JPH08215538A - Method for removing halogen-containing gas - Google Patents
Method for removing halogen-containing gasInfo
- Publication number
- JPH08215538A JPH08215538A JP7029741A JP2974195A JPH08215538A JP H08215538 A JPH08215538 A JP H08215538A JP 7029741 A JP7029741 A JP 7029741A JP 2974195 A JP2974195 A JP 2974195A JP H08215538 A JPH08215538 A JP H08215538A
- Authority
- JP
- Japan
- Prior art keywords
- halogen
- weight
- parts
- gas
- koh
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、毒性のあるハロゲン系
ガスを、固体アルカリ化合物と効率よく反応させ固体ハ
ロゲン化物として固定化することにより、安全に除去す
るハロゲン系ガスの除去法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for safely removing a halogen-containing gas by efficiently reacting a toxic halogen-containing gas with a solid alkali compound and immobilizing it as a solid halide.
【０００２】[0002]
【従来技術】ハロゲン系ガスを化学的に分類すると、単
体としてはＦ2 、Ｃｌ2 、Ｂｒ2 、インターハロゲンと
してはＣｌＦ3 、ＢｒＦ3 、ＢｒＦ5 がある。また、ハ
ロゲン化金属ガスとしてもＳｉＦ4 をはじめ多く存在す
る。ハロゲン系ガスは、ハロゲン原子の持つ高い反応性
を特徴とし、半導体製造用をはじめ化学工業分野におい
て多くの用途がある。それらを使用した場合、その反応
物としても多くのハロゲン系ガスを生成する。これらの
ハロゲン系ガスは高い反応性を有するものが多く、危険
性および毒性の強いものが多い。そのため、これらのハ
ロゲン系ガスをそのまま大気中に放出することはできな
い。2. Description of the Related Art Chemically classifying halogen-based gases includes F 2 , Cl 2 and Br 2 as simple substances and ClF 3 , BrF 3 and BrF 5 as interhalogens. In addition, there are many metal halide gases such as SiF 4 . Halogen-based gas is characterized by the high reactivity of halogen atoms and has many applications in the chemical industry including semiconductor manufacturing. When they are used, a large amount of halogen-based gas is produced as a reaction product. Many of these halogen-based gases are highly reactive and highly dangerous and highly toxic. Therefore, these halogen-based gases cannot be released into the atmosphere as they are.
【０００３】従来は、これらハロゲン系ガスをアルカリ
スクラバーにより湿式方式で除去を行っていた。この方
式の多くは、高い塔の中にガスを導入し上方からアルカ
リ水を噴射させ接触させることによりハロゲン系ガスを
反応除去するものである。アルカリ水は除去可能であれ
ば循環再使用する場合や逐次一部抜き出し排出を行いア
ルカリ水を追加する場合がある。Conventionally, these halogen-based gases have been removed by an alkali scrubber by a wet method. In most of these systems, a halogen-based gas is reacted and removed by introducing a gas into a tall tower and injecting alkaline water from above to bring them into contact with each other. If the alkaline water can be removed, it may be reused in a circulating manner, or it may be sequentially withdrawn and discharged to add the alkaline water.
【０００４】[0004]
【発明が解決しようとする問題点】上記従来技術では、
ガス除去装置が大型化し、スケール除去の必要等の多く
の問題があった。一方、乾式除去方法としては、ソーダ
石灰や活性アルミナを充填した固体層にハロゲン系ガス
を通して除去する方法があるが、除去量が少ないといっ
た問題がある。最近では活性炭等の吸着薬剤による小型
のハロゲン系ガスの除去装置が出てきているが、それら
においては吸着除去薬剤の廃棄処理が困難等の問題があ
る。そのため、ガス除去装置が小型で除去量が多く使用
済みの除去剤の廃棄の容易なハロゲン系ガス除去法の開
発が待たれていた。[Problems to be Solved by the Invention] In the above prior art,
There have been many problems such as the need for scale removal as the gas removal device has become larger. On the other hand, as a dry removal method, there is a method in which a halogen-based gas is passed through a solid layer filled with soda lime or activated alumina, but the removal amount is small. Recently, small-sized halogen-based gas removing devices using an adsorbing agent such as activated carbon have come out, but these have a problem that disposal processing of the adsorbing and removing agent is difficult. Therefore, the development of a halogen-based gas removal method in which the gas removal device is small and the amount of removal is large and the used removing agent can be easily discarded has been awaited.
