current operation, the current ozone generation power consumption unit UW is calculated, and the current value UW of the ozone generation power consumption unit is set to a power consumption unit change determination constant K rather than the initial value UW0 by using the equation (6). If it is determined that the current value UW of the ozone generation electric power consumption rate exceeds the initial value UW0 by more than the electric power consumption rate change determination constant K, it is determined whether or not the ozone generation is increased. Since it is possible to notify the decrease in the capacity of the equipment, it is possible to prevent abnormal stoppage of the equipment by detecting the decrease in the capacity of the equipment based on the change in the discharge power required for the generation of a standard amount of ozone, and thus to improve the operating rate. it can.

Further, according to the first embodiment, as a result of the determination, the present value UW of the ozone generating power consumption rate is the initial value UW0.
When it indicates that the power unit change rate K does not exceed the constant K, the change rate of the ozonized air temperature t03tw and the circulating cooling water return temperature tw in the ozone generating facility are calculated using the equations (7) and (8). If any one or both of the calculated change rates exceed the applicable allowable change rate, it is possible to notify the abnormality of the ozone generating equipment, so if the decrease in capacity is not detected. Even so,
It is possible to detect a sign of abnormality, and more effectively contribute to prevention of abnormal stop.

Next, a second embodiment of the present invention will be described. FIG. 3 is a block diagram showing a configuration in which the ozone equipment diagnostic apparatus 21 according to the second embodiment of the present invention is applied to ozone generating equipment. The same parts as those in FIG. It is omitted and only different parts will be described here.

That is, unlike the first embodiment, the device of this embodiment is a chiller 1 capable of supplying secondary cooling water at a constant temperature.
In place of 2, the cooling water layer 31 and the cooling pump 32 whose cooling water temperature fluctuates depending on the season etc. are applied to an ozone generating facility of a system in which cooling water is circulated between the heat exchanger 13 and the cooling water layer 31. Specifically, instead of the step ST4 using the formula (6) shown in FIG.
As shown in (4), the process of step ST4a using the following equation (6a) is included so as to correct the seasonal change in the circulating cooling water return temperature tw. UW (twi) -UW0 (twi)> K (6a) Here, the unit ozone generation power unit UW0 (tw) in the initial stage of operation
i) is a function of the circulating cooling water return temperature tw as shown in the equation (6a). That is, as shown in FIG. 5, the dependency of the circulating cooling water return temperature twi in the ozone generating power unit UW0 is measured and held in advance at the beginning of the operation of the ozone generating equipment, and the current circulation is based on the held contents. The ozone generation power consumption unit UW0 at the initial stage of operation corresponding to the cooling water return temperature twi is calculated. Note that the current unit ozone generation power UW0 is already the current circulating cooling water return temperature t.
Since it corresponds to wi, the calculated value is used as it is.

As described above, in the process of comparing the increase amount from the ozone generation electric power consumption unit UW0 in the initial operation of the present ozone generation electric power consumption unit UW with the electric power consumption change reference constant K, the ozone generation electric power in the initial operation is calculated. Since the value of the unit UW0 is taken as the value of the ozone generation unit UW0 (twi) corresponding to the current circulating cooling water return temperature twi, the circulating cooling water return temperature tw0 at the beginning of operation and the current circulating cooling water return temperature tw i are calculated. Even if the ozone generation power consumption unit UW has risen, it is possible to accurately evaluate whether or not the ozone generation power consumption unit UW has risen, even if it changes due to seasonal changes and the like, and thus it is possible to improve the accuracy of capacity drop detection in ozone generation equipment.

As described above, according to the second embodiment, unlike the first embodiment using the chiller 12, the ozone generating equipment using the cooling water layer 31 in which the cooling water temperature fluctuates depending on the season or the like is used. Since it has been applied, ozone generation power consumption unit UW0
Based on the dependency of the circulating cooling water return temperature twi in
The unit ozone generation power unit UW0 (twi) at the initial stage of operation corresponding to the circulating cooling water return temperature tw i is calculated, and this UW0 (tw
Since i) is used to evaluate whether or not the ozone generation power intensity UW has risen, it is possible that the circulating cooling water return temperature tw0 at the initial stage of operation and the current circulating cooling water return temperature tw differ depending on the season. Accurately, the basic unit of ozone generation power UW
It is possible to evaluate whether or not there is an increase in the value of, and thus, it is possible to improve the accuracy of detection of performance deterioration in the ozone generation equipment.