【０００５】[0005]
【問題点を解決するための具体的手段】本発明は反応性
の高いハロゲン系ガスを固体アルカリ化合物と反応さ
せ、効率よく除去することを特徴とするハロゲン系ガス
の除去法を提供するものである。本発明者らは、ソーダ
石灰（水酸化カルシウムおよび水酸化ナトリウムの混合
物）と比べ、水酸化カルシウムに水酸化カリウムを加え
ることにより、ハロゲン系ガスを効率よく反応させ除去
量を増大させることを見い出し本発明に到着したもので
ある。The present invention provides a method for removing a halogen-containing gas, which is characterized in that a highly reactive halogen-containing gas is reacted with a solid alkali compound to efficiently remove the halogen-containing gas. is there. The present inventors have found that by adding potassium hydroxide to calcium hydroxide as compared with soda lime (a mixture of calcium hydroxide and sodium hydroxide), halogen-based gas is efficiently reacted to increase the removal amount. The present invention has arrived.
【０００６】すなわちハロゲン系ガスを固体アルカリ化
合物で除去する場合、ハロゲン系ガスの種類に応じて固
体アルカリ化合物の組成を、詳細には水酸化カルシウム
（９５重量部）をベースとして水酸化カリウムを０．５
〜１５重量部の範囲で混合し使用する。最適には、０．
５〜５重量部範囲が好ましい。これによりハロゲン系ガ
スを乾式で効率よく反応させ除去量を増大させることが
できるため、ガス除去装置が小型で除去量の多いハロゲ
ン系ガス除去法が実現できる。また、反応メカニズムが
吸着ではなく、固体アルカリ化合物との不可逆反応であ
るため使用済みの除去剤の廃棄が安全であるといった特
徴をもつ。That is, when the halogen-based gas is removed with a solid alkali compound, the composition of the solid alkali compound depends on the kind of the halogen-based gas, specifically, calcium hydroxide (95 parts by weight) is used as a base and potassium hydroxide is 0%. .5
The mixture is used in the range of 15 to 15 parts by weight. Optimally, 0.
A range of 5 to 5 parts by weight is preferable. As a result, the halogen-based gas can be efficiently reacted in a dry manner to increase the removal amount, so that a halogen-based gas removal method with a small gas removal device and a large removal amount can be realized. In addition, since the reaction mechanism is not adsorption but an irreversible reaction with a solid alkali compound, it is safe to dispose of the used removing agent.
【０００７】[0007]
【実施例】以下実施例を挙げ、本発明を詳述するが係る
実施例に限定されるものではない。The present invention will be described in detail below with reference to examples, but the invention is not limited to the examples.
【０００８】実施例１〜１４ ハロゲン系ガスを窒素ガスで１０％の濃度に希釈したガ
スを５〜１５メッシュの粒状の固体アルカリ化合物１Ｋ
ｇを充填した内径２．５ｃｍ、長さ１ｍの固定床式縦型
反応器上部より、１００ｃｃ／分で室温、大気圧下で供
給し除去した。除去後のガスをＮＨ4 ＯＨ＝１％の希釈
水に通し、フッ素、塩素、臭素といったハロゲンを捕捉
し、イオン電極法により定量分析した。いずれのハロゲ
ンにおいてもガス中換算でその濃度が１ｐｐｍ以上で除
去の終点とし除去能力を求めた。各実施例の条件及び結
果を表１、表２に示した。Examples 1 to 14 Halogen-based gas diluted with nitrogen gas to a concentration of 10% is a solid alkali compound 1K in the form of particles of 5 to 15 mesh
From the upper part of the fixed bed type vertical reactor having an inner diameter of 2.5 cm and a length of 1 m filled with g, 100 g / min was supplied at room temperature under atmospheric pressure to remove the same. The removed gas was passed through diluted water of NH 4 OH = 1% to capture halogens such as fluorine, chlorine and bromine, and quantitatively analyzed by an ion electrode method. For any halogen, the concentration was 1 ppm or more in terms of gas, and the removal capacity was determined as the end point of removal. The conditions and results of each example are shown in Tables 1 and 2.
【０００９】[0009]
【表１】 [Table 1]
【００１０】[0010]
【表２】 [Table 2]
【００１１】実施例１−１〜１−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＦ2 ガスを処理した
場合、１−１のソーダライム組成と比較して１−２のよ
うにＫＯＨを加えることにより処理能力は増大する。さ
らに１−３のようにＫＯＨの割合を５重量部と高くする
ことにより処理能力は更に増大する。As in Examples 1-1 to 1-3, when the solid alkaline composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed within a range of 5 parts by weight, and F 2 gas is treated. The throughput is increased by adding KOH as in 1-2 as compared to 1-1 soda lime composition. Further, by increasing the proportion of KOH to 5 parts by weight like 1-3, the processing capacity is further increased.
【００１２】実施例２−１〜２−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＣｌ2 ガスを処理し
た場合、２−１のソーダライム組成と比較して２−２の
ようにＫＯＨを加えることにより処理能力は増大する。
さらに２−３のようにＫＯＨの割合を５重量部と高くす
ることにより処理能力は更に増大する。When the solid alkali composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed in the range of 5 parts by weight as in Examples 2-1 to 2-3, and Cl 2 gas is treated. The throughput is increased by adding KOH as in 2-2 compared to the soda lime composition of 2-1.
Further, by increasing the proportion of KOH to 5 parts by weight as in 2-3, the processing capacity is further increased.
【００１３】実施例３−１〜３−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＢｒ2 ガスを処理し
た場合、３−１のソーダライム組成と比較して３−２の
ようにＫＯＨを加えることにより処理能力は増大する。
さらに３−３のようにＫＯＨの割合を５重量部と高くす
ることにより処理能力は更に増大する。As in Examples 3-1 to 3-3, when the solid alkaline composition is Ca (OH) 2 (95 parts by weight) and KOH is changed within the range of 5 parts by weight, and the Br 2 gas is treated. The throughput is increased by adding KOH as in 3-2 compared to the soda lime composition of 3-1.
Further, by increasing the proportion of KOH to 5 parts by weight like 3-3, the processing capacity is further increased.
【００１４】実施例４−１〜４−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＨＦガスを処理した
場合、４−１のソーダライム組成と比較して４−２のよ
うにＫＯＨを加えることにより処理能力は増大する。さ
らに４−３のようにＫＯＨの割合を５重量部と高くする
ことにより処理能力は更に増大する。As in Examples 4-1 to 4-3, when HF gas is treated by changing the solid alkali composition to Ca (OH) 2 (95 parts by weight) in the range of 5 parts by weight of KOH, The throughput is increased by adding KOH as in 4-2 compared to the soda lime composition of 4-1. Further, by increasing the proportion of KOH to 5 parts by weight like 4-3, the processing capacity is further increased.
【００１５】実施例５−１〜５−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＣｌＦ3 ガスを処理
した場合、５−１のソーダライム組成と比較して５−２
のようにＫＯＨを加えることにより処理能力は増大す
る。さらに５−３のようにＫＯＨの割合を５重量部と高
くすることにより処理能力は更に増大する。As in Examples 5-1 to 5-3, when the solid alkali composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed within a range of 5 parts by weight, and ClF 3 gas is treated. 5-2 compared to the soda lime composition of 5-1
The throughput is increased by adding KOH. Further, by increasing the ratio of KOH to 5 parts by weight like 5-3, the processing capacity is further increased.