Further, according to the second embodiment, similarly to the first embodiment, the abnormality of the ozone generating facility is notified based on the change rate of the ozonized air temperature and the change rate of the circulating cooling water return temperature. Therefore, even if the deterioration in performance is not detected, the sign of abnormality can be detected, and it is possible to more effectively contribute to the prevention of abnormal stop.

In the first embodiment described above, the initial value U of the ozone generating electric power consumption rate is set during the initial operation of the ozone generating equipment.
The case where W0 is calculated has been described, but the present invention is not limited to this, and the present invention is similarly implemented and the same is performed even when a predetermined value is set as the initial value UW0 instead of calculating the initial value UW0. The effect can be obtained. In addition, the present invention can be modified in various ways without departing from the scope of the invention.

[0038]

As described above, according to the first aspect of the present invention, when the ozone generating equipment is in operation, the current value of the basic unit of ozone generating power is calculated based on the discharge power, the ozone concentration and the ozonized air flow rate. Then, it is determined whether or not the current value of the ozone generation power consumption unit has exceeded the initial value of the ozone generation power consumption unit by a predetermined allowable value, and as a result of this determination, the current value of the ozone generation power consumption unit Indicates that the capacity of ozone generating equipment has risen above the permissible value than the initial value, it is possible to notify that the capacity of ozone generating equipment has decreased. As a result, it is possible to provide a method for diagnosing ozone generating equipment, which can prevent abnormal stoppage of equipment and thus improve the operating rate.

According to the invention of claim 2, claim 1
As a result of the judgment, when the current value of the basic unit of electric power for ozone generation does not rise above the permissible value above the initial value, the rate of change in the ozonized air temperature and the rate of change in the circulating cooling water return temperature in the ozone generating equipment When any one or both of the calculated change rates exceeds the permissible change rate, it is possible to give notice of an abnormality in the ozone generating facility. It is possible to provide a method for diagnosing ozone generating equipment that can detect a sign of an abnormality even when is not detected, and can more effectively contribute to prevention of abnormal stop.

Further, according to the invention of claim 3, during the initial operation of the ozone generating equipment, discharge power for ozone generation in the ozone generating equipment, ozone concentration of ozonized air, ozonized air flow rate and circulation. Based on the cooling water return temperature, the dependency of the circulating cooling water return temperature on the initial value of the ozone generation power intensity that indicates the discharge power required to generate a standard amount of ozone is set, and when the ozone generating equipment is currently operating, Based on the discharge power for ozone generation, ozone concentration and the flow rate of ozonized air, calculate the current value of the basic unit of power for ozone generation, and at the time of the current operation of the ozone generation equipment, the current circulating cooling water return temperature and its dependency. Based on the settings of
The initial value of the basic unit of ozone-generated power corresponding to the current return temperature of the circulating cooling water is calculated, and whether the current value of the basic unit of ozone-generated power has risen by more than a predetermined allowable value from the calculated initial value. If the result of this determination is that the current value of the unit power consumption of ozone generation has risen by more than the permissible value than the obtained initial value, the decrease in capacity of ozone generation equipment is notified. In addition to the effect of item 1, the value of the ozone generation intensity in the initial stage of operation was calculated in correspondence with the current circulating cooling water return temperature. Therefore, due to seasonal changes, circulation cooling between the initial operating time and the current operating temperature Even if the water return temperature is different, it is possible to provide a method for diagnosing ozone generating equipment that can more accurately detect whether or not the capacity of the equipment has deteriorated.