【００１６】実施例６−１〜６−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＳｉＦ4 ガスを処理
した場合、６−１のソーダライム組成と比較して６−２
のようにＫＯＨを加えることにより処理能力は増大す
る。さらに６−３のようにＫＯＨの割合を５重量部と高
くすることにより処理能力は更に増大する。As in Examples 6-1 to 6-3, when the solid alkali composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed in the range of 5 parts by weight, and SiF 4 gas is treated. , 6-2 compared to the soda lime composition of 6-1
The throughput is increased by adding KOH. Further, by increasing the KOH ratio to 5 parts by weight like 6-3, the processing capacity is further increased.
【００１７】実施例７−１〜７−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＢｒＦ3 ガスを処理
した場合、７−１のソーダライム組成と比較して７−２
のようにＫＯＨを加えることにより処理能力は増大す
る。さらに７−３のようにＫＯＨの割合を５重量部と高
くすることにより処理能力は更に増大する。As in Examples 7-1 to 7-3, when the solid alkali composition is Ca (OH) 2 (95 parts by weight) and KOH is changed within the range of 5 parts by weight, and BrF 3 gas is treated. , 7-2 compared to the soda lime composition of 7-1
The throughput is increased by adding KOH. Further, by increasing the proportion of KOH to 5 parts by weight like 7-3, the processing capacity is further increased.
【００１８】実施例８−１〜８−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＢｒＦ5 ガスを処理
した場合、８−１のソーダライム組成と比較して８−２
のようにＫＯＨを加えることにより処理能力は増大す
る。さらに８−３のようにＫＯＨの割合を５重量部と高
くすることにより処理能力は更に増大する。As in Examples 8-1 to 8-3, when the solid alkaline composition is Ca (OH) 2 (95 parts by weight) and KOH is changed within the range of 5 parts by weight, and BrF 5 gas is treated. , 8-1 compared to 8-1 soda lime composition
The throughput is increased by adding KOH. Further, by increasing the proportion of KOH to 5 parts by weight like 8-3, the processing capacity is further increased.
【００１９】実施例９−１〜９−３のように、固体アル
カリ組成をＣａ（ＯＨ)2（９５重量部）をベースとして
ＫＯＨを５重量部の範囲で変化させＷＦ6 ガスを処理し
た場合、９−１のソーダライム組成と比較して９−２の
ようにＫＯＨを加えることにより処理能力は増大する。
さらに９−３のようにＫＯＨの割合を５重量部と高くす
ることにより処理能力は更に増大する。As in Examples 9-1 to 9-3, when the solid alkali composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed in the range of 5 parts by weight, and WF 6 gas is treated. , 9-1 compared to the soda lime composition of 9-2 increases the throughput by adding KOH as in 9-2.
Further, by increasing the proportion of KOH to 5 parts by weight like 9-3, the processing capacity is further increased.
【００２０】実施例１０−１〜１０−３のように、固体
アルカリ組成をＣａ（ＯＨ)2（９５重量部）をベースと
してＫＯＨを５重量部の範囲で変化させＴｉＦ4 ガスを
処理した場合、１０−１のソーダライム組成と比較して
１０−２のようにＫＯＨを加えることにより処理能力は
増大する。さらに１０−３のようにＫＯＨの割合を５重
量部と高くすることにより処理能力は更に増大する。As in Examples 10-1 to 10-3, when the solid alkaline composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed within a range of 5 parts by weight, TiF 4 gas is treated. The throughput is increased by adding KOH as in 10-2 compared to the soda lime composition of 10-1. Further, by increasing the KOH ratio to 5 parts by weight such as 10-3, the processing capacity is further increased.
【００２１】実施例１１−１〜１１−３のように、固体
アルカリ組成をＣａ（ＯＨ)2（９５重量部）をベースと
してＫＯＨを５重量部の範囲で変化させＢＦ3 ガスを処
理した場合、１１−１のソーダライム組成と比較して１
１−２のようにＫＯＨを加えることにより処理能力は増
大する。さらに１１−３のようにＫＯＨの割合を５重量
部と高くすることにより処理能力は更に増大する。As in Examples 11-1 to 11-3, when the solid alkali composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed within a range of 5 parts by weight, and BF 3 gas is treated. , 1 in comparison with the soda lime composition of 11-1
The throughput is increased by adding KOH as in 1-2. Further, by increasing the proportion of KOH to 5 parts by weight like 11-3, the processing capacity is further increased.
【００２２】実施例１２−１〜１２−３のように、固体
アルカリ組成をＣａ（ＯＨ)2（９５重量部）をベースと
してＫＯＨを５重量部の範囲で変化させＭｏＦ6 ガスを
処理した場合、１２−１のソーダライム組成と比較して
１２−２のようにＫＯＨを加えることにより処理能力は
増大する。さらに１２−３のようにＫＯＨの割合を５重
量部と高くすることにより処理能力は更に増大する。As in Examples 12-1 to 12-3, when MoF 6 gas was treated by changing the solid alkali composition based on Ca (OH) 2 (95 parts by weight) in the range of 5 parts by weight of KOH. , 12-1 compared to the soda lime composition, 12-2 increases the throughput by adding KOH as in 12-2. Further, by increasing the proportion of KOH to 5 parts by weight like 12-3, the processing capacity is further increased.
【００２３】実施例１３−１〜１３−３のように、固体
アルカリ組成をＣａ（ＯＨ)2（９５重量部）をベースと
してＫＯＨを５重量部の範囲で変化させＨＣｌガスを処
理した場合、１３−１のソーダライム組成と比較して１
３−２のようにＫＯＨを加えることにより処理能力は増
大する。さらに１３−３のようにＫＯＨの割合を５重量
部と高くすることにより処理能力は更に増大する。As in Examples 13-1 to 13-3, when the solid alkaline composition was treated with HCl gas while changing KOH within the range of 5 parts by weight based on Ca (OH) 2 (95 parts by weight), 1 compared to 13-1 soda lime composition
The throughput is increased by adding KOH as in 3-2. Further, by increasing the proportion of KOH to 5 parts by weight like 13-3, the processing capacity is further increased.
【００２４】実施例１４−１〜１４−３のように、固体
アルカリ組成をＣａ（ＯＨ)2（９５重量部）をベースと
してＫＯＨを５重量部の範囲で変化させＳｉＣｌ4 ガス
を処理した場合、１４−１のソーダライム組成と比較し
て１４−２のようにＫＯＨを加えることにより処理能力
は増大する。さらに１４−３のようにＫＯＨの割合を５
重量部と高くすることにより処理能力は更に増大する。As in Examples 14-1 to 14-3, when the solid alkali composition is Ca (OH) 2 (95 parts by weight) as a base and KOH is changed in the range of 5 parts by weight, and SiCl 4 gas is treated. , 14-1 compared with the soda lime composition of 14-1 increases the throughput by adding KOH as in 14-2. Furthermore, the ratio of KOH is 5 like 14-3.
By increasing the weight to be higher, the processing capacity is further increased.
【００２５】[0025]
【発明の効果】以上詳述したように、本発明によれば反
応性の高いハロゲン系ガスを適切な組成の固体アルカリ
化合物と反応させ、効率よく除去することをことができ
る。As described in detail above, according to the present invention, a highly reactive halogen-based gas can be reacted with a solid alkali compound having an appropriate composition to be efficiently removed.