According to the invention of claim 4, claim 3
As a result of the determination, when the current value of the basic unit of ozone generation power does not exceed the required initial value by more than the allowable value, the rate of change of the ozonized air temperature and the rate of change of the circulating cooling water return temperature are In addition to the effect of claim 3, since it is possible to give notice of abnormality of ozone generating equipment when either one or both of the calculated change rates exceed the applicable allowable change rate, It is possible to provide a method for diagnosing ozone generating equipment that can achieve the same effects as those of 2.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration in which an ozone equipment diagnostic apparatus according to a first embodiment of the present invention is applied to ozone generating equipment.

FIG. 2 is a flowchart for explaining the operation in the same embodiment,

FIG. 3 is a block diagram showing a configuration in which an ozone equipment diagnostic apparatus according to a second embodiment of the present invention is applied to ozone generation equipment,

FIG. 4 is a flow chart for explaining the operation of the embodiment.

FIG. 5 is a diagram showing the circulating cooling water return temperature dependence of the unit power of ozone generation in the example.

FIG. 6 is a block diagram showing a configuration of a conventional ozone generating facility.

[Explanation of symbols]

21 ... Ozone equipment diagnostic device, 22 ... Display part, Qm ... Ozonized air flow rate, tO3 ... Ozonized air temperature, P ... Ozonized air pressure, C ... Ozone concentration, O3 ... Ozone generation amount, W ...
Discharge power, UW ... Ozone generation power consumption unit (current value), U
W0 ... Ozone-generating power intensity (initial value), tw ... Circulating cooling water return temperature.

Claims (4)

[Claims] 1. A method for diagnosing ozone generating equipment for diagnosing the state of ozone generating equipment for generating ozone by discharging, comprising: based on the discharge power, the ozone concentration and the ozonized air flow rate when the ozone generating equipment is in operation. A step of calculating a current value of the ozone generating power consumption unit, and whether or not the current value of the ozone generating power consumption unit exceeds a predetermined allowable value from the initial value of the ozone generation power consumption unit. A step of making a decision, and as a result of this decision, indicating that the present value of the unit power of ozone generation exceeds the permissible value by more than the initial value, and informs that the capacity of the ozone generating equipment has deteriorated. A method for diagnosing ozone generating equipment, comprising: 2. The ozone generating facility diagnosis method according to claim 1, wherein, as a result of the determination, it is indicated that the present value of the ozone generating power consumption rate does not exceed the initial value and exceeds the allowable value. A step of calculating the rate of change of the ozonized air temperature and the rate of change of the circulating cooling water return temperature in the ozone generating facility, and one or both of the calculated rate of change, the allowable rate of change corresponding to A method of diagnosing ozone generating equipment, comprising the step of giving a warning when the ozone generating equipment is abnormal. 3. A method for diagnosing ozone generating equipment for diagnosing the state of ozone generating equipment for generating ozone by discharging, comprising: discharge power for generating ozone in the ozone generating equipment when the ozone generating equipment is initially operating; Of the circulating cooling water return temperature at the initial value of the ozone generation power intensity showing the discharge power required to generate the reference amount of ozone, based on the ozone concentration of the converted air, the ozonized air flow rate and the circulating cooling water return temperature. A step of setting a dependency, and at the time of the present operation of the ozone generating equipment, a current value of the ozone generating power consumption unit is calculated based on a discharge power amount for ozone generation, an ozone concentration, and an ozonized air flow rate. And the current operation of the ozone generating equipment, based on the current circulating cooling water return temperature and the setting contents of the dependency, A step of obtaining an initial value of the ozone generating power consumption unit corresponding to the circulating cooling water return temperature, and whether or not the current value of the ozone generating power consumption unit has exceeded a predetermined permissible value higher than the obtained initial value. And the result of this determination is that when the present value of the unit power of ozone generation exceeds the permissible value above the obtained initial value, the capacity of the ozone generating facility is degraded. The method for diagnosing ozone generating equipment, comprising: 4. The method for diagnosing ozone generating equipment according to claim 3, wherein, as a result of the determination, the current value of the ozone generating power intensity does not rise above the obtained initial value beyond the allowable value. , The step of calculating the change rate of the ozonized air temperature and the change rate of the circulating cooling water return temperature, and one or both of the calculated change rates exceeds the permissible change rate. The method for diagnosing ozone generating equipment, comprising the step of giving advance notice of abnormality of the ozone generating equipment.