Claims (2)
ス）を水酸化カルシウムおよび水酸化カリウムの混合物
と反応させ、固体ハロゲン化物として固定化させること
を特徴とするハロゲン系ガスの除去法。1. A method for removing a halogen-containing gas, which comprises reacting a gas containing halogen (hereinafter referred to as a halogen-based gas) with a mixture of calcium hydroxide and potassium hydroxide to immobilize it as a solid halide.
ｒ2 、ＨＦ、ＣｌＦ3 、ＳｉＦ4 、ＢｒＦ3 、Ｂｒ
Ｆ5 、ＷＦ6 、ＴｉＦ4 、ＢＦ3 、ＭｏＦ6 、ＨＣｌ、
ＳｉＣｌ4 より選択される１種または２種以上であるこ
とを特徴とする特許請求範囲第１項記載のハロゲン系ガ
スの除去法。2. The halogen-based gas is F 2 , Cl 2 , or B.
r 2 , HF, ClF 3 , SiF 4 , BrF 3 , Br
F 5 , WF 6 , TiF 4 , BF 3 , MoF 6 , HCl,
The method for removing a halogen-based gas according to claim 1, characterized in that it is one or more selected from SiCl 4 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7029741A JPH08215538A (en) | 1995-02-17 | 1995-02-17 | Method for removing halogen-containing gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7029741A JPH08215538A (en) | 1995-02-17 | 1995-02-17 | Method for removing halogen-containing gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08215538A true JPH08215538A (en) | 1996-08-27 |
Family
ID=12284536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7029741A Pending JPH08215538A (en) | 1995-02-17 | 1995-02-17 | Method for removing halogen-containing gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08215538A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0771579A1 (en) * | 1995-10-30 | 1997-05-07 | Central Glass Company, Limited | Method for decomposing halide-containing gas |
| EP1087906A1 (en) * | 1998-04-09 | 2001-04-04 | UHP Materials, Inc. | Preparation and purification of diborane |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| WO2020129726A1 (en) | 2018-12-21 | 2020-06-25 | 昭和電工株式会社 | Method for removing halogen fluoride, quantitative analysis method for gas component contained in halogen fluoride mixed gas, and quantitative analyzer |
-
1995
- 1995-02-17 JP JP7029741A patent/JPH08215538A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0771579A1 (en) * | 1995-10-30 | 1997-05-07 | Central Glass Company, Limited | Method for decomposing halide-containing gas |
| EP1087906A1 (en) * | 1998-04-09 | 2001-04-04 | UHP Materials, Inc. | Preparation and purification of diborane |
| EP1087906A4 (en) * | 1998-04-09 | 2005-11-09 | Uhp Materials Inc | Preparation and purification of diborane |
| KR100731836B1 (en) * | 1998-04-09 | 2007-06-25 | 허니웰 인터내셔널 인코포레이티드 | Preparation and purification of diborane |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| WO2020129726A1 (en) | 2018-12-21 | 2020-06-25 | 昭和電工株式会社 | Method for removing halogen fluoride, quantitative analysis method for gas component contained in halogen fluoride mixed gas, and quantitative analyzer |
| KR20210087083A (en) | 2018-12-21 | 2021-07-09 | 쇼와 덴코 가부시키가이샤 | Halogen Fluoride Removal Method and Quantitative Analysis Method and Quantitative Analysis Apparatus for Gas Components Contained in Halogen Fluoride Mixed Gas |
| CN113164862A (en) * | 2018-12-21 | 2021-07-23 | 昭和电工株式会社 | Method for removing halogen fluoride, method for quantitatively analyzing gas-containing component in halogen fluoride mixed gas, and quantitative analyzer |
| US11779877B2 (en) | 2018-12-21 | 2023-10-10 | Resonac Corporation | Method for removing halogen fluoride, quantitative analysis method for gas component contained in halogen fluoride mixed gas, and quantitative analyzer |
